CN109443192A - A kind of single crystal silicon square rods plane angle angle measurement device and its test method - Google Patents
A kind of single crystal silicon square rods plane angle angle measurement device and its test method Download PDFInfo
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- CN109443192A CN109443192A CN201811266539.6A CN201811266539A CN109443192A CN 109443192 A CN109443192 A CN 109443192A CN 201811266539 A CN201811266539 A CN 201811266539A CN 109443192 A CN109443192 A CN 109443192A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
- G01B7/30—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention discloses a kind of single crystal silicon square rods plane angle angle measurement device and its test methods, including capacitance measurement circuit, controller, motor driver, display, turntable, motor, the controller is connect with capacitance measurement circuit, the controller is connect with display, and the controller is connect with motor driver.This method can remind whether operator needs the problem of carrying out barreling amendment to single crystal silicon square rods again, improve the quality and production yield rate of silicon wafer.
Description
Technical field
The present invention relates to the measurement method of the adjacent plane angle angle of single crystal silicon square rods two and measuring device fields, in particular to
A kind of single crystal silicon square rods plane angle angle measurement device and its test method.
Background technique
Monocrystalline silicon piece is basic material important in information industry, is mainly used for making semiconductor element, such as high-power whole
Flow device, high power transistor, diode, switching device, crystal silicon solar energy battery.Its production method is as follows: firstly, be made it is more
Then crystal silicon or unformed silicon grow bar-like single crystal silicon by vertical pulling method or zone-melting process from melt, then by single crystal silicon square rods
By barreling and it is cut into monocrystalline silicon piece.Monocrystalline silicon belongs to diamond lattic structure, thus to single crystal silicon square rods carry out cutting and
When being fabricated to monocrystalline silicon piece, require operator and operated along certain crystal orientation, otherwise monocrystalline silicon piece be easy to collapse angle or
There is decorative pattern in part or surface, poor so as to cause Si wafer quality, poor reliability, service life reduction, while reducing production finished product
Rate improves production cost.Silicon single crystal rod determines if to be cuboid after barreling, i.e., every two adjacent surfaces angle whether be
90 °, be a kind of effective ways of determining crystal orientation.
It therefore, is the quality for ensuring monocrystalline silicon piece, the angle of measurement two adjacent plane of single crystal silicon square rods has important work
With.If the angle on-right angle of two adjacent plane of single crystal silicon square rods, the single crystal silicon square rods after barreling cannot be according to specific
Crystal orientation cutting, causes monocrystalline silicon piece to become fragile, is easily damaged.In addition, the semiconductor device quality being thus made into is deteriorated, reliability
Difference, service life reduction.
The method of measurement plane angle angle usually utilizes optical means and vision imaging apparatus to measure the position on object two sides
It sets, such as optical autocollimating method, optical internal-reflection method, laser interferance method, ring laser method, optics super-heterodyne method.These light
Method requires optical imaging device to have very high resolution ratio, meanwhile, optical means requires alignment precision high, be automatically aligned to and
The realization of automation control is more difficult.In addition, utility model " height gauge of measurement verticality of end surfaces of silicon single crystal rods "
It (ZL201020243388.5) is using the verticality of graduated scale measurement silicon single crystal rod adjacent plane, although this method structure is simple
It is single, easy to operate, but can not achieve automation control and display.
Summary of the invention
The present invention provides a kind of single crystal silicon square rods plane angle angle measurement device and test method, can solve the prior art
The angle value of middle two adjacent plane of single crystal silicon square rods is tested, so as to remind operator whether need again to single crystal silicon square rods into
Row barrel finishing.
