CN109709192B - Gas-sensitive nanomaterial based on tungsten oxide/tin oxide core-shell nanosheet structure, preparation process and application thereof - Google Patents
Gas-sensitive nanomaterial based on tungsten oxide/tin oxide core-shell nanosheet structure, preparation process and application thereof Download PDFInfo
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Abstract
The invention discloses a gas-sensitive nano material based on a tungsten oxide/tin oxide core-shell nano sheet structure, a preparation process and application thereof. According to the invention, the tungsten oxide core layer nanosheet is prepared by a simpler solvothermal method which can be synthesized in a large scale, and the tin oxide layer is synthesized by combining an atomic layer deposition technology, so that the tungsten oxide/tin oxide core-shell structure nanosheet is obtained. Compared with the existing preparation process, the method has the advantages of strong repeatability, high yield, high preparation efficiency, large-scale production and the like. The invention is constructed based onn‑nThe core-shell structure material of the heterojunction is combined with a micro electro mechanical system, the sensitivity is greatly improved when the core-shell structure material is used as a gas sensor, the response time and the recovery time are greatly reduced, and ammonia (NH) can be treated in a complex environment3) The gas has excellent selectivity, and can provide solid technical support for developing a gas sensor with high sensitivity and high stability in the field of gas monitoring.
Description
Technical Field
The invention relates to the technical field of preparation of semiconductor nanosheet materials, in particular to a gas-sensitive nanomaterial based on a tungsten oxide/tin oxide core-shell nanosheet structure, and a preparation process and application thereof.
Background
To meet the growing demand for Internet automation and intelligent Internet of things (IoT) devices, efficient and stable manufacturingLow cost, low power consumption gas sensors are an important and worthy of research. A chemical resistance type gas sensor based on a Micro Electro Mechanical System (MEMS) technology has many advantages such as low power consumption, miniaturization, and integration in various aspects such as monitoring of gas leakage, air quality, food safety, and medical diagnosis, and has attracted great research interest. In general, the sensitive material of the MEMS type gas sensor is mostly metal oxide semiconductor, such as zinc oxide (ZnO), tungsten oxide (WO)3) Iron oxide (Fe)2O3) And tin oxide (SnO)2) And the like. In which WO of different structures3Nanomaterials, including nanorods, mesopores, nanosheets, etc., have been widely used in gas sensors due to their advantages of good chemical stability, high responsivity, low cost, environmental friendliness, etc. Especially WO3The nano-sheets and nano-wires have simple synthesis process and large specific surface area, and are easy to synthesize in hydrogen sulfide (H)2S), ammonia (NH)3) And nitrogen dioxide (NO)2) The gas sensor of (2) shows excellent performance. Except for WO3Besides the shape regulation of the nano material, a great deal of research is also based on improving the gas sensing response rate and selectivity by doping and constructing a composite structure with other metal oxide semiconductors and the like. Such WO3The enhancement of the gas-sensitive property of the multi-component material is mainly due to the formation of a depletion layer at the heterojunction interface, which promotes the electron exchange.
