CN109489843B - 高灵敏度传感器及其制备方法 - Google Patents
高灵敏度传感器及其制备方法 Download PDFInfo
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- CN109489843B CN109489843B CN201811270252.0A CN201811270252A CN109489843B CN 109489843 B CN109489843 B CN 109489843B CN 201811270252 A CN201811270252 A CN 201811270252A CN 109489843 B CN109489843 B CN 109489843B
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- 238000002360 preparation method Methods 0.000 title claims abstract description 16
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 230000035945 sensitivity Effects 0.000 claims abstract description 11
- 239000011261 inert gas Substances 0.000 claims abstract description 8
- 239000010408 film Substances 0.000 claims description 9
- 238000004519 manufacturing process Methods 0.000 claims description 7
- 239000002184 metal Substances 0.000 claims description 6
- 229910052751 metal Inorganic materials 0.000 claims description 6
- 239000010409 thin film Substances 0.000 claims description 6
- 238000010897 surface acoustic wave method Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 2
- 229910052697 platinum Inorganic materials 0.000 claims description 2
- 239000002210 silicon-based material Substances 0.000 claims description 2
- 239000010410 layer Substances 0.000 abstract description 14
- 239000011229 interlayer Substances 0.000 abstract description 7
- 230000007613 environmental effect Effects 0.000 abstract description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 7
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 238000000151 deposition Methods 0.000 description 4
- 229910001873 dinitrogen Inorganic materials 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000011161 development Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
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- 229910052737 gold Inorganic materials 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
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- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K5/00—Measuring temperature based on the expansion or contraction of a material
- G01K5/28—Measuring temperature based on the expansion or contraction of a material the material being a gas
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/22—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects
- G01K11/26—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using measurement of acoustic effects of resonant frequencies
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Measuring Fluid Pressure (AREA)
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CN201811270252.0A CN109489843B (zh) | 2018-10-29 | 2018-10-29 | 高灵敏度传感器及其制备方法 |
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CN201811270252.0A CN109489843B (zh) | 2018-10-29 | 2018-10-29 | 高灵敏度传感器及其制备方法 |
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CN109489843A CN109489843A (zh) | 2019-03-19 |
CN109489843B true CN109489843B (zh) | 2020-03-24 |
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Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
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CN109945966A (zh) * | 2019-03-29 | 2019-06-28 | 中北大学 | AlN双层薄膜的单电极水听器 |
CN110231263B (zh) * | 2019-05-23 | 2020-10-30 | 武汉大学 | 一种具有自清洁功能的pm2.5质量传感器及其制备方法 |
CN110880923A (zh) * | 2019-12-10 | 2020-03-13 | 武汉大学 | 一种螺旋状的声波谐振器 |
CN112229905A (zh) * | 2020-09-08 | 2021-01-15 | 华中科技大学 | 一种高选择性体声波谐振氢气传感器及其制备方法 |
CN113552171B (zh) * | 2021-07-15 | 2022-06-24 | 浙江大学 | 一种mems压电谐振式露点传感器装置及其露点识别方法 |
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FR2889374A1 (fr) * | 2005-07-29 | 2007-02-02 | Michelin Soc Tech | Structure resonnante hybride pour verifier des parametres d'un pneumatique |
US8827550B2 (en) * | 2009-12-23 | 2014-09-09 | Intel Corporation | Thermal sensor using a vibrating MEMS resonator of a chip interconnect layer |
US8821009B2 (en) * | 2009-12-23 | 2014-09-02 | Intel Corporation | Thermal sensors having flexible substrates and use thereof |
CN104030234B (zh) * | 2014-06-04 | 2016-01-13 | 江苏艾伦摩尔微电子科技有限公司 | 基于薄膜体声波谐振器的mems红外传感器制备方法 |
CN104614086B (zh) * | 2015-03-06 | 2017-05-03 | 上海新微技术研发中心有限公司 | 气压式温度传感器及其制作方法 |
CN207515946U (zh) * | 2017-09-11 | 2018-06-19 | 重庆大学 | 基于硅晶元和压电薄膜的声表面波高温压力传感器芯片 |
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Effective date of registration: 20220411 Address after: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee after: Ningbo Huazhang enterprise management partnership (L.P.) Address before: 430072 Hubei Province, Wuhan city Wuchang District of Wuhan University Luojiashan Patentee before: WUHAN University |
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Effective date of registration: 20220829 Address after: No.01, 4th floor, building D7, phase 3, Wuhan Software New Town, No.9 Huacheng Avenue, Donghu New Technology Development Zone, Wuhan City, Hubei Province, 430000 Patentee after: Wuhan Minsheng New Technology Co.,Ltd. Address before: 315832 e2025, zone a, Room 401, building 1, No. 88, Meishan Qixing Road, Beilun District, Ningbo, Zhejiang Province Patentee before: Ningbo Huazhang enterprise management partnership (L.P.) |
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