CN109465740A - A kind of grinding price fixing, grinding device and grinding method - Google Patents
A kind of grinding price fixing, grinding device and grinding method Download PDFInfo
- Publication number
- CN109465740A CN109465740A CN201811611799.2A CN201811611799A CN109465740A CN 109465740 A CN109465740 A CN 109465740A CN 201811611799 A CN201811611799 A CN 201811611799A CN 109465740 A CN109465740 A CN 109465740A
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- China
- Prior art keywords
- grinding
- price fixing
- cooling line
- liquid
- price
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B55/00—Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
- B24B55/02—Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Grinding-Machine Dressing And Accessory Apparatuses (AREA)
Abstract
The present invention provides a kind of grinding price fixing, grinding device and grinding method, wherein, grinding price fixing includes price fixing ontology, the middle part of the price fixing ontology is equipped with the centre bore for installing shaft, the price fixing is set inside the body cooling line, the surface setting inlet and liquid outlet, the inlet of the price fixing ontology are connected to one end of the cooling line, and the liquid outlet is connected to the other end of the cooling line.Grinding price fixing structure according to an embodiment of the present invention is simple, and lapping liquid can be made to be maintained within the scope of normal temperature, improves the quality of workpiece grinding, while reducing production and management cost.
Description
Technical field
The present invention relates to semiconductor processing technology field, in particular to a kind of grinding price fixing, grinding device and grinding method.
Background technique
In the prior art the device of grinding crystal wafer only only control be provided to grinding equipment lapping liquid temperature and
The parameter of equipment improves the grinding effect of wafer, thus is difficult have the processing quality for greatly improving wafer.Therefore, it may occur that brilliant
The quality that the end value of the angularity (Warp) of the measurement result total thickness variations (TTV) or wafer of circular surfaces quality becomes larger is asked
Topic.This will lead to the frictional heat (processing impedance) generated in process and increases.The frictional heat can make gluey electrification in lapping liquid
Ionic condition is inhomogenous, and viscosity rises and locally lapping liquid is unevenly distributed, thus the integrality of lapping liquid can be made to rely on
In the temperature for the lapping liquid supplied.Therefore, it is necessary to increase the amount of lapping liquid or replacement lapping liquid in operation process with can
Meet the problem of lapping liquid is evenly distributed, is increased costs, and large batch of however, increasing the amount and replacement frequency of lapping liquid
Lapping liquid also carries out managing between batch (Batch), increases management cost, and the production efficiency of product and quality and pays no attention to
Think.
Summary of the invention
It, can be with by the way that more cooling lines are arranged in price fixing body interior in view of this, the present invention provides a kind of grinding price fixing
Effective cooling lapping liquid, is that lapping liquid is maintained at better suited temperature, improves the quality of workpiece grinding.
The present invention also provides a kind of grinding devices with above-mentioned grinding price fixing.
In addition, the present invention also provides a kind of grinding method.
In order to solve the above technical problems, the invention adopts the following technical scheme:
The grinding price fixing of embodiment according to a first aspect of the present invention, comprising:
Price fixing ontology, the middle part of the price fixing ontology are equipped with the centre bore for installing shaft, the price fixing ontology it is interior
Portion is equipped with cooling line, the surface setting inlet and liquid outlet, the inlet and the cooling line of the price fixing ontology
One end connection, the liquid outlet is connected to the other end of the cooling line.
Preferably, the cooling line include a plurality of the first sub- pipeline extended in a first direction and it is a plurality of in a second direction
The the second sub- pipeline extended, a plurality of first sub- pipeline are connected to a plurality of second sub- pipeline intersection.
Preferably, the described first sub- pipeline is connected to the described second sub- pipeline square crossing.
Preferably, the internal diameter of the cooling line is 5-10mm.
Preferably, the price fixing ontology is iron, bronze or brass casting part.
