CN109613414B - Method and system capable of controlling temperature change process of aging life test box in high-temperature environment - Google Patents

Method and system capable of controlling temperature change process of aging life test box in high-temperature environment Download PDF

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CN109613414B
CN109613414B CN201811604900.1A CN201811604900A CN109613414B CN 109613414 B CN109613414 B CN 109613414B CN 201811604900 A CN201811604900 A CN 201811604900A CN 109613414 B CN109613414 B CN 109613414B
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temperature
air door
test chamber
door baffle
environmental test
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CN109613414A (en
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张文亮
雷小阳
李文江
朱阳军
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Shandong Yuexin Electronic Technology Co ltd
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Shandong Yuexin Electronic Technology Co ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01RMEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26Testing of individual semiconductor devices
    • G01R31/2642Testing semiconductor operation lifetime or reliability, e.g. by accelerated life tests

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Abstract

The invention relates toAnd a control method and a control system, in particular to a method and a system for controlling the temperature change process of a high-temperature environment aging life test box, belonging to the technical field of high-temperature environment aging tests. The invention presets a curve T of temperature change along with timeaim(T) during the test, according to the current opening angle alpha of the air door baffle and the current temperature T in the environmental test chamberrealThe opening angle alpha of the air door baffle 9 is adjusted in real time through the air door baffle control mechanism, and finally the temperature in the environmental test chamber is changed along with the time according to a preset curve T of the temperatureaim(t) is varied. The technology can enable the temperature rising process at the beginning and the temperature lowering process at the end of the environmental aging life test to be more controllable, and is beneficial to improving the consistency of the test process.

