CN109562405B - Dispenser nozzle, method for manufacturing dispenser nozzle, and fluid dispensing device using dispenser nozzle - Google Patents
Dispenser nozzle, method for manufacturing dispenser nozzle, and fluid dispensing device using dispenser nozzle Download PDFInfo
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- CN109562405B CN109562405B CN201780046714.8A CN201780046714A CN109562405B CN 109562405 B CN109562405 B CN 109562405B CN 201780046714 A CN201780046714 A CN 201780046714A CN 109562405 B CN109562405 B CN 109562405B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B1/00—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means
- B05B1/02—Nozzles, spray heads or other outlets, with or without auxiliary devices such as valves, heating means designed to produce a jet, spray, or other discharge of particular shape or nature, e.g. in single drops, or having an outlet of particular shape
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C5/00—Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
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Abstract
The invention discloses a dispenser nozzle which does not damage quantitative accuracy and nozzle position accuracy relative to a target object in fluid dispensing and is easier to produce in large quantity compared with a metal precision nozzle, and a fluid dispensing device using the dispenser nozzle. The dispenser nozzle of the present invention is attached to a fluid supply unit of a fluid dispensing device, and dispenses a fluid supplied from the fluid supply unit to a target position on a substrate. Such a dispenser nozzle is composed of a resin composition containing a resin and a filler, and includes a nozzle body having a fluid outlet portion with an opening diameter of 0.1mm to 0.5mm and a thickness between the fluid outlet portion and an outer peripheral portion of the nozzle body of 0.1mm to 0.3 mm.
Description
Technical Field
The present invention relates to a dispenser nozzle and a fluid dispensing apparatus using the same, and more particularly, to a dispenser nozzle having excellent dimensional accuracy and a fluid dispensing apparatus using the same.
Background
A fluid dispensing apparatus is used for dispensing a predetermined amount of fluid or paste to a precise or fine target site, such as dispensing a sealing member to the outer frame of a glass substrate in a liquid crystal display or dispensing a die bonding adhesive to a lead frame of a semiconductor chip. Such a fluid dispensing apparatus is equipped with a dispenser nozzle at a distal end portion thereof, and a storage container containing a fluid material therein is moved in any direction of an X axis, a Y axis, and a Z axis by an electric actuator, so that the fluid material can be dispensed onto a target (for example, a substrate) through the dispenser nozzle. As for a fluid dispensing apparatus, for example, there has been proposed a fluid dispensing apparatus for controlling dispensing of a fluid material or adjusting a gap between a nozzle and a workpiece with high accuracy (for example, patent documents 1 and 2).
On the other hand, various nozzles for discharging a certain amount of fluid to a target have been developed. Such nozzles are classified into, for example, resin cone nozzles formed entirely of resin, metal pipe joining nozzles in which a metal needle is provided at a distal end of a resin body, and metal precision nozzles formed entirely of metal. Among them, a metal precision nozzle has been conventionally used as a dispenser nozzle attached to a fluid dispensing device. This is because the metal precision nozzle can be used with higher quantitative accuracy in dispensing the fluid from the tip of the nozzle and higher accuracy in positioning the nozzle with respect to the target than the resin taper nozzle and the metal tube joining nozzle.
However, the metal precision nozzle has a disadvantage of being poor in mass productivity and expensive. The metal precision nozzle is manufactured by cutting a metal block made of stainless steel, for example. Therefore, it is not easy to manufacture a large amount of the resin conical nozzle in a short time as in the case of a resin conical nozzle manufactured using a mold.
Further, since the metal precision nozzle is expensive, a regular cleaning operation may be required when changing the type of fluid to be dispensed or in order to prevent the nozzle from being clogged due to long-term use. Such cleaning operation and management for cleaning are troublesome for workers on site.
Documents of the prior art
Patent document
Patent document 1: japanese patent No. 4824698
Patent document 2: japanese patent No. 5460132
Disclosure of Invention
Problems to be solved by the invention
The present invention has been made to solve the above-described problems, and an object thereof is to provide a dispenser nozzle and a fluid dispensing apparatus using the same, which are easier to mass-produce than a metal precision nozzle without impairing the quantitative accuracy and the nozzle position accuracy with respect to a target at the time of dispensing a fluid.
