CN109633826A - A kind of photoswitch based on MEMS - Google Patents
A kind of photoswitch based on MEMS Download PDFInfo
- Publication number
- CN109633826A CN109633826A CN201910081826.8A CN201910081826A CN109633826A CN 109633826 A CN109633826 A CN 109633826A CN 201910081826 A CN201910081826 A CN 201910081826A CN 109633826 A CN109633826 A CN 109633826A
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- Prior art keywords
- mirror
- mems
- input
- lens
- tilting mirror
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/35—Optical coupling means having switching means
- G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
- G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
- G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/24—Coupling light guides
- G02B6/26—Optical coupling means
- G02B6/32—Optical coupling means having lens focusing means positioned between opposed fibre ends
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/44—Mechanical structures for providing tensile strength and external protection for fibres, e.g. optical transmission cables
- G02B6/4401—Optical cables
- G02B6/4429—Means specially adapted for strengthening or protecting the cables
- G02B6/443—Protective covering
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Mechanical Light Control Or Optical Switches (AREA)
Abstract
The present invention relates to technical field of optical fiber communication, and in particular to a kind of photoswitch based on MEMS.The photoswitch includes input-output system, the first lens equipped with multiple optical paths, and MEMS tilting mirror, first lens are set between input-output system and MEMS tilting mirror, it further include reflecting mirror, the MEMS tilting mirror that the light inputted in the input-output system enters the generation angular deflection of its mirror surface through the first lens reflexes to reflecting mirror, MEMS tilting mirror is reflexed to by reflecting mirror again, is exported after the mirror surface of MEMS tilting mirror is reflected into input-output system again.The present invention passes through setting reflecting mirror, so that light is passed through MEMS tilting mirror twice and obtains bigger corner adjustable range, to reduce the requirement of MEMS tilting mirror angular deflection, to reduce the driving voltage of MEMS tilting mirror, reduce production cost, and available bigger light angle range under same driving voltage, realize the optical path switching of more numbers of channels.
Description
Technical field
The present invention relates to technical field of optical fiber communication, and in particular to a kind of photoswitch based on MEMS.
Background technique
Photoswitch is a kind of optical device with one or more optional transmission ports, and effect is to optical transmission line
Optical signal in road or integrated optical circuit carries out physics switching or logical operation.Photoswitch plays very heavy in optical fiber communication network
The effect wanted, it not only constitutes the exchcange core of key equipment in wavelength division multiplexed network, itself is also the key in optical-fiber network
Device.
MEMS (full name in English is Micro-Electro-Mechanical System) is MEMS, and size is several
Millimeter so it is smaller, be collection microsensor, microactrator, micro mechanical structure, the micro- energy of micro battery, signal processing and control electricity
Road, high-performance electronic integrated device, interface, communication etc. are in the intelligent micro device of one.
Wherein, Main Trends of The Development has been increasingly becoming because small in size, switch speed is fast based on the photoswitch of MEMS.?
In photoswitch based on MEMS, driving voltage is too big, higher to circuit design requirements, will increase circuit cost, in addition corner
It is required that it is big, cause the manufacturing cost of MEMS tilting mirror also very high.
It is existing, in optical switching process, require big, opposite MEMS to turn the MEMS tilting mirror crank degree of photoswitch
The driving voltage of mirror is big, leads to the with high costs of photoswitch.
Summary of the invention
The technical problem to be solved in the present invention is that in view of the above drawbacks of the prior art, providing a kind of based on MEMS's
Photoswitch overcomes MEMS tilting mirror crank degree requirement in existing photoswitch big, and the driving voltage of opposite MEMS tilting mirror is big, leads
Cause the problem with high costs of photoswitch.