Description

Method and system capable of controlling temperature change process of aging life test box in high-temperature environment
Technical Field
The invention relates to a control method and a control system, in particular to a temperature control method and a temperature control system for a high-temperature environment aging life test chamber, and belongs to the technical field of high-temperature environment aging tests.
Background
The High Temperature environment aging Life test is a method commonly used for evaluating the quality of semiconductor devices, such as HTRB (High Temperature Reverse Bias test), HTGB (High Temperature gate Bias test), HTFB (High Temperature Forward Bias test), HTOL (High Temperature Operating Life), and the like. The principle of the aging life test in the high-temperature environment is that a semiconductor device is placed under the high-temperature environment condition and is applied with specific electric stress, and the aging process of the device is accelerated to quickly evaluate the life and reliability of the device.
In the temperature rise process of the high-temperature environment aging life test at the beginning stage, the environment test box usually uses the maximum heating power to rapidly heat the temperature in the box, the temperature rise speed is high, and the temperature rise speed is difficult to accurately control. And in the cooling process at the test finishing stage, the temperature is mainly cooled by a natural heat dissipation mode, and the cooling speed is slow and difficult to accurately control. The temperature rising and reducing speeds have great influence on the test result, and the test consistency is poor because the change rate of the temperature cannot be controlled in the current test process.
Although some environmental test chambers have the function of controlling the temperature rise and the temperature drop, the test chambers usually have a refrigerating device and are expensive. The working principle of the high-temperature environment test chamber is shown in figure 1. The test box is composed of a heat-insulating layer 1, a fan 4, a heater 7, an air door 8 and an air door baffle 9. The heat-insulating layer 1 is used for reducing the heat diffusion inside the environmental test chamber to the outside. The heater 7 is used for heating the temperature of the gas inside the high-temperature environment test chamber. The fan 4 is used for driving the air flow inside the environmental test chamber. The insulating layer 1 is provided with an opening, and the opening is provided with a rotatable air door baffle 9. The damper baffle 9 is used for adjusting the exchange rate of the gas inside the environmental test chamber and the external environment. The opening degree of the air door 8 can be controlled by controlling the opening angle alpha of the air door baffle 9, and the opening angle alpha can be adjusted within the range of 0-90 degrees in a manual mode.
When the air door baffle 9 of the high-temperature environment test chamber is opened (the opening angle is 0 degrees and less than or equal to 90 degrees), a part of high-temperature gas in the high-temperature environment test chamber is discharged out of the environment test chamber, and meanwhile, some low-temperature gas from the external environment is sucked into the high-temperature environment test chamber. Therefore, the high-temperature environment test chamber can realize gas exchange between the inside and the outside through the damper 8. And the larger the opening angle of the damper baffle 9 is, the faster the exchange rate of the internal and external gas of the high-temperature environment test chamber is.
In general, the damper 8 of the high-temperature environmental test chamber has two main purposes; specifically, the method comprises the following steps: firstly, the air is ventilated to remove the unnecessary gas in the environment test. For example, the device under test 3 in the high-temperature environment test chamber volatilizes harmful gas and is ventilated through the damper 8. This function is hardly adopted in the high-temperature aging life test of the semiconductor device, on one hand, because no special gas is volatilized during the test and ventilation is not needed, and on the other hand, because the temperature deviates from the target value and affects the test if the opening degree of the damper 9 is improperly controlled during ventilation. (note: the high temperature environment test chamber is a general purpose test instrument, and its product is designed not only for semiconductor device testing).
And secondly, quickly reducing the temperature of the gas in the high-temperature environment test box. Because, when air door 8 closed completely, high temperature environmental test case inside gas temperature can only be through the heat dissipation cooling of high temperature environmental test case heat preservation 1. And the heat insulation effect of the heat insulation layer 1 of the high-temperature environment test box is better, which causes the temperature reduction of the high-temperature environment test box to be very slow. After opening air door 8, the inside high temperature gas of high temperature environment proof box can be discharged fast, and the low temperature gas of external environment is inhaled inside the high temperature environment proof box simultaneously to rapid cooling effect has been reached. For example, when the temperature of the gas inside the environmental test chamber is reduced from 150 ℃ to 40 ℃, it takes about two hours if the damper 8 is not opened, and it takes about 5 minutes if the damper 8 is opened to complete the temperature reduction. The function is used more in a high-temperature aging life test of a semiconductor device, and the main purpose is to reduce the test time.
At present, when an environmental aging life test of a semiconductor device is carried out, the temperature rising and cooling rates in the test process can be roughly controlled by manually controlling the opening angle alpha of the air door 8. However, this approach has significant limitations. 1) The control precision is poor, the same heating and cooling rates are difficult to guarantee in two tests, the temperature change process of each test is not completely consistent, and the test repeatability is poor. 2) The temperature variation process cannot be preset, for example, the temperature is increased or decreased according to a pre-designed variation curve. 3) Manual control is needed, and the operation is complex.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provide a method and a system for controlling the temperature change process of a high-temperature environment aging life test chamber, which can accurately and quickly adjust the opening degree of an air door, can make the temperature rise process at the beginning and the temperature drop process at the end of an environment aging life test more controllable, and is beneficial to improving the consistency of the test process.