Means for solving the problems
The present invention is a dispenser nozzle which is attached to a fluid supply unit of a fluid dispensing apparatus and dispenses a fluid supplied from the fluid supply unit to a target position of a base material,
the dispenser nozzle is formed by a nozzle body,
the nozzle body includes: a fluid inlet portion that is disposed at one end portion and receives the fluid supplied from the fluid supply portion; a fluid outlet portion that is disposed at the other end portion and discharges the fluid toward the substrate; and a fluid passage disposed between the fluid inlet portion and the fluid outlet portion, for allowing the fluid to flow from the fluid inlet portion to the fluid outlet portion,
the fluid passage has a tapered portion that decreases in diameter from the fluid inlet portion to the fluid outlet portion,
the nozzle body is composed of a resin composition containing a resin and a filler,
the fluid outlet portion has an opening diameter of 0.1mm to 0.5mm, and
the thickness between the fluid outlet portion at the other end of the nozzle body and the outer peripheral portion of the nozzle body is 0.1mm to 0.3 mm.
In one embodiment, the filler contains a fibrous filler having an average fiber diameter of 0.5nm to 100 μm, and the fibrous filler is oriented in the axial direction of the fluid passage at the other end portion of the nozzle body.
In one embodiment, the above filler comprises a particulate filler having an average particle diameter of 5nm to 100 μm.
In one embodiment, the resin is a thermosetting resin.
In one embodiment, the resin is a thermoplastic resin.
In one embodiment, the fluid passage has a tapered portion that decreases in diameter from the fluid inlet portion to the fluid outlet portion, and the tapered portion has a surface roughness (Ry) of 2 μm or less.
In one embodiment, the outer peripheral portion of the nozzle body has an R-face of R0.01 to R0.05.
In one embodiment, the outer peripheral portion of the nozzle body has a chamfered surface of C0.01 to C0.05.
The present invention is also a method for manufacturing a dispenser nozzle which is attached to a fluid supply unit of a fluid dispensing apparatus and dispenses a fluid supplied from the fluid supply unit to a target position of a substrate,
the manufacturing method comprises a step of forming a nozzle body by using a resin composition containing a resin and a filler,
the nozzle body includes: a fluid inlet portion that is disposed at one end portion and receives the fluid supplied from the fluid supply portion; a fluid outlet portion that is disposed at the other end portion and discharges the fluid toward the substrate; and a fluid passage disposed between the fluid inlet portion and the fluid outlet portion, for allowing the fluid to flow from the fluid inlet portion to the fluid outlet portion,
the fluid passage has a tapered portion that decreases in diameter from the fluid inlet portion to the fluid outlet portion,
the fluid outlet portion has an opening diameter of 0.1mm to 0.5mm, and
the thickness between the fluid outlet portion at the other end of the nozzle body and the outer peripheral portion of the nozzle body is 0.1mm to 0.3mm
In one embodiment, the above filler comprises a fibrous filler having an average fiber diameter of 0.5nm to 100 μm.
In one embodiment, the above filler comprises a particulate filler having an average particle diameter of 5nm to 100 μm.
In one embodiment, the molding process is performed by transfer molding or injection molding.
In another embodiment, a burr is formed in the fluid outlet portion of the nozzle body obtained in the molding step substantially in parallel with the fluid passage.
In one embodiment, the resin is a thermosetting resin.
In one embodiment, the resin is a thermoplastic resin.
The present invention is also a fluid dispensing device including:
the above-described dispenser nozzle;
a fluid supply jig which has a fluid storage portion and supplies fluid from the fluid supply portion to the dispenser nozzle; and
a stage for disposing the substrate.
ADVANTAGEOUS EFFECTS OF INVENTION
According to the present invention, it is possible to provide quantitative accuracy and nozzle position accuracy with respect to a target at the time of dispensing a fluid comparable to a metal precision nozzle. Further, the dispenser nozzle of the present invention can be formed in a disposable manner by mass production, and the troublesome cleaning work and management for cleaning performed by the operator can be eliminated.
