CN109470396A - A kind of miniature six-dimensional force/torque sensor - Google Patents
A kind of miniature six-dimensional force/torque sensor Download PDFInfo
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- CN109470396A CN109470396A CN201811373006.8A CN201811373006A CN109470396A CN 109470396 A CN109470396 A CN 109470396A CN 201811373006 A CN201811373006 A CN 201811373006A CN 109470396 A CN109470396 A CN 109470396A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L5/00—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes
- G01L5/16—Apparatus for, or methods of, measuring force, work, mechanical power, or torque, specially adapted for specific purposes for measuring several components of force
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Abstract
The present invention relates to a kind of miniature six-dimensional force/torque sensors, belong to field of intelligent control technology.Miniature six-dimensional force/torque sensor structure of the invention is made of double Z shaped cambered surface elastomer and signal processing circuit two parts.Wherein, elastomer is connected in series by two Z-type thin walled beam structures, and centre is contact force region.Compared to the elastomer structure of other cylindrical types, which is designed as arch thin-wall construction, can be easily mounted to the outer surface of multiple-degree-of-freedom mechanism, such as: each finger joint of humanoid dexterous hand finger, while also a part as finger-joint body construction.
Description
Technical field
The present invention relates to a kind of miniature six-dimensional force/torque sensors, belong to field of intelligent control technology.
Background technique
With the continuous improvement of robot automtion and apery level, intelligent control mentions the force-sensing ability of sensor-based system
Higher requirement is gone out, the perception of six-dimensional space power and torque is to realize the key technology of robot automtion and dexterous manipulation.
Still in its infancy, the outer dimension of existing product is larger, unfavorable for the Development Level of domestic and international six-dimensional force/torque sensor
It is integrated with Mechatronic Systems in installing.
Humanoid dextrous hand is when grasping and operating object, in addition to finger tip end is contacted with object, grabs process in envelope
In, each finger-joint is in contact with object and generates contact force.Six-dimensional force/torque sensor can directly detect dexterity
The each articulations digitorum manus of hand and direct contact force and the moment information being grasped between object are Dextrous Hand multifingered manipulation and submissive control
System provides the most complicated, the highest force sensing of technical difficulty in power perception information abundant and the sensor-based system of Dextrous Hand
Device.
Six-dimensional force/torque sensor elasticity of traditional cross girder construction and the current cylindrical structure of prevalence both at home and abroad
Body is generally installed at mechanical arm and anthropomorphic robot wrist, ankle, and on the one hand its contour structure size is larger, is not easy to pacify
Finger structure loaded on Dextrous Hand；On the other hand, the sensor of cylindrical structure can only be installed on clever hand finger top, as
Finger tip six-dimension force sensor uses, and can not be installed on the other joints of finger.Therefore, if Dextrous Hand carries out strength and grasps operation
When, other than the force feedback information between finger tip and object, the contact force letter between middle finger joint and root finger joint and object can not be obtained
Breath.
Summary of the invention
Technology of the invention solves the problems, such as: overcome the deficiencies in the prior art, proposes a kind of miniature six-dimensional force/moment sensing
Device, the sensor are a kind of double Z shaped, cambered surface thin-walled elastomer structure, small in size, light-weight, to be easy to Mechatronic Systems integrated, can
It realizes to the measurement of six-dimensional space power/torque.The sensor can be integrated in each finger-joint of humanoid dextrous hand, wrap in strength
When network grasping and various posture dexterous manipulation objects, richer power perception information can be provided in Multi-contact.