The grinding device of embodiment according to a third aspect of the present invention, comprising:
Two grinding price fixings as described in any one in claim 1-5 being oppositely arranged；
One end of supporting mechanism, the supporting mechanism is set between two grinding price fixings, to be ground for providing
Workpiece, so that workpiece sliding is attached between two grinding price fixings；
Slurry supply mechanism, for providing lapping liquid to the surface of grinding price fixing；
Driving mechanism, the shaft of the driving mechanism is connected with the centre bore of the grinding price fixing, for driving described grind
Price fixing rotation is ground with grinding work-piece；
Coolant liquid feed mechanism, the coolant liquid feed mechanism includes service, the service and the grinding
The inlet of price fixing is connected；
Recovering mechanism, the recovering mechanism include recovery channel, the liquid outlet of the recovery channel and the grinding price fixing
It is connected.
The grinding method of embodiment according to a third aspect of the present invention is applied to grinding device as claimed in claim 6, should
Method includes:
By the slurry supply mechanism to two it is described grinding price fixing surface spraying lapping liquids；
It is attached between two grinding price fixings by the supporting mechanism by what workpiece slided；
Drive the grinding price fixing rotation with grinding work-piece by driving mechanism；
Coolant liquid is conveyed into the cooling line for two grinding price fixings being correspondingly arranged, to the grinding disc setting surface
Lapping liquid is cooled down.
Preferably, the coolant liquid is water, contains antirust agent in the water.
Preferably, contain in the lapping liquid: aluminium oxide, water and additive, the additive includes polyethylene glycol, two sweet
One of pure and mild propylgallate is a variety of.
Preferably, the range of viscosities of the lapping liquid is between 1.0-1.3Mpa.s, supply temperature range 20-30 DEG C it
Between, the temperature range of the coolant liquid is between 15-25 DEG C.
Above-mentioned technical proposal of the invention one of at least has the advantages that:
1) grinding price fixing according to an embodiment of the present invention, by being equipped with cooling line in price fixing ontology, to cooling line
It is inside passed through cooling medium, when grinding work-piece, the lapping liquid between two price fixing ontologies can be cooling by cooling medium, to guarantee
Lapping liquid will not be affected because of the frictional heat of grinding generation, and lapping liquid is able to maintain good dispersibility, lubricity and hangs
The performances such as floating, and then ensure the grinding quality of workpiece, improve the efficiency of grinding.
2) a large amount of lapping liquid is not needed to maintain the temperature and dispersing uniformity of lapping liquid, can reduce production and management
Cost.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of the section of the grinding price fixing of the embodiment of the present invention；
Fig. 2 is the mounting structure schematic diagram of two grinding price fixings of the embodiment of the present invention.
Appended drawing reference:
Grind price fixing 100；
Price fixing ontology 10；Centre bore 11；Cooling line 12；Inlet 13；Liquid outlet 14.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
Attached drawing, the technical solution of the embodiment of the present invention is clearly and completely described.Obviously, described embodiment is this hair
Bright a part of the embodiment, instead of all the embodiments.Based on described the embodiment of the present invention, ordinary skill
Personnel's every other embodiment obtained, shall fall within the protection scope of the present invention.
Grinding price fixing 100 according to an embodiment of the present invention is specifically described in conjunction with attached drawing first below.
As shown in Figure 1 to Figure 2, grinding price fixing 100 according to an embodiment of the present invention includes: price fixing ontology 10, price fixing ontology
10 middle part is equipped with the centre bore 11 for installing shaft, and the inside of price fixing ontology 10 is equipped with cooling line 12, price fixing ontology 10
Surface setting inlet 13 and liquid outlet, inlet 13 be connected to one end of cooling line 12, liquid outlet and cooling line 12
The other end connection.
That is, cooling line 12 can pass through feed liquor by being equipped with cooling line 12 in the inside of price fixing ontology 10
Mouthfuls 13 are connected to the coolant supply apparatus in the external world, are connected by liquid outlet 14 with coolant liquid recyclable device, and then can be to cold
But coolant liquid, and coolant liquid can circulate in cooling line 12 are supplied in pipeline 12, on the surface convenient for price fixing ontology 10
Lapping liquid cooling, the frictional heat generated in process of lapping is offset, it is ensured that lapping liquid is able to maintain that in balanced temperature model
In enclosing, good dispersibility, lubricity, the performance of suspension and sedimentation are kept, and then grinding price fixing 100 can be evenly distributed in
Surface, improve the quality of grinding, and reduce costs.