The technical solution adopted by the present invention to solve the technical problems is: a kind of photoswitch based on MEMS is provided, including
Input-output system, the first lens and MEMS tilting mirror equipped with multiple optical paths, first lens are set to input-output system
Between MEMS tilting mirror, the photoswitch further includes reflecting mirror, and the light inputted in the input-output system is through the first lens
The MEMS tilting mirror that angular deflection occurs into its mirror surface reflexes to reflecting mirror, then reflexes to MEMS tilting mirror by reflecting mirror, through MEMS
The mirror surface of tilting mirror exports after being reflected into input-output system again.
Still more preferably scheme of the invention is: the axis of the mirror surface and the first lens of the MEMS tilting mirror is at an acute angle.
Still more preferably scheme of the invention is: the mirror surface of the reflecting mirror is equipped with high-reflecting film.
Still more preferably scheme of the invention is: the MEMS tilting mirror includes that single shaft MEMS tilting mirror and biaxial MEMS turn
Mirror.
Still more preferably scheme of the invention is: the photoswitch further includes being set on reflecting mirror to be arranged away from its mirror surface
The second lens and optical detector for detecting input light linear light power.
Still more preferably scheme of the invention is: first lens and the second lens are that self-focusing lens, ball are saturating
One of mirror, non-spherical lens.
Still more preferably scheme of the invention is: the driving method that angular deflection occurs for the mirror surface of the MEMS tilting mirror is
One of electrostatic drive, electromagnetic drive and Piezoelectric Driving.
Still more preferably scheme of the invention is: the input-output system includes that an input light path and at least two are defeated
Optical path out.
Still more preferably scheme of the invention is: the input-output system includes a hollow structure, and is installed on
At least three optical fiber of input and output light are used in hollow structure.
Still more preferably scheme of the invention is: the hollow structure includes capillary.
The beneficial effects of the present invention are compared with prior art, by the way that reflecting mirror is arranged, input in input-output system
Light through the first lens enter its mirror surface the MEMS tilting mirror of angular deflection occur and reflex to reflecting mirror, then reflexed to by reflecting mirror
MEMS tilting mirror exports after the mirror surface of MEMS tilting mirror is reflected into input-output system again, and the setting of reflecting mirror makes light two
It is secondary that bigger corner adjustable range is obtained by MEMS tilting mirror, so that the requirement of MEMS tilting mirror angular deflection is reduced, to reduce
The driving voltage of MEMS tilting mirror reduces production cost, and available bigger light angle range under same driving voltage,
Realize the optical path switching of more numbers of channels.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples, in attached drawing:
Fig. 1 is the structural schematic diagram of the photoswitch of the invention based on MEMS；
Fig. 2 is the structural schematic diagram of the photoswitch based on MEMS of another light spread state of the invention；
Fig. 3 is the brief configuration schematic diagram of MEMS tilting mirror of the invention；
Fig. 4 is the light covering radius status diagram of not set reflecting mirror；
Fig. 5 is the light covering radius status diagram that reflecting mirror is arranged；
Fig. 6 is the structural schematic diagram of the photoswitch (including the second lens and optical detector) of the invention based on MEMS.
Specific embodiment
Now in conjunction with attached drawing, elaborate to presently preferred embodiments of the present invention.
As shown in Figures 1 to 6, the present invention provides a kind of preferred embodiment of photoswitch based on MEMS.
The photoswitch based on MEMS includes input-output system, the first lens 5 and MEMS equipped with multiple optical paths
Tilting mirror 6, first lens 5 are set between input-output system and MEMS tilting mirror 6.The photoswitch further includes reflecting mirror 7, institute
It states the light inputted in input-output system and enters the reflection of MEMS tilting mirror 6 that angular deflection occurs for its mirror surface 61 through the first lens 5
MEMS tilting mirror 6 is reflexed to reflecting mirror 7, then by reflecting mirror 7, the mirror surface 61 through MEMS tilting mirror 6 is reflected into input-output system
After export.
