CN109510508B - Standing wave type linear ultrasonic motor with H-shaped stator structure - Google Patents
Standing wave type linear ultrasonic motor with H-shaped stator structure Download PDFInfo
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- 239000000919 ceramic Substances 0.000 claims abstract description 107
- 229920001967 Metal rubber Polymers 0.000 claims abstract description 21
- 239000002184 metal Substances 0.000 claims description 38
- 229910052751 metal Inorganic materials 0.000 claims description 38
- 230000005684 electric field Effects 0.000 claims description 33
- 238000005452 bending Methods 0.000 claims description 18
- 230000010287 polarization Effects 0.000 claims description 18
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- 229920001971 elastomer Polymers 0.000 abstract description 22
- 239000000806 elastomer Substances 0.000 abstract description 22
- 238000010586 diagram Methods 0.000 description 7
- 230000005284 excitation Effects 0.000 description 4
- 230000007935 neutral effect Effects 0.000 description 4
- 238000012938 design process Methods 0.000 description 3
- 230000009286 beneficial effect Effects 0.000 description 1
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
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- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
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Abstract
The invention provides a standing wave type linear ultrasonic motor with an H-shaped stator structure, which comprises a stator and a rotor, wherein the stator comprises upper surface piezoelectric ceramics, left end piezoelectric ceramics, right end piezoelectric ceramics, a left driving foot, a right driving foot and a metal elastomer, the metal elastomer is an H-shaped metal elastomer, the metal elastomer comprises an elastomer middle part, an upper convex part and a lower convex part, the two ends of the elastomer middle part are respectively provided with the extended upper convex part, the upper convex parts are all close to the upper surface of the metal elastomer, the two ends of the elastomer middle part are respectively provided with the extended lower convex parts, the lower convex parts are all close to the lower surface of the metal elastomer, the upper convex part and the lower convex part which are positioned at one end of the elastomer middle part form a left side groove with the end part of the elastomer middle part, and the convex parts are integrally in an H-shaped structure; compared with the traditional method of bonding piezoelectric ceramics on the upper surface of the elastic body alone, the invention can increase the vibration amplitude of the stator, and has small volume, compact structure and larger motor output.
Description
Technical Field
The invention relates to a standing wave type linear ultrasonic motor with an H-shaped stator structure.
Background
The standing wave type linear ultrasonic motor which is popular at present is mainly characterized in that a composite mode of a stator is excited based on a transverse vibration mode and a longitudinal vibration mode of piezoelectric ceramics, the piezoelectric ceramics are mainly pasted on the top, the bottom and the front of a metal elastic body and are used for exciting two working modes simultaneously to form a novel working mode of the stator, elliptical motion of a driving foot is formed, and then linear motion of a rotor is driven. The stator structure of the compound mode linear ultrasonic motor must consider the excitation of a plurality of mode vibration modes at the same time, so the stator design process is relatively complex. The single-mode linear ultrasonic motor only needs to consider the excitation of one mode, and the design process of the stator is relatively simple.
At present, for most of single-mode standing wave type linear ultrasonic motors, piezoelectric ceramics are only adhered to the upper surface of an elastic body, and a transverse vibration mode of the piezoelectric ceramics is utilized to excite a first-order bending vibration mode of a metal elastic body of a stator, so that a driving foot generates oblique linear motion to push a rotor to move forwards. This configuration has a problem of low output.
The above-mentioned problems should be considered and solved in the design process of the standing wave type linear ultrasonic motor.
Disclosure of Invention
The invention aims to provide a standing wave type linear ultrasonic motor with an H-shaped stator structure, wherein one piece of three piezoelectric ceramics contained in a stator is adhered to the upper surface of an elastic body, and the other two pieces of piezoelectric ceramics are tightly adhered to the concave parts at the two end parts of the elastic body.
