CN109550416B - Dynamic gas distribution and supply device - Google Patents
Dynamic gas distribution and supply device Download PDFInfo
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- CN109550416B CN109550416B CN201811537338.5A CN201811537338A CN109550416B CN 109550416 B CN109550416 B CN 109550416B CN 201811537338 A CN201811537338 A CN 201811537338A CN 109550416 B CN109550416 B CN 109550416B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F23/00—Mixing according to the phases to be mixed, e.g. dispersing or emulsifying
- B01F23/10—Mixing gases with gases
- B01F23/19—Mixing systems, i.e. flow charts or diagrams; Arrangements, e.g. comprising controlling means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/20—Measuring; Control or regulation
- B01F35/22—Control or regulation
- B01F35/221—Control or regulation of operational parameters, e.g. level of material in the mixer, temperature or pressure
- B01F35/2215—Temperature
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/80—Forming a predetermined ratio of the substances to be mixed
- B01F35/88—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise
- B01F35/883—Forming a predetermined ratio of the substances to be mixed by feeding the materials batchwise using flow rate controls for feeding the substances
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/90—Heating or cooling systems
- B01F35/92—Heating or cooling systems for heating the outside of the receptacle, e.g. heated jackets or burners
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F35/00—Accessories for mixers; Auxiliary operations or auxiliary devices; Parts or details of general application
- B01F35/90—Heating or cooling systems
- B01F2035/99—Heating
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01F—MIXING, e.g. DISSOLVING, EMULSIFYING OR DISPERSING
- B01F2101/00—Mixing characterised by the nature of the mixed materials or by the application field
- B01F2101/23—Mixing of laboratory samples e.g. in preparation of analysing or testing properties of materials
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Abstract
A dynamic gas distribution and supply device, carrier gas forms continuous standard gas under the action of dynamic gas distribution and supply device, and the dynamic gas distribution and supply device forms a gas distribution channel which can be switched alternatively, the gas distribution channel includes a flow control module, a first channel control module, a penetration module, and a second channel control module; after passing through the flow control module, the carrier gas flows parallelly enter the permeation cavity of the permeation module under the allocation of the first channel control module, and is collected and/or communicated with an air end to be exhausted under the regulation and control of the second channel control module; through setting the infiltration chamber to independent each other, mutually noninterfere, and a plurality of infiltration cavities that the temperature can be independently controlled realize accurate control to the permeability in the single infiltration cavity, compensate the error that actual temperature and control temperature difference brought, compensate the correction according to actual temperature to the permeability, improve the distribution degree of accuracy.
Description
Technical Field
The invention relates to a mixed gas distribution device, in particular to a permeation type dynamic gas distribution and supply device based on a permeation tube or/and a cavity, and belongs to the technical field of gas preparation equipment.
Background
The calibration gas is used for checking the accuracy of the analytical instrument, so that a proper calibration method needs to be selected for calibration. The permeation tube method is a common dynamic gas distribution method of dynamic gas distribution, the permeation is caused by the pressure gradient inside and outside the permeation tube, the permeation tube can be regarded as a stable microenvironment, the internal pressure of the permeation tube is constant, the method is particularly suitable for the configuration of standard gas with low concentration, volatility, adsorptivity and strong corrosivity, large-volume and continuous standard gas can be generated, the method has remarkable advantages in the aspect of preparing low-content gas, and is particularly important for preparing the low-content standard gas.
In order to effectively shorten the air distribution time, improve the efficiency and accuracy of air distribution and facilitate repeated realization, Chinese patent No. CN 00214154 discloses a rapid air distribution device of a permeation tube, aiming at an internal infiltration type air distribution device, the permeation tube, a thermostatic chamber and an air path are combined into an integral structure, and the permeation tube is replaced through a rapid plug. However, the gas distribution device adopting the structure still needs to replace the permeation tube for the configuration of different gases, the temperature is frequently kept constant, and the operation is complicated.