The present invention provides a kind of single crystal silicon square rods plane angle angle measurement device, including capacitance measurement circuit, controller,
Motor driver, display, turntable, motor, the controller are connect with capacitance measurement circuit by signal wire, the control
Device is connect with display by signal wire, and the controller is connect with motor driver by signal wire, the capacitance measurement electricity
9 capacitance sensors and signal processing circuit composition are routed, for capacitance signal to be converted to voltage signal and input controller；
Every 3 capacitance sensors are divided into one group in 9 capacitance sensors, are divided into three groups；The single crystal silicon square rods are placed on capacitor survey
It measures on the turntable among 9 capacitance sensors of circuit；The motor driver is used to execute the order of controller, driving electricity
Machine drives turntable rotation, adjusts the position of capacitance sensor and single crystal silicon square rods；The display is for showing capacitance measurement
Whether the measured value and prompting operator's single crystal silicon square rods of circuit need barrel finishing again；The controller passes through measurement
The capacity ratio of first and second capacitance sensor in three groups of capacitance sensors, finds out single crystal silicon square rods according to following relational expression
The average value of two plane plane angle angle of arbitrary neighborhood
Wherein, C1i, C2iThe capacitance of first and second capacitance sensor in respectively i-th group.
The capacitance measurement circuit includes to capacitance sensor Q11、Q12、Q13、Q21、Q22、Q23、Q31、Q32、Q33Capacitance
C11、C12、C13、C21、C22、C23、C31、C32、C33It is converted into the conversion circuit of voltage value V1~V9 of 0V~10V respectively；Q11、
Q21、Q31The conversion circuit of capacitance sensor includes capacitor conversion circuit, freq converting circuit, Q12、Q13、Q22、Q23、Q32、Q33Electricity
The conversion circuit for holding sensor includes capacitor conversion circuit, freq converting circuit and see-saw circuit composition.
The capacitance conversion circuit chooses NE555 chip.
The freq converting circuit chooses LM331 chip.
The operational amplifier chooses OP07.
The controller selects TRIO motion controller.
Two plane plane angle angle of single crystal silicon square rods arbitrary neighborhood is measured using device as described above the present invention also provides a kind of
Degree () method, include the following steps:
S1 adjusts positioning of the single crystal silicon square rods relative to capacitance sensor:
Plane where adjusting 9 capacitance sensors first is vertical with single crystal silicon square rods face diagonal.9 capacitance sensors are total
It is divided into three groups, each group of third capacitance sensor Q3iWith first sensor Q1iCapacity ratio C3i/C1iWhen value is 11.9,
Plane where showing 9 capacitance sensors is vertical with single crystal silicon square rods face diagonal.When being unsatisfactory for this and requiring, rotation can be passed through
Turntable is completed where turning single crystal silicon square rods.The step for can pass through controller internal processes control motor shaft drive monocrystalline silicon
Turntable where square rod rotates to designated position, to realize positioning.Positioning step is as follows:
S1.1 acquires the capacitance signal of 9 capacitance sensors using capacitance measurement circuit, and exports to controller；
The data of S1.2 controller storage capacitance measuring circuit output, extract capacitance sensor Q31With capacitance sensor Q11
Circuit output capacitance signal, calculate its capacitance ratio C31/C11；
For S1.3 when surveyed capacitance ratio is greater than 11.9, controller controls motor, make turntable where single crystal silicon square rods to
One step-length of right rotation；Repeat step S1.2；It is surveyed when surveyed capacitance is greater than 11.9, then by this capacitance and last time
Capacitance compare, if it is greater than the capacitance ratio of last time measurement, then controller is made to control motor, where making single crystal silicon square rods
Turntable rotates to the right a step-length；If it is less than the capacitance ratio that the last time measures, then so that controller is controlled motor, make list
Turntable where crystal silicon square rod rotates to the left a step-length；
S1.4 repeats step S1.2~S1.3, and until capacitance ratio is equal to 11.9, single crystal silicon square rods place of stopping rotating is revolved
Turntable；
S1.5 measures capacitance sensor Q32With capacitance sensor Q12Circuit output capacitance signal, calculate its capacitance ratio
C32/C12, and compared with 11.9, step S1.1~S1.4 is repeated, until capacitance ratio is equal to 11.9, monocrystalline silicon side of stopping rotating
