CN109476018A - Industrial robot - Google Patents
Industrial robot Download PDFInfo
- Publication number
- CN109476018A CN109476018A CN201780044605.2A CN201780044605A CN109476018A CN 109476018 A CN109476018 A CN 109476018A CN 201780044605 A CN201780044605 A CN 201780044605A CN 109476018 A CN109476018 A CN 109476018A
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- CN
- China
- Prior art keywords
- rotation axis
- shell
- bearing
- arm
- magnetic fluid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/06—Programme-controlled manipulators characterised by multi-articulated arms
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J19/00—Accessories fitted to manipulators, e.g. for monitoring, for viewing; Safety devices combined with or specially adapted for use in connection with manipulators
- B25J19/0075—Means for protecting the manipulator from its environment or vice versa
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J9/00—Programme-controlled manipulators
- B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
- B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
- B25J9/041—Cylindrical coordinate type
- B25J9/042—Cylindrical coordinate type comprising an articulated arm
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/40—Sealings between relatively-moving surfaces by means of fluid
- F16J15/43—Sealings between relatively-moving surfaces by means of fluid kept in sealing position by magnetic force
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/50—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall
- F16J15/52—Sealings between relatively-movable members, by means of a sealing without relatively-moving surfaces, e.g. fluid-tight sealings for transmitting motion through a wall by means of sealing bellows or diaphragms
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Robotics (AREA)
- Manipulator (AREA)
- Sealing Using Fluids, Sealing Without Contact, And Removal Of Oil (AREA)
- Diaphragms And Bellows (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention provides a kind of industrial robot, the industrial robot have the rotation axis (15) of the base end side of fixed arm, the bearing (24) for rotatably supporting rotation axis (15), be configured at rotation axis (15) peripheral side magnetic fluid seal device (18), keep magnetic fluid seal device sealing material holding (19).Magnetic fluid seal device has the shell (31), the magnetic fluid being held between the inner peripheral surface of pole piece and the outer peripheral surface of rotation axis, the bearing (32) being configured between the outer peripheral surface of rotation axis and shell for keeping magnet and pole piece.Sealing material holding keeps shell, so that shell is followed the inclination of rotation axis when rotation axis is tilted relative to bearing (24) and tilted.Even if rotation axis is tilted relative to the bearing (24) for rotatably supporting the rotation axis for being fixed with arm etc. as a result, it is also able to maintain that the effect for being configured at the magnetic fluid seal device of peripheral side of rotation axis.
Description
Technical field
The present invention relates to the industrial robots for example used in a vacuum.
Background technique
At present it is known that there is the industrial robot of handling substrate in a vacuum (for example, referring to patent document 1).Patent text
Offer the industrial robot recorded in 1 have the hand for loading substrate, the front end side connection arm of hand, linking arm base end side ontology
Portion, the elevating mechanism for going up and down body part.Arm is made of the first arm and this two arms portion of the second arm.Body part has fixation
The hollow rotation axis of the base end side of arm, is configured at hollow rotation axis at the retarder with the output shaft for connecting hollow rotation axis
The substantially cylindric holding member of peripheral side.The shell of retarder is fixed on holding member, and holding member is fixed on body part
Frame on.
Outer peripheral surface and holding in the industrial robot documented by patent document 1, in body part, in hollow rotation axis
Between the inner peripheral surface of component, configured with the bearing for rotatably supporting hollow rotation axis.Bearing is in the axial direction of hollow rotation axis
On separate the state of specified interval and be configured at two positions.In addition, in the outer peripheral surface of hollow rotation axis and the inner circumferential of holding member
Configured with the magnetic fluid seal for preventing air from flowing out to vacuum area between face.In the peripheral side of holding member, configuration is useful
In the bellows for preventing air from flowing out to vacuum area.The shell of receiving body part and elevating mechanism is fixed in the upper end of bellows
Upper end, the lower end of holding member is fixed in the lower end of bellows.
In addition, in the industrial robot documented by patent document 1, the interconnecting piece (joint portion) of arm and hand and the first arm
The interconnecting piece (joint portion) of portion and the second arm has retarder and hollow rotation axis.In the interconnecting piece of arm and hand, hand is fixed on
The upper end of hollow rotation axis, in the interconnecting piece of the first arm and the second arm, the second arm is fixed on the upper end of hollow rotation axis.
The output shaft of retarder is fixed in the lower end of hollow rotation axis.The output shaft of retarder is configured in the output shaft of retarder and subtracts
Bearing between the shell of fast device rotatably supports.That is, hollow rotation axis can be rotated via the output shaft of retarder by bearing
Ground bearing.The shell of retarder is fixed on holding member.In the interconnecting piece of arm and hand, holding member is fixed on the front end side of arm
(specifically, front end side of the second arm), in the interconnecting piece of the first arm and the second arm, holding member is fixed on the first arm
The front end side in portion.Being configured between the outer peripheral surface of hollow rotation axis and the inner peripheral surface of holding member prevents air to vacuum area
The magnetic fluid seal of outflow.
In addition, magnetic fluid seal for example has magnet and in a manner of clipping magnet in the axial direction in hollow rotation axis
The pole piece of configuration.Magnet and pole piece are fixed on holding member via the shell of magnetic fluid seal.Pole piece is formed as circular,
The inner peripheral surface of pole piece is opposed with the outer peripheral surface of hollow rotation axis across defined gap.In addition, hollow rotation axis is by magnetic part
It is formed, magnetic fluid is maintained at the gap between the inner peripheral surface of pole piece and the outer peripheral surface of hollow rotation axis.