In order to improve the precision of gas distribution and mixing and solve the problems of low precision of a gas mixing valve, low precision of proportional mixing of protective gas, high production cost and difficult guarantee of product quality in an imported magnesium alloy mixing device, Chinese patent No. CN 02222688 discloses a high-precision gas distribution and supply device, which adopts parallel gas paths to realize the purpose of mixing different mixed gases by a single set of gas distribution device through a multi-position conversion valve, converts the dynamic gas supply and distribution process into a static gas supply and distribution process, and supplies uniform and stable gas for a large-flow gas distribution and supply system, but the method is not suitable for preparing mixed gas containing high-boiling-point (normal temperature liquid state) components.
In order to overcome the defects of single distribution variety and specification and small adjustable range of gas concentration of the permeation type distribution device, the Chinese patent No. CN200510044828.8 discloses a multi-path permeation type distribution device, wherein a multi-path gas gating device is adopted to divide carrier gas into n paths with controllable flow rate and respectively communicate with a specified permeation chamber or pipe, the divided carrier gas respectively passes through different permeation pipes, so that multi-path mixed gas is obtained.
This also constitutes a need for further improvements in the design of air distribution and supply devices to address the technical problems presented.
Disclosure of Invention
In view of the above problems in the prior art, the inventor found in the practice of experiments that, since the partial pressure of the standard gas in the permeation cavity is very small and almost zero (zero air always passes through the permeation cavity), the difference in pressure between the standard gas inside and outside the permeation tube does not change due to the flow rate of the diluter gas, and the permeability is considered to be irrelevant to the pressure in the permeation tube before the concentration in the permeation tube is sufficiently high; in actual application and testing, temperature control directly influences permeability, and even if carrier gas is preheated and then enters a permeation cavity, certain range of errors are brought to final detection. Therefore, the temperature of the carrier gas directly influences the working environment of the permeation tube, and directly causes deviation of experimental results.
Specifically, the relationship between permeability and temperature in the permeate tube is:
LogP1＝logP0+α(T1-T0)
in the above relational expression, P0 is a release rate at a temperature of T0 (. degree. C.); p1 is the release rate at temperature T1 (DEG C); and alpha is a temperature coefficient. Therefore, by adopting the method and the device for manufacturing the standard gas by the permeation tube method, how to reduce the temperature difference between the carrier gas and the standard gas is to maintain the stability of the microenvironment in the permeation tube, realize the stable permeation of the standard gas in the permeation tube, realize the high-precision output of the standard gas, and improve the key factor of the detection precision.
In view of the above, an object of the present invention is to provide a dynamic gas distribution and supply device, such that a carrier gas is divided into multiple parallel paths under the action of a flow control module, and independent flow control can be achieved, for a gas path channel accessing a permeation chamber, an exchange type communication can be achieved between any paths of mutually independent gas path channels, and the temperature in each permeation chamber can be independently controlled, so as to achieve accurate control over the concentration of the carrier gas in a single permeation chamber, and improve the accuracy of gas distribution.
In order to achieve the purpose, the invention adopts the following technical scheme:
a dynamic air distributing and supplying device, forming a parallel arrangement and an alternative switching air distributing channel in the device, the air distributing channel includes:
the flow control module is used for splitting the carrier gas into at least two groups of gas path channels which are independent and parallel to each other and can be independently controlled in flow;
the first channel control module is used for regulating and controlling the accessed gas path channels and realizing the exchange type communication control among the gas path channels;
the infiltration module is formed by assembling at least two independent infiltration cavities which do not interfere with each other, and the temperature in the single infiltration cavity is independently controlled;
the second channel control module controls the connection of the single permeation cavities and/or the communication and the closing of the single permeation cavity and the air end;
after passing through the flow control module, the carrier gas flows into the permeation cavity of the permeation module in parallel under the allocation of the first channel control module, and is collected and/or communicated with the air end to be emptied through the regulation and control of the second channel control module.
The permeation cavities are arranged into the plurality of permeation cavities which are independent from each other, do not interfere with each other and can be independently controlled in temperature, so that the permeation rate in a single permeation cavity can be accurately controlled, the error caused by the difference between the actual temperature and the control temperature is made up, the permeation rate is compensated and corrected according to the actual temperature, and the gas distribution accuracy is improved; the control of the permeability in a single permeation cavity is realized through the arrangement of independent temperature control in the permeation cavity, so that the configuration of target mixed standard gases with different specifications and/or different varieties is realized; the time that the chamber reenters the stable microenvironment is reduced, the recalibration period of the permeation module is shortened, and the gas distribution efficiency is improved.
