CN109596527A - A kind of micro- light distribution test method and system - Google Patents
A kind of micro- light distribution test method and system Download PDFInfo
- Publication number
- CN109596527A CN109596527A CN201811488653.3A CN201811488653A CN109596527A CN 109596527 A CN109596527 A CN 109596527A CN 201811488653 A CN201811488653 A CN 201811488653A CN 109596527 A CN109596527 A CN 109596527A
- Authority
- CN
- China
- Prior art keywords
- test
- light distribution
- test block
- input signal
- terminal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Or Analyzing Materials Using Thermal Means (AREA)
Abstract
The invention discloses a kind of micro- light distribution test method and system, the micro- light distribution test method includes: that test block is fixed in test platform；It is adjusted by orientation of the universal adjustment sample stage to test platform, test platform temperature is adjusted by water-circulating cooling device, heater circuit and high/low temperature numerical display temperature controller；Programmable DC power supply is that the Test input signal that test block provides passes through probe transmission into test block；By Macro Lens and probe station microscopic test block surface to the optic response information of Test input signal, is recorded and be transmitted in terminal in the form of optical image；Camera is tested by varifocal light distribution and obtains test block to the light distribution response message of Test input signal, is transmitted in terminal in the form of data parameters and light distribution image；Terminal is analyzed and processed optical image, data parameters and light distribution image.In the present invention, the light distribution response message for analyzing the test block that shines can accurately find out the defect of test block.
Description
Technical field
The present invention relates to light distribution testing fields, in particular to a kind of micro- light distribution test method and system.
Background technique
Microoptic imaging, refers to through sample or from the reflected visible light of sample, passes through one or more lens
Afterwards, the technology of the enlarged drawing of tiny sampler can be obtained.Gained image can directly be observed with eyes by eyepiece, can also be with
It is recorded, can also be carried out on computers at display and analysis with photographic plate or digitized image detector such as CCD, CMOS
Reason.
In recent years, microoptic image-forming principle is especially extensive in the application of industrial circle, and producer utilizes micro- light
It learns image-forming principle to detect the defect of electron luminescence component, detection effect has obtained universal approval.But tradition is aobvious
That there are detection process is excessively complicated for low-light location mode and system, testing result is not accurate enough, data and light distribution to test
The deficiency of image-capable difference limits microoptic image-forming principle and more broadly applies.
Summary of the invention
For overcome the deficiencies in the prior art, described the present invention provides a kind of micro- light distribution test method and system
Micro- light distribution test method and system have that detection process is simple and convenient, testing result is accurate and comprehensively and to the data of test
The strong feature with light distribution image-capable.
Specifically, the embodiment of the invention provides a kind of micro- light distribution test method and system, the micro- light distribution
Test method includes:
Test block is fixed in the test zone on test platform；
It is adjusted by orientation of the universal adjustment sample stage to test platform, passes through water-circulating cooling device, heater circuit
It is adjusted with temperature of the high/low temperature numerical display temperature controller to test platform；
Programmable DC power supply provides Test input signal for test block, and will by the probe on precision three-dimensional probe station
Test input signal is transferred in test block；
Optic response information by Macro Lens and probe station microscopic test block surface to Test input signal, institute
Optic response information is stated to record and be transmitted in terminal in the form of optical image；
Camera is tested by varifocal light distribution and obtains test block to the light distribution response message of Test input signal, and will
The light distribution response message is transmitted in terminal in the form of data parameters and light distribution image；
Optical image, light distribution image and data parameters are analyzed and processed by terminal.
Optional embodiment, it is described that test block is fixed in the test zone on test platform, comprising:
It is provided with setting test zone on the test platform, one layer of magnet is covered on the test zone, utilizes magnet
Absorption fixation is carried out to test block；Or
It is provided with the fixed device of test block on the test platform, test block is carried out using the test block fixed device
Clamping is fixed.
Optional embodiment, it is described to be adjusted by orientation of the universal adjustment sample stage to test platform, comprising:
The test platform is arranged on universal adjustment sample stage, before testing test block, passes through universal adjustment
The orientation of test platform is adjusted in the universal adjustment sample stage touch screen being equipped on sample stage.
Optional embodiment, it is described by water-circulating cooling device, heater circuit and high/low temperature numerical display temperature controller to test
The temperature of platform is adjusted, comprising:
The high/low temperature numerical display temperature controller passes through the current temperature that the temperature sensor senses test block of test platform is arranged in
Degree, and compared with preset temperature values；
If Current Temperatures are greater than preset temperature values, the high/low temperature display precise temperature controller can accelerate recirculated water
The flow rate of liquid of device for cooling reduces the temperature of test platform into preset temperature values by water-circulating cooling device；
If current temperature value is less than preset temperature values, the high/low temperature display precise temperature controller can connect laying
Heater circuit below test platform improves the temperature of test platform into preset temperature values by heater circuit；
If Current Temperatures, in preset temperature values, the water-circulating cooling device and heater circuit shut down.
