CN109498020A - One kind being based on the wearable human motion respiration monitoring device of piezoelectricity, method and its sension unit preparation method - Google Patents
One kind being based on the wearable human motion respiration monitoring device of piezoelectricity, method and its sension unit preparation method Download PDFInfo
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- A61B5/08—Detecting, measuring or recording devices for evaluating the respiratory organs
- A61B5/0816—Measuring devices for examining respiratory frequency
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
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- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/08—Detecting, measuring or recording devices for evaluating the respiratory organs
- A61B5/087—Measuring breath flow
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- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B5/00—Measuring for diagnostic purposes; Identification of persons
- A61B5/72—Signal processing specially adapted for physiological signals or for diagnostic purposes
- A61B5/7203—Signal processing specially adapted for physiological signals or for diagnostic purposes for noise prevention, reduction or removal
- A61B5/7207—Signal processing specially adapted for physiological signals or for diagnostic purposes for noise prevention, reduction or removal of noise induced by motion artifacts
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- A61B2503/00—Evaluating a particular growth phase or type of persons or animals
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- A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
- A61B2562/02—Details of sensors specially adapted for in-vivo measurements
- A61B2562/0247—Pressure sensors
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Abstract
The present invention is based on the wearable human motion respiration monitoring device of piezoelectricity, method and its sension unit preparation method, respiration monitoring device is made of piezoelectric membrane array breathing detecting sensor, wireless blue tooth formula Electric signal processing integrator, air filtration breathing mask and flexible electrical sub-line;Piezoelectric membrane array breathes detecting sensor internal structure and mainly breathes sensing unit cross array structure composition by circular hole groove, and is made of flexible groove array sensing unit, conductive film, resin breathing mask band, the thin net of airflow filtering and circular section breathing perceptual channel;Move monitoring of respiration method: according to piezoelectric effect, by acquire in real time piezoelectricity perceive the intracorporal respiration rate of people (N) and respiratory capacity (Q) when the voltage signal that array element generates monitors outdoor sports in real time characterize human body outdoors activity when physiological characteristic;Sension unit preparation method: in conjunction with MEMS (MEMS) processing technology, PVDF piezoelectric membrane array sensing unit is prepared.
Description
Technical field:
The present invention relates to one kind based on the wearable human motion respiration monitoring device of piezoelectricity, method and its sension unit preparation
Method belongs to intelligence structure and system regions.
Background technique:
Breathing is the basic sign of human body, and especially to sportsman, correct effective breath rhythm can not only be substantially reduced
Occur in motion process feel a pain in the chest when breathing, shortness of breath uncomfortable in chest phenomena such as, can also effectively reduce that physical strength in motion process distributes does not conform to
Reason, and increase alveolar ventilation volume, pulmonary ventilation efficiency is improved, the state of human body held stationary is helped.American National sport physiology
Director Na Di-Mermithidae Lázár Lovász doctor and country Shanxi Normal University Physical Culture Institute Qiao Yucheng are taught studies have shown that correct before portion
Reasonable ventilation, oxygen needed for capable of increasing sportsman's aerobic metabolism increase red blood cell, to improve the energy of breathing muscle group
Power.Currently, movement ventilator is often whole excessive, is not suitable for outdoor exercise and cooperation training uses, while with MEMS technology
With the maturation of wireless communication technique, sensor has been miniaturizated to may.
Summary of the invention:
The present invention is provided a kind of based on the wearable human body fortune of piezoelectricity to solve the above-mentioned problems of the prior art
Dynamic respiration monitoring device, method and its sension unit preparation method perceive array by acquiring piezoelectricity in real time according to piezoelectric effect
People's intracorporal breathing when the voltage signal (time-domain signal (u-t), frequency-region signal (P-f)) that unit generates monitors outdoor sports in real time
Number (N) and respiratory capacity (Q) are moved outdoors characterizing human body or physiological characteristic when daily workout;Find out the daily instruction of sportsman
The control campaign ventilation rhythm of breath rhythm problem present in white silk and science, gives full play to human body respiro circulatory function and improves training
Effect, and then achieve the purpose that improve results.
