CN109570750B - Laser galvanometer precision online correction system and method - Google Patents
Laser galvanometer precision online correction system and method Download PDFInfo
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Abstract
The invention relates to a laser galvanometer precision online correction system and method, wherein the system comprises a control device, a workbench for placing a workpiece, a first imaging device, a laser galvanometer and a second imaging device, the workbench comprises a feeding station, a processing station and a detection station which are sequentially arranged, the first imaging device is arranged at the feeding station, the laser galvanometer is arranged at the processing station, the second imaging device is arranged at the detection station, and the control device is respectively and electrically connected with the workbench, the first imaging device, the laser galvanometer and the second imaging device. The technical scheme provided by the invention can realize the online correction of the laser galvanometer and greatly improve the laser processing efficiency.
Description
Technical Field
The invention relates to the technical field of laser processing, in particular to a system and a method for online correcting the precision of a laser galvanometer.
Background
When a laser is used to perform pattern processing on a workpiece, a laser beam is generally emitted by a laser, and then the laser beam is scanned at a high speed by a laser galvanometer to act on the workpiece, so that the corresponding pattern processing is finally completed. However, with the long-term use of the laser galvanometer, the precision of the laser galvanometer changes due to external factors such as ambient temperature, humidity and vibration and the temperature drift of the laser galvanometer, and in order to ensure the precision of the pattern processing, the laser galvanometer needs to be corrected irregularly. However, when the laser galvanometer is corrected at present, the laser galvanometer needs to be checked after the system is stopped, which seriously affects the laser processing efficiency.
Disclosure of Invention
In order to improve the laser processing quality and efficiency, the invention provides a laser galvanometer precision online correction system and method.
On one hand, the invention provides an online laser galvanometer precision correction system which comprises a control device, a workbench for placing a workpiece, a first imaging device, a laser galvanometer and a second imaging device, wherein the workbench comprises a feeding station, a processing station and a detection station which are sequentially arranged, the first imaging device is arranged at the feeding station, the laser galvanometer is arranged at the processing station, the second imaging device is arranged at the detection station, and the control device is respectively and electrically connected with the workbench, the first imaging device, the laser galvanometer and the second imaging device.
The control device is used for:
and when the current workpiece is positioned at the feeding station of the workbench, determining a machining deflection parameter according to a preset center mark and a first workpiece image acquired by the first imaging device.
And when the current workpiece is positioned at the processing station of the workbench, the laser galvanometer is adjusted according to the processing deflection parameters, and the laser beam is controlled according to a preset standard graph to pass through the adjusted laser galvanometer and then is carved on the current workpiece to generate a plurality of identification points.
And when the current workpiece is positioned at the detection station of the workbench, determining galvanometer correction parameters according to the machining deflection parameters, a second workpiece image which is acquired by the second imaging device and comprises a plurality of identification points and the standard graph.
And adjusting the laser galvanometer according to the galvanometer correction parameter before the subsequent workpiece enters the processing station of the workbench for processing.
On the other hand, the invention also provides an on-line correction method for the precision of the laser galvanometer, which comprises the following steps:
and when the current workpiece is positioned at the feeding station of the workbench, determining a machining deflection parameter according to the preset center mark and the first workpiece image acquired by the first imaging device.
And when the current workpiece is positioned at a processing station of the workbench, adjusting a laser galvanometer according to the processing deflection parameters, and controlling a laser beam to pass through the adjusted laser galvanometer according to a preset standard graph and then engraving the laser galvanometer on the current workpiece to generate a plurality of identification points.
And when the current workpiece is positioned at the detection station of the workbench, determining a galvanometer correction parameter according to the machining deflection parameter, a second workpiece image which is acquired by a second imaging device and comprises a plurality of identification points and the standard graph.
And adjusting the laser galvanometer according to the galvanometer correction parameter before the subsequent workpiece enters the processing station of the workbench for processing.
