CN109580173B - Method and system for debugging and detecting non-achromatic optical system by using interferometer - Google Patents
Method and system for debugging and detecting non-achromatic optical system by using interferometer Download PDFInfo
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- CN109580173B CN109580173B CN201811414434.0A CN201811414434A CN109580173B CN 109580173 B CN109580173 B CN 109580173B CN 201811414434 A CN201811414434 A CN 201811414434A CN 109580173 B CN109580173 B CN 109580173B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
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Abstract
The invention discloses a method and a system for debugging and detecting a non-achromatic optical system by using an interferometer, wherein the method comprises the following steps: (1) providing a standard beam expanding optical system debugging detection optical path, wherein the standard beam expanding optical system debugging detection optical path comprises a visible light interferometer, a first optical system, a second optical system and a plane reflector which are sequentially arranged from left to right; (2) and adding an installation and adjustment flat plate in the standard beam expanding optical system installation and adjustment detection optical path, and installing the installation and adjustment flat plate between the first optical system and the second optical system. (3) And carrying out debugging detection through the interferometer. The invention uses the installation and calling flat plate to carry out installation and calling detection on the optical system, can reduce the design difficulty and simplify the optical system and reduce the cost under the condition of not changing the original optical system structure.
Description
Technical Field
The invention relates to the technical field of high-precision optical system design and manufacture, in particular to a method and a system for debugging and detecting a non-achromatic optical system by using an interferometer.
Background
In the process of actually designing and manufacturing the high-precision optical system, the optical system needs to be designed well, and meanwhile, in the process of machining and manufacturing, machining tolerance needs to be controlled, and the like, so that the actual optical system has good imaging quality. Among them, the tuning of optical systems is an important step. Since the common high-precision instrument used at present is a visible light interferometer, the wavelength of light emitted by the interferometer is 632.8 nm. And the wavelength actually used by the optical system does not necessarily include this band. If the optical system performs chromatic aberration correction for this wavelength band, the optical system is more complicated and the cost is increased. The invention provides a method, which can use an interferometer to carry out adjustment detection by designing a light path in a mode of using an adjustment compensator under the condition that an optical system does not correct chromatic aberration, thereby ensuring the precision of the optical system.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provides a method and a system for debugging and detecting a non-achromatic optical system by using an interferometer.
In order to achieve the purpose, the invention adopts the following technical scheme:
the invention provides a method for debugging and detecting a non-achromatic optical system by using an interferometer, which comprises the following steps:
(1) providing a standard beam expanding optical system assembling and detecting optical path, wherein the standard beam expanding optical system assembling and detecting optical path comprises a visible light interferometer, a first optical system, an assembling and debugging flat plate, a second optical system and a plane mirror which are sequentially arranged from left to right, and the first optical system and the second optical system form the standard beam expanding optical system;
(2) adding a mounting and adjusting flat plate in a mounting and adjusting detection optical path of the standard beam expanding optical system, and mounting the mounting and adjusting flat plate between the first optical system and the second optical system; the optical path compensation is carried out through the installation and adjustment flat plate, so that the beam expansion optical system consisting of the first optical system and the second optical system can be installed and adjusted through the interferometer for detection;
(3) and performing installation and debugging detection through the interferometer, taking away the installation and debugging flat plate after the installation and debugging are completed aiming at the parallel light with the wavelength of the interferometer at the moment, and using the standard beam expanding optical system for design at the moment.
The first optical system and the second optical system form a parallel light beam expanding optical path, and can also be a spherical wave optical system for correcting aberration.
The plane mirror may be replaced by a spherical mirror.
The present invention also provides a system for debugging and detecting a non-achromatic optical system using an interferometer, comprising:
the standard beam expanding optical system debugging detection optical path comprises a visible light interferometer, a first optical system, a debugging flat plate, a second optical system and a plane reflector which are sequentially arranged from left to right, wherein the first optical system and the second optical system form a standard beam expanding optical system;
adding a mounting and adjusting flat plate in a mounting and adjusting detection optical path of the standard beam expanding optical system, wherein the mounting and adjusting flat plate is arranged between the first optical system and the second optical system; and (3) carrying out debugging detection through the interferometer, keeping parallel light on two sides of the optical system aiming at the wavelength of the interferometer at the moment, taking away the debugging flat plate after the debugging is finished, and using the standard beam expanding optical system for design at the moment.