Preferably, the infiltration cavity comprises a heat preservation cavity, an air inlet pipe, an infiltration pipe and a heating unit, wherein the heat preservation cavity is a heat-isolated closed cavity; the air inlet of the air inlet pipe is communicated with the first channel control module, and the air outlet of the air inlet pipe is communicated with the permeation pipe; the permeation tube is arranged in the heat preservation cavity, and an air outlet of the permeation tube is communicated with the second channel control module; the heating unit is arranged on the inner side wall of the heat preservation cavity in a ring mode. With this, through inclosed heat preservation chamber, other factors of shielding to the infiltration pipe permeability interference that can be fine form the isolated airtight die cavity of heat, and accessible heating unit carries out accurate control to the accuracy and the stability of the mark gas of the gaseous formation after the infiltration of infiltration pipe to the control of heat preservation room temperature.
Preferably, for the more convenient realization to the inside temperature's of infiltration chamber monitoring and regulation and control, the infiltration chamber still includes the control unit and the monitoring unit of setting in the heat preservation intracavity, control unit and monitoring unit and heating element electric connection. Real-time monitoring and automatic control of the temperature in the heat preservation chamber are realized through the detection unit and the control unit, on one hand, a microenvironment with stable permeability in the permeation cavity is ensured, the standard gas and the concentration and quantity are automatically controlled, and the accuracy of the whole permeation system is improved; on the other hand, through detecting element and the control unit, the change gradient of control temperature that can be accurate to shorten in the mark gas process of the target gas mixture of adaptation specification and/or different cultivars, the time that whole infiltration chamber reentrant the stable microenvironment of permeability.
Preferably, the infiltration chamber further comprises a preheating pipe arranged in the heat preservation chamber and sleeved on the air inlet pipe, wherein the preheating pipe is electrically connected with the monitoring unit and the control unit and is separately and independently controlled from the heating unit. With this, through the preheater tube that sets up in the intake pipe, be used for heating the temperature that gets into the carrier gas in the infiltration pipe through the intake pipe, thereby eliminate the influence that carrier gas temperature difference brought for the stable microenvironment of permeability, further promote this infiltration system's stability and reliability, provide whole infiltration system's accuracy, can start at the regulation time and preheat and close preheating, the time of this chamber reentrant stable microenvironment has been reduced, the cycle of infiltration module recalibration has been shortened, the efficiency of distribution has been improved.
Preferably, the device further comprises a balancing unit arranged at the inlet end of the first channel control module and the outlet end of the second channel control module and used for dynamically balancing the permeation cavity, wherein the balancing unit comprises an exhaust device in switchable communication with the second channel control module and a ventilation branch arranged between the first channel control module and the air communication end. With this, through the balanced passageway that adds in the infiltration module, under exhaust apparatus's effect, form the infiltration air current that concentration and/or variety can be regulated and control, when effectively shortening the target mixed standard gas of configuration specification and/or different varieties, the infiltration chamber gets into the preliminary treatment time of the stable microenvironment of permeability, and ensures that the infiltration chamber remains the state of ventilating all the time, avoids the infiltration saturation condition to appear, leads to the problem of preliminary balance processing failure easily.
Preferably, the balancing unit further comprises a filtering device in communication with the first channel control module for filtering air entering the first channel control module. Therefore, the air is filtered into clean and pollution-free gas, the precision of the permeation cavity is improved, and the service life of the permeation cavity is prolonged.
Preferably, the device also comprises a first valve body and a flow control module, wherein the first valve body is communicated with the inlet end of the first channel control module and is externally connected with a standard gas source, and the outlet end of the first valve body is communicated with the inlet end of the flow control module; the outlet end of the flow control module is communicated with the inlet end of the first channel control module.
