CN109427611A - Automatic processing machine platform group and the wafer chemical drug automatic transmission system for applying it - Google Patents
Automatic processing machine platform group and the wafer chemical drug automatic transmission system for applying it Download PDFInfo
- Publication number
- CN109427611A CN109427611A CN201710749449.1A CN201710749449A CN109427611A CN 109427611 A CN109427611 A CN 109427611A CN 201710749449 A CN201710749449 A CN 201710749449A CN 109427611 A CN109427611 A CN 109427611A
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- Prior art keywords
- automatic
- raw material
- processing machine
- automated guided
- guided vehicle
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G63/00—Transferring or trans-shipping at storage areas, railway yards or harbours or in opening mining cuts; Marshalling yard installations
- B65G63/008—Transferring or trans-shipping at storage areas, railway yards or harbours or in opening mining cuts; Marshalling yard installations for bulk material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67155—Apparatus for manufacturing or treating in a plurality of work-stations
- H01L21/67161—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers
- H01L21/67173—Apparatus for manufacturing or treating in a plurality of work-stations characterized by the layout of the process chambers in-line arrangement
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The present invention discloses a kind of automatic processing machine platform group, includes: multiple machine tables；Execution unit, including bracket and dispenser, the adjacent machine table of bracket, and dispenser is movably arranged on bracket；Vision positioning sensor, to sense and position the position of at least opening of a chemicals Raw material pail；An at least connection cover is removably attachable to the opening of an at least chemicals Raw material pail by dispenser；And an at least connection pipe body, a connection at least connection cover and the supply tank in each machine table.Whereby, automatic processing machine platform group of the invention is not needed with using its wafer chemical drug automatic transmission system by manpower, it can will be replaced using the chemicals Raw material pail finished with the chemicals Raw material pail for filling chemicals raw material, thus can effectively save manpower.
Description
Technical field
The present invention relates to a kind of automatic processing machine platform group and using its automatic transmission system, one is particularly related to
Plant automatic processing machine platform group and the wafer chemical drug automatic transmission system using it.
Background technique
General wafer fab is in carrying out wafer processing processing, from processes such as raw material supply, raw material transport, raw material replacements
In, it must all be carried out by manpower.
For example, when the chemicals Raw material pail for filling chemicals raw material is provided to wafer by chemicals supplier
After processing factory, transport vehicle transporting chemical pharmaceutical raw material bucket need to be driven by manpower to machine table group；When chemicals Raw material pail
After being transported to the machine table group, using the chemicals Raw material pail that finishes and chemicals need to will be filled by manpower
The chemicals Raw material pail of raw material is replaced；Finally, being needed using the chemicals Raw material pail finished again by manpower
Transport vehicle is driven to transport to storing area.
In addition, will be using the chemicals Raw material pail finished and the chemicals raw material for filling chemicals raw material
It is Clean- to be connected to chemicals Raw material pail and take the tube body of chemicals raw material during bucket is replaced, and will
The chemicals Raw material pail for filling chemicals raw material positions and connects again the tube body, also need to complete by manpower.
Furthermore if the machine table in wafer fab is more and when being processed simultaneously, it may be necessary to while employing crowd
More manpowers transport and replace chemicals Raw material pail.The shortcomings that these complicated manpower requirements are not easy in addition to generation personnel training,
The problems such as wrong chemicals causes chemicals raw material supply mistake may also be changed due to personnel.
Summary of the invention
A purpose of the present invention is that propose a kind of automatic processing machine platform group and application its wafer chemical drug it is automatic
Transmission system can be performed the transport courses of automation, can effectively save manpower, while solve in the prior art that personnel training is not
Easily and personnel change the problems such as wrong chemicals causes chemicals raw material supply mistake.
