CN109720374B - Sputtering machine track testing device and method - Google Patents
Sputtering machine track testing device and method Download PDFInfo
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- CN109720374B CN109720374B CN201811600509.4A CN201811600509A CN109720374B CN 109720374 B CN109720374 B CN 109720374B CN 201811600509 A CN201811600509 A CN 201811600509A CN 109720374 B CN109720374 B CN 109720374B
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Abstract
The invention discloses a track testing device of a sputtering machine, which comprises a rack, wherein a testing platform is arranged on the rack; the driving mechanism is arranged on the test platform and is configured to drive the sputter track to move in the forward direction and the reverse direction; the programmable logic controller is arranged on the frame and is connected with the driving mechanism; the power supply is arranged on the frame and connected with the programmable logic controller. A method of testing, comprising S1: arranging a sputter track to be tested on a test platform of the frame; s2: switching on a power supply, and driving the mechanism to return to the original point; s3: the driving mechanism drives the sputtering machine track to move in the forward direction, and the forward rotation smoothness of the sputtering machine track is tested; s4: the driving mechanism drives the sputtering machine track to reversely run, and the reverse smoothness of the sputtering machine track is tested. The invention detects the smoothness of the track before installation, can ensure the stability of the machine after the track is installed, reduces the shutdown times and improves the productivity of the machine.
Description
Technical Field
The invention relates to the technical field of sputtering machines, in particular to a sputtering machine track testing device and a testing method.
Background
The track of the sputtering machine needs to be maintained regularly, the assembly process of the track of the sputtering machine is complex, the maintenance effect of the track can be judged only after the track is installed on the sputtering machine, and the running smoothness of the track cannot be seen from the running process of the track after the track is installed on the sputtering machine. If the maintenance fails, the rail needs to be detached from the sputtering machine for re-inspection and re-assembly, and the stability of the rail after each inspection cannot be ensured, so that the machine stops, which wastes production time.
Disclosure of Invention
In view of the above technical deficiencies, the present invention provides a sputter track testing device and a sputter track testing method, which can detect the smoothness of a track before installation, ensure the stability of a machine after installation of the track, reduce the number of times of shutdown, and improve the productivity of the machine.
The invention aims to realize the technical scheme that the sputtering machine track testing device is used for detecting the running smoothness of the sputtering machine track, and is characterized in that: comprises that
The test device comprises a rack, wherein a test platform is arranged on the rack;
a drive mechanism mounted on the test platform, the drive mechanism configured to drive a sputter track in forward and reverse directions;
the programmable logic controller is arranged on the rack and is connected with the driving mechanism; and
the power supply is arranged on the rack and connected with the programmable logic controller.
Furthermore, the test platform also comprises a limiting piece used for limiting the sputtering machine track on the test platform, and the limiting piece is fixed on the test platform.
Furthermore, the limiting part comprises a transverse limiting block and a longitudinal limiting block, the transverse limiting block and the longitudinal limiting block are both fixed on the test platform, and the transverse limiting block and the longitudinal limiting block are perpendicular to each other.
Further, the driving mechanism comprises power equipment and a transmission part, the power equipment is connected with the transmission part and can drive the transmission part, and the transmission part is connected with the sputtering machine track.
Furthermore, the power equipment is a servo motor, the transmission part is a magnetic transmission coupler, and the servo motor drives the sputter to orbit through the magnetic transmission coupler.
Further, the programmable logic controller is connected with the servo motor through a driver.
Further, a stop button, a forward rotation button and a reverse rotation button are mounted on the test platform and are respectively connected with the servo motor.
A testing method adopting a sputtering machine track testing device comprises the following steps:
s1: arranging a sputter track to be tested on the test platform of the rack;
s2: switching on a power supply, and driving the mechanism to return to the original point;
s3: the driving mechanism drives the sputtering machine track to move in the forward direction, and the forward rotation smoothness of the sputtering machine track is tested;
s4: the driving mechanism drives the sputtering machine track to reversely run, and the reverse smoothness of the sputtering machine track is tested.