Optional embodiment, the high/low temperature display precise temperature controller is also interior to be equipped with warning device and tripgear；
In test process, if the Current Temperatures of test platform are more than preset alarm temperature, warning device can generate report
Alert sound；
Test process, if the Current Temperatures of test platform are more than preset trip temperature, tripgear can cut off the power
Carry out arrestment to continue to run.
Optional embodiment, the programmable DC power supply provides Test input signal for test block, and passes through precision
Test input signal is transferred in test block by the probe on three-dimensional probe station, comprising:
Control is programmed to the programmable DC power supply by computer terminal before test；
The orientation of probe is adjusted by the precision three-dimensional probe station touch screen being equipped on precision three-dimensional probe station, is led to
It crosses probe the Test input signal that programmable DC power supply provides is transferred on the specified position of test block.
Optional embodiment, it is described that test input is believed by Macro Lens and probe station microscopic test block surface
Number optic response information, the optic response information records in the form of optical image and is transmitted in terminal, comprising:
In test process, the Macro Lens and probe station microscopes are used；
It is provided with capture apparatus on the probe station microscope, is believed by optic response of the capture apparatus to test block
Breath is recorded；
The capture apparatus is connect with terminal, and the optic response information is transmitted to terminal in the form of optical image
In.
Optional embodiment, it is described that camera acquisition test block is tested to Test input signal by varifocal light distribution
Light distribution response message, and the light distribution response message is transmitted to terminal in the form of data parameters and light distribution image
In, comprising:
The varifocal light distribution test camera converts light distribution response message of the test block to Test input signal to
Data parameters and light distribution digitized video；
The varifocal light distribution test camera is connect with terminal, and data parameters and light distribution digitized video are transmitted to end
In end.
Optional embodiment, it is described that optical image, light distribution image and data parameters are carried out at analysis by terminal
Reason, comprising:
The optical image, light distribution image and data parameters, which are transmitted in terminal, to be stored；
The terminal carries out at analysis optical image, light distribution image and data parameters based on the analysis software in terminal
Reason.
In embodiments of the present invention, the test platform provides test zone for test block, and test block is fixed on
On test platform；The orientation of test platform and test block is adjusted in the universal adjustment sample stage, the water-circulating cooling
Set, the temperature of test platform is adjusted in heater circuit and high/low temperature numerical display temperature controller, make test can be in suitable, reasonable item
It is carried out under part and test environment, the efficiency of test and the authenticity of test can be improved；The programmable DC power supply can basis
It needs to provide Test input signal for test block, and Test input signal is transferred to by test block spy by chip-scale accurate probe
On fixed position, can multiple spot, multi-faceted, many condition test block is detected, improve the comprehensive of test；The microspur
Mirror and the microscopical setting of probe station are equipped with bat convenient for observation test block surface to the optic response information of Test input signal
Taking the photograph equipment can be recorded in the form of optical image by the optic response information and be transmitted to terminal；The varifocal light
The available test block of distribution tests camera to the light distribution response message of Test input signal, the light distribution response message with
Data parameters and the form of light distribution image are transmitted in terminal, keep the light distribution situation of test block more intuitive, it is easier to send out
Existing test block there are the problem of and defect；Optical image, data parameters and the light distribution image of test block are transmitted in terminal, eventually
End group is analyzed and processed in customization software, and test result can be made more intuitive and accurate.
The embodiment of the invention provides a kind of micro- light distribution test macro, the micro- light distribution test macro includes:
Fixed module: for test block to be fixed in the test zone on test platform；
Adjustment module: for being adjusted by orientation of the universal adjustment sample stage to test platform, pass through recirculated water cooling
The temperature of test platform is adjusted in device, heater circuit and high/low temperature numerical display temperature controller；
Detecting module: for providing Test input signal by programmable DC power supply for test block, and pass through precision three
Test input signal is transferred in test block by the probe on dimension probe station；It is tested by Macro Lens and probe station microscopic
Part surface is recorded and is transmitted in the form of optical image to the optic response information of Test input signal, the optic response information
Into terminal；Camera, which is tested, by varifocal light distribution obtains test block to the light distribution response message of Test input signal, and
The light distribution response message is transmitted in terminal in the form of data parameters and light distribution image；
Analysis module: for being analyzed and processed by terminal to optical image, light distribution image and data parameters.
The embodiment of the invention provides a kind of micro- light distribution test macros, in the micro- light distribution test macro,
The fixed module is mainly used for the fixation of test block；The adjustment module is used for test environment and test condition according to test
It needs to be adjusted, carry out test can under suitable, reasonable condition and test environment, the efficiency and survey of test can be improved
The authenticity of examination；The detecting module is used to the Test input signal that the programmable DC power supply provides being transferred to test block
In, and probing test part is to the response message of Test input signal, detecting module can multiple spot, multi-faceted, many condition to test
Part is detected, and the comprehensive of test is improved；Optical image that analysis module is used to obtain detecting module, data parameters and
Light distribution image is analyzed and processed, and keeps test result more intuitive, more comprehensive.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it is clear that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
Other attached drawings are obtained according to these attached drawings.