Drawings
Fig. 1 is a schematic view showing an example of a dispenser nozzle according to the present invention, wherein (a) is a front view of the dispenser nozzle, and (b) is an axial sectional view of the dispenser nozzle.
Fig. 2 is a diagram schematically showing an example of a fluid dispensing apparatus having a dispenser nozzle according to the present invention.
Detailed Description
The present invention will be described below with reference to the accompanying drawings.
(distributor nozzle and method of manufacturing the same)
Fig. 1 shows an example of a dispenser nozzle of the present invention. Fig. 1 (a) is a front view of the dispenser nozzle of the present invention, and (b) is an axial sectional view of the dispenser nozzle.
The dispenser nozzle 100 is comprised of a hollow nozzle body 102. A fluid inlet portion 104 is provided at one end portion of the nozzle body 102, and a fluid outlet portion 106 is provided at the other end portion.
The fluid outlet portion 106 is capable of discharging fluid from the nozzle body 102 to the outside (e.g., a substrate as a target). The fluid outlet portion 106 has, for example, an opening shape of a circular shape or a polygonal shape (e.g., a triangle and a quadrangle), and has an opening diameter D of 0.1mm to 0.5mm, preferably 0.2mm to 0.4mm2. Further, in the present invention, the thickness t between the fluid outlet portion 106 at the end portion on the fluid outlet portion 106 side of the nozzle body 102 and the outer peripheral portion 109 of the nozzle body 1021The design is 0.1 mm-0.3 mm, preferably 0.15 mm-0.2 mm. As will be described later, in the present invention, the thickness t is set so that the nozzle body 102 is made of a resin composition1The molding of the nozzle body having a diameter of less than 0.1mm may be difficult in resin molding. On the other hand, if the above thickness t is1If the diameter is more than 0.2mm, the fluid is likely to adhere to the periphery of the nozzle, and the liquid break (liquid cut れ) is deteriorated, so that the dispensing accuracy and the application position accuracy are adversely affected, and/or when the nozzle is intended to apply the fine portion, the nozzle is too thick, and it is difficult to apply the desired fine coating.
In the present invention, the outer peripheral portion 109 of the nozzle body 102 is treated to have an R surface of preferably R0.01 to R0.05, more preferably R0.01 to R0.03, or a light chamfered surface of preferably C0.01 to C0.05, more preferably C0.01 to C0.03. By treating the outer peripheral portion 109 of the nozzle body 102 to have the R-face or the chamfered face in such a range, the possibility that the fluid discharged from the fluid outlet portion 106 remains around the outer peripheral portion 109 due to the surface tension thereof can be reduced, and therefore the fluid can be quantitatively discharged from the fluid outlet portion 106 with higher accuracy. Further, the outer peripheral portion 109 can be prevented from being chipped or damaged when it comes into contact with an obstacle during use.
In the dispenser nozzle 100 of the present invention, the nozzle body 102 is further provided with a fluid passage 108 between the fluid inlet portion 104 and the fluid outlet portion 106 ((b) of fig. 1). Within the fluid passageway 108, fluid can flow from the fluid inlet portion 104 to the fluid outlet portion 106.
In the dispenser nozzle 100 of the present invention, the nozzle body 102 may be provided with a projection 112 having, for example, a cylindrical or polygonal outer appearance and functioning as a grip portion when attached to a fluid dispensing device. The nozzle body 102 also preferably has a tapered appearance with a diameter decreasing toward the end of the fluid outlet portion 106. In addition, in fig. 1 (a) and (b), a flange 110 for a luer lock is shown at the outer circumference of the fluid inlet portion 104 of the nozzle body 102, but the present invention is not limited thereto. Instead of the flange 110, a screw thread for screwing to a fluid supply portion of a fluid dispensing device may be provided on the outer periphery of the fluid inlet portion 104 of the nozzle body 102.
