CN109596618A - A kind of microcosmic heterogeneous structure three-dimensional modeling measurement method based on profiled outline sequence - Google Patents
A kind of microcosmic heterogeneous structure three-dimensional modeling measurement method based on profiled outline sequence Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
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Abstract
The present invention relates in mechanical engineering machinery manufacturing technology field and image measurement technology field, in particular to three-dimensional metallographic testing field.A kind of microcosmic heterogeneous structure three-dimensional modeling measurement method based on profiled outline sequence, the sample that microcosmic heterogeneous structure material test specimen is made into metallographic test is passed through into the first grinding wheel, second grinding wheel, third grinding wheel carries out examination grinding, pass through the first microlens simultaneously, second microlens, third microlens acquire sample upper surface image, with edge detection, sub-pix algorithm of subdivision determines the outline data of each phase boundray in faultage image, the three-dimensional model reconfiguration of each phase closed boundary is carried out with the tracking of eight field joined marks and NURBS Freeform surface reconstruction method, the three-dimensional entity model of each phase is obtained by Boolean calculation.
Description
Technical field
The present invention relates in mechanical engineering machinery manufacturing technology field and image measurement technology field, in particular to it is three-dimensional
Metallographic testing field.
Background technique
Add in preparation, the molding of the heterogeneous materials such as Particle reinforced composite, polycrystalline metal and porous material
In the entity measuring problem of the Three-dimensional simulation analysis and three dimension scale of work and machining, need to measure particle phase, crystal and
The three-dimensional dimension of hole, and the threedimensional model of reflection heterogeneous material entity is generated, for the preparation quality or progress for evaluating material
High-precision three-dimensional simulation analysis lays the foundation.Currently, in Particle reinforced composite, polycrystalline metal and porous material
The measurement analysis of the two-dimentional scale such as the common metallographic test of equal heterogeneous materials is quite mature, but also locates in terms of three dimension scale
In the exploratory stage, the general three-dimensional metallographic pattern that material is constructed using two-dimentional metallographic result；This method has certain reality
With value, but due to the three-dimensional data without accurately obtaining material, the three-dimensional metallographic of formation and actually there is a certain distance.Using
Industry CT method can carry out the three-dimensional model reconfiguration of entity by the method for tomoscan, but for granule enhancement type composite wood
The three-dimensional model reconfiguration of material and polycrystalline metal, since particle phase and the size of crystal are all in several microns to tens microns of ruler
Degree, the three-dimensionalreconstruction precision of industry CT are difficult to meet the requirement of this kind of material and with high costs.Layer scan method is to develop in recent years
A kind of damage type Reverse modeling method, be substantially carried out three-dimensional measurement and the modeling of metallic material components routine scale at present,
Precision is several microns to tens microns；The full-automatic serial section system of Robo-Met.3D of UES company, U.S. exploitation, certainly using 6
By degree mechanical arm, grinding and polishing material, formation serial section pass through the metallographic to sliced materials microstructure layer by layer automatically
Serial section reconstruction of two-dimensional images is generated threedimensional model by etching and imaging, post-treated program, and the precision of detection reaches micron
Grade, but detection efficiency is not high.Above-mentioned three-dimensional reconstruction method and means is difficult to meet Particle reinforced composite, polycrystalline
The heterogeneous materials such as body metal and porous material need a kind of new in micron to nanoscale three-dimensional measurement and modeling requirement
Method realizes the 3D solid high-acruracy survey and model reconstruction of heterogeneous material.
Summary of the invention
The technical problems to be solved by the present invention are: change and solve Particle reinforced composite, polycrystalline metal with
And in the heterogeneous materials such as porous material the three-dimensional measurement of micro-structures such as particle phase, crystal and hole and this kind of material three-dimensional mould
Type reconstructs the problems such as difficulty is big, precision is low and at high cost, so that providing one kind is able to achieve heterogeneous material entity measuring and three-dimensional mould
The device of type reconstruct.