Existing technical literature
Patent document
Patent document 1: Japanese Unexamined Patent Publication 2014-131823 bulletin
Summary of the invention
Technical problems to be solved by the inivention
In the industrial robot documented by patent document 1, when having acted on surplus to arm or hand in handling substrate etc.
Load when, hollow rotation axis may be relative to the bearing inclination for supporting hollow rotation axis.In addition, idle running moving axis inclination in the middle
When, the gap between the inner peripheral surface of the pole piece of magnetic fluid seal and the outer peripheral surface of hollow rotation axis changes, and causes not
Magnetic fluid can be kept between the inner peripheral surface of pole piece and the outer peripheral surface of hollow rotation axis, magnetic fluid seal possibly can not rise
Effect.In addition, in the industrial robot documented by patent document 1, in industrial machine human action, when hand etc. and industry
When structure with robot periphery etc. collides, the especially connection in arm and the interconnecting piece and the first arm and the second arm of hand
Portion, hollow rotation axis are impacted, and hollow rotation axis may substantially be tilted relative to the bearing moment for supporting hollow rotation axis.Separately
Outside, when idle running moving axis moment substantially tilts in the middle, magnetic fluid seal is impacted, and magnetic fluid seal may be damaged.
In addition, in the industrial robot documented by patent document 1, matched by using the high bearing of rigidity or widen
It is placed in the interval of the bearing at two positions, the inclination of rotary middle spindle can also be inhibited, but in this case, bearing price liter
It is high and cause industrial robot price increase or body part enlargement and cause industrial robot enlarged.
Therefore, technical problem of the invention is, provides a kind of industrial robot, which has configuration
Magnetic fluid seal device in the peripheral side of the rotation axis of the base end side of fixed arm etc., wherein even if rotation axis is relative to can
The rotationally bearing inclination of support rotating shaft, is also able to maintain that the effect of magnetic fluid seal device.In addition, technology of the invention
Problem is, provides a kind of industrial robot, which has the rotation of base end side for being configured at fixed arm etc.
The magnetic fluid seal device of the peripheral side of axis, wherein even if rotation axis is impacted and causes moment relative to rotationally
The bearing of support rotating shaft substantially tilts, and can also prevent the damage of magnetic fluid seal device.
Technical solution used by solving the problems, such as
In order to solve the above technical problem, the present invention provides a kind of industrial robots, which is characterized in that has: arm is consolidated
The rotation axis of the base end side of fixed arm, the bearing for rotatably supporting rotation axis, keep bearing bearing cage part, be configured at turn
The magnetic fluid seal device of the peripheral side of moving axis, the sealing material holding for keeping magnetic fluid seal device, magnetic fluid
Sealing device has: magnet is formed as pole piece cyclic annular and that inner peripheral surface is opposed with the outer peripheral surface of rotation axis, is held in pole piece
Magnetic fluid between inner peripheral surface and the outer peripheral surface of rotation axis, the shell for keeping magnet and pole piece, with rotation axis relative to shell
Relatively turnable mode is configured at the second bearing between the outer peripheral surface of rotation axis and shell, and sealing material holding is by shell
It keeps are as follows: when rotation axis is tilted relative to bearing, shell is followed the inclination of rotation axis and tilted.
In addition, in order to solve the above technical problem, the present invention provides a kind of industrial robots, which is characterized in that have:
The arm that is made of the multiple arms being mutually pivotally connected, the hand rotationally being connect with the front end side of arm, fixed arm or
The rotation axis of hand, the bearing for rotatably supporting rotation axis, the bearing cage part for keeping bearing, the periphery for being configured at rotation axis
The magnetic fluid seal device of side, the sealing material holding for keeping magnetic fluid seal device, magnetic fluid seal device tool
Standby: magnet is formed as pole piece cyclic annular and that inner peripheral surface is opposed with the outer peripheral surface of rotation axis, is held in the inner peripheral surface of pole piece and turns
The shell of magnetic fluid, holding magnet and pole piece between the outer peripheral surface of moving axis can be relatively rotated with rotation axis relative to shell
Mode be configured at the second bearing between the outer peripheral surface of rotation axis and shell, sealing material holding keeps shell are as follows:
When rotation axis is tilted relative to bearing, shell is followed the inclination of rotation axis and is tilted.
In industrial robot of the invention, between the shell of magnetic fluid seal device and the outer peripheral surface of rotation axis
Configured with second bearing.In addition, in the present invention, the sealing material holding of magnetic fluid seal device is kept to keep shell
Are as follows: when rotation axis is tilted relative to bearing, shell is followed the inclination of rotation axis and is tilted.Therefore, in the present invention, even if turning
Moving axis is tilted relative to bearing, is also able to suppress the gap of the outer peripheral surface of the inner peripheral surface and rotation axis that are held in the pole piece of shell
Variation.It therefore, in the present invention, also can be in the inner peripheral surface and rotation axis of pole piece even if rotation axis is tilted relative to bearing
Outer peripheral surface between suitably keep magnetic fluid, as a result, being able to maintain that the effect of magnetic fluid seal device.