Turntable where stick；
S1.6 measures capacitance sensor Q33With capacitance sensor Q13Circuit output capacitance signal, calculate its capacitance ratio
C33/C13, and compared with 11.9, step S1.1~S1.4 is repeated, until capacitance ratio is equal to 11.9, monocrystalline silicon side of stopping rotating
Turntable where stick；
So far the positioning of single crystal silicon square rods is completed；
The measurement of adjacent two plane included angle of S2 single crystal silicon square rods:
Q1i、Q2i、Q3iThe capacitance difference of capacitor is writeable are as follows:
By εsi=ε0·εr=11.9 ε0It is brought into (3) formula, arrangement obtains
Then have:
Wherein,
Respectively willWithTaylor series expansion is carried out at π/4, and is updated to (6) formula, is obtained after simplifying
By formula (2), (7) are brought into (5) formula, and arrangement can obtain
3 plane angles can be obtained by 3 group capacitors and formula (8), then are averaged (9) formula:
The measurement of any two plane included angle of S3 single crystal silicon square rods:
S3.1 controller controls motor, and platform where silicon single crystal rod is made to rotate to the right 90 °；
S3.2 repeats the step of S1~S2, measures the capacitance of 9 capacitance sensors and to calculate current silicon single crystal rod two flat
Face angle value；
S3.3 repeats step S3.1~S3.2, completes the survey calculation of silicon single crystal rod third plane holder angle value；
S3.4 repeats step S3.1~S3.2, completes the survey calculation of the 4th plane holder angle value of silicon single crystal rod.
The invention has the following advantages: a kind of single crystal silicon square rods plane angle angle measurement device provided by the invention and
Test method devises the angle value test method of two adjacent plane of single crystal silicon square rods, and compared with the existing technology, this method can be with
It reminds whether operator's single crystal silicon square rods need the problem of carrying out barreling amendment to single crystal silicon square rods again, improves silicon wafer
Quality and production yield rate.
Detailed description of the invention
Fig. 1 is a kind of structure composition figure of single crystal silicon square rods plane angle angle measurement device of the present invention；
Fig. 2 is the relative position distribution top view of capacitance sensor provided by the invention and single crystal silicon square rods；
Fig. 3 is a kind of conversion circuit block diagram of capacitance measurement circuit provided by the invention；
Fig. 4 is the circuit company of a kind of measuring circuit of capacitance sensor Q11 provided by the invention and TRIO motion controller
Map interlinking
Fig. 5 is the circuit company of a kind of measuring circuit of capacitance sensor Q12 provided by the invention and TRIO motion controller
Map interlinking；
Fig. 6 is the circuit company of a kind of measuring circuit of capacitance sensor Q13 provided by the invention and TRIO motion controller
Map interlinking.
Specific embodiment
With reference to the accompanying drawing, the specific embodiment of the present invention is described in detail, it is to be understood that of the invention
Protection scope be not limited by the specific implementation.
As shown in Figure 1, the present invention provides a kind of single crystal silicon square rods plane angle angle measurement device, including capacitance measurement electricity
Road, controller, motor driver, display, turntable, motor, the controller are connect with capacitance measurement circuit, the control
Device is connect with display, and the controller is connect with motor driver, and the capacitance measurement circuit is by 9 capacitance sensors and letter
Number processing circuit composition, for capacitance signal to be converted to voltage signal and input controller；Every 3 in 9 capacitance sensors
Capacitance sensor is divided into one group, is divided into three groups；The single crystal silicon square rods are placed on 9 capacitance sensors of capacitance measurement circuit
On intermediate turntable；The motor driver is used to execute the order of controller, and driving motor drives turntable rotation, adjustment
The position of capacitance sensor and single crystal silicon square rods；The display is used to show the measured value of capacitance measurement circuit and reminds behaviour
Make whether personnel's single crystal silicon square rods need barrel finishing again；The controller passes through first in three groups of capacitance sensors of measurement
With the capacity ratio of second capacitance sensor, two plane plane angle angle of single crystal silicon square rods arbitrary neighborhood is found out according to following relational expression
The average value of degree
Wherein, C1i, C2iThe capacitance of first and second capacitance sensor in respectively i-th group.