Further, the step S3 includes:
s31: setting test parameters through a programmable logic controller, wherein the test parameters comprise acceleration, deceleration, target frequency, output pulse number and starting frequency;
s32: the driving mechanism drives the sputtering machine track to move forwards according to the set testing parameters, and the forward rotation smoothness of the sputtering machine track is tested.
Further, the step S4 includes:
s41: setting test parameters through a programmable logic controller, wherein the test parameters comprise acceleration, deceleration, target frequency, output pulse number and starting frequency;
s42: the driving mechanism drives the sputtering machine track to reversely run according to the set testing parameters, and the reverse rotation smoothness of the sputtering machine track is tested.
Due to the adoption of the technical scheme, the invention has the beneficial effects that: the testing device provided by the invention can be used for testing the rail outside the machine, after maintenance, the rail is tested on the testing device smoothly, and the rail is arranged on the sputtering machine after the rail is qualified, so that the stability of the machine is ensured.
Additional advantages, objects, and features of the invention will be set forth in part in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention may be realized and attained by the means of the instrumentalities and combinations particularly pointed out hereinafter.
Drawings
The drawings of the present invention are described below.
FIG. 1 is a schematic top view of a sputter track testing apparatus.
Fig. 2 is a schematic front view of the structure of fig. 1.
Fig. 3 is a left side view of the structure of fig. 1.
In the figure: 1. a frame; 2. a test platform; 3. a limiting member; 301. a transverse limiting block; 302. a longitudinal limiting block; 4. a programmable logic controller; 5. a power supply; 6. a servo motor; 7. a magnetic transmission coupling; 8. a driver; 9. a stop button; 10. a forward rotation button; 11. a reverse button; 12. an air switch; 13. a foot rest; 14. a wire slot; 15. a sputter track.
Detailed Description
The invention is further illustrated by the following figures and examples.
As shown in fig. 1 to fig. 3, the invention discloses a sputter track testing device for detecting the running smoothness of a sputter track 15, comprising a frame 1, a driving mechanism, a programmable logic controller 4 and a power supply 5; the frame 1 is provided with a test platform 2.
A drive mechanism is mounted on the test platform 2 and is configured to drive the sputter track 15 in forward and reverse directions.
The driving mechanism comprises a power device and a transmission part, the power device is connected with the transmission part and can drive the transmission part, and the transmission part is connected with the sputtering machine track 15, so that the power device can drive the sputtering machine track 15.
The power equipment is a servo motor 6, the transmission part is a magnetic transmission coupler 7, and the servo motor 6 drives the sputter track 15 to run through the magnetic transmission coupler 7. The programmable logic controller 4 is connected with the servo motor 6 through a driver 8. The driver 8 can control the forward rotation and reverse rotation of the servo motor 6, so as to complete the forward rotation and reverse rotation of the sputtering machine track 15. The servo motor 6 is R7M-A10030-S1 model.
The test platform 2 is provided with a stop button 9, a forward rotation button 10 and a reverse rotation button 11, and the stop button 9, the forward rotation button 10 and the reverse rotation button 11 are respectively connected with the servo motor 6. The stop button 9 controls the servo motor 6 to stop working, the forward rotation button 10 controls the servo motor 6 to rotate in the forward direction, and the reverse rotation button 11 controls the servo motor 6 to rotate in the reverse direction.
The programmable logic controller 4 is installed on the rack 1, the programmable logic controller 4 is of a model CP1H-X40DT-D, and PLS2 instructions are arranged in the programmable logic controller 4.
The power supply 5, the power supply 5 is installed on the frame 1, the power supply 5 is connected with the programmable logic controller 4, the power supply 5 is electrically connected with an external power supply, and the power supply 5 converts 220V alternating current into 24V direct current and 12V direct current.
