CN109470656A - A kind of Novel bidirectional reflectance distribution function fast testing system and method - Google Patents
A kind of Novel bidirectional reflectance distribution function fast testing system and method Download PDFInfo
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- CN109470656A CN109470656A CN201811596838.6A CN201811596838A CN109470656A CN 109470656 A CN109470656 A CN 109470656A CN 201811596838 A CN201811596838 A CN 201811596838A CN 109470656 A CN109470656 A CN 109470656A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N21/4738—Diffuse reflection, e.g. also for testing fluids, fibrous materials
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/47—Scattering, i.e. diffuse reflection
- G01N2021/4704—Angular selective
- G01N2021/4711—Multiangle measurement
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Abstract
The invention discloses a kind of Novel bidirectional reflectance distribution function fast testing system and method, the top that dome-type tests darkroom is equipped with light hole, and the surface of light hole is equipped with testing light source；The Internal Spherical Surface in dome-type test darkroom tightens solid matter and is furnished with multiple photodetectors, and all photodetectors are connected with signal processing system；Dome-type, which is tested in darkroom, is equipped with four-dimensional Work turning table, and sample to be tested is mounted on four-dimensional Work turning table by sample support component, and four-dimensional Work turning table drives the rotation of sample to be tested horizontal plane and vertical plane rotation；The light beam of testing light source is collimated, is incident on sample to be tested through light hole；After sample to be tested scatters, scattered light signal is received by a photoelectric detector incident light, and photodetector output signal to signal processing system is handled, and obtains the bidirectional reflectance distribution function of sample to be tested.The rapid survey of sample bidirectional reflectance distribution function within the scope of 2 π hemispherical spaces can be achieved in the present invention, and measuring accuracy is high.
Description
Technical field
The present invention relates to optical technical fields, and in particular to a kind of Novel bidirectional reflectance distribution function fast testing system and
Method.
Background technique
Bidirectional reflectance distribution function (BRDF) is to propose that it illustrated difference in 1970 by American scholar Nicodemus
Under the conditions of incidence body surface any angle of reflection reflection characteristic, as shown in Figure 1.Bidirectional reflectance distribution function is description material
The important function of diffusing characteristic diffuser, it is the ratio of reflection the width brightness and incident irradiance degree of light radiation；Its mathematic(al) representation are as follows:
Wherein θi,Incidence angle and azimuth for incident light, θr,Angle of reflection and azimuth for reflected light.LrIt is to survey
Face element dA is tried after irradiation in θr,Spoke brightness on direction；EiIt is θi,The surface irradiation degree that incident light generates on direction.
frIt is along direction θr,The irradiation brightness of outgoing and with along incident direction θi,It is incident on the spoke of sample surface generation
The ratio between illumination is penetrated, bidirectional reflectance distribution function is incidence angle θi,, angle of reflection θr,With the function of wavelength X, it is by sample table
The factors such as surface roughness, dielectric constant, illumination wavelength, polarization determine.As it can be seen that the bidirectional reflectance distribution function of measurement sample surfaces
The background irradiance for being incident on test sample surface and sample can connect the diffusing reflection brightness of background radiation, in turn
The reflective character of target can be used to analyze.
There are two types of currently used BRDF measuring devices: one is realize hemi-sphere range inner orientation angle using bicircular arcs track
With the detection of incident angle, as patent " it is a kind of measurement body surface bidirectional reflectance be distributed device ", the patent No.:
2009200033317.X, this measurement method are limited in that arc orbit shading influences its measurement result and by circular arc
Track machining accuracy is not high, directly influences whether that the positioning accuracy of measurement angle is not high, and then causes whole system measurement reliable
Property reduce.
Another device is fixed using light source, and sample is fixed using four-dimensional manipulator, and photodetector may be mounted at vertical
The mode that ± 180 ° of rotations are done in facing directly is completed to incidence angleAnd angle of reflectionMeasurement.As patent is " a kind of
Novel bidirectional reflectance distribution function measuring device ", the patent No.: 201210075733.2, but this mode is limited in that
Photodetector receiving plane is small, it is desirable that the reflected beams angle of flare very little, this, which means that, can only carry out dissipating for mirror article surface
It penetrates, the acquisition for scattering to each optical signal of entire hemispherical space is then difficult to realize if it is rough surface, leads to signal errors.