The present invention adopts the following technical scheme: a kind of be based on the wearable human motion respiration monitoring device of piezoelectricity, by piezoelectricity
Membrane array breathes detecting sensor, wireless blue tooth formula Electric signal processing integrator, air filtration breathing mask and flexible electronic
Line composition;The piezoelectric membrane array breathing detecting sensor is by piezoelectric membrane cross array structure, flexible groove array sensing
Unit, conductive film, resin breathing mask band, the thin net of airflow filtering and circular section breathing perceptual channel composition.
Further, the flexible groove array sensing unit upper surface is PVDF piezoelectric membrane, and viscous with conductive silver paste
Patch, according to direct piezoelectric effect (d31), the gas shock PVDF piezoelectric membrane of generation is breathed, induction generates it perpendicular to film table
Surface vibration deformation, real-time output charge, the flexibility groove array sensing unit breathe sensing unit 160 by 4 circular hole grooves
Word array is constituted, wherein bottom portion of groove center deposition one micro- support column (17), when film generates vibration, micro- support column
(17) film can be amplified in the deformation of vertical direction, and then increase charge output quantity.
Further, the contour structures of the flexible groove array sensing unit are arranged to round, rectangular or polygon;
The charge of generation is connected by conductive film with signaling interface, and the flexibility groove array sensing unit is exhaled by 4 circular hole grooves
Sensing unit cross array is inhaled to constitute and be fixed on circular base surface.
Further, the thin net of the airflow filtering is placed in circular section breathing perceptual channel.
Further, the wireless blue tooth formula Electric signal processing integrator by chip, automatically supply power supply and wireless blue tooth group
At.
Further, in flexible electrical sub-line embedment resin breathing mask band, both ends are respectively with signaling interface and wirelessly
Bluetooth-type Electric signal processing integrator is connected.
Further, the chip is by signal acquisition module, circuit amplification module, filtering noise reduction module, ADC module, letter
Number processing module and storage processing module composition.
The present invention also adopts the following technical scheme that one kind is based on the wearable human motion monitoring of respiration method of piezoelectricity, including
Human body respiration amount and Film Flow cause to sense calibration algorithm and respiratory rate detection method between hammer vibration energy spectrum.
Further, it includes two that the human body respiration amount and Film Flow, which cause sensing calibration algorithm between hammer vibration energy spectrum,
Point, Gu first part, which is related to the electric multiple physical field coupling of stream--, establishes breathing flow velocity (v) by carrying out numerical simulation to it
The relationship between piezoelectric signal amplitude (U) is generated with it, is passing through flow rate calculation formula: when flow (Q)=flow velocity (v) * unit
Between the circular section (t) * sensing passage sectional area (S6), respiratory flow can be established and breathe the relationship between flow velocity, stream therein
Field governing equation is as follows:
Wherein, (1c) is total differential operator, and p is flow field pressure, and ρ is flow field density, ViFor respiration rate vector, τijTo answer
Power tensor, SkkFor strain rate tensor;
Wherein piezoelectricity governing equation is as follows:
Wherein, wherein m is the quality of piezoelectric membrane, and c is membrane structure damping, and k is stiffness coefficient, FyIt is acted on for flow field
Instantaneous pressure in film normal orientation, θ are mechanical-electric coupling item, and R is outer connecting resistance, and v is external resistive voltage, CpFor piezoelectric layer
Capacitor, ytFor normal orientation immediate movement at the top of piezoelectric beam, VocThe piezoelectricity electric signal U that as each groove sensing unit generatesn
After array, according to average computation, it can be obtained
By governing equation (1), (2), (3), (4) and (5) can be found out between piezoelectricity electric signal (U) and respiratory capacity (Q)
Relationship and output time-domain signal (U-t), the described time-domain signal (U-t) by filtering noise reduction module, ADC module and signal at
It manages module (FFT transform), converts time-domain signal to frequency-region signal (P-f), P is the sharp frequency that piezoelectric membrane is generated by breathing vibration
Under energy, finally establish human body respiration amount (Q) and Film Flow and cause to sense calibration algorithm between hammer vibration energy spectrum (P).