According to the technical scheme provided by the invention, the method for controlling the temperature change process of the high-temperature environment aging life test chamber comprises the steps of providing an environment test chamber of a required environment for an environment aging test of a tested device; the air door baffle plate control mechanism can control the opening state of the air door baffle plate of the environmental test chamber; damper baffle control mechanism and system controlThe system controller is electrically connected with the system and is internally provided with a temperature tolerance sigma, a variation step length delta beta of an opening angle alpha of a damper baffle and a temperature control feedback period Twait(ii) a The method comprises the following steps:
step W1, determining the time-varying curve T of the target temperature in the environmental test chamber according to the test requirementaim(t); placing a required number of tested devices in an environmental test chamber so as to load the tested devices with a required high-temperature environment;
step W2, measuring the current temperature T in the environmental test chamberrealAnd obtaining the current temperature TrealWith a target temperature TaimIf delta T is less than or equal to-sigma, jumping to step W3, if-sigma is less than or equal to delta T and less than or equal to sigma, jumping to step W4, and if delta T is more than sigma, jumping to step W6;
step W3, checking the current opening angle alpha of the air door baffle, if the current opening angle alpha is larger than 0 degree, reducing the current opening angle alpha of the air door baffle by delta beta through the air door baffle control mechanism, otherwise, skipping to the step W7;
step W4, keeping the current state of the environmental test chamber in the temperature control feedback period Twait
Step W5, judging the temperature control state of the environmental test chamber, and jumping to step W8 when the temperature control state needs to be ended, or jumping to step W2;
step W6, checking the current opening angle alpha of the air door baffle, if the current opening angle alpha is smaller than 90 degrees, increasing the current opening angle alpha of the air door baffle by delta beta through the air door baffle control mechanism, and jumping to the step W4; otherwise, jumping to step W7;
in step W7, the output target temperature change rate is too fast to follow the target temperature curve Taim(t) controlling the temperature of the environmental test chamber, and jumping to step W8;
and step W8, closing the environmental test chamber and stopping temperature control in the environmental test chamber.
A system for controlling the temperature variation process of a high temperature environment aging life test chamber comprises an environment test capable of providing a required environment for an environment aging test of a device to be testedA tank; the air door baffle plate control mechanism capable of controlling the opening state of the air door baffle plate of the environmental test chamber and the system controller electrically connected with the air door baffle plate control mechanism are further included, and the system controller can acquire the current temperature T in the environmental test chamberreal(ii) a The temperature tolerance sigma, the variation step length delta beta of the opening angle alpha of the damper baffle and the temperature control feedback period T are configured in a system controllerwait(ii) a During the test, a target temperature change curve T is set according to the test requirementaim(t);
The system controller is used for controlling the system controller according to the current temperature T of the environmental test chamberrealCurrent target temperature T of target temperature change curveaimThe difference value delta T between the current temperature T and the current opening angle alpha of the air door baffle plate controls the opening state of the air door baffle plate through the air door baffle plate control mechanism so as to ensure that the current temperature T in the environmental test chamberrealAt TaimAnd within the range of +/-sigma, the variable temperature control of the environmental test chamber is realized.
The air door baffle control mechanism comprises a driving motor used for driving the air door baffle to move, a heat insulation layer is arranged on the outer wall of the environment test box, and an air channel baffle, a fan and a heater are arranged in the environment test box.
The invention has the advantages that: the temperature profile T over time can be presetaim(T) during the test, according to the current opening angle alpha of the air door baffle and the current temperature T in the environmental test chamberrealAdjusting the opening angle alpha of the air door baffle in real time through the air door baffle control mechanism, and finally enabling the temperature in the environmental test chamber to change along with the time according to a preset curve T of the temperatureaimAnd (t) change, namely the temperature rising process at the beginning and the temperature lowering process at the end of the environmental aging life test become more controllable, and the consistency of the test process is favorably improved.
Drawings
Fig. 1 is a schematic view of a conventional environmental test chamber.
FIG. 2 is a schematic view of an environmental test chamber according to the present invention.
FIG. 3 is a flow chart of the present invention for controlling the temperature of an environmental test chamber.
Description of reference numerals: 1-a heat insulation layer, 2-an effective constant temperature area, 3-a tested device, 4-a fan, 5-an air flow direction, 6-an air duct baffle, 7-a heater, 8-an air door, 9-an air door baffle and 10-a driving motor.
Detailed Description
The invention is further illustrated by the following specific figures and examples.
As shown in fig. 2 and 3: in order to accurately and rapidly adjust the opening degree of the air door and realize the process of controllable temperature change, the invention comprises an environmental test box which can provide a required environment for an environmental aging test of a tested device; the air door baffle control mechanism can control the opening state of an air door baffle 9 of the environmental test chamber; the air door baffle control mechanism is electrically connected with a system controller, and a temperature tolerance sigma, a variation step length delta beta of an opening angle alpha of the air door baffle 9 and a temperature control feedback period T are configured in the system controllerwait(ii) a The method comprises the following steps:
step W1, determining the time-varying curve T of the target temperature in the environmental test chamber according to the test requirementaim(t); placing a required number of devices under test 3 in an environmental test chamber so as to load the devices under test 3 with a required high temperature environment;
