CN109491096A - Optical device, laser module and laser beam processing method - Google Patents
Optical device, laser module and laser beam processing method Download PDFInfo
- Publication number
- CN109491096A CN109491096A CN201811581634.5A CN201811581634A CN109491096A CN 109491096 A CN109491096 A CN 109491096A CN 201811581634 A CN201811581634 A CN 201811581634A CN 109491096 A CN109491096 A CN 109491096A
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- optical element
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- fast axis
- laser
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
- G02B27/095—Refractive optical elements
- G02B27/0955—Lenses
- G02B27/0966—Cylindrical lenses
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/09—Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
- G02B27/0938—Using specific optical elements
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/10—Controlling the intensity, frequency, phase, polarisation or direction of the emitted radiation, e.g. switching, gating, modulating or demodulating
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- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Electromagnetism (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mounting And Adjusting Of Optical Elements (AREA)
- Semiconductor Lasers (AREA)
Abstract
The embodiment of the present invention discloses a kind of optical device, laser module and laser beam processing method, the optical device includes: the first optical element and the second optical element of the setting at an angle to each other on laser optical path direction, angle between the two meets: pi/2 < < π, first optical element includes at least the first fast axis collimation mirror, and the second optical element includes at least the second fast axis collimation mirror.Based on scheme disclosed by the invention, at least can effectively, accurately correct smile；It is substantially reduced the fast axis divergence angle of laser beam, so that the beam quality of fast and slow axis is more balanced.
Description
Technical field
The present invention relates to optical device field more particularly to a kind of optical devices, laser module and laser beam processing
Method.
Background technique
The laser that semiconductor laser issues keeps the collimation of its light beam poor namely usual institute due to the presence of the angle of divergence
The near field said is non-linear (smile effect), this technical difficulty for making laser beam be coupled into optical fiber increases, and serious shadow
Ring the technical effect of VBG locking in EC wave.
There are two the current method for reducing smile effect, improving beam collimation is main:
First be optimization encapsulation design and process, such as using and laser chip thermal expansion coefficient match it is heat sink, or
Change bonding technology and parameter to reduce the smile of semiconductor laser array；
Second is the smile of semiconductor laser array to be corrected using external optical system, for example pass through curved fiber and rotation
Plano-convex cylindrical lens correct semiconductor laser array smile effect, and optical system is complex, and it is larger to adjust difficulty, it is difficult to
Weigh semiconductor laser fast and slow axis beam quality.
Summary of the invention
In view of this, one of the main purpose of the embodiment of the present invention be to provide a kind of optical device, laser module and
Laser beam processing method, at least can be realized effectively, accurately correct smile, be substantially reduced laser beam fast axle hair
Angle is dissipated to make it easier to be coupled into so that the beam quality of fast and slow axis is more balanced, and then effectively improves the collimation of light beam
The optical fiber of small core diameter.
Further, the raising of beam collimation keeps the spectral line width of VBG locking in EC wave narrower, and lock wave stability is stronger,
And it can easily be accommodated, operability with higher.
The technical scheme of the present invention is realized as follows:
The present invention provides a kind of optical device, and the optical device includes: of the setting at an angle to each other on laser optical path direction
One optical element and the second optical element, angle between the two meet: pi/2 < < π, first optical element is at least
Including the first fast axis collimation mirror, the second optical element includes at least the second fast axis collimation mirror.
In above scheme, there are adjusting surplus between first optical element and the second optical element, more than the adjusting
Amount are as follows: be less than or equal to 0.03mm.
In above scheme, first optical element further include: the first Beam rotation device, the first optics cushion block；Described
One fast axis collimation mirror be mutually aligned with the first Beam rotation device it is Nian Jie, and be fixed to the first optics cushion block on, first optics
Element is the first BTS；Second optical element further include: the second Beam rotation device, the second optics cushion block；Second fast axle
Collimating mirror be mutually aligned with the second Beam rotation device it is Nian Jie, and be fixed to the second optics cushion block on, second optical element is
2nd BTS；Wherein, the first BTS is identical as the shape of the 2nd BTS, size, structure, optical parameter.
In above scheme, the first fast axis collimation mirror, the first Beam rotation device and the length of the first optics cushion block three are mutual
Matching, the second fast axis collimation mirror, the second Beam rotation device and the length of the second optics cushion block three are mutually matched.