The method for improving the gas-sensitive sensing capability by constructing different core-shell nano structures is widely concerned and researched, and has the advantages that the material characteristics of a core layer and a shell layer are combined, and a double depletion layer is constructed between the core layer and the shell layer. The core-shell nano material applied to the gas sensor reported in the literature has ZnO @ SnO2，Fe2O3@ NiO and CuO @ ZnO, and the like. In addition, possessnSnO of type semiconductor characteristics2Is one of the traditional gas sensitive materials, and is concerned about due to the characteristics of environmental friendliness, low cost, abundant resources, good biocompatibility, good thermal stability and the like. For example, echinoid SnO synthesized by a two-step hydrothermal process combined with a subsequent annealing treatment2/α-Fe2O3The hetero-composite nanostructure exhibits an extremely high response characteristic to dimethyl disulfide. SnO having the above-mentioned characteristics2The shell layer is greatly concerned in the field of gas sensing. Considering that the gas-sensitive performance of the nano core-shell material strongly depends on the thickness of the shell layer, a reasonable synthesis method capable of accurately controlling the thickness becomes a key factor for improving the performance of the gas sensor. At present, a plurality of thin film plating methods are applied to SnO2And preparing the shell layer film by a hydrothermal method, a soaking method, a spin coating method and an Atomic Layer Deposition (ALD) method. Among these methods, the ALD technique is an efficient and reliable technique for preparing a shell thin film with a precisely controllable thickness, and can still cover an extremely uniform and conformal thin layer on a high aspect ratio structure even under a low temperature condition.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide a gas-sensitive nano material based on a tungsten oxide/tin oxide core-shell nano sheet structure, a preparation process and application thereof. The invention adopts advanced atomic layer deposition technology, accurately controls the thickness of the film at the atomic level, has excellent conformal covering capability, has the advantages of strong repeatability, high yield, high preparation efficiency and the like, and is suitable for large-scale preparation of the core-shell structure WO3/SnO2The nano sheet provides a brand new idea. And the gas sensor device with extremely low power consumption is obtained by combining the micro-electromechanical system. The tungsten oxide/tin oxide core-shell nanosheet prepared by the method can realize accurate monitoring of the concentration of ammonia gas in the environment based on a gas sensor device obtained by a micro-electro-mechanical system.
In the invention, WO in core-shell nanosheets3The synthesis of the nanosheet is relatively simple, and the preparation of the tin oxide shell layer adopts the atomic layer deposition technology. The technical solution of the present invention is as follows.
The invention provides a preparation process of a gas-sensitive nano material based on a tungsten oxide/tin oxide core-shell nano sheet structure, which comprises the following specific steps:
(1) mixing 1.0-3.0 g H2WO4And 1.0-3.0 g of polyvinyl alcohol PVA dissolved in 24-60 ml of hydrogen peroxide to obtain WO3Spin coating a seed crystal layer with a solution;
(2) mixing WO3The seed crystal layer spin coating solution is uniformly spin-coated on the cleaned quartz glass substrate in a spin coating mode at the speed of 1000-;
(3) calcining the spin-coated quartz glass sheet in a muffle furnace at the temperature of 400-500 ℃ for 1-3 hours under the air condition;
(4) 3-6 ml of 0.02-0.08 mol/L H2WO4Fully dispersing and uniformly mixing the solution, 0.02-0.05 g of oxalic acid, 0.02-0.04 g of urea, 12.5-35 g of acetonitrile solution and 0.5-1.0 ml of 6.0 mol/L HCl to obtain a solvothermal growth mixed solution, and then transferring the mixed solution into a polytetrafluoroethylene lining;
(5) the quartz glass sheet obtained in the step (3) is reversely buckled in the solvent thermal growth mixed solution, and then the stainless steel sleeve is screwed and transferred to an oven with the temperature of 150-;
(6) after the solvothermal reaction is finished, cleaning and drying the obtained sample by using deionized water, and calcining for 1-3 hours at the temperature of 490-510 ℃ to prepare the crystal growing WO3A quartz plate of a nano plate;
(7) will grow with WO3Putting the quartz plate of the nano plate into a reaction cavity of an atomic layer deposition film system, and preparing SnO by adopting an atomic layer deposition technology2The method comprises the following steps of preparing a shell layer thin film, wherein the reaction temperature is set to be 180-220 ℃, selecting tetra (dimethylamino) tin TDMASn as a tin source, deionized water as an oxygen source, and setting the heating temperature of a solid tin source TDMASn to be 45-50 ℃;
(8) placing the sample prepared by the atomic layer deposition in the step (7) into a muffle furnace for calcination; and after calcining, naturally cooling to room temperature to obtain the gas-sensitive nano material with the tungsten oxide/tin oxide core-shell nano sheet structure.