The technical solution of the invention is as follows:
A kind of miniature six-dimensional force/torque sensor, the sensor include that bottom plate, two side plates, force bearing plate, two Z-types are thin
Wall beam, signal condition and amplifying circuit, AD conversion and DSP processing circuit and 24 foil gauges；
Two side plates are respectively the first side plate and the second side plate；
Two Z-type thin walled beams are respectively the first Z-type thin walled beam and the second Z-type thin walled beam；
24 foil gauges are respectively that 1# foil gauge, 2# foil gauge, 3# foil gauge, 4# foil gauge, 5# foil gauge, 6# are answered
Become piece, 7# foil gauge, 8# foil gauge, 9# foil gauge, 10# foil gauge, 11# foil gauge, 12# foil gauge, 13# foil gauge, 14# to answer
Become piece, 15# foil gauge, 16# foil gauge, 17# foil gauge, 18# foil gauge, 19# foil gauge, 20# foil gauge, 21# foil gauge,
22# foil gauge, 23# foil gauge, 24# foil gauge；
First side plate is fixedly mounted on the side of bottom plate, and the second side plate is fixedly mounted on the other side of bottom plate, signal condition
And amplifying circuit, AD conversion and DSP processing circuit are fixedly mounted on bottom plate, and between the first side plate and the second side plate；
First side plate, the first Z-type thin walled beam, force bearing plate, the second Z-type thin walled beam and the second side plate are sequentially connected, and are one
One end of forming structure, i.e. the first Z-type thin walled beam is fixedly connected with the top of the first side plate, the first Z-type thin walled beam it is another
End is fixedly connected with one end of force bearing plate, and the other end of force bearing plate is fixedly connected with one end of the second Z-type thin walled beam, the second Z-type
The other end of thin walled beam is fixedly connected with the top of the second side plate；
First Z-type thin walled beam includes stringer A, crossbeam A and stringer A '；
Second Z-type thin walled beam includes stringer B, crossbeam B and stringer B '；
First Z-type thin walled beam is to be connect by stringer A with the first side plate top when being fixedly connected with the first side plate top；
Second Z-type thin walled beam is to be connect by stringer B with the second side plate top when being fixedly connected with the second side plate top；
1# foil gauge is mounted on the outer surface of stringer A；
2# foil gauge is mounted on the inner surface of stringer A；
3# foil gauge is mounted on the lateral surface of stringer A；
4# foil gauge is mounted on the medial surface of stringer A；
5# foil gauge is mounted on the outer surface of crossbeam A；
6# foil gauge is mounted on the inner surface of crossbeam A；
7# foil gauge is mounted on the left side of crossbeam A；
8# foil gauge is mounted on the right side of crossbeam A；
9# foil gauge is mounted on the outer surface of stringer B；
10# foil gauge is mounted on the inner surface of stringer B；
11# foil gauge is mounted on the lateral surface of stringer B；
12# foil gauge is mounted on the medial surface of stringer B；
13# foil gauge is mounted on the outer surface of crossbeam B；
14# foil gauge is mounted on the inner surface of crossbeam B；
15# foil gauge is mounted on the left side of crossbeam B；
16# foil gauge is mounted on the right side of crossbeam B；
17# foil gauge is mounted on the outer surface of crossbeam B and the junction stringer B '；
18# foil gauge is mounted on the inner surface of crossbeam B and the junction stringer B '；
19# foil gauge is mounted on the outer surface of crossbeam A and the junction stringer A '；
20# foil gauge is mounted on the inner surface of crossbeam A and the junction stringer A '；
21# foil gauge is mounted on the left side of crossbeam B；
22# foil gauge is mounted on the right side of crossbeam B；
23# foil gauge is mounted on the left side of crossbeam A；
24# foil gauge is mounted on the right side of crossbeam A.
24 foil gauges form six full-bridge temperature-compensation circuits, as follows respectively:
7# foil gauge, 8# foil gauge, 15# foil gauge and 16# foil gauge form one group of full-bridge temperature-compensation circuit, for surveying
The space for measuring X-direction contacts force component；
3# foil gauge, 4# foil gauge, 11# foil gauge and 12# foil gauge form one group of full-bridge temperature-compensation circuit, for surveying
The space for measuring Y-direction contacts force component；
1# foil gauge, 2# foil gauge, 9# foil gauge and 10# foil gauge form one group of full-bridge temperature-compensation circuit, for surveying
The space for measuring Z-direction contacts force component；
5# foil gauge, 6# foil gauge, 13# foil gauge and 14# foil gauge form one group of full-bridge temperature-compensation circuit, for surveying
Measure the space torque force component of X-direction；
17# foil gauge, 18# foil gauge, 19# foil gauge and 20# foil gauge form one group of full-bridge temperature-compensation circuit, are used for
Measure the space torque force component of Y-direction；
21# foil gauge, 22# foil gauge, 23# foil gauge and 24# foil gauge form one group of full-bridge temperature-compensation circuit, are used for
Measure the space torque force component of Z-direction；
The weak voltage signal (mV step voltage) of six full-bridge temperature-compensation circuits output first passes around signal condition and amplification
Circuit exports the voltage signal of 5-12V after being handled, after the voltage signal of 5-12V is using AD conversion and DSP processing circuit
It is converted into digital signal, obtains six-dimensional space power/torque information；
The largest enveloping of the sensor is having a size of 20mm*12mm*12mm.
