CN109589664A - A kind of electron ion filter device for battery coolant liquid - Google Patents
A kind of electron ion filter device for battery coolant liquid Download PDFInfo
- Publication number
- CN109589664A CN109589664A CN201710916171.2A CN201710916171A CN109589664A CN 109589664 A CN109589664 A CN 109589664A CN 201710916171 A CN201710916171 A CN 201710916171A CN 109589664 A CN109589664 A CN 109589664A
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- CN
- China
- Prior art keywords
- interface
- lower case
- coolant liquid
- shunting disk
- battery coolant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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- 239000007788 liquid Substances 0.000 title claims abstract description 40
- 239000002826 coolant Substances 0.000 title claims abstract description 39
- 238000001914 filtration Methods 0.000 claims abstract description 16
- 230000037361 pathway Effects 0.000 claims description 10
- 238000009434 installation Methods 0.000 claims description 8
- 238000000034 method Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 230000007774 longterm Effects 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 210000003205 muscle Anatomy 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000002485 combustion reaction Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000000254 damaging effect Effects 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000000295 fuel oil Substances 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/11—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with bag, cage, hose, tube, sleeve or like filtering elements
- B01D29/31—Self-supporting filtering elements
- B01D29/35—Self-supporting filtering elements arranged for outward flow filtration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/88—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices
- B01D29/90—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor having feed or discharge devices for feeding
- B01D29/906—Special treatment of the feed stream before contacting the filtering element, e.g. cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
- B01D35/30—Filter housing constructions
- B01D35/306—Filter mounting adapter
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Secondary Cells (AREA)
Abstract
The present invention relates to a kind of electron ion filter devices for battery coolant liquid, the device includes upper housing, lower case and the shunt filtering unit being arranged in inside lower case, the shunt filtering unit includes ion filter filter core, shunting disk and the splitter cavity being arranged between ion filter filter core and lower case, upper housing is equipped with first interface, the bottom of lower case is equipped with second interface, battery coolant liquid is entered inside upper housing by first interface, after shunt filtering unit removes electron ion, it is discharged by second interface.Compared with prior art, the present invention passes through setting shunting disk, device is set both to be able to satisfy the electron ion filtering requirement of battery coolant liquid, it is avoided that excessive pressure drop occurs in battery coolant liquid again simultaneously, and can according to actual needs, by the aperture for changing shunting disk access opening, tap hole, determine suitable split ratio, the pressure loss when filter efficiency and its filtering of battery coolant liquid is accurately controlled in turn, and mounting means is flexible, and stability is good.
Description
Technical field
The invention belongs to electric vehicle engineering fields, are related to a kind of electron ion filter device for battery coolant liquid.
Background technique
China is the automobile consumption big country of the world today first, and in recent ten years, the development of China Automobile Industry enables the world
It attractes attention.As more and more people begin to focus on earth environment, the wind vane of Global Auto industry also collective be directed toward " environmental protection,
It is energy saving, efficient ", China also starts to greatly develop ev industry.
The heart of electric car is exactly the battery of positive high speed development now, and the cruising ability of battery directly affects electronic
The voyage of automobile.Therefore, quality of the performance quality of battery directly concerning electric car performance, as internal combustion engine is for fuel oil
The importance of automobile.However, generated since battery has heat in use, with the increase of battery-using time,
Its temperature gradually rises, and the performance of battery can gradually decrease, and then influences the performance of electric car, thus must be to battery
It is cooled down.During cooling down to battery, battery coolant liquid is constantly recycled, and electron ion therein can be accumulated constantly
Tire out, increase, so that the electric conductivity of battery coolant liquid enhances, if electron ion is not carried out separation appropriate, it is possible to can be to storage
The corrosion of battery case and damaging property of circumferential component, and then lead to because replacing associated components the increase of use cost.Mesh
Before, mostly it is in the market that battery coolant liquid is made all to pass through ion filter to the filtering of electron ion in battery coolant liquid, utilizes
Ion filter removes the electron ion in battery coolant liquid, but since in this method, all battery coolant liquids are needed guiding through
The filter material of ion filter causes the pressure loss of battery coolant liquid larger, and reduces the cycle efficieny of battery coolant liquid.
Summary of the invention
It is an object of the present invention to overcome the above-mentioned drawbacks of the prior art and provide a kind of pressure loss is small and
Electron ion filter device for battery coolant liquid easy for installation.