Fig. 1 is the flow diagram of the micro- light distribution test method of one of embodiment of the present invention；
Fig. 2 is the composition schematic diagram of the micro- light distribution test macro of one of embodiment of the present invention.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts all other
Embodiment shall fall within the protection scope of the present invention.
Embodiment:
Referring to Fig. 1, Fig. 1 is the flow diagram of the micro- light distribution test method of one of embodiment of the present invention.
As shown in Figure 1, a kind of micro- light distribution test method, which comprises
S11: test block is fixed in the test zone on test platform.
Specifically, being provided with test zone on the test platform, the test zone surface is covered with one layer of magnet, works as survey
When in test specimen containing the metals such as ferromagnetic material such as iron, nickel, cobalt, test zone can attract test block to test block into
Row is fixed；In addition, the fixed device of test block is additionally provided on the test platform, when test block can not be tested region surface
When magnet adsorbs or needs further progress fixed, test block can be also fixed by test block fixed device.
S12: being adjusted by orientation of the universal adjustment sample stage to test platform, passes through water-circulating cooling device, heating
The temperature of test platform is adjusted in circuit and high/low temperature numerical display temperature controller.
Before testing test block, need to adjust the position of test block to suitable by universal adjustment sample stage
Place in order to test progress；It also needs by testing water-circulating cooling device, heater circuit and high/low temperature numerical display temperature controller
The temperature of platform is adjusted, and tests test block at a temperature of actual working environment, improves the fidelity of test.
Specifically, the universal adjustment sample stage is mainly used for carrying out the orientation of test platform the tune of three-dimensional high-precision
Section.Wherein, the three-dimensional axial linear guide of X, Y, Z is provided on the universal adjustment sample stage, the linear guide passes through ball
Screw rod is driven, i.e., drives ball screw rotation by shaft coupling or synchronous pulley by servo motor, and then push and be fixed on
Sliding block in linear guide is moved；In specific implementation process of the present invention, the test platform is fixed on line slide rail
On sliding block, the servo motor is controlled by servo-driver, and the haptic feedback system in universal adjustment sample stage touch screen can
Servo-driver is controlled according to the formula of preprogramming, as long as that is, the universal adjustment sample touch screen of tester's control can be to survey
The orientation for trying platform carries out three-dimensional regulation.
Specifically, the water-circulating cooling device, heater circuit and high/low temperature numerical display temperature controller are mainly used for test platform
Temperature be adjusted.Wherein, the water-circulating cooling device is arranged circumferentially in the test platform, the heater circuit paving
It is located at the underface of the test platform, the high/low temperature numerical display temperature controller carries out the water-circulating cooling device and heater circuit
Control.In specific implementation process of the present invention, the high/low temperature display precise temperature controller passes through the temperature that test platform is arranged in
The Current Temperatures of sensor sensing test block sample the Current Temperatures of test block, immediately monitoring automatically, and will current temperature
Degree is shown in digital form in the screen of high/low temperature display precise temperature controller；Tester can preset temperature value model as needed
Enclose: if Current Temperatures are greater than preset temperature values, the high/low temperature display precise temperature controller can accelerate water-circulating cooling
The flow rate of liquid set reduces the temperature of test platform into preset temperature values by water-circulating cooling device；If current temperature
When angle value is less than preset temperature values, the high/low temperature display precise temperature controller, which can be connected, to be laid below test platform
Heater circuit improves the temperature of test platform into preset temperature values by heater circuit；If Current Temperatures are default
Temperature values when, the water-circulating cooling device and heater circuit shut down.In addition, the high/low temperature display precise temperature control
Instrument is also interior to be equipped with warning device and tripgear: when heater circuit or water-circulating cooling device break down, test platform is worked as
Preceding temperature cannot be controlled effectively；When Current Temperatures are more than preset alarm temperature, warning device can generate alarm sound
Prompt tester；If tester cannot be handled in time when Current Temperatures being caused to be more than preset trip temperature, in order to prevent
The breaking-up of equipment, high/low temperature display precise temperature controller can be cut off the power by tripgear to be continued to run come arrestment.
S13: programmable DC power supply provides Test input signal for test block, and passes through the spy on precision three-dimensional probe station
Test input signal is transferred in test block by needle；
It in test process, needs for specific Test input signal to be transferred in test block, the programmable DC power supply
It is mainly used for providing Test input signal, the Test input signal is via the probe transmission on precision three-dimensional probe station to test
In the specific position of part, test block is tested.
Specifically, the programmable DC power supply is mainly used for providing Test input signal；It was embodied in the present invention
Cheng Zhong, the programmable DC power supply need to connect with terminal before testing, and tester needs to pass through terminal according to test condition
Such as voltage, electric current and power are exported to it and is programmed control, and the output after programming will be used as Test input signal
It is acted on the specific position of test block via the probe on precision three-dimensional probe station.
Specifically, being configured with the probe of micron accuracies, the size and type of the probe on the precision three-dimensional probe station
Number needs are customized according to test block, and the probe mainly acts on Test input signal on test block specific position.?
