CN109632112A - A kind of spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern - Google Patents
A kind of spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern Download PDFInfo
- Publication number
- CN109632112A CN109632112A CN201811589898.5A CN201811589898A CN109632112A CN 109632112 A CN109632112 A CN 109632112A CN 201811589898 A CN201811589898 A CN 201811589898A CN 109632112 A CN109632112 A CN 109632112A
- Authority
- CN
- China
- Prior art keywords
- phase
- interference pattern
- sub
- phase information
- registration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 56
- 230000010363 phase shift Effects 0.000 claims abstract description 19
- 238000001914 filtration Methods 0.000 claims abstract description 10
- 238000001228 spectrum Methods 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 2
- 238000003384 imaging method Methods 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000011218 segmentation Effects 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
- G01J9/02—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength by interferometric methods
- G01J2009/0234—Measurement of the fringe pattern
- G01J2009/0238—Measurement of the fringe pattern the pattern being processed optically, e.g. by Fourier transformation
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
- Spectrometry And Color Measurement (AREA)
Abstract
The invention discloses a kind of spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern.This method are as follows: the reference mirror first in inclination dynamic interferometer introduces linear carrier frequency in simultaneous phase-shifting interference pattern, acquires carrier frequency synchronization phase-shift interference, and be divided into four sub- interference patterns；Then the phase information in every sub- interference pattern, and the inclination that disappears respectively to it are resolved using Fourier filtering method, obtains the phase information to be measured that every sub- interference pattern is included；Then phase information that one of them sub- interference pattern includes is chosen as reference phase information, and the spatial position matching error for the phase information and reference phase information that other sub- interference patterns include is determined using fast phase correlation registration method；Finally according to the spatial position matching error of phase information, the position registration relationship between sub- interference pattern is determined.The present invention improves the degree of automation of dynamic interferometer spatial position registration, and the accuracy and reliability of spatial position registration is high, is simple and efficient, applied widely.
Description
Technical field
The invention belongs to optical interferometry technical field, especially a kind of space of dynamic interferometer simultaneous phase-shifting interference pattern
Position registration method.
Background technique
Dynamic interferometer can largely inhibit time-varying environmental factor to the influence of measurement result, can be applied to optics
Among the on-line checking of processing site.The characteristics of dynamic interferometer is to collect the interference of several simultaneous phase-shiftings in synchronization
Figure.When resolving phase, if interference pattern position mismatch, phase error can be introduced., mainly there is two o'clock in the reason of interference pattern position mismatch:
1) multicamera system acquires interference pattern in different location, leads to interference pattern position mismatch；2) single camera system acquires single-frame images,
Four width phase shifting interferences are obtained by region segmentation, lead to interference pattern position mismatch.In order to guarantee phase retrieval precision, need pair
The spatial position of interference pattern is registrated.
The spatial position method for registering of interference pattern is divided into space-artifact position registration and automation spatial position is registrated two kinds:
Space-artifact position registration method is that specific characteristic target is added on tested surface, and this feature target is at each point
Imaging is present in each sub- interference pattern in optical path, and four width interference patterns are individually taken out, artificially identify target picture, antithetical phrase
The position coordinates of picture in interference pattern are read out, and are same points since these coordinates are corresponding on tested surface, are utilized these
Coordinate information carries out spatial position registration to sub- interference pattern.Space-artifact position registration method is not required to carry out the consideration on algorithm,
But it is more demanding to the image quality of characteristic target, and include human factor, automation to the target identification in sub- interference pattern
Degree is not high.
Automate spatial position registration method in, some methods depend on image grayscale distributed intelligence, so reliability by
The influence of the factors such as the splitting ratio of image quality amount, random noise and spectral module；Some methods characterized by the edge of interference pattern,
Position registration is carried out to interference pattern, has particular requirement to the shape of interference pattern, and interference pattern edge needs imaging clearly；Some methods
It can be only applied to specific structure and specifically measure occasion, so that registration Algorithm has many restrictions in actual use；Some sides
Method is computationally intensive, is registrated inefficient.
Summary of the invention
The purpose of the present invention is to provide a kind of precision, and dynamic interferometer high, highly reliable, applied widely synchronizes
The spatial position method for registering of phase-shift interference.