Beneficial effect
(1) miniature six-dimensional force/torque sensor of the invention has the raising of intelligent robot and industrial automation level
There is important application value, suitable for the motion control of multiple-degree-of-freedom mechanism, medical robot, industrial machinery arm, bionical machine
Device people etc. not only requires the shape of manpower particularly suitable for the multi-finger clever hand of anthropomorphic robot, it is often more important that tool
There is the accurate force-sensing ability of manpower, imitates manpower and realize various dexterous manipulations.
(2) double Z shaped, curved surface thin-wall construction miniature six-dimensional force/torque sensor of the invention.The sensor can be integrated in
Each finger-joint of humanoid dextrous hand can connect in the grasping of strength envelope and various posture dexterous manipulation objects in multiple spot
Richer power perception information is provided when touching, while not will increase the outer dimension of finger.
(3) miniature six-dimensional force/torque sensor structure of the invention is by double Z shaped cambered surface elastomer and signal processing circuit two
Part forms.Wherein, elastomer is connected in series by two Z-type thin walled beam structures, and centre is contact force region.Compared to other circles
The elastomer structure of column type, the structure are designed as arch thin-wall construction, can be easily mounted to the outer surface of multiple-degree-of-freedom mechanism, such as:
Each finger joint of humanoid dexterous hand finger, while also a part as finger-joint body construction.
(4) equally based on the measuring principle of resistance-strain type, elastomer structure uses aluminum alloy materials, the Z-type in two sides
The miniature resistance strain gage of thin walled beam structure surface mount carries out a group bridge using the lead-out wire of foil gauge, constitute favour stone full-bridge (or
Half-bridge) measuring circuit, as shown in Figure 3.24 miniature foil gauges are arranged in pairs in thin walled beam structure two sides in figure, constitute 6 groups of bands
The full bridge measurement circuit of temperature-compensating, the output voltage of each bridge and strain are approximately linear relationship, are realized to six-dimensional space power
With the measurement of torque.
(5) the arched elastic body structure of the invention with double Z shaped thin walled beam；The mounting position of miniature foil gauge and group bridge side
Formula；Six-dimensional force/torque sensor bears the position of external force load and is converted to six-dimensional space power/moment components method；Bullet
Property body structure use aluminum alloy materials；Inside each Z-type thin walled beam in orthogonal structure, the stickup direction of foil gauge also phase
It is mutually vertical；In the foil gauge that thin walled beam two sides mount in pairs, the length direction keeping parallelism in direction and place beam；The 6 DOF
Power/torque sensor is installed on the finger-joint of robot humanoid dextrous hand, while also one as finger-joint body construction
Part；Six-dimensional force/torque sensor elastomer has the appearance of semicircular arc；Six-dimensional force/torque sensor elastomer opposite collection
Subtracted at signal processing and amplifying circuit, A/D converter circuit and DSP signal processing circuit using the way of output of number bus
The quantity of few electrical cable.
Detailed description of the invention
Fig. 1 is the schematic perspective view of sensor of the invention；
Fig. 2 is the distribution schematic diagram of the foil gauge of sensor of the invention；
Fig. 3 is structural schematic diagram when sensor of the invention is applied to humanoid dextrous hand finger-joint；
Fig. 4 is full-bridge temperature-compensation circuit schematic diagram (X-direction contact force component)；
Fig. 5 is full-bridge temperature-compensation circuit schematic diagram (Y-direction contact force component)；
Fig. 6 is full-bridge temperature-compensation circuit schematic diagram (Z-direction contact force component)；
Fig. 7 is full-bridge temperature-compensation circuit schematic diagram (X-direction torque component)；
Fig. 8 is full-bridge temperature-compensation circuit schematic diagram (Y-direction torque component)；
Fig. 9 is full-bridge temperature-compensation circuit schematic diagram (Z-direction torque component).
Specific embodiment
Measuring principle based on resistance-strain type, elastomer structure use aluminum alloy materials, the Z-type thin walled beam knot in two sides
The miniature resistance strain gage of structure surface mount carries out a group bridge using the lead-out wire of foil gauge, constitutes favour stone full-bridge (or half-bridge) and surveys
Measure circuit.24 miniature foil gauges are arranged in pairs in thin walled beam structure two sides, constitute 6 groups of full bridge measurement electricity with temperature-compensating
Road, the output voltage of each bridge and strain are approximately linear relationship, realize the measurement to six-dimensional space power and torque.