The capacitance measurement circuit includes to capacitance sensor Q11、Q12、Q13、Q21、Q22、Q23、Q31、Q32、Q33Capacitance
C11、C12、C13、C21、C22、C23、C31、C32、C33It is converted into the conversion circuit of voltage value V1~V9 of 0V~10V respectively；Q11、
Q21、Q31The conversion circuit of capacitance sensor includes capacitor conversion circuit, freq converting circuit, Q12、Q13、Q22、Q23、Q32、Q33Electricity
The conversion circuit for holding sensor includes capacitor conversion circuit, freq converting circuit and see-saw circuit composition.
The capacitance conversion circuit chooses NE555 chip.
The freq converting circuit chooses LM331 chip.
The operational amplifier chooses OP07.
The controller selects TRIO motion controller.
Two plane plane angle angle of single crystal silicon square rods arbitrary neighborhood is measured using device as described above the present invention also provides a kind of
Degree () method, include the following steps:
S1 adjusts positioning of the single crystal silicon square rods relative to capacitance sensor:
Plane where adjusting 9 capacitance sensors first is vertical with single crystal silicon square rods face diagonal.9 capacitance sensors are total
It is divided into three groups, each group of third capacitance sensor Q3iWith first sensor Q1iCapacity ratio C3i/C1iWhen value is 11.9,
Plane where showing 9 capacitance sensors is vertical with single crystal silicon square rods face diagonal.When being unsatisfactory for this and requiring, rotation can be passed through
Turntable is completed where turning single crystal silicon square rods.The step for can pass through controller internal processes control motor shaft drive monocrystalline silicon
Turntable where square rod rotates to designated position, to realize positioning.Positioning step is as follows:
S1.1 acquires the capacitance signal of 9 capacitance sensors using capacitance measurement circuit, and exports to controller；
The data of S1.2 controller storage capacitance measuring circuit output, extract capacitance sensor Q31With capacitance sensor Q11
Circuit output capacitance signal, calculate its capacitance ratio C31/C11；
For S1.3 when surveyed capacitance ratio is greater than 11.9, controller controls motor, make turntable where single crystal silicon square rods to
One step-length of right rotation；Repeat step S1.2；It is surveyed when surveyed capacitance is greater than 11.9, then by this capacitance and last time
Capacitance compare, if it is greater than the capacitance ratio of last time measurement, then controller is made to control motor, where making single crystal silicon square rods
Turntable rotates to the right a step-length；If it is less than the capacitance ratio that the last time measures, then so that controller is controlled motor, make list
Turntable where crystal silicon square rod rotates to the left a step-length；
S1.4 repeats step S1.2~S1.3, and until capacitance ratio is equal to 11.9, single crystal silicon square rods place of stopping rotating is revolved
Turntable；
S1.5 measures capacitance sensor Q32With capacitance sensor Q12Circuit output capacitance signal, calculate its capacitance ratio
C32/C12, and compared with 11.9, step S1.1~S1.4 is repeated, until capacitance ratio is equal to 11.9, monocrystalline silicon side of stopping rotating
Turntable where stick；
S1.6 measures capacitance sensor Q33With capacitance sensor Q13Circuit output capacitance signal, calculate its capacitance ratio
C33/C13, and compared with 11.9, step S1.1~S1.4 is repeated, until capacitance ratio is equal to 11.9, monocrystalline silicon side of stopping rotating
Turntable where stick；
So far the positioning of single crystal silicon square rods is completed；
The measurement of adjacent two plane included angle of S2 single crystal silicon square rods:
Q1i、Q2i、Q3iThe capacitance difference of capacitor is writeable are as follows:
By εsi=ε0εr=11.9 ε0It is brought into (3) formula, arrangement obtains
Geometrical relationship according to Fig.2, then has:
Wherein,
Respectively willWithTaylor series expansion is carried out at π/4, and is updated to (6) formula, is obtained after simplifying
By formula (2), (7) are brought into (5) formula, and arrangement can obtain
3 plane angles can be obtained by 3 group capacitors and formula (8), then are averaged (9) formula:
The measurement of any two plane included angle of S3 single crystal silicon square rods:
S3.1 controller controls motor, and platform where silicon single crystal rod is made to rotate to the right 90 °；
S3.2 repeats the step of S1~S2, measures the capacitance of 9 capacitance sensors and to calculate current silicon single crystal rod two flat
Face angle value；
S3.3 repeats step S3.1~S3.2, completes the survey calculation of silicon single crystal rod third plane holder angle value；
S3.4 repeats step S3.1~S3.2, completes the survey calculation of the 4th plane holder angle value of silicon single crystal rod.
