CN109706425A - A method of graphic edge material is spread after reducing vapor deposition - Google Patents

A method of graphic edge material is spread after reducing vapor deposition Download PDF

Info

Publication number
CN109706425A
CN109706425A CN201910127408.8A CN201910127408A CN109706425A CN 109706425 A CN109706425 A CN 109706425A CN 201910127408 A CN201910127408 A CN 201910127408A CN 109706425 A CN109706425 A CN 109706425A
Authority
CN
China
Prior art keywords
sheet
vapor deposition
substrate
deposited
spread
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910127408.8A
Other languages
Chinese (zh)
Inventor
汪烨辰
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lakeside Photoelectric Technology (jiangsu) Co Ltd
Original Assignee
Lakeside Photoelectric Technology (jiangsu) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Lakeside Photoelectric Technology (jiangsu) Co Ltd filed Critical Lakeside Photoelectric Technology (jiangsu) Co Ltd
Priority to CN201910127408.8A priority Critical patent/CN109706425A/en
Publication of CN109706425A publication Critical patent/CN109706425A/en
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)

Abstract

The present invention relates to evaporation coating technique fields, the method that graphic edge material is spread after especially a kind of reduction vapor deposition, the graphics field that the needs of hollow out are deposited is set on the sheet of the high-flexibility on open mask, is spread around along the graphics field edge that the needs are deposited and plates one layer of closed isolated film.After adopting the above method, the invention has the following advantages that 1, before vapor deposition, when open mask is bonded with substrate, the graphic edge region of sheet, film is with substrate because pressure thight is bonded.2, after the metal copper film on sheet is bonded with substrate, insulated column is formed on substrate, reduces diffusion of the evaporation material on substrate, to reduce the size variation of vapor deposition figure.3, at the same time, metal copper film is because there is certain thickness, after sheet is bonded with substrate, so that sheet itself can generate slight deformation, so that the deformation that sheet is generated by heated or other reasons is reduced, to influence the size that region is deposited.

Description

A method of graphic edge material is spread after reducing vapor deposition
Technical field
The present invention relates to evaporation coating technique field, the method for graphic edge material diffusion after especially a kind of reduction vapor deposition.
Background technique
Sheet on existing open mask is that figure is deposited in acquisitions easy to process so that sheet be relatively thin flexibility very Good steel disc, because temperature is higher when evaporation material contacts mask, easily leads to sheet so that easily deformation occurs by sheet itself Deformation occurs, or leads to sheet out-of-flatness itself because sheet itself generates deformation in process, and this deformation exists The vapor deposition graphic edge region of sheet is particularly evident, so that the figure that vapor deposition obtains is greater than the figure needed.
In the prior art, the light emitting sub-pixel generation type of OLED is formed using evaporation coating method, mainly passes through metal Mask configures between the vapor deposition face of oled substrate and evaporation source, and evaporation material evaporates when passing through heating, and by metal cover Opening sub-pixel corresponding on vapor deposition face is deposited.But the method for metal cover vapor deposition, it is easy to produce shadow effect (shadow effect), that is, to the first sub-pixel be deposited when, evaporation material may be diffused into the first sub-pixel regulation It except region, that is, diffuses to second seed pixel region or the third subpixel area and causes colour mixture, influence shining for OLED Display effect.
107636191 A of Chinese invention patent application CN discloses a kind of metal cover and OLED for OLED vapor deposition Evaporation coating method, by the way that barricade is arranged at metal cover upper opening edge, barricade can reflect and stop the diffusion of evaporation material, make Evaporation material is deposited in region as defined in maximumlly staying in.
Summary of the invention
The technical problem to be solved by the invention is to provide a kind of methods that can effectively reduce evaporation material diffusion.
In order to solve the above technical problems, the method that graphic edge material is spread after a kind of reduction vapor deposition of the invention, The graphics field that the needs of hollow out are deposited is set on the sheet of the high-flexibility on open mask, is deposited along the needs Graphics field edge is spread around plates one layer of closed isolated film.
Preferably, the isolated film with a thickness of 5-10 μm.
Preferably, the width of the isolated film is 2-4mm.
Preferably, the material of the isolated film is copper.
After adopting the above method, the invention has the following advantages that
1, before vapor deposition, when open mask is bonded with substrate, the graphic edge region of sheet, film and substrate are because of pressure thight Fitting.
2, after the metal copper film on sheet is bonded with substrate, insulated column is formed on substrate, reduces evaporation material in base Diffusion on plate, to reduce the size variation of vapor deposition figure.
3, at the same time, metal copper film is because there is certain thickness, after sheet is bonded with substrate, so that sheet itself Slight deformation can be generated, so that the deformation that sheet is generated by heated or other reasons is reduced, to influence that the big of region is deposited It is small.
Detailed description of the invention
The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments.
Fig. 1 is structural schematic diagram of the present invention in the graphics field edge plating isolated film for needing to be deposited.
In figure: 1 is open exposure mask piece, and 2 be graphics field, and 3 be isolated film.
Specific embodiment
As shown in Figure 1, the method that graphic edge material is spread after a kind of reduction vapor deposition of the invention, on open mask High-flexibility sheet on (i.e. open exposure mask piece 1 on) setting hollow out the graphics field 2 that is deposited of needs, along the need 2 edge of graphics field to be deposited is spread around plates one layer of closed isolated film 3.
Preferably, the isolated film with a thickness of 5-10 μm.
Preferably, the width of the isolated film is 2-4mm.
Preferably, the material of the isolated film is copper.
1, yellow film as shown in the figure should be spread around along fringe region, and all films should keep thickness uniform.
2, film thickness is unsuitable blocked up, leads to be in contact with substrate rear sheet that biggish deformation is generated because of film.It is specific thick Degree should be determined according to total film thickness be deposited.
3, thin-film width is unsuitable wide, and wide time of width is empty because uneven film thickness causes the edge sheet and substrate to generate Gap, so as to cause material diffusion.
4, film should cause to influence vapor deposition figure no more than edge strictly along vapor deposition graphic edge region.
5, film material is metallic copper, it is not oxidizable to be primarily due to it, and flexibility is good.The formation of the upper film of sheet can To be formed by the method for being electroplated or being deposited.
Although specific embodiments of the present invention have been described above, those skilled in the art should be appreciated that this It is merely illustrative of, various changes or modifications can be made to present embodiment, without departing from the principle and substance of the present invention, Protection scope of the present invention is only limited by the claims that follow.