The technical solution of the invention is as follows:
a standing wave type linear ultrasonic motor with an H-shaped stator structure comprises a stator and a rotor, wherein the stator comprises upper surface piezoelectric ceramics, left end piezoelectric ceramics, right end piezoelectric ceramics, a left driving foot, a right driving foot and a metal elastic body, the metal elastic body is an H-shaped metal elastic body, the metal elastic body comprises an elastic body middle part, an upper convex part and a lower convex part, the two ends of the elastic body middle part are respectively provided with the upper convex parts which extend out, the upper convex parts are all close to the upper surface of the metal elastic body, the two ends of the elastic body middle part are respectively provided with the lower convex parts which extend out, the lower convex parts are all close to the lower surface of the metal elastic body, the upper convex part, the lower convex part and the end part of the elastic body middle part form a left edge groove, the upper convex part, the lower convex part and the other end part of the elastic body middle part form a right edge groove, elastomer middle part and bulge wholly present to be H type structure, and the upper surface at elastomer middle part is located to upper surface piezoceramics, and the lower surface both ends at elastomer middle part are equipped with left drive foot, right drive foot respectively, and left drive foot, right drive foot all locate between elastomer middle part and active cell, and left end piezoceramics bonds at the left side inslot, and right-hand member piezoceramics bonds at the right side inslot.
Furthermore, the left driving foot is deviated from the position of the standing wave node on the left side of the stator, the right driving foot is deviated from the position of the standing wave node on the right side of the stator, the deviation direction and the deviation distance are the same, the deviation distance is one eighth of the wavelength of fundamental waves, and the rotor is placed below the left driving foot and the right driving foot.
Furthermore, the polarization direction of the piezoelectric ceramic on the upper surface of the H-shaped metal elastomer is a positive Z-axis direction, and an alternating electric field with the positive Z-axis direction is applied; the polarization direction of the piezoelectric ceramic at the left end is the positive direction of a Z axis, and an alternating electric field with the positive direction being the positive direction of an X axis is applied; the polarization direction of the piezoelectric ceramic at the right end is the positive direction of the Z axis, and an alternating electric field with the positive direction being the negative direction of the X axis is applied; under the action of an electric field, due to the inverse piezoelectric effect, the piezoelectric ceramics on the upper surface polarized in the Z direction generate transverse vibration, the piezoelectric ceramics on the left end and the piezoelectric ceramics on the right end polarized in the Z direction on the two end parts generate torsional vibration, a first-order bending vibration mode is excited in the H-shaped metal elastomer of the stator together, and then the left driving foot and the right driving foot are driven to perform oblique linear motion to push the rotor to move.
Furthermore, power supplies with the same time phase and the same frequency are applied to the upper surface piezoelectric ceramic, the left end piezoelectric ceramic and the right end piezoelectric ceramic.
The invention has the beneficial effects that:
piezoelectric ceramics are pasted at the end part and the upper surface of an H-shaped metal elastic body of a motor stator, a first-order bending vibration mode is excited in the H-shaped metal elastic body of the stator by utilizing the torsional vibration mode of the piezoelectric ceramics at the end part and the transverse vibration mode of the piezoelectric ceramics at the upper surface, and compared with the traditional mode of singly pasting the piezoelectric ceramics on the upper surface of the elastic body, the standing wave type linear ultrasonic motor with the H-shaped stator structure can increase the vibration amplitude of the stator and has larger motor output.
The standing wave type linear ultrasonic motor with the H-shaped stator structure is small in size and compact in structure, and two pieces of ceramics with torsional vibration are arranged at the end part, so that the compactness of the motor structure cannot be damaged while the output of the motor is increased.
And thirdly, the bulge part of the end part of the H-shaped metal elastic body is simple and can efficiently convert the torsional vibration of the piezoelectric ceramic of the end part into the first-order bending vibration of the H-shaped metal elastic body of the stator.
Drawings
Fig. 1 is a schematic structural diagram of a standing wave type linear ultrasonic motor with an H-shaped stator structure according to an embodiment of the present invention.
Wherein: 1-elastomer middle, 2-upper surface piezoceramic, 3-right end piezoceramic, 4-left end piezoceramic, 5-right drive foot, 6-left drive foot, 7-mover, 10-upper right bulge, 11-upper left bulge, 12-gold lower right bulge, 13-lower left bulge.
FIG. 2 is an explanatory diagram of a left-end piezoelectric ceramic layout in the example.