In specific implementation process of the present invention, the programmable DC power supply is connect with the probe on the precision three-dimensional probe station, described
Probe is directly contacted with test block, and the Test input signal after the probe programs programmable DC power supply is transferred to test block
In.In addition, the precision three-dimensional probe station is similar with universal adjustment sample stage structure, it is also equipped with the three-dimensional axial straight line of X, Y, Z
Guide rail, the linear guide are driven also by ball screw；In specific implementation process of the present invention, the probe is fixed on
On the sliding block of line slide rail, the servo motor is controlled by servo-driver, and the tactile in precision three-dimensional probe station touch screen
Feedback system can control servo-driver according to the formula of preprogramming, as long as that is, tester controls the touching of precision three-dimensional probe station
Control screen can carry out three-dimensional high-precision adjusting to the orientation of probe；The three-dimensional high-precision of probe is adjusted, and inputs the test of probe
Signal conveniently can carry out multi-faceted detection to test block for transmission in the position specified in test block.In addition, the probe station
Special microscope is further equipped with LED annular light source, when needing replacing test block or being safeguarded to other components, the LED
Ambient brightness can be improved in annular light source, operates convenient for tester.
S14: the optic response of Test input signal is believed by Macro Lens and probe station microscopic test block surface
Breath, the optic response information are recorded in the form of optical image and are transmitted in terminal；
After test block receives the Test input signal of programmable DC power supply offer, test block can be to test input letter
Number make corresponding response；It can observe test block surface to the light of Test input signal by Macro Lens and probe station microscope
Response message is learned, it can be by the optic response information with the shape of optical image by the capture apparatus being arranged on probe station microscope
Formula is recorded and is transmitted to terminal.
Specifically, the Macro Lens and probe station microscope are mainly used for observing test block surface to Test input signal
Optic response information.Wherein, the effect of the Macro Lens is to shorten nearest focal distance to shoot closer scenery；In the present invention
In specific implementation process, the Macro Lens and probe station microscopes are used, available amplification factor is bigger, clarity
Higher image；In addition, such as digital camera, mobile phone capture apparatus can also be added on the probe station microscope, to process
Macro Lens is recorded with the amplified test block optical image of probe station microscope, and the optical image being recorded is transmitted to end
On end.
S15: testing camera by varifocal light distribution and obtain test block to the light distribution response message of Test input signal,
And the light distribution response message is transmitted in terminal in the form of data parameters and light distribution image；
After test block receives the Test input signal of programmable DC power supply offer, test block can be to test input letter
Number make corresponding response；The light distribution sound that camera can obtain test block to Test input signal is tested by varifocal light distribution
Information is answered, the varifocal light distribution test camera can also be by the light distribution response message with data parameters and light distribution image
Form be transmitted in terminal.
Specifically, the varifocal light distribution test camera is mainly used for the light point for obtaining test block to Test input signal
Cloth response message, and the light distribution response message is transmitted in terminal in the form of data parameters and light distribution image.Institute
Stating varifocal light distribution test camera is a kind of contactless testing tool, and the course of work is as follows: when test block receives
After Test input signal, corresponding optic response can be made, the varifocal light distribution tests magazine charge coupled cell
The optic response of test block is converted analog quantity by imaging sensor (hereinafter referred to as ccd sensor), and the analog quantity is through variable
Burnt light distribution tests magazine A/D converter and is converted into digital quantity；The varifocal light distribution is tested magazine number and is adopted
Truck is acquired to the digital quantity and is converted into light distribution image, and the light distribution image can be displayed in varifocal light distribution
It tests in the display screen of camera；Particularly, the digital quantity obtained through A/D converter can be transmitted to end in the form of data parameters
On end.
S16: optical image, light distribution image and data parameters are analyzed and processed by terminal.
In specific implementation process of the present invention, customization software is installed in the terminal, the customization software can incite somebody to action
To optical image, light distribution image and data parameters be analyzed and processed；In addition, terminal can be by optical image, light distribution shadow
Picture and data parameters store for a long time, and tester is facilitated to consult.
In embodiments of the present invention, the test platform provides test zone for test block, and test block is fixed on
On test platform；The orientation of test platform and test block is adjusted in the universal adjustment sample stage, the water-circulating cooling
Set, the temperature of test platform is adjusted in heater circuit and high/low temperature numerical display temperature controller, make test can be in suitable, reasonable item
It is carried out under part and test environment, the efficiency of test and the authenticity of test can be improved；The programmable DC power supply can basis
It needs to provide Test input signal for test block, and Test input signal is transferred to by test block spy by chip-scale accurate probe
On fixed position, can multiple spot, multi-faceted, many condition test block is detected, improve the comprehensive of test；The microspur
Mirror and the microscopical setting of probe station are equipped with bat convenient for observation test block surface to the optic response information of Test input signal
Taking the photograph equipment can be recorded in the form of optical image by the optic response information and be transmitted to terminal；The varifocal light
The available test block of distribution tests camera to the light distribution response message of Test input signal, the light distribution response message with
Data parameters and the form of light distribution image are transmitted in terminal, keep the light distribution situation of test block more intuitive, it is easier to send out
Existing test block there are the problem of and defect；Optical image, data parameters and the light distribution image of test block are transmitted in terminal, eventually
End group is analyzed and processed in customization software, and test result can be made more intuitive and accurate.