Further, respiratory rate detection method is as follows: according to time-domain signal and piezoelectric effect, to its voltage signal width
Value carries out positive and negative calibration, and positive value is the primary (+N that exhales1) negative value is an air-breathing (- N1), storage processing module will be counted automatically
Enter the exhaling of unit time, inhale number mobile terminal is pushed to by bluetooth.
The present invention also adopts the following technical scheme that a kind of based on soft in the wearable human motion respiration monitoring device of piezoelectricity again
The preparation method of property groove array sensing unit, specifically comprises the following steps:
Step 1: one layer of silicon nitride is deposited on circular base surface, and deposits cross polyamides Asia on thin layer of sin surface
Amine thin layer;
Step 2: in cross area deposition layer of Au, border circular areas is formed on its surface with the method for etching;
Step 3: circular groove is opened to border circular areas using the method for etching;
Step 4: the micro- cylinder of support is deposited in each circular groove center, forms sensing unit region;
Step 5: depositing several Au electrodes on polyimide layer, and pastes conductive film and be connected one by one with sensing unit;
Step 6: round PVDF piezoelectric membrane is pasted with conductive silver paste on each circular groove top;
Step 7: it air-dries 20 hours, ultimately forms the flexible groove array sensing unit based on piezoelectric film type.
Sportsman's routine respiratory training is directed to the invention has the following beneficial effects: the present invention and the fan that commonly runs
It provides one kind and is based on the wearable outdoor sports wireless respiration monitoring device of piezoelectricity and its sension unit preparation method, it can be effective
Monitoring moving person breathing pattern and effect, cooperation training, find out the pipe of breath rhythm problem present in daily workout and science
Control movement ventilation rhythm, can give full play to human body respiro circulatory function and improve training effect, and then achieve the purpose that improve results.
Have following features compared with the existing technology: 1. groove sensing unit upper surfaces are PVDF piezoelectric membrane and are pasted with conductive silver paste,
According to direct piezoelectric effect (d31), the piezoelectric membrane on the gas shock groove of generation is breathed, induction generates it perpendicular to film
Surface vibration deformation, and then real-time output charge, all bottom portion of groove center depositions one micro- cylinder of support, when film generates vibration
When dynamic, which can amplify film in the deformation of vertical direction, and then increase charge output quantity, convenient for subsequent breath signal
It extracts, convert and analyzes;2. round, rectangular, polygon etc. can be set into the shape of flexible groove sensing;The charge of generation is logical
Conductive film is crossed to be connected with signaling interface.Sensing unit integrally uses cross mode to arrange and is fixed on circular base surface 7, circle
One layer of thin net of airflow filtering is disposed in tee section sensing passage, can reduce the size of generation vortex during human body respiration, it is excellent
Change the quality that human body respiration generates air-flow, increases piezoelectric membrane to the sensing capability of air-flow.3. Gu for stream-- involved in breathing
Electric multiple physical field coupling establishes the pass between piezoelectricity electric signal (U) and respiratory capacity (Q) by carrying out numerical simulation to it
System, obtains human body respiration amount and Film Flow causes to sense calibration algorithm between hammer vibration energy spectrum.4. according to time-domain signal and pressure
Electrical effect carries out positive and negative calibration to its voltage signal magnitude, and positive value is the primary (+N that exhales1) negative value be an air-breathing (-
N1), storage processing module will be included in the exhaling of unit time automatically, inhale number, the detection method of available respiratory rate.5. wireless
Bluetooth is made of bluetooth sending and receiving module, and movement respiration information is sent to mobile terminal (mobile phone) in real time, helps sportsman in training
Or outdoor exercise is the respiratory state of real-time monitoring itself.6. wherein automatically supplying power supply, piezoelectric membrane generation can be collected
Electric energy is that chip and wireless blue tooth are powered, and is not necessarily to external power supply, and which electricity collection is Ke Xunhuanliyong and environmentally protective.
7. combining MEMS processing technology, it is micro- that etching and deposition etc. is respectively adopted to the preparation of piezoelectric membrane (PVDF) breathing sension unit
Structure processing method considerably reduces the overall dimensions of the sensing unit, improves the sensitivity and range of measurement, realizes
The sensing unit arrangment of sensors array and measurement.