In addition, in the present invention, the sealing material holding of magnetic fluid seal device is kept to keep shell are as follows: turning
When moving axis is tilted relative to bearing, shell is followed the inclination of rotation axis and is tilted, therefore, even if rotation axis is impacted and opposite
It is substantially tilted in bearing moment, magnetic fluid seal device is also not easily susceptible to impact.Therefore, in the present invention, even if rotation axis
It is impacted and is substantially tilted relative to bearing moment, can also prevent the damage of magnetic fluid seal device.
In the present invention, sealing material holding is, for example, the ripple configured in a manner of the peripheral side for covering rotation axis
Pipe, shell are fixed on one end of bellows.In this case, when rotation axis is tilted relative to bearing, bellows deformation, with
Shell is set to follow the inclination of rotation axis and tilt.In addition, when rotation axis is impacted and substantially tilted relative to bearing moment,
Bellows deformation, so that shell is followed the inclination of rotation axis and tilted, therefore, magnetic fluid seal device is not easily susceptible to impact.
In the present invention, it is generally desirable to, industrial robot has retarder, and retarder has the output of connection rotation axis
Axis, bearing are built in retarder, constitute a part of retarder, and rotatably support output shaft, and bearing cage part is
The shell of retarder.When such constitute, the retarder for being built-in with the commercially available standard of bearing can be directly used in industrial
Robot.Therefore, the assembling procedure of industrial robot can be simplified, further, it is possible to reduce the cost of industrial robot.
In the present invention, it is generally desirable to, industrial robot has the rotation stop component for the corotation for preventing rotation axis and shell,
Rotation stop component is formed by elastomer, is connect with shell and bearing cage part.When such constitute, even if shell is protected by sealing element
It holds component to remain when rotation axis is relative to bearing inclination, shell is followed the inclination of rotation axis and tilted, also being capable of anti-rotation stop
The corotation of moving axis and shell.
(invention effect)
As described above, in the present invention, industrial robot has the rotation axis of base end side for being configured at fixed arm etc.
The magnetic fluid seal device of peripheral side, wherein even if rotation axis is tilted relative to the bearing for rotatably supporting rotation axis,
It is able to maintain that the effect of magnetic fluid seal device.In addition, in the present invention, industrial robot, which has, is configured at fixed arm
The magnetic fluid seal device of the peripheral side of the rotation axis of base end side etc., wherein even if rotation axis is impacted and relative to can
Rotationally the bearing moment of support rotating shaft substantially tilts, and can also prevent the damage of magnetic fluid seal device.
Detailed description of the invention
Fig. 1 is the figure of the industrial robot of embodiment of the present invention, and (A) is top view, and (B) is side view.
Fig. 2 is the in-built cross-sectional view in the portion E for explanatory diagram 1.
Fig. 3 is the enlarged drawing in the portion F of Fig. 2.
Fig. 4 is the cross-sectional view for the structure for illustrating the sealing material holding of another embodiment of the present invention.
Fig. 5 is the internal structure of the interconnecting piece of the first arm and the second arm for illustrating another embodiment of the present invention
Cross-sectional view.
Specific embodiment
Hereinafter, being described with reference to embodiments of the present invention.
(overall structure of industrial robot)
Fig. 1 is the figure of the industrial robot 1 of embodiment of the present invention, and (A) is top view, and (B) is side view.Fig. 2 is
The in-built cross-sectional view in the portion E for explanatory diagram 1.
The industrial robot 1 (hereinafter referred to as " robot 1 ") of the method is for carrying organic EL (organic electroluminescence hair
Light) display glass substrate (diagram omit, hereinafter referred to as " substrate ") robot.The robot 1 is adapted for relatively large
Substrate carrying robot.The manufacture system that robot 1 is loaded into organic el display come using.
Multiple places that the manufacture system for example has the transfer chamber at the center of being configured at and configured in a manner of surrounding transfer chamber
The inside of reason room, transfer chamber and process chamber is vacuum.Inside of a part configuration of robot 1 in transfer chamber.By constituting machine
The fork 11 of device people 1 being described later on enters in process chamber, 1 handling substrate of robot.That is, base is carried in a vacuum by robot 1
Plate.
Robot 1, which has, to be loaded the hand 3 of substrate, is rotatably coupled the arm 4 of hand 3 in front end side, is rotatably coupled arm 4
Base end side body part 5.In addition, robot 1 has the elevating mechanism for going up and down body part 5 (diagram is omitted).The elevator
Structure and body part 5 are contained in the shell 7 of substantially bottomed cylindrical.It is fixed in the upper end of shell 7 and is formed as disk-shaped convex
Edge 8.In the through hole of the upper end side section for being centrally formed with configuration ontology portion 5 of flange 8.
Hand 3 and arm 4 are configured at the upside of body part 5.In addition, hand 3 and arm 4 are configured at the upside of flange 8.As described above,
A part of robot 1 is configured at the inside of transfer chamber.Specifically, the portion that the lower end surface of the ratio flange 8 of robot 1 is upper
Distribution is placed in the inside of transfer chamber.That is, the upper part in the lower end surface of the ratio flange 8 of robot 1 is configured at vacuum area VR
In, hand 3 and arm 4 are configured in vacuum.On the other hand, the part of the lower end surface of the ratio flange 8 of robot 1 on the lower is configured at greatly
In the AR of gas region (in atmosphere).