The technical scheme adopted by the invention is that: a kind of microcosmic heterogeneous structure three-dimensional modeling survey based on profiled outline sequence
Device is measured, mainly by three axis mobile platform of high precision numerical control, indexable precision plane grinding and polishing apparatus, image collecting device and attachment
Part forms:
Three axis mobile platform of high precision numerical control includes: by pedestal (1) and the column vertical with pedestal (1) in pedestal (1) side
(4) frame main body of three axis mobile platforms is formed, there are a pair of of X direction guiding rail, guide X in the direction for being parallel to column (4) on pedestal (1)
Rail is on front side of pedestal (1) and in the middle part of rear side, has the X that can be moved linearly on X direction guiding rail to workbench on X direction guiding rail
(31), X is parallel to pedestal (1) to workbench (31)；X has a pair of Y-direction guide rail perpendicular to X direction guiding rail, Y on workbench (31)
There is the Y-direction workbench (22) that can be moved linearly in Y-direction guide rail on direction guiding rail, Y-direction workbench (22) is parallel to pedestal
(1)；There is a pair of Z-direction guide rail perpendicular to pedestal (1) on column (4), Z-direction guide rail is in the middle part of column (4), is had on Z-direction guide rail
One Z-direction workbench (38) that can be moved linearly on Z-direction guide rail, Z-direction workbench (38) are parallel to column (4)；X direction guiding rail by
Two parallel X are formed to first straight line guide rail (32) and X to second straight line guide rail (35), and Y-direction guide rail is by two parallel Y-directions
First straight line guide rail (2) and Y-direction second straight line guide rail (18) composition, Z-direction guide rail is by two parallel Z-direction first straight line guide rails
(6) it is formed with Z-direction second straight line guide rail (9)；X to linear reciprocating motor (34) be mounted on X to first straight line guide rail (32) and X to
The middle part of second straight line guide rail (35), Y-direction linear reciprocating motor (21) is mounted on Y-direction first straight line guide rail (2) and Y-direction second is straight
In the middle part of line guide rail (18), Z-direction linear reciprocating motor (5) is mounted on Z-direction first straight line guide rail (6) and Z-direction second straight line guide rail (9)
Middle part；X is mounted on X to first straight line guide rail (32) and X between linear reciprocating motor (34) to linear grating (33), and Y-direction is straight
Line grating (19) is mounted between Y-direction second straight line guide rail (18) and Y-direction linear reciprocating motor (21), Z-direction linear grating (7) peace
Between Z-direction first straight line guide rail (6) and Z-direction linear reciprocating motor (5).
Indexable precision plane grinding and polishing apparatus is mounted on Z-direction workbench (38), indexable precision plane grinding and polishing apparatus packet
The crossbeam (10) being fixedly connected with Z-direction workbench (38) is included, the grinding wheel position rotaring motor (28) being mounted on crossbeam (10) is mounted on
Grinding wheel pedestal (36) on grinding wheel position rotaring motor (28) output shaft, the first grinding wheel motor being mounted on grinding wheel pedestal (36)
(27), the second grinding wheel motor (29), third grinding wheel motor (40) are equipped with the first grinding wheel on the first grinding wheel motor (27) output shaft
(37), it is equipped with the second grinding wheel (30) on the second grinding wheel motor (29) output shaft, is installed on third grinding wheel motor (40) output shaft
Have third grinding wheel (39), the granularity of the first grinding wheel (37) is greater than the granularity of the second grinding wheel (30), and the granularity of the second grinding wheel (30) is big
Granularity in third grinding wheel (39).
Image collecting device includes the image acquisition device (11) being fixedly connected by clamping plate (12) with crossbeam (10), and image is adopted
Storage (11) lower end connects Image Acquisition motor (13), installs the first microlens on Image Acquisition motor (13) output shaft
(14), the second microlens (15), third microlens (16)；The enlargement ratio of first microlens (14) is micro- less than second
The enlargement ratio of camera lens (15), the second microlens (15) is less than third microlens (16), the light of the first microlens (14)
Axis, the optical axis of the second microlens (15), third microlens (16) optical axis be parallel to Z-direction guide rail during the work time.
Accessories section includes being fixedly mounted on the second hanging ring (26) above crossbeam (10), being mounted at the top of column (4)
Fixed pulley (8), the first hanging ring (24) being mounted on clump weight (23), the pallet (3) being mounted on Y-direction workbench (22), peace
It is inner for clamping the clips (17) of sample (20) mounted in pallet (3), clump weight (23) vacantly, the first hanging ring (24), the second hanging ring
(26) it is connected by the wirerope (25) being mounted on fixed pulley (8).
As a kind of preferred embodiment: the axis of grinding wheel position rotaring motor (28) output shaft, the first grinding wheel motor (27) axis,
Axis, the axis of third grinding wheel motor (40) of second grinding wheel motor (29) are parallel with Z-direction guide rail；Under first grinding wheel (37)
End face, the lower end surface of the second grinding wheel (30), third grinding wheel (39) lower end surface in the same plane.
X feeds back position signal of the X to workbench (31) to linear grating (33), and Y-direction linear grating (19) feeds back Y-direction work
The position signal of platform (22), Z-direction linear grating (7) feed back the position signal of Z-direction workbench (38).