Embodiment:
Referring to Fig. 2, Fig. 2 is the composition schematic diagram of the micro- light distribution test macro of one of embodiment of the present invention.
As shown in Fig. 2, a kind of micro- light distribution test macro, the system comprises:
Fixed module 11: for test block to be fixed in the test zone on test platform.
In embodiments of the present invention, it is provided with fixation of the test platform for test block.Specifically, on the test platform
Be provided with test zone, the test zone surface is covered with one layer of magnet, when in test block contain ferromagnetic material for example iron, nickel,
When the metals such as cobalt, test zone can attract test block to which test block be fixed；In addition, on the test platform also
It is provided with the fixed device of test block, when test block can not be tested the magnet absorption of region surface or further progress is needed to fix
When, test block can be also fixed by test block fixed device.
Certainly, the fixed module 11 is not limited only to that only test block is fixed with test platform, can also pass through it
Test block is fixed in its equipment.
Adjustment module 12: for being adjusted by orientation of the universal adjustment sample stage to test platform, pass through recirculated water
The temperature of test platform is adjusted in device for cooling, heater circuit and high/low temperature numerical display temperature controller.
In embodiments of the present invention, the adjustment module 12 includes universal adjustment sample stage, water-circulating cooling device, heating electricity
Road, high/low temperature display precise temperature controller and programmable DC power supply.Wherein, the universal adjustment sample stage is mainly used for testing
The preceding orientation for adjusting test block；The water-circulating cooling device, heater circuit and high/low temperature display precise temperature controller are used for test
The temperature of platform is adjusted；The programmable DC power supply is mainly used for providing adjustable test input letter for test block
Number.
Specifically, being provided with the three-dimensional axial linear guide of X, Y, Z on the universal adjustment sample stage, the linear guide is logical
It crosses ball screw to be driven, i.e., ball screw rotation is driven by shaft coupling or synchronous pulley by servo motor, and then push
The sliding block being fixed in linear guide is moved；In specific implementation process of the present invention, the test platform is fixed on straight line
On the sliding block of sliding rail, the servo motor is controlled by servo-driver, and the touch feedback in universal adjustment sample stage touch screen
System can control servo-driver according to the formula of preprogramming, as long as that is, the universal adjustment sample touch screen of tester's control is
Three-dimensional regulation can be carried out to the orientation of test platform.
Specifically, the water-circulating cooling device is arranged circumferentially in the test platform, the heater circuit is laid on
The underface of the test platform, the high/low temperature numerical display temperature controller control the water-circulating cooling device and heater circuit
System.In specific implementation process of the present invention, the high/low temperature display precise temperature controller passes through the temperature biography that test platform is arranged in
Sensor incudes the temperature of test block, is sampled automatically to the temperature of test block, immediately monitoring, and temperature is shown in digital form
Show in the screen of high/low temperature display precise temperature controller；Tester can preset temperature as needed: when preset temperature is higher than
When current detection temperature, the high/low temperature display precise temperature controller can connect the heater circuit being laid below test platform, lead to
It crosses heater circuit and improves the temperature of test platform to preset temperature；It is described when preset temperature is lower than current detection temperature
High/low temperature display precise temperature controller can accelerate the flow rate of liquid of water-circulating cooling device, reduce test platform by water-circulating cooling device
Temperature to preset temperature.
Specifically, the programmable DC power supply needs to connect with terminal before testing, tester needs according to test-strips
Part exports such as voltage, electric current and power to it by terminal and is programmed control, and the output after programming will be as survey
Examination input signal is applied on test block via detecting module 13.
Certainly, the adjustment module 12 is not limited only to that only the temperature of test environment is adjusted, can also be by adding
The other parameters such as humidity, brightness etc. of test environment are adjusted in various equipment.
Detecting module 13: Test input signal is provided for test block for programmable DC power supply, and passes through precision three-dimensional
Test input signal is transferred in test block by the probe on probe station；Pass through Macro Lens and probe station microscopic test block
Surface is recorded and is transmitted in the form of optical image to the optic response information of Test input signal, the optic response information
In terminal；Camera is tested by varifocal light distribution and obtains test block to the light distribution response message of Test input signal, and will
The light distribution response message is transmitted in terminal in the form of data parameters and light distribution image.
In embodiments of the present invention, the detecting module include precision three-dimensional probe station, Macro Lens, probe station microscope and
Varifocal light distribution tests camera.Wherein, the precision three-dimensional probe station is mainly used for providing the programmable DC power supply
Test input signal be transferred in test block；The Macro Lens and probe station microscope are mainly used for observing test block surface pair
The optic response information of Test input signal；It is defeated to testing that the varifocal light distribution test camera is mainly used for acquisition test block
Enter the light distribution response message of signal.