In the dispenser nozzle 100 of the present invention, the inner diameter of the fluid passage 108 is configured to gradually or stepwise decrease from the fluid inlet portion 104 to the fluid outlet portion 106. The fluid passageway 108 preferably has tapered portions 114, 116 that preferably decrease in diameter from the fluid inlet portion 104 to the fluid outlet portion 106. In fig. 1 (b), 2 tapered portions 114 and 116 are shown, but the present invention is not limited to such a configuration. In the fluid passage 108, only 1 tapered portion may be formed, or at least 2 tapered portions may be formed. Further, in the dispenser nozzle 100 of the present invention, the tapered portions 114, 116 have a smooth surface, preferably having a surface roughness (Ry; maximum height) of 2 μm or less, more preferably 1.5 μm or less. In the fluid passage 108, the inner surfaces other than the tapered portions 114 and 116 may have the same surface roughness.
The axial length L of the dispenser nozzle 100 of the present invention (i.e., the length from the fluid inlet portion 104 to the fluid outlet portion 106) is not necessarily limited and any length may be selected by one skilled in the art. The axial length L of the dispenser nozzle 100 is, for example, 10mm to 40mm, preferably 15mm to 30 mm.
In the dispenser nozzle 100 of the present invention, the nozzle body 102 is composed of a resin composition containing a resin and a filler. Since the nozzle body 102 is made of such a resin composition, a dispenser nozzle having excellent acid resistance and chemical resistance as compared with a conventional precision nozzle made of metal can be provided.
The resin contained in the resin composition is a thermosetting resin or a thermoplastic resin. Examples of thermosetting resins include epoxy resins, diallyl phthalate resins, phenol resins, polyurethane resins, silicone resins, and blends thereof. Examples of the thermoplastic resin include polyphenylene sulfide resins, liquid crystal polymers, polyether ether ketone resins, polypropylene resins, polyethylene resins, polymethylpentene resins, and blends thereof. In the present invention, a thermosetting resin is preferably used as the resin because the viscosity at the time of molding is low and the resin composition can be provided with excellent fluidity even in a state where the content of the filler is large. In the present invention, epoxy resin is more preferably used as the thermosetting resin because of high rigidity, no deformation of the dispenser nozzle due to internal pressure, and high chemical resistance.
The content of the resin contained in the resin composition is not necessarily limited, and is, for example, 5 to 99% by weight, preferably 10 to 95% by weight, based on the weight of the resin composition. If the content of the resin is more than 5% by weight, the flow of the resin composition during molding is significantly suppressed, and it may be difficult to fill the fluid outlet portion 106. If the resin content exceeds 99% by weight, the fluidity of the resin composition increases, and burrs are likely to be generated at the fluid outlet portion 106. In the present invention, when the resin is a thermosetting resin, the content of the thermosetting resin contained in the resin composition is preferably 5 to 40% by weight, more preferably 10 to 30% by weight, based on the weight of the resin composition. On the other hand, in the present invention, when the resin is a thermoplastic resin, the content of the thermoplastic resin contained in the resin composition is preferably 70 to 99% by weight, more preferably 80 to 95% by weight, based on the weight of the resin composition.
The filler contained in the resin composition is preferably a filler having excellent fluidity so as to be uniformly filled into a relatively fine end portion such as the outer peripheral portion 109 of the nozzle body 102. Examples of the filler include fibrous fillers, particulate fillers, and combinations thereof.
The fibrous filler is not necessarily limited, and examples thereof include carbon fibers, carbon nanotubes, cellulose nanofibers, glass fibers, ceramic fibers, metal fibers, boron fibers, Aramid fibers, polyester fibers, Aramid fibers, and various whiskers (for example, graphite whiskers, potassium titanate whiskers, alumina whiskers, silicon carbide whiskers, silicon nitride whiskers, mullite whiskers, magnesium oxide whiskers, magnesium borate whiskers, zinc oxide whiskers, and titanium boride (TiB whiskers)2) Whiskers, and combinations thereof), and combinations thereof.