Measuring coordinate system is a three-dimensional rectangular coordinate system, and in measurement coordinate system, X direction guiding rail is from left to right X-axis side
To the X axis coordinate of X to workbench (31) to the mobile extreme position in X direction guiding rail left side is 0, and Y-direction guide rail is Y-axis from back to front
Direction, Y-direction workbench (22) are 0 to the Y axis coordinate of the extreme position of movement on rear side of Y-direction guide rail, and Z-direction guide rail is Z from top to bottom
The Z axis coordinate of axis direction, Z-direction workbench (38) to the mobile extreme position in Z-direction guide rail downside is 0.
A kind of microcosmic heterogeneous structure three-dimensional modeling measurement method based on profiled outline sequence, according to following step into
Row:
Microcosmic heterogeneous structure material test specimen is made into the sample (20) of metallographic test, is then placed on sample (20) by step 1
On pallet (3), sample (20) then are clamped by clip (17)；
Step 2, starting grinding wheel position rotaring motor (28), X make the to linear reciprocating motor (34) and Y-direction linear reciprocating motor (21)
One grinding wheel (37) is located at right above sample (20), moves down crossbeam (10), is carried out using the first grinding wheel (37) to sample (20)
Examination grinding, until sample (20) surface is all by wheel grinding until；
Step 3 keeps crossbeam (10) position constant, and X is to linear reciprocating motor (34) and Y-direction linear reciprocating motor (21) for driving,
Make image collector setting in right above sample (20), start Image Acquisition motor (13), respectively with the first microlens (14),
Second microlens (15), third microlens (16) acquire sample (20) upper surface image, adjust image acquisition device (11), directly
To sample (20) surface image of focus is obtained, microlens used by determining according to test request write down Y-direction work
Platform measurement coordinate system in X, Y-direction coordinate value (x 0,y 0), it is being measured the position as image collecting device when acquisition image
The location point of X/Y plane in coordinate system；
Step 4 is considered radial distortion when second order accuracy, is passed through 11 × 11 micro- chessboard calibration plates pair using Zhang Zhengyou calibration method
The microlens determined in image collecting device and step 3 are demarcated, and are obtained image collecting device and are corresponded to microlens
6 inner parameters and 2 external parameter matrixes complete the calibration of image collecting device and corresponding microlens；
Sample is moved to below the first grinding wheel (37) by step 5, driving X to workbench and Y-direction workbench；Drive Z-direction work
Platform (38) allows indexable precision plane grinding and polishing apparatus and image collecting device together along measurement coordinate systemZTo feeding, step-length model
It encloses and is set as 1 ~ 5 μm of definite value, corase grinding first is carried out to sample (20) using the first grinding wheel (37) and is cut, then is right using the second grinding wheel (30)
Sample (20) carries out fine grinding and cuts, and is finally polished using third grinding wheel (39) to sample (20)；Keep image collecting device
Position is constant, writes down Z-direction coordinate value of the image collecting device in measurement coordinate systemz i0 , then Y-direction workbench (22) are driven
To measurement coordinate system (x 0,y 0) point, sample (20) surface is carried out with the microlens determined in image collecting device and step 3
Image Acquisition, continuous acquisition in the positionNThe tomography micro-image for opening sample (20) surface, is denoted as: { wp_image i,j
(u,v)| 1≤j≤N, 1≤u≤U, 1≤v≤V, whereinu、vFor seat of the faultage image pixel in image coordinate system
Mark, image coordinate system is plane right-angle coordinate, and in image coordinate system, coordinate origin is located at the upper left corner of tomography micro-image
Point,uAxis direction is the upper left angle point of tomography micro-image to upper right angle point,vAxis direction is the upper left angle point of tomography micro-image
To lower-left angle point,U、VForu、vMaximum value,iFor the sequence number of the tomography micro-image；
Step 6, to step 5 acquisitionNIt opens image and carries out median filtering respectively, and is rightNOpen same position pixel in image
Gray scale is averaged, and image preprocessing is carried out, the image { wp_image after obtaining gray scale averagely i (u,v)| 1≤u≤U, 1
≤v≤V, edge is carried out with Canny operator and is sought, then obtained edge is finely divided away from sub-pix algorithm of subdivision with second order
Processing, obtain respectively closing in heterogeneous material the boundary of phase in image coordinate system outline position point set (u i ,v i )| p(u i ,v i )=1 }；Using the calibrating parameters of image collecting device, by the Z of image collecting device when outline position point set and acquisition image
To coordinatez i0 , by coordinate transform be denoted as measurement coordinate system in coordinate set (x i ,y i ,z i ) }；
Step 7 is fitted by the boundary profile that eight field joined mark tracings respectively close in heterogeneous material phase, is obtained in image
The two-dimensional silhouette data of each closing phase boundray；The length of each closing phase boundray profile is found out againLWith the area of encirclementA, by
Formula 4A/LThe equivalent particle size in single closing the surrounded space of phase boundray is calculated, then compares the maximum value for finding out partial size in the width imaged max；
The operation Step 5: step 6 is repeated, until being ground in step 8MLayer, grinding depth reach maximum particle diameterd max