Realize the technical solution of the object of the invention are as follows: a kind of spatial position registration of dynamic interferometer simultaneous phase-shifting interference pattern
Method, comprising the following steps:
Reference mirror in step 1, inclination dynamic interferometer, introduces linear carry simultaneously in four simultaneous phase-shifting interference patterns
Frequently, carrier frequency synchronization phase-shift interference is acquired, and is divided into four sub- interference patterns；
Step 2 resolves the phase information in every sub- interference pattern using Fourier filtering method and carries out the inclination that disappears, and obtains every
The phase information to be measured that a sub- interference pattern is included；
Step 3, using the phase information that one of them sub- interference pattern includes as reference phase information, using fast phase phase
Registration method is closed, determines the spatial position matching error for the phase information and reference phase information that other sub- interference patterns include；
Step 4, the spatial position matching error according to phase information, determine the position registration relationship between sub- interference pattern.
Further, the reference mirror in inclination dynamic interferometer described in step 1, it is same in four simultaneous phase-shifting interference patterns
When introduce linear carrier frequency, acquire carrier frequency synchronization phase-shift interference, and be divided into four sub- interference patterns, it is specific as follows:
In dynamic interferometer, simultaneous phase-shifting interference pattern is obtained；Tilt reference mirror, it is same in four simultaneous phase-shifting interference patterns
When introduce linear carrier frequency, so that the frequency spectrum and phase spectrum of background light intensity in simultaneous phase-shifting interference pattern is separated from each other；Acquire carrier frequency
Phase-shift interference, and it is split, obtain four sub- interference pattern I0、I1、I2And I3。
Further, the phase information in every sub- interference pattern is resolved simultaneously using Fourier filtering method described in step 2
The inclination that disappears is carried out, the phase information to be measured that every sub- interference pattern is included is obtained, specific as follows:
Using Fourier filtering method to four sub- interference pattern I0、I1、I2And I3Phase resolving is carried out, and carries out the inclination that disappears, is obtained
The phase information to be measured for being included to four sub- interference patternsWithFour sub- interference patterns correspond to same tested surface,WithCorresponding the same face shape feature.
Further, using the phase information that one of them sub- interference pattern includes as reference phase information described in step 3,
Using fast phase correlation registration method, the spatial position for the phase information and reference phase information that other sub- interference patterns include is determined
Matching error, specific as follows:
Step 3.1 chooses sub- interference pattern I0Phase informationAs reference phase information, by sub- interference pattern I1
Phase informationWith reference phase informationCarry out correlation registration calculating:
In formulaIndicate phaseWithBetween registration coefficient, (x, y) indicate phase informationSky
Between coordinate, (x ', y ') indicate phase informationSpace coordinate, M × N indicate participate in registration calculate phase face size it is big
Small, X, Y are indicatedThe middle coordinate range for participating in registration and calculating, X ', Y ' expressionThe middle coordinate range for participating in registration and calculating；
Step 3.2, when phase position match completely on time, be registrated coefficientReach minimum value, the relationship of x, x ' and y, y '
It indicates are as follows:
X '=x+un
Y '=y+vn
Wherein unAnd vnRespectively indicate phase informationCompare reference phase informationIn the x and y direction
Spatial translation amount；
Step 3.3 obtains the overall situation using fast matching method according to the spatial translation amount of phase information between sub- interference pattern
Minimum registration coefficient, specifically: smaller registration coefficient is obtained by comparingTo determine spatial translation amount unAnd vnChange
Change trend, when registration coefficientMeet the following conditions, spatial translation amount unAnd vnVariation isWithUntil searching out region
Minimum value:
Spatial translation amount unWithAnd vnWithRelationship are as follows:
In formula, t is registration step-length realizes rough registration when the minimum under the step-length to be obtained is registrated coefficient；
Step 3.4 reduces registration and walks to be registrated obtained registration position under step-length in step 3.3 as initial registration position
It is long, new round registration is carried out, until searching out the minimum registration coefficient within the scope of the required accuracy, that is, determines phaseWithBetween spatial position matching error；
Step 3.5, according to step 3.1~step 3.4 method, successively determine sub- interference pattern I2And I3Phase information
WithWith reference phaseSpatial position matching error.