Detailed description of the invention:
Fig. 1 is Bluebooth (bluetooth) human motion respiration monitoring control schematic diagram.
Fig. 2 is Smartphone piezoelectric membrane array sensing respiration monitoring device.
Fig. 3 is piezoelectric membrane respiration transducer signal detection flow chart.
Fig. 4 breathes sensing unit for piezoelectric membrane and connect configuration diagram with chip.
Fig. 5 is that piezoelectric membrane breathes sension unit preparation flow.
Fig. 6 is when exhaling variation, and the time domain response that PVDF thin film sensing unit generates feedback piezo signal and is (can calculate list
The respiration rate of position time).
Fig. 7 is that (unit time human motion breathes for sensing calibration between human body respiratory capacity and Film Flow cause hammer vibration energy spectrum
The relationship between energy that amount and piezoelectricity generate).
In figure:
1- breathing mask ear band, 2- wireless blue tooth formula Electric signal processing integrator, 3- breathing mask, 4- resin breathing mask
Band, the thin net of 5- airflow filtering, the circular section 6- breathe perceptual channel, 7- circular base, 8- filter screen, 9- flexibility groove array sensing
Unit, 10- flexible electrical sub-line, the mobile terminal 11-, 12- human body, 13- signaling interface, 14- conductive film, 15- silicon nitride and polyamides
Imines thin layer, 16- circular hole groove breathing sensing unit, the micro- cylinder of 17- support, 18-Au electrode layer, 19- groove, 20- piezoelectricity are thin
Film-Kynoar (PVDF).
Specific embodiment:
To keep the technical problem to be solved in the present invention and advantage clearer, the present invention is done more into one with reference to the accompanying drawing
The explanation of step.The present invention is directed to existing wearable movement breathing equipment complex manufacturing process, needs large scale equipment, higher cost,
Respiratory characteristic problem when can not monitor training athlete in real time;Using intellectual material and structure, in conjunction with MEMS processing technology, for fortune
Dynamic person provides one kind under various outdoor environments or in training, real-time monitoring sporter's respiratory characteristic;Find out the daily instruction of sportsman
The control campaign ventilation rhythm of breath rhythm problem present in white silk and science, gives full play to human body respiro circulatory function and improves training
Effect.
As shown in Figure 1, be Bluebooth (bluetooth) formula human motion respiration monitoring device wearing schematic of the invention,
The device shape is general air filtration breathing mask, is worn on sporter face;Wherein crucial piezoelectric membrane array is exhaled
It inhales detecting sensor 1-9 and is installed on face shield front portion, working is to perceive sporter's breathing by piezo-electric intelligent structure in sensor
Feature (frequency and respiratory capacity) disposes wireless blue tooth formula Electric signal processing integrator in a wherein resin breathing mask band 4
2, mainly by chip, automatically supply power supply and wireless blue tooth forms, effect is acquisition, analysis, transformation and processing piezoelectric sensing
The charge of unit output obtains the wireless transmission of movement respiratory characteristic signal and mobile terminal 11.
As shown in Fig. 2, being Smartphone piezoelectric membrane array sensing respiration monitoring device of the invention, wherein 3 be to exhale
Mask is inhaled, for soft linen-cotton mask, comfortable wearing.4 be resin breathing mask band, disposes nothing using resin material convenient for it
Line bluetooth-type Electric signal processing integrator 2.3 front of breathing mask is that circular section breathes perceptual channel 6, for collecting human body respiration
The gas of generation, material are made of resin material, have both kept circular section channel indeformable, are greatly reduced whole weight,
Wear user more comfortable;The channel inboard is the thin net 5 of airflow filtering, and interface shape is refined net, can reduce production
The eddy current of anger stream, optimization human body respiration generate the quality of air-flow, increase piezoelectric membrane to the sensing capability of air-flow.Circle is cut
The outside that face breathes perceptual channel 6 is filter screen 8 made of absorbent charcoal material, and the dust in effective air-isolation helps to transport
Dynamic person proper motion and exercise when environment is bad outdoors, reducing includes that PM2.5 endangers human motion bring.It is filtering
8 the inside central area of net disposes circular base 7, disposes flexible groove array sensing unit 9 above it, flexible groove array passes
The array pattern for feeling unit 9 is cross array type, is conducive to increase sensing unit to respiratory air flow sensor coverage face, improves perception
Precision.