Preferably, the flow control module comprises a first flow controller and a flow meter, wherein the inlet end of the first flow controller is communicated with the outlet end of the first valve body, and the outlet end of the first flow controller is communicated with the inlet end of the flow meter; the outlet end of the flow meter is communicated with the inlet end of the first channel control module. Therefore, the first flow controller can be used for precisely measuring and controlling the gas entering the first valve body, the quantitative control of loading external standard gas can be realized through the flow meter, and real-time calibration and regulation and control are realized;
further, the first flow controller is a mass flow controller. Therefore, when the first valve body is externally connected with standard gas with fixed specification, for example, the standard gas with fixed concentration is connected, an external gas source can be directly connected to provide carrier gas or/and sample gas through the quantitative regulation and control of the first flow controller and the flowmeter.
Preferably, the valve further comprises a second valve body, wherein the inlet end of the second valve body is communicated with the flow control module, and the outlet end of the second valve body is communicated with the air outlet of the standard gas. The standard gas accessed by the first valve body is diluted through the extremely convenient realization of the second valve body.
Preferably, the flow control module further comprises a second flow controller arranged between the first valve body and the standard gas outlet, the inlet end of the second valve body is communicated with the outlet end of the first flow controller, and the outlet end of the second valve body is communicated with the standard gas outlet.
Compared with the prior art, the gas distribution and supply device provided by the invention has the advantages that the permeation cavities are arranged into the plurality of permeation cavities which are independent from each other, do not interfere with each other and can be independently controlled in temperature, so that the permeability in a single permeation cavity can be accurately controlled, the error caused by the difference between the actual temperature and the control temperature is compensated, the permeability is compensated and corrected according to the actual temperature, and the gas distribution accuracy is improved; the control of the permeability in a single permeation cavity is realized through the arrangement of independent temperature control in the permeation cavity, so that the configuration of target mixed standard gases with different specifications and/or different varieties is realized; the time that the chamber reenters the stable microenvironment is reduced, the recalibration period of the permeation module is shortened, and the gas distribution efficiency is improved.
Drawings
FIG. 1 is a schematic diagram of a dynamic air distribution and supply apparatus according to the present invention;
FIG. 2 is a schematic diagram of the structure of a permeation chamber provided by the present invention;
FIG. 3 is another schematic diagram of the dynamic air distribution and supply device according to the present invention;
fig. 4 is another schematic diagram of the dynamic air distribution and supply device provided by the present invention.
Detailed Description
The present invention will be described more fully with reference to the following detailed description and accompanying drawings.
In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be described below with reference to the accompanying drawings, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
Fig. 1 is a schematic diagram of a dynamic distribution and supply device according to an embodiment of the present invention, as shown in fig. 1, a carrier gas 100 forms a continuous standard gas 300 under the action of the dynamic distribution and supply device 200, wherein the dynamic distribution and supply device 200 forms distribution channels that are arranged in parallel and can be alternately switched. Specifically, this distribution channel includes:
the flow control module 10 is used for splitting the carrier gas 100 into at least two groups of gas path channels which are independent and parallel to each other and can be independently controlled in flow;
the first channel control module 20 is used for regulating and controlling the accessed gas path channels and realizing the exchange type communication control among the gas path channels;
the infiltration module 30 is assembled by at least two independent infiltration cavities 31 which do not interfere with each other, and the internal temperature of the single infiltration cavity 31 can be independently controlled;
the second channel control module 40 is used for controlling connection among the single permeation cavities 31 and/or communication and closing of the single permeation cavities 31 and the air end;
after flowing through the flow control module 10, the carrier gas 100 enters the permeation cavity 31 of the permeation module 30 in parallel under the allocation of the first channel control module 20, and is collected and/or communicated with the air end to be exhausted under the regulation and control of the second channel control module 40.