Further, it described in step 4 according to the spatial position matching error of phase information, determines between sub- interference pattern
Position registration relationship, specific as follows:
According to the spatial position matching error of phase information, the position registration relationship between sub- interference pattern is determined, it is dry to obtain son
Relate to figure I1、I2、I3With benchmark interference pattern I0Spatial position registration error be respectively (x1,y1)、(x2,y2)、(x3,y3), then root
Mismatch error is corrected according to registration error.
Compared with prior art, the present invention its remarkable advantage are as follows: (1) reduce manual operation step, eliminate it is artificial because
Element is influenced caused by spatial registration, improves the degree of automation of dynamic interferometer space configuration registration；(2) it reduces point
The factors such as light, image grayscale, interference pattern shape factor, image quality influence caused by being registrated on spatial position, improve position
The reliability of registration；(3) method is simple and efficient, and does not need any additional ancillary hardware, and it is dry to be suitable for most of dynamic
Interferometer.
Detailed description of the invention
Fig. 1 is a kind of process signal of spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern of the present invention
Figure.
Fig. 2 is the carrier frequency phase shift interference pattern that dynamic interferometer acquires in the present invention.
Fig. 3 is the phase calculation result that neutron interference pattern of the present invention includes and fractional phase correlation registration schematic diagram.
Fig. 4 is that coefficient is registrated in the present invention with phasetophase spatial translation amount variation tendency schematic diagram subject to registration.
Fig. 5 is the carrier frequency phase shift to be registered that point light source dystopy dynamic fizeau interferometer collects in the embodiment of the present invention
Interference pattern.
Fig. 6 is carrier frequency phase shift interference pattern spatial registration result in the embodiment of the present invention.
Specific embodiment
Present invention is further described in detail with reference to the accompanying drawing.
Dynamic interferometer can collect the simultaneous phase-shifting interference pattern with certain phase difference value simultaneously, from this group of interference pattern
In can recover phase distribution to be measured so that it is determined that detected element face shape.It is dry that dynamic interferometer generally collects four phase shifts
Relate to figure I1、I2、I3And I4, phase shift step-length is respectively pi/2.It can resolve to obtain phase information to be measured using four step Phase-shifting algorithms.
If there are spatial position registration errors between sub- interference pattern, mismatch error is introduced in resolving phase, is indicated are as follows:
WhereinFor phase to be measured, (Δ xn,Δyn) it is the direction x and the side y that a interference pattern of n-th (n=0,1,2,3) introduces
To spatial position amount of mismatch.
In conjunction with Fig. 1, the spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern of the present invention, in sub- interference pattern
The phase information for including carries out fast correlation position registration, to realize the spatial position registration of the sub- interference pattern of spatial Phase-shifting Method, including
Following steps:
Reference mirror in step 1, inclination dynamic interferometer, introduces linear carry simultaneously in four simultaneous phase-shifting interference patterns
Frequently, carrier frequency synchronization phase-shift interference is acquired, and divides each sub- interference pattern in carrier frequency phase shift interference pattern；
In dynamic interferometer, simultaneous phase-shifting interference pattern is obtained；Tilt reference border, to same in four simultaneous phase-shifting interference patterns
When introduce linear carrier frequency, obtained carrier frequency phase shift interference pattern as shown in Fig. 2, and it is split, obtain four sub- interference patterns
I0、I1、I2And I3.The linear carrier frequency number of sub- interference pattern should enable background light intensity frequency spectrum and phase spectrum in interference pattern spectrogram
Enough it is separated from each other.
Step 2, the phase information in every sub- interference pattern, and the inclination that disappears to it are resolved using Fourier filtering method, obtained
The phase information to be measured that every sub- interference pattern is included；
Phase resolving is carried out to every sub- interference pattern using Fourier filtering method, obtains the phase to be measured for including in sub- interference pattern
Position informationWithIt is same tested surface since four sub- interference patterns are corresponding, so resolving obtained phase pair
What is answered is the same face shape feature, by taking two phase results as an example,WithPhase distribution is as shown in Figure 3.