In the step (2), the step of cleaning the quartz glass comprises the steps of cleaning the quartz glass by using absolute ethyl alcohol and deionized water in sequence, cleaning each ultrasonic wave for 10-15 min, and drying the quartz glass by using high-purity nitrogen.
WO obtained by the above-mentioned step (6)3The thickness of the single sheet of the nano sheet is 10-40 nm; WO3Nano meterThe wafers were grown vertically on quartz wafers.
In step (7), the growth process of each cycle comprises 0.5 s TDMASn pulse, 10 s N2(g) Purge, 0.2 s pulse of deionized water and 10 s N2(g) And (5) purging.
In the step (7), SnO is added during the process of depositing the film by applying the atomic layer deposition technology2The growth rate of the film is 0.05-0.15 nm/cycle.
In the step (8), the calcination procedure is as follows: heating to 450-550 ℃ at a heating rate of 8-12 ℃/min, and keeping the temperature for 1-3 h.
The invention also provides the gas-sensitive nanomaterial based on the tungsten oxide/tin oxide core-shell nanosheet structure, which is prepared by adopting the preparation process. Preferably, the thickness of the single piece is 20-100 nanometers, and the average thickness depends on SnO deposited by atomic layer2The thickness of the film.
The invention further provides an application of the gas-sensitive nano material based on the tungsten oxide/tin oxide core-shell nano sheet structure in the aspect of ammonia gas detection.
In the invention, before gas-sensitive performance test, the prepared tungsten oxide/tin oxide core-shell nanosheet is scraped from the quartz substrate, uniformly dispersed in deionized water, and a proper amount (0.1-0.5 g/ml) of the tungsten oxide/tin oxide core-shell nanosheet is dripped on an MEMS device with a heating function. And after the gas-sensitive material on the MEMS heating plate is completely dried at room temperature, the device is placed into a blast oven to be dried for 10-24 hours at the temperature of 30-60 ℃.
Compared with the prior art, the invention has the beneficial effects that:
1. compared with a single tungsten oxide or single tin oxide structure, the core-shell structure based on the n-n heterojunction is greatly improved in sensitivity when applied to gas sensing, greatly shortened in response time and recovery time, and more excellent in gas-sensitive performance.
2. The specific surface area of the material is effectively increased by the nano-sheet structure, and the gas-sensitive performance of the material is further improved.
3. The gas-sensitive nanomaterial with the tungsten oxide/tin oxide core-shell nanosheet structure can be used for detecting trace (ppm level) organic volatile gas, and has excellent selectivity on ammonia gas.
4. The preparation process combines the atomic layer deposition technology with the chemical solution method with simple synthesis conditions, and has the advantages of strong repeatability, high yield, high preparation efficiency, suitability for large-scale preparation and the like compared with the traditional preparation process
5. The invention combines the micro-electro-mechanical technology to greatly reduce the power consumption of the gas sensor device and the volume of the sensor device.
Drawings
Fig. 1 is a flow chart of a gas-sensitive nanomaterial preparation based on a tungsten oxide/tin oxide core-shell nanosheet structure and a gas sensor device preparation process.
Fig. 2 is a scanning electron microscope characterization diagram of the tungsten oxide/tin oxide core-shell nanosheet obtained in example 1.
Fig. 3 is a transmission electron microscope characterization diagram of the tungsten oxide/tin oxide core-shell nanosheet obtained in example 1.
Fig. 4 is a diagram of a mems gas sensor device prepared based on tungsten oxide/tin oxide core-shell nanosheets obtained in example 1.
Fig. 5 shows the sensing performance of the tungsten oxide/tin oxide core-shell nanosheet obtained in example 1 on ammonia gas with different concentrations.
Fig. 6 is a test of selectivity of the tungsten oxide/tin oxide core-shell nanosheet obtained in example 1 to ammonia gas.
Detailed Description
The invention is described in further detail below with reference to the figures and examples.
The flow block diagram of the preparation process of the gas-sensitive nanomaterial based on the tungsten oxide/tin oxide core-shell nanosheet structure is shown in fig. 1.