In the present invention, in the case where the above filler contains a fibrous filler, the fibrous filler has an average fiber diameter of preferably 0.5nm to 100 μm, more preferably 5nm to 50 μm. When the average fiber diameter of the fibrous filler is within such a range, the fibrous filler can be filled at a high concentration also in the vicinity of the outer peripheral portion 109 of the nozzle body 102. In the present invention, when the filler constituting the resin composition contains a fibrous filler, the fibrous filler is preferably oriented in the axial direction of the fluid passage 108 at the end portion of the nozzle body 102 on the outer peripheral portion 109 side. By orienting the fibrous filler in this manner, the strength of the fluid outlet portion 106 is increased, and defects or breakage can be prevented. Further, the possibility of burrs occurring in the outer peripheral portion 109 of the nozzle body 102 is reduced, and a dispenser nozzle having more excellent quantitative accuracy can be obtained.
The particulate filler is not necessarily limited, and examples thereof include an organic filler, an inorganic filler, and a combination thereof. Examples of the organic filler include powders of a benzoguanamine resin, a urea-formaldehyde resin, a melamine-formaldehyde resin, a polyether sulfone resin, and the like, and molded products thereof (e.g., beads and the like). Examples of the inorganic filler include powders of silica, alumina, zircon, calcium silicate, calcium phosphate, calcium carbonate, magnesium carbonate, silicon carbide, boron nitride, aluminum hydroxide, iron oxide, zinc oxide, zirconium oxide, magnesium oxide, titanium oxide, alumina, calcium sulfate, barium sulfate, forsterite, steatite, spinel, clay, kaolin, dolomite, hydroxyapatite, nepheline syenite, cristobalite, wollastonite, diatomaceous earth, talc, zeolite, boehmite, and the like, and molded bodies thereof (for example, beads and the like).
In the present invention, when the filler contains a particulate filler, the particulate filler has an average particle diameter of preferably 5nm to 100 μm, more preferably 5nm to 50 μm. When the average particle diameter of the particulate filler is within such a range, the filler can be filled at a high concentration even in the vicinity of the outer peripheral portion 109 of the nozzle body 102.
In the present invention, in order to improve the quantitative accuracy and positional accuracy of the nozzle body 102, it is preferable to reduce the linear expansion coefficient of the resin composition, and it is more preferable to increase the filling amount of the filler in association therewith. The content of the filler contained in the resin composition is not necessarily limited, and is, for example, 1 to 95% by weight, preferably 5 to 90% by weight, based on the weight of the resin composition. When the content of the filler is less than 1 wt%, burrs are likely to be generated on the outer periphery of the nozzle body when the nozzle body is molded, and the generated burrs are also difficult to remove, and as a result, it may be difficult to provide a dispenser nozzle having excellent quantitative accuracy and nozzle position accuracy. If the filler content exceeds 95% by weight, the relative content of the resin in the resin composition decreases, and molding itself may become difficult in some cases by using such a resin composition.
In the present invention, when the fibrous filler and the particulate filler are used in combination as the filler contained in the resin composition, both of the properties unique to the respective fillers can be provided in the resin composition. That is, in the case of combining the fibrous filler and the particulate filler, the fibrous filler in the resin composition improves the strength of the tip portion of the fluid outlet 106, thereby preventing the tip portion of the fluid outlet 106 from being damaged or broken, and the particulate filler in the resin composition contributes to improving the strength of the tip portion of the fluid outlet 106 and suppressing the occurrence of burrs at the tip portion. Further, by containing these fillers, even if burrs are generated, the burrs themselves become hard and easily break, and removal of the burrs can be further simplified. Further, the resin composition containing such a filler has a small linear expansion, and therefore, the dimensional accuracy is improved.
In the present invention, the resin composition may contain other additives than the above-mentioned resin and filler. Such other additives are not necessarily limited, and examples thereof include a curing agent, an effect accelerator, a release agent, a clay mineral, an antioxidant, an antistatic agent, a lubricant, a pigment, an ultraviolet absorber, an antibacterial agent, and a combination thereof. The content of the other additives contained in the resin composition is not necessarily limited, and may be set, for example, in the range of 0.1 to 10% by weight based on the weight of the resin composition.