Wherein: 1L, 2L, 3L, 4L, 5L and 6L-left end piezoelectric ceramics with six degrees of freedom, an XYZ-space Cartesian coordinate system.
FIG. 3 is a schematic diagram illustrating the arrangement of right-end piezoelectric ceramics in the embodiment.
Wherein: 1R, 2R, 3R, 4R, 5R and 6R-right end piezoelectric ceramics with six degrees of freedom, and an XYZ-space Cartesian coordinate system.
Fig. 4 is an explanatory diagram of an arrangement of the upper surface piezoceramic in the example.
Wherein: 1T, 2T, 3T, 4T, 5T and 6T-upper surface piezoelectric ceramics with six degrees of freedom, an XYZ-space Cartesian coordinate system.
FIG. 5 is a diagram showing the mechanism of generation of vibration modes in the up-arch stage of the motor in the embodiment.
Wherein: p-polarization direction, E-electric field direction and V-rotor motion direction.
Fig. 6 is a mechanism diagram of generation of vibration modes at a sinking stage of the motor in the embodiment.
Wherein: p-polarization direction, E-electric field direction and V-rotor motion direction.
FIG. 7 is a diagram of the motion mechanism of the drive foot in the embodiment.
Wherein: 1-elastomer middle part, 2-upper surface piezoelectric ceramic, 3-right end piezoelectric ceramic, 4-left end piezoelectric ceramic, 5-right driving foot, 6-left driving foot, 7-rotor, 8-stator neutral line when amplitude is zero, 9-stator neutral line when amplitude is maximum, 10-right upper convex part, 11-left upper convex part, 12-right lower convex part, 13-left lower convex part, A-stator left side standing wave node position, and B-stator right side standing wave node position.
Detailed Description
Preferred embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
Examples
A standing wave type linear ultrasonic motor with an H-shaped stator structure is shown in figure 1 and comprises a stator and a rotor 7, wherein the stator comprises an upper surface piezoelectric ceramic 2, a left end piezoelectric ceramic 4, a right end piezoelectric ceramic 3, a left driving foot 6, a right driving foot 5 and a metal elastic body, the metal elastic body adopts an H-shaped metal elastic body 1, the metal elastic body comprises an elastic body middle part 1, a right upper convex part 10, a left upper convex part 11, a right lower convex part 12 and a left lower convex part 13, the two ends of the elastic body middle part 1 are respectively provided with the extended right upper convex part 10, the left upper convex part 11, the right lower convex part 12 and the left lower convex part 13, the right upper convex part 10 and the left upper convex part 11 are respectively close to the upper surface of the metal elastic body, the two ends of the elastic body middle part 1 are respectively provided with the extended right lower convex part 12 and the left lower convex part 13, and the right lower convex part 12 and the left lower convex part 13 are respectively close to the lower surface, the left upper bulge 11 that is located the one end of elastomer middle part 111, the left side is formed left side groove with the left end of elastomer middle part 1 to left side lower bulge 13, the upper right bulge 10 that is located elastomer middle part 1, right side lower bulge 12 forms right side groove with the right-hand member of elastomer middle part 1, elastomer middle part 1 and bulge wholly present to be H type structure, elastomer middle part 1's upper surface is located to upper surface piezoceramics 2, the lower surface both ends of elastomer middle part 1 are equipped with left drive foot 6 respectively, right drive foot 5, and left drive foot 6, right drive foot 5 all locates between elastomer middle part 1 and active cell 7, left end piezoceramics 4 bonds at the left side inslot, right-hand member piezoceramics 3 bonds at the right side inslot.
According to the standing wave type linear ultrasonic motor with the H-shaped stator structure, piezoelectric ceramics are pasted on the end part and the upper surface of an H-shaped metal elastic body of a motor stator, a first-order bending vibration mode is excited in the H-shaped metal elastic body of the stator by utilizing the torsional vibration mode of the piezoelectric ceramics at the end part and the transverse vibration mode of the piezoelectric ceramics 2 on the upper surface, compared with the traditional mode that the piezoelectric ceramics are independently pasted on the upper surface of the elastic body, the vibration amplitude of the stator can be increased, and the motor output is larger.