Specifically, being configured with the probe of micron accuracies, the size and type of the probe on the precision three-dimensional probe station
Number needs are customized according to test block, and the probe mainly acts on Test input signal on test block specific position.?
In specific implementation process of the present invention, the programmable DC power supply is connect with the probe on the precision three-dimensional probe station, described
Probe is directly contacted with test block, and the Test input signal after the probe programs programmable DC power supply is attached to test block
On.In addition, the precision three-dimensional probe station is similar with universal adjustment sample stage structure, it is also equipped with the three-dimensional axial straight line of X, Y, Z
Guide rail, the linear guide are driven also by ball screw；In specific implementation process of the present invention, the probe is fixed on
On the sliding block of line slide rail, the servo motor is controlled by servo-driver, and the tactile in precision three-dimensional probe station touch screen
Feedback system can control servo-driver according to the formula of preprogramming, as long as that is, tester controls the touching of precision three-dimensional probe station
Control screen can carry out three-dimensional high-precision adjusting to the orientation of probe；The three-dimensional high-precision of probe is adjusted, and inputs the test of probe
Signal can be attached in the position specified in test block, convenient to carry out multi-faceted detection to test block.In addition, the probe station
Special microscope is further equipped with LED annular light source, when needing replacing test block or being safeguarded to other components, the LED
Ambient brightness can be improved in annular light source, operates convenient for tester.
Specifically, the effect of the Macro Lens is to shorten nearest focal distance to shoot closer scenery；Have in the present invention
In body implementation process, the Macro Lens and probe station microscopes are used, available amplification factor is bigger, clarity more
High image；In addition, such as digital camera, mobile phone capture apparatus can also be added on the probe station microscope, to by micro-
It is recorded away from mirror and the amplified test block optical image of probe station microscope, the optical image being recorded is transmitted to terminal
On.
Specifically, the varifocal light distribution test camera is mainly used for the light point for obtaining test block to Test input signal
Cloth response message, and the light distribution response message is transmitted in terminal in the form of data parameters and light distribution image.Institute
Stating varifocal light distribution test camera is a kind of contactless testing tool, and the course of work is as follows: when test block receives
After Test input signal, corresponding optic response can be made, the varifocal light distribution tests magazine charge coupled cell
The optic response of test block is converted analog quantity by imaging sensor (hereinafter referred to as ccd sensor), and the analog quantity is through variable
Burnt light distribution tests magazine A/D converter and is converted into digital quantity；The varifocal light distribution is tested magazine number and is adopted
Truck is acquired to the digital quantity and is converted into light distribution image, and the light distribution image can be displayed in varifocal light distribution
It tests in the display screen of camera；Particularly, the digital quantity obtained through A/D converter can be transmitted to end in the form of data parameters
On end.
In specific implementation process of the present invention, obtained optical image, data parameters and light distribution image can also be passed
It is delivered in analysis module 14 and is analyzed and processed.
In addition, being additionally provided with anti-tampering black dull case, institute outside the detecting module 13 in specific implementation process of the present invention
Interference of the external light source to test can be reduced by stating anti-tampering black dull case, improve the accuracy of test.
Analysis module 14: for being analyzed and processed by terminal to optical image, light distribution image and data parameters.
In the embodiment of the present invention, obtained optical image, data parameters and light distribution image are transferred mainly to computer PC
It is analyzed and processed on end.Specifically, being equipped with customization software in computer end, user can be based on the customization software to optics shadow
Picture, data parameters and light distribution image are analyzed and processed, and keep test result more intuitive as it can be seen that tester is facilitated to divide
Analysis.It should be noted that the customization software is the software of independent development customization, function can change with the change of testing requirement
Become.
Certainly, the analysis module 14 is not limited only to only with customization software to optical image, data parameters and light distribution shadow
As being analyzed and processed, optical image, data parameters and light distribution image can also be analyzed and processed by other softwares.
The embodiment of the invention provides a kind of micro- light distribution test macros, in the micro- light distribution test macro,
The fixed module is mainly used for the fixation of test block；The adjustment module is used for test environment and test condition according to test
It needs to be adjusted, carry out test can under suitable, reasonable condition and test environment, the efficiency and survey of test can be improved
The authenticity of examination；The detecting module is used to the Test input signal that the programmable DC power supply provides being transferred to test block
In, and probing test part is to the response message of Test input signal, detecting module can multiple spot, multi-faceted, many condition to test
Part is detected, and the comprehensive of test is improved；Optical image that analysis module is used to obtain detecting module, data parameters and
Light distribution image is analyzed and processed, and keeps test result more intuitive, more comprehensive.
Those of ordinary skill in the art will appreciate that all or part of the steps in the various methods of above-described embodiment is can
It is completed with instructing relevant hardware by program, which can be stored in a computer readable storage medium, storage
Medium may include: read-only memory (ROM, Read Only Memory), random access memory (RAM, Random
Access Memory), disk or CD etc..