The system and the method for the online correction of the precision of the laser galvanometer have the advantages that the workbench drives the current workpiece to enter the feeding station I firstly, and due to the limitation of transmission precision, when the workpiece is transferred to the processing table top of the workbench, the workpiece is probably not positioned at the central position of the processing table top and cannot correspond to the preset processing position of the laser galvanometer at the back. The processing deflection parameters of the current workpiece relative to the center of the processing table, namely the marking card of the laser galvanometer can be determined through a first workpiece image obtained by a first imaging device, such as a high-definition camera, and the preset center mark of the laser galvanometer. And adjusting the processing parameters of the laser galvanometer according to the parameters, so that after the current workpiece enters the processing station II, the processing graph carved by the laser beam is consistent with the preset processing graph and is positioned at the center of the workpiece. In the preset processing graph, a plurality of standard graph identification points corresponding to the preset standard graph can be arranged, wherein the standard graph identification points can be in a cross shape and are convenient to identify; of course, a point where the preset machining pattern itself exists may be used as the identification point, and for example, when a point where an intersection or the like is easily captured by an imaging device exists in the preset machining pattern, the intersection or the like of the preset machining pattern may be directly used as the identification point. After the laser processing system finishes laser engraving processing of the processing graph and the identification points, the current workpiece enters a detection station III, a second imaging device at the detection station III can obtain a second workpiece image comprising the identification points, identification point parameters of the laser galvanometer when the laser galvanometer is not deflected during processing can be determined through identification point information and processing deflection parameters in the second workpiece image, and then corresponding galvanometer correction parameters can be obtained by comparing the identification point parameters with preset standard graph identification point parameters. Because the workbench can receive, transmit and process workpieces uninterruptedly, the galvanometer correction parameters obtained by detecting the current workpiece can enter a processing station II for subsequent workpieces, namely, the laser processing system finishes the on-line feedback adjustment of the laser galvanometer before processing the subsequent workpieces, so as to ensure the uninterrupted laser processing, greatly improve the processing efficiency, correct the laser galvanometer in time and fully ensure the processing precision.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is an electrical block diagram of an on-line laser galvanometer precision correction system according to an embodiment of the present invention;
FIG. 2 is a schematic view of a table according to an embodiment of the present invention;
FIG. 3 is a schematic view of a workpiece positioned at a work station of the work station according to an embodiment of the present invention;
FIG. 4 is a schematic view of a back calculation point on a workpiece according to an embodiment of the invention;
FIG. 5 is a diagram illustrating a standard pattern and a logo pattern according to an embodiment of the present invention;
fig. 6 is a schematic flow chart of a laser galvanometer precision online correction method according to an embodiment of the invention.
Detailed Description
The principles and features of this invention are described below in conjunction with the following drawings, which are set forth by way of illustration only and are not intended to limit the scope of the invention.
As shown in fig. 1 and 2, an online laser galvanometer precision correction system provided in an embodiment of the present invention includes a control device, a workbench for placing a workpiece, a first imaging device 1, a laser galvanometer 2, and a second imaging device 3, where the workbench includes a feeding station I, a processing station II, and a detection station III, the first imaging device 1 is disposed at the feeding station I, the laser galvanometer 2 is disposed at the processing station II, the second imaging device 3 is disposed at the detection station III, and the control device is electrically connected to the workbench, the first imaging device 1, the laser galvanometer 2, and the second imaging device 3, respectively. The workbench can also comprise at least one movable processing table board, and the workpiece can be adsorbed on the processing table board and then moves to the positions of the feeding station I, the processing station II, the detection station III and the like. In addition, a laser of the processing system matched with the laser galvanometer 2 emits laser beams, the laser can also be controlled by a control device, and the laser beams are projected onto a workpiece on the table top after passing through the laser galvanometer 2.
The control device is used for:
and when the current workpiece is positioned at the feeding station I of the workbench, determining a machining deflection parameter according to the preset center identification of the laser galvanometer 2 and the first workpiece image acquired by the first imaging device 1.
And when the current workpiece is positioned at a processing station II of the workbench, adjusting the laser galvanometer 2 according to the processing deflection parameters, and controlling the laser beam to pass through the adjusted laser galvanometer 2 according to a preset standard graph and then engraving the laser beam on the current workpiece to generate a plurality of identification points.
And when the current workpiece is positioned at the detection station III of the workbench, determining galvanometer correction parameters according to the machining deflection parameters, a second workpiece image which is acquired by a second imaging device 3 and comprises a plurality of identification points and the standard graph.