By the way that reflecting mirror 7 is arranged, mirror surface 61 through MEMS tilting mirror 6 twice is realized by the light of input-output system input
Reflection, the deflection angle of light is amplified twice, under identical driving voltage, so that light is obtained bigger corner and is adjusted model
It encloses, to reduce the requirement of 6 angular deflection of MEMS tilting mirror, to reduce the driving voltage of MEMS tilting mirror 6, reduces production cost,
And available bigger light angle range under same driving voltage, realize the optical path switching of more numbers of channels.
In the present embodiment, the mirror surface 61 of the MEMS tilting mirror 6 and the axis of the first lens 5 are at an acute angle.Preferably, described
The axis of the mirror surface 61 of MEMS tilting mirror 6 and the first lens 5 is in 5 °~85 ° of angles.And the position of the reflecting mirror 7 in the present embodiment
It sets and its direction of mirror surface can be adjusted according to 61 deflection angle of mirror surface of default MEMS tilting mirror 6 and the optical path of required output
It is whole, it is ensured that the light that MEMS tilting mirror 6 reflects is reflected back to the mirror surface 61 of MEMS tilting mirror 6, then the mirror surface 61 by MEMS tilting mirror 6 again
The optical output exported required for reflexing to.
Further, the mirror surface of the reflecting mirror 7 is equipped with high-reflecting film.High-reflecting film is that incident laser energy is most of or several
The optical element all reflected back.The setting of high-reflecting film improves the reflectivity of light, reduces the loss of energy.Certainly, exist
In other embodiments, high-reflecting film and reflecting mirror 7 can also be provided separately.
In the present embodiment, the input-output system includes an input light path and at least two output light paths.Light via
Input light path input optical switch enters MEMS tilting mirror 6 through the first lens 5, and the mirror surface 61 of MEMS tilting mirror 6 is under predeterminated voltage driving
Angular deflection occurs, light reflexes to reflecting mirror 7 through the mirror surface 61 of MEMS tilting mirror 6, then reflexes to MEMS tilting mirror 6 by reflecting mirror 7,
It is exported after the mirror surface 61 of MEMS tilting mirror 6 is reflected into corresponding output light path again, realizes the switching of optical path.
Specifically, the input-output system includes a hollow structure, and is installed in hollow structure defeated for inputting
At least three optical fiber of light out.
Wherein, the hollow structure includes capillary 4.
It referring to Figure 1 and Figure 2, with input-output system include below capillary 4, and first be installed in capillary 4
It is explained for optical fiber 1, the second optical fiber 2 and third optical fiber 3.First optical fiber 1, the second optical fiber 2 and third optical fiber 3 are installed on
In capillary 4, three fine optical fiber heads are formed.
With reference to Fig. 1, light is incident by the first optical fiber 1, enters the MEMS driven with preset first voltage through the first lens 5
Tilting mirror 6, the mirror surface 61 through MEMS tilting mirror 6 reflexes to reflecting mirror 7, then is reflected back MEMS tilting mirror 6 by reflecting mirror 7, then turn through MEMS
The mirror surface 61 of mirror 6 is reflected into the output of the second optical fiber 2；Alternatively, under the driving of preset second voltage, MEMS turns with reference to Fig. 2
The deflection of another angle occurs for the mirror surface 61 of mirror 6, and light enters third optical fiber 3 after the mirror surface 61 of MEMS tilting mirror 6 again secondary reflection
Output.
In the present embodiment, the MEMS tilting mirror 6 includes single shaft MEMS tilting mirror and biaxial MEMS tilting mirror.Wherein, uniaxial MEMS
Tilting mirror realizes angular deflection of the light after its mirror-reflection in a reference axis, realizes light in the outputting cutting of two output light paths
It changes；Angular deflection of the light after the transmitting of its mirror surface in X-axis and Y-axis may be implemented in biaxial MEMS tilting mirror.Increase reflecting mirror
7, under same driving voltage, mirror surface two secondary reflection of the light through uniaxial MEMS tilting mirror or biaxial MEMS tilting mirror be can get bigger
Angle of regulation range, realize multichannel quantity optical path switching.