The dispenser nozzle of the present invention is made of a resin composition, and can be mass-produced more easily than the dispenser nozzle produced by cutting metal. Thereby, a disposable dispenser nozzle can also be made.
The dispenser nozzle of the present invention can be manufactured by molding a resin composition containing the above resin and filler into the shape of a nozzle body, for example.
Such molding may be transfer molding or injection molding using methods known to those skilled in the art. The molding conditions (e.g., mold temperature and pressing pressure) may be set to appropriate conditions by those skilled in the art, and may be set to the following conditions, for example.
[ Table 1]
In the manufacture of the dispenser nozzle of the present invention, the mold into which the resin composition is injected is provided with a gate on the side of the fluid inlet 104 as shown in fig. 1 (b), for example. This is because, by providing a gate at such a position in the mold, the filler as a constituent component of the resin composition injected into the mold is easily oriented along the axial direction of the fluid passage 108 of the nozzle body 102. Even if a burr is formed on the fluid outlet portion 106, the burr is formed substantially parallel to the fluid passage 108, and therefore the burr can be easily removed.
This enables the manufacture of the dispenser mouth of the invention.
The dispenser nozzle of the present invention is attached to a fluid supply unit of a fluid dispensing device, and dispenses a fluid supplied from the fluid supply unit to a target position of a substrate.
(fluid dispensing apparatus)
Next, a fluid dispensing device of the present invention will be described.
Fig. 2 is a diagram schematically showing an example of a fluid dispensing apparatus having a dispenser nozzle according to the present invention.
As shown in fig. 2, a fluid dispensing device 200 according to the present invention includes the dispenser nozzle 100, a fluid supply jig 210, and a stage 230.
The fluid supply jig 210 includes, for example, a fluid reservoir 214 for hermetically storing the fluid 212 therein, and a fluid supply unit 216 disposed below the fluid reservoir 214. The dispenser nozzle 100 of the present invention is attached to the fluid supply portion 216. The liquid storage portion 214 communicates with the fluid tank 240 through the fluid supply pipe 218, and for example, the fluid 212 stored in the fluid tank 240 opens the valve 219 in response to a signal from the control unit 217, and a liquid feeding unit (for example, a pump), not shown, is driven by the signal from the control unit 217 to be supplied from the fluid tank 240 to the liquid storage portion 214.
In the fluid dispensing device 200 of the present invention, the fluid supply jig 210 is connected to the arm 250, and can be moved in any direction of the X axis, the Y axis, and the Z axis (i.e., any direction of the horizontal direction and the height direction) with respect to the stage 230 by, for example, a drive unit not shown. In fig. 2, an example in which 1 liquid supply jig 210 is connected to an arm 250 is described for the fluid dispensing apparatus 200, but the present invention is not limited to this. For example, a plurality of fluid supply jigs may be connected to 1 arm in a row at regular intervals, and each of the fluid supply jigs may communicate with the fluid tank 240 via a plurality of fluid supply pipes.
In the fluid dispensing device 200 of the present invention, the stage 230 has a substantially flat surface along the horizontal direction, and the base 234 is disposed on this surface. A fixing unit (not shown) for fixing the base material 234 may be provided on the stage 230 as necessary. The stage 230 is also fixed to the base 260, or is disposed on the base 260 so as to be movable in any direction of the X axis, the Y axis, and the Z axis (i.e., any direction of the horizontal direction and the height direction) by a driving unit (not shown). In the fluid dispensing device 200 of the present invention, the arm 250 and the base 260 may be fixed to each other.
In the fluid dispensing device 200 of the present invention, first, the fluid supply jig 210 and/or the stage 230 are moved in the horizontal direction and the height direction so that the dispenser nozzle 100 is at a desired position with respect to the base material 234 on the stage 230. Then, the valve 219 is opened in response to a signal from the control unit 217, and the fluid 212 is supplied from the fluid tank 240 to the fluid supply jig 210 through the fluid supply pipe 218 by a liquid supply unit, not shown. When the fluid is newly supplied to the fluid supply jig 210, the fluid 212 in the fluid storage portion 214 is pressurized downward, and finally, the fluid corresponding to the amount of the fluid newly supplied to the fluid supply jig 210 is discharged onto the substrate 234 on the stage 230 via the dispenser nozzle 100.