For the above-mentioned purpose and other purposes, the present invention propose a kind of automatic processing machine platform group, include: multiple processing machines
Platform；Execution unit, including bracket and dispenser, the adjacent machine table of the bracket, and the dispenser is movably set
It is placed on the bracket；Vision positioning sensor, to sense and position the position of at least opening of a chemicals Raw material pail；
An at least connection cover, an at least connection cover are removably attachable at least chemicals original by the dispenser
The opening of charging basket；And an at least connection pipe body, connect the supply tank in an at least connection cover and each machine table.
In one embodiment of the invention, execution unit further includes rotary torsion perception control member, rotary torsion perception
Control member is set to the end of dispenser, and an at least connection cover has magnetic rings, and magnetic rings are located at an at least connection cover
Inner circumference.
In one embodiment of the invention, automatic processing machine platform group further include: cleaning component, to clean at least one company
Connect lid and an at least connection pipe body.
In one embodiment of the invention, cleaning component includes: first fluid delivery member, to provide ultrapure water extremely
A few connection cover and an at least connection pipe body connection pipe body；And second fluid delivery member, at least one company is dried with nitrogen to provide
Connect lid and an at least connection pipe body.
For the above-mentioned purpose and other purposes, the present invention propose a kind of wafer chemical drug automatic transmission system again, include:
Automatic processing machine platform group as described above；Automated guided vehicle, to transport an at least chemicals Raw material pail；Guidance part
Part, has multiple two-dimensional bars, and the two-dimensional bar is laid to form multiple transports of the automated guided vehicle
Path；Automatic dispatching component makes the automated guided vehicle by incuding the two-dimensional strip to control the guiding part
Shape code determines that its transportation route is one of described transportation route；And automatic transporting component, at least one by described in
Chemicals Raw material pail moves between the automated guided vehicle and automatic processing machine platform group.
In one embodiment of the invention, automated guided vehicle is divided into empty barrel storage area and bucketful storage area.
In one embodiment of the invention, automated guided vehicle includes the first transfer member, and automatic processing machine platform
Group includes the second transfer member, and the first transfer member and the second transfer member can be abutted each other to form automatic transporting component.
In one embodiment of the invention, the first transfer member and the second transfer member have roller bearing.
In one embodiment of the invention, automatic transporting component is set on automated guided vehicle or automatic transporting portion
Part is set in automatic processing machine platform group.
In one embodiment of the invention, wafer chemical drug automatic transmission system also includes: automatic charge device, to
Automated guided vehicle electric power is provided；Wherein when the electricity of automated guided vehicle is lower than default electricity, Automatic dispatching component
Control guiding part makes automated guided vehicle be moved to automatic charge device to charge.
Whereby, automatic processing machine platform group of the invention and application its wafer chemical drug automatic transmission system do not need
It, can will be using the chemicals Raw material pail finished and the chemicals Raw material pail for filling chemicals raw material by manpower
It is replaced, thus can effectively save manpower.In addition, homing guidance can be made to transport by Automatic dispatching component controls guiding part
Defeated vehicle determines that its transportation route is one of transportation route by incuding two-dimensional bar, does not need to transport by manpower
Transport to a few chemicals Raw material pail.Meanwhile it can also pass through the automatic dispatching of Automatic dispatching component, effectively solution prior art
Middle personnel training is not easy and personnel change the problems such as wrong chemicals causes chemicals raw material supply mistake.
Detailed description of the invention
Fig. 1 is the partial schematic diagram inside the machine table of one embodiment of the invention.
Fig. 2 is the schematic diagram of the automatic processing machine platform group of one embodiment of the invention.
Fig. 3 is the schematic diagram of the wafer chemical drug automatic transmission system of one embodiment of the invention.