Fig. 3 is the conversion circuit block diagram of capacitance measurement circuit 1.Referring to Fig. 3, capacitance measurement circuit includes to capacitance sensing
Device Q11、Q12、Q13、Q21、Q22、Q23、Q31、Q32、Q33Capacitance C11、C12、C13、C21、C22、C23、C31、C32、C33It converts respectively
At the conversion circuit of voltage value V1~V9 of 0V~10V.Q11、Q21、Q31The conversion circuit of capacitance sensor includes capacitor conversion electricity
Road, freq converting circuit.Q12、Q13、Q22、Q23、Q32、Q33The conversion circuit of capacitance sensor includes capacitor conversion circuit, frequency
Conversion circuit and see-saw circuit composition.
Fig. 4~6 are capacitance sensor Q11、Q12、Q13Conversion circuit and TRIO motion controller circuit connection diagram.Q21、
Q22、Q23；Q31、Q32、Q33As Fig. 4-6.Capacitance conversion circuit chooses NE555 chip, and freq converting circuit chooses LM331
Chip, operational amplifier choose OP07, and controller selects TRIO motion controller.
NE555 effect is to constitute time base circuit using internal timer, provides a system to time series pulse signals, is exported
The pulse frequency resistance, the resistance of the 2nd foot and the connection of the 7th foot, the 1st foot and the connection of the 2nd foot that are connected by the 4th foot and the 7th foot
Capacitor determines.The working principle of NE555 is: when the 4th foot of NE555 and the 8th foot connect 5V power supply, NE555 is in set shape
State, the 3rd foot of output end are in high level " 1 ".Meanwhile the 1st foot and the connection of the 2nd foot the electricity that is connected by the 4th foot and the 7th foot of capacitor
The resistance of resistance, the 2nd foot and the connection of the 7th foot charges to it, and the 2nd foot current potential increases.When the 2nd foot current potential increases to threshold level,
The 3rd foot of output end is in low level " 0 ".At this point, NE555 internal discharge tube is connected, the capacitor electric discharge of the 1st foot and the connection of the 2nd foot, the
2 foot current potentials reduce.When the 2nd foot current potential is down to threshold level, the 3rd foot of output end is in high level " 1 ".Above procedure repeats
It is existing, form stable multi-oscillation.
9 capacitance sensor Q11~Q33Equipped with 9 NE555 chip U1~U9, the circuit diagram of each NE555 chip
Similar, only external resistance value is different.By taking U1 chip as an example, Q11Capacitance sensor is connected between the 1st foot of U1 and the 2nd foot, and the 1st
Foot is grounded simultaneously, and the 2nd foot is connect with the 6th foot simultaneously, and the 3rd foot passes through resistance R3Ground connection, the 4th foot and the 8th foot connection+5V power supply,
5th foot passes through fixed capacity C1Ground connection, the 7th foot pass through resistance R2It is connect with the 6th foot, and passes through resistance R1It is connect with+5V power supply.