And before the subsequent workpiece enters a processing station II of the workbench, adjusting the laser galvanometer 2 according to the galvanometer correction parameter. The laser galvanometer 2 can be adjusted in a mode of updating a correction document.
In this embodiment, the workbench drives the current workpiece to enter the feeding station I first, and due to the limitation of transmission precision, when the workpiece is transferred to the processing table of the workbench, the workpiece is likely not located at the center of the processing table and cannot correspond to the preset processing position of the rear laser galvanometer. The processing deflection parameters of the current workpiece relative to the center of the processing table, namely the marking card of the laser galvanometer can be determined through a first workpiece image obtained by a first imaging device, such as a high-definition camera, and the preset center mark of the laser galvanometer. And adjusting the processing parameters of the laser galvanometer according to the parameters, so that after the current workpiece enters the processing station II, the processing graph carved by the laser beam is consistent with the preset processing graph and is positioned at the center of the workpiece. In the preset processing graph, a plurality of standard graph identification points corresponding to the preset standard graph can be arranged, wherein the standard graph identification points can be in a cross shape and are convenient to identify; of course, a point where the preset machining pattern itself exists may be used as the identification point, and for example, when a point where an intersection or the like is easily captured by an imaging device exists in the preset machining pattern, the intersection or the like of the preset machining pattern may be directly used as the identification point. After the laser processing system finishes laser engraving processing of the processing graph and the identification points, the current workpiece enters a detection station III, a second imaging device at the detection station III can obtain a second workpiece image comprising the identification points, identification point parameters of the laser galvanometer when the laser galvanometer is not deflected during processing can be determined through identification point information and processing deflection parameters in the second workpiece image, and then corresponding galvanometer correction parameters can be obtained by comparing the identification point parameters with preset standard graph identification point parameters. Because the workbench can receive, transmit and process workpieces uninterruptedly, the galvanometer correction parameters obtained by detecting the current workpiece can enter a processing station II for subsequent workpieces, namely, the laser processing system finishes the on-line feedback adjustment of the laser galvanometer before processing the subsequent workpieces, so as to ensure the uninterrupted laser processing, greatly improve the processing efficiency, correct the laser galvanometer in time and fully ensure the processing precision.
It should be noted that the table may be a rotary processing table as shown in fig. 2, or may be a pipelined processing table. Taking a rotary machining workbench as an example, it can be seen that the workbench comprises a plurality of rotating arm type machining tables arranged in sequence, and the rotary machining workbench is driven to rotate step by a DD motor and the like, wherein the DD motor and the like can be controlled by a control device. The plurality of rotating arm type processing table tops stay at the feeding station I, the processing station II, the detection station III, the discharging station IV and the like in sequence. Other stations such as a blanking station IV and the like can be set according to actual requirements, the current workpiece can be driven by the rotary machining workbench to sequentially enter the feeding station I, the machining station II and the detection station III at preset intervals, and meanwhile, the subsequent workpiece can also sequentially enter each station behind the current workpiece. For example, when the current workpiece is located at the detection station III, the subsequent workpiece can be located at the processing station II, at the moment, the galvanometer correction parameter can be obtained according to the current workpiece, and before the subsequent workpiece at the processing station II is processed, the laser galvanometer is adjusted on line according to the galvanometer correction parameter, so that the laser processing flow can be not interrupted, the laser galvanometer can be corrected in time, and the processing efficiency and quality are ensured.
Preferably, as shown in fig. 3, the machining deflection parameters include a deflection angle and an offset distance of the workpiece relative to the preset center mark.
The control device is specifically configured to:
the center point of the current workpiece, i.e., the M point in fig. 3, is determined from the first workpiece image.
Comparing the central point M with a preset central mark M, wherein M can be a vector with coordinates and a direction, and determining the deflection angle according to the comparison result to be
I.e. the deflection angle of M with respect to M, and said offset distance, are made dx, dy, i.e. the lateral and vertical distances of M with respect to M.
Preferably, the control device is specifically configured to:
and determining back calculation points corresponding to the identification points respectively according to the machining deflection parameters and the second workpiece image.
And determining an identification graph comprising all the back calculation points according to the back calculation points.
And comparing the standard graph with the identification graph, and determining the galvanometer correction parameter according to a comparison result.