The power supply 5 is connected with an external power supply through an air switch 12, so that the safety of power utilization is ensured.
The sputtering machine further comprises a limiting piece 3 used for limiting the sputtering machine rail 15 on the test platform 2, and the limiting piece 3 is fixed on the test platform 2.
The limiting member 3 comprises a transverse limiting member 301 and a longitudinal limiting member 302, the transverse limiting member 301 and the longitudinal limiting member 302 are both fixed on the testing platform 2, and the transverse limiting member 301 and the longitudinal limiting member 302 are perpendicular to each other. The limiting block and the longitudinal limiting block 302 form an L shape, and the limiting block and the longitudinal limiting block 302 can be integrally formed and can also be fixed in a welding or bolt connection mode and the like. The transverse limiting block 301 limits the top end of the sputter track 15, and the longitudinal limiting block 302 limits the length direction of the sputter track 15. The limiting part 3 can prevent the sputtering machine track 15 from shaking to influence the test result.
The bottom of frame 1 is equipped with the foot rest 13, improves the stability of frame 1 to ensure the accuracy of test.
The rack 1 is provided with a wire casing 14 for accommodating a connecting wire.
A testing method adopting a sputtering machine track testing device comprises the following steps:
s1: arranging a sputter track 15 to be tested on a test platform 2 of a frame 1, and fixing the sputter track 15 to be tested on the test platform 2 through a limiting part 3; at the moment, the kilometer output end of the magnetic transmission coupler 7 is positioned in the sputter track 15;
s2: switching on a power supply, and driving the mechanism to return to the original point;
s3: testing the forward rotation smoothness: setting test parameters including acceleration, deceleration, target frequency, number of output pulses, and start frequency by PLS2 instructions of the programmable logic controller 4; the driving mechanism drives the sputter track 15 to move forward according to the set test parameters, and the forward rotation smoothness of the sputter track 15 is tested;
s4: testing the reversal smoothness: setting test parameters including acceleration, deceleration, target frequency, number of output pulses, and start frequency by PLS2 instructions of the programmable logic controller 4; the driving mechanism drives the sputter track 15 to reversely run according to the set testing parameters, and the reverse rotation smoothness of the sputter track 15 is tested.
The testing device provided by the invention can be used for testing the rail outside the machine, after maintenance, the rail is tested on the testing device smoothly, and the rail is arranged on the sputtering machine after the rail is qualified, so that the stability of the machine is ensured.
Finally, the above embodiments are only intended to illustrate the technical solutions of the present invention and not to limit the present invention, and although the present invention has been described in detail with reference to the preferred embodiments, it will be understood by those skilled in the art that modifications or equivalent substitutions may be made on the technical solutions of the present invention without departing from the spirit and scope of the technical solutions, and all of them should be covered by the claims of the present invention.
Claims (5)
1. The utility model provides a sputter track testing arrangement for detect the orbital smooth degree of operation of sputter, its characterized in that: comprises that
The test device comprises a rack, wherein a test platform is arranged on the rack;
a drive mechanism mounted on the test platform, the drive mechanism configured to drive a sputter track in forward and reverse directions;
the programmable logic controller is arranged on the rack and is connected with the driving mechanism; and
the power supply is arranged on the rack and is connected with the programmable logic controller;
the sputtering machine track limiting device further comprises a limiting piece used for limiting a sputtering machine track on the test platform, and the limiting piece is fixed on the test platform;
the limiting piece comprises a transverse limiting piece and a longitudinal limiting piece, the transverse limiting piece and the longitudinal limiting piece are both fixed on the test platform, and the transverse limiting piece and the longitudinal limiting piece are mutually perpendicular; the driving mechanism comprises power equipment and a transmission part, the power equipment is connected with the transmission part and can drive the transmission part, and the transmission part is connected with the track of the sputtering machine; the power equipment is a servo motor, the transmission part is a magnetic transmission coupler, and the servo motor drives the sputter to run along the track through the magnetic transmission coupler; and the programmable logic controller is connected with the servo motor through a driver.