In the gas distribution channel in the synchronous sample introduction device provided in this embodiment, the carrier gas is divided into multiple paths of parallel gas flows with independently controllable flow under the action of the flow control module, and the gas paths independent from the permeation chamber are communicated in an exchange manner under the allocation of the first channel control module, and finally are collected and/or evacuated by the second channel control module; the permeation cavities are arranged into the plurality of permeation cavities which are independent from each other, do not interfere with each other and can be independently controlled in temperature, so that the permeation rate in a single permeation cavity can be accurately controlled, the error caused by the difference between the actual temperature and the control temperature is made up, the permeation rate is compensated and corrected according to the actual temperature, and the gas distribution accuracy is improved; the control of the permeability in a single permeation cavity is realized through the arrangement of independent temperature control in the permeation cavity, so that the configuration of target mixed standard gases with different specifications and/or different varieties is realized; because be in dynamic balance's microenvironment all the time in the infiltration chamber, reduced the time that this chamber reentrant stable microenvironment, shortened the cycle of infiltration module recalibration, improved the efficiency of distribution.
In a preferred embodiment of the present invention, the flow control module 10 is a combination of at least two flow meters, for example, at least two mass flow controllers; at least two differential pressure flow meters may be combined, or a combination of a plurality of mass flow controllers and a plurality of differential pressure flow meters may be combined. The type of the flowmeter or the specific matching structure of the flowmeter is not specifically limited, and the requirement that the carrier gas is split into at least two groups of mutually independent and parallel gas path channels is met.
The first channel control module 20 and the second channel control module 40 may have various appropriate structures, and only the requirement that the accessed gas channels are regulated and controlled is met, and the exchange type communication control between the gas channels is realized. Preferably, the first and second channel control modules 20 and 40 are a combination of at least two solenoid valves.
The infiltration chamber 31 may have any suitable structure, and in a preferred embodiment of the present invention, as shown in fig. 2, the infiltration chamber 31 includes a heat-insulating chamber 311, an air inlet pipe 312, an infiltration pipe 313 and a heating unit 314, wherein the heat-insulating chamber 311 is a thermally isolated closed cavity; an air inlet of the air inlet pipe 312 is communicated with the first channel control module 20, and an air outlet of the air inlet pipe 312 is communicated with the permeation pipe 313; the permeation tube 313 is arranged inside the heat preservation cavity 311, and the air outlet of the permeation tube is communicated with the second channel control module 40; the heating unit 314 is annularly provided on an inner sidewall of the insulating chamber 311. With this, through inclosed heat preservation chamber, other factors of shielding to the infiltration pipe permeability interference that can be fine form the isolated airtight die cavity of heat, and accessible heating unit carries out accurate control to the accuracy and the stability of the mark gas of the gaseous formation after the infiltration of infiltration pipe to the control of heat preservation room temperature.
In order to more conveniently monitor and control the temperature inside the permeation cavity, preferably, the permeation cavity 31 further includes a control unit 315 and a monitoring unit 316 disposed in the thermal insulation cavity 311, and the control unit 315 and the monitoring unit 316 are electrically connected to the heating unit 314; real-time monitoring and automatic control of the temperature in the heat preservation chamber are realized through the detection unit and the control unit, on one hand, a microenvironment with stable permeability in the permeation cavity is ensured, the standard gas and the concentration and quantity are automatically controlled, and the accuracy of the whole permeation system is improved; on the other hand, through detecting element and the control unit, the change gradient of control temperature that can be accurate to shorten in the mark gas process of the target gas mixture of adaptation specification and/or different cultivars, the time that whole infiltration chamber reentrant the stable microenvironment of permeability.
Preferably, the infiltration cavity 31 further includes a preheating pipe 317 disposed in the thermal insulation cavity 311 and sleeved on the air inlet pipe 312, wherein the preheating pipe 317 is electrically connected to the monitoring unit 316 and the control unit 315, and is separately and independently controlled from the heating unit 314; with this, through the preheater tube that sets up in the intake pipe, be used for heating the temperature that gets into the carrier gas in the infiltration pipe through the intake pipe, thereby eliminate the influence that carrier gas temperature difference brought for the stable microenvironment of permeability, further promote this infiltration system's stability and reliability, provide whole infiltration system's accuracy, can start at the regulation time and preheat and close preheating, the time of this chamber reentrant stable microenvironment has been reduced, the cycle of infiltration module recalibration has been shortened, the efficiency of distribution has been improved.