Example 1
A preparation process of a gas-sensitive nano material based on a tungsten oxide/tin oxide core-shell nanosheet structure comprises the following specific steps:
(1) formulation WO3Seed layer spin coating solution: 1.0 g H2WO4And 1.0 g of polyvinyl alcohol (PVA) dissolved in 40Hydrogen peroxide solution (H) in milliliters2O2) To obtain a solution A;
(2) ultrasonically washing a quartz glass substrate, and then uniformly spin-coating the solution A on the cleaned quartz glass at the speed of 1000 rpm in a spin-coating mode;
(3) calcining the spin-coated quartz glass sheet in a muffle furnace at the temperature of 500 ℃ for 3 hours under the air condition;
(4) preparation H2WO4Solution of H2WO4The concentration of the solution was 0.05M, and the solution was used as a source of W for solvothermal growth;
(5) preparing solvent thermal growth mixed solution, adding 3 ml of 0.05 mol/L H2WO4The solution, 0.02 g oxalic acid, 0.02 g urea, 12.5 g acetonitrile solution and 0.5 ml HCl (6.0M) were fully dispersed and mixed evenly, then transferred to a 25 ml polytetrafluoroethylene liner;
(6) the quartz substrate obtained after spin coating is reversely buckled in the growth solution, and then the stainless steel sleeve is screwed and transferred into an oven at 180 ℃ for reaction for 2.5 hours;
(7) slowly cleaning and drying the obtained sample by using deionized water after the solvothermal reaction is finished, and finally calcining at the high temperature of 500 ℃ for 2 hours, wherein WO is3The preparation of the nano-sheet array material is finished, the thickness of a single sheet is about 30 nanometers, the width of the single sheet is 20-80 nanometers, and the nano-sheet is obtained by growing perpendicular to a quartz substrate;
(8) will grow with WO3Putting the quartz plate of the nano plate into a reaction cavity of an atomic layer deposition film system, and preparing SnO by adopting an atomic layer deposition technology2Setting the reaction temperature to be 180 ℃, selecting tetra (dimethylamino) tin TDMASn as a tin source, using deionized water as an oxygen source, setting the heating temperature of the solid tin source TDMASn to be 45 ℃, and controlling the cycle number of ALD reaction to prepare tungsten oxide/tin oxide core-shell nanosheets with different thicknesses;
(9) placing the sample prepared by atomic layer deposition into a muffle furnace to be calcined for 2 hours at the temperature of 500 ℃ (the heating rate is 10 ℃/min); and after calcining, naturally cooling to room temperature to obtain the gas-sensitive nanomaterial with the tungsten oxide/tin oxide core-shell nanosheet structure, and controlling the ALD cycle times to be 50, 100, 200 and 300 respectively to obtain tungsten oxide/tin oxide core-shell nanosheet materials with the thicknesses of 32, 42, 60 and 81 nanometers (figure 2). When the number of ALD cycles is 300, a thickness of 81 nm is obtained, and the core-shell structure is clearly observed from the TEM (fig. 3) diagram.
In order to perform a gas-sensitive performance test, the prepared tungsten oxide/tin oxide core-shell nanosheet is scraped from the quartz substrate, uniformly dispersed in deionized water, and an appropriate amount (0.3 g/ml) of the nanosheet is dropped on the MEMS device with a heating function (fig. 4 a). Connecting the MEMS device with a circuit outside a PCB board through a wire bonding machine (fig. 4 b), and after the gas sensitive material on the MEMS heating plate is completely dried at room temperature, putting the device into a forced air oven to be dried for 24 hours at the temperature of 50 ℃ to obtain the complete gas sensor device (as shown in fig. 4 c).