The first fast axis collimation mirror includes: the first inclined-plane and be located under first inclined-plane that tilt angle is 45 °
First buffer part of end；The second fast axis collimation mirror includes: homogeneous with first inclined-plane inclined direction and tilt angle
The second same inclined-plane and the second buffer part positioned at second inclined-plane upper end, second inclined-plane and the first inclined-plane phase
To being arranged in parallel.
In above scheme, the first Beam rotation device includes: parallel two opposite third inclined-planes, described two thirds
Be cylindrical lens array between inclined-plane, the tilt angle on two third inclined-planes and inclined direction with the first inclined-plane or the second inclined-plane phase
Together；The second Beam rotation device includes: parallel two opposite the 4th inclined-planes, is that column is saturating between described two 4th inclined-planes
Lens array, the tilt angle and inclined direction on two the 4th inclined-planes are identical as third inclined-plane.
In above scheme, the lower end close to the third inclined-plane on the 4th inclined-plane is provided with the first buffer part, oblique close to third
The upper end on the 4th inclined-plane in face is provided with the second buffer part.
In above scheme, first buffer part and the second buffer part during beam treatment for preventing the first optics
The shape of the mechanical damage of element and the second optical element, first buffer part and the second buffer part includes: fillet or side
Angle.
The embodiment of the present invention also provides a kind of laser module, and the module includes above-described setting at an angle to each other
First optical element and the second optical element and bar class laser light source with multiple luminous points；Wherein, the laser light
Source, for emitting laser beam；First optical element and the second optical element are set to the light side out of the laser light source
Upwards, the laser beam for emitting the laser light source is handled.
The embodiment of the present invention also provides a kind of laser beam processing method, utilizes the of above-described setting at an angle to each other
One optical element and the second optical element, at the same to the laser beam of bar class laser light source transmitting with multiple luminous points into
Row processing.
Detailed description of the invention
Fig. 1 is the overall structure diagram one of optical device of the present invention；
Fig. 2 is the overall structure diagram two of optical device of the present invention；
Fig. 3 is the structural schematic diagram one of the first fast axis collimation mirror and the second fast axis collimation mirror of the invention；
Fig. 4 is the concrete structure schematic diagram of the first fast axis collimation mirror of the invention；
Fig. 5 is the structural schematic diagram two of the first fast axis collimation mirror and the second fast axis collimation mirror of the invention；
Fig. 6 is the structural schematic diagram one of the first Beam rotation device and the second Beam rotation device of the invention；
Fig. 7 is the structural schematic diagram two of the first Beam rotation device and the second Beam rotation device of the invention；
Fig. 8 is the concrete structure schematic diagram of the first Beam rotation device of the invention；
Fig. 9 is the structural schematic diagram of the first optics cushion block or the second optics cushion block of the invention；
Figure 10 is the structural schematic diagram of laser module of the present invention.
Description of symbols:
1 be the first BTS, 2 be the 2nd BTS, 11 be the first fast axis collimation mirror, 111 be the first inclined-plane, 112 be the first buffer part, 12
It is third inclined-plane for the first Beam rotation device, 121,13 be the first optics cushion block, and 21 be the second fast axis collimation mirror, and 22 be the second light
Beam rotator, 221 be the 4th inclined-plane, and 23 be the second optics cushion block, and 211 be the second inclined-plane, and 212 be the second buffer part, and 3 be laser
Light source, 31 light beams issued for each luminous point, a is cylindrical lens array, and b is groove.
Specific embodiment
The embodiment of the present invention provides a kind of optical device, laser module and laser beam processing method, has for one
There is bar class laser light source of multiple luminous points, based on two optical elements (the first optical element, the second optical element) and makes
It meets certain structure and parameters relationship and realizes, of the invention relative to traditional using complicated optical device or system
Technical solution can largely correct the smile of laser beam, significantly improve the collimation of light beam.
In embodiments of the present invention, two optical elements (the first optical element, the second optical element) can be fast for two
Axis collimating mirror, we are it is envisioned that the optical element may be BTS, ladder lens, rib including fast axis collimation mirror certainly
Microscope group etc. homogenizes device.
Following embodiment of the present invention is mainly illustrated so that the optical element is the first BTS of BTS(, the 2nd BTS) as an example
Illustrate, specifically, the angle between the first BTS and the 2nd BTS described in the embodiment of the present invention meets: pi/2 < < π,
The correction to smile, also, first optical element and the second optical element can be largely realized within the scope of this
It is needed between (the first BTS and the 2nd BTS) there are surplus is adjusted, which enables to the smile to each luminous point
Unified correction is carried out, the adjusting surplus is preferably less than or equal to 0.03mm in the embodiment of the present invention.