Specifically, with reference to Fig. 3, light is can be achieved after the transmitting of its mirror surface in X-axis and Y-axis in light on biaxial MEMS tilting mirror
On angular deflection.With reference to Fig. 4 and Fig. 5, in the case where being not provided with reflecting mirror 7, light is reflected through the mirror surface 61 of MEMS tilting mirror 6
Into input-output system, the covering radius of light is d, can such as enter the input-output system with eight output light paths, root
According to MEMS tilting mirror 6 mirror surface 61 deflection angle from a wherein optical output；In the case where reflecting mirror 7 are arranged, light warp
The mirror surface 61 of MEMS tilting mirror 6 is reflected into input-output system, covering radius 2d, and enterable output light path increases to two
14, the adjustable range of corner is increased, the optical path switching of more numbers of channels is realized, reduces the corner to MEMS tilting mirror 6
It is required that reducing the driving voltage demand of MEMS tilting mirror 6, cost is reduced.
In the present embodiment, as shown in fig. 6, the photoswitch further includes on the reflecting mirror 7 away from the of the setting of its mirror surface
Two lens 8 and optical detector 9 for detecting input light linear light power.
Wherein, the mirror surface of reflecting mirror 7 is equipped with part reflectance coating.
Specifically, the mirror surface 61 through MEMS tilting mirror 6 reflexes in the light of reflecting mirror 7, and some light is reflected back toward MEMS
Tilting mirror 6 is finally reflected back in the optical fiber of input-output system；Part then continues across reflecting mirror 7, is focused by the second lens 8
On optical detector 9, it is finally translated into electric current output, realizes the power detection to input light.
In the present embodiment, first lens 5 and the second lens 8 are self-focusing lens, globe lens, in non-spherical lens
One kind.
In the present embodiment, the driving method that angular deflection occurs for the mirror surface 61 of the MEMS tilting mirror 6 is electrostatic drive, electromagnetism
One of driving and Piezoelectric Driving.Preferably, the side that angular deflection uses electrostatic drive occurs for the mirror surface 61 of MEMS tilting mirror 6
The mirror surface 61 of formula, MEMS tilting mirror 6 deflects under electrostatic drive, and deflection angle is different under different driving voltage, the light of input
Line switches in the different output light paths after the mirror surface 61 of MEMS tilting mirror 6 reflects in input-output system, realizes optical path switching.
It should be understood that the above embodiments are merely illustrative of the technical solutions of the present invention, rather than its limitations, to ability
It for field technique personnel, can modify to technical solution illustrated in the above embodiments, or special to part of technology
Sign is equivalently replaced；And all such modifications and replacement, it should all belong to the protection domain of appended claims of the present invention.
Claims (10)
1. a kind of photoswitch based on MEMS, input-output system, the first lens and MEMS including being equipped with multiple optical paths turn
Mirror, first lens are set between input-output system and MEMS tilting mirror, it is characterised in that: the photoswitch further includes reflection
Mirror, the light inputted in the input-output system, which through the first lens enters its mirror surface the MEMS tilting mirror of angular deflection occurs, to be reflected
MEMS tilting mirror is reflexed to reflecting mirror, then by reflecting mirror, after the mirror surface of MEMS tilting mirror is reflected into input-output system again
Output.
2. photoswitch according to claim 1, it is characterised in that: the mirror surface of the MEMS tilting mirror and the axis of the first lens
It is at an acute angle.
3. photoswitch according to claim 1, it is characterised in that: the mirror surface of the reflecting mirror is equipped with high-reflecting film.
4. photoswitch according to claim 1, it is characterised in that: the MEMS tilting mirror includes single shaft MEMS tilting mirror and twin shaft
MEMS tilting mirror.
