CN109458969B - Multi-axis synchronous measurement and control method of position full closed loop - Google Patents
Multi-axis synchronous measurement and control method of position full closed loop Download PDFInfo
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- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
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Abstract
The invention discloses a multi-axis synchronous measurement and control method of a position full closed loop.A PC sends out a control command, the control command is analyzed and processed by a motion controller and then transmitted to a plurality of servo drivers, the drivers control the motion of a motor so as to control the motion of a workbench, a position detection/synchronization device receives grating ruler signals on each axis and generates a trigger signal to a displacement sensor, and the surface height data of a part at the current position is collected; the position detection/synchronization device is used for simultaneously acquiring the position information of multiple paths of grating scales, the feedback signal of the grating scale with the fastest motion axis at present is used as a synchronous reference signal, and the displacement sensor is triggered to work, so that the height signal of the part to be detected is synchronous with the position signal on the workbench. The invention takes the grating ruler as a real-time position measuring tool of the workbench, and the displacement sensor as a surface height measuring tool, and has the advantage of high measuring precision. Other detection devices with the function are also applicable to the method.
Description
Technical Field
The invention belongs to the technical field of synchronous measurement and control of industrial measurement and control, and particularly relates to a multi-axis synchronous measurement and control method of a position full closed loop.
Background
The small-sized part precision measurement generally is to place the measured part on the measuring and controlling workbench (X/Y axis) of motion, the displacement sensor is vertically installed above the workbench (parallel Z axis), the measured part moves along with the workbench, the measuring and controlling platform continuously collects the height data of the current position surface of the measured part through the displacement sensor in the motion process, and then the collected position data of the measuring and controlling platform and the height data of the surface of the part restore the whole surface model of the measured part in a 3D reconstruction mode.
Currently, in this measurement mode, position data is obtained by collecting encoder signals on a servo motor of a measurement and control platform and then calculating the position of the measurement and control platform, and such position data includes transmission errors and position tracking errors existing in a moving axis; in addition, the height information of the displacement sensor and the position information of the measurement and control platform lack a strict synchronization relation in time. Thus, the height information of the surface of the part is not matched with the platform position information, so that a relatively large error exists after the part is reconstructed in a 3D mode, and the requirement of precise measurement cannot be met.
Disclosure of Invention
The invention discloses a multi-axis synchronous measurement and control method of a position full closed loop, which transmits a control command to a plurality of servo drivers after being analyzed and processed by a motion controller by a PC (personal computer), wherein the drivers control the motion of a motor so as to control the motion of a workbench, and a position detection/synchronization device receives grating ruler signals on each axis, generates a trigger signal to a displacement sensor and acquires the surface height data of a part at the current position; in order to ensure the synchronous relation between the position signal of the grating ruler and the surface height data of the displacement sensor, the position detection/synchronization device is used for simultaneously acquiring the position information of multiple paths of grating rulers, and the grating ruler feedback signal of the fastest moving axis at present is used as a synchronous reference signal to trigger the displacement sensor to work, so that the height signal of the synchronous measured part is consistent with the position signal on the workbench, and the measurement error is minimized.
The technical scheme of the invention is as follows: the multi-axis synchronous measurement and control method of the position full closed loop comprises the following steps:
s1: constructing a multi-axis measurement and control system, wherein the multi-axis measurement and control system comprises a plurality of servo drivers and servo motors for controlling the movement of a measurement and control platform, a grating ruler is arranged on each axis of the multi-axis measurement and control platform, a displacement sensor is arranged on a Z axis, and the displacement sensor acquires surface height data of the current position of a part in real time when receiving a trigger signal of a position detection/synchronization device;
s2: the PC sends out control commands which are analyzed and processed by the motion controller and then transmitted to the plurality of servo drivers, and the servo motors are controlled so as to control the motion of the measurement and control platform;
s3: the position detection/synchronization device simultaneously acquires the position information of the multi-path grating ruler, and calculates to obtain the axis which moves the fastest in the current multiple working axes as a synchronization reference signal;
s4: dividing the frequency of the synchronous reference signal by N times according to the sampling period, wherein the dividing frequency is used for setting the density of data acquisition, and the larger N is, the lower the data density is; n satisfies the formula:
wherein, TsFor a sampling period, TiFor synchronizing the reference signal period, Tx,Ty,Tz,...,TnRespectively the period of the position signal fed back by each grating ruler.