" first ", " second " involved in following embodiment of the present invention, " third ", " the 4th " are only used for distinguishing different members
Part is not intended to especially limit, and "upper", "lower" etc. only indicate the difference of relative position, does not constitute the absolute limit to specific location
System.
Technical solution of the present invention is described in further details below in conjunction with drawings and the specific embodiments.
Fig. 1 is the overall structure diagram one of optical device of the present invention, and Fig. 2 is that the overall structure of optical device of the present invention is shown
It is intended to two.Specifically, in conjunction with Fig. 1, Fig. 2, the optical device includes first of the setting at an angle to each other on laser optical path direction
Optical element and the second optical element, angle between the two meet: pi/2 < < π, first optical element at least wrap
The first fast axis collimation mirror 11 is included, the second optical element includes at least the second fast axis collimation mirror 21.
Further, first optical element further include: the first Beam rotation device 12, the first optics cushion block 13；It is described
First fast axis collimation mirror 11 be mutually aligned with the first Beam rotation device 12 it is Nian Jie, and be fixed to the first optics cushion block 13 on, namely
First optical element at least can be the first BTS1 at this time；
Similar, second optical element further include: the second Beam rotation device 22, the second optics cushion block 23；Described second is fast
Axis collimating mirror 21 is mutually aligned Nian Jie with the second Beam rotation device 22, and is fixed on the second optics cushion block 23, namely institute at this time
Stating the second optical element at least can be the second BTS2.
It should be noted that the first BTS1 is identical as the shape of the 2nd BTS2, size, structure, optical parameter.
In above scheme, be mutually aligned to guarantee the first fast axis collimation mirror 11 with the first Beam rotation device 12 it is Nian Jie, and
Fixed on the first optics cushion block 13, the first fast axis collimation mirror 11, the first Beam rotation device 12 and the first optics cushion block 13
The length of three is mutually matched；Similar, the second fast axis collimation mirror 21, the second Beam rotation device 22 and the second optics cushion block 23 3
The length of person is also required to be mutually matched；Described here being mutually matched does not require that the size of each element is essentially equal, in energy
Under the premise of enough realizing technical solution of the present invention, substantially or generally remain consistent.
Further, as shown in figure 4, Fig. 4 is the concrete structure schematic diagram of the first fast axis collimation mirror of the invention.Described first
Fast axis collimation mirror 11 include: tilt angle be 45 ° the first inclined-plane 111 and positioned at the first of first inclined-plane lower end
Buffer part 112；
Similar, as shown in figure 3, Fig. 3 is the structural schematic diagram one of the first fast axis collimation mirror and the second fast axis collimation mirror of the invention.
The second fast axis collimation mirror 21 includes: second inclined-plane all the same with 111 inclined direction of the first inclined-plane and tilt angle
211 and the second buffer part 212 positioned at 211 upper end of the second inclined-plane, second inclined-plane 211 and the first inclined-plane 111
It is opposite to be arranged in parallel, as shown in Figure 5.
It should be noted that the adjusting surplus between the first BTS1 and the 2nd BTS2 involved in the embodiment of the present invention is specially
The distance between first inclined-plane 111 and the second 211 liang of parallel-slopes in inclined-plane.
The structural reference prior art of the other parts of the first fast axis collimation mirror 11 and the second fast axis collimation mirror 12 is managed
Solution, herein no longer extra narration.
Further, Fig. 6 is the structural schematic diagram one of the first Beam rotation device and the second Beam rotation device of the invention.Such as figure
Shown in 6, the first Beam rotation device 12 includes: parallel two opposite third inclined-planes 121, described two third inclined-planes 121
Between be cylindrical lens array a, the tilt angle on two third inclined-planes 121 and inclined direction with the first inclined-plane 111 or second tiltedly
Face 211 is identical.
Similar, the second Beam rotation device 22 includes: parallel two opposite the 4th inclined-planes 221, described two
It is cylindrical lens array a between 4th inclined-plane 221, as shown in Figure 7, Figure 8, the tilt angle on two the 4th inclined-planes 221 and inclination side
Xiang Junyu third inclined-plane 121 is identical.
Wherein, the lower end close to the third inclined-plane 121 on the 4th inclined-plane 221 is provided with the first buffer part 112, close to third
The upper end of the fourth plane 221 on inclined-plane 121 is provided with the second buffer part 212.
In the embodiment of the present invention, first buffer part 112 and the second buffer part 212 are used for during beam treatment,
Prevent the mechanical damage of the first BTS1 and the 2nd BTS2.