Grinding price fixing 100 according to an embodiment of the present invention as a result, by the way that cooling line 12 is arranged in price fixing ontology 10,
Can the cooling elimination of the frictional heat that generated in process of lapping be made lapping liquid be maintained at normal temperature range, improve workpiece
The quality of grinding, while reducing production and management cost.
According to this one embodiment, cooling line 12 includes a plurality of the first sub- pipeline extended in a first direction and a plurality of
The sub- pipeline of second extended in a second direction, a plurality of first sub- pipeline are connected to a plurality of second sub- pipeline intersection.That is, cold
But pipeline 12 has a plurality of, the first sub- pipeline and the second sub- pipeline including both direction setting, the sub- pipeline of the first of both direction
It intersects to be connected to the second sub- pipeline to be formed netted, it is uniform in price fixing ontology 10 which is more advantageous to cooling line 12
Distribution, enables lapping liquid uniformly to be cooled down, it is ensured that the temperature of the lapping liquid on entire grinding price fixing 100 is uniform.
Preferably, the first sub- pipeline and the second sub- pipeline square crossing connection.That is, using the first sub- pipeline and
Two sub- pipelines are vertically arranged, and form the netted of grid, the shape enable cooling line 12 it is more uniform be laid on price fixing sheet
Inside body 10, be conducive to the cooling of lapping liquid, avoid lapping liquid inhomogeneous cooling from causing local lapping liquid temperature excessively high, influence work
The grinding quality of part.
Further, the internal diameter of cooling line 12 is 5-10mm.The cooling line 12 can be processed to obtain by drill gun, and
The size in the aperture can make appropriate choice according to the thickness of price fixing ontology 10, herein not as limitation of the present invention.
According to another embodiment of the invention, price fixing ontology 10 is iron, bronze or brass casting part.The material have compared with
Good ductility, easy to process and forging.
Grinding price fixing 100 according to an embodiment of the present invention, it can be ensured that lapping liquid will not be due to the frictional heat that grinding generates
It is affected, lapping liquid is able to maintain the performances such as good dispersibility, lubricity and suspension, and then ensures the grinding matter of workpiece
Amount, improves the efficiency of grinding.
The grinding device of embodiment according to a second aspect of the present invention, including grinding price fixing 100, supporting mechanism (not shown),
Two slurry supply mechanism (not shown), the driving mechanisms (not shown), coolant liquid feed mechanism (not shown) being oppositely arranged
It is not shown with recovering mechanism.
Specifically, grinding price fixing 100 includes two be oppositely arranged, and grinds the grinding that price fixing 100 is above-described embodiment
One end of price fixing 100, supporting mechanism is set between two grinding price fixings 100, for providing workpiece to be ground, so that workpiece is sliding
Dynamic is attached between two grinding price fixings 100, and slurry supply mechanism is used to provide grinding to the surface of grinding price fixing 100
The shaft of liquid, driving mechanism is connected with the centre bore 11 of grinding price fixing 100, for driving the grinding rotation of price fixing 100 to grind work
Part, coolant liquid feed mechanism include service, and service is connected with the inlet 13 of grinding price fixing 100, recovering mechanism packet
Recovery channel is included, recovery channel is connected with the liquid outlet of grinding price fixing 100.
That is, workpiece is delivered between grinding price fixing 100 by supporting mechanism, slurry supply mechanism is ground to two
Price fixing 100 provides lapping liquid, during the grinding process, generates frictional heat between lapping liquid, workpiece and grinding price fixing 100, the heat
The temperature of lapping liquid can be made to increase, so that the dispersibility and lubricity of lapping liquid are influenced, to ensure that the temperature of lapping liquid is protected always
It holds in normal range, under normal temperature state, is passed through by coolant liquid feed mechanism into the cooling line 12 of grinding price fixing 100
Cooling medium makes lapping liquid be evenly distributed in the surface of grinding price fixing 100, improves grinding to reduce the temperature of lapping liquid
Quality.