Symbol description:
100 wafer chemical drug automatic transmission systems
10 automated guided vehicles
11 empty barrel storage areas
13 bucketful storage areas
15 first transfer members
191,192,193 transportation route
20 guiding parts
21 two-dimensional bars
30 Automatic dispatching components
40 automatic processing machine platform groups
400 machine tables
41 execution units
411 dispensers
412 connection covers
413 connection pipe body
415 rotary torsions perceive control member
416 magnetic rings
43 vision positioning sensors
45 second transfer members
90 chemicals Raw material pails
91 openings
93 lids
Specific embodiment
To fully understand the present invention, hereby by following specific embodiments, and cooperates attached drawing, the present invention is done specifically
It is bright.Those skilled in the art can understand the purpose of the present invention, feature and effect by content disclosed in this specification.Notably
It is that the present invention can be implemented or be applied by other different specific embodiments, and the various details in this specification can also base
In different viewpoints and application, various modifications and change are carried out without departing from the spirit of the present invention.In addition, attached drawing of the present invention is only
It is simple schematically illustrate, not according to the description of actual size.Correlation of the invention will be explained in further detail in the following embodiments and the accompanying drawings
Technology contents, but claims that disclosure of that is not intended to limit the invention.Illustrate as after:
Fig. 1 is the partial schematic diagram inside the machine table 400 of one embodiment of the invention.Fig. 2 is one embodiment of the invention
Automatic processing machine platform group 40 schematic diagram.Referring concurrently to Fig. 1 and Fig. 2, in inventive embodiments, automatic processing machine platform group
40 include multiple machine tables 400, execution unit 41, vision positioning sensor 43, at least a connection cover 412 and at least one company
Adapter tube body 413.Machine table 400 is, for example, etching machine.Execution unit 41 includes bracket 410 and dispenser 411, dispenser
411 be, for example, six axis robot arm.
As shown in Figure 1, the adjacent machine table 400 of bracket 410, and dispenser 411 is movably arranged on bracket 410.
As shown in Fig. 2, position of the vision positioning sensor 43 to sense and position at least opening 91 of a chemicals Raw material pail 90.
The opening 91 that an at least connection cover 412 is removably attachable to an at least chemicals Raw material pail 90 by dispenser 411.At least
An one connection pipe body 413 connection at least connection cover 412 and the supply tank (not being painted) in each machine table 400.Automation processing
Each component in board group 40 can automatically take the raw material in an at least chemicals Raw material pail 90, and detailed step will be in rear
Side's description.
For example, when an at least chemicals Raw material pail 90 is admitted to a machine table of automatic processing machine platform group 40
After 400, vision positioning sensor 43 can detect the position of the opening 91 (or lid 93) of chemicals Raw material pail 90, and foundation is detectd
It surveys result and controls execution unit 41.The dispenser 411 of execution unit 41 can be according to the detecting (positioning) of vision positioning sensor 43
As a result, the lid 93 of chemicals Raw material pail 90 is unloaded from opening 91, to expose opening 91.Then, dispenser 411 will at least
One connection cover 412 is connected to opening 91, and an at least connection cover 412 is made to be connected to an at least chemical drugs with an at least connection pipe body 413
Product Raw material pail 90, to take supply tank of the raw material supply in bucket into machine table 400.
In one embodiment, execution unit 41 further includes rotary torsion perception control member 415, rotary torsion perception control
Component 415 is set to the end of dispenser 411, and an at least connection cover 412 has magnetic rings 416, and magnetic rings 416 are located at least
The inner circumference of one connection cover 412.Rotary torsion perceives control member 415 can be by (such as the six axis robot of dispenser 411
Arm) electric power generation magnetic field is provided, 416 generation of magnetic rings with an at least connection cover 412 acts on, and then controls dispenser 411 and revolve
Go to the torsion of a few connection cover 412.When power supply disappears, dispenser 411 (rotary torsion perceive control member 415) is just not
Magneticaction can be generated with the magnetic rings 416 of an at least connection cover 412.In addition, control member can also be perceived by rotary torsion
Whether a 415 confirmation at least connection covers 412 (magnetic rings 416) are damaged, to be replaced.