Step 3, using the phase information that one of them sub- interference pattern includes as reference phase information, using fast phase phase
Registration method is closed, determines the spatial position matching error for the phase information and reference phase information that other sub- interference patterns include, specifically
Process is as follows:
Step 3.1 chooses sub- interference pattern I0Fractional phase informationAs reference phase information, by sub- interference
Scheme I1Phase informationWith reference phase informationCarry out correlation registration calculating:
In formulaIndicate phaseWithBetween registration coefficient, (x, y) indicate phase informationSky
Between coordinate, (x ', y ') indicate phase informationSpace coordinate, M × N indicate participate in registration calculate phase face size it is big
Small, X, Y are indicatedThe middle coordinate range for participating in registration and calculating, X ', Y ' expressionThe middle coordinate range for participating in registration and calculating；
Step 3.2, when phase position match completely on time, be registrated coefficientReach minimum value, as shown in Figure 4；X, x ' and
The relationship of y, y ' can indicate are as follows:
X '=x+un
Y '=y+vn
Wherein unAnd vnRespectively indicate phase informationCompare reference phase informationIn the x and y direction
Spatial translation amount；
Step 3.3 obtains the overall situation using fast matching method according to the spatial translation amount of phase information between sub- interference pattern
Minimum registration coefficient, method are as follows: obtain smaller registration coefficient by comparingTo determine spatial translation amount unAnd vnChange
Change trend, when registration coefficientMeet the following conditions, spatial translation amount unAnd vnVariation isWithUntil searching out region
Minimum value:
Spatial translation amount unWithAnd vnWithRelationship are as follows:
In formula, t is registration step-length realizes rough registration when the minimum under the step-length to be obtained is registrated coefficient；
Step 3.4 reduces registration and walks to be registrated obtained registration position under step-length in step 3.3 as initial registration position
It is long, the registration accuracy of next round registration is improved, new round registration is carried out, until searching out the minimum registration within the scope of the required accuracy
Coefficient can determine phaseWithBetween spatial position matching error；
Step 3.5, according to step 3.1~step 3.4 method, successively determine sub- interference pattern I2And I3Phase information
WithWith reference phase informationSpatial position matching error.
Step 4, it according to the spatial position matching error of phase information, determines the position registration relationship between sub- interference pattern, obtains
To sub- interference pattern I1、I2、I3With benchmark interference pattern I0Spatial position registration error be respectively (x1,y1)、(x2,y2)、(x3,y3),
Then mismatch error is corrected according to registration error.
Embodiment 1
Using the dynamic fizeau interferometer based on point light source dystopy spatial Phase-shifting Method, the space of simultaneous phase-shifting interference pattern is realized
Position registration, the interferometer realize spatial Phase-shifting Method using one 2 × 2 pointolite array, have obtained simultaneous phase-shifting interference pattern.
Step 1, the reference mirror in point light source dislocation type dynamic fizeau interferometer is tilted, in four simultaneous phase-shifting interference patterns
Linear carrier frequency is introduced simultaneously, acquires carrier frequency phase shift interference pattern, is divided each sub- interference pattern in carrier frequency phase shift interference pattern, is successively compiled
Number be I0、I1、I2、I3, as shown in Figure 5.
Step 2, the phase information in every sub- interference pattern, and the inclination that disappears to it are resolved using Fourier filtering method, obtained
The phase information to be measured that every sub- interference pattern is included, number consecutively areAs shown in Figure 5；
Step 3, with sub- interference pattern I0The phase information for including is as reference phase information, using fast phase correlation registration
Method determines the phase information that other sub- interference patterns includeWith reference phaseSpatial position matching error, determine
PhaseRelative datum phaseSpatial position matching error be respectively (- 2, -3), (2,6), (1,5)；
Step 4, it according to the spatial position matching error of phase information, determines the position registration relationship between sub- interference pattern, obtains
To sub- interference pattern I1(x,y)、I2(x,y)、I3(x, y) and benchmark interference pattern I0The spatial position registration error of (x, y) be respectively (-
2, -3), (2,6), (1,5), Fig. 6 shows spatial registration as a result, then the mismatch according to shown in registration error amendment type (1) is missed
Difference.