Hand 3 has the base portion 10 connecting with arm 4 and loads four forks 11 of substrate.Fork 11 is formed linearly.Four
Two forks 11 in fork 11 are to be spaced from each other the state configured in parallel of specified interval.Two forks 11 with from base portion 10 to
The side of horizontal direction mode outstanding is fixed on base portion 10.Remaining two forks 11 with from base portion 10 towards with from base portion 10
Base portion 10 is fixed on to the side of the horizontal direction opposite side of two forks 11 outstanding mode outstanding.
Arm 4 is made of the first arm 13 and this two arms portion of the second arm 14.The base end side and body part 5 of first arm 13
Connection.The base end side of the second arm 14 is rotatably coupled in the front end side of the first arm 13.That is, the first arm 13 and second
Arm 14 is mutually pivotally connected.Hand 3 has been rotatably coupled in the front end side of the second arm 14.
(structure of body part)
Fig. 3 is the enlarged drawing in the portion F of Fig. 2.
Body part 5 has the rotation axis 15 of the base end side (i.e. the base end side of the first arm 13) of fixed arm 4, makes rotation axis 15
The motor is rotated retarder 16, the ontology for slowing down and transmitting to the first arm 13 by the motor (diagram is omitted) of rotation
The body frame 17 in portion 5.In addition, body part 5 has 18 He of magnetic fluid seal device for the peripheral side for being configured at rotation axis 15
The bellows 19 configured in a manner of covering the peripheral side of rotation axis 15.Prevent composition magnetic fluid close in addition, body part 5 has
The rotation stop component 20 of the corotation of the shell 31 being described later on and rotation axis 15 of seal apparatus 18.
The tubular bottom of with of the body frame 17 for example formed as upper end opening.Rotation axis 15 is shaped generally as cylindrical shape.Separately
Outside, rotation axis 15 is formed by magnetic part.The lower surface of the base end side of first arm 13 is fixed on the upper end of rotation axis 15.Rotation
A part configuration of axis 15 is in the through hole for being formed in flange 8.In addition, the rotation axis 15 of the method is by the up-down direction
Divided three substantially cylindric axle portions are fixed to each other and are formed.
Retarder 16 is in the radial hollow decelerator for being centrally formed with through hole.The retarder 16 is configured to make to slow down
The axis center of the through hole of device 16 is consistent with the axis center of rotation axis 15.The retarder 16 of the method is eccentric rocking type reduction gear
(RV retarder).Retarder 16 has input gear 21, the bearing 22 for rotatably supporting input gear 21, connection rotation axis 15
Output shaft 23, rotatably support the bearing 24 of output shaft 23, accommodate the shell 25 of these structures.In the inner circumferential of retarder 16
Side is configured with the cartridge unit 26 for being formed as cylindric.In addition, retarder 16 is also possible to the retarder other than RV retarder.
Shell 25 is fixed in body frame 17.Bearing 22 is, for example, ball bearing, and the inner ring of bearing 22 is fixed on input tooth
Wheel 21, shell 25 is fixed in the outer ring of bearing 22.Bearing 22 is configured at two with the state for separating specified interval in the up-down direction
A position.The motor for rotating rotation axis 15 is connect with input gear 21 via belt wheel and band.Cartridge unit 26 is configured at defeated
Enter the inner circumferential side of gear 21.Shell 25 is fixed in the lower end of cartridge unit 26.
The lower end of rotation axis 15 is fixed on the upper end of output shaft 23.Will enter into the dynamic retarding of input gear 21 and to this
Output shaft 23 transmits.Bearing 24 is, for example, ball bearing, and output shaft 23 is fixed in the outer ring of bearing 24, and the inner ring of bearing 24 is fixed on
Shell 25.Bearing 24 is configured at two positions to separate the state of specified interval in the up-down direction.As described above, bearing 24 can
Output shaft 23 is rotationally supported, rotation axis 15 is fixed on output shaft 23.That is, bearing 24 rotatably supports rotation axis 15.
The bearing 24 is built in retarder 16, constitutes a part of retarder 16.In addition, the shell 25 of the method is to maintain bearing 24
Bearing cage part.
Magnetic fluid seal device 18 is that air flows out to vacuum area VR and is arranged in order to prevent.The magnetic fluid is close
Seal apparatus 18 is configured at the peripheral side of the lower end side section of rotation axis 15.In addition, magnetic fluid seal device 18 is configured at ontology
The inner circumferential side of the upper end of frame 17.In addition, magnetic fluid seal device 18 is configured at the position more upper than retarder 16.
As shown in figure 3, magnetic fluid seal device 18 has multiple magnet 28, is formed as cyclic annular and inner peripheral surface and rotation
Magnetism between the opposed multiple pole pieces 29 of the outer peripheral surface of axis 15, the inner peripheral surface for being held in pole piece 29 and the outer peripheral surface of rotation axis 15
Fluid 30, the shell 31 for keeping multiple magnet 28 and pole piece 29, by rotation axis 15 relative to shell 31 it is relatively turnable in a manner of
The bearing 32 as second bearing being configured between the outer peripheral surface of rotation axis 15 and shell 31.In addition, omitting magnet in Fig. 2
28, the diagram of pole piece 29 and magnetic fluid 30.
