CN109505764B

CN109505764B - Gas delivery device

Info

Publication number: CN109505764B
Application number: CN201710830943.0A
Authority: CN
Inventors: 莫皓然; 黄启峰; 陈宣恺; 蔡长谚; 韩永隆
Original assignee: Microjet Technology Co Ltd
Current assignee: Microjet Technology Co Ltd
Priority date: 2017-09-15
Filing date: 2017-09-15
Publication date: 2021-04-06
Anticipated expiration: 2037-09-15
Also published as: CN109505764A

Abstract

A gas delivery device comprising an inlet plate, a substrate, a resonator plate, an actuator plate, a piezoelectric element, and an outlet plate stacked in sequence further comprising at least one valve disposed in at least one of an inlet aperture of the inlet plate and an outlet aperture of the outlet plate. Wherein a confluence chamber is arranged between the resonance plate and the inlet plate, a first chamber is arranged between the resonance plate and the actuating plate, and a second chamber is arranged between the actuating plate and the outlet plate; when the piezoelectric element drives the actuator plate, a pressure differential is created between the first and second chambers, which opens the valve to direct gas from the inlet opening of the inlet plate into the manifold chamber, through the hollow bore of the resonator plate into the first chamber, out the gap of the actuator plate into the second chamber, and out the outlet opening of the outlet plate, thereby controlling the delivery of the gas.

Description

Gas delivery device

[ technical field ] A method for producing a semiconductor device

The present invention relates to a gas delivery device, and more particularly, to a gas delivery device having a valve for controlling the flow of gas.

[ background of the invention ]

At present, in all fields, no matter in medicine, computer technology, printing, energy and other industries, products are developed towards refinement and miniaturization, wherein fluid conveying structures contained in products such as micropumps, sprayers, ink jet heads, industrial printing devices and the like are key technologies thereof, so that how to break through technical bottlenecks thereof by means of innovative structures is an important content of development.

With the increasing development of technology, the applications of fluid delivery devices are becoming more diversified, such as industrial applications, biomedical applications, medical care, electronic heat dissipation, etc., and even recently, the trace of a wearable device is seen, which means that the conventional fluid delivery devices have been gradually miniaturized and the flow rate thereof is becoming maximized.

However, although the miniaturized fluid delivery device can continuously deliver gas, it is difficult to design a miniaturized chamber or channel with limited volume for more gas delivery, so that the design of the valve can not only control the continuation or interruption of the gas flow delivery, but also control the unidirectional flow of the gas, and allow the chamber or channel with limited volume to accumulate the gas to increase the output of the gas volume.

[ summary of the invention ]

It is a primary objective of the present invention to provide a gas delivery device, in which at least one of the inlet and outlet ports is provided with a valve to allow a chamber with a limited volume to accumulate gas, so as to increase the output of gas volume.

To achieve the above object, a broader aspect of the present invention provides a gas delivery device, comprising: an inlet plate having at least one inlet aperture; a substrate; a resonance plate having a hollow hole and a confluence chamber between the resonance plate and the inlet plate; an actuating plate having a suspension portion, an outer frame portion and at least one void; a piezoelectric element attached to a surface of the suspension portion of the actuator plate; an outlet plate having an outlet aperture; at least one valve disposed in at least one of the inlet and outlet ports; the inlet plate, the substrate, the resonance plate, the actuating plate and the outlet plate are correspondingly stacked in sequence, a gap is formed between the resonance plate and the actuating plate to form a first chamber, a second chamber is formed between the actuating plate and the outlet plate, the piezoelectric element drives the actuating plate to generate bending resonance, so that the first chamber and the second chamber form a pressure difference, the valve is opened, gas enters the confluence chamber from the inlet hole and flows through the hollow hole of the resonance plate to enter the first chamber, the gas is guided into the second chamber from the at least one gap, and finally the gas is guided out from the outlet hole of the outlet plate, so that the circulation of the gas is controlled.

[ description of the drawings ]

Fig. 1 is a schematic structural diagram of a gas delivery device according to a preferred embodiment of the present disclosure.

Fig. 2A to 2C are schematic operation diagrams of a gas delivery device according to a preferred embodiment of the present disclosure.

Fig. 3A and 3B are operation schematic diagrams of the first, second and third implementation aspects of the valve of the present disclosure.

Fig. 4A and 4B are operation schematic diagrams of a fourth and fifth embodiment of the valve of the present disclosure.