The purpose of the present invention can be achieved through the following technical solutions:
A kind of electron ion filter device for battery coolant liquid, the device include that upper housing, lower case and setting exist
Shunt filtering unit inside lower case, the shunt filtering unit include the ion being separately positioned on inside lower case on one next
Filter core, shunting disk and the splitter cavity being arranged between ion filter filter core and lower case, the upper housing are equipped with
The bottom of first interface, the lower case is equipped with second interface, and battery coolant liquid is entered inside upper housing by first interface, passes through
After shunt filtering unit removes electron ion, it is discharged by second interface.
The first interface is inlet, and the second interface is liquid outlet.
It is fixedly connected between the upper housing and lower case by welding manner.
The spin friction weldering that is welded as is welded as a preferred technical solution,.
Shunting disk access opening is offered at the center of the shunting disk, and multiple shuntings are also provided on the shunting disk
Hole, the tap hole are connected by splitter cavity with second interface, and the upper end of the ion filter filter core and shunting disk are logical
Road hole is connected, and lower end is connected with second interface.Battery coolant liquid a part flows into ion filter filter through shunting disk access opening
Core inner removes electron ion by ion filter filter core, is discharged later by second interface;Another part is successively through tap hole, shunting
Chamber flow to second interface, and is discharged by second interface.It is emulated according to computer-aided engineering (CAE), calculates separately out shunting disk
The aperture of access opening, tap hole determines suitable split ratio, to guarantee to reduce as far as possible in the case where meeting filter efficiency
The pressure drop of battery coolant liquid.
The material of the shunting disk is preferably stainless steel.
Be equipped with the internal shunting disk boss being connected with shunting disk access opening at the center of the shunting disk, it is described from
The upper end of sub- filter core is equipped with filter core feed pathway compatible with shunting disk boss, the lateral surface of the shunting disk boss
It is connected through a screw thread with the medial surface of filter core feed pathway.The shunting disk boss is annular boss, shunting disk boss it is outer
Side is equipped with external screw thread, and the medial surface of filter core feed pathway is equipped with internal screw thread, is connected through a screw thread, by shunting disk and ion filter
Filter core is fixed together.
The top of the lower case is equipped with first lower house positioning convex platform, under offering on the shunting disk with first
The compatible shunting disk mounting hole of shell positioning convex platform.Shunting disk mounting hole alignment first lower house positioning convex platform is pacified
Dress, makes shunting disk be fastened on the top of lower case, and later by hot riveting technique, shunting disk and lower case are fixedly connected on one
It rises.
Lower case positioning bar is axially arranged with along lower case on the inner wall of the lower case, the ion filter filter core
Filter core locating slot compatible with lower case positioning bar is axially offered along ion filter filter core on outer wall.It is positioned by lower case
Muscle is caught in filter core locating slot, and ion filter filter core is positioned and is auxiliarily fixed, prevents ion filter filter core in the course of work
Middle generation vibration or mobile.
The bottom inside of the lower case is radially provided with lower case bottom along lower case and determines as a preferred technical solution,
Position muscle, the bottom of the ion filter filter core is radially offered along ion filter filter core to be adapted with lower case bottom positioning bar
Filter core bottom locating slot.By the way that lower case bottom positioning bar is caught in filter core bottom locating slot, ion filter filter core is carried out
It further positions and is auxiliarily fixed.
The outside of the lower case is equipped with clip installation unit, which includes being arranged outside lower case
Clip and the mounting plate that is arranged on clip.After clip is fixedly connected with lower case, by mounting plate, device is installed
On mounting surface.
The outer wall of the lower case is equipped with second lower house positioning convex platform, offers and the second lower casing on the clip
The compatible clip location hole of body positioning convex platform.Second lower house positioning convex platform is caught in clip location hole, by clip under
Shell is fixedly connected.
The first mounting plate mounting hole, the second mounting plate mounting hole are offered on the mounting plate respectively, on the clip
Offer clip mounting hole compatible with the first mounting plate mounting hole.It is opened on the second mounting plate mounting hole and mounting surface
If mounting surface mounting hole be adapted.By screw also cross clip mounting hole, the first mounting plate mounting hole, by mounting plate with
Clip is fixedly connected;By screw also cross the second mounting plate mounting hole, mounting surface mounting hole, mounting plate and mounting surface are consolidated
Device, can be fixedly mounted on mounting surface by fixed connection.When mounting surface mounting hole is blind hole, if only leading to without mounting plate
Clip mounting hole is crossed, device can not be mounted on mounting surface, thus mounting plate is set, and opens up the first peace on mounting plate respectively
Loading board mounting hole, the second mounting plate mounting hole, first pass through the cooperation of the first mounting plate mounting hole and clip mounting hole, by mounting plate
It is mounted on clip, then passes through the cooperation of the second mounting plate mounting hole and mounting surface mounting hole, device is mounted on mounting surface,
Keep the installation of device more convenient, and flexibility is more preferable.