Claims (4)

1. a kind of method that graphic edge material is spread after reduction vapor deposition, it is characterised in that: the high-flexibility on open mask Sheet on the graphics field that is deposited of needs of hollow out is set, expand around along the graphics field edge that the needs are deposited It dissipates and plates one layer of closed isolated film.
2. the method that graphic edge material is spread after a kind of reduction vapor deposition according to claim 1, it is characterised in that: described Isolated film with a thickness of 5-10 μm.
3. the method that graphic edge material is spread after a kind of reduction vapor deposition according to claim 1, it is characterised in that: described The width of isolated film is 2-4mm.
4. the method that graphic edge material is spread after a kind of reduction vapor deposition according to claim 1, it is characterised in that: described The material of isolated film is copper.
CN201910127408.8A 2019-02-20 2019-02-20 A method of graphic edge material is spread after reducing vapor deposition Pending CN109706425A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910127408.8A CN109706425A (en) 2019-02-20 2019-02-20 A method of graphic edge material is spread after reducing vapor deposition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910127408.8A CN109706425A (en) 2019-02-20 2019-02-20 A method of graphic edge material is spread after reducing vapor deposition

Publications (1)

Publication Number Publication Date
CN109706425A true CN109706425A (en) 2019-05-03

Family

ID=66264801

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910127408.8A Pending CN109706425A (en) 2019-02-20 2019-02-20 A method of graphic edge material is spread after reducing vapor deposition

Country Status (1)

Country Link
CN (1) CN109706425A (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105633301A (en) * 2014-11-17 2016-06-01 上海和辉光电有限公司 Method for reducing OLED color mixture defect and OLED display panel
CN107636191A (en) * 2016-09-30 2018-01-26 深圳市柔宇科技有限公司 Metal cover and OLED evaporation coating methods for OLED evaporations
CN108232041A (en) * 2018-01-03 2018-06-29 京东方科技集团股份有限公司 A kind of mask plate and preparation method thereof

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105633301A (en) * 2014-11-17 2016-06-01 上海和辉光电有限公司 Method for reducing OLED color mixture defect and OLED display panel
CN107636191A (en) * 2016-09-30 2018-01-26 深圳市柔宇科技有限公司 Metal cover and OLED evaporation coating methods for OLED evaporations
CN108232041A (en) * 2018-01-03 2018-06-29 京东方科技集团股份有限公司 A kind of mask plate and preparation method thereof

Similar Documents

Publication Publication Date Title
CN107236927B (en) Exposure mask template die group, organic electroluminescent display panel and preparation method thereof
CN105714249A (en) Mask plate, evaporation device and evaporation method
US6650023B2 (en) Apparatus for depositing thin film
JP6877346B2 (en) Methods for Manufacturing Display Boards, Display Boards and Display Devices
US20170268093A1 (en) Mask frame assembly, evaporation method, and array substrate
EP3456856B1 (en) Mask plate
CN107507915B (en) A kind of substrate and evaporation coating device manufacturing organic light emitting display panel
CN101812662A (en) Mask adhesion unit and the unitary depositing device of this mask adhesion of use
TWI712854B (en) Laser mask, vapor deposition mask manufacturing method, vapor deposition mask manufacturing apparatus, and organic semiconductor device manufacturing method
CN104611668A (en) Mask plate frame and mask plate
US10446785B2 (en) Light-emitting substrate and method for manufacturing the same
WO2020056866A1 (en) Oled display panel and preparation method therefor, and mask plate for evaporation plating
US20140326177A1 (en) Mask and a method for manufacturing the same
US20210336147A1 (en) Mask
CN206244866U (en) A kind of vaporizing-source system and vacuum deposition apparatus
CN107699852A (en) Mask plate and its manufacture method, evaporation coating method
KR20160033337A (en) Mask assembly for deposition, apparatus for deposition comprising the same and depositing method using the same
KR102082192B1 (en) Apparatus for depositing evaporated material, distribution pipe, vacuum deposition chamber, and method for depositing an evaporated material
KR20160112293A (en) Evaporation source and Deposition apparatus including the same
US9303317B2 (en) Deposition apparatus
CN109943808A (en) Vapor deposition mask plate, display panel and preparation method thereof
JP2019157262A (en) Metal shadow mask and manufacturing method thereof
CN109706425A (en) A method of graphic edge material is spread after reducing vapor deposition
CN108220904B (en) Contact plate and evaporation equipment
US20130141677A1 (en) LCD, LCD Substrate and LCD Manufacturing Method

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20190503

RJ01 Rejection of invention patent application after publication