[ detailed description ] embodiments

Exemplary embodiments that embody features and advantages of this disclosure are described in detail below in the detailed description. It will be understood that the present disclosure is capable of various modifications without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

Please refer to fig. 1, which is a schematic structural diagram of a gas delivery device according to a preferred embodiment of the present disclosure. In a preferred embodiment of the present invention, the gas delivery device 1 is composed of a substrate 11, a resonator plate 13, an actuator plate 14, a piezoelectric element 15 and an outlet plate 16 stacked in order to form a main body, and an inlet plate 17 for covering the bottom of the substrate 11. The substrate 11 is made of a silicon material or a graphene material, and a through-flow chamber 12 is formed by a semiconductor process, and the inlet plate 17 is used to cover the bottom of the substrate 11 and has at least one inlet hole 170 corresponding to the through-flow chamber 12. The resonance plate 13 is a flexible plate, which is fixedly attached to the top of the substrate 11, and has a hollow hole 130 corresponding to the position of the confluence chamber 12, and the suspension portion of the resonance plate 13 outside the attached substrate 11 forms a movable portion 131 capable of bending and deforming under a resonance frequency. The actuator plate 14 is a plate structure having a suspension portion 141, an outer frame portion 142 and at least one gap 143, the suspension portion 141 is disposed in the middle and supported by the outer frame portion 142, and the suspension portion 141 and the outer frame portion 142 are not connected to maintain a plurality of gaps 143, the outer frame portion 142 of the actuator plate 14 is fixedly attached to the resonator plate 13 in a stacked manner, so that a gap g0 is formed between the suspension portion 141 and the resonator plate 13 to form a first chamber 18, and the suspension portion 141 may have any geometric shape, preferably a square shape. The piezoelectric element 15 is a plate-shaped structure made of piezoelectric material, and is attached to a surface of the suspension portion 141 of the actuator plate 14, and the size of the plate-shaped structure is slightly smaller than the suspension portion 141. The outlet plate 16 is stacked on the outer frame 142 of the actuator plate 14 by a spacer (e.g., conductive adhesive) to separate the second chamber 19 between the outlet plate 16 and the actuator plate 14, and the outlet plate 16 has an outlet hole 160 communicating with the second chamber 19.

The gas delivery device 1 is designed to be miniaturized, and has at least one valve 10 for accumulating gas in a chamber with a limited volume to increase the output of the gas amount, wherein the valve 10 can be disposed in either the inlet 170 or the outlet 160 or both of them to accumulate gas to increase the output of the gas amount. The structure and operation of the valve 10 will be described in detail later.

Please refer to fig. 2A to fig. 2C, which are schematic operation diagrams of a gas delivery device according to a preferred embodiment of the present disclosure. The piezoelectric element 15 of the gas delivery device 1 applies a voltage to drive the actuator plate 14 to generate bending resonance, and the actuator plate 14 performs reciprocating motion in the vertical direction. As shown in fig. 2A, when the actuator plate 14 vibrates upwards, the first chamber 18 increases in volume, thereby generating a suction force to drive an external gas to be introduced into the manifold chamber 12 through the inlet hole 170, and the gas in the second chamber 19 is compressed and discharged through the outlet hole 160, and as shown in fig. 2B, when the vibration of the actuator plate 14 induces the resonance of the resonator plate 13, thereby causing the movable portion 131 of the resonator plate 13 to deform upwards, the gas enters the first chamber 18 through the hollow hole 130 of the resonator plate 13, and presses the gas in the first chamber 18 to the periphery. As shown in fig. 2C, when the actuator plate 14 vibrates downwards, the volume of the first chamber 18 is further compressed, so that the gas therein flows upwards into the second chamber 19 through the gap 143, and the operation shown in fig. 2A is repeated, so that the gas in the second chamber 19 is compressed and discharged through the outlet hole 160, and the external gas is introduced into the confluence chamber 12 again. The gas delivery device 1 can continue to deliver gas by repeating the operations shown in fig. 2A to 2C.

Please refer to fig. 3A and 3B, which are operation schematic diagrams of a first embodiment of the valve 10 of the present disclosure. As shown in fig. 3A, the first embodiment of the valve 10 includes a retainer 101, a sealing member 102, and a valve plate 103. In a preferred embodiment of the present invention, the holder 101, the sealing member 102 and the valve plate 103 are made of graphene, but not limited thereto. The retainer 101 has at least two vent holes 101a, the valve plate 103 is disposed in the accommodating space 105 formed between the retainer 101 and the sealing member 102, and the vent holes 103a are disposed corresponding to the positions of the vent holes 101a of the retainer 101, and the vent holes 101a of the retainer 101 and the vent holes 103a of the valve plate 103 are substantially aligned with each other. And the sealing member 102 is provided with at least one ventilation hole 102a, and the ventilation hole 102a of the sealing member 102 and the ventilation hole 101a of the holding member 101 are formed in a misaligned position.