Magnet 28 is permanent magnet.The magnet 28 is configured in a manner of surrounding rotation axis 15 for example formed as annular shape.Separately
Outside, magnet 28 is magnetized, and the magnetic pole of upper surface and the magnetic pole of lower surface is made to become different magnetic poles.Pole piece 29 is by magnetic steel plate
Equal magnetic parts are constituted.The pole piece 29 is configured to clamp each of multiple magnet 28 in (axial direction of rotation axis 15) in above-below direction
It is a.In addition, pole piece 29 is configured in a manner of surrounding rotation axis 15 for example formed as annular shape.Pole piece 29 inner peripheral surface and turn
Constant gap is formed between the outer peripheral surface of moving axis 15.By the effect of magnet 28, formed by magnet 28, pole piece 29 and
The magnetic circuit of rotation axis 15, as described above, magnetic fluid 30 is maintained between the inner peripheral surface of pole piece 29 and the outer peripheral surface of rotation axis 15
Gap.
Shell 31 is formed to have the substantially cylindric with flange of lip portions 31a.The shell 31 is configured to be formed as big
Cause the axis center of cylindric shell 31 consistent with the axis center of rotation axis 15.Multiple magnet 28 and pole piece 29 are fixed on shell 31
Upper end side inner peripheral surface.The circular cover portion that magnet 28 and pole piece 29 are covered from upside is formed in the upper end of shell 31
31b.Bearing 32 is configured at the position than magnet 28 and pole piece 29 on the lower.The bearing 32 is, for example, ball bearing, bearing 32 it is outer
Circle is fixed on the inner peripheral surface of the lower end side of shell 31, and the inner ring of bearing 32 is fixed on the outer peripheral surface of rotation axis 15.
Bellows 19 is that air flows out to vacuum area VR and is arranged in order to prevent.The bellows 19 is formed as scalable
Cylindrical shape.The upper surface of the lip portions 31a of shell 31 is fixed in one end (lower end) of bellows 19.That is, shell 31 is fixed on
One end of bellows 19.In addition, the other end (upper end) of bellows 19 is fixed on flange 8.As described above, being accommodated in shell 7
There is the elevating mechanism for going up and down body part 5, when body part 5 is gone up and down, bellows 19 is flexible.In addition, in the upper table of lip portions 31a
Configured with for preventing air from the upper surface of lip portions 31a and the lower end of bellows 19 between face and the lower end surface of bellows 19
The o-ring 33 flowed out between face.
As described above, shell 31 is fixed on the lower end of bellows 19, magnetic fluid seal device 18 is to hang on bellows
19 state is kept by bellows 19.In addition, shell 31 is connect via bellows 19 with flange 8.In this mode, to arm 4
When acting on superfluous load and rotation axis 15 being caused to be slightly tilted relative to bearing 24, bellows 19 is deformed, so that shell 31 chases after
It is tilted with the inclination of rotation axis 15.That is, bellows 19 keeps shell 31, so that in rotation axis 15 relative to bearing 24
When inclination, shell 31 is followed the inclination of rotation axis 15 and is tilted.The bellows 19 of the method is to maintain magnetic fluid seal device
18 sealing material holding.
Rotation stop component 20 is created as the spring members of substantially L-shaped.That is, rotation stop component 20 is formed by elastomer.Specifically
For, rotation stop component 20 has two leaf springs 35,36 and connects the block-like connecting component 37 of two leaf springs 35,36.Leaf spring 35,
36 are formed as tabular.Leaf spring 35 configures in such a way that the thickness direction of leaf spring 35 and up and down direction are consistent, and leaf spring 36 is with leaf spring
36 thickness direction and the radially consistent mode of rotation axis 15 configure.
The lip portions 31a of shell 31 is fixed in the inboard portion of the leaf spring 35 radially of rotation axis 15, under leaf spring 36
End part is fixed on the inner circumferential side of body frame 17.The exterior portion of the leaf spring 35 radially of rotation axis 15 and leaf spring 36 it is upper
End part is fixed on connecting component 37.That is, the one end for being shaped generally as the rotation stop component 20 of L shape is connect with shell 31, rotation stop
The other end of component 20 is connect with body frame 17.In addition, the other end of rotation stop component 20 is also via body frame 17 and shell
25 connections.
Rotation stop component 20 limits circumferential direction movement of the shell 31 to rotation axis 15.On the other hand, rotation stop component 20 is to rotation axis
15 radial direction and up and down direction deformation, to cause rotation axis 15 to tilt relative to bearing 24 acting on superfluous load to arm 4
When, obstacle will not be brought to the movement for the inclined shell 31 for following rotation axis 15.In addition, rotation stop component 20 is also possible to be formed
For a leaf spring of substantially L-shaped.In addition, rotation stop component 20 can also be made of the spring members other than leaf spring.
(main effect of the method)
As described above, in this mode, inner peripheral surface of the configuration of bearing 32 in the shell 31 of magnetic fluid seal device 18
Between the outer peripheral surface of rotation axis 15.In addition, in this mode, shell 31 is fixed on the lower end of bellows 19, acted on to arm 4
Superfluous load and when rotation axis 15 being caused to tilt relative to bearing 24, bellows 19 deforms, so that shell 31 follows rotation axis
15 inclination and tilt.Therefore, in this mode, even if rotation axis 15 is tilted relative to bearing 24, also it is able to suppress and is held in
The variation in the gap of the outer peripheral surface of the inner peripheral surface and rotation axis 15 of the pole piece 29 of shell 31.Therefore, in this mode, even if turning
Moving axis 15 is tilted relative to bearing 24, also can suitably keep magnetic between the inner peripheral surface of pole piece 29 and the outer peripheral surface of rotation axis 15
Property fluid 30, as a result, being able to maintain that the effect of magnetic fluid seal device 18.