1.5 times, stop grinding and acquisition, record the Z-direction coordinate z of every layer of tomography micro-image i (1≤i≤M)；Obtain sample (20)
Whole tomography sequence image { (z i ,wp_image i,j )| 1≤i≤M, 1≤j≤NAnd tomography sequence image measurement coordinate
In system profile point cloud (x i ,y i ,z i )| 1≤i≤M}；
Step 9, to the profile point cloud of obtained sample tomography sequence image (x i ,y i ,z i )| 1≤i≤MCarry out based on eight
Fork treekThe point cloud data curvature in field is simplified, point cloud data after being simplified (x′ i ,y′ i ,z i )| 1≤i≤M}；
Step 10 is carried out the wheel in closing the surrounded space of phase boundray to the data by point cloud compressing by eight field joined mark tracings
Exterior feature fitting obtains the two-dimensional silhouette that each boundary in image surrounds space；Space is surrounded to each boundary again and carries out NURBS freedom
Obtained free form surface is converted 3D solid by surface reconstruction, and the three-dimensional for obtaining each closing surrounded space of phase boundray is several
What model；
Step 11, using the outermost boundary in all closing formed spaces of phase boundray as the threedimensional model of constructed sample
Boundary constructs the three-dimensional cube of sample, using obtained each surrounded space of closing phase boundray as reinforcement, by three-dimensional cube
Boolean is carried out with reinforcement and asks poor, obtains the threedimensional model of matrix phase.
The threedimensional model of the threedimensional model of matrix phase and closing the surrounded space of phase boundray is combined by step 12,
But it sums without boolean to get to the three-dimensional entity model that can reflect each phase respectively.
As a kind of preferred embodiment: the measuring system uses non-contact image measurement technology, by being successively ground examination along Z-direction
Sample, and with image collecting device correspondingly successively obtain heterogeneous material sample tomography Series microscopy images, with edge detection, Asia
Arithmetic of subpixel determines the outline data of each phase boundray in faultage image, with the tracking of eight field joined marks and NURBS free form surface
Reconstructing method carries out the three-dimensional model reconfiguration of each phase closed boundary, obtains the three-dimensional entity model of each phase by Boolean calculation.
The beneficial effects of the present invention are:
(1) three axis mobile platform of high precision numerical control and indexable precision plane grinding and polishing apparatus are used, sample is carried out successively micro
The method of accurate grinding and polishing obtains the metallographic test level surface of sample, at the same obtain the high-precision Z of fault surface to position data and
The layer-by-layer section center X of high consistency to Y-direction position data；
(2) a width micro-image is acquired by one layer of grinding and polishing to realize the acquisition of sequence image, while utilizing when Z axis is fed
High accuracy depth information forms the micro- sequence image of high-precision tomography of sample, is obtained using non-contact image measurement technology disconnected
The outline data of each phase boundray, realizes asking for heterogeneous material boundary profile high-precision three-dimensional location information in the micro- sequence image of layer
It takes, improves the precision and efficiency of each phase boundray outline data measurement；
(3) combine (1) and (2), using the method for NURBS Freeform surface reconstruction construct in sample each particle (crystal or
Hole) three-dimensional entity model determine its distribution in the sample, realize micro- while using the location information of its boundary profile
See three-dimensional model reconfiguration and the measurement of heterogeneous structure；It solves the problems, such as that heterogeneous material microscopic three-dimensional model reconstruction is difficult, there is side
The advantages of method is simple, precision is high, at low cost, Yi Shixian.
This method can be realized the heterogeneous materials such as Particle reinforced composite, polycrystalline metal and porous material
3D solid dimensional measurement and three-dimensional model reconfiguration, for this kind of heterogeneous material preparation, analysis and emulation provide high-precision it is microcosmic
Heterogeneous structure threedimensional model and measurement data.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of device used herein；
Fig. 2 is the B of Fig. 1 to diagram；
Fig. 3 is the A-A cut-away view of Fig. 1；
In figure: 1, pedestal, 2, Y-direction first straight line guide rail, 3, pallet, 4, column, 5, Z-direction linear reciprocating motor, 6, Z-direction first it is straight
Line guide rail, 7, Z-direction linear grating, 8, fixed pulley, 9, Z-direction second straight line guide rail, 10, crossbeam, 11, image acquisition device, 12, folder
Plate, 13, Image Acquisition motor, the 14, first microlens, the 15, second microlens, 16, third microlens, 17, clip,
18, Y-direction second straight line guide rail, 19, Y-direction linear grating, 20, sample, 21, Y-direction linear reciprocating motor, 22, Y-direction workbench, 23,
Clump weight, the 24, first hanging ring, 25, wirerope, the 26, second hanging ring, the 27, first grinding wheel motor, 28, grinding wheel position rotaring motor, 29,
Second grinding wheel motor, the 30, second grinding wheel, 31, X to workbench, 32, X to first straight line guide rail, 33, X is to linear grating, 34, X
To linear reciprocating motor, 35, X to second straight line guide rail, 36, grinding wheel pedestal, the 37, first grinding wheel, 38, Z-direction workbench, 39,
Three grinding wheels, 40, third grinding wheel motor.