Please refer to fig. 1 to fig. 3B. In a preferred embodiment of the present invention, the valve 10 is disposed in the inlet opening 170 of the inlet plate 17 as shown in the first embodiment of fig. 3A. When the gas conveying device 1 is energized, the operation shown in fig. 2A to 2C is started, and the gas is continuously introduced into the gas conveying device 1 from the inlet hole 170 of the inlet plate 17, at this time, as shown in fig. 3B, a suction force is formed inside the gas conveying device 1, the valve sheet 103 pushes up the valve sheet 103 due to the gas flow in the direction of the arrow shown in the figure, so that the valve 103 is abutted against the holder 101, and the operation of the vent hole 102A of the sealing member 102 is started, because the position of the vent hole 103a of the valve sheet 103 is approximately aligned with the vent hole 101a of the holder 101, the gas can be introduced from the vent hole 102A of the sealing member 102, and then the vent hole 103a of the valve sheet 103 is communicated with the vent hole 101a of the holder 101, so that; when the actuating plate 14 of the gas delivery device 1 vibrates downward, the volume of the first chamber 18 is further compressed, so that the gas flows upward into the second chamber 19 through the gap 143, and the valve plate 103 of the valve 10 is pushed by the gas, so as to resume the action of the vent hole 102a of the sealing member 102 shown in fig. 3A, so as to form a unidirectional flow of the gas into the confluence chamber 12, and accumulate the gas in the confluence chamber 12, so that when the actuating plate 14 of the gas delivery device 1 vibrates upward, more gas can be discharged from the outlet hole 160, and the output of the gas amount is improved.

The valve plate 103, the sealing member 102 and the retaining member 101 of the present valve 10 can be made of graphene material to form a miniaturized valve. In a second embodiment of the present valve 10, the valve plate 103 is a charged material and the retainer 101 is a bipolar conductive material. The retainer 101 is electrically connected to a control circuit (not shown) for controlling the polarity (positive or negative) of the retainer 101. if the valve plate 103 is made of a material with negative charge, when the valve 10 needs to be opened under control, the control circuit controls the retainer 101 to form a positive electrode, and the valve plate 103 and the retainer 101 maintain different polarities, so that the valve plate 103 approaches the retainer 101 to open the valve 10 (as shown in fig. 3B). On the contrary, if the valve plate 103 is made of a material with negative charge, when the valve 10 needs to be controlled to close, the control circuit controls the retainer 101 to form a negative electrode, and the valve plate 103 and the retainer 101 maintain the same polarity, so that the valve plate 103 approaches the sealing member 102 to close the valve 10 (as shown in fig. 3A).

In a third aspect of the present valve 10, the valve 10 is a magnetic material and the retainer 101 is a magnetic material with controllable polarity reversal. The holder 101 is electrically connected to a control circuit (not shown) for controlling the polarity (positive or negative) of the holder 101. If the valve plate 103 is made of a magnetic material with a negative pole, when the valve 10 needs to be controlled to open, the control circuit controls the retainer 101 to form a positive pole of magnetism, and at this time, the valve plate 103 and the retainer 101 maintain different polarities, so that the valve plate 103 approaches the retainer 101, and the valve 10 is opened (as shown in fig. 3B). On the contrary, if the valve plate 103 is made of a magnetic material with a negative pole, when the valve 10 needs to be controlled to be closed, the control circuit controls the retainer 101 to form a negative pole, and at this time, the valve plate 103 and the retainer 101 maintain the same polarity, so that the valve plate 103 approaches the seal 102, thereby closing the valve 10 (as shown in fig. 3A).

Please refer to fig. 4A and 4B, which are operation diagrams of a fourth embodiment of the valve of the present disclosure. As shown in fig. 4A, the valve 10 includes a retainer 101, a seal 102, and a flexible membrane 104. The holder 101 has at least two ventilation holes 101a, and a receiving space 105 is maintained between the holder 101 and the sealing member 102. The flexible film 104 is made of a flexible material, is attached to one surface of the holder 101, and is disposed in the accommodating space 105, and is provided with a vent hole 104a corresponding to the vent hole 101a of the holder 101, the vent hole 101a of the holder 101 and the vent hole 104a of the valve plate 103, which are substantially aligned with each other. And the sealing member 102 is provided with at least one ventilation hole 102a, and the ventilation hole 102a of the sealing member 102 and the ventilation hole 101a of the holding member 101 are formed in a misaligned position.