In addition, in this mode, shell 31 is fixed on the lower end of bellows 19, tilted in rotation axis 15 relative to bearing 24
When, bellows 19 deforms, so that shell 31 is followed the inclination of rotation axis 15 and tilted, therefore, even if in the movement of robot 1
Hands 3 etc. and the collision such as the structure on 1 periphery of robot, rotation axis 15 are collided, and rotation axis 15 is big relative to 24 moment of bearing
Width inclination, magnetic fluid seal device 18 are also not easily susceptible to impact.Therefore, in this mode, even if rotation axis 15 is impacted
And substantially tilted relative to 24 moment of bearing, it can also prevent the damage of magnetic fluid seal device 18.
In this mode, body part 5 has the rotation stop component 20 for the corotation for preventing shell 31 and rotation axis 15, rotation stop component
Circumferential direction movement of the 20 limitation shells 31 to rotation axis 15.Therefore, in this mode, the torsion of bellows 19 can be prevented, thus
Prevent the fatigue rupture of bellows 19.In addition, in this mode, when rotation axis 15 is tilted relative to bearing 24, rotation stop component
20 deform to the radial direction and up and down direction of rotation axis 15, and the inclined movement that rotation axis 15 will not be followed to shell 31 brings barrier
Hinder, therefore, the corotation of rotation axis 15 and shell 31 can be prevented, and can make when rotation axis 15 is tilted relative to bearing 24
Shell 31 follows the inclination of rotation axis 15.
In this mode, the bearing 24 for rotatably supporting rotation axis 15 is built in retarder 16, constitutes retarder 16
A part.Therefore, in this mode, the retarder 16 of commercially available standard can be directly used in robot 1.Therefore, in we
In formula, the assembling procedure of robot 1 can be simplified, further, it is possible to reduce the cost of robot 1.
(other embodiment)
Above-mentioned mode is an example of best mode of the invention, but not limited to this, do not changing ancestor of the invention
Various modifications implementation can be carried out in the range of purport.
In above-mentioned mode, robot 1 may not possess the elevating mechanism for going up and down body part 5.In this case, this
Body portion 5 may not possess bellows 19.In the case where body part 5 does not have bellows 19, for example, as shown in figure 4, ontology
Portion 5 can also have the o-ring 40 contacted with the upper surface of the lip portions 31a of shell 31, the following table face contact with lip portions 31a
O-ring 41, with it is arranged opposite with the upper surface of lip portions 31a and by o-ring 40 by the circular sealing element of compressive strain
Contact portion 42a and arranged opposite with the lower surface of lip portions 31a and contact o-ring 41 by the circular sealing element of compressive strain
The sealing element contact component 42 of portion 42b.
In this case, sealing element contact component 42 is fixed on flange 8.In addition, magnetic fluid seal device 18 is by two
A o-ring 40,41 is kept.In addition, in this case, causing rotation axis 15 relative to bearing acting on superfluous load to arm 4
When 24 inclination, o-ring 40,41 is deformed, so that shell 31 is followed the inclination of rotation axis 15 and tilted.That is, o-ring 40,41 is external
Shell 31 is kept, so that shell 31 is followed the inclination of rotation axis 15 and tilted when rotation axis 15 is tilted relative to bearing 24.
O-ring 40,41 in this case is to maintain the sealing material holding of magnetic fluid seal device 18.
In this case, it is also same as above-mentioned mode, even if rotation axis 15 is tilted relative to bearing 24, also it is able to suppress guarantor
It is held in the variation in the gap of the inner peripheral surface of the pole piece 29 of shell 31 and the outer peripheral surface of rotation axis 15, it therefore, can be in pole piece 29
Inner peripheral surface and rotation axis 15 outer peripheral surface between suitably keep magnetic fluid 30.Therefore, even if rotation axis 15 is relative to bearing
24 inclinations, are also able to maintain that the effect of magnetic fluid seal device 18.In addition, in this case, it is also same with above-mentioned mode
Sample, though the collision such as hand 3 etc. and the structure on robot 1 periphery and cause rotation axis 15 to be impacted, and rotation axis 15 is opposite
It is substantially tilted in 24 moment of bearing, magnetic fluid seal device 18 is also not easily susceptible to impact, and therefore, magnetic fluid can be prevented close
The damage of seal apparatus 18.
In above-mentioned mode, body part 5 has a retarder 16, but body part 5 can also have and be fixed on rotation axis 15
Lower end belt wheel, be fixed on make rotation axis 15 rotate motor output shaft on belt wheel, hang on these belt wheels
Band is to replace retarder 16.In this case, the bearing for rotatably supporting rotation axis 15 is for example held in body frame 17, and
Direct support rotating shaft 15.Body frame 17 in this case is to maintain the bearing guarantor for rotatably supporting the bearing of rotation axis 15
Hold component.In addition, body part 5 may not possess rotation stop component 20 in above-mentioned mode.In this case, pass through wave
Line pipe 19 prevents the corotation of rotation axis 15 and shell 31.
In above-mentioned mode, in the case where the pressure of the inside of arm 4 is atmospheric pressure, the first arm 13 and the second arm
14 interconnecting piece can also be constituted substantially samely with the interconnecting piece of arm 4 and body part 5.In this case, as shown in figure 5,
The interconnecting piece of first arm 13 and the second arm 14 has upper end and fixes the second arm 14 (specifically, for the second arm 14
Base end side) rotation axis 15, to the second arm 14 transmitting power retarder 16, be fixed on the first arm 13 front end side and
The frame 57 of the shell 25 of fixed retarder 16.