In summary, the carrier gas is divided into multiple paths with adjustable flow after passing through the flow control module, and enters the permeation cavity with independently controllable temperature inside the permeation module, the temperature of the heating unit and the preheating pipe is controlled by the control unit, independent microenvironment with stable permeability is formed in the permeation cavity, and the permeability can be the same and/or different, and the mutual noninterference is realized under the control of the first channel control module 20, and the standard gas of the target mixed gas with the adaptive specification and/or different varieties is simultaneously carried out; the real-time monitoring and automatic control of the temperature in the heat preservation chamber are realized through the detection unit and the control unit, the microenvironment with stable permeability in a single permeation cavity is ensured, the standard gas, the concentration and the quantity are automatically controlled, and the accuracy of the whole permeation system is improved; the temperature gradient can be accurately controlled, so that the time for the whole permeation chamber to enter a microenvironment with stable permeability again in the gas standard process of adapting to target mixed gas with specifications and/or different varieties is shortened.
Example 2
This embodiment differs from embodiment 1 in the manner and principle of providing a permeability-stabilized microenvironment equilibrium within the osmotic chamber into the osmotic module 30. As shown in fig. 3, in the present embodiment, the dynamic air distribution and supply device 200 further includes a balancing unit disposed at the inlet end of the first channel control module 20 and the outlet end of the second channel control module 40 for dynamically balancing the osmotic chamber, the balancing unit includes an air exhaust device 60 in switchable communication with the second channel control module 40, and an air vent branch disposed between the first channel control module 20 and the air communication end; after passing through the first channel control module 20, the air enters the permeation cavity 31 of the permeation module 30 in parallel under the allocation of the first channel control module 20, and is exhausted under the control of the second channel control module 40 under the action of the exhaust device 60; with this, through the balanced passageway that adds in the infiltration module, under exhaust apparatus's effect, form the infiltration air current that concentration and/or variety can be regulated and control, when effectively shortening the target mixed standard gas of configuration specification and/or different varieties, the infiltration chamber gets into the preliminary treatment time of the stable microenvironment of permeability, and ensures that the infiltration chamber remains the state of ventilating all the time, avoids the infiltration saturation condition to appear, leads to the problem of preliminary balance processing failure easily.
In addition, the structure and principle of the air distribution channel of this embodiment are the same as those in embodiment 1, and are not described herein again.
Preferably, the air discharge device 60 is an air pump with controllable flow rate for conveniently realizing standard gases with different concentrations.
Preferably, the balancing unit further comprises a filtering device 50 in communication with the first channel control module 20 for filtering air entering the first channel control module 20; therefore, the air is filtered into clean and pollution-free gas, the precision of the permeation cavity is improved, and the service life of the permeation cavity is prolonged.
In summary, the dynamic gas distribution and supply device provided in this embodiment, through always maintaining the permeation as a balanced channel, the realization degree and/or the variety of the permeation gas flow that can be regulated and controlled are extremely convenient, and when target mixed standard gas of configuration specification and/or different varieties is effectively shortened, the permeation chamber enters the pretreatment time of the microenvironment with stable permeation rate, and the permeation chamber is always ensured to be kept in the ventilation state, thereby avoiding the problem that the permeation is saturated and easily causes the failure of the pre-balancing treatment.
Example 3
The difference between this embodiment and embodiment 2 is that it is compatible with dilution gas distribution of external standard gas (external gas source) while realizing gas distribution of the permeation module 30 (internal gas source), each permeation cavity is separately arranged without mutual interference, and gas distribution and balance preheating do not conflict with each other, so as to realize zero-switching connection among multiple paths; the gas distribution of the internal source and the external source can realize complementation under the condition of no interference, meanwhile, the balance preheating of the internal source is not influenced when the external source is used for distributing gas, the random switching between the inside and the outside is realized, and the zero connection of the gas distribution switching is realized; the adaptability, flexibility and compatibility of the dynamic gas distribution and supply device are greatly improved. As shown in fig. 4, in the present embodiment, the dynamic air distribution and supply device 200 further includes a first valve body 70 and a flow control module 80, which are communicated with the inlet end of the first channel control module 20 and externally connected with a standard air source (external air source), wherein the outlet end of the first valve body 70 is communicated with the inlet end of the flow control module 80; the outlet end of the flow control module 80 is communicated with the inlet end of the first channel control module 20; preferably, the first valve body 70 is a multi-body valve to facilitate externally connecting standard gases with different specifications and/or quantitatively diluting the externally connected standard gases.