The stickup direction of each pair of foil gauge on arch thin walled beam structure and the length direction of beam are parallel to each other, each Z
Orthogonal two parts inside type thin walled beam structure, the stickup direction of foil gauge is mutually perpendicular to, realizes in patch mode
Decoupling spatially.
Six-dimensional force/torque sensor uses the principle of nearest lead, by signal processing and amplifying circuit, A/D converter circuit with
And DSP processing circuit is integrated in elastomer structure body interior, as shown in Figure 2.Six-dimensional force/torque is defeated by 6 road measuring bridges
Weakness signal out, and then pass through signal condition and amplifying circuit, the analog signal of 0~12V is converted to, is number by AD conversion
Then signal is carried out algorithm calibration and decoupling operation in DSP processing circuit, is finally exported in the form of number bus.This method
Both the quality of six-dimension force sensor measuring signal and the reliability of system had been improved, while electrical connection can be considerably reduced
The quantity of line only retains 2 power supply lines and 2 bus cables, helps to realize the height collection of sensor and robot system
At.
The stickup direction of each pair of foil gauge on arch thin walled beam structure and the length direction of beam are parallel to each other, each Z
Orthogonal two parts inside type thin walled beam structure, the stickup direction of foil gauge is mutually perpendicular to, realizes in patch mode
Decoupling spatially.
Embodiment
As depicted in figs. 1 and 2, a kind of miniature six-dimensional force/torque sensor, the sensor include bottom plate, two side plates, hold
Power plate, two Z-type thin walled beams, signal condition and amplifying circuit, AD conversion and DSP processing circuit and 24 foil gauges；
Two side plates are respectively the first side plate and the second side plate；
Two Z-type thin walled beams are respectively the first Z-type thin walled beam and the second Z-type thin walled beam；
24 foil gauges are respectively that 1# foil gauge, 2# foil gauge, 3# foil gauge, 4# foil gauge, 5# foil gauge, 6# are answered
Become piece, 7# foil gauge, 8# foil gauge, 9# foil gauge, 10# foil gauge, 11# foil gauge, 12# foil gauge, 13# foil gauge, 14# to answer
Become piece, 15# foil gauge, 16# foil gauge, 17# foil gauge, 18# foil gauge, 19# foil gauge, 20# foil gauge, 21# foil gauge,
22# foil gauge, 23# foil gauge, 24# foil gauge；
First side plate is fixedly mounted on the side of bottom plate, and the second side plate is fixedly mounted on the other side of bottom plate, signal condition
And amplifying circuit, AD conversion and DSP processing circuit are fixedly mounted on bottom plate, and between the first side plate and the second side plate；
First side plate, the first Z-type thin walled beam, force bearing plate, the second Z-type thin walled beam and the second side plate are sequentially connected, and are one
One end of forming structure, i.e. the first Z-type thin walled beam is fixedly connected with the top of the first side plate, the first Z-type thin walled beam it is another
End is fixedly connected with one end of force bearing plate, and the other end of force bearing plate is fixedly connected with one end of the second Z-type thin walled beam, the second Z-type
The other end of thin walled beam is fixedly connected with the top of the second side plate；
First Z-type thin walled beam includes stringer A, crossbeam A and stringer A '；
Second Z-type thin walled beam includes stringer B, crossbeam B and stringer B '；
First Z-type thin walled beam is to be connect by stringer A with the first side plate top when being fixedly connected with the first side plate top；
Second Z-type thin walled beam is to be connect by stringer B with the second side plate top when being fixedly connected with the second side plate top；
1# foil gauge is mounted on the outer surface of stringer A；
2# foil gauge is mounted on the inner surface of stringer A；
3# foil gauge is mounted on the lateral surface of stringer A；
4# foil gauge is mounted on the medial surface of stringer A；
5# foil gauge is mounted on the outer surface of crossbeam A；
6# foil gauge is mounted on the inner surface of crossbeam A；
7# foil gauge is mounted on the left side of crossbeam A；
8# foil gauge is mounted on the right side of crossbeam A；
9# foil gauge is mounted on the outer surface of stringer B；
10# foil gauge is mounted on the inner surface of stringer B；
11# foil gauge is mounted on the lateral surface of stringer B；
12# foil gauge is mounted on the medial surface of stringer B；
13# foil gauge is mounted on the outer surface of crossbeam B；
14# foil gauge is mounted on the inner surface of crossbeam B；
15# foil gauge is mounted on the left side of crossbeam B；
16# foil gauge is mounted on the right side of crossbeam B；
17# foil gauge is mounted on the outer surface of crossbeam B and the junction stringer B '；
18# foil gauge is mounted on the inner surface of crossbeam B and the junction stringer B '；
19# foil gauge is mounted on the outer surface of crossbeam A and the junction stringer A '；
20# foil gauge is mounted on the inner surface of crossbeam A and the junction stringer A '；
21# foil gauge is mounted on the left side of crossbeam B；
22# foil gauge is mounted on the right side of crossbeam B；
23# foil gauge is mounted on the left side of crossbeam A；
24# foil gauge is mounted on the right side of crossbeam A.