S5: the grating ruler pulse signal of the fastest axis selected by the position detection/synchronization device is used as a trigger pulse after N times of frequency division, and a displacement sensor is triggered to acquire surface height data; therefore, synchronous acquisition of the position data of the grating ruler and the surface height data of the displacement sensor can be ensured; in order to improve the data synchronism, the N-frequency division synchronous reference signal in S4 is adopted to trigger the displacement sensor, the current fastest motion axis is assumed to be the x axis, and the comprehensive error of the synchronous result is as the formula:
wherein T is N Tx。
In the multi-axis measurement and control platform with three servo motors respectively controlling XYZ three-axis motion of a workbench, the invention uses three grating scales to respectively detect real-time positions of XYZ three axes of the workbench, and uses processed grating scale signals to trigger the acquisition of surface height information, so that the position data and the surface height data of a measured part are accurately synchronized, thereby realizing the accurate reconstruction of the surface profile of the part and meeting the requirement of high-precision measurement of the part.
Drawings
FIG. 1 is a schematic diagram of a block structure of a multi-axis synchronous measurement and control system;
FIG. 2 is a schematic view of a multi-axis system measurement and control synchronization process;
FIG. 3 is a schematic diagram of a build part surface profile measurement system;
FIG. 4 is a schematic diagram of a three-way square wave signal from the platen X, Y, Z axis;
FIG. 5 is a schematic diagram of a data transmission path between a grating scale and a displacement sensor;
FIG. 6 is a schematic hardware diagram of a position detection/synchronization apparatus;
FIG. 7 is a schematic circuit design of a position detection/synchronization apparatus;
fig. 8 is a schematic flowchart of the operation of the position detecting/synchronizing device.
Detailed Description
The invention provides a multi-axis synchronous measurement and control method of a position full closed loop. In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention will be described in detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
Referring to fig. 1 and fig. 2, the invention provides a multi-axis synchronous measurement and control method of a position full closed loop, comprising the following steps:
s1: a multi-axis measurement and control system is constructed and comprises three servo drivers and servo motors for controlling a three-axis measurement and control platform to move, grating rulers are installed on three motion axes of a measurement and control platform XYZ, a displacement sensor is installed on a Z axis, and surface height data of the current position of a part are acquired when a trigger signal is received. The part surface profile measurement system is shown in fig. 3.
S2: the motion of the measurement and control platform is realized, a control command sent by the PC is analyzed and processed by the motion controller and then transmitted to the three servo drivers, the drivers control the motion of the motors so as to control the motion of the measurement and control platform, and the relative position of the displacement sensor and the measured surface is adjusted, for example, the displacement sensor scans the measured surface line by line.
S3: the position detection/synchronization device simultaneously acquires the position information of the multi-path grating ruler, and calculates to obtain the axis which moves the fastest in the current multiple working axes as a synchronization reference signal;
linear grating rulers are arranged on three working shafts X, Y, Z of the measurement and control platform, three-shaft position information of the working platform is measured in real time, position feedback signals of three paths of grating rulers, such as three paths of square wave signals in fig. 4, are acquired simultaneously through a position detection/synchronization device, the shorter the signal period is, the faster the movement speed is, the shaft which moves fastest currently is obtained through calculation, and the grating ruler position feedback signal of the fastest shaft is used as a synchronization reference signal, so that the comprehensive error of a synchronization result is minimized.
S4: and carrying out N-time frequency division on the synchronous reference signal according to the sampling period, wherein the N is used for setting the data acquisition density, and the larger N is, the lower the data density is. The frequency division number N satisfies the formula (1)
Wherein, TsFor a sampling period, TiFor synchronizing the reference signal period, Tx,Ty,TzThe periods of the square wave signals fed back by the grating ruler on the three axes of the workbench X, Y, Z respectively.
S5: the grating ruler pulse signal of the fastest axis selected by the position detection/synchronization device is used as a trigger pulse after N times of frequency division, and a displacement sensor is triggered to acquire surface height data; therefore, the position data of the grating ruler and the surface height data of the displacement sensor are synchronously read to a certain extent.
Triggering the displacement sensor by adopting the N frequency division synchronous reference signal in the step 4, and assuming that the axis with the fastest motion is the x axis and the comprehensive error of the synchronous result is as the formula (2)
Wherein, T=N*TxAnd the current synchronous sampling period is calculated according to the signal period of the current fastest motion axis and the fixed sampling period.
And if a fixed sampling period T is usedsTo read the position data of the grating ruler and trigger the displacement sensor, the comprehensive error is as the formula (3)
Wherein, TsEquation (3) may be rewritten as equation (4)
Comparing the formula (2) with the formula (4), it is easy to know E1<E2Namely, the N-frequency division synchronous reference signal is adopted to trigger the displacement sensor, so that the synchronism of data can be improved.