In the embodiment, the polarization direction of the piezoelectric ceramic 2 on the upper surface of the stator elastomer is a Z-axis positive direction, and an alternating electric field with the positive direction being a Z-axis negative direction is applied; the polarization direction of the left end piezoelectric ceramic 4 is the positive direction of the Z axis, and an alternating electric field with the positive direction being the positive direction of the X axis is applied; the polarization direction of the right piezoelectric ceramic 3 is the positive Z-axis direction, and an alternating electric field with the positive direction being the negative X-axis direction is applied; under the action of an electric field, due to the inverse piezoelectric effect, the upper surface piezoelectric ceramics 2 polarized in the Z direction of the upper surface generate transverse vibration, the left end piezoelectric ceramics 4 and the right end piezoelectric ceramics 3 polarized in the Z direction of the two end parts generate torsional vibration, a first-order bending vibration mode is excited in the H-shaped metal elastomer of the stator together, and then the left driving foot 6 and the right driving foot 5 are driven to perform oblique linear motion to push the rotor 7 to move.
As shown in fig. 2, the left end piezoelectric ceramic 4 of the H-shaped metal elastomer is located in a spatial cartesian coordinate system XYZ, the polarization direction of the left end piezoelectric ceramic 4 is a 3L degree of freedom direction, an alternating electric field in a 1L degree of freedom direction is applied, under the action of the electric field, due to an inverse piezoelectric effect, the left end piezoelectric ceramic 4 of the H-shaped metal elastomer generates torsional vibration, generates deformation in a 5L degree of freedom direction, and excites a first-order bending vibration mode in the stator elastomer through the upper left protrusion 11 and the lower left protrusion 13.
As shown in fig. 3, the right piezoelectric ceramic 3 of the H-shaped metal elastomer is located in a spatial cartesian coordinate system XYZ, the polarization direction of the right piezoelectric ceramic 3 is a 3R degree of freedom direction, an alternating electric field with a direction of 1R degree of freedom is applied, under the action of the electric field, due to the inverse piezoelectric effect, the right piezoelectric ceramic 3 of the H-shaped metal elastomer 1 generates torsional vibration, generates deformation with a deformation direction of 5R, and excites a first-order bending vibration mode in the stator elastomer through the upper right protrusion 10 and the lower right protrusion 12 of the stator.
As shown in fig. 4, the upper surface piezoelectric ceramic 2 of the H-shaped metal elastic body 1 is in a spatial cartesian coordinate system XYZ, the polarization direction of the upper surface piezoelectric ceramic 2 is a 3T degree of freedom direction, an alternating electric field parallel to the upper surface piezoelectric ceramic is applied, under the action of the electric field, due to the inverse piezoelectric effect, the upper surface piezoelectric ceramic 2 of the H-shaped metal elastic body 1 vibrates transversely, a deformation with a deformation direction of 1T is generated, and a first-order bending vibration mode is excited in the H-shaped metal elastic body 1 of the stator.
When the piezoelectric vibrator works, alternating voltages with the same time phase and the same frequency are applied to three piezoelectric ceramics, namely the upper surface piezoelectric ceramic 2, the left end piezoelectric ceramic 4 and the right end piezoelectric ceramic 3, under the action of an electric field, due to the inverse piezoelectric effect, the piezoelectric ceramics polarized in the Z direction on the upper surface of the elastic body generate transverse vibration, a first-order bending vibration mode is excited in the elastic body of the stator, the piezoelectric ceramics polarized in the Z direction on two end parts of the elastic body generate torsional vibration, the first-order bending vibration mode of the stator is excited through the protruding part of the end part of the elastic body, the first-order bending vibration of the stator is excited by two vibration modes of the three pieces of ceramics together, then, the driving foot is driven to perform oblique linear motion, and.