From the foregoing, it will be observed that the device problem of measurement surface bidirectional reflectance distribution mainly has at present: 1, being difficult to carry out entire 2 online
The measurement of π hemispherical space internal reflection data；2, measuring accuracy is poor, and test macro repetitive error increases；3, system manufacturing process
It is complicated.
Summary of the invention
Aiming at the shortcomings existing in the above problems, the present invention provides a kind of Novel bidirectional reflectance distribution function and quickly surveys
Test system and method can change sample posture by four-dimensional Work turning table, realize that sample is two-way anti-within the scope of 2 π hemispherical spaces
Penetrate the measurement of distribution function.
The invention discloses a kind of Novel bidirectional reflectance distribution function fast testing systems, comprising: dome-type tests darkroom；
The top in dome-type test darkroom is equipped with light hole, and the surface of the light hole is equipped with testing light source；
The Internal Spherical Surface in dome-type test darkroom tightens solid matter and is furnished with multiple photodetectors, all photoelectricity
Detector is connected with signal processing system；
The dome-type test is equipped with four-dimensional Work turning table in darkroom, and sample to be tested is mounted on institute by sample support component
It states on four-dimensional Work turning table, the four-dimension Work turning table drives the sample to be tested horizontal plane rotation and vertical plane rotation.
As a further improvement of the present invention, dome-type test darkroom, which is mounted on collet, constitutes closed half spherical cavity
Body.
As a further improvement of the present invention, the optical path of the testing light source is equipped with collimator, and the collimator is to light
The dome-type is incident to through the light hole after beam collimation to test on dark indoor sample to be tested.
As a further improvement of the present invention, the four-dimensional Work turning table drives 360 ° of the sample to be tested horizontal plane rotations
With 180 ° of pitching of vertical plane.
As a further improvement of the present invention, the signal processing system include: preamplifier, lock phase amplifier and
Computer；
All photodetectors are connected with the preamplifier, and the preamplifier is put with the locking phase position
Big device is connected, and the lock phase amplifier is connected with the computer.
The present invention also provides a kind of Novel bidirectional reflectance distribution function method for rapidly testing, comprising:
The light beam of the testing light source is collimated, through the light hole be incident to dome-type test it is dark it is indoor to
In sample；After sample to be tested scattering, scattered light signal is received incident light by the photodetector, and the photoelectricity is visited
Survey device outputs signal to the signal processing system and is handled, and obtains the bidirectional reflectance distribution function of the sample to be tested；Its
In:
The four-dimension Work turning table drives the sample to be tested horizontal plane rotation and vertical plane rotation, realizes under different angle
The measurement of sample to be tested bidirectional reflectance distribution function.
As a further improvement of the present invention, the output signal of the photodetector is amplified through preamplifier and locking phase
Computer is inputted after device amplification, obtains the bidirectional reflectance distribution function of the sample to be tested.
As a further improvement of the present invention, comprising:
Step 1, the beam path alignment for adjusting test macro；
Step 2 carries out calibration test, adjusts four-dimensional Work turning table, and standard white plate is made to be in the center of four-dimensional Work turning table
Shaft position；
Step 3 gives photodetector making alive by power supply, while cooperating the adjustment of incident optical power, and it is suitable to choose
Signal reading, carries out the calibration of brightness and illumination；
Step 4 is demarcated using reflection angular accuracy of the reflecting mirror to lambda1-wavelength reflectivity 99% to system；
Step 5, to step 3, the test data of step 4 calibration process in 5 ‰ variation range, carry out real in next step
It tests；
Sample to be tested is placed on sample support component by step 6, is opened testing light source, and adjust sample to be tested angle, is made
Light beam after must collimating can be irradiated to sample to be tested surface；
Step 7, incidence angle are fixed, and four-dimensional Work turning table drives sample to be tested horizontal plane to be rotated by 360 °, and are gradually changed to be measured
The azimuth of sample and incident light is turned optical signal and location information by photodetector, preamplifier, lock-in amplifier
It turns to electric signal and reflectance lightness, angle of reflection, azimuth information is automatically recorded by computer；
Step 8 adjusts four-dimensional Work turning table posture, changes incidence angle, repeats step 7, test under another incident angle
Bidirectional reflectance distribution function.