ALD deposited SnO2The shell thickness has obvious regulation and control effect on the gas sensing performance of the tungsten oxide/tin oxide core-shell nanosheet, and SnO2Too thick or too thin can affect the sensing characteristics of the core-shell material. When SnO2When the thickness is about 20 nanometers, the tungsten oxide/tin oxide core-shell nanosheet has the optimal sensing characteristic for 5-50 ppm of ammonia gas when the thickness is 50-60 nanometers. The results showed that the response value to 50 ppm reached 2.55 and the resistance change rate was pure WO37.5 times of the nanosheet material. In addition, selectivity test is carried out on the tungsten oxide/tin oxide core-shell nanosheet structure, namely gas-sensitive sensing test is respectively carried out on ammonia gas, formaldehyde, acetone, toluene and hydrogen sulfide with the same concentration (15 ppm). As shown in fig. 6, the tungsten oxide/tin oxide core-shell nanosheets of the present invention exhibited excellent selectivity to ammonia gas.
The embodiments of the present invention have been described in detail in the above examples, but the present invention is not limited to the specific details in the above embodiments, and various simple modifications can be made to the technical solution of the present invention within the technical idea of the present invention, and these simple modifications are within the protective scope of the present invention.
Claims (9)
1. A preparation process of a gas-sensitive nano material based on a tungsten oxide/tin oxide core-shell nanosheet structure is characterized by comprising the following specific steps:
(1) mixing 1.0-3.0 g H2WO4And 1.0-3.0 g of polyvinyl alcohol PVA in 24-60 ml of hydrogen peroxide to obtain WO3Spin coating a seed crystal layer with a solution;
(2) WO (International patent application)3The seed crystal layer spin coating solution is uniformly spin-coated on the cleaned quartz glass substrate in a spin coating mode at the speed of 1000-;
(3) calcining the spin-coated quartz glass sheet in a muffle furnace at the temperature of 400-500 ℃ for 1-3 hours under the air condition;
(4) 3-6 ml of 0.02-0.08 mol/L H2WO4Fully dispersing and uniformly mixing the solution, 0.02-0.05 g of oxalic acid, 0.02-0.04 g of urea, 12.5-35 g of acetonitrile solution and 0.5-1.0 ml of 6.0 mol/L HCl to obtain a solvothermal growth mixed solution, and then transferring the mixed solution into a polytetrafluoroethylene lining;
(5) the quartz glass sheet obtained in the step (3) is reversely buckled in the solvent thermal growth mixed solution, and then the stainless steel sleeve is screwed and transferred to an oven at the temperature of 150-180 ℃ for reaction for 1-6 hours;
(6) after the solvothermal reaction is finished, cleaning and drying the obtained sample by using deionized water, and calcining for 1-3 hours at the temperature of 490-510 ℃ to prepare the crystal growing WO3A quartz plate of a nano plate;
(7) will grow with WO3Putting the quartz plate of the nano plate into a reaction cavity of an atomic layer deposition film system, and preparing SnO by adopting an atomic layer deposition technology2Setting the reaction temperature to be 180-220 ℃, selecting tetra (dimethylamino) tin TDMASn as a tin source, deionized water as an oxygen source, and setting the heating temperature of the solid tin source TDMASn to be 45-50 ℃;
(8) placing the sample prepared by the atomic layer deposition in the step (7) into a muffle furnace for calcination; and after calcining, naturally cooling to room temperature to obtain the gas-sensitive nano material with the tungsten oxide/tin oxide core-shell nano sheet structure.
2. The preparation process according to claim 1, wherein the step (2) of cleaning the quartz glass comprises the steps of sequentially cleaning with absolute ethyl alcohol and deionized water, respectively, performing ultrasonic cleaning for 10-15 min, and then drying with high-purity nitrogen.
3. The process according to claim 1, wherein in step (6), the WO obtained is prepared3The thickness of each nanosheet is 10-40 nm; WO3The nano-plate vertically grows on the quartz plate.
4. The process of claim 1, wherein in step (7), each cycle of growth comprises 0.5 s TDMASn pulses, 10 s N2(g) Purge, 0.2 s pulse of DI water and 10 s N2(g) And (5) purging.