Referring to fig. 5, in the mechanism of generating the vibration wave pattern in the arching stage of the motor, the polarization direction P of the upper surface piezoelectric ceramic 2 of the H-shaped metal elastomer is a positive Z-axis direction, and an alternating electric field E is applied in the positive Z-axis direction, i.e., the direction of the electric field inside the upper surface piezoelectric ceramic 2 is a reverse direction of the 3T degree of freedom direction; the polarization direction P of the left end piezoelectric ceramic 4 of the H-shaped metal elastomer 1 is the positive direction of a Z axis, and an alternating electric field E with the positive direction being the positive direction of an X axis is applied, namely the direction of an electric field in the left end piezoelectric ceramic 4 is the direction of 1L freedom degree; the polarization direction P of the right piezoelectric ceramic 3 of the H-shaped metal elastomer 1 is a positive Z-axis direction, and an alternating electric field E with the positive direction being a negative X-axis direction is applied, namely the direction of the electric field in the right piezoelectric ceramic 3 is a reverse direction of the 1R degree of freedom direction. Under the action of an electric field, due to an inverse piezoelectric effect, piezoelectric ceramics polarized in the Z direction on the upper surface of the H-shaped metal elastic body 1 generate transverse vibration, a first-order bending vibration mode is excited in the H-shaped metal elastic body 1 of the stator, piezoelectric ceramics polarized in the Z direction on two end portions of the H-shaped metal elastic body 1 generate torsional vibration, the first-order bending vibration mode of the stator is excited through an upper right bulge 10, an upper left bulge 11, a lower right bulge 12 and a lower left bulge 13 of the H-shaped metal elastic body, the upper surface piezoelectric ceramics 2, the left end piezoelectric ceramics 4 and the right end piezoelectric ceramics 3 of the H-shaped metal elastic body, the stator is arched through common excitation of two vibration modes of the three pieces of ceramics, and the mover 7 moves to the right, namely, in the V direction.
As shown in fig. 6, in the mechanism of generating the vibration wave pattern at the sinking stage of the motor, the polarization direction P of the upper surface piezoelectric ceramic 2 of the H-shaped metal elastomer is the positive direction of the Z axis, and an alternating electric field E with the positive direction being the positive direction of the Z axis is applied, that is, the direction of the electric field inside the upper surface piezoelectric ceramic 2 is the 3T degree of freedom direction; the polarization direction P of the left end piezoelectric ceramic 4 of the H-shaped metal elastomer 1 is a positive Z-axis direction, and an alternating electric field E with the positive direction being a negative X-axis direction is applied, namely the direction of an electric field in the left end piezoelectric ceramic 4 is a reverse direction of the direction of 1L freedom; the polarization direction P of the right piezoelectric ceramic 3 of the H-shaped metal elastomer is the positive direction of the Z axis, and an alternating electric field E with the positive direction being the positive direction of the X axis is applied, namely the direction of the electric field in the right piezoelectric ceramic 3 is the direction of 1R degree of freedom. Under the action of an electric field, due to an inverse piezoelectric effect, transverse vibration occurs on piezoelectric ceramics 2 on the upper surface of an H-shaped metal elastic body 1 polarized in the Z direction, a first-order bending vibration mode is excited in the H-shaped metal elastic body 1 of a stator, the piezoelectric ceramics polarized in the Z direction on two end portions of the elastic body generate torsional vibration, the first-order bending vibration mode of the stator is excited through a protruding portion on the end portion of the elastic body, the stator is driven to be concave by two vibration modes of three pieces of ceramics together, and a rotor 7 moves towards the right, namely the V direction.
The motor-driven foot motion mechanism is as follows in combination with the attached figure 7:
A. b are left and right intersections of the stator neutral line 8 when the stator amplitude is zero and the stator neutral line 9 when the stator amplitude is maximum, that is, positions of the standing wave nodes on the left side of the stator and positions of the standing wave nodes on the right side of the stator, respectively.
The left driving foot 6 and the right driving foot 5 are deviated from a left stator standing wave node position A and a right stator standing wave node position B in the same deviation direction, the left driving foot 6 is deviated from the stator standing wave node position A one eighth of the fundamental wave wavelength to the left, the right driving foot 5 is deviated from the stator standing wave node position B one eighth of the fundamental wave wavelength to the left, and the rotor 7 is placed below the left driving foot 6 and the right driving foot 5.