Compared with prior art, the invention has the benefit that
The present invention can fast and accurately measure the bidirectional reflectance distribution function of body surface, since photodetector is in 2 π
It closely arranges in hemispherical space, can sufficiently test reflectance lightness, not will lead to the inaccurate phenomenons of tests such as test leakage, few survey
Occur, and precisely can quickly extrapolate the angle of reflection and azimuth information of reflected light according to photoelectric probe position.
Detailed description of the invention
Fig. 1 is the test schematic of existing bidirectional reflectance distribution function；
Fig. 2 is the structural representation of Novel bidirectional reflectance distribution function fast testing system disclosed in an embodiment of the present invention
Figure.
In figure:
1, testing light source；2, collimator；3, dome-type tests darkroom；4, photodetector；5, sample support component；6, four
Tie up Work turning table；7, preamplifier；8, phase amplifier is locked；9, computer；10, collet；11, sample to be tested.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, ordinary skill people
Member's every other embodiment obtained without making creative work, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that term " center ", "upper", "lower", "left", "right", "vertical",
The orientation or positional relationship of the instructions such as "horizontal", "inner", "outside" be based on the orientation or positional relationship shown in the drawings, merely to
Convenient for description the present invention and simplify description, rather than the device or element of indication or suggestion meaning must have a particular orientation,
It is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In addition, term " first ", " second ",
" third " is used for descriptive purposes only and cannot be understood as indicating or suggesting relative importance.
In the description of the present invention, it is also necessary to which explanation is unless specifically defined or limited otherwise, term " installation ",
" connected ", " connection " shall be understood in a broad sense, for example, it may be being fixedly connected, may be a detachable connection, or integrally connect
It connects；It can be mechanical connection, be also possible to be electrically connected；It can be directly connected, can also indirectly connected through an intermediary, it can
To be the connection inside two elements.For the ordinary skill in the art, above-mentioned term can be understood with concrete condition
Concrete meaning in the present invention.
Based on the test philosophy of bidirectional reflectance distribution function shown in FIG. 1, the present invention establishes a kind of novel bidirectional reflectance
Distribution function fast testing system and method, use computer controlled automatic, so that light source and sample normal form incidence angle
It can consecutive variations, azimuth consecutive variations within the scope of 0-360 °, photodetector can be in entire 2 π within the scope of 0-180 °
Detection scattering brightness and reflected light angle information in hemispherical space, and automatic fast accurate completion target object surface is two-way anti-
Penetrate distribution measuring.
The present invention is described in further detail with reference to the accompanying drawing:
As shown in Fig. 2, the present invention provides a kind of Novel bidirectional reflectance distribution function fast testing system, comprising: test light
Source 1, collimator 2, dome-type test darkroom 3, photodetector 4, sample support component 5, four-dimensional Work turning table 6, preposition amplification
Device 7, lock phase amplifier 8, computer 9 and collet 10；Wherein:
Dome-type test darkroom 3 of the invention, which is buckled on collet 10, constitutes closed semi-spherical cavity, and dome-type tests darkroom 3
It is fixedly mounted with collet 10.
The present invention is equipped with light hole at the top in dome-type test darkroom 3, and the surface of light hole is equipped with testing light source 1,
Optical path between testing light source 1 and light hole is equipped with collimator 2, collimator 2 to after the beam collimation of testing light source 1 through light passing
Hole is incident in dome-type test darkroom 3, the incident light as sample to be tested 11.
Internal Spherical Surface of the present invention in dome-type test darkroom 3 tightens solid matter and is furnished with multiple photodetectors 4, photodetector
4 are fixedly mounted with dome-type test darkroom 3；The search coverage of all photodetectors 4 can cover dome-type in the same time and survey
The hemisphere face in darkroom 3 is tried, the scattering light of sample to be tested 11 surely can be especially thick to large scale detected by photodetector 4
When rough surface sample is tested, it not will lead to the inaccurate phenomenons of tests such as test leakage, few survey and occur.