In addition, being provided for the embodiments of the invention a kind of micro- light distribution test method above and system has carried out in detail
It introduces, herein should be using a specific example illustrates the principle and implementation of the invention, above embodiments are said
It is bright to be merely used to help understand method and its core concept of the invention；At the same time, for those skilled in the art, foundation
Thought of the invention, there will be changes in the specific implementation manner and application range, in conclusion the content of the present specification is not
It is interpreted as limitation of the present invention.
Claims (10)
1. a kind of micro- light distribution test method, which is characterized in that the micro- light distribution test method includes:
Test block is fixed in the test zone on test platform；
It is adjusted by orientation of the universal adjustment sample stage to test platform, passes through water-circulating cooling device, heater circuit and height
The temperature of test platform is adjusted in low temperature numerical display temperature controller；
Programmable DC power supply provides Test input signal for test block, and will be tested by the probe on precision three-dimensional probe station
Input signal is transferred in test block；
Optic response information by Macro Lens and probe station microscopic test block surface to Test input signal, the light
Response message is learned to record and be transmitted in terminal in the form of optical image；
Camera is tested by varifocal light distribution and obtains test block to the light distribution response message of Test input signal, and will be described
Light distribution response message is transmitted in terminal in the form of data parameters and light distribution image；
Optical image, light distribution image and data parameters are analyzed and processed by terminal.
2. micro- light distribution test method according to claim 1, which is characterized in that described that test block is fixed on test
In test zone on platform, comprising:
It is provided with setting test zone on the test platform, one layer of magnet is covered on the test zone, using magnet to survey
Test specimen carries out absorption fixation；Or
It is provided with the fixed device of test block on the test platform, clamping is carried out to test block using the test block fixed device
It is fixed.
3. micro- light distribution test method according to claim 1, which is characterized in that described to pass through universal adjustment sample stage
The orientation of test platform is adjusted, comprising:
The test platform is arranged on universal adjustment sample stage, before testing test block, passes through universal adjustment sample
The orientation of test platform is adjusted in the universal adjustment sample stage touch screen being equipped on platform.
4. micro- light distribution test method according to claim 1, which is characterized in that it is described by water-circulating cooling device,
The temperature of test platform is adjusted in heater circuit and high/low temperature numerical display temperature controller, comprising:
The high/low temperature numerical display temperature controller passes through the Current Temperatures that the temperature sensor senses test block of test platform is arranged in, and
It is compared with preset temperature values；
If Current Temperatures are greater than preset temperature values, the high/low temperature display precise temperature controller can accelerate water-circulating cooling
The flow rate of liquid set reduces the temperature of test platform into preset temperature values by water-circulating cooling device；
If current temperature value is less than preset temperature values, the high/low temperature display precise temperature controller, which can be connected, is laid on survey
The heater circuit below platform is tried, the temperature of test platform is improved into preset temperature values by heater circuit；
If Current Temperatures, in preset temperature values, the water-circulating cooling device and heater circuit shut down.
5. micro- light distribution test method according to claim 4, which is characterized in that the high/low temperature display precise temperature control
Instrument is also interior to be equipped with warning device and tripgear；
In test process, if the Current Temperatures of test platform are more than preset alarm temperature, warning device can generate alarm
Sound；
Test process, if the Current Temperatures of test platform are more than preset trip temperature, tripgear can cut off the power to stop
Only equipment continues to run.
6. micro- light distribution test method according to claim 1, which is characterized in that the programmable DC power supply is to survey
Test specimen provides Test input signal, and Test input signal is transferred to test block by the probe on precision three-dimensional probe station
In, comprising:
Control is programmed to the programmable DC power supply by computer terminal before test；
The orientation of probe is adjusted by the precision three-dimensional probe station touch screen being equipped on precision three-dimensional probe station, passes through spy
The Test input signal that programmable DC power supply provides is transferred on the specified position of test block by needle.
7. micro- light distribution test method according to claim 1, which is characterized in that described to pass through Macro Lens and probe station
Microscopic test block surface is to the optic response information of Test input signal, and the optic response information is with optical image
Form is recorded and is transmitted in terminal, comprising:
In test process, the Macro Lens and probe station microscopes are used；
Be provided with capture apparatus on the probe station microscope, by the capture apparatus to the optic response information of test block into
Row record；
The capture apparatus is connect with terminal, and the optic response information is transmitted in terminal in the form of optical image.
8. micro- light distribution test method according to claim 1, which is characterized in that described to be surveyed by varifocal light distribution
It tries camera and obtains test block to the light distribution response message of Test input signal, and the light distribution response message is joined with data
Several and light distribution image form is transmitted in terminal, comprising:
Light distribution response message of the test block to Test input signal is converted data by the varifocal light distribution test camera
Parameter and light distribution digitized video；
The varifocal light distribution test camera is connect with terminal, and data parameters and light distribution digitized video are transmitted to terminal
In.
9. micro- light distribution test method according to claim 1, which is characterized in that it is described by terminal to optics shadow
Picture, light distribution image and data parameters are analyzed and processed, comprising:
The optical image, light distribution image and data parameters, which are transmitted in terminal, to be stored；
The terminal is analyzed and processed optical image, light distribution image and data parameters based on the analysis software in terminal.