Please continue to refer to fig. 4A and fig. 4B. In a fourth embodiment of the present valve 10, the holder 101 is a thermally expandable material and is electrically connected to a control circuit (not shown) for controlling the holder 101 to be heated. When the valve 10 needs to be controlled to open, the control circuit controls the retaining member 101 not to expand by heat, and the retaining member 101 and the sealing member 102 maintain the space between the accommodating space 105, thereby opening the valve 10 (as shown in fig. 4A). Conversely, when the valve 10 is to be controlled to close, the control circuit controls the retaining member 101 to expand due to heat, so as to drive the retaining member 101 to abut against the sealing member 102, and the flexible membrane 104 can be in close contact with at least one vent hole 102a of the sealing member 102, thereby closing the valve 10 (as shown in fig. 4B).

In a fifth embodiment of the present valve 10, the holder 101 is a piezoelectric material and is electrically connected to a control circuit (not shown) for controlling the deformation of the holder 101. When the valve 10 needs to be controlled to open, the control circuit controls the retainer 101 not to deform, and the retainer 101 and the sealing member 102 keep the accommodating space 105 to form a gap, which constitutes the opening of the valve 10 (as shown in fig. 4A). Conversely, when the valve 10 is to be controlled to close, the control circuit controls the deformation of the retaining member 101 to urge the retaining member 101 against the sealing member 102, and the flexible membrane 104 closes the at least one vent hole 102a of the sealing member 102 in a sealing manner (as shown in fig. 4B), thereby closing the valve 10. Of course, the holders 101 of each partition corresponding to the plurality of ventilation holes 102a of the sealing member 102 may also be independently controlled by the control circuit to perform the flow operation of the variable valve 10, thereby achieving the adjustment of the appropriate gas flow rate.

In summary, the gas delivery device of the present invention has a valve disposed at least one of the inlet hole and the outlet hole to allow the limited volume chamber to accumulate gas, thereby increasing the output of gas volume and having industrial applicability.

Various modifications may be made by those skilled in the art without departing from the scope of the invention as defined by the appended claims.

[ notation ] to show

1: gas delivery device

10: valve with a valve body

101: holding member

102: sealing element

103: valve plate

104: flexible film

101a, 102a, 103a, 104 a: vent hole

105: containing space

11: base material

12: confluence chamber

13: resonance board

130: hollow hole

131: movable part

14: actuating plate

141: suspension part

142: outer frame part

143: voids

15: piezoelectric element

16: outlet plate

160: an outlet orifice

17: entrance plate

170: inlet aperture

18: the first chamber

19: second chamber

g 0: gap

Claims

1. A gas delivery device, comprising:

an inlet plate having at least one inlet aperture;

a substrate;

a resonance plate having a hollow hole and a confluence chamber between the resonance plate and the inlet plate;

an actuating plate having a suspension portion, an outer frame portion and at least one void;

a piezoelectric element attached to a surface of the suspension portion of the actuator plate;

an outlet plate having an outlet aperture; and

at least one valve disposed in at least one of the inlet port and the outlet port;

wherein, the inlet plate, the substrate, the resonator plate, the actuating plate and the outlet plate are correspondingly stacked in sequence, a gap is formed between the resonator plate and the actuating plate to form a first chamber, a second chamber is formed between the actuating plate and the outlet plate, the piezoelectric element drives the actuating plate to generate bending resonance, so that the first chamber and the second chamber form a pressure difference, the valve is opened, gas enters the confluence chamber from the inlet hole and flows through the hollow hole of the resonator plate to enter the first chamber, and is guided into the second chamber from the at least one gap and finally is guided out from the outlet hole of the outlet plate to transmit the flow of the gas;

the valve comprises a retainer, a sealing element and a flexible membrane, wherein an accommodating space is kept between the retainer and the sealing element, the flexible membrane is attached to one surface of the retainer and is arranged in the accommodating space, the retainer is provided with at least two vent holes, the flexible membrane is provided with vent holes corresponding to the vent holes of the retainer, the vent holes of the retainer and the vent holes of the flexible membrane are aligned with each other, the sealing element is provided with a plurality of vent holes, and the vent holes of the retainer are misaligned;

the holding piece is made of piezoelectric material and is controlled to deform by a control circuit, and when the holding piece deforms, the flexible membrane is abutted against the sealing piece so as to seal the plurality of vent holes of the sealing piece and close the valve; when the retaining piece is not deformed, the sealing piece and the retaining piece keep the accommodating space to form a space to open the valve;

wherein the retainer of each spacer block corresponding to the plurality of vent holes of the seal member is independently controlled by the control circuit.