The invention provides a multi-axis synchronous measurement and control method of a position full closed loop.A control command sent by a PC is analyzed and processed by a motion controller and then transmitted to a plurality of servo drivers, the drivers control the motion of a motor so as to control the motion of a workbench, each axis of the workbench is provided with a grating ruler, and the position information of each axis of the workbench is fed back in real time; in the moving process, the displacement sensor is triggered to acquire the surface height data of the part at the current coordinate, in order to ensure that the real-time position data of the measured surface is correctly matched with the surface height data of the measured surface, the position information of a plurality of paths of grating scales is acquired simultaneously through the position detection/synchronization device, and the feedback signal of the grating scale of the current fastest moving axis is used as a synchronization reference signal to trigger the displacement sensor to work, so that the minimum comprehensive error of a synchronization result is achieved.
The position detection/synchronization device in the present invention is a prior art, and can be implemented by using a synchronous acquisition system of position information and altitude information of patent No. 2018204989670 of the present applicant. The position detection/synchronization apparatus is further described below:
the profile data of the measured surface is determined by XYZ coordinates of the displacement sensor stylus and the stylus measurement height value. As shown in fig. 5, the position data and the measured height value of the measuring head enter the general PC through different approaches, so that the sampled position data and the sampled height value need to be in one-to-one correspondence, otherwise, the reconstruction accuracy of the 3D profile will be affected.
When the trigger condition is met (for example, trigger according to the sampling frequency period), the position detection/synchronization device sends a trigger signal, the measuring head is triggered to generate a piece of sampling data, and the number of the generated sampling data is consistent with the number of trigger times. And when the trigger signal is sent, the measuring position is latched and the triggering times are recorded. The latched data is sent to the controller via the bus cycle and forwarded by the controller to the general purpose PC.
The general PC acquires position and height sequence data through different ways, matches the triggering times with the read measurement values, and finally ensures the synchronism between the position data of the grating ruler and the height data of the displacement sensor.
In the invention, the hardware structure of the position detection/synchronization device is divided into three parts, which are sequentially from bottom to top: a power panel, a physical interface board and a core control panel, as shown in fig. 6. The physical interface board mainly provides physical connection equipment for each module interface and performs corresponding signal conversion processing; the core control board is a core control unit of the whole detection device and comprises an STM32 and an FPGA, and data communication is carried out between the STM32 and the FPGA through an FSMC (Flexible Static Memory controller); the power panel realizes various power types required by different functional interfaces in the whole device, and finally ensures the normal work of the whole device.
Fig. 7 shows a schematic circuit design diagram of the position detection/synchronization apparatus in the present invention, and as can be seen from fig. 7, the input of the grating scale a/B differential signal is firstly filtered by a simple RC, then the differential signal is converted into a single-ended signal by the differential signal receiver AM26C32IPWR, and finally the signal is shaped by the schmitt trigger 74LVC14APW and then transmitted to the corresponding interface pin of the FPGA. The external trigger signal of the displacement sensor sent from the FPGA interface pin passes through an AM26C31IPWR differential line driver, so that the single-end signal is converted into a differential signal and then output; finally, the digital input signal can be subjected to signal isolation through the TLP290 optocoupler to perform isolation protection on the FPGA, and even if the external input signal is connected in a wrong way or the external input signal is input in an abnormal way, the optocoupler can only be damaged, and the FPGA cannot be directly damaged. The analog quantity signal is acquired by directly utilizing an analog/digital signal conversion unit with 2 channels and 12 bit resolution contained in STM32 without passing through an FPGA. Because the analog/digital conversion unit with 2 channels and 12 bit resolution of the STM32 can measure voltage in the range of 0-3.3V and generally needs a voltage measurement range of 0-10V in industrial application occasions, the design of the analog quantity signal input interface circuit is mainly designed by taking an operational amplifier as a core device, and the function of amplifying the measurement voltage range can be realized.