In a preferred embodiment of the present invention, the flow control module 80 may be of various suitable structures or devices, as shown in fig. 4, and preferably, the flow control module 80 includes a first flow controller 81 and a flow meter 82, wherein an inlet end of the first flow controller 81 communicates with an outlet end of the first valve body 70, and an outlet end of the first flow controller 81 communicates with an inlet end of the flow meter 82; the outlet end of the flow meter 82 communicates with the inlet end of the first channel control module 20; therefore, the first flow controller can be used for precisely measuring and controlling the gas entering the first valve body, the quantitative control of loading external standard gas can be realized through the flow meter, and real-time calibration and regulation and control are realized; further, the first flow controller 81 is a mass flow controller. Therefore, when the first valve body is externally connected with standard gas with fixed specification, for example, the standard gas with fixed concentration is connected, an external gas source can be directly connected to provide carrier gas or/and sample gas through the quantitative regulation and control of the first flow controller and the flowmeter.
Further, the dynamic gas distribution and supply device 200 further includes a second valve body 90 having an inlet end communicated with the flow control module 80 and an outlet end communicated with the outlet of the standard gas 300, and the standard gas accessed by the first valve body is diluted by the second valve body very conveniently. In this embodiment, as shown in fig. 4, the flow control module 80 further includes a second flow controller 83 disposed between the first valve body 70 and the air outlet of the standard gas 300, an inlet end of the second valve body 90 is communicated with an outlet end of the first flow controller 81, and an outlet end of the second valve body 90 is communicated with the air outlet of the standard gas 300; in other words, after the diluted zero gas externally connected to the first valve body 70 is regulated by the second flow controller 83, the standard gas externally connected to other connecting channels is mixed with the standard gas externally connected to the other connecting channels by the first flow controller 81 and regulated by the second valve body 90 to form standard gases with different concentrations. Preferably, the second valve body 90 is a proportional valve; further, the second flow controller 83 is a mass flow controller; therefore, accurate flow ratio regulation and control are realized, and standard gases with different concentrations are prepared very conveniently. Meanwhile, under the regulation and control of the first channel control module 20 and the second channel control module 40, the gas distribution of an external gas source can be isolated from the gas circuit of the osmosis module 30 (internal gas source), so that the internal preheating balance of the osmosis module 30 can be realized, the preparation of external standard gas with different concentrations can be realized, when the switching is needed, the preheating waiting is not needed, the detection time is greatly saved, and the flexibility and the convenience of gas supply are improved.
In conclusion, the first flow controller can be used for precisely measuring and controlling the gas entering the first valve body, the quantitative control of loading external standard gas can be realized through the flow meter, and real-time calibration and regulation and control are realized; the standard gas accessed by the first valve body is diluted very conveniently through the second valve body; the accurate flow ratio is regulated and controlled, the standard gases with different concentrations are very conveniently prepared, the preparation of the external standard gases with different concentrations is realized, when the switching is needed, the preheating waiting is not needed again, the detection time is greatly saved, and the flexibility and the convenience of gas supply are improved; the gas distribution device can realize gas distribution for the permeation module (internal gas source), and simultaneously can be compatible with dilution gas distribution of external standard gas (external gas source), each path of permeation cavity is independently arranged and does not interfere with each other, the gas distribution and balance preheating do not conflict with each other, and switching zero connection among multiple paths is realized; the gas distribution of the internal source and the external source can realize complementation under the condition of no interference, meanwhile, the balance preheating of the internal source is not influenced when the external source is used for distributing gas, the random switching between the inside and the outside is realized, and the zero connection of the gas distribution switching is realized; the adaptability, flexibility and compatibility of the dynamic gas distribution and supply device are greatly improved.
Finally, it must be said here that: the above embodiments are only used for further detailed description of the technical solutions of the present invention, and should not be understood as limiting the scope of the present invention, and the insubstantial modifications and adaptations made by those skilled in the art according to the above descriptions of the present invention are within the scope of the present invention.