5. The process according to claim 1, wherein in step (7), SnO is added during deposition of the thin film by atomic layer deposition2The growth rate of the film is 0.05-0.15 nm/cycle.
6. The process according to claim 1, wherein in step (8), the calcination procedure is: heating to 450-550 ℃ at a heating rate of 8-12 ℃/min, and keeping the temperature for 1-3 h.
7. The gas-sensitive nanomaterial based on the tungsten oxide/tin oxide core-shell nanosheet structure prepared by the preparation process of claim 1.
8. The gas-sensitive nanomaterial of claim 7, having a thickness of 20-100 nm.
9. Application of the gas-sensitive nanomaterial based on tungsten oxide/tin oxide core-shell nanosheet structure, as defined in claim 7, in detection of ammonia gas.
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009131306A1 (en) * | 2008-04-22 | 2009-10-29 | 한국이엔에쓰 주식회사 | A tungsten trioxide (wo3)-based gas sensor for sensing gaseous volatile organic compounds, and a production method therefor |
| CN105628749A (en) * | 2016-01-05 | 2016-06-01 | 天津大学 | Preparing method of high sensitivity nitrogen dioxide gas sensitive material working at low temperature |
| CN106546636A (en) * | 2016-10-27 | 2017-03-29 | 扬州大学 | Preparation method based on homotype heterojunction semiconductor nitrogen dioxide gas sensing layer |
| CN106770476A (en) * | 2015-11-23 | 2017-05-31 | 天津大学 | Heterogeneous clad structure base gas sensor and its application in nitrogen dioxide is detected in order of cupric oxide/tungsten oxide one-dimensional |
| CN107402241A (en) * | 2016-05-18 | 2017-11-28 | 天津大学 | Gas sensor based on tungsten oxide/titanium oxide core-shell nano line and preparation method thereof |
| CN107478680A (en) * | 2017-08-06 | 2017-12-15 | 深圳市益鑫智能科技有限公司 | A kind of harmful gas in vehicle detection means |
-
2018
- 2018-12-14 CN CN201811530398.4A patent/CN109709192B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2009131306A1 (en) * | 2008-04-22 | 2009-10-29 | 한국이엔에쓰 주식회사 | A tungsten trioxide (wo3)-based gas sensor for sensing gaseous volatile organic compounds, and a production method therefor |
| CN106770476A (en) * | 2015-11-23 | 2017-05-31 | 天津大学 | Heterogeneous clad structure base gas sensor and its application in nitrogen dioxide is detected in order of cupric oxide/tungsten oxide one-dimensional |
| CN105628749A (en) * | 2016-01-05 | 2016-06-01 | 天津大学 | Preparing method of high sensitivity nitrogen dioxide gas sensitive material working at low temperature |
| CN107402241A (en) * | 2016-05-18 | 2017-11-28 | 天津大学 | Gas sensor based on tungsten oxide/titanium oxide core-shell nano line and preparation method thereof |
| CN106546636A (en) * | 2016-10-27 | 2017-03-29 | 扬州大学 | Preparation method based on homotype heterojunction semiconductor nitrogen dioxide gas sensing layer |
| CN107478680A (en) * | 2017-08-06 | 2017-12-15 | 深圳市益鑫智能科技有限公司 | A kind of harmful gas in vehicle detection means |
Non-Patent Citations (3)
| Title |
|---|
| Design of WO3-SnO2 core-shell nanofibers and their enhanced gas sensing performance based on different work function;Feng Li et al;《Applied Surface Science》;20180214;第442卷;30-37 * |
| WO3-SnO2 nanosheet composites: Hydrothermal synthesis and gas sensing mechanism;Mingli Yin et al;《Journal of Alloys and Compounds》;20171115;第736卷;322-331 * |
| 新型SnO2/WO3双层薄膜NO2敏感性能研究;林伟 等;《材料科学与工艺》;20101015;第18卷(第5期);719-728 * |
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