Specific embodiment
Embodiment one
A kind of microcosmic heterogeneous structure three-dimensional modeling measuring device based on profiled outline sequence, it is compound to be mainly directed towards granule enhancement type
The sample of material type, as shown in Figure 1, mainly by three axis mobile platform of high precision numerical control, indexable precision plane grinding and polishing apparatus,
Image collecting device and accessories section composition:
Three axis mobile platform of high precision numerical control includes: to form three axis by pedestal and the column vertical with pedestal in pedestal side to move
There is a pair of of X direction guiding rail in the frame main body of moving platform, the direction that column is parallel on pedestal, X direction guiding rail be on front side of pedestal and after
Middle side part has on X direction guiding rail the X that can be moved linearly on X direction guiding rail to constitute to workbench, X direction guiding rail and X to workbench
Sliding pair, X are parallel to pedestal to workbench；X has a pair of Y-direction guide rail perpendicular to X direction guiding rail on workbench, in Y-direction guide rail
There is the Y-direction workbench that can be moved linearly in Y-direction guide rail, Y-direction workbench is parallel to pedestal, Y-direction guide rail and Y-direction workbench
Constitute sliding pair；There is a pair of Z-direction guide rail perpendicular to pedestal on column, Z-direction guide rail is in the middle part of column, has one on Z-direction guide rail
A Z-direction workbench that can be moved linearly on Z-direction guide rail, Z-direction workbench are parallel to column, Z-direction guide rail and Z-direction workbench structure
At sliding pair；Measuring coordinate system is a three-dimensional rectangular coordinate system, and in measurement coordinate system, X direction guiding rail is from left to right X-axis side
To, the X axis coordinate of X to workbench to the mobile extreme position in X direction guiding rail left side is 0, and Y-direction guide rail is Y direction from back to front,
Y-direction workbench is 0 to the Y axis coordinate of the extreme position of movement on rear side of Y-direction guide rail, and Z-direction guide rail is Z-direction, Z-direction from top to bottom
The Z axis coordinate of workbench to the mobile extreme position in Z-direction guide rail downside is 0；X direction guiding rail is from two parallel X to first straight line
Guide rail and X are formed to second straight line guide rail, and Y-direction guide rail is by two parallel Y-direction first straight line guide rails and Y-direction second straight line guide rail
Composition, Z-direction guide rail are made of two parallel Z-direction first straight line guide rails and Z-direction second straight line guide rail；X is to linear reciprocating motor
X is mounted on to first straight line guide rail and X to the middle part of second straight line guide rail, Y-direction linear reciprocating motor is mounted on Y-direction first straight line
In the middle part of guide rail and Y-direction second straight line guide rail, Z-direction linear reciprocating motor is mounted on Z-direction first straight line guide rail and Z-direction second straight line is led
In the middle part of rail；X is mounted on X to first straight line guide rail and X between linear reciprocating motor to linear grating, and Y-direction linear grating is installed
Between Y-direction second straight line guide rail and Y-direction linear reciprocating motor, Z-direction linear grating is mounted on Z-direction first straight line guide rail and Z-direction
Between linear reciprocating motor.
Indexable precision plane grinding and polishing apparatus is mounted on Z-direction workbench, and indexable precision plane grinding and polishing apparatus includes and Z
The crossbeam being fixedly connected to workbench, the grinding wheel position rotaring motor being mounted on crossbeam are mounted on grinding wheel position rotaring motor output shaft
Grinding wheel pedestal, the first grinding wheel motor, the second grinding wheel motor, the third grinding wheel motor being mounted on grinding wheel pedestal, the first grinding wheel
First grinding wheel is installed on motor output shaft, the second grinding wheel is installed on the second grinding wheel motor output shaft, third grinding wheel motor is defeated
Third grinding wheel is installed, the granularity of the first grinding wheel is greater than the granularity of the second grinding wheel, and the granularity of the second grinding wheel is greater than third on shaft
The granularity of grinding wheel.