As shown in figure 3, being piezoelectric membrane respiration transducer signal detection flow chart of the invention, human body respiration induction sensing
After unit generates piezoelectric charge, charge conversion is voltage signal and to the signal through circuit amplification module by piezoelectric charge after acquisition
The enhanced processing of gain is carried out, then is made an uproar by filtering noise reduction module to voltage signal progress Hz noise, baseline drift
Sound preconditioning simultaneously carries out signal filtering using low-pass filtering;Will after filtering electric signal into crossing digital-to-analogue conversion (ADC) module for circuit
It is sent into signal processing module after being converted into digital signal, obtains time-domain signal (U-t) (as shown in Figure 6) and frequency-region signal (P-f),
And extract the characteristic value (including voltage magnitude, frequency, power spectrum) of feature breath signal;Processing module is stored eventually by comparison
In respiratory capacity and Film Flow cause hammer vibration energy spectrum between sensing demarcate, by real-time electric signal be converted into real time breathing frequency
Rate and respiratory capacity are simultaneously analyzed it and are assessed.It is sent to mobile terminal in real time by respiration information is moved eventually by wireless blue tooth
11 (mobile phones) help sportsman in the respiratory state that trained or outdoor exercise is real-time monitoring itself.Wherein automatically supply power supply
That is piezoelectric energy collection module is that each module and wireless blue tooth are powered it acts as the electric energy that piezoelectric membrane generates is collected.
As shown in figure 4, breathing sensing unit for piezoelectric membrane of the invention connect configuration diagram with chip, wherein described
Wireless blue tooth formula Electric signal processing integrator 2 have signal acquisition module, circuit amplification module, filtering noise reduction module, ADC module,
Signal processing module (FFT) and storage processing module composition.Pass through flexible electrical sub-line 10 and flexible 9 phase of groove array sensing unit
Even.
As shown in Figure 5: in conjunction with micro-structure technology, the present invention provides piezoelectric membrane (PVDF) formula flexibility grooves
The micro fabrication preparation method of array sensing unit, specifically comprises the following steps:
Step 1: one layer of silicon nitride is deposited on 7 surface of circular base;And cross polyamides is deposited on thin layer of sin surface
Imines thin layer;
Step 2: in cross area deposition layer of Au, border circular areas is formed on its surface with the method for etching;
Step 3: circular groove is opened to border circular areas using the method for etching;
Step 4: the micro- cylinder of support is deposited in each circular groove center, forms sensing unit region;
Step 5: depositing several Au electrodes on polyimide layer, and pastes conductive film and be connected one by one with sensing unit;
Step 6: round PVDF piezoelectric membrane is pasted with conductive silver paste on each circular groove top;
Step 7: it air-dries 20 hours, ultimately forms the flexible groove array sensing unit based on piezoelectric film type.
According to the flow chart of monitoring of respiration in Fig. 3, the present invention provides a kind of based on the wearable outdoor fortune of piezoelectricity accordingly
Moving wireless monitoring of respiration method includes that a human body respiration amount and Film Flow are caused to sense calibration algorithm between hammer vibration energy spectrum and be exhaled
Inhale frequency detecting method.
Algorithm includes 2 parts, Gu first part is related to the electric multiple physical field coupling of stream--, and it is imitative by carrying out numerical value to it
Very, it establishes breathing flow velocity (v) and it generates the relationship between piezoelectric signal amplitude (U), passing through flow rate calculation formula: flow
(Q)=flow velocity (v) * unit time (t) * circular section sensing passage sectional area (S6), respiratory flow and breathing flow velocity can be established
Between relationship.Flow field control equation therein is as follows:
Wherein, (1c) is total differential operator, and p is flow field pressure, and ρ is flow field density, ViFor respiration rate vector, τijTo answer
Power tensor, SkkFor strain rate tensor.