As shown in Fig. 4-Fig. 9,24 foil gauges form six full-bridge temperature-compensation circuits, as follows respectively:
7# foil gauge, 8# foil gauge, 15# foil gauge and 16# foil gauge form one group of full-bridge temperature-compensation circuit, for surveying
The space for measuring X-direction contacts force component；
3# foil gauge, 4# foil gauge, 11# foil gauge and 12# foil gauge form one group of full-bridge temperature-compensation circuit, for surveying
The space for measuring Y-direction contacts force component；
1# foil gauge, 2# foil gauge, 9# foil gauge and 10# foil gauge form one group of full-bridge temperature-compensation circuit, for surveying
The space for measuring Z-direction contacts force component；
5# foil gauge, 6# foil gauge, 13# foil gauge and 14# foil gauge form one group of full-bridge temperature-compensation circuit, for surveying
Measure the space torque force component of X-direction；
17# foil gauge, 18# foil gauge, 19# foil gauge and 20# foil gauge form one group of full-bridge temperature-compensation circuit, are used for
Measure the space torque force component of Y-direction；
21# foil gauge, 22# foil gauge, 23# foil gauge and 24# foil gauge form one group of full-bridge temperature-compensation circuit, are used for
Measure the space torque force component of Z-direction；
The weak voltage signal (mV step voltage) of six full-bridge temperature-compensation circuits output first passes around signal condition and amplification
Circuit exports the voltage signal of 5-12V after being handled, after the voltage signal of 5-12V is using AD conversion and DSP processing circuit
It is converted into digital signal, obtains six-dimensional space power/torque information；
The largest enveloping of the sensor is having a size of 20mm*12mm*12mm.
Relationship between the six-dimensional force output signal and six bridge output voltages of sensor is as follows:
QT=GUT
Wherein:
Q=(Fx,Fy,Fz,Mx,My,Mz) represent power and torque suffered on elastomer；
U=(U01,U02,U03,U04,U05,U06) it is respectively the voltage signal that six road electric bridges export；
G is the calibration coefficient matrix of six bridge of six-dimension force sensor.
Structural schematic diagram when by the sensor application to humanoid dextrous hand finger-joint is as shown in Figure 3.
Claims (10)
1. a kind of miniature six-dimensional force/torque sensor, it is characterised in that: the sensor include bottom plate, two side plates, force bearing plate,
Two Z-type thin walled beams, signal condition and amplifying circuit, AD conversion and DSP processing circuit and 24 foil gauges；
Two side plates are respectively the first side plate and the second side plate；
Two Z-type thin walled beams are respectively the first Z-type thin walled beam and the second Z-type thin walled beam；
First side plate is fixedly mounted on the side of bottom plate, and the second side plate is fixedly mounted on the other side of bottom plate；
First side plate, the first Z-type thin walled beam, force bearing plate, the second Z-type thin walled beam and the second side plate are sequentially connected, and are integrated into
Type structure；
24 foil gauges are mounted on the first Z-type thin walled beam and the second Z-type thin walled beam.
2. a kind of miniature six-dimensional force/torque sensor according to claim 1, it is characterised in that: the first Z-type thin walled beam packet
Include stringer A, crossbeam A and stringer A '；Second Z-type thin walled beam includes stringer B, crossbeam B and stringer B '；
First Z-type thin walled beam is to be connect by stringer A with the first side plate top when being fixedly connected with the first side plate top；
Second Z-type thin walled beam is to be connect by stringer B with the second side plate top when being fixedly connected with the second side plate top；
24 foil gauges are respectively 1# foil gauge, 2# foil gauge, 3# foil gauge, 4# foil gauge, 5# foil gauge, 6# strain
Piece, 7# foil gauge, 8# foil gauge, 9# foil gauge, 10# foil gauge, 11# foil gauge, 12# foil gauge, 13# foil gauge, 14# strain
Piece, 15# foil gauge, 16# foil gauge, 17# foil gauge, 18# foil gauge, 19# foil gauge, 20# foil gauge, 21# foil gauge, 22#
Foil gauge, 23# foil gauge, 24# foil gauge.