And the optical path compensation is carried out by the installation call flat plate, so that the first optical system and the second optical system can be installed and detected by the interferometer.
The first optical system and the second optical system form a parallel light beam expanding optical path, and can also be a spherical wave optical system for correcting aberration, and the plane mirror can be replaced by a spherical mirror. The invention has the beneficial effects that: the invention uses the installation and calling flat plate to carry out installation and calling detection on the optical system, can reduce the design difficulty and simplify the optical system and reduce the cost under the condition of not changing the original optical system structure.
Drawings
FIG. 1 is a schematic diagram of an assembled detection optical path of a parallel beam expanding optical system according to a preferred embodiment of the present invention;
description of reference numerals:
1. a visible light interferometer; 2. an optical system; 3. installing and calling a flat plate; 4. a plane mirror.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in further detail below with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention.
The invention discloses a method for debugging a non-achromatic beam expanding system by using an interferometer, which aims to solve the problem that some optical systems cannot be debugged and detected by using a visible light interferometer under the condition of no achromatization. The invention provides a method for debugging and detecting a non-achromatic optical system by using an interferometer, which comprises the following steps:
(1) providing a standard beam expanding optical system debugging detection optical path, wherein the standard beam expanding optical system debugging detection optical path comprises a visible light interferometer 1, a first optical system 2, a debugging flat plate 3, a second optical system 4 and a plane mirror 5 which are sequentially arranged from left to right, and the first optical system 2 and the second optical system 4 form a standard beam expanding optical system;
(2) and adding a mounting flat plate 3 into the standard beam expanding optical system mounting detection optical path, and mounting the mounting flat plate 3 between the first optical system 2 and the second optical system 4.
(3) And the installation and debugging detection is carried out through the interferometer 1, the two sides of the optical system keep parallel light aiming at the wavelength of the interferometer 1 at the moment, after the installation and debugging are finished, the installation and debugging flat plate is taken away, and the standard beam expanding optical system is used for design at the moment.
If achromatic color is not considered in the design of the optical system, when the optical system is detected by using the interferometer, the light emitted from the other side is not parallel light, so that the adjustment detection cannot be performed by using the interferometer. The invention adds the adjusting flat plate in the light path, so that the optical system can keep parallel light on both sides of the wavelength of the interferometer when the optical system uses the interferometer for detection. The invention uses the adjusting plate, so that achromatic aberration does not need to be considered during design and processing, the design difficulty is reduced, and meanwhile, the system is simplified and the cost is reduced.
In the embodiment shown in fig. 1, the mounting plate 3 is used for optical path compensation, so that the beam expanding system composed of the first optical system 2 and the second optical system 4 can be used for mounting detection by the interferometer 1.
In the embodiment shown in fig. 1, the first optical system 2 and the second optical system 4 form a parallel beam expanding optical path, and may be a spherical wave optical system for correcting aberration.
In the embodiment shown in fig. 1, the plane mirror 5 may be replaced by a spherical mirror.
The embodiment enables the non-achromatic optical system to be adjusted and detected by using the adjusting flat plate by using the interferometer, thereby reducing the design difficulty, simplifying the optical system and reducing the cost.
The embodiment of the invention also provides a system for debugging and detecting a non-achromatic optical system by using an interferometer, which comprises:
the system aims to solve the problem that some optical systems cannot use a visible light interferometer for debugging detection under the condition of no achromatism. The invention provides a system for debugging and detecting a non-achromatic optical system by using an interferometer, comprising:
the standard beam expanding optical system debugging detection optical path comprises a visible light interferometer 1, a first optical system 2, a debugging flat plate 3, a second optical system 4 and a plane mirror 5 which are sequentially arranged from left to right, wherein the first optical system 2 and the second optical system 4 form a standard beam expanding optical system;
adding a mounting and calling flat plate 3 into the standard beam expanding optical system mounting and detecting optical path, and mounting the mounting and calling flat plate 3 between the first optical system 2 and the second optical system 4;
the interferometer 1 is used for debugging and detecting, the two sides of the optical system keep parallel light aiming at the wavelength of the interferometer 1 at the moment, after the debugging is finished, the debugging flat plate is taken away, and the standard beam expanding optical system is used for design at the moment.