Image collecting device includes the image acquisition device being fixedly connected by clamping plate with crossbeam, the connection of image acquisition device lower end
Image Acquisition motor installs the first microlens, the second microlens, third microlens on Image Acquisition motor output shaft；
The enlargement ratio of first microlens is less than third microscope less than the second microlens, the enlargement ratio of the second microlens
Head, the optical axis of the first microlens, the optical axis of the second microlens, third microlens optical axis be parallel to during the work time
Z-direction guide rail.
Accessories section include be fixedly mounted on the second hanging ring above crossbeam, the fixed pulley that is mounted at the top of column, installation
The first hanging ring on clump weight, the pallet being mounted on Y-direction workbench are mounted on for clamping the clip of sample in pallet,
Clump weight is hanging, and the first hanging ring, the second hanging ring are connected by the wirerope being mounted on fixed pulley.
Axis, the axis of the first grinding wheel motor, the axis of the second grinding wheel motor, the third sand of grinding wheel position rotaring motor output shaft
The axis of turbin generator is parallel with Z-direction guide rail；The lower end surface of first grinding wheel, the lower end surface of the second grinding wheel, third grinding wheel lower end
Face is in the same plane.X feeds back position signal of the X to workbench to linear grating, and Y-direction linear grating feeds back Y-direction workbench
Position signal, Z-direction linear grating feed back Z-direction workbench position signal.
Embodiment two
A kind of microcosmic heterogeneous structure threedimensional model modeling measurement method based on profiled outline sequence, specimen types are mainly particle
Enhanced type composite material is carried out according to following step:
(1) Particle reinforced composite test specimen is made into the sample of metallographic test, then sample is placed on pallet, then
Pass through clamp sample；
(2) start grinding wheel position rotaring motor, X to linear reciprocating motor and Y-direction linear reciprocating motor, the first grinding wheel is made to be located at sample just
Top moves down crossbeam, carries out examination grinding to sample using the first grinding wheel, until specimen surface all by wheel grinding to for
Only；
(3) it keeps crossbeam position constant, drives X to linear reciprocating motor and Y-direction linear reciprocating motor, make image collector set
Right above sample, starts Image Acquisition motor, adopted respectively with the first microlens, the second microlens, third microlens
Collect sample upper surface image, adjusts image acquisition device, it is true according to test request until obtaining the specimen surface image of focus
Microlens used by fixed, write down Y-direction workbench in measurement coordinate system X, Y-direction coordinate value (x 0,y 0), which is made
The location point of image collecting device X/Y plane in measurement coordinate system when to acquire image；
(4) Zhang Zhengyou calibration method is used, radial distortion when second order accuracy is considered, by 11 × 11 micro- chessboard calibration plates to image
The microlens determined in acquisition device and step (3) are demarcated, and 6 of image collecting device and corresponding microlens are obtained
Inner parameter and 2 external parameter matrixes complete the calibration of image collecting device and corresponding microlens；
(5) sample is moved to below the first grinding wheel by driving X to workbench and Y-direction workbench；Driving Z-direction workbench allows and can turn
Position precision plane grinding and polishing apparatus and image collecting device are together along measurement coordinate systemZTo feeding, step-length range is set as 1 ~ 5 μm
Definite value first carries out corase grinding to sample using the first grinding wheel and cuts, then carries out fine grinding to sample using the second grinding wheel and cut, finally using the
Three grinding wheels polish sample；It keeps the position of image collecting device constant, writes down image collecting device in measurement coordinate system
In Z-direction coordinate valuez i0 ；, then by Y-direction workbench drive to measurement coordinate system (x 0,y 0) point, with image collecting device and
(3) microlens determined in carry out the Image Acquisition of specimen surface, in the position continuous acquisitionNThe tomography for opening specimen surface is aobvious
Micro- image, is denoted as: { wp_image i,j (u,v)| 1≤j≤N, 1≤u≤U, 1≤v≤V, whereinu、vFor faultage image
Coordinate of the pixel in image coordinate system,U、VForu、vMaximum value,iFor the sequence number of the tomography micro-image；
(6) to (5) acquisitionNIt opens image and carries out median filtering respectively, and is rightNThe gray scale for opening same position pixel in image asks flat
Mean value carries out image preprocessing, the image { wp_image after obtaining gray scale averagely i (u,v)| 1≤u≤U, 1≤v≤V,
Edge is carried out with Canny operator to seek, then processing is finely divided to obtained edge away from sub-pix algorithm of subdivision with second order, is obtained
In Particle reinforced composite the boundary of particle phase in image coordinate system outline position point set (u i ,v i )| p(u i ,v i )=1 }；Using the calibrating parameters of image collecting device, by the Z of image collecting device when outline position point set and acquisition image