Optionally, the shape of first buffer part 112 and the second buffer part 212 can include but is not limited to: fillet or
Corner.
Wherein, the adjusting surplus between the first BTS1 and the 2nd BTS2, it is understood that be third inclined-plane close to each other
The distance between 4th inclined-plane, two parallel-slope, with the distance between the first inclined-plane 111 and the second 211 liang of parallel-slopes in inclined-plane
It is equal.
Fig. 9 is the structural schematic diagram of the first optics cushion block or the second optics cushion block of the invention, the first optics cushion block 13
(or second optics cushion block 23), which is used to support, fixes the first fast axis collimation mirror 11 and the first Beam rotation device 12(or the second fast axle standard
Straight mirror 21 and the second Beam rotation device 22).Furthermore, it is contemplated that the adjusting surplus, the first optics cushion block 13 and the second optics pad
The distance between block 23 should be larger, to guarantee freely to realize the adjusting surplus, such as the first optics cushion block 13 with
The distance between second optics cushion block 23 is greater than the maximum value for adjusting surplus.The first optics cushion block 13(or the second light
Learn cushion block 23) it is intermediate offer groove b, the glue for preventing product dispensing from overflowing when installing damages product.
When first optical element only includes the first fast axis collimation mirror 11, the second optical element only includes the second fast axle standard
When straight mirror 21, the structure and correlation of the first fast axis collimation mirror 11 and the second fast axis collimation mirror 21 are with reference to the above first optics member
The scheme that part is the first BTS, the second optical element is the 2nd BTS, almost the same with it, details are not described herein again.
Figure 10 is the structural schematic diagram of laser module of the present invention, and the laser module includes above-described mutual angulation
Spend the first optical element being arranged and the second optical element and bar class laser light source 3 with multiple luminous points；Wherein,
The laser light source 3, for emitting laser beam；First optical element and the second optical element are set to the laser light
On the light direction in source 3, the laser beam for emitting the laser light source is handled, and processing mentioned here can have
Body is the correction for realizing the smile to the laser beam, is also possible to other shapings carried out to laser beam, such as even
Change/collimation etc., that is to say, that the effect of optical device of the present invention is not defined in correction smile uniquely.
Wherein, when first optical element is the first BTS1, the second optical element is two BTS2, in optical device
The first Beam rotation device 12 and the second Beam rotation device 22 cylindrical lens array a for being included each unit respectively correspond it is each
The light beam 31 that luminous point issues.
The embodiment of the present invention also provides a kind of laser beam processing method, and this method at an angle to each other is set using above-described
The first optical element and the second optical element set, while to the laser of bar class laser light source transmitting with multiple luminous points
Light beam is handled, and the processing can be specifically to realize to the correction of the smile of the laser beam, is also possible to laser
Other shapings that light beam carries out, such as homogenize/collimate.
The foregoing is only a preferred embodiment of the present invention, is not intended to limit the scope of the present invention.For
For those skilled in the art, the invention may be variously modified and varied.Institute all within the spirits and principles of the present invention
Any modification, equivalent substitution, improvement and etc. done, should all be included in the protection scope of the present invention.
Claims (10)
1. a kind of optical device, which is characterized in that the optical device includes: the setting at an angle to each other on laser optical path direction
First optical element and the second optical element, angle between the two meet: pi/2 < < π, first optical element is extremely
It less include the first fast axis collimation mirror, the second optical element includes at least the second fast axis collimation mirror.
2. optical device according to claim 1, which is characterized in that first optical element and the second optical element it
Between there are adjust surplus, the adjusting surplus are as follows: be less than or equal to 0.03mm.
3. optical device according to claim 1, which is characterized in that
First optical element further include: the first Beam rotation device, the first optics cushion block；The first fast axis collimation mirror and
One Beam rotation device is mutually aligned bonding, and is fixed on the first optics cushion block, and first optical element is the first BTS；
Second optical element further include: the second Beam rotation device, the second optics cushion block；The second fast axis collimation mirror and
Two Beam rotation devices are mutually aligned bonding, and are fixed on the second optics cushion block, and second optical element is the 2nd BTS；
Wherein, the first BTS is identical as the shape of the 2nd BTS, size, structure, optical parameter.
4. optical device according to claim 3, which is characterized in that the first fast axis collimation mirror, the first Beam rotation device with
The length of first optics cushion block three is mutually matched, the second fast axis collimation mirror, the second Beam rotation device and the second optics cushion block three
The length of person is mutually matched.