specifically, the target temperature TaimThe temperature tolerance σ of (a) needs to be slightly larger than the temperature control tolerance of the environmental test chamber, and generally, the temperature tolerance σ can be 1 ℃. The range of the opening angle alpha of the air door baffle 9 is 0-90 degrees, the unit of the step length delta beta is degree, the specific numerical value can be selected according to the requirement, and the detailed description is omitted here. In the embodiment of the invention, the temperature curve T isaim(t), there may be requirements for the temperature raising and lowering process in international or industrial standards, and in principle, it is only necessary to not violate the changing process of the test standard, and what specific process is set by the user of the device according to the requirements, which is well known to those skilled in the art, and will not be described herein again.
Step W2, measuring the current temperature T in the environmental test chamberrealAnd obtaining the current temperature TrealWith a target temperature TaimIf Δ T is less than or equal to- σ, jumping to step W3, if- σ is less than or equal to Δ TIf sigma, jumping to step W4, if delta T is larger than sigma, jumping to step W6;
specifically, the environment test chamber is internally provided with an air duct baffle 6, an effective constant temperature area 2 is formed above the air duct baffle 6, the tested device 3 is arranged in the effective constant temperature area 2, and the air flowing direction 5 is shown in the figure. After the heater 7 is turned on, the inside of the environmental test chamber can be heated to provide a high temperature environment required for the high temperature environment aging test of the device 3 to be tested.
The temperature in the environment test box can be acquired through the temperature sensor and other forms, so that the current temperature T can be obtainedreal,ΔT=Treal-Taim. The opening angle α of the damper flap 9 is specifically adjusted and controlled in accordance with the difference Δ T as described below.
Step W3, checking the current opening angle alpha of the air door baffle 9, if the current opening angle alpha is larger than 0 degree, reducing the current opening angle alpha of the air door baffle 9 by delta beta through an air door baffle control mechanism, otherwise, jumping to step W7;
specifically, when the front opening angle is larger than 0 °, the opening angle α needs to be reduced by the damper flap control mechanism in order to reduce heat exchange.
Step W4, keeping the current state of the environmental test chamber in the temperature control feedback period Twait
In particular, the temperature control feedback period TwaitThe specific situation of the method can be set according to the needs, and is not described in detail herein.
Step W5, judging the temperature control state of the environmental test chamber, and jumping to step W8 when the temperature control state needs to be ended, or jumping to step W2;
step W6, checking the current opening angle alpha of the air door baffle 9, if the current opening angle alpha is smaller than 90 degrees, increasing the current opening angle alpha of the air door baffle 9 by delta beta through an air door baffle control mechanism, and jumping to step W4; otherwise, jumping to step W7;
in step W7, the output target temperature change rate is too fast to follow the target temperature curve Taim(t) controlling the temperature of the environmental test chamber, and jumping to step W8;
and step W8, closing the environmental test chamber and stopping temperature control in the environmental test chamber.
In order to achieve the above object, the present invention provides a system capable of controlling the temperature variation process of a high temperature environment aging life test chamber, which comprises an environment test chamber capable of providing a required environment for an environment aging test of a device under test 3; the air door baffle control device is characterized by further comprising an air door baffle control mechanism capable of controlling the opening state of an air door baffle 9 of the environmental test chamber, and a system controller electrically connected with the air door baffle control mechanism and capable of acquiring the current temperature T in the environmental test chamberreal(ii) a The specific mode can be directly obtained through an additionally installed temperature sensor, and can also be obtained through a mode of communicating with an environmental test chamber. The temperature tolerance sigma, the variation step length delta beta of the opening angle alpha of the air door baffle 9 and the temperature control feedback period T are configured in a system controllerwait(ii) a During the test, a target temperature change curve T is set according to the test requirementaim(t);
The system controller is used for controlling the system controller according to the current temperature T of the environmental test chamberrealCurrent target temperature T of target temperature change curveaimThe difference value delta T between the current temperature T and the current opening angle alpha of the air door baffle plate 9 controls the opening state of the air door baffle plate 9 through the air door baffle plate control mechanism so as to ensure that the current temperature T in the environmental test chamberrealAt TaimAnd within the range of +/-sigma, the variable temperature control of the environmental test chamber is realized.
In the embodiment of the invention, the air door baffle control mechanism comprises a driving motor 10 for driving an air door baffle 9 to move, a heat insulation layer 1 is arranged on the outer wall of the environment test box, and an air channel baffle 6, a fan 4 and a heater 7 are arranged in the environment test box. Of course, a connecting piece is required between the driving motor 10 and the air door baffle 9, the connecting piece can adopt a screw rod and other forms, and the connecting piece can be selected according to the requirement as long as the driving motor 10 can drive the air door baffle 9 to move and the size of the opening angle alpha can be adjusted.
The system controller can be an existing common microprocessor such as a single chip microcomputer, and can be specifically selected according to needs, and the details are not repeated here. The temperature sensor in the box can adopt the existing common form, and can detect the temperature in the environmental test box.
The invention presets a curve T of temperature change along with timeaim(T) during the test, according to the current opening angle alpha of the air door baffle and the current temperature T in the environmental test chamberrealThe opening angle alpha of the air door baffle 9 is adjusted in real time through the air door baffle control mechanism, and finally the temperature in the environmental test chamber is changed along with the time according to a preset curve T of the temperatureaim(t) a change; the temperature rising process at the beginning and the temperature falling process at the end of the environmental aging life test can be more controllable, and the consistency of the test process is favorably improved.