To coordinatez i0 , by coordinate transform be denoted as measurement coordinate system in coordinate set (x i ,y i ,z i ) }；
(7) it is fitted, is obtained by the boundary profile that eight field joined mark tracings carry out each particle phase in Particle reinforced composite
The two-dimensional silhouette data of each particle phase boundray in image；The length of each particle phase boundray profile is found out againLWith the face of encirclement
ProductA, by formula 4A/LThe equivalent particle size in the surrounded space of individual particle phase boundray is calculated, then compares and finds out partial size in the width image
Maximum valued max；
(8) operation of (5), (6) is repeated, until being groundMLayer, grinding depth reach maximum particle diameterd max1.5 times, stop
It is only ground and acquires, record the Z-direction coordinate z of every layer of tomography micro-image i (1≤i≤M)；Obtain whole tomography sequences of sample
Image { (z i ,wp_image i,j )| 1≤i≤M, 1≤j≤NAnd tomography sequence image measurement coordinate system in profile point cloud
{(x i ,y i ,z i )| 1≤i≤M}；
(9) to the profile point cloud of obtained sample tomography sequence image (x i ,y i ,z i )| 1≤i≤MCarry out based on Octreek
The point cloud data curvature in field is simplified, point cloud data after being simplified (x′ i ,y′ i ,z i )| 1≤i≤M}；
(10) data by point cloud compressing are carried out with the profile in the surrounded space of particle phase boundray by eight field joined mark tracings
Fitting obtains the two-dimensional silhouette that each boundary in image surrounds space；Space is surrounded to each boundary again and carries out NURBS freely song
Face reconstruct, converts 3D solid for obtained free form surface, obtains the three-dimensional geometry in each surrounded space of particle phase boundray
Model；
(11) using the outermost boundary in all formed spaces of particle phase boundray as the threedimensional model boundary of constructed sample,
The three-dimensional cube for constructing sample by three-dimensional cube and increases using obtained each surrounded space of particle phase boundray as reinforcement
Strong body carries out boolean and asks poor, obtains the threedimensional model of matrix phase.
(12) threedimensional model of the threedimensional model of matrix phase and the surrounded space of particle phase boundray is combined, but not into
Row boolean summation is to get to the three-dimensional entity model that can reflect each phase respectively.
Embodiment three
With embodiment two the difference is that: realize to polycrystalline metal material layer mill after high-precision three-dimensional metallographic model weight
It builds.
Example IV
With embodiment one the difference is that: image collecting device is using conventional camera lens, i.e. the first microlens, the second microscope
Head, third microlens are all conventional camera lens, be can be realized to the high-precision three-dimensional Model Reconstruction after porous material layer mill.
Claims (3)
1. a kind of microcosmic heterogeneous structure three-dimensional modeling measurement method based on profiled outline sequence is carried out according to following step:
Microcosmic heterogeneous structure material test specimen is made into the sample (20) of metallographic test, is then placed on sample (20) by step 1
On pallet (3), sample (20) then are clamped by clip (17)；
Step 2, starting grinding wheel position rotaring motor (28), X make the to linear reciprocating motor (34) and Y-direction linear reciprocating motor (21)
One grinding wheel (37) is located at right above sample (20), moves down crossbeam (10), is carried out using the first grinding wheel (37) to sample (20)
Examination grinding, until sample (20) surface is all by wheel grinding until；
Step 3 keeps crossbeam (10) position constant, and X is to linear reciprocating motor (34) and Y-direction linear reciprocating motor (21) for driving,
Make image collector setting in right above sample (20), start Image Acquisition motor (13), respectively with the first microlens (14),
Second microlens (15), third microlens (16) acquire sample (20) upper surface image, adjust image acquisition device (11), directly
To sample (20) surface image of focus is obtained, microlens used by determining according to test request write down Y-direction work
Platform measurement coordinate system in X, Y-direction coordinate value (x 0,y 0), it is being measured the position as image collecting device when acquisition image
The location point of X/Y plane in coordinate system；
Step 4 is considered radial distortion when second order accuracy, is passed through 11 × 11 micro- chessboard calibration plates pair using Zhang Zhengyou calibration method
The microlens determined in image collecting device and step 3 are demarcated, and are obtained image collecting device and are corresponded to microlens
6 inner parameters and 2 external parameter matrixes complete the calibration of image collecting device and corresponding microlens；
Sample is moved to below the first grinding wheel (37) by step 5, driving X to workbench and Y-direction workbench；Drive Z-direction work
Platform (38) allows indexable precision plane grinding and polishing apparatus and image collecting device together along measurement coordinate systemZTo feeding, step-length model