3. a kind of miniature six-dimensional force/torque sensor according to claim 2, it is characterised in that:
1# foil gauge is mounted on the outer surface of stringer A；
2# foil gauge is mounted on the inner surface of stringer A；
3# foil gauge is mounted on the lateral surface of stringer A；
4# foil gauge is mounted on the medial surface of stringer A；
5# foil gauge is mounted on the outer surface of crossbeam A；
6# foil gauge is mounted on the inner surface of crossbeam A；
7# foil gauge is mounted on the left side of crossbeam A；
8# foil gauge is mounted on the right side of crossbeam A；
9# foil gauge is mounted on the outer surface of stringer B；
10# foil gauge is mounted on the inner surface of stringer B；
11# foil gauge is mounted on the lateral surface of stringer B；
12# foil gauge is mounted on the medial surface of stringer B；
13# foil gauge is mounted on the outer surface of crossbeam B；
14# foil gauge is mounted on the inner surface of crossbeam B；
15# foil gauge is mounted on the left side of crossbeam B；
16# foil gauge is mounted on the right side of crossbeam B；
17# foil gauge is mounted on the outer surface of crossbeam B and the junction stringer B '；
18# foil gauge is mounted on the inner surface of crossbeam B and the junction stringer B '；
19# foil gauge is mounted on the outer surface of crossbeam A and the junction stringer A '；
20# foil gauge is mounted on the inner surface of crossbeam A and the junction stringer A '；
21# foil gauge is mounted on the left side of crossbeam B；
22# foil gauge is mounted on the right side of crossbeam B；
23# foil gauge is mounted on the left side of crossbeam A；
24# foil gauge is mounted on the right side of crossbeam A；
24 foil gauges form six full-bridge temperature-compensation circuits.
4. a kind of miniature six-dimensional force/torque sensor according to claim 1, it is characterised in that: 7# foil gauge, 8# strain
Piece, 15# foil gauge and 16# foil gauge form one group of full-bridge temperature-compensation circuit, for measuring the space contact force point of X-direction
Amount.
5. a kind of miniature six-dimensional force/torque sensor according to claim 1, it is characterised in that: 3# foil gauge, 4# strain
Piece, 11# foil gauge and 12# foil gauge form one group of full-bridge temperature-compensation circuit, for measuring the space contact force point of Y-direction
Amount.
6. a kind of miniature six-dimensional force/torque sensor according to claim 1, it is characterised in that: 1# foil gauge, 2# strain
Piece, 9# foil gauge and 10# foil gauge form one group of full-bridge temperature-compensation circuit, and the space for measuring Z-direction contacts force component.
7. a kind of miniature six-dimensional force/torque sensor according to claim 1, it is characterised in that: 5# foil gauge, 6# strain
Piece, 13# foil gauge and 14# foil gauge form one group of full-bridge temperature-compensation circuit, for measuring the space torsional forces point of X-direction
Amount.
8. a kind of miniature six-dimensional force/torque sensor according to claim 1, it is characterised in that: 17# foil gauge, 18# are answered
Become piece, 19# foil gauge and 20# foil gauge and form one group of full-bridge temperature-compensation circuit, for measuring the space torsional forces point of Y-direction
Amount.
9. a kind of miniature six-dimensional force/torque sensor according to claim 1, it is characterised in that: 21# foil gauge, 22# are answered
Become piece, 23# foil gauge and 24# foil gauge and form one group of full-bridge temperature-compensation circuit, for measuring the space torsional forces point of Z-direction
Amount.
10. a kind of miniature six-dimensional force/torque sensor according to claim 3, it is characterised in that: six full-bridge temperature are mended
The mV magnitude voltage signals for repaying circuit output first pass around signal condition and amplifying circuit handled after export the voltage letter of 5-12V
Number, the voltage signal of 5-12V obtains six-dimensional space power/power using digital signal is converted into after AD conversion and DSP processing circuit
The information of square；
The largest enveloping of the sensor is having a size of 20mm*12mm*12mm.
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111198062A (en) * | 2020-01-09 | 2020-05-26 | 安徽农业大学 | Strain type six-dimensional force sensor |
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| CN111198062A (en) * | 2020-01-09 | 2020-05-26 | 安徽农业大学 | Strain type six-dimensional force sensor |
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| CN109470396B (en) | 2020-07-14 |
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