2. The sputter track testing apparatus of claim 1, wherein: the test platform is provided with a stop button, a forward rotation button and a reverse rotation button, and the stop button, the forward rotation button and the reverse rotation button are respectively connected with the servo motor.
3. A method of testing a sputter track testing apparatus according to any of claims 1-2, comprising: the method comprises the following steps:
s1: arranging a sputter track to be tested on the test platform of the rack;
s2: switching on a power supply, and driving the mechanism to return to the original point;
s3: the driving mechanism drives the sputtering machine track to move in the forward direction, and the forward rotation smoothness of the sputtering machine track is tested;
s4: the driving mechanism drives the sputtering machine track to reversely run, and the reverse smoothness of the sputtering machine track is tested.
4. The test method of claim 3, wherein: the step S3 includes:
s31: setting test parameters through a programmable logic controller, wherein the test parameters comprise acceleration, deceleration, target frequency, output pulse number and starting frequency;
s32: the driving mechanism drives the sputtering machine track to move forwards according to the set testing parameters, and the forward rotation smoothness of the sputtering machine track is tested.
5. The test method of claim 4, wherein: the step S4 includes:
s41: setting test parameters through a programmable logic controller, wherein the test parameters comprise acceleration, deceleration, target frequency, output pulse number and starting frequency;
s42: the driving mechanism drives the sputtering machine track to reversely run according to the set testing parameters, and the reverse rotation smoothness of the sputtering machine track is tested.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811600509.4A CN109720374B (en) | 2018-12-26 | 2018-12-26 | Sputtering machine track testing device and method |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811600509.4A CN109720374B (en) | 2018-12-26 | 2018-12-26 | Sputtering machine track testing device and method |
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| CN109720374A CN109720374A (en) | 2019-05-07 |
| CN109720374B true CN109720374B (en) | 2021-03-02 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN200950049Y (en) * | 2006-09-13 | 2007-09-19 | 宝山钢铁股份有限公司 | Device for detecting drum convexity |
| CN103144937B (en) * | 2013-03-06 | 2015-07-08 | 西安科技大学 | System and method for intelligently monitoring belt-type conveyer for coal mine steel wire rope core |
| WO2014178399A1 (en) * | 2013-04-30 | 2014-11-06 | 伊東電機株式会社 | Roller conveyor device, controller, and mechanical device abnormality detection method |
| CN203332893U (en) * | 2013-06-05 | 2013-12-11 | 河南中烟工业有限责任公司 | PLC control belt conveyor with operating state detection device |
| CN105501886A (en) * | 2014-09-22 | 2016-04-20 | 沈阳铝镁设计研究院有限公司 | Belt conveyor slippage and fracture detection device |
| CN204096552U (en) * | 2014-09-28 | 2015-01-14 | 山东矿机集团股份有限公司 | Circular tube shaped belt conveyer torsion detecting device |
| CN105300097B (en) * | 2015-10-30 | 2017-10-31 | 中国电子科技集团公司第四十八研究所 | A kind of roller kilns roller rod detection means |
| KR101750858B1 (en) * | 2015-11-06 | 2017-07-11 | 대한민국 | System and method for detecting defect |
| CN106746507A (en) * | 2016-12-07 | 2017-05-31 | 蚌埠凯盛工程技术有限公司 | A kind of calender roller-way velocity test fixing device |
| CN208150373U (en) * | 2018-04-09 | 2018-11-27 | 广东赛纳德智能装备有限公司 | A kind of detection device of ceramics transmission roller |
| CN108759686A (en) * | 2018-08-01 | 2018-11-06 | 浙江朗奥物流科技有限公司 | A kind of roller Geometrical Parameter Testing experimental rig |
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