Grinding device according to an embodiment of the present invention includes the grinding price fixing 100 according to above-described embodiment, due to according to this
The grinding price fixing 100 of invention above-described embodiment has above-mentioned technique effect, therefore, grinding device according to an embodiment of the present invention
With corresponding technical effect, i.e. guarantee lapping liquid will not be affected because of the frictional heat of grinding generation, and lapping liquid can be protected
The performances such as good dispersibility, lubricity, suspension and sedimentation are held, and then ensure the grinding quality of workpiece, improve the efficiency of grinding.
The other structures of grinding device according to an embodiment of the present invention and operation are all to those skilled in the art
It is understood that and easy to accomplish, therefore is not described in detail.
The grinding method of embodiment according to a third aspect of the present invention, applied to the grinding device of above-described embodiment, this method
The following steps are included:
Step 1, the surface spraying lapping liquid of price fixing 100 is ground to two by slurry supply mechanism；
Step 2, it is attached between two grinding price fixings 100 by supporting mechanism by what workpiece slided；
Step 3, drive the grinding rotation of price fixing 100 with grinding work-piece by driving mechanism；
Step 4, coolant liquid is conveyed into the cooling line 12 for two grinding price fixings 100 being correspondingly arranged, with fixed to grinding
The lapping liquid on 100 surface of disk is cooled down.
That is, being ground by the way that cooling line 12 is arranged inside grinding price fixing 100 by the way that cooling line 12 is cooling
Liquid, and then the frictional heat generated when processing is controlled, it can consistently maintain the temperature gradient of lapping liquid.When the temperature quilt of lapping liquid
When consistently maintaining, lapping liquid can keep good dispersibility, lubricity, suspension and sedimentation etc., and wafer not only can be improved
Surface quality improves production efficiency.
Preferably, coolant liquid is water, contains antirust agent in water.That is, using water as coolant liquid, cooling effect
It is good and at low cost, in water plus antirust agent, the corrosion of cooling pipe can be effectively avoided, preferably protection grinding price fixing
100, extend the service life of grinding price fixing 100.
Preferably, aluminium oxide, water and additive are contained in lapping liquid, additive includes polyethylene glycol, diethylene glycol (DEG) and do not eat
One of sub- propyl propionate is a variety of.It is more advantageous to the balance for keeping temperature using the lapping liquid of the component, improves workpiece grinding
Quality.
In a preferred embodiment of the invention, the range of viscosities of lapping liquid is between 1.0-1.3Mpa.s, supply temperature
Range is spent between 20-30 DEG C, and the temperature range of coolant liquid is between 15-25 DEG C.
That is, controlling the range of viscosities of lapping liquid between 1.0-1.3Mpa.s, temperature control 20-30 DEG C it
Between, be conducive to dispersion of the lapping liquid on grinding price fixing 100, be more advantageous to the grinding of workpiece, and the temperature range of coolant liquid exists
Preferable cooling effect can be not only played between 15-25 DEG C, but also avoids influencing the viscous of lapping liquid because coolant temperature is too low
Degree, and then influence the grinding effect of workpiece.
Grinding method according to an embodiment of the present invention, not only easy to operate, save the cost, and can be improved the grinding of workpiece
Quality.
Unless otherwise defined, technical term or scientific term used in the present invention are should be in fields of the present invention
The ordinary meaning that personage with general technical ability is understood." first ", " second " used in the present invention and similar word
It is not offered as any sequence, quantity or importance, and is used only to distinguish different component parts.Equally, "one" or
The similar word such as " one " does not indicate that quantity limits yet, but indicates that there are at least one." connection " or " connected " etc. are similar
Word is not limited to physics or mechanical connection, but may include electrical connection, it is either direct or between
It connects."upper", "lower", "left", "right" etc. are only used for indicating relative positional relationship, when the absolute position for being described object changes
Afterwards, then the relative positional relationship also correspondingly changes.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art
For, without departing from the principles of the present invention, it can also make several improvements and retouch, these improvements and modifications
It should be regarded as protection scope of the present invention.