In conclusion the spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern of the present invention, utilizes part phase
Position fast correlation position registration method carries out the calculating of spatial position registration error to the phase information for including in sub- interference pattern, realizes empty
Between the sub- interference pattern of phase shift spatial position registration, improve the degree of automation of dynamic interference map space position registration, eliminate
Human factor influences caused by being registrated on spatial position；Reduce light splitting, image grayscale, interference pattern shape factor, image quality
Etc. factors on spatial position registration caused by influence, improve the reliability of position registration；This method is simple and efficient, and does not need to appoint
What additional ancillary hardware is suitable for most of dynamic interferometer.
Claims (5)
1. a kind of spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern, which comprises the following steps:
Reference mirror in step 1, inclination dynamic interferometer, introduces linear carrier frequency simultaneously in four simultaneous phase-shifting interference patterns, adopts
Collect carrier frequency synchronization phase-shift interference, and is divided into four sub- interference patterns；
Step 2 resolves the phase information in every sub- interference pattern using Fourier filtering method and carries out the inclination that disappears, and obtains every height
The phase information to be measured that interference pattern is included；
Step 3, using the phase information that one of them sub- interference pattern includes as reference phase information, matched using fast phase correlation
Quasi- method determines the spatial position matching error for the phase information and reference phase information that other sub- interference patterns include；
Step 4, the spatial position matching error according to phase information, determine the position registration relationship between sub- interference pattern.
2. the spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern according to claim 1, feature exist
In reference mirror in inclination dynamic interferometer described in step 1 introduces linear carry simultaneously in four simultaneous phase-shifting interference patterns
Frequently, carrier frequency synchronization phase-shift interference is acquired, and is divided into four sub- interference patterns, specific as follows:
In dynamic interferometer, simultaneous phase-shifting interference pattern is obtained；Tilt reference mirror draws simultaneously in four simultaneous phase-shifting interference patterns
Enter linear carrier frequency, the frequency spectrum and phase spectrum of background light intensity in simultaneous phase-shifting interference pattern is enable to be separated from each other；Acquire carrier frequency phase shift
Interference pattern, and it is split, obtain four sub- interference pattern I0、I1、I2And I3。
3. the spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern according to claim 1, feature exist
In resolving the phase information in every sub- interference pattern using Fourier filtering method described in step 2 and carry out the inclination that disappears, obtain
The phase information to be measured that every sub- interference pattern is included, specific as follows:
Using Fourier filtering method to four sub- interference pattern I0、I1、I2And I3Phase resolving is carried out, and carries out the inclination that disappears, obtains four
The phase information to be measured that a sub- interference pattern is includedWithFour sub- interference patterns correspond to same tested surface,WithCorresponding the same face shape feature.
4. the spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern according to claim 1, feature exist
In using the phase information that one of them sub- interference pattern includes as reference phase information described in step 3, using fast phase phase
Registration method is closed, determines the spatial position matching error for the phase information and reference phase information that other sub- interference patterns include, specifically
It is as follows:
Step 3.1 chooses sub- interference pattern I0Phase informationAs reference phase information, by sub- interference pattern I1Phase
InformationWith reference phase informationCarry out correlation registration calculating:
In formulaIndicate phaseWithBetween registration coefficient, (x, y) indicate phase informationSpace sit
Mark, (x ', y ') indicate phase informationSpace coordinate, M × N indicate participate in registration calculate phase face size, X, Y
It indicatesThe middle coordinate range for participating in registration and calculating, X ', Y ' expressionThe middle coordinate range for participating in registration and calculating；
Step 3.2, when phase position match completely on time, be registrated coefficientReach minimum value, the relationship expression of x, x ' and y, y '
Are as follows:
X '=x+un
Y '=y+vn
Wherein unAnd vnRespectively indicate phase informationCompare reference phase informationSpace in the x and y direction
Translational movement；
Step 3.3 obtains global minima using fast matching method according to the spatial translation amount of phase information between sub- interference pattern
It is registrated coefficient, specifically: smaller registration coefficient is obtained by comparingTo determine spatial translation amount unAnd vnVariation become
Gesture, when registration coefficientMeet the following conditions, spatial translation amount unAnd vnVariation isWithUntil searching out region minimum
Value:
Spatial translation amount unWithAnd vnWithRelationship are as follows:
In formula, t is registration step-length realizes rough registration when the minimum under the step-length to be obtained is registrated coefficient；
Step 3.4 reduces as initial registration position to be registrated obtained registration position under step-length in step 3.3 and is registrated step-length, into
Row new round registration determines phase until searching out the minimum registration coefficient within the scope of the required accuracyWithBetween spatial position matching error；
Step 3.5, according to step 3.1~step 3.4 method, successively determine sub- interference pattern I2And I3Phase informationWith
With reference phaseSpatial position matching error.