Specifically, because the machining pattern and the mark point actually machined on the workpiece are obtained after the machining parameters of the laser galvanometer are adjusted according to the machining deflection parameters, the conditions that whether the machining pattern is distorted due to the laser galvanometer at the moment cannot be accurately reflected. Therefore, after the coordinates of the identification points are determined, the coordinates need to be subjected to back calculation according to the machining deflection parameters so as to obtain back calculation point parameters capable of truly reflecting the current state of the laser galvanometer.
Let the identification point be p (x)p，yp) The inverse calculation point isP(XP，YP) Since the coordinates of the marker point are available from the second workpiece image, the back-calculated point coordinates can be determined according to the polar coordinate formula as:
preferably, as shown in fig. 4 and 5, the standard graph is a quadrilateral, and the identification points correspond to four vertices of the quadrilateral respectively.
The control device is specifically configured to:
determining coordinates of the four identification points according to the second workpiece image, and determining coordinates of the four back calculation points according to the machining deflection parameters and the coordinates of the four identification points; and sequentially connecting the four back calculation points to obtain the identification graph in a quadrilateral form.
Specifically, taking a standard graph in the form of a rectangle as an example, it has four vertices a, b, c, d, and accordingly, there are also four machining-completed mark points on the workpiece, which correspond to the four back-calculation points A, B, C, D, respectively. After determining the coordinates of each identified point, the coordinates of each back-calculation point, namely A (X) can be further determinedA，YA)、B(XB，YB)、C(XC，YC)、D(XD，YD). Meanwhile, A, B, C, D four back calculation points are connected in sequence to obtain a quadrilateral identification graph.
It should be noted that all the identification points can be captured simultaneously by the second imaging device, for example, one camera, or each identification point can be captured by a plurality of cameras. When a plurality of cameras are used for shooting each identification point respectively, shooting precision is higher, so that parameters of the identification points obtained subsequently are more accurate, and correction precision can be further improved. The positions, i.e. relative coordinates, of the plurality of cameras can be determined in advance, and meanwhile, different identification points shot by different cameras can be unified into the same coordinate system by arranging the correction plate.
Preferably, the correction parameters include at least one of center point offset, expansion-contraction ratio and angular deflection.
When the difference between the back-calculated point and the corresponding vertex in the standard graph, for example, the distance between the two points exceeds a certain threshold, the process of determining each correction parameter is started.
Preferably, the process of determining the galvanometer correction parameter comprises:
and determining the center point coordinate of the standard graph and the intersection point coordinate of the intersection point of the two diagonal lines of the identification graph, and taking the difference value of the center point coordinate and the intersection point coordinate as the center point offset.
Specifically, after unifying the coordinate systems of the standard graph and the identification graph, respectively connecting AC and BD to obtain the diagonal intersection point E of the identification graph in the quadrilateral form, and determining the coordinate E (X) of the diagonal intersection point according to the coordinate of the back calculation pointE，YE). Since the center point e of the standard pattern, that is, the coordinate of the intersection of the diagonal lines of the rectangular standard pattern at this time is set to e (0, 0), the difference between the two can be used as the center point Offset.
Preferably, the process of determining the galvanometer correction parameter comprises:
and determining the identification side lengths of two adjacent identification sides in the identification graph according to the coordinates of the back calculation points, determining two standard adjacent sides in the standard graph corresponding to the positions of the two adjacent identification sides in the identification graph, and taking the quotient of the identification side length and the standard side length of the standard adjacent sides as the expansion-contraction ratio.
Specifically, taking two adjacent edges AB and BC in the identification graph, the length of the two can be determined as L by calculating the coordinates of the point A, B, C backABAnd LBC. Due to the length L of the corresponding adjacent sides ab and bc in the standard graphab、LbcIs determined, the expansion/contraction ratio Scale _ X in the X direction and the expansion/contraction ratio Scale _ Y in the Y direction can be determined according to the following formulas.
Scale_X＝LAB/Lab。
Scale_Y＝LBC/Lbc。
Preferably, the process of determining the galvanometer correction parameter comprises:
and respectively determining the vertex angle deflection of the identification graph relative to the four vertex angles of the standard graph according to the coordinates of the four inverse calculation points on the basis of an arc tangent function, and taking the average value of the four vertex angle deflections as the angle deflection.