Wherein piezoelectricity governing equation is as follows:
Wherein, wherein m is the quality of piezoelectric membrane, and c is membrane structure damping, and k is stiffness coefficient, FyIt is acted on for flow field
Instantaneous pressure in film normal orientation, θ are mechanical-electric coupling item, and R is outer connecting resistance, and v is external resistive voltage, CpFor piezoelectric layer
Capacitor, ytFor normal orientation immediate movement at the top of piezoelectric beam, VocThe piezoelectricity electric signal U that as each groove sensing unit generatesn。
After column, according to average computation, it can be obtained
Equation (1), (2), (3), (4) and (5) can find out the relationship between piezoelectricity electric signal (U) and respiratory capacity (Q) simultaneously
Output time-domain signal (U-t).
There are the interference such as Hz noise, baseline drift, noise in the signal of domain, can not accurately calibration sensor, so the letter
Number frequency-region signal need to be converted by time-domain signal into filtering noise reduction module, ADC module and signal processing module (FFT transform) is crossed
(P-f), P is the energy under the sharp frequency that piezoelectric membrane is generated by breathing vibration.Finally establish human body respiration amount (Q) and Film Flow
It causes to sense calibration algorithm between hammer vibration energy spectrum (P).
According to time-domain signal and piezoelectric effect, positive and negative calibration is carried out to its voltage signal magnitude, positive value is as once exhaled
Gas (+N1) negative value is an air-breathing (- N1), storage processing module will be included in the exhaling of unit time automatically, inhale number passes through indigo plant
Tooth pushes to mobile terminal.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
It for member, can also make several improvements without departing from the principle of the present invention, these improvement also should be regarded as of the invention
Protection scope.
Claims (11)
1. one kind is based on the wearable human motion respiration monitoring device of piezoelectricity, it is characterised in that: breathed and felt by piezoelectric membrane array
Know sensor, wireless blue tooth formula Electric signal processing integrator, air filtration breathing mask and flexible electrical sub-line composition;The piezoelectricity
Membrane array breathes detecting sensor internal structure by circular hole groove breathing sensing unit (16) cross array structure composition, and by
Flexible groove array sensing unit (9), conductive film (14), resin breathing mask band (4), the thin net of airflow filtering (5) and circle are cut
Face breathes perceptual channel (6) composition.
2. being based on the wearable human motion respiration monitoring device of piezoelectricity as described in claim 1, it is characterised in that: the flexibility
Groove array sensing unit (9) upper surface is PVDF piezoelectric membrane, and is pasted with conductive silver paste, according to direct piezoelectric effect (d31),
The gas shock PVDF piezoelectric membrane generated is breathed, induction generates it perpendicular to film surface vibration deformation, real-time output electricity
Lotus, the flexibility groove array sensing unit (9) are made of 4 circular hole groove breathing sensing unit (16) cross arrays, wherein
Groove (19) bottom centre deposits a micro- support column (17), and when film generates vibration, which can amplify
Film vertical direction deformation, and then increase charge output quantity.
3. being based on the wearable human motion respiration monitoring device of piezoelectricity as claimed in claim 2, it is characterised in that: the flexibility
The contour structures of groove array sensing unit (9) are arranged to round, rectangular or polygon;The charge of generation passes through conductive film
(14) it is connected with signaling interface (13), the flexibility groove array sensing unit (9) is integrally arranged and fixed using cross mode
On circular base (7) surface.
4. being based on the wearable human motion respiration monitoring device of piezoelectricity as claimed in claim 3, it is characterised in that: the air-flow
Thin net (5) is filtered to be placed in circular section breathing perceptual channel (6).
5. being based on the wearable human motion respiration monitoring device of piezoelectricity as described in claim 1, it is characterised in that: described wireless
Bluetooth-type Electric signal processing integrator by chip, automatically supply power supply and wireless blue tooth forms.
6. being based on the wearable human motion respiration monitoring device of piezoelectricity as claimed in claim 5, it is characterised in that: the flexibility
Electric wire be embedded to resin breathing mask band (4) in, both ends respectively with signaling interface (13) and wireless blue tooth formula Electric signal processing collection
Grow up to be a useful person (2) be connected.