5. the spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern according to claim 1, feature exist
In, according to the spatial position matching error of phase information described in step 4, determine the position registration relationship between sub- interference pattern,
It is specific as follows:
According to the spatial position matching error of phase information, determines the position registration relationship between sub- interference pattern, obtain sub- interference pattern
I1、I2、I3With benchmark interference pattern I0Spatial position registration error be respectively (x1,y1)、(x2,y2)、(x3,y3), then basis is matched
Quasi- error correction mismatch error.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811589898.5A CN109632112B (en) | 2018-12-25 | 2018-12-25 | Spatial position registration method of synchronous phase-shifting interferogram of dynamic interferometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811589898.5A CN109632112B (en) | 2018-12-25 | 2018-12-25 | Spatial position registration method of synchronous phase-shifting interferogram of dynamic interferometer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109632112A true CN109632112A (en) | 2019-04-16 |
| CN109632112B CN109632112B (en) | 2020-11-27 |
Family
ID=66077186
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811589898.5A Active CN109632112B (en) | 2018-12-25 | 2018-12-25 | Spatial position registration method of synchronous phase-shifting interferogram of dynamic interferometer |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109632112B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115127683A (en) * | 2022-06-27 | 2022-09-30 | 南京理工大学 | Phase extraction method for parameter mismatch of dynamic interferometer interferogram |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2679643Y (en) * | 2004-03-17 | 2005-02-16 | 南京理工大学 | Electromechanical preperssuring optical phaser |
| CN101113927A (en) * | 2007-08-22 | 2008-01-30 | 中国科学院上海光学精密机械研究所 | Phase-shifting lateral shearing interferometer |
| WO2009049393A1 (en) * | 2007-10-15 | 2009-04-23 | Michael Galle | System and method to determine chromatic dispersion in short lengths of waveguides using a 3-wave interference pattern and a single-arm interferometer |
| CN102175332A (en) * | 2011-01-21 | 2011-09-07 | 南京理工大学 | Method for recovering phases from interferograms containing phase-shift error |
| US20120243001A1 (en) * | 2011-03-24 | 2012-09-27 | University Of Rochester | Optical testing apparatus and methods |
| CN103630336A (en) * | 2013-12-02 | 2014-03-12 | 南京理工大学 | Dynamic interference measuring method based on random fast axis azimuth delay array |
| CN105928455A (en) * | 2016-05-20 | 2016-09-07 | 南京理工大学 | Spatial beam splitting coaxial Fizeau type synchronous phase-shift interferometer and measuring method thereof |
| CN108387172A (en) * | 2018-02-07 | 2018-08-10 | 中国科学院光电研究院 | Polarization phase shift dynamic interferometer based on optical field detection device |
| EP3388825A1 (en) * | 2017-04-12 | 2018-10-17 | Medizinische Universität Innsbruck | Potentiometric sensor for the quantitative determination of sodium concentration and creatinine concentration |
-
2018
- 2018-12-25 CN CN201811589898.5A patent/CN109632112B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2679643Y (en) * | 2004-03-17 | 2005-02-16 | 南京理工大学 | Electromechanical preperssuring optical phaser |
| CN101113927A (en) * | 2007-08-22 | 2008-01-30 | 中国科学院上海光学精密机械研究所 | Phase-shifting lateral shearing interferometer |
| WO2009049393A1 (en) * | 2007-10-15 | 2009-04-23 | Michael Galle | System and method to determine chromatic dispersion in short lengths of waveguides using a 3-wave interference pattern and a single-arm interferometer |
| CN102175332A (en) * | 2011-01-21 | 2011-09-07 | 南京理工大学 | Method for recovering phases from interferograms containing phase-shift error |
| US20120243001A1 (en) * | 2011-03-24 | 2012-09-27 | University Of Rochester | Optical testing apparatus and methods |