Claims (8)
1. A dynamic air distributing and supplying device is characterized in that air distributing channels which are arranged in parallel and can be switched alternately are formed in the device, and the air distributing channels comprise:
the flow control module (10) is used for splitting the carrier gas (100) into at least two groups of gas path channels which are independent and parallel to each other and can be independently controlled in flow;
the first channel control module (20) regulates and controls the accessed gas path channels and realizes the exchange type communication control among the gas path channels;
the infiltration module (30) is assembled by at least two independent infiltration cavities (31) which do not interfere with each other, and the internal temperature of the single infiltration cavity (31) is independently controlled;
the second channel control module (40) is used for controlling connection among the single permeation cavities (31) and/or communication and closing of the single permeation cavities (31) and an air end;
after flowing through the flow control module (10), the carrier gas (100) enters the permeation cavity (31) of the permeation module (30) in parallel under the allocation of the first channel control module (20), and is collected and/or communicated with an air end to be exhausted through the regulation and control of the second channel control module (40);
the device also comprises a balancing unit arranged at the inlet end of the first channel control module (20) and the outlet end of the second channel control module (40) and used for dynamically balancing the permeation cavity, wherein the balancing unit comprises an exhaust device (60) in switchable communication with the second channel control module (40) and a ventilation branch arranged between the first channel control module (20) and the air communication end;
the device also comprises a first valve body (70) and a flow control module (80) which are communicated with the inlet end of the first channel control module (20) and externally connected with a standard gas source, wherein the outlet end of the first valve body (70) is communicated with the inlet end of the flow control module (80); the outlet end of the flow control module (80) is communicated with the inlet end of the first channel control module (20).
2. The dynamic air distribution and supply device according to claim 1, wherein the infiltration chamber (31) comprises a heat preservation chamber (311), an air inlet pipe (312), an infiltration pipe (313) and a heating unit (314), wherein the heat preservation chamber (311) is a thermally isolated closed cavity; an air inlet of the air inlet pipe (312) is communicated with the first channel control module (20), and an air outlet of the air inlet pipe (312) is communicated with the permeation pipe (313); the permeation tube (313) is arranged inside the heat preservation cavity (311), and the air outlet of the permeation tube is communicated with the second channel control module (40); the heating unit (314) is annularly arranged on the inner side wall of the heat-preserving cavity (311).
3. Gas distribution and supply device according to claim 2, wherein the permeate chamber (31) further comprises a control unit (315) and a monitoring unit (316) arranged in the thermal insulation chamber (311), the control unit (315) and the monitoring unit (316) being electrically connected to the heating unit (314).
4. The dynamic gas distribution and supply device according to claim 3, wherein the infiltration chamber (31) further comprises a preheating pipe (317) disposed in the thermal insulation chamber (311) and sleeved on the gas inlet pipe (312), wherein the preheating pipe (317) is electrically connected with the monitoring unit (316) and the control unit (315), and is separately and independently controlled from the heating unit (314).
5. The dynamic air distribution and supply device according to claim 1, wherein the balancing unit further comprises a filtering device (50) in communication with the first channel control module (20) for filtering air entering the first channel control module (20).
6. Dynamic air distribution and supply device according to claim 1, characterised in that the flow control module (80) comprises a first flow controller (81) and a flow meter (82), wherein the inlet end of the first flow controller (81) communicates with the outlet end of the first valve body (70), and the outlet end of the first flow controller (81) communicates with the inlet end of the flow meter (82); the outlet end of the flow meter (82) is communicated with the inlet end of the first channel control module (20).
7. The dynamic air distribution and supply device according to claim 6, further comprising a second valve body (90) having an inlet end communicating with the flow control module (80) and an outlet end communicating with the air outlet of the standard air (300).
8. The dynamic air distribution and supply device according to claim 7, wherein the flow control module (80) further comprises a second flow controller (83) disposed between the first valve body (70) and the air outlet of the standard air (300), the inlet end of the second valve body (90) is communicated with the outlet end of the first flow controller (81), and the outlet end of the second valve body (90) is communicated with the air outlet of the standard air (300).
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