The output end frequency signal of NE555 is converted to voltage signal by the effect of LM331 chip, and the 1st foot of output end is defeated
The relationship of voltage value and input frequency signal out is by the external variable resistance of outer connecting resistance, the 2nd foot of the 1st foot of output end, the 5th
The external resistance of foot, fixed capacity determine.The working principle of LM331 is: the differential electricity that the 6th foot is formed through outer connecting resistance, capacitor
The DC voltage of Lu Jiayue 15V, the 7th foot is through two electric resistance partial pressures and added with the DC voltage of about 13V.When the failing edge of input pulse
When arrival, the 6th foot receives a negative sharp pulse, and when negative sense sharp pulse is greater than 2V, LM331 internal current source is to the 1st foot of output end
External capacitor charging.When the external capacitor both end voltage of the 1st foot reaches 13V, the external capacitor electric discharge of the 1st foot of output end.
When arriving input pulse failing edge, circuit is repeated the above process.
From structure, 9 NE555 chip U1~U9 export 9 different pulse frequencies, are furnished with 9 LM331 chip U10
~U18 realizes the conversion of frequency to voltage.The circuit diagram of each NE555 chip is similar, only external resistance value and capacitance
It is different.By taking U10 as an example, the 6th foot of input terminal of U10 connects resistance R3With capacitor C2The differential circuit of composition, the 1st foot of output end are logical
Cross capacitor C3With resistance R7Earth, the 2nd foot pass through variable resistance R8Ground connection, the 3rd foot, the 4th foot ground connection, capacitor Ct1And electricity
Hinder Rt1Series connection, difference capacitor Ct1Other end ground connection, resistance Rt1Another termination+15V power supply, capacitor Ct1With resistance Rt1Connecting pin is total
It is same to connect in the 5th foot, resistance R5And R6Series connection, connecting pin is connect jointly in the 7th foot, R5Another termination+15V power supply, R6Another termination
Ground, the 8th foot connection+15V power supply.
The effect of OP07 be by the voltage signal received reduce and reverse phase after range in (0,10) section V, then with
The analog input pin of TRIO expansion card connects.The circuit diagram phase of the see-saw circuit of Q12~Q33 capacitance sensor
Together.With Q12Reverse phase and amplifying circuit for, the non-inverting input terminal of difference amplifier A11 is grounded, and inverting input terminal passes through resistance
R73It is connect with the 1st foot of LM331, and passes through resistance R74It is connect with the output end of difference amplifier A11, the same phase of phase inverter A21
Input end grounding, inverting input terminal pass through resistance R75It is connect with the output end of difference amplifier A11, and passes through resistance R76With it is anti-
The output end of phase device A21 connects, and phase inverter A21 output end signal is V2, and with the expansion card P325's of TRIO motion controller
The connection of the 1st foot of analog input.
9 voltage signals of capacitance measurement circuit output are controlled by 1 CAN Analog input mModule P325 and TRIO movement
Device connection processed.
Disclosed above is only specific embodiments of the present invention, and still, the embodiment of the present invention is not limited to this, Ren Heben
What the technical staff in field can think variation should all fall into protection scope of the present invention.
Claims (7)
1. a kind of single crystal silicon square rods plane angle angle measurement device, it is characterised in that: including capacitance measurement circuit, controller, electricity
Machine driver, display, turntable, motor, the controller are connect with capacitance measurement circuit by signal wire, the controller
It is connect with display by signal wire, the controller is connect with motor driver by signal wire；
The capacitance measurement circuit is made of 9 capacitance sensors and signal processing circuit, for capacitance signal to be converted to electricity
Press signal and input controller；Every 3 capacitance sensors are divided into one group in 9 capacitance sensors, are divided into three groups；The monocrystalline
Silicon square rod is placed on the turntable among 9 capacitance sensors of capacitance measurement circuit；The motor driver is for executing
The order of controller, driving motor drive turntable rotation, adjust the position of capacitance sensor and single crystal silicon square rods；The display
Device is used to show the measured value of capacitance measurement circuit and reminds whether operator's single crystal silicon square rods need barrel finishing again；
The controller passes through the capacity ratio of first and second capacitance sensor in three groups of capacitance sensors of measurement, according to such as ShiShimonoseki
It is the average value that formula finds out two plane plane angle angle of single crystal silicon square rods arbitrary neighborhood
Wherein, C1i, C2iThe capacitance of first and second capacitance sensor in respectively i-th group.