Claims (10)
1. a kind of grinding price fixing characterized by comprising
Price fixing ontology, the middle part of the price fixing ontology are equipped with the centre bore for installing shaft, and the inside of the price fixing ontology is set
There are cooling line, the surface setting inlet and liquid outlet of the price fixing ontology, the inlet and the one of the cooling line
End connection, the liquid outlet are connected to the other end of the cooling line.
2. grinding price fixing according to claim 1, which is characterized in that the cooling line includes a plurality of prolonging along first direction
The sub- pipeline of first stretched and a plurality of the second sub- pipeline extended in a second direction, a plurality of first sub- pipeline and a plurality of described
Two sub- pipelines intersect connection.
3. grinding price fixing according to claim 2, which is characterized in that the first sub- pipeline and the second sub- pipeline hang down
It is straight to intersect connection.
4. grinding price fixing according to claim 1, which is characterized in that the internal diameter of the cooling line is 5-10mm.
5. grinding price fixing according to claim 1, which is characterized in that the price fixing ontology is iron, bronze or brass casting
Part.
6. a kind of grinding device characterized by comprising
Two grinding price fixings as described in any one in claim 1-5 being oppositely arranged；
One end of supporting mechanism, the supporting mechanism is set between two grinding price fixings, for providing workpiece to be ground,
So that the workpiece sliding is attached between two grinding price fixings；
Slurry supply mechanism, for providing lapping liquid to the surface of grinding price fixing；
Driving mechanism, the shaft of the driving mechanism is connected with the centre bore of the grinding price fixing, for driving the grinding fixed
Disc spins are with grinding work-piece；
Coolant liquid feed mechanism, the coolant liquid feed mechanism includes service, the service and the grinding price fixing
Inlet be connected；
Recovering mechanism, the recovering mechanism include recovery channel, and the recovery channel is connected with the liquid outlet of the grinding price fixing.
7. a kind of grinding method, which is characterized in that it is applied to grinding device as claimed in claim 6, this method comprises:
By the slurry supply mechanism to two it is described grinding price fixing surface spraying lapping liquids；
It is attached between two grinding price fixings by the supporting mechanism by what workpiece slided；
Drive the grinding price fixing rotation with grinding work-piece by driving mechanism；
Coolant liquid is conveyed into the cooling line for two grinding price fixings being correspondingly arranged, with the grinding to the grinding disc setting surface
Liquid is cooled down.
8. grinding method according to claim 7, which is characterized in that the coolant liquid is water, contains antirust in the water
Agent.
9. grinding method according to claim 7, which is characterized in that contain in the lapping liquid: aluminium oxide, water and addition
Agent, the additive include one of polyethylene glycol, diethylene glycol (DEG) and propylgallate or a variety of.
10. grinding method according to claim 7, which is characterized in that the range of viscosities of the lapping liquid is in 1.0-
Between 1.3Mpa.s, supply temperature range is between 20-30 DEG C, and the temperature range of the coolant liquid is between 15-25 DEG C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811611799.2A CN109465740A (en) | 2018-12-27 | 2018-12-27 | A kind of grinding price fixing, grinding device and grinding method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811611799.2A CN109465740A (en) | 2018-12-27 | 2018-12-27 | A kind of grinding price fixing, grinding device and grinding method |
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| Publication Number | Publication Date |
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| CN109465740A true CN109465740A (en) | 2019-03-15 |
Family
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| CN201811611799.2A Pending CN109465740A (en) | 2018-12-27 | 2018-12-27 | A kind of grinding price fixing, grinding device and grinding method |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110744440A (en) * | 2019-10-22 | 2020-02-04 | 西安奕斯伟硅片技术有限公司 | Double-side grinding device and method |
| CN114277349A (en) * | 2021-12-28 | 2022-04-05 | 无锡展硕科技有限公司 | Novel physical vapor deposition equipment capable of adjusting chamber temperature |
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| CN110744440A (en) * | 2019-10-22 | 2020-02-04 | 西安奕斯伟硅片技术有限公司 | Double-side grinding device and method |
| CN114277349A (en) * | 2021-12-28 | 2022-04-05 | 无锡展硕科技有限公司 | Novel physical vapor deposition equipment capable of adjusting chamber temperature |
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