In the invention, the workflow of the position detection/synchronization device is as shown in fig. 8, in the position detection/synchronization device, an internal program of an STM32 reads the position data of the grating ruler through interruption of a main timer (for example, a period of 100us), but only when a bus data frame communication period comes, the read position data of the grating ruler is transmitted to the motion controller through a bus, and at the moment, whether a displacement sensor trigger condition is met or not is judged, only when the condition is met, a displacement sensor trigger pulse is sent, and simultaneously a pulse count value is transmitted to the motion controller in the same bus data frame, so that the process ensures that the same bus data frame of the motion controller contains the position data of the grating ruler and the pulse count value of the displacement sensor at the same time; and finally, the PC reads the position data of the grating ruler and the pulse count value of the displacement sensor from the motion controller through the Ethernet, matches the read number of the height values of the surface of the displacement sensor through the pulse count value, and finally ensures the synchronism between the position data of the grating ruler and the height data of the surface of the displacement sensor. The dotted frame in fig. 8 is a core step for ensuring that the grating scale position data is read at the same time and the displacement sensor is triggered to operate at the same time.
It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.
Claims (3)
1. A multi-axis synchronous measurement and control method of a position full closed loop is characterized in that: the method comprises the following steps:
s1: constructing a multi-axis measurement and control system, wherein the multi-axis measurement and control system comprises a plurality of servo drivers and servo motors for controlling the movement of a measurement and control platform, a grating ruler is arranged on each axis of the multi-axis measurement and control platform, a displacement sensor is arranged on a Z axis, and the displacement sensor collects surface height data of the current position of a part when receiving a trigger signal of a position detection/synchronization device;
s2: the PC sends out control commands which are analyzed and processed by the motion controller and then transmitted to the plurality of servo drivers, and the servo motors are controlled so as to control the motion of the measurement and control platform;
s3: the position detection/synchronization device simultaneously acquires the position information of the multi-path grating ruler, and calculates to obtain the axis which moves the fastest in the current multiple working axes as a synchronization reference signal;
s4: dividing the frequency of the synchronous reference signal by N times according to the sampling period, wherein the dividing frequency is used for setting the density of data acquisition, and the larger N is, the lower the data density is; n satisfies the formula:
wherein, TsFor a sampling period, TiFor synchronizing the reference signal period, Tx,Ty,Tz,...,TnRespectively feeding back position signal periods of each grating ruler;
s5: the grating ruler pulse signal of the fastest axis selected by the position detection/synchronization device is used as a trigger pulse after N times of frequency division, and a displacement sensor is triggered to acquire surface height data; therefore, synchronous acquisition of the position data of the grating ruler and the surface height data of the displacement sensor is ensured;
the circuit of the position detection/synchronization device comprises a grating ruler differential signal input, a differential signal receiver, a Schmitt trigger and a first main control unit FPGA, wherein the grating ruler differential signal input firstly passes RC filtering, then the differential signal receiver converts a differential signal into a single-ended signal, and finally the single-ended signal is subjected to shaping processing by the Schmitt trigger and then transmitted to a corresponding interface pin of the first main control unit FPGA; the external trigger signal of the displacement sensor sent from the FPGA interface pin of the first main control unit passes through a differential circuit driver of the differential signal receiver, so that a single-end signal is converted into a differential signal and then output; finally, the digital quantity input signal can be subjected to signal isolation through an optical coupler so as to perform isolation protection on the first main control unit FPGA; the analog quantity signal is acquired by directly utilizing an analog/digital signal conversion unit with 2 channels and 12-bit resolution contained in the second main control unit STM32 without passing through the first main control unit FPGA.
2. The method for multi-axis synchronous measurement and control of the position full closed loop according to claim 1, wherein in the step S4, the frequency division is performed on the synchronous reference signal by N times, and assuming that the fastest axis of the current motion is the x axis, the synthetic error of the synchronous result is as the formula:
wherein T is N Tx。
3. The position full-closed-loop multi-axis synchronous measurement and control method according to claim 1 or 2, characterized in that the position detection/synchronization device has a workflow as follows, in the position detection/synchronization device, an internal program of the second main control unit STM32 reads grating scale position data through main timer interruption, when a bus data frame communication cycle arrives, the read grating scale position data is transmitted to the motion controller through a bus, whether a displacement sensor trigger condition is met is judged, when the trigger condition is met, a displacement sensor trigger pulse is sent, and a pulse count value is transmitted to the motion controller in the same bus data frame, so that the same bus data frame of the motion controller is ensured to contain the grating scale position data and the displacement sensor pulse count value at the same time; and finally, reading the position data of the grating ruler and the pulse count value of the displacement sensor from the motion controller through the Ethernet by the PC, matching the read number of the surface height values of the displacement sensor through the pulse count value, and finally ensuring the synchronism between the position data of the grating ruler and the surface height data of the displacement sensor.