7. according to claim 6 be based on the wearable human motion respiration monitoring device of piezoelectricity, it is characterised in that: the core
Piece is by signal acquisition module, circuit amplification module, filtering noise reduction module, ADC module, signal processing module and storage processing module
Composition.
8. one kind is based on the wearable human motion monitoring of respiration method of piezoelectricity, it is characterised in that: including human body respiration amount and film
Stream causes to sense calibration algorithm and respiratory rate detection method between hammer vibration energy spectrum.
9. being based on the wearable human motion monitoring of respiration method of piezoelectricity as claimed in claim 8, it is characterised in that: the human body
It includes two parts that respiratory capacity and Film Flow, which cause sensing calibration algorithm between hammer vibration energy spectrum, Gu first part is related to the more objects of stream-- electricity
Field coupling is managed, by carrying out numerical simulation to it, breathing flow velocity (v) is established and it is generated between piezoelectric signal amplitude (U)
Relationship, pass through flow rate calculation formula: flow (Q)=flow velocity (v) * unit time (t) * circular section sensing passage sectional area
(S6), respiratory flow can be established and breathe the relationship between flow velocity, flow field control equation therein is as follows:
Wherein, (1c) is total differential operator, and p is flow field pressure, and ρ is flow field density, ViFor respiration rate vector, τijFor stress
Amount, SkkFor strain rate tensor;
Wherein piezoelectricity governing equation is as follows:
Wherein, wherein m is the quality of piezoelectric membrane, and c is membrane structure damping, and k is stiffness coefficient, FyFilm is acted on for flow field
Instantaneous pressure in normal orientation, θ are mechanical-electric coupling item, and R is outer connecting resistance, and v is external resistive voltage, CpFor piezoelectric layer electricity
Hold, ytFor normal orientation immediate movement at the top of piezoelectric beam, VocThe piezoelectricity electric signal U that as each groove sensing unit generatesn
After array, according to average computation, it can be obtained
By governing equation (1), (2), (3), (4) and (5) can find out the pass between piezoelectricity electric signal (U) and respiratory capacity (Q)
It is and output time-domain signal (U-t), the described time-domain signal (U-t) passes through filtering noise reduction module, ADC module and signal processing mould
Block (FFT transform) converts time-domain signal to frequency-region signal (P-f), and P is under the sharp frequency that piezoelectric membrane is generated by breathing vibration
Energy, finally establishes human body respiration amount (Q) and Film Flow causes to sense calibration algorithm between hammer vibration energy spectrum (P).
10. being based on the wearable human motion monitoring of respiration method of piezoelectricity as claimed in claim 9, it is characterised in that: breathing frequency
Rate detection method is as follows: according to time-domain signal and piezoelectric effect, carrying out positive and negative calibration to its voltage signal magnitude, positive value is
The primary (+N that exhales1) negative value is an air-breathing (- N1), storage processing module will be included in the exhaling of unit time automatically, inhale number leads to
It crosses bluetooth and pushes to mobile terminal.
11. a kind of as described in claim 1 based on groove array flexible in the wearable human motion respiration monitoring device of piezoelectricity
The preparation method of sensing unit (9), specifically comprises the following steps:
Step 1: one layer of silicon nitride is deposited on circular base (7) surface, and deposits cross polyamides Asia on thin layer of sin surface
Amine thin layer;
Step 2: in cross area deposition layer of Au, border circular areas is formed on its surface with the method for etching;
Step 3: circular groove is opened to border circular areas using the method for etching;
Step 4: the micro- cylinder of support is deposited in each circular groove center, forms sensing unit region;
Step 5: depositing several Au electrodes on polyimide layer, and pastes conductive film and be connected one by one with sensing unit;
Step 6: round PVDF piezoelectric membrane is pasted with conductive silver paste on each circular groove top;
Step 7: it air-dries 20 hours, ultimately forms the flexible groove array sensing unit based on piezoelectric film type.
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CN201811438623.1A CN109498020B (en) | 2018-11-28 | 2018-11-28 | Wearable human body movement respiration monitoring device and method based on piezoelectricity and sensing unit manufacturing method |
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