10. a kind of micro- light distribution test macro, which is characterized in that the micro- light distribution test macro includes:
Fixed module: for test block to be fixed in the test zone on test platform；
Adjustment module: for being adjusted by orientation of the universal adjustment sample stage to test platform, by water-circulating cooling device,
The temperature of test platform is adjusted in heater circuit and high/low temperature numerical display temperature controller；
Detecting module: it for providing Test input signal by programmable DC power supply for test block, and is visited by precision three-dimensional
Test input signal is transferred in test block by the probe on needle platform；Pass through Macro Lens and probe station microscopic test block table
In face of the optic response information of Test input signal, the optic response information is recorded in the form of optical image and is transmitted to end
In end；Camera is tested by varifocal light distribution and obtains test block to the light distribution response message of Test input signal, and by institute
Light distribution response message is stated to be transmitted in terminal in the form of data parameters and light distribution image；
Analysis module: for being analyzed and processed by terminal to optical image, light distribution image and data parameters.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811488653.3A CN109596527A (en) | 2018-12-06 | 2018-12-06 | A kind of micro- light distribution test method and system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811488653.3A CN109596527A (en) | 2018-12-06 | 2018-12-06 | A kind of micro- light distribution test method and system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109596527A true CN109596527A (en) | 2019-04-09 |
Family
ID=65961223
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811488653.3A Pending CN109596527A (en) | 2018-12-06 | 2018-12-06 | A kind of micro- light distribution test method and system |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109596527A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114383821A (en) * | 2021-12-30 | 2022-04-22 | 厦门大学 | Three-dimensional imaging-based micro-size LED chip test system and test method thereof |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102384985A (en) * | 2011-09-28 | 2012-03-21 | 浙江大学 | Raman atomic force microscopic detection device and method |
| CN104792793A (en) * | 2015-04-28 | 2015-07-22 | 刘凯 | Optical defect detecting method and system |
| CN106094189A (en) * | 2016-06-20 | 2016-11-09 | 金华纳观生物科技有限公司 | The compound microscopic system of multichannel fluorescence microscopy |
-
2018
- 2018-12-06 CN CN201811488653.3A patent/CN109596527A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102384985A (en) * | 2011-09-28 | 2012-03-21 | 浙江大学 | Raman atomic force microscopic detection device and method |
| CN104792793A (en) * | 2015-04-28 | 2015-07-22 | 刘凯 | Optical defect detecting method and system |
| CN106094189A (en) * | 2016-06-20 | 2016-11-09 | 金华纳观生物科技有限公司 | The compound microscopic system of multichannel fluorescence microscopy |
Non-Patent Citations (1)
| Title |
|---|
| 金鉴实验室: ""显微光分布测试***"", 《HTTP://WWW.GMATG.COM/SHEBEI-21.HTML》 * |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114383821A (en) * | 2021-12-30 | 2022-04-22 | 厦门大学 | Three-dimensional imaging-based micro-size LED chip test system and test method thereof |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN100430685C (en) | Systems and methods for rapidly automatically focusing a machine vision inspection system | |
| JP6032767B2 (en) | Method for presenting and evaluating images of microtiter plate characteristics | |
| US7932504B2 (en) | Microscope system and VS image production and program thereof | |
| CN103674839B (en) | A kind of visual Sample location operating system based on spot detection and method | |
| US5539656A (en) | Crack monitoring apparatus | |
| WO2006033273A1 (en) | Microscope system and image processing method | |
| JP2007102190A (en) | Observation apparatus and observation method | |
| CA2444484A1 (en) | Automated protein cyrstallization imaging | |
| US5517861A (en) | High temperature crack monitoring apparatus | |
| CN100595559C (en) | Pollen image data analysis method and system | |
| CN107561081A (en) | A kind of defect detecting device and method | |
| CN109596527A (en) | A kind of micro- light distribution test method and system | |
| WO2004083930A1 (en) | Microscope and sample observing method | |
| CN104913731A (en) | Laser differential confocal microscope measurement and control system | |
| CN208239201U (en) | A kind of material microstructure mechanical property characterization experimental provision | |
| CN101846623A (en) | Method for detecting reflectivity of coal or organic rock vitrinite and special equipment thereof | |
| CN109596222A (en) | A kind of micro- heat distribution test method and system | |
| CN209446448U (en) | A kind of micro- light distribution test macro | |
| JP4477714B2 (en) | Simple operation microscope | |
| JP3137634U (en) | Macro micro navigation system | |
| CN106091957B (en) | A kind of method of quick detection raw wool | |
| CN106093039A (en) | A kind of without pre-treatment lint Fast Detection Technique | |
| Becker et al. | Test and evaluation of new GEMs with an automatic scanner | |
| CN104655020A (en) | Method for measuring metallographic ultra-long-sized region by Photoshop software | |
| CN205691067U (en) | A kind of portable inspectiont platform |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190409 |
|
| RJ01 | Rejection of invention patent application after publication |