It encloses and is set as 1 ~ 5 μm of definite value, corase grinding first is carried out to sample (20) using the first grinding wheel (37) and is cut, then is right using the second grinding wheel (30)
Sample (20) carries out fine grinding and cuts, and is finally polished using third grinding wheel (39) to sample (20)；Keep image collecting device
Position is constant, writes down Z-direction coordinate value of the image collecting device in measurement coordinate systemz i0 , then Y-direction workbench (22) are driven
To measurement coordinate system (x 0,y 0) point, sample (20) surface is carried out with the microlens determined in image collecting device and step 3
Image Acquisition, continuous acquisition in the positionNThe tomography micro-image for opening sample (20) surface, is denoted as: { wp_image i,j
(u,v)| 1≤j≤N, 1≤u≤U, 1≤v≤V, whereinu、vFor seat of the faultage image pixel in image coordinate system
Mark, image coordinate system is plane right-angle coordinate, and in image coordinate system, coordinate origin is located at the upper left corner of tomography micro-image
Point,uAxis direction is the upper left angle point of tomography micro-image to upper right angle point,vAxis direction is the upper left angle point of tomography micro-image
To lower-left angle point,U、VForu、vMaximum value,iFor the sequence number of the tomography micro-image；
Step 6, to step 5 acquisitionNIt opens image and carries out median filtering respectively, and is rightNOpen same position pixel in image
Gray scale is averaged, and image preprocessing is carried out, the image { wp_image after obtaining gray scale averagely i (u,v)| 1≤u≤U, 1
≤v≤V, edge is carried out with Canny operator and is sought, then obtained edge is finely divided away from sub-pix algorithm of subdivision with second order
Processing, obtain respectively closing in heterogeneous material the boundary of phase in image coordinate system outline position point set (u i ,v i )| p(u i ,v i )=1 }；Using the calibrating parameters of image collecting device, by the Z of image collecting device when outline position point set and acquisition image
To coordinatez i0 , by coordinate transform be denoted as measurement coordinate system in coordinate set (x i ,y i ,z i ) }；
Step 7 is fitted by the boundary profile that eight field joined mark tracings respectively close in heterogeneous material phase, is obtained in image
The two-dimensional silhouette data of each closing phase boundray；The length of each closing phase boundray profile is found out againLWith the area of encirclementA, by
Formula 4A/LThe equivalent particle size in single closing the surrounded space of phase boundray is calculated, then compares the maximum value for finding out partial size in the width imaged max；
The operation Step 5: step 6 is repeated, until being ground in step 8MLayer, grinding depth reach maximum particle diameterd max
1.5 times, stop grinding and acquisition, record the Z-direction coordinate z of every layer of tomography micro-image i (1≤i≤M)；Obtain sample (20)
Whole tomography sequence image { (z i ,wp_image i,j )| 1≤i≤M, 1≤j≤NAnd tomography sequence image measurement coordinate
In system profile point cloud (x i ,y i ,z i )| 1≤i≤M}；
Step 9, to the profile point cloud of obtained sample tomography sequence image (x i ,y i ,z i )| 1≤i≤MCarry out based on eight
Fork treekThe point cloud data curvature in field is simplified, point cloud data after being simplified (x′ i ,y′ i ,z i )| 1≤i≤M}；
Step 10 is carried out the wheel in closing the surrounded space of phase boundray to the data by point cloud compressing by eight field joined mark tracings
Exterior feature fitting obtains the two-dimensional silhouette that each boundary in image surrounds space；Space is surrounded to each boundary again and carries out NURBS freedom
Obtained free form surface is converted 3D solid by surface reconstruction, and the three-dimensional for obtaining each closing surrounded space of phase boundray is several
What model；
Step 11, using the outermost boundary in all closing formed spaces of phase boundray as the threedimensional model of constructed sample
Boundary constructs the three-dimensional cube of sample, using obtained each surrounded space of closing phase boundray as reinforcement, by three-dimensional cube
Boolean is carried out with reinforcement and asks poor, obtains the threedimensional model of matrix phase.
2. the threedimensional model of the threedimensional model of matrix phase and closing the surrounded space of phase boundray is combined by step 12, but
It sums without boolean to get to the three-dimensional entity model that can reflect each phase respectively.
3. a kind of microcosmic heterogeneous structure three-dimensional modeling measurement method based on profiled outline sequence according to claim 1,
It is characterized by: the measuring system uses non-contact image measurement technology, by being successively ground sample along Z-direction, and adopted with image
Acquisition means correspondingly successively obtain the tomography Series microscopy images of heterogeneous material sample, with edge detection, sub-pix algorithm of subdivision
The outline data for determining each phase boundray in faultage image is carried out with the tracking of eight field joined marks and NURBS Freeform surface reconstruction method
The three-dimensional model reconfiguration of each phase closed boundary obtains the three-dimensional entity model of each phase by Boolean calculation.
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