Claims (3)

1. A method for controlling the temperature variation process of a high-temperature environment aging life test chamber comprises an environment test chamber which can provide a required environment for an environment aging test of a tested device; the air door baffle control mechanism is characterized by further comprising an air door baffle control mechanism capable of controlling the opening state of an air door baffle (9) of the environmental test chamber; the air door baffle control mechanism is electrically connected with a system controller, and a temperature tolerance sigma, a variation step length delta beta of an opening angle alpha of the air door baffle (9) and a temperature control feedback period T are configured in the system controllerwait(ii) a The method comprises the following steps:
step W1, determining the time-varying curve T of the target temperature in the environmental test chamber according to the test requirementaim(t); placing a required number of tested devices (3) in an environmental test chamber so as to load the tested devices (3) with a required high-temperature environment;
step W2, measuring the current temperature T in the environmental test chamberrealAnd obtaining the current temperature TrealWith a target temperature TaimIf delta T is less than or equal to-sigma, jumping to step W3, if-sigma is less than or equal to delta T and less than or equal to sigma, jumping to step W4, and if delta T is more than sigma, jumping to step W6;
step W3, checking the current opening angle alpha of the air door baffle (9), if the current opening angle alpha is larger than 0 degree, reducing the current opening angle alpha of the air door baffle (9) by delta beta through an air door baffle control mechanism, otherwise, skipping to step W7;
step W4, keeping the current state of the environmental test chamber in the temperature control feedback period Twait
Step W5, judging the temperature control state of the environmental test chamber, and jumping to step W8 when the temperature control state needs to be ended, or jumping to step W2;
step W6, checking the current opening angle alpha of the air door baffle (9), if the current opening angle alpha is smaller than 90 degrees, increasing the current opening angle alpha of the air door baffle (9) by delta beta through an air door baffle control mechanism, and jumping to step W4; otherwise, jumping to step W7;
in step W7, the output target temperature change rate is too fast to follow the target temperature curve Taim(t) controlling the temperature of the environmental test chamber, and jumping to step W8;
and step W8, closing the environmental test chamber and stopping temperature control in the environmental test chamber.
2. A system capable of controlling the temperature change process of a high-temperature environment aging life test chamber comprises an environment test chamber capable of providing a required environment for an environment aging test of a device (3) to be tested; the air door baffle control device is characterized by further comprising an air door baffle control mechanism capable of controlling the opening state of an air door baffle (9) of the environmental test chamber and a system controller electrically connected with the air door baffle control mechanism, wherein the system controller can acquire the current temperature T in the environmental test chamberreal(ii) a The temperature tolerance sigma, the variation step length delta beta of the opening angle alpha of the damper baffle (9) and the temperature control feedback period T are configured in a system controllerwait(ii) a During the test, a target temperature change curve T is set according to the test requirementaim(t);
The system controller is used for controlling the system controller according to the current temperature T of the environmental test chamberrealCurrent target temperature T of target temperature change curveaimThe difference value delta T between the current temperature T and the current opening angle alpha of the air door baffle plate (9) controls the opening state of the air door baffle plate (9) through the air door baffle plate control mechanism so as to ensure that the current temperature T in the environmental test chamberrealAt TaimWithin the range of +/-sigma, the temperature change control of the environmental test chamber is realized;
the temperature-varying control method comprises the following steps:
step W1, determining the time-varying curve T of the target temperature in the environmental test chamber according to the test requirementaim(t); placing a required number of tested devices (3) in an environmental test chamber so as to load the tested devices (3) with a required high-temperature environment;
step W2, measuring the current temperature T in the environmental test chamberrealAnd obtaining the current temperature TrealWith a target temperature TaimIf delta T is less than or equal to-sigma, jumping to step W3, if-sigma is less than or equal to delta T and less than or equal to sigma, jumping to step W4, and if delta T is more than sigma, jumping to step W6;
step W3, checking the current opening angle alpha of the air door baffle (9), if the current opening angle alpha is larger than 0 degree, reducing the current opening angle alpha of the air door baffle (9) by delta beta through an air door baffle control mechanism, otherwise, skipping to step W7;
step W4, keeping the current state of the environmental test chamber in the temperature control feedback period Twait
Step W5, judging the temperature control state of the environmental test chamber, and jumping to step W8 when the temperature control state needs to be ended, or jumping to step W2;
step W6, checking the current opening angle alpha of the air door baffle (9), if the current opening angle alpha is smaller than 90 degrees, increasing the current opening angle alpha of the air door baffle (9) by delta beta through an air door baffle control mechanism, and jumping to step W4; otherwise, jumping to step W7;
in step W7, the output target temperature change rate is too fast to follow the target temperature curve Taim(t) controlling the temperature of the environmental test chamber, and jumping to step W8;
and step W8, closing the environmental test chamber and stopping temperature control in the environmental test chamber.
3. The system for controlling the temperature variation process of the aging life test chamber in the high-temperature environment according to claim 2, wherein: the air door baffle control mechanism comprises a driving motor (10) used for driving an air door baffle (9) to move, a heat preservation layer (1) is arranged on the outer wall of the environment test box, and an air channel baffle (6), a fan (4) and a heater (7) are arranged in the environment test box.
CN201811604900.1A 2018-12-26 2018-12-26 Method and system capable of controlling temperature change process of aging life test box in high-temperature environment Active CN109613414B (en)

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