As described above, the fluid dispensing device of the present invention can dispose various fluids (for example, liquid or paste adhesives, liquid or paste sealants, solder pastes, paints, resists, and the like) on a target substrate with excellent quantitative accuracy. In addition, in the fluid dispensing device of the present invention, since mass production of the attached dispenser nozzle is easy, even if the nozzle is contaminated by use, the operator can discard the nozzle (that is, replace it periodically) each time it is used, for example, without cleaning it. This can prevent the operator from being forced to perform cleaning operation each time the dispenser nozzle is contaminated. Further, by regularly replacing the dispenser nozzle, it is possible to eliminate the possibility of the influence on the metering accuracy due to the remaining foreign matter (contamination) in the dispenser nozzle.
Description of the symbols
100 dispenser mouth
102 nozzle body
104 fluid inlet portion
106 fluid outlet portion
108 fluid passage
109 outer peripheral portion
110 flange
114. 116 taper portion
200 fluid dispensing device
210 fluid supply fixture
212 fluid(s)
214 fluid reservoir
216 fluid supply part
217 control unit
218 fluid supply pipe
219 valve
230 stage
240 fluid trough
250 arm
260 base portion.
Claims (14)
1. A dispenser mouth, characterized by:
which is attached to a fluid supply unit of a fluid dispensing apparatus and dispenses a fluid supplied from the fluid supply unit to a target position of a base material,
the dispenser nozzle is formed by a nozzle body,
the nozzle body includes: a fluid inlet portion that is disposed at one end portion and receives the fluid supplied from the fluid supply portion; a fluid outlet portion that is disposed at the other end portion and discharges the fluid toward the substrate; and a fluid passage disposed between the fluid inlet portion and the fluid outlet portion, for allowing the fluid to flow from the fluid inlet portion to the fluid outlet portion,
the fluid passage has a tapered portion that decreases in diameter from the fluid inlet portion to the fluid outlet portion,
the nozzle body is composed of a resin composition containing a resin and a filler,
the fluid outlet portion has an opening diameter of 0.1mm to 0.5mm,
the thickness between the fluid outlet portion at the other end of the nozzle body and the outer peripheral portion of the nozzle body is 0.1mm to 0.3mm,
the filler comprises a fibrous filler having an average fiber diameter of 0.5nm to 100 μm, and
the fibrous packing is oriented along an axial direction of the fluid passage at the other end portion of the nozzle body.
2. The dispenser nozzle of claim 1, wherein:
the filler comprises a particulate filler having an average particle diameter of 5nm to 100 μm.
3. The dispenser nozzle of claim 1, wherein:
the resin is a thermosetting resin.
4. The dispenser nozzle of claim 1, wherein:
the resin is a thermoplastic resin.
5. The dispenser nozzle of claim 1, wherein:
the fluid passage has a tapered portion that decreases in diameter from the fluid inlet portion to the fluid outlet portion, and the tapered portion has a surface roughness Ry of 2 [ mu ] m or less.
6. The dispenser nozzle of claim 1, wherein:
the outer peripheral portion of the nozzle body has an R face of R0.01 to R0.05.
7. The dispenser nozzle of claim 1, wherein:
the outer peripheral portion of the nozzle body has a light chamfered surface of C0.01 to C0.05.
8. A method of making a dispenser nozzle, comprising:
the dispenser nozzle is attached to a fluid supply unit of a fluid dispensing apparatus and dispenses a fluid supplied from the fluid supply unit to a target position of a substrate,
the manufacturing method comprises a step of forming a nozzle body by using a resin composition containing a resin and a filler,
the nozzle body includes: a fluid inlet portion that is disposed at one end portion and receives the fluid supplied from the fluid supply portion; a fluid outlet portion that is disposed at the other end portion and discharges the fluid toward the substrate; and a fluid passage disposed between the fluid inlet portion and the fluid outlet portion, for allowing the fluid to flow from the fluid inlet portion to the fluid outlet portion,
the fluid passage has a tapered portion that decreases in diameter from the fluid inlet portion to the fluid outlet portion,
the fluid outlet portion has an opening diameter of 0.1mm to 0.5mm,
the thickness between the fluid outlet portion at the other end of the nozzle body and the outer peripheral portion of the nozzle body is 0.1mm to 0.3mm,
the filler comprises a fibrous filler having an average fiber diameter of 0.5nm to 100 μm, and
the molding step is performed so that the fibrous filler is oriented in the axial direction of the fluid passage at the other end of the nozzle body.