If achromatic color is not considered in the design of the optical system, when the optical system is detected by using the interferometer, the light emitted from the other side is not parallel light, so that the adjustment detection cannot be performed by using the interferometer. The invention adds the adjusting flat plate in the light path, so that the optical system can keep parallel light on both sides of the wavelength of the interferometer when the optical system uses the interferometer for detection. The invention uses the adjusting plate, so that achromatic aberration does not need to be considered during design and processing, the design difficulty is reduced, and meanwhile, the system is simplified and the cost is reduced.
In the embodiment shown in fig. 1, the mounting plate 3 is used for optical path compensation, so that the beam expanding system composed of the first optical system 2 and the second optical system 4 can be used for mounting detection by the interferometer 1.
In the embodiment shown in fig. 1, the first optical system 2 and the second optical system 4 form a parallel beam expanding optical path, and may be a spherical wave optical system for correcting aberration.
In the embodiment shown in fig. 1, the plane mirror 5 may be replaced by a spherical mirror.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (4)
1. A method for detecting the alignment of a non-achromatic optical system using an interferometer, comprising the steps of:
(1) providing a standard beam expanding optical system assembling and detecting optical path, wherein the standard beam expanding optical system assembling and detecting optical path comprises a visible light interferometer, a first optical system, an assembling and debugging flat plate, a second optical system and a plane mirror which are sequentially arranged from left to right, and the first optical system and the second optical system form the standard beam expanding optical system;
(2) adding the installation and debugging flat plate into the standard beam expanding optical system installation and detection optical path, and installing the installation and debugging flat plate between the first optical system and the second optical system; and the optical path compensation is carried out by the installation call flat plate, so that the first optical system and the second optical system can be installed and detected through the interferometer.
(3) And debugging and detecting through the interferometer, keeping parallel light on two sides of the standard beam expanding optical system aiming at the interferometer at the moment, taking away the debugging flat plate after the debugging is finished, and taking away the standard beam expanding optical system for design and use at the moment.
2. The method for inspecting the alignment of a non-achromatic optical system using an interferometer according to claim 1, wherein said first optical system and said second optical system are constituted by a parallel beam expanding optical path or a spherical wave optical system for correcting aberrations, and a spherical mirror is used instead of said plane mirror.
3. A system for inspecting the alignment of a non-achromatic optical system using an interferometer, comprising:
the standard beam expanding optical system debugging detection optical path comprises a visible light interferometer, a first optical system, a debugging flat plate, a second optical system and a plane reflector which are sequentially arranged from left to right, wherein the first optical system and the second optical system form a standard beam expanding optical system;
adding the installation and debugging flat plate into the standard beam expanding optical system installation and detection optical path, wherein the installation and debugging flat plate is arranged between the first optical system and the second optical system; and the optical path compensation is carried out by the installation call flat plate, so that the first optical system and the second optical system can be installed and detected through the interferometer.
4. The system for interferometer-based alignment detection of a non-achromatic optical system of claim 3, wherein said first and second optical systems are combined into a parallel beam expanding optical path or a spherical wave optical system for correcting aberrations, and a spherical mirror is used instead of said plane mirror.
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| CN112558283B (en) * | 2020-12-30 | 2022-03-22 | 中国科学院长春光学精密机械与物理研究所 | Relay imaging system with achromatic aberration and distortion elimination functions for snapshot type imaging spectrometer |
| CN113834633A (en) * | 2021-08-09 | 2021-12-24 | 中国工程物理研究院应用电子学研究所 | Method for assembling and adjusting transmission type near-infrared beam expanding system |
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| CN101435698B (en) * | 2008-12-17 | 2010-08-25 | 天津大学 | Method and system for measuring surface appearance of micro-device under transparent encapsulation medium |
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| US20160131867A1 (en) * | 2014-11-06 | 2016-05-12 | Ocutech, Inc. | Automatic focusing optical assembly, system and method |
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