Photodetector 4 of the invention is connected with signal processing system, and signal processing system includes preamplifier 7, lock
Phase amplifier 8 and computer 9；All photodetectors 4 are connected with preamplifier 7, and preamplifier 7 is put with locking phase position
Big device 8 is connected, and lock phase amplifier 8 is connected with computer 9；In use, the output signal of photodetector 4 is through preamplifier
6 and lock-in amplifier 7 amplify after input computer 9, the processing through computer 9 obtain sample to be tested bidirectional reflectance be distributed letter
Number.
Four-dimensional Work turning table 6 of the invention is placed on the collet 10 in dome-type test darkroom 3, and sample to be tested 11 passes through sample
Product support member 5 is mounted on four-dimensional Work turning table 6, and sample support component 5 is conventional sample clamp, for clamping to test sample
Product；Sample support component 5 can be mounted on four-dimensional Work turning table 6 by fastener；The effect of four-dimensional Work turning table 6 is: driving
The rotation of sample to be tested horizontal plane and vertical plane rotation；Specifically 360 ° of rotations of achievable sample to be tested horizontal plane are bowed with 180 ° of vertical plane
It faces upward, i.e., four-dimensional Work turning table 6 includes horizontal revolving stage portion and pitching rotary portion, and sample to be tested is mounted in pitching rotary portion, pitching
Turntable portion is mounted in horizontal revolving stage portion, and horizontal revolving stage portion is placed on collet, and horizontal revolving stage portion can drive sample to be tested and pitching
Turntable portion realizes 360 ° of rotation in the horizontal plane, and pitching rotary portion can drive sample to be tested to realize on vertical plane that 180 ° are bowed
It faces upward.The structure and connection relationship of the above-mentioned sample support component 5 that above-mentioned function can be achieved and four-dimensional Work turning table 6 are existing normal
Structure is advised, therefore it is not elaborated herein.
The present invention also provides a kind of Novel bidirectional reflectance distribution function method for rapidly testing, comprising:
The light beam of testing light source is collimated, is incident to dome-type through light hole and tests on dark indoor sample to be tested；Enter
Light is penetrated after sample to be tested scatters, scattered light signal is received by a photoelectric detector, and the output signal of photodetector is put before menstruation
Computer is inputted after big device and lock-in amplifier amplification, computer can analyze the angle information for calculating reflected light by program
And luminance information, further calculate the bidirectional reflectance distribution function for obtaining sample to be tested；Wherein:
Four-dimensional Work turning table drives the rotation of sample to be tested horizontal plane and vertical plane rotation, realizes sample to be tested under different angle
The measurement of bidirectional reflectance distribution function.
It is specific:
Test method of the invention, comprising:
Step 1, the beam path alignment for adjusting test macro；
Step 2 carries out calibration test, adjusts four-dimensional Work turning table, and standard white plate (i.e. lambertian) is made to be in four-dimensional work
The cental axial position of turntable；
Step 3 gives photodetector making alive by power supply, while cooperating the adjustment of incident optical power, and it is suitable to choose
Signal reading, carries out the calibration of brightness and illumination；
Step 4 is demarcated using reflection angular accuracy of the reflecting mirror to lambda1-wavelength reflectivity 99% to system；
Step 5, to step 3, the test data of step 4 calibration process in 5 ‰ variation range, carry out real in next step
It tests；
Sample to be tested is placed on sample support component by step 6, is opened testing light source, and adjust sample to be tested angle, is made
Light beam after must collimating can be irradiated to sample to be tested surface；
Step 7, incidence angle are fixed, and four-dimensional Work turning table drives sample to be tested horizontal plane to be rotated by 360 °, and are gradually changed to be measured
The azimuth of sample and incident light is turned optical signal and location information by photodetector, preamplifier, lock-in amplifier
It turns to electric signal and reflectance lightness, angle of reflection, azimuth information is automatically recorded by computer；
Step 8 adjusts four-dimensional Work turning table posture, changes incidence angle, repeats step 7, test under another incident angle
Bidirectional reflectance distribution function；
Step 9: incidence angle test scope is 0-90 °, one group can be tested at interval of certain degree, interval degree can be according to reality
Border test is selected.
Advantages of the present invention are as follows:
1, the present invention can be automatically performed surface bidirectional reflectance distribution measuring in a short time；
2, error of the present invention introduces smaller；
3, the present invention is able to achieve the precise measurement that bidirectional reflectance is distributed in the entire hemispherical space including back scattering；
4, the present invention can accurately measure larger Rough Target surface online.
These are only the preferred embodiment of the present invention, is not intended to restrict the invention, for those skilled in the art
For member, the invention may be variously modified and varied.All within the spirits and principles of the present invention, it is made it is any modification,
Equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (8)
1. a kind of Novel bidirectional reflectance distribution function fast testing system characterized by comprising dome-type tests darkroom；
The top in dome-type test darkroom is equipped with light hole, and the surface of the light hole is equipped with testing light source；
The Internal Spherical Surface in dome-type test darkroom tightens solid matter and is furnished with multiple photodetectors, all photodetections
Device is connected with signal processing system；
The dome-type test is equipped with four-dimensional Work turning table in darkroom, and sample to be tested is mounted on described four by sample support component
It ties up on Work turning table, the four-dimension Work turning table drives the sample to be tested horizontal plane rotation and vertical plane rotation.
2. Novel bidirectional reflectance distribution function fast testing system as described in claim 1, which is characterized in that the dome-type
Test darkroom, which is mounted on collet, constitutes closed semi-spherical cavity.
3. Novel bidirectional reflectance distribution function fast testing system as described in claim 1, which is characterized in that the test light
The optical path in source is equipped with collimator, and the collimator is dark to the dome-type test is incident to through the light hole after beam collimation
On indoor sample to be tested.
4. Novel bidirectional reflectance distribution function fast testing system as described in claim 1, which is characterized in that the four-dimension work
Make turntable and drives 360 ° of the sample to be tested horizontal plane rotations and 180 ° of pitching of vertical plane.
5. Novel bidirectional reflectance distribution function fast testing system as described in claim 1, which is characterized in that at the signal
Reason system includes: preamplifier, locking phase position Amplifier And Computer；
All photodetectors are connected with the preamplifier, the preamplifier and the lock phase amplifier
It is connected, the lock phase amplifier is connected with the computer.
6. a kind of test side of Novel bidirectional reflectance distribution function fast testing system according to any one of claims 1 to 5
Method characterized by comprising
The light beam of the testing light source is collimated, and it is dark indoor to test sample to be incident to the dome-type test through the light hole
On product；Incident light is after sample to be tested scattering, and scattered light signal is received by the photodetector, the photodetector
It outputs signal to the signal processing system to be handled, obtains the bidirectional reflectance distribution function of the sample to be tested；Wherein:
The four-dimension Work turning table drives the sample to be tested horizontal plane rotation and vertical plane rotation, realizes to be measured under different angle
The measurement of sample bidirectional reflectance distribution function.
7. test method as claimed in claim 6, which is characterized in that the output signal of the photodetector is put greatly before menstruation
Computer is inputted after device and lock-in amplifier amplification, obtains the bidirectional reflectance distribution function of the sample to be tested.
8. test method as claimed in claim 7 characterized by comprising
Step 1, the beam path alignment for adjusting test macro；
Step 2 carries out calibration test, adjusts four-dimensional Work turning table, and standard white plate is made to be in the center axle position of four-dimensional Work turning table
It sets；
Step 3 gives photodetector making alive by power supply, while cooperating the adjustment of incident optical power, chooses suitable signal
Reading carries out the calibration of brightness and illumination；
Step 4 is demarcated using reflection angular accuracy of the reflecting mirror to lambda1-wavelength reflectivity 99% to system；
Step 5, to step 3, the test data of step 4 calibration process in 5 ‰ variation range, carry out next step experiment；
Sample to be tested is placed on sample support component by step 6, testing light source is opened, and adjust sample to be tested angle, so that quasi-