The first mounting plate mounting hole and clip mounting hole are respectively equipped with 2 as a preferred technical solution,.
The first mounting plate mounting hole and clip mounting hole are elongate holes.When two elongate holes match,
Two holes are no longer required for completely to just, if relative rotation occur for two holes, as long as the part that the two is overlapped can accommodate screw and wear
It crosses, the two can be fixed together by screw.Therefore, it is installed using the first mounting plate mounting hole and clip of strip
Hole makes the direction of clip have controllability, and then freely adjust so that can relatively rotate between mounting plate and clip
The direction of first interface and second interface keeps the mounting means of device more flexible.
It is equipped with first interface in the first interface and strengthens bushing, is equipped with second interface in the second interface and strengthens lining
Set.Due to being required to installation hose and hose clamp at first interface, second interface, and the pipe in first interface and second interface
Its unbearable extruding force of connector, therefore first interface is respectively set in first interface, in second interface and strengthens bushing, second
Interface strengthens bushing and is easily installed hose, and guarantee long-term stable work to improve its intensity.
The first interface strengthens bushing and the material of second interface reinforcing bushing is both preferably stainless steel.Described
One interface strengthen bushing and second interface strengthen bushing be mounted in first interface by cold press mode respectively, second interface
It is interior.
The present invention is in practical application, battery coolant liquid is entered inside upper housing by first interface, and a part is successively through dividing
Flow table access opening, filter core feed pathway flow into inside ion filter filter core, electron ion are removed by ion filter filter core, later by the
The discharge of two interfaces;Another part successively flow to second interface through tap hole, splitter cavity, and is discharged by second interface.It is filled in installation
When setting, the cooperation of second lower house positioning convex platform Yu clip location hole is first passed through, clip is fixedly connected with lower case;Pass through again
Mounting plate is fixedly connected by the cooperation of the first mounting plate mounting hole and clip mounting hole with clip;Pass through the second mounting plate later
Mounting plate is fixedly connected by the cooperation of mounting hole and mounting surface mounting hole with mounting surface, that is, realizes device being mounted on mounting surface
On.
Compared with prior art, the invention has the characteristics that:
1) by setting shunting disk, device is made not only to be able to satisfy the electron ion filtering requirement of battery coolant liquid, but also can keep away
Exempt from battery coolant liquid and excessive pressure drop occur, and can according to actual needs, by the hole for changing shunting disk access opening, tap hole
Diameter, determines suitable split ratio, and then pressure loss when accurately controlling the filter efficiency and its filtering of battery coolant liquid;
2) by clip installation unit, it can be realized on different types of mounting surface, can flexibly, easily install
The present invention meets the requirement of various mounting surfaces, extends application range of the invention, at the same can also freely adjust first interface and
The direction of second interface keeps the mounting means of device more flexible;
3) pass through the cooperation of lower case positioning bar and filter core locating slot, convenient for ion filter filter core is positioned and assisted
It is fixed, prevent ion filter filter core from generating vibration or mobile during the work time, and strengthen bushing and second by first interface
Interface strengthens bushing, the intensity of device is improved, to ensure that device long-term stable work.
Detailed description of the invention
Fig. 1 is three-dimensional exploded structural schematic diagram of the invention;
Fig. 2 is the structural schematic diagram of shunting disk in the present invention;
Fig. 3 is the structural schematic diagram of mounting plate in the present invention;
Fig. 4 is the structural schematic diagram of the present invention in the operating condition;
Description of symbols in figure:
1-upper housing, 2-shunting disks, 21-shunting disk access openings, 22-tap holes, 23-shunting disk boss, 24-points
Flow table mounting hole, 3-ion filter filter cores, 31-filter core feed pathways, 4-clips, 41-clip location holes, 5-lower cases,
51-first lower house positioning convex platforms, 52-second lower house positioning convex platforms, 6-second interfaces strengthen bushing, 7-first interfaces
Strengthen bushing, 8-mounting plates, the 81-the first mounting plate mounting hole, the 82-the second mounting plate mounting hole, 9-first interfaces, 10-
Second interface.
Specific embodiment
The present invention is described in detail with specific embodiment below in conjunction with the accompanying drawings.The present embodiment is with technical solution of the present invention
Premised on implemented, the detailed implementation method and specific operation process are given, but protection scope of the present invention is not limited to
Following embodiments.
Embodiment:
A kind of electron ion filter device for battery coolant liquid as shown in Figure 1, which includes upper housing 1, lower casing
Body 5 and the shunt filtering unit being arranged in inside lower case 5, the shunt filtering unit include being separately positioned on down on one next
Ion filter filter core 3, shunting disk 2 inside shell 5 and the splitter cavity being arranged between ion filter filter core 3 and lower case 5,
Upper housing 1 is equipped with first interface 9, and the bottom of lower case 5 is equipped with second interface 10, and battery coolant liquid is entered by first interface 9
Inside upper housing 1, after shunt filtering unit removes electron ion, it is discharged by second interface 10.
As shown in Fig. 2, offering shunting disk access opening 21 at the center of shunting disk 2, multiple points are also provided on shunting disk 2
Discharge orifice 22, tap hole 22 are connected by splitter cavity with second interface 10, the upper end of ion filter filter core 3 and shunting disk access opening
21 are connected, and lower end is connected with second interface 10.Inside is additionally provided at the center of shunting disk 2 to be connected with shunting disk access opening 21
The upper end of logical shunting disk boss 23, ion filter filter core 3 is equipped with filter core feed pathway 31 compatible with shunting disk boss 23,
The lateral surface of shunting disk boss 23 and the medial surface of filter core feed pathway 31 are connected through a screw thread.The top of lower case 5 is equipped with the
One lower case positioning convex platform 51 offers shunting disk mounting hole compatible with first lower house positioning convex platform 51 on shunting disk 2
24.Lower case positioning bar is axially arranged with along lower case 5 on the inner wall of lower case 5, along ion mistake on the outer wall of ion filter filter core 3
Filter filter core 3 is axial to offer filter core locating slot compatible with lower case positioning bar.
The outside of lower case 5 is equipped with clip installation unit, which includes the card being arranged in outside lower case 5
Hoop 4 and the mounting plate 8 being arranged on clip 4.The outer wall of lower case 5 is equipped with second lower house positioning convex platform 52, on clip 4
Offer clip location hole 41 compatible with second lower house positioning convex platform 52.As shown in figure 3, being opened up respectively on mounting plate 8
There are the first mounting plate mounting hole 81, the second mounting plate mounting hole 82, is offered on clip 4 suitable with 81 phase of the first mounting plate mounting hole
The clip mounting hole matched.First mounting plate mounting hole 81 and clip mounting hole are elongate holes.Second mounting plate mounting hole 82
It is adapted with the mounting surface mounting hole opened up on mounting surface.
It is equipped with first interface in first interface 9 and strengthens bushing 7, is equipped with second interface in second interface 10 and strengthens bushing 6.
The present apparatus in practical application, as shown in figure 4, battery coolant liquid by first interface 9 enter upper housing 1 inside, one
Part successively flows into inside ion filter filter core 3 through shunting disk access opening 21, filter core feed pathway 31, by ion filter filter core 3
Electron ion is removed, is discharged later by second interface 10;Another part successively flow to second interface 10 through tap hole 22, splitter cavity,
And it is discharged by second interface 10.In mounting device, matching for second lower house positioning convex platform 52 and clip location hole 41 is first passed through
It closes, clip 4 is fixedly connected with lower case 5;Again by the cooperation of the first mounting plate mounting hole 81 and clip mounting hole, will install
Plate 8 is fixedly connected with clip 4;Later by the cooperation of the second mounting plate mounting hole 82 and mounting surface mounting hole, by mounting plate 8 with
Mounting surface is fixedly connected, that is, realizes and device is mounted on mounting surface.
The above description of the embodiments is intended to facilitate ordinary skill in the art to understand and use the invention.
Person skilled in the art obviously easily can make various modifications to these embodiments, and described herein general
Principle is applied in other embodiments without having to go through creative labor.Therefore, the present invention is not limited to the above embodiments, ability
Field technique personnel announcement according to the present invention, improvement and modification made without departing from the scope of the present invention all should be of the invention
Within protection scope.
Claims (10)
1. a kind of electron ion filter device for battery coolant liquid, which is characterized in that the device includes upper housing (1), lower casing
In the shunt filtering unit of lower case (5) inside, which includes being respectively set on one next for body (5) and setting
In the internal ion filter filter core (3) of lower case (5), shunting disk (2) and it is arranged in ion filter filter core (3) and lower case
(5) splitter cavity between, the upper housing (1) are equipped with first interface (9), and the bottom of the lower case (5) is equipped with the
Two interfaces (10), battery coolant liquid enter upper housing (1) inside by first interface (9), remove electron ion through shunt filtering unit
Afterwards, it is discharged by second interface (10).
2. a kind of electron ion filter device for battery coolant liquid according to claim 1, which is characterized in that described
It is offered at the center of shunting disk (2) shunting disk access opening (21), the shunting disk is also provided with multiple tap holes on (2)
(22), the tap hole (22) is connected by splitter cavity with second interface (10), the ion filter filter core (3) it is upper
End is connected with shunting disk access opening (21), and lower end is connected with second interface (10).
3. a kind of electron ion filter device for battery coolant liquid according to claim 2, which is characterized in that described
The internal shunting disk boss (23) being connected with shunting disk access opening (21), the ion are equipped at the center of shunting disk (2)
The upper end of filter core (3) is equipped with compatible filter core feed pathway (31), the shunting disk are convex with shunting disk boss (23)
The lateral surface of platform (23) and the medial surface of filter core feed pathway (31) are connected through a screw thread.
4. a kind of electron ion filter device for battery coolant liquid according to claim 2, which is characterized in that described
The top of lower case (5) is equipped with first lower house positioning convex platform (51), offers on the shunting disk (2) and first lower house
The compatible shunting disk mounting hole (24) of positioning convex platform (51).
5. a kind of electron ion filter device for battery coolant liquid according to claim 2, which is characterized in that described
Lower case positioning bar, the outer wall of the ion filter filter core (3) are axially arranged with along lower case (5) on the inner wall of lower case (5)
On along ion filter filter core (3) axially offer filter core locating slot compatible with lower case positioning bar.
6. a kind of electron ion filter device for battery coolant liquid according to claim 1, which is characterized in that described
The outside of lower case (5) is equipped with clip installation unit, which includes the setting clip external in lower case (5)
(4) and mounting plate (8) on clip (4) is set.
7. a kind of electron ion filter device for battery coolant liquid according to claim 6, which is characterized in that described
The outer wall of lower case (5) is equipped with second lower house positioning convex platform (52), offers on the clip (4) and second lower house
The compatible clip location hole (41) of positioning convex platform (52).
8. a kind of electron ion filter device for battery coolant liquid according to claim 6, which is characterized in that described
The first mounting plate mounting hole (81), the second mounting plate mounting hole (82), the clip (4) are offered on mounting plate (8) respectively
On offer the compatible clip mounting hole with the first mounting plate mounting hole (81).
9. a kind of electron ion filter device for battery coolant liquid according to claim 8, which is characterized in that described
First mounting plate mounting hole (81) and clip mounting hole are elongate holes.
10. a kind of electron ion filter device for battery coolant liquid according to any one of claims 1 to 9, feature
It is, first interface is equipped in the first interface (9) and strengthens bushing (7), second is equipped in the second interface (10)
Interface strengthens bushing (6).
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN201710916171.2A CN109589664A (en) | 2017-09-30 | 2017-09-30 | A kind of electron ion filter device for battery coolant liquid |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201710916171.2A CN109589664A (en) | 2017-09-30 | 2017-09-30 | A kind of electron ion filter device for battery coolant liquid |
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Publication Number | Publication Date |
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CN109589664A true CN109589664A (en) | 2019-04-09 |
Family
ID=65955481
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
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CN201710916171.2A Pending CN109589664A (en) | 2017-09-30 | 2017-09-30 | A kind of electron ion filter device for battery coolant liquid |
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CN (1) | CN109589664A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110559718A (en) * | 2019-09-26 | 2019-12-13 | 兰杰 | Vacuum filtering device suitable for lithium battery slurry with different barrel diameters |
CN116516317A (en) * | 2023-04-12 | 2023-08-01 | 江苏微导纳米科技股份有限公司 | Carrier boat, treatment equipment and method for controlling pressure drop in carrier boat |
-
2017
- 2017-09-30 CN CN201710916171.2A patent/CN109589664A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN110559718A (en) * | 2019-09-26 | 2019-12-13 | 兰杰 | Vacuum filtering device suitable for lithium battery slurry with different barrel diameters |
CN116516317A (en) * | 2023-04-12 | 2023-08-01 | 江苏微导纳米科技股份有限公司 | Carrier boat, treatment equipment and method for controlling pressure drop in carrier boat |
CN116516317B (en) * | 2023-04-12 | 2023-12-15 | 江苏微导纳米科技股份有限公司 | Carrier boat, treatment equipment and method for controlling pressure drop in carrier boat |
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