2. a kind of single crystal silicon square rods plane angle angle measurement device as described in claim 1, it is characterised in that:
The capacitance measurement circuit includes to capacitance sensor Q11、Q12、Q13、Q21、Q22、Q23、Q31、Q32、Q33Capacitance C11、
C12、C13、C21、C22、C23、C31、C32、C33It is converted into the conversion circuit of voltage value V1~V9 of 0V~10V respectively；Q11、Q21、Q31
The conversion circuit of capacitance sensor includes capacitor conversion circuit, freq converting circuit, Q12、Q13、Q22、Q23、Q32、Q33Capacitance sensing
The conversion circuit of device includes capacitor conversion circuit, freq converting circuit and see-saw circuit composition.
3. a kind of single crystal silicon square rods plane angle angle measurement device as described in claim 1, it is characterised in that:
The capacitance conversion circuit chooses NE555 chip.
4. a kind of single crystal silicon square rods plane angle angle measurement device as described in claim 1, it is characterised in that:
The freq converting circuit chooses LM331 chip.
5. a kind of single crystal silicon square rods plane angle angle measurement device as described in claim 1, it is characterised in that:
The operational amplifier chooses OP07.
6. a kind of single crystal silicon square rods plane angle angle measurement device as described in claim 1, it is characterised in that:
The controller selects TRIO motion controller.
7. a kind of method using claim 1 described device measurement two plane plane angle angle of single crystal silicon square rods arbitrary neighborhood,
It is characterized in that, this method comprises the following steps:
S1 adjusts positioning of the single crystal silicon square rods relative to capacitance sensor:
Plane where adjusting 9 capacitance sensors first is vertical with single crystal silicon square rods face diagonal；9 capacitance sensors are divided into
Three groups, each group of third capacitance sensor Q3iWith first sensor Q1iCapacity ratio C3i/C1iWhen value is 11.9, show 9
Plane where a capacitance sensor is vertical with single crystal silicon square rods face diagonal；When being unsatisfactory for this and requiring, it is single rotation can be passed through
Turntable is completed where crystal silicon square rod；The step for can pass through controller internal processes control motor shaft drive single crystal silicon square rods
Place turntable rotates to designated position, to realize positioning, positioning step is as follows:
S1.1 acquires the capacitance signal of 9 capacitance sensors using capacitance measurement circuit, and exports to controller；
The data of S1.2 controller storage capacitance measuring circuit output, extract capacitance sensor Q31With capacitance sensor Q11Circuit
Output capacitance signal calculates its capacitance ratio C31/C11；
For S1.3 when surveyed capacitance ratio is greater than 11.9, controller controls motor, makes single crystal silicon square rods place turntable to dextrorotation
Turn a step-length；Repeat step S1.2；When surveyed capacitance is greater than 11.9, then the electricity that this capacitance and last time are surveyed
Capacitance compares, and if it is greater than the capacitance ratio of last time measurement, then controller is made to control motor, makes rotation where single crystal silicon square rods
Platform rotates to the right a step-length；If it is less than the capacitance ratio that the last time measures, then so that controller is controlled motor, make monocrystalline silicon
Turntable where square rod rotates to the left a step-length；
S1.4 repeats step S1.2~S1.3, and until capacitance ratio is equal to 11.9, stop rotating single crystal silicon square rods place turntable；
S1.5 measures capacitance sensor Q32With capacitance sensor Q12Circuit output capacitance signal, calculate its capacitance ratio C32/