Light beam after straight can be irradiated to sample to be tested surface；
Step 7, incidence angle are fixed, and four-dimensional Work turning table drives sample to be tested horizontal plane to be rotated by 360 °, and gradually change sample to be tested
With the azimuth of incident light, converted optical signal and location information to by photodetector, preamplifier, lock-in amplifier
Electric signal automatically records reflectance lightness, angle of reflection, azimuth information by computer；
Step 8 adjusts four-dimensional Work turning table posture, changes incidence angle, repeats step 7, test two-way under another incident angle
Reflectance Distribution Function.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111751328A (en) * | 2020-07-08 | 2020-10-09 | 北京工业大学 | Method for rapidly measuring high-light-reflection space target material |
| CN112816412A (en) * | 2021-01-04 | 2021-05-18 | 北京环境特性研究所 | Full-angle scannable BRDF/BTDF detection system and method |
| CN113607694A (en) * | 2021-08-02 | 2021-11-05 | 上海无线电设备研究所 | High-precision measuring device for bidirectional reflection distribution function of low-scattering coating |
| CN115184282A (en) * | 2022-09-13 | 2022-10-14 | 北京理工大学 | Imaging type scattering property measurement system and measurement method comprising contrast plate |
| CN116772757A (en) * | 2023-08-21 | 2023-09-19 | 国镓芯科(成都)半导体科技有限公司 | Be used for semiconductor processing finished product measurement system |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201378063Y (en) * | 2009-04-13 | 2010-01-06 | 厦门大学 | High-precision laser beam small angle deflecting device based on optical grating |
| CN102162751A (en) * | 2010-08-25 | 2011-08-24 | 中国计量科学研究院 | Method for measuring space optical distribution function |
| CN104101580A (en) * | 2014-07-25 | 2014-10-15 | 中国工程物理研究院应用电子学研究所 | BRDF quick measuring device based on hemisphere array detection |
| CN105466455A (en) * | 2015-12-18 | 2016-04-06 | 中国科学院西安光学精密机械研究所 | Angular accuracy calibration system and method |
| CN108489937A (en) * | 2018-03-30 | 2018-09-04 | 哈尔滨工业大学 | A kind of solid material bidirectional reflectance distribution function measuring device |
| CN209513614U (en) * | 2018-12-26 | 2019-10-18 | 北京工业大学 | A kind of Novel bidirectional reflectance distribution function fast testing system |
-
2018
- 2018-12-26 CN CN201811596838.6A patent/CN109470656A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201378063Y (en) * | 2009-04-13 | 2010-01-06 | 厦门大学 | High-precision laser beam small angle deflecting device based on optical grating |
| CN102162751A (en) * | 2010-08-25 | 2011-08-24 | 中国计量科学研究院 | Method for measuring space optical distribution function |
| CN104101580A (en) * | 2014-07-25 | 2014-10-15 | 中国工程物理研究院应用电子学研究所 | BRDF quick measuring device based on hemisphere array detection |
| CN105466455A (en) * | 2015-12-18 | 2016-04-06 | 中国科学院西安光学精密机械研究所 | Angular accuracy calibration system and method |
| CN108489937A (en) * | 2018-03-30 | 2018-09-04 | 哈尔滨工业大学 | A kind of solid material bidirectional reflectance distribution function measuring device |
| CN209513614U (en) * | 2018-12-26 | 2019-10-18 | 北京工业大学 | A kind of Novel bidirectional reflectance distribution function fast testing system |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111751328A (en) * | 2020-07-08 | 2020-10-09 | 北京工业大学 | Method for rapidly measuring high-light-reflection space target material |
| CN111751328B (en) * | 2020-07-08 | 2021-04-09 | 北京工业大学 | Method for rapidly measuring high-light-reflection space target material |
| CN112816412A (en) * | 2021-01-04 | 2021-05-18 | 北京环境特性研究所 | Full-angle scannable BRDF/BTDF detection system and method |
| CN113607694A (en) * | 2021-08-02 | 2021-11-05 | 上海无线电设备研究所 | High-precision measuring device for bidirectional reflection distribution function of low-scattering coating |
| CN113607694B (en) * | 2021-08-02 | 2023-09-19 | 上海无线电设备研究所 | High-precision measuring device for bidirectional reflection distribution function of low-scattering coating |
| CN115184282A (en) * | 2022-09-13 | 2022-10-14 | 北京理工大学 | Imaging type scattering property measurement system and measurement method comprising contrast plate |
| CN116772757A (en) * | 2023-08-21 | 2023-09-19 | 国镓芯科(成都)半导体科技有限公司 | Be used for semiconductor processing finished product measurement system |
| CN116772757B (en) * | 2023-08-21 | 2023-10-24 | 国镓芯科(成都)半导体科技有限公司 | Be used for semiconductor processing finished product measurement system |
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