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Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991006152A1 (en) * | 1989-10-16 | 1991-05-02 | Nauchno-Proizvodstvennoe Obiedinenie 'granat' | Method for conversion of a shaft's angular position into code |
JP2903964B2 (en) * | 1993-09-29 | 1999-06-14 | 株式会社デンソー | Three-dimensional position and posture recognition method based on vision and three-dimensional position and posture recognition device based on vision |
DE19914862A1 (en) * | 1999-04-01 | 2000-10-26 | Zoller Gmbh & Co Kg E | Procedure to determine contour of tool inputting ideal position for only one point on contour |
CN101236070A (en) * | 2008-03-04 | 2008-08-06 | 中原工学院 | Cylinder diameter and form and position error integrated measuring apparatus |
CN101718976A (en) * | 2009-10-30 | 2010-06-02 | 大连科德数控有限公司 | Structure for achieving double-spindle synchronization in machining center |
CN101825439A (en) * | 2010-03-25 | 2010-09-08 | 天津大学 | Multi-camera combination based method for online measuring engine cylinder combination face hole group |
CN102162717A (en) * | 2010-12-20 | 2011-08-24 | 南京理工大学 | Device and method for automatically detecting composite errors of spiral inner raceway of ball nut |
CN105159233A (en) * | 2015-08-04 | 2015-12-16 | 中国矿业大学 | Control system and method of double-acting platform parallel bionic hip joint testing machine |
CN105841631A (en) * | 2016-03-22 | 2016-08-10 | 中国神华能源股份有限公司 | Three-dimensional laser scanning device and method |
CN205899349U (en) * | 2016-08-03 | 2017-01-18 | 华南理工大学 | Plug -in components machine XY axle motion control system |
CN106767519A (en) * | 2017-03-13 | 2017-05-31 | 王俊民 | Spectral Confocal detecting system and method |
CN106767516A (en) * | 2017-01-12 | 2017-05-31 | 广东龙天智能仪器股份有限公司 | Automated optical white light scanning instrument |
CN208044358U (en) * | 2018-04-10 | 2018-11-02 | 东莞市三姆森光电科技有限公司 | The synchronous of location information and elevation information |
-
2018
- 2018-12-18 CN CN201811548585.5A patent/CN109458969B/en active Active
Patent Citations (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1991006152A1 (en) * | 1989-10-16 | 1991-05-02 | Nauchno-Proizvodstvennoe Obiedinenie 'granat' | Method for conversion of a shaft's angular position into code |
JP2903964B2 (en) * | 1993-09-29 | 1999-06-14 | 株式会社デンソー | Three-dimensional position and posture recognition method based on vision and three-dimensional position and posture recognition device based on vision |
DE19914862A1 (en) * | 1999-04-01 | 2000-10-26 | Zoller Gmbh & Co Kg E | Procedure to determine contour of tool inputting ideal position for only one point on contour |
CN101236070A (en) * | 2008-03-04 | 2008-08-06 | 中原工学院 | Cylinder diameter and form and position error integrated measuring apparatus |
CN101718976A (en) * | 2009-10-30 | 2010-06-02 | 大连科德数控有限公司 | Structure for achieving double-spindle synchronization in machining center |
CN101825439A (en) * | 2010-03-25 | 2010-09-08 | 天津大学 | Multi-camera combination based method for online measuring engine cylinder combination face hole group |
CN102162717A (en) * | 2010-12-20 | 2011-08-24 | 南京理工大学 | Device and method for automatically detecting composite errors of spiral inner raceway of ball nut |
CN105159233A (en) * | 2015-08-04 | 2015-12-16 | 中国矿业大学 | Control system and method of double-acting platform parallel bionic hip joint testing machine |
CN105841631A (en) * | 2016-03-22 | 2016-08-10 | 中国神华能源股份有限公司 | Three-dimensional laser scanning device and method |
CN205899349U (en) * | 2016-08-03 | 2017-01-18 | 华南理工大学 | Plug -in components machine XY axle motion control system |
CN106767516A (en) * | 2017-01-12 | 2017-05-31 | 广东龙天智能仪器股份有限公司 | Automated optical white light scanning instrument |
CN106767519A (en) * | 2017-03-13 | 2017-05-31 | 王俊民 | Spectral Confocal detecting system and method |
CN208044358U (en) * | 2018-04-10 | 2018-11-02 | 东莞市三姆森光电科技有限公司 | The synchronous of location information and elevation information |
Non-Patent Citations (1)
Title |
---|
三晶体多轴联动同步辐射X射线荧光光谱仪;隋国荣等;《光学精密工程》;20171130;第25卷(第11期);第2878-2888页 * |
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