| CN103630336A (en) * | 2013-12-02 | 2014-03-12 | 南京理工大学 | Dynamic interference measuring method based on random fast axis azimuth delay array |
| CN105928455A (en) * | 2016-05-20 | 2016-09-07 | 南京理工大学 | Spatial beam splitting coaxial Fizeau type synchronous phase-shift interferometer and measuring method thereof |
| EP3388825A1 (en) * | 2017-04-12 | 2018-10-17 | Medizinische Universität Innsbruck | Potentiometric sensor for the quantitative determination of sodium concentration and creatinine concentration |
| CN108387172A (en) * | 2018-02-07 | 2018-08-10 | 中国科学院光电研究院 | Polarization phase shift dynamic interferometer based on optical field detection device |
Non-Patent Citations (2)
| Title |
|---|
| KRZYSZTOF PATORSKI 等: "Phase-shifting method contrast calculations in time-averaged interferometry: error analysis", 《OPTICAL ENGINEERING》 * |
| 郑东晖 等: "动态干涉仪干涉图位置配准及移相误差校正", 《光学学报》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115127683A (en) * | 2022-06-27 | 2022-09-30 | 南京理工大学 | Phase extraction method for parameter mismatch of dynamic interferometer interferogram |
| CN115127683B (en) * | 2022-06-27 | 2024-02-06 | 南京理工大学 | Phase extraction method for parameter mismatch of dynamic interferometer interferogram |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109632112B (en) | 2020-11-27 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP3238447A1 (en) | Updating calibration of a three-dimensional measurement system | |
| TW201418661A (en) | Scanning in angle-resolved reflectometry and algorithmically eliminating diffraction from optical metrology | |
| Douxchamps et al. | High-accuracy and robust localization of large control markers for geometric camera calibration | |
| JP2010071782A (en) | Three-dimensional measurement apparatus and method thereof | |
| KR20020060151A (en) | Method and system for measuring the relief of an object | |
| CN108168464A (en) | For the phase error correction approach of fringe projection three-dimension measuring system defocus phenomenon | |
| Van Den Heuvel et al. | Digital close-range photogrammetry using artificial targets | |
| CN109373897A (en) | A kind of measurement method based on laser virtual ruler | |
| CN108362226B (en) | Double four-step phase shift method for improving phase measurement precision of image overexposure area | |
| KR20160110122A (en) | Inspection apparatus and inspection method | |
| CN110692084B (en) | Apparatus and machine-readable storage medium for deriving topology information of a scene | |
| CN107271445B (en) | Defect detection method and device | |
| US5436462A (en) | Video contour measurement system employing moire interferometry having a beat frequency pattern | |
| US9646374B2 (en) | Line width error obtaining method, line width error obtaining apparatus, and inspection system | |
| CN116802688A (en) | Apparatus and method for correspondence analysis within an image | |
| WO2023088409A1 (en) | Interferometric three-dimensional profile solving method | |
| CN113358063A (en) | Surface structured light three-dimensional measurement method and system based on phase weighted fusion | |
| JP6894280B2 (en) | Inspection method and inspection equipment | |
| CN109632112A (en) | A kind of spatial position method for registering of dynamic interferometer simultaneous phase-shifting interference pattern | |
| Hoegg et al. | Real-time motion artifact compensation for PMD-ToF images | |
| CN111121661B (en) | Narrow-band non-monochromatic light n +1 amplitude phase shift test algorithm for smooth surface topography measurement | |
| CN112815846A (en) | 2D and 3D composite high-precision vision device and measuring method | |
| CN107810384B (en) | Stripe projection method, stripe projection apparatus, and computer program product | |
| CN111964586A (en) | White light interference signal processing method based on random noise correction | |
| CN101694376B (en) | Optical stripe sine evaluating method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |