CN109581825A - 一种uvled光源用定向反光装置 - Google Patents
一种uvled光源用定向反光装置 Download PDFInfo
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- CN109581825A CN109581825A CN201811611259.4A CN201811611259A CN109581825A CN 109581825 A CN109581825 A CN 109581825A CN 201811611259 A CN201811611259 A CN 201811611259A CN 109581825 A CN109581825 A CN 109581825A
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/7015—Details of optical elements
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70058—Mask illumination systems
- G03F7/702—Reflective illumination, i.e. reflective optical elements other than folding mirrors, e.g. extreme ultraviolet [EUV] illumination systems
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Abstract
本发明涉及到光学装置技术领域,尤其涉及一种UVLED光源用定向反光装置。该UVLED光源用定向反光装置的内放光杯通过连杆固定在外反光杯的内部,外反光杯和内放光杯的中心线在同一条直线上,对应进光口设有UVLED光源,UVLED光源位于外反光杯和内放光杯的中心线上,通过外反光杯和内放光杯的共同反光作用,能够使得UVLED光源发出的光线呈平行光冲出光***出,通过该定向反光装置获得了一束平行光。
Description
技术领域
本发明涉及到光学装置技术领域,尤其涉及一种UVLED光源用定向反光装置。
背景技术
UVLED光源具有很多的优点:无危险材料、低能量消耗、体积小、性能优异、节省费用、具有成本效益,增强的耐用性的定制选择等。UVLED市场随着其在紫外波段应用的拓展,获得了新一轮的爆发。紫外曝光就是在计算机的控制下,利用聚焦电子束对有机聚合物(通常称为电子抗蚀剂或光刻胶)进行曝光,受电子束辐照后的光刻胶,其物理化学性质发生变化,在一定的溶剂中形成良溶或非良溶区域,从而在抗蚀剂上形成精细图形。常见的UVLED光源发出的光具有一定的散射,不能够完全形成平行光束。
为了解决上述技术问题,本发明设计了一种UVLED光源用定向反光装置,该UVLED光源用定向反光装置的内放光杯通过连杆固定在外反光杯的内部,外反光杯和内放光杯的中心线在同一条直线上,对应进光口设有UVLED光源, UVLED光源位于外反光杯和内放光杯的中心线上,通过外反光杯和内放光杯的共同反光作用,能够使得UVLED光源发出的光线呈平行光冲出光***出,通过该定向反光装置获得了一束平行光。
发明内容
为了克服背景技术中存在的缺陷,本发明解决其技术问题所采用的技术方案是:一种UVLED光源用定向反光装置,包括外反光杯、内放光杯和UVLED光源,所述内放光杯通过连杆固定在外反光杯的内部,所述外反光杯和内放光杯的中心线在同一条直线上,所述外反光杯和内放光杯的内侧面为圆弧形,所述外反光杯的底部为进光口,所述外反光杯的顶部为出光口,所述进光口处的横截面直径小于出光口处的横截面直径,对应进光口设有UVLED光源,所述UVLED光源位于外反光杯和内放光杯的中心线上。
本发明设计了一种UVLED光源用定向反光装置,该UVLED光源用定向反光装置的内放光杯通过连杆固定在外反光杯的内部,外反光杯和内放光杯的中心线在同一条直线上,对应进光口设有UVLED光源, UVLED光源位于外反光杯和内放光杯的中心线上,通过外反光杯和内放光杯的共同反光作用,能够使得UVLED光源发出的光线呈平行光冲出光***出,通过该定向反光装置获得了一束平行光。
附图说明
下面结合附图和实施例对本发明进一步说明。
图1是本发明一种UVLED光源用定向反光装置的结构示意图;
图2是本发明一种UVLED光源用定向反光装置的主视图;
图3是图2中沿A-A方向的剖视图;
图4是本发明一种UVLED光源用定向反光装置的使用状态参考图;
其中: 1、外反光杯;2、内放光杯;3、连杆;4、UVLED光源;5、进光口;6、出光口。
具体实施方式
现在结合附图对本发明作进一步详细的说明。附图为简化的示意图,仅以示意方式说明本发明的基本结构,因此其仅显示与本发明有关的构成。
请参阅图1-3,一种UVLED光源用定向反光装置,包括外反光杯1、内放光杯2和UVLED光源13,所述内放光杯2通过连杆固定在外反光杯1的内部,所述外反光杯1和内放光杯2的中心线在同一条直线上,所述外反光杯1和内放光杯2的内侧面为圆弧形,所述外反光杯1的底部为进光口5,所述外反光杯1的顶部为出光口6,所述进光口5处的横截面直径小于出光口6处的横截面直径,对应进光口5设有UVLED光源4,所述UVLED光源4位于外反光杯1和内放光杯2的中心线上。
本发明设计了一种UVLED光源用定向反光装置,请参阅图4,该UVLED光源用定向反光装置的内放光杯通过连杆固定在外反光杯的内部,外反光杯和内放光杯的中心线在同一条直线上,对应进光口设有UVLED光源, UVLED光源位于外反光杯和内放光杯的中心线上,通过外反光杯和内放光杯的共同反光作用,能够使得UVLED光源发出的光线7经过外反光杯和内放光杯反射后呈平行光冲出光***出,通过该定向反光装置获得了一束平行光。
显然,上述实施例仅仅是为清楚地说明所作的举例,而并非对实施方式的限定。对于所属领域的普通技术人员来说,在上述说明的基础上还可以做出其它不同形式的变化或变动。这里无需也无法对所有的实施方式予以穷举。而由此所引伸出的显而易见的变化或变动仍处于本发明创造的保护范围之中。
Claims (1)
1.一种UVLED光源用定向反光装置,包括外反光杯(1)、内放光杯(2)和UVLED光源(13),其特征在于:所述内放光杯(2)通过连杆固定在外反光杯(1)的内部,所述外反光杯(1)和内放光杯(2)的中心线在同一条直线上,所述外反光杯(1)和内放光杯(2)的内侧面为圆弧形,所述外反光杯(1)的底部为进光口(5),所述外反光杯(1)的顶部为出光口(6),所述进光口(5)处的横截面直径小于出光口(6)处的横截面直径,对应进光口(5)设有UVLED光源(4),所述UVLED光源(4)位于外反光杯(1)和内放光杯(2)的中心线上。
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Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201226804A (en) * | 2010-12-31 | 2012-07-01 | Ke-Xun Liu | Spot light |
TW201508216A (zh) * | 2013-08-28 | 2015-03-01 | Lustrous Technology Ltd | 導光結構及燈具 |
CN205299389U (zh) * | 2015-12-18 | 2016-06-08 | 中山市尊宝实业有限公司 | 一种led小角度反光杯 |
CN205717029U (zh) * | 2016-05-29 | 2016-11-23 | 邹凤强 | 一种led灯聚光灯罩 |
CN209657081U (zh) * | 2018-12-27 | 2019-11-19 | 万欣光光学技术(苏州)有限公司 | 一种uvled光源用定向反光装置 |
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- 2018-12-27 CN CN201811611259.4A patent/CN109581825A/zh active Pending
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TW201226804A (en) * | 2010-12-31 | 2012-07-01 | Ke-Xun Liu | Spot light |
TW201508216A (zh) * | 2013-08-28 | 2015-03-01 | Lustrous Technology Ltd | 導光結構及燈具 |
CN205299389U (zh) * | 2015-12-18 | 2016-06-08 | 中山市尊宝实业有限公司 | 一种led小角度反光杯 |
CN205717029U (zh) * | 2016-05-29 | 2016-11-23 | 邹凤强 | 一种led灯聚光灯罩 |
CN209657081U (zh) * | 2018-12-27 | 2019-11-19 | 万欣光光学技术(苏州)有限公司 | 一种uvled光源用定向反光装置 |
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