9. The method of claim 8, wherein:
the filler comprises a particulate filler having an average particle diameter of 5nm to 100 μm.
10. The method of claim 8, wherein:
the molding process is performed by transfer molding or injection molding.
11. The method of claim 10, wherein:
in the nozzle body obtained in the molding step, a burr is formed in the fluid outlet portion substantially in parallel with the fluid passage.
12. The method of claim 8, wherein:
the resin is a thermosetting resin.
13. The method of claim 8, wherein:
the resin is a thermoplastic resin.
14. A fluid dispensing device, comprising:
the dispenser nozzle of claim 1;
a fluid supply jig which has a fluid storage portion and supplies fluid from the fluid supply portion to the dispenser nozzle; and
a stage for disposing the substrate.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016148295A JP6127239B1 (en) | 2016-07-28 | 2016-07-28 | Dispenser nozzle and fluid dispensing apparatus using the same |
| JP2016-148295 | 2016-07-28 | ||
| PCT/JP2017/008471 WO2018020725A1 (en) | 2016-07-28 | 2017-03-03 | Dispenser nozzle and fluid dispensing device using same |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109562405A CN109562405A (en) | 2019-04-02 |
| CN109562405B true CN109562405B (en) | 2021-04-09 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780046714.8A Active CN109562405B (en) | 2016-07-28 | 2017-03-03 | Dispenser nozzle, method for manufacturing dispenser nozzle, and fluid dispensing device using dispenser nozzle |
Country Status (3)
| Country | Link |
|---|---|
| JP (1) | JP6127239B1 (en) |
| CN (1) | CN109562405B (en) |
| WO (1) | WO2018020725A1 (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6883876B2 (en) * | 2019-07-12 | 2021-06-09 | 株式会社ワークス | Nozzle for bonding electronic components |
Citations (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH05228413A (en) * | 1991-03-11 | 1993-09-07 | Nikon Corp | Coating device |
| CN2125466U (en) * | 1992-01-18 | 1992-12-23 | 吴泰相 | Multifunctional coating device |
| CN1439923A (en) * | 2002-02-20 | 2003-09-03 | Lg.菲利浦Lcd株式会社 | Liquid-crystal distributor with nozzle cleaner |
| JP2005000797A (en) * | 2003-06-11 | 2005-01-06 | Nippon Sheet Glass Co Ltd | Nozzle for coating frit paste, and coater and coating method using the nozzle |
| JP2005261996A (en) * | 2004-03-16 | 2005-09-29 | Toppan Printing Co Ltd | Coating apparatus for photosensitive colored resin composition and method for manufacturing color filter for display device |
| JP2006233244A (en) * | 2005-02-22 | 2006-09-07 | Luzcom:Kk | Ultrafine nozzle and method for producing the same |
| CN2845919Y (en) * | 2005-09-07 | 2006-12-13 | 蒋鸿文 | Integrated fan shape fluid jet nozzle |
| JP2012230386A (en) * | 2006-12-26 | 2012-11-22 | Ulvac Japan Ltd | Nozzle, liquid crystal material discharge apparatus, and nozzle manufacturing method |
| JP2014180665A (en) * | 2013-03-15 | 2014-09-29 | Nordson Corp | Liquid dispensing syringe |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2018020725A1 (en) | 2018-02-01 |
| JP6127239B1 (en) | 2017-05-17 |
| CN109562405A (en) | 2019-04-02 |
| JP2018015712A (en) | 2018-02-01 |
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