Specifically, the apex angle deflections θ 1 to θ 4 of the four apex angles are determined according to the following formulas.
θ1＝arctan((YB-YA)/(XB-XA))。
θ2＝arctan((YC-YB)/(XC-XB))-90。
θ3＝arctan((YC-YD)/(XC-XD))。
θ4＝arctan((YD-YA)/(XD-XA))-90。
The angular deflection Δ θ is determined from the four corner deflections as follows.
Δθ＝(θ1+θ2+θ3+θ4)/4。
Preferably, the specific implementation of adjusting the laser galvanometer according to the galvanometer correction parameter is as follows: and updating the correction document of the laser galvanometer according to the galvanometer correction parameters.
Through testing, through adjusting central point skew, breathing ratio and/or angle deflection in the laser galvanometer correction document, the time spent of correction will shorten to the second level, is less than 1 second even, can effectively rectify the precision change that causes because of reasons such as temperature drift simultaneously, not only can avoid the tedious process of current correction method, satisfy assembly line processing demand, rectify fast, improve the work efficiency of correction, still can effectively guarantee the correction precision of laser galvanometer.
As shown in fig. 6, the on-line laser galvanometer precision correction method provided in the embodiment of the present invention can be applied to the above system, and the method includes the following steps:
101, when the current workpiece is positioned at the feeding station of the workbench, determining a machining deflection parameter according to a preset center mark and a first workpiece image acquired by the first imaging device.
And 102, when the current workpiece is positioned at a processing station of the workbench, adjusting a laser galvanometer according to the processing deflection parameters, and controlling a laser beam to pass through the adjusted laser galvanometer according to a preset standard graph and then engraving the laser galvanometer on the current workpiece to generate a plurality of identification points.
103, when the current workpiece is positioned at the detection station of the workbench, determining galvanometer correction parameters according to the machining deflection parameters, a second workpiece image which is acquired by a second imaging device and comprises a plurality of identification points and the standard graph.
And 104, adjusting the laser galvanometer according to the galvanometer correction parameter before the subsequent workpiece enters the processing station of the workbench for processing.
The reader should understand that in the description of this specification, reference to the description of the terms "one embodiment," "some embodiments," "an example," "a specific example" or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.
Claims (9)
1. The laser galvanometer precision online correction system is characterized by comprising a control device, a workbench for placing a workpiece, a first imaging device, a laser galvanometer and a second imaging device, wherein the workbench comprises a feeding station, a processing station and a detection station which are sequentially arranged;
the control device is used for:
when the current workpiece is positioned at the feeding station of the workbench, determining a machining deflection parameter according to a preset center identifier and a first workpiece image acquired by the first imaging device;
when the current workpiece is positioned at the processing station of the workbench, the laser galvanometer is adjusted according to the processing deflection parameters, and a laser beam is controlled according to a preset standard graph to pass through the adjusted laser galvanometer and then is carved on the current workpiece to generate a plurality of identification points;
when the current workpiece is positioned at the detection station of the workbench, determining galvanometer correction parameters according to the machining deflection parameters, a second workpiece image which is acquired by the second imaging device and comprises a plurality of identification points and the standard graph;
before a subsequent workpiece enters the processing station of the workbench for processing, adjusting the laser galvanometer according to the galvanometer correction parameter;
the control device is specifically configured to:
determining back calculation points corresponding to the identification points respectively according to the machining deflection parameters and the second workpiece image;
determining an identification graph comprising all the back calculation points according to the back calculation points;
and comparing the standard graph with the identification graph, and determining the galvanometer correction parameter according to a comparison result.
2. The laser galvanometer precision on-line correction system of claim 1, wherein the machining deflection parameters include a deflection angle and an offset distance of a workpiece relative to the preset center mark;
the control device is specifically configured to:
determining a central point of the current workpiece according to the first workpiece image;
and comparing the central point with the preset central mark, and determining the deflection angle and the offset distance according to the comparison result.
3. The system for the on-line correction of the precision of the laser galvanometer according to claim 1, wherein the standard graph is a quadrilateral, and the identification points respectively correspond to four vertexes of the quadrilateral;
the control device is specifically configured to:
determining coordinates of the four identification points according to the second workpiece image, and determining coordinates of the four back calculation points according to the machining deflection parameters and the coordinates of the four identification points; and sequentially connecting the four back calculation points to obtain the identification graph in a quadrilateral form.
