CN109470282A - 一种悬臂梁式纸基传感器及其制备方法 - Google Patents
一种悬臂梁式纸基传感器及其制备方法 Download PDFInfo
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- CN109470282A CN109470282A CN201811623048.2A CN201811623048A CN109470282A CN 109470282 A CN109470282 A CN 109470282A CN 201811623048 A CN201811623048 A CN 201811623048A CN 109470282 A CN109470282 A CN 109470282A
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
- G01L1/2287—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges constructional details of the strain gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/12—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by alteration of electrical resistance
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
Abstract
Description
Claims (10)
Priority Applications (1)
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CN201811623048.2A CN109470282A (zh) | 2018-12-28 | 2018-12-28 | 一种悬臂梁式纸基传感器及其制备方法 |
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CN201811623048.2A CN109470282A (zh) | 2018-12-28 | 2018-12-28 | 一种悬臂梁式纸基传感器及其制备方法 |
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CN201811623048.2A Pending CN109470282A (zh) | 2018-12-28 | 2018-12-28 | 一种悬臂梁式纸基传感器及其制备方法 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109813469A (zh) * | 2019-03-21 | 2019-05-28 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | 一种可多组压力测量的纸基压力传感器及其制备方法 |
CN110824195A (zh) * | 2019-11-19 | 2020-02-21 | 华东交通大学 | 一种基于石墨烯双稳态物理转换的加速度传感器 |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1786718A (zh) * | 2005-11-01 | 2006-06-14 | 中国科学院上海微***与信息技术研究所 | 悬臂梁-质量块结构的吸合时间式数字加速度传感器 |
JP2007256046A (ja) * | 2006-03-23 | 2007-10-04 | Matsushita Electric Ind Co Ltd | 加速度センサ |
US20140224018A1 (en) * | 2011-08-01 | 2014-08-14 | President And Fellows Of Harvard College | MEMS Force Sensors Fabricated Using Paper Substrates |
CN205607997U (zh) * | 2016-05-12 | 2016-09-28 | 南京信息工程大学 | 基于巨压阻结构的悬臂梁生化传感器 |
CN106872015A (zh) * | 2017-02-22 | 2017-06-20 | 重庆邮电大学 | 一种光纤型振动传感测量*** |
CN108007480A (zh) * | 2017-11-24 | 2018-05-08 | 苏州大学 | 柔性传感器的制备方法 |
CN108318059A (zh) * | 2018-02-12 | 2018-07-24 | 清华大学 | 纸基传感器及其制备方法 |
CN209181802U (zh) * | 2018-12-28 | 2019-07-30 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | 一种悬臂梁式纸基传感器 |
-
2018
- 2018-12-28 CN CN201811623048.2A patent/CN109470282A/zh active Pending
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1786718A (zh) * | 2005-11-01 | 2006-06-14 | 中国科学院上海微***与信息技术研究所 | 悬臂梁-质量块结构的吸合时间式数字加速度传感器 |
JP2007256046A (ja) * | 2006-03-23 | 2007-10-04 | Matsushita Electric Ind Co Ltd | 加速度センサ |
US20140224018A1 (en) * | 2011-08-01 | 2014-08-14 | President And Fellows Of Harvard College | MEMS Force Sensors Fabricated Using Paper Substrates |
CN205607997U (zh) * | 2016-05-12 | 2016-09-28 | 南京信息工程大学 | 基于巨压阻结构的悬臂梁生化传感器 |
CN106872015A (zh) * | 2017-02-22 | 2017-06-20 | 重庆邮电大学 | 一种光纤型振动传感测量*** |
CN108007480A (zh) * | 2017-11-24 | 2018-05-08 | 苏州大学 | 柔性传感器的制备方法 |
CN108318059A (zh) * | 2018-02-12 | 2018-07-24 | 清华大学 | 纸基传感器及其制备方法 |
CN209181802U (zh) * | 2018-12-28 | 2019-07-30 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | 一种悬臂梁式纸基传感器 |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109813469A (zh) * | 2019-03-21 | 2019-05-28 | 江苏集萃微纳自动化***与装备技术研究所有限公司 | 一种可多组压力测量的纸基压力传感器及其制备方法 |
CN110824195A (zh) * | 2019-11-19 | 2020-02-21 | 华东交通大学 | 一种基于石墨烯双稳态物理转换的加速度传感器 |
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Address after: 215100 South 3rd and 4th Floors of Huanxiu Lake Building, Xiangcheng High-speed Railway New Town, Suzhou City, Jiangsu Province Applicant after: JIANGSU JICUI MICRO-NANO AUTOMATION SYSTEM AND EQUIPMENT TECHNOLOGY RESEARCH INSTITUTE Co.,Ltd. Address before: 215100 F003 workstation, 3rd floor, 58 South Tiancheng Road, Xiangcheng High-speed Railway New Town, Suzhou City, Jiangsu Province Applicant before: JIANGSU JICUI MICRO-NANO AUTOMATION SYSTEM AND EQUIPMENT TECHNOLOGY RESEARCH INSTITUTE Co.,Ltd. |
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Application publication date: 20190315 |