C12, and compared with 11.9, step S1.1~S1.4 is repeated, until capacitance ratio is equal to 11.9, single crystal silicon square rods institute of stopping rotating
In turntable；
S1.6 measures capacitance sensor Q33With capacitance sensor Q13Circuit output capacitance signal, calculate its capacitance ratio C33/
C13, and compared with 11.9, step S1.1~S1.4 is repeated, until capacitance ratio is equal to 11.9, single crystal silicon square rods institute of stopping rotating
In turntable；
So far the positioning of single crystal silicon square rods is completed；
The measurement of adjacent two plane included angle of S2 single crystal silicon square rods:
Q1i、Q2i、Q3iThe capacitance difference of capacitor is writeable are as follows:
By εsi=ε0·εr=11.9 ε0It is brought into (3) formula, arrangement obtains
Then have:
Wherein,
Respectively willWithTaylor series expansion is carried out at π/4, and is updated to (6) formula, is obtained after simplifying
By formula (2), (7) are brought into (5) formula, and arrangement can obtain
3 plane angles can be obtained by 3 group capacitors and formula (8), then are averaged (9) formula:
The measurement of any two plane included angle of S3 single crystal silicon square rods:
S3.1 controller controls motor, and platform where silicon single crystal rod is made to rotate to the right 90 °；
S3.2 repeats the step of S1~S2, measures the capacitance of 9 capacitance sensors and calculates current two plane holder of silicon single crystal rod
Angle value；
S3.3 repeats step S3.1~S3.2, completes the survey calculation of silicon single crystal rod third plane holder angle value；
S3.4 repeats step S3.1~S3.2, completes the survey calculation of the 4th plane holder angle value of silicon single crystal rod.
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| CN201811266539.6A CN109443192B (en) | 2018-10-29 | 2018-10-29 | Testing device and testing method for plane angle of monocrystalline silicon square rod |
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| CN201811266539.6A CN109443192B (en) | 2018-10-29 | 2018-10-29 | Testing device and testing method for plane angle of monocrystalline silicon square rod |
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| CN109443192B CN109443192B (en) | 2020-12-22 |
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Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104990510A (en) * | 2015-07-11 | 2015-10-21 | 烟台南山学院 | Direct-pull monocrystalline silicon diameter measurement method |
| CN105196433A (en) * | 2015-09-24 | 2015-12-30 | 上海日进机床有限公司 | Single crystal silicon rod cutting-off machine and single crystal silicon rod cutting-off method |
| CN205784970U (en) * | 2016-05-19 | 2016-12-07 | 云南三奇光电科技有限公司 | A kind of device for measuring silicon single crystal rod length |
| CN207227593U (en) * | 2017-08-18 | 2018-04-13 | 杭州慧翔电液技术开发有限公司 | A kind of automatic loading/unloading structure for the detection of silicon single crystal rod diameter |
| CN207275662U (en) * | 2017-09-20 | 2018-04-27 | 杭州慧翔电液技术开发有限公司 | A kind of conveying device detected automatically for silicon single crystal rod |
-
2018
- 2018-10-29 CN CN201811266539.6A patent/CN109443192B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104990510A (en) * | 2015-07-11 | 2015-10-21 | 烟台南山学院 | Direct-pull monocrystalline silicon diameter measurement method |
| CN105196433A (en) * | 2015-09-24 | 2015-12-30 | 上海日进机床有限公司 | Single crystal silicon rod cutting-off machine and single crystal silicon rod cutting-off method |
| CN205784970U (en) * | 2016-05-19 | 2016-12-07 | 云南三奇光电科技有限公司 | A kind of device for measuring silicon single crystal rod length |
| CN207227593U (en) * | 2017-08-18 | 2018-04-13 | 杭州慧翔电液技术开发有限公司 | A kind of automatic loading/unloading structure for the detection of silicon single crystal rod diameter |
| CN207275662U (en) * | 2017-09-20 | 2018-04-27 | 杭州慧翔电液技术开发有限公司 | A kind of conveying device detected automatically for silicon single crystal rod |
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