4. The laser galvanometer precision online correction system of claim 3, wherein the correction parameters include at least one of center point offset, expansion and contraction ratio, and angular deflection.
5. The system for on-line correction of laser galvanometer precision of claim 4, wherein the process of determining galvanometer correction parameters comprises:
and determining the center point coordinate of the standard graph and the intersection point coordinate of the intersection point of the two diagonal lines of the identification graph, and taking the difference value of the center point coordinate and the intersection point coordinate as the center point offset.
6. The system for on-line correction of laser galvanometer precision of claim 4, wherein the process of determining galvanometer correction parameters comprises:
and determining the identification side lengths of two adjacent identification sides in the identification graph according to the coordinates of the back calculation points, determining two standard adjacent sides in the standard graph corresponding to the positions of the two adjacent identification sides in the identification graph, and taking the quotient of the identification side length and the standard side length of the standard adjacent sides as the expansion-contraction ratio.
7. The system for on-line correction of laser galvanometer precision of claim 4, wherein the process of determining galvanometer correction parameters comprises:
and respectively determining the vertex angle deflection of the identification graph relative to the four vertex angles of the standard graph according to the coordinates of the four inverse calculation points on the basis of an arc tangent function, and taking the average value of the four vertex angle deflections as the angle deflection.
8. The system for the on-line correction of the precision of the laser galvanometer according to any one of claims 1 to 7, wherein the specific implementation of the adjustment of the laser galvanometer according to the galvanometer correction parameters is as follows: and updating the correction document of the laser galvanometer according to the galvanometer correction parameters.
9. An on-line correction method for the precision of a laser galvanometer is characterized by comprising the following steps:
when the current workpiece is positioned at a feeding station of the workbench, determining a machining deflection parameter according to a preset center identifier and a first workpiece image acquired by a first imaging device;
when the current workpiece is positioned at a processing station of the workbench, adjusting a laser galvanometer according to the processing deflection parameters, and controlling a laser beam to pass through the adjusted laser galvanometer according to a preset standard graph and then engraving on the current workpiece to generate a plurality of identification points;
when the current workpiece is positioned at a detection station of the workbench, determining galvanometer correction parameters according to the machining deflection parameters, a second workpiece image which is acquired by a second imaging device and comprises a plurality of identification points and the standard graph;
before a subsequent workpiece enters the processing station of the workbench for processing, adjusting the laser galvanometer according to the galvanometer correction parameter;
when the current workpiece is located at the detection station of the workbench, determining galvanometer correction parameters according to the machining deflection parameters, a second workpiece image which is acquired by a second imaging device and comprises a plurality of identification points, and the standard graph specifically comprises:
determining back calculation points corresponding to the identification points respectively according to the machining deflection parameters and the second workpiece image;
determining an identification graph comprising all the back calculation points according to the back calculation points;
and comparing the standard graph with the identification graph, and determining the galvanometer correction parameter according to a comparison result.
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| CN111843190B (en) * | 2020-06-22 | 2023-04-07 | 常州捷佳创智能装备有限公司 | Calibration method for laser processing equipment |
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| TWI438050B (en) * | 2011-12-16 | 2014-05-21 | Ind Tech Res Inst | Method and processor for laser processing error calibration |
| CN103212880A (en) * | 2012-01-19 | 2013-07-24 | 昆山思拓机器有限公司 | Precision vibrating mirror correction system |
| JP2015006674A (en) * | 2013-06-24 | 2015-01-15 | 新光電気工業株式会社 | Laser processing apparatus, laser irradiation point correction method, drilling processing method, and wiring substrate manufacturing method |
| CN203509345U (en) * | 2013-08-15 | 2014-04-02 | 中国电子科技集团公司第四十八研究所 | Welding-track auto-correction system |
| CN104475970B (en) * | 2014-12-01 | 2016-06-29 | 大族激光科技产业集团股份有限公司 | A kind of bearing calibration of laser equipment and laser scanning galvanometer array |
| CN107486629B (en) * | 2017-08-31 | 2019-02-19 | 湖北三江航天红峰控制有限公司 | A kind of vision positioning laser marking system bearing calibration |
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