In addition, in this case, the interconnecting piece of the first arm 13 and the second arm 14, which has, is configured at rotation axis 15
The bellows 19 configured in a manner of the magnetic fluid seal device 18 of peripheral side and the peripheral side to cover rotation axis 15.Bellows
Frame 57 is fixed in 19 upper end.Same as above-mentioned mode, the lip portions 31a's of shell 31 be fixed in the lower end of bellows 19
Upper surface, magnetic fluid seal device 18 are kept with the state for hanging on bellows 19 by bellows 19.
In Fig. 5, same symbol is marked for structure identical with structure shown in Fig. 2.In this case, in the first arm
The interconnecting piece in portion 13 and the second arm 14, it is same as above-mentioned mode, even if rotation axis 15 is tilted relative to bearing 24, also can
Magnetic fluid 30 is suitably kept between the inner peripheral surface of pole piece 29 and the outer peripheral surface of rotation axis 15, as a result, being able to maintain that
The effect of magnetic fluid seal device 18.In addition, in the interconnecting piece of the first arm 13 and the second arm 14, though rotation axis 15 by
It is substantially tilted to impact relative to 24 moment of bearing, can also prevent the damage of magnetic fluid seal device 18.
In addition, rotation axis 15 is not gone up and down relative to frame 57 in the interconnecting piece of the first arm 13 and the second arm 14,
Therefore, the length of bellows 19 is shorter.Therefore, in the interconnecting piece of the first arm 13 and the second arm 14, bellows 19 is not easy to turn round
Turn.Accordingly it is also possible to rotation stop component 20 not be arranged in the interconnecting piece of the first arm 13 and the second arm 14.But it is also possible to
Rotation stop component 20 is arranged in the interconnecting piece of first arm 13 and the second arm 14.
In addition, in the case where the pressure of the inside of arm 4 is atmospheric pressure, interconnecting piece (the i.e. hand 3 and the second arm of hand 3 and arm 4
The interconnecting piece in portion 14) it can also be constituted in the same manner as the interconnecting piece of the first arm 13 shown in fig. 5 and the second arm 14.That is, hand 3
Can also have the rotation axis 15 of the fixed hand 3 in upper end with the interconnecting piece of arm 4, the retarder 16 of power is transmitted to hand 3, being fixed on the
The frame 57 of the shell 25 of the front end sides of two arms 14 and fixed retarder 16, be configured at rotation axis 15 peripheral side magnetism
Fluid seal apparatus 18, the bellows 19 configured in a manner of the peripheral side for covering rotation axis 15.
In above-mentioned mode, arm 4 is made of first arm 13 and second arm 14, but such as above-mentioned patent
Recorded in Figure 10 of document 1, arm 4 can also be made of first arm and two the second arms connecting with the first arm.
In this case, the central part of the first arm is fixed on to the upper end of rotation axis 15.In addition, such as the figure of above patent document 1
Recorded in 11, robot 1, which can also have, is rotatably coupled the two arms of base end side in body part 5.In addition, arm 4 can also be with
It is made of three or more arms.
It is the substrate of organic el display by the moving object that robot 1 is carried, but by machine in above-mentioned mode
The moving object that people 1 carries can be the glass substrate of liquid crystal display, be also possible to semiconductor crystal wafer etc..In addition, upper
In the mode stated, robot 1 is the robot for carrying moving object, but robot 1 is also possible to for other purposes
Robot.
Description of symbols
1 robot (industrial robot)
3 hands
4 arms
13 first arms (arm)
14 second arms (arm)
15 rotation axis
16 retarders
18 magnetic fluid seal devices
19 bellowss (sealing material holding)
20 rotation stop components
23 output shafts
24 bearings
25 shells (bearing cage part)
28 magnet
29 pole pieces
30 magnetic fluids
31 shells
32 bearings (second bearing)
40,41 o-rings (sealing material holding).
Claims (5)
1. a kind of industrial robot, which is characterized in that have:
Arm；
The rotation axis of the base end side of the fixed arm；
Support the bearing of the rotation axis with being able to rotate；
Keep the bearing cage part of the bearing；
It is configured at the magnetic fluid seal device of the peripheral side of the rotation axis；And
The sealing material holding of the magnetic fluid seal device is kept,
The magnetic fluid seal device has:
Magnet；
Be formed as pole piece cyclic annular and that inner peripheral surface is opposed with the outer peripheral surface of the rotation axis；
The magnetic fluid being held between the inner peripheral surface of the pole piece and the outer peripheral surface of the rotation axis；
Keep the shell of the magnet and the pole piece；And
The outer peripheral surface of the rotation axis and described is configured in such a way that the rotation axis can be relatively rotated relative to the shell
Second bearing between shell,
The sealing material holding keeps the shell are as follows: described when the rotation axis is tilted relative to the bearing
Shell is followed the inclination of the rotation axis and is tilted.