Excitation voltage is applied to the left end piezoelectric ceramics 4, the right end piezoelectric ceramics 3 and the upper surface piezoelectric ceramics 2, if the middle of the middle part 1 of the metal elastic body is arched upwards at first, the left driving foot 6 is pushed to the right lower side and is contacted with the rotor 7, the right driving foot 5 is pulled to the left upper side and is gradually separated from the rotor 7, the friction force at the bottom of the left driving foot 6 is greater than the friction force at the bottom of the right driving foot 5, and the rotor 7 moves one step to the right.
And then, the middle of the middle part 1 of the metal elastic body is concave, the two ends of the middle part 1 of the metal elastic body are tilted upwards, the left driving foot 6 is gradually separated from the rotor 7 under the action of a pulling force towards the upper left, the right driving foot 5 is contacted with the rotor 7 under the action of a pushing force towards the lower right, and the rotor 7 continues to move rightwards by one step.
Claims (3)
1. The utility model provides a standing wave type straight line ultrasonic motor of H type stator structure, includes stator and active cell, its characterized in that: the stator comprises upper surface piezoelectric ceramics, left end piezoelectric ceramics, right end piezoelectric ceramics, left drive foot, right drive foot and metal elastic bodies, the metal elastic bodies are H-shaped metal elastic bodies, the metal elastic bodies comprise elastic body middle parts, upper convex parts and lower convex parts, the two ends of the elastic body middle parts are respectively provided with the upper convex parts which are extended, the upper convex parts are all close to the upper surface of the metal elastic body, the two ends of the elastic body middle part are respectively provided with the lower convex parts which are extended, the lower convex parts are all close to the lower surface of the metal elastic body, the upper convex parts which are positioned at one end of the elastic body middle part, the lower convex parts and the end parts of the elastic body middle part form left side grooves, the upper convex parts which are positioned at the other end of the elastic body middle part, the lower convex parts and the other end of the elastic body middle part form right side grooves, the elastic body middle part and the convex parts are integrally in an H, the two ends of the lower surface of the middle part of the elastic body are respectively provided with a left driving foot and a right driving foot, the left driving foot and the right driving foot are both arranged between the middle part of the elastic body and the rotor, the left end piezoelectric ceramics is bonded in the left groove, and the right end piezoelectric ceramics is bonded in the right groove; the polarization direction of piezoelectric ceramics on the upper surface of the H-shaped metal elastomer is the positive direction of a Z axis, and an alternating electric field with the positive direction being the negative direction of the Z axis is applied; the polarization direction of the piezoelectric ceramic at the left end is the positive direction of a Z axis, and an alternating electric field with the positive direction being the positive direction of an X axis is applied; the polarization direction of the piezoelectric ceramic at the right end is the positive direction of the Z axis, and an alternating electric field with the positive direction being the negative direction of the X axis is applied; under the action of an electric field, due to the inverse piezoelectric effect, transverse vibration occurs on the upper surface piezoelectric ceramics polarized in the Z direction of the upper surface, torsional vibration occurs on the left end piezoelectric ceramics and the right end piezoelectric ceramics polarized in the Z direction of the two end parts, the torsional vibration mode of the end piezoelectric ceramics and the transverse vibration mode of the upper surface piezoelectric ceramics excite a first-order bending vibration mode in the H-shaped metal elastomer of the stator together, the two vibration modes of the three pieces of ceramics excite the first-order bending vibration of the stator together, and then the left driving foot and the right driving foot are driven to perform oblique linear motion to push the rotor to move.
2. The standing wave type linear ultrasonic motor of an H-shaped stator structure according to claim 1, wherein: the left driving foot is deviated from the position of a standing wave node on the left side of the stator, the right driving foot is deviated from the position of a standing wave node on the right side of the stator, the deviation directions and the deviation distances of the left driving foot and the right driving foot are the same, the deviation distances are one eighth of the wavelength of a fundamental wave, and the rotor is placed below the left driving foot and the right driving foot.
3. The standing wave type linear ultrasonic motor of an H-shaped stator structure according to claim 1, wherein: and power supplies with the same time phase and the same frequency are applied to the upper surface piezoelectric ceramic, the left end piezoelectric ceramic and the right end piezoelectric ceramic.
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