5. optical device according to claim 1 or 3, which is characterized in that the first fast axis collimation mirror includes: inclination angle
The first inclined-plane that degree is 45 ° and the first buffer part positioned at first inclined-plane lower end；
The second fast axis collimation mirror include: second inclined-plane all the same with first inclined-plane inclined direction and tilt angle,
And the second buffer part positioned at second inclined-plane upper end, second inclined-plane is opposite with the first inclined-plane to be arranged in parallel.
6. optical device according to claim 5, which is characterized in that the first Beam rotation device includes: parallel opposite
Two third inclined-planes, be cylindrical lens array, the tilt angle and inclination on two third inclined-planes between described two third inclined-planes
Direction is identical as the first inclined-plane or the second inclined-plane；
The second Beam rotation device includes: parallel two opposite the 4th inclined-planes, is column between described two 4th inclined-planes
Lens array, the tilt angle and inclined direction on two the 4th inclined-planes are identical as third inclined-plane.
7. optical device according to claim 6, which is characterized in that the lower end close to the third inclined-plane on the 4th inclined-plane is set
It is equipped with the first buffer part, the upper end close to the 4th inclined-plane on third inclined-plane is provided with the second buffer part.
8. optical device according to claim 7, which is characterized in that first buffer part and the second buffer part are used for
The mechanical damage of the first optical element and the second optical element is prevented during beam treatment, first buffer part is slow with second
The shape for rushing portion includes: fillet or corner.
9. a kind of laser module, which is characterized in that the module includes that claim 1 to 8 is described in any item at an angle to each other
The first optical element and the second optical element that are arranged and bar class laser light source with multiple luminous points；Wherein,
The laser light source, for emitting laser beam；
First optical element and the second optical element are set on the light direction of the laser light source, for swashing to described
The laser beam of radiant transmitting is handled.
10. a kind of laser beam processing method, which is characterized in that at an angle to each other set using claim 1 to 8 is described in any item
The first optical element and the second optical element set, while to the laser of bar class laser light source transmitting with multiple luminous points
Light beam is handled.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811581634.5A CN109491096B (en) | 2018-12-24 | 2018-12-24 | Optical device, laser module and laser beam processing method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811581634.5A CN109491096B (en) | 2018-12-24 | 2018-12-24 | Optical device, laser module and laser beam processing method |
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| CN109491096A true CN109491096A (en) | 2019-03-19 |
| CN109491096B CN109491096B (en) | 2021-08-06 |
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| US20030063391A1 (en) * | 2001-10-01 | 2003-04-03 | Tangyu Wang | Method and apparatus for illuminating a spatial light modulator |
| CN101442180A (en) * | 2008-12-31 | 2009-05-27 | 北京工业大学 | Apparatus for shaping high-power semiconductor laser array |
| CN202720390U (en) * | 2012-02-29 | 2013-02-06 | 南通傲迈光电科技有限公司 | Beam shaping structure of array semiconductor laser |
| CN103199439A (en) * | 2013-03-26 | 2013-07-10 | 温州泛波激光有限公司 | Semiconductor laser device |
| CN104049325A (en) * | 2014-02-08 | 2014-09-17 | 武汉柏汉激光技术有限公司 | Semiconductor laser array output beam uniformizing and optical fiber coupling system |
| US9008137B1 (en) * | 2014-04-01 | 2015-04-14 | Science Research Laboratory, Inc. | Method and apparatus for compact and efficient introduction of high radiant power into an optical fiber |
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2018
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20030063391A1 (en) * | 2001-10-01 | 2003-04-03 | Tangyu Wang | Method and apparatus for illuminating a spatial light modulator |
| CN101442180A (en) * | 2008-12-31 | 2009-05-27 | 北京工业大学 | Apparatus for shaping high-power semiconductor laser array |
| CN202720390U (en) * | 2012-02-29 | 2013-02-06 | 南通傲迈光电科技有限公司 | Beam shaping structure of array semiconductor laser |
| CN103199439A (en) * | 2013-03-26 | 2013-07-10 | 温州泛波激光有限公司 | Semiconductor laser device |
| CN104049325A (en) * | 2014-02-08 | 2014-09-17 | 武汉柏汉激光技术有限公司 | Semiconductor laser array output beam uniformizing and optical fiber coupling system |
| US9008137B1 (en) * | 2014-04-01 | 2015-04-14 | Science Research Laboratory, Inc. | Method and apparatus for compact and efficient introduction of high radiant power into an optical fiber |
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| CN109491096B (en) | 2021-08-06 |
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