2. a kind of industrial robot, which is characterized in that have:
The arm being made of the multiple arms connected with being mutually able to rotate；
The hand being connect with the front end side of the arm with being able to rotate；
The rotation axis of the fixed arm or the hand；
Support the bearing of the rotation axis with being able to rotate；
Keep the bearing cage part of the bearing；
It is configured at the magnetic fluid seal device of the peripheral side of the rotation axis；And
The sealing material holding of the magnetic fluid seal device is kept,
The magnetic fluid seal device has:
Magnet；
Be formed as pole piece cyclic annular and that inner peripheral surface is opposed with the outer peripheral surface of the rotation axis；
The magnetic fluid being held between the inner peripheral surface of the pole piece and the outer peripheral surface of the rotation axis；
Keep the shell of the magnet and the pole piece；And
The outer peripheral surface of the rotation axis and described is configured in such a way that the rotation axis can be relatively rotated relative to the shell
Second bearing between shell,
The sealing material holding keeps the shell are as follows: described when the rotation axis is tilted relative to the bearing
Shell is followed the inclination of the rotation axis and is tilted.
3. industrial robot according to claim 1 or 2, which is characterized in that
The sealing material holding is the bellows configured in a manner of covering the peripheral side of the rotation axis,
The shell is fixed on one end of the bellows.
4. industrial robot according to claim 1 or 2, which is characterized in that
Having retarder, the retarder has the output shaft for connecting the rotation axis,
The bearing is built in the retarder, and constitutes a part of the retarder, and support with being able to rotate described defeated
Shaft,
The bearing cage part is the shell of the retarder.
5. industrial robot according to claim 1 or 2, which is characterized in that
Have the rotation stop component for the corotation for preventing the rotation axis and the shell,
The rotation stop component is formed by elastomer, and is connect with the shell and the bearing cage part.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2016148109 | 2016-07-28 | ||
| JP2016-148109 | 2016-07-28 | ||
| PCT/JP2017/026444 WO2018021178A1 (en) | 2016-07-28 | 2017-07-21 | Industrial robot |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109476018A true CN109476018A (en) | 2019-03-15 |
| CN109476018B CN109476018B (en) | 2022-06-28 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201780044605.2A Active CN109476018B (en) | 2016-07-28 | 2017-07-21 | Industrial robot |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JP6918698B2 (en) |
| KR (1) | KR102158254B1 (en) |
| CN (1) | CN109476018B (en) |
| WO (1) | WO2018021178A1 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109343475B (en) * | 2018-09-14 | 2024-02-13 | 广州大学 | Amphibious soft robot based on magnetic fluid and motion control method thereof |
| JP7299808B2 (en) * | 2019-09-19 | 2023-06-28 | 川崎重工業株式会社 | TILT ADJUSTMENT DEVICE AND ROBOT INCLUDING THE SAME |
| WO2023062776A1 (en) * | 2021-10-14 | 2023-04-20 | ヤマハ発動機株式会社 | Robot |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020113375A1 (en) * | 2001-02-20 | 2002-08-22 | Gennady Ruderman | Pressure differential sealing device |
| CN201858294U (en) * | 2010-11-03 | 2011-06-08 | 中国第一汽车集团公司 | Full-sealed piston type spring brake cylinder assembly |
| CN102985231A (en) * | 2010-07-14 | 2013-03-20 | 日本电产三协株式会社 | Industrial robot, method for controlling industrial robot, and method for teaching industrial robot |
| CN103596823A (en) * | 2011-04-14 | 2014-02-19 | 纳薄特斯克汽车零部件有限公司 | Brake chamber, boot member, and bush member |
| CN104271321A (en) * | 2013-01-07 | 2015-01-07 | 日本电产三协株式会社 | Industrial robot |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2568731Y2 (en) * | 1992-12-28 | 1998-04-15 | 株式会社ダイヘン | Vacuum chamber dustproof device |
| JP2010007790A (en) * | 2008-06-27 | 2010-01-14 | Daihen Corp | Power transmitting mechanism |
| JP5304601B2 (en) * | 2009-11-10 | 2013-10-02 | 株式会社安川電機 | Arm mechanism and vacuum robot equipped with the same |
| JP6007111B2 (en) | 2013-01-07 | 2016-10-12 | 日本電産サンキョー株式会社 | Industrial robot |
-
2017
- 2017-07-21 CN CN201780044605.2A patent/CN109476018B/en active Active
- 2017-07-21 KR KR1020197002066A patent/KR102158254B1/en active IP Right Grant
- 2017-07-21 WO PCT/JP2017/026444 patent/WO2018021178A1/en active Application Filing
- 2017-07-21 JP JP2017541391A patent/JP6918698B2/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20020113375A1 (en) * | 2001-02-20 | 2002-08-22 | Gennady Ruderman | Pressure differential sealing device |
| CN102985231A (en) * | 2010-07-14 | 2013-03-20 | 日本电产三协株式会社 | Industrial robot, method for controlling industrial robot, and method for teaching industrial robot |
| CN201858294U (en) * | 2010-11-03 | 2011-06-08 | 中国第一汽车集团公司 | Full-sealed piston type spring brake cylinder assembly |
| CN103596823A (en) * | 2011-04-14 | 2014-02-19 | 纳薄特斯克汽车零部件有限公司 | Brake chamber, boot member, and bush member |
| CN104271321A (en) * | 2013-01-07 | 2015-01-07 | 日本电产三协株式会社 | Industrial robot |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2018021178A1 (en) | 2018-02-01 |
| CN109476018B (en) | 2022-06-28 |
| JPWO2018021178A1 (en) | 2019-05-09 |
| KR20190020787A (en) | 2019-03-04 |
| KR102158254B1 (en) | 2020-09-21 |
| JP6918698B2 (en) | 2021-08-11 |
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