5. photoswitch according to claim 1 or 2, it is characterised in that: the photoswitch further includes being set on reflecting mirror to carry on the back
The second lens from the setting of its mirror surface and the optical detector for detecting input light linear light power.
6. photoswitch according to claim 5, it is characterised in that: first lens and the second lens are that self-focusing is saturating
One of mirror, globe lens, non-spherical lens.
7. photoswitch according to claim 1, it is characterised in that: the drive of angular deflection occurs for the mirror surface of the MEMS tilting mirror
Flowing mode is one of electrostatic drive, electromagnetic drive and Piezoelectric Driving.
8. photoswitch according to claim 1, it is characterised in that: the input-output system is including an input light path and extremely
Few two output light paths.
9. photoswitch according to claim 1, it is characterised in that: the input-output system includes a hollow structure, with
And it is installed at least three optical fiber that input and output light is used in hollow structure.
10. photoswitch according to claim 9, it is characterised in that: the hollow structure includes capillary.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910081826.8A CN109633826A (en) | 2019-01-28 | 2019-01-28 | A kind of photoswitch based on MEMS |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910081826.8A CN109633826A (en) | 2019-01-28 | 2019-01-28 | A kind of photoswitch based on MEMS |
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| Publication Number | Publication Date |
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| CN109633826A true CN109633826A (en) | 2019-04-16 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910081826.8A Pending CN109633826A (en) | 2019-01-28 | 2019-01-28 | A kind of photoswitch based on MEMS |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110658584A (en) * | 2019-10-08 | 2020-01-07 | 浙江大学 | Ultra-large bandwidth silicon-based waveguide MEMS optical switch |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6740864B1 (en) * | 2002-04-30 | 2004-05-25 | Finisar Corporation | Method and apparatus for monitoring optical switches and cross-connects |
| US20140341504A1 (en) * | 2013-05-16 | 2014-11-20 | Alcatel-Lucent Usa Inc. | Optical cross-connect switch with configurable optical input/output ports |
| CN109946792A (en) * | 2019-01-24 | 2019-06-28 | 昂纳信息技术（深圳）有限公司 | A kind of the variable optical attenuation device and system of integrated light splitting detecting function |
| CN209280994U (en) * | 2019-01-24 | 2019-08-20 | 昂纳信息技术（深圳）有限公司 | A kind of the variable optical attenuation device and system of integrated light splitting detecting function |
-
2019
- 2019-01-28 CN CN201910081826.8A patent/CN109633826A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6740864B1 (en) * | 2002-04-30 | 2004-05-25 | Finisar Corporation | Method and apparatus for monitoring optical switches and cross-connects |
| US20140341504A1 (en) * | 2013-05-16 | 2014-11-20 | Alcatel-Lucent Usa Inc. | Optical cross-connect switch with configurable optical input/output ports |
| CN109946792A (en) * | 2019-01-24 | 2019-06-28 | 昂纳信息技术（深圳）有限公司 | A kind of the variable optical attenuation device and system of integrated light splitting detecting function |
| CN209280994U (en) * | 2019-01-24 | 2019-08-20 | 昂纳信息技术（深圳）有限公司 | A kind of the variable optical attenuation device and system of integrated light splitting detecting function |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110658584A (en) * | 2019-10-08 | 2020-01-07 | 浙江大学 | Ultra-large bandwidth silicon-based waveguide MEMS optical switch |
| CN110658584B (en) * | 2019-10-08 | 2020-08-14 | 浙江大学 | Ultra-large bandwidth silicon-based waveguide MEMS optical switch |
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Address after: No.35 Cuijing Road, Pingshan District, Shenzhen City, Guangdong Province Applicant after: Ona Technology (Shenzhen) Group Co.,Ltd. Address before: No.35 Cuijing Road, Pingshan District, Shenzhen City, Guangdong Province Applicant before: O-NET COMMUNICATIONS (SHENZHEN) Ltd. |
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Application publication date: 20190416 |