It should be noted that although Fig. 1 is painted automatic processing machine platform group 40 (machine table 400) tool, there are two connection covers
412 are separately connected two connection pipe body 413, but the present invention is not limited to this.40 (machine table of automatic processing machine platform group
400) quantity of connection cover 412 and connection pipe body 413 should (a for example, at least chemicals Raw material pail 90 be opened depending on design requirement
91 quantity of mouth) depending on.
In one embodiment, automatic processing machine platform group 40 further includes cleaning component (not being painted).Component is cleaned to clear
Clean at least a connection cover 412 and an at least connection pipe body 413.For example, referring to Fig.1, when positioned at automatic processing machine platform group
The chemicals raw material in chemicals Raw material pail 90 on 40 run out (as empty chemicals Raw material pail 90) when, take
The dispenser 411 of component 41 at least a connection cover 412 (with connection pipe body 413) will be detached from empty chemicals Raw material pail 90, and
An at least connection cover 412 is sent into cleaning component to clean.At this point, the dispenser 411 of execution unit 41 also can be by empty change
The lid 93 for learning pharmaceutical raw material bucket 90 covers opening 91 again, and cap 93 is to close opening 91.
After empty chemicals Raw material pail 90 completes replacement with the chemicals Raw material pail 90 for filling chemicals raw material,
The dispenser 411 of execution unit 41 will fill the lid 93 of the chemicals Raw material pail 90 of chemicals raw material from opening 91 again
It unloads, and the chemicals Raw material pail for filling chemicals raw material will be connected to connection pipe body 413 by clean connection cover 412
90, to take the raw material in bucket, detailed step illustrates in above content, does not add to repeat herein.Above step does not all need
By manpower, can be automatically performed in automatic processing machine platform group 40.
In one embodiment, cleaning component includes first fluid delivery member and second fluid delivery member.First fluid supply
Part can for example provide ultrapure water connection cover 412 and connection pipe body 413, and second fluid delivery member can for example provide nitrogen and blow
Dry connection cover 412 and connection pipe body 413.
Fig. 3 is the schematic diagram of the wafer chemical drug automatic transmission system 100 of one embodiment of the invention.Wafer of the invention
Chemicals automatic transmission system 100 includes automatic processing machine platform group 40 as described above, automated guided vehicle
(Automated Guided Vehicle, AGV) 10, guiding part 20, Automatic dispatching component 30 and automatic transporting component.From
Guide transport lorry 10 is moved to transport an at least chemicals Raw material pail 90.Guiding part 20 has multiple two-dimensional bars 21,
Two-dimensional bar 21 is laid to form multiple transportation routes (transportation route as shown in Figure 3 of automated guided vehicle 10
191,192,193).Automatic dispatching component 30 (can not be painted) for example including image judgement system, to (from appearance packaging) area
Divide and judge the type for the chemicals that an at least chemicals Raw material pail 90 is filled；Automatic dispatching component 30 also controls guidance part
Part 20, make automated guided vehicle 10 by induction two-dimensional bar 21 determine its transportation route transportation route wherein it
One.Automatic transporting component to will an at least chemicals Raw material pail 90 in automated guided vehicle 10 and automatic processing machine platform
It is moved between 40 (for example including multiple for sour board) of group, rear will be described in more detail.
For example, automated guided vehicle 10 shown in Fig. 3, which multiplies, carries chemicals Raw material pail 90, and Automatic dispatching component
30 controllable guiding parts 20 make automated guided vehicle 10 determine it via institute in such as Fig. 3 by induction two-dimensional bar 21
One of transportation route 191,192,193 shown, by the transport of chemicals Raw material pail 90 to automatic processing machine platform group 40.
It should be noted that the decidable transportation route of two-dimensional bar 21 be not limited to shown in Fig. 3 transportation route 191,192,
193, the quantity of transportation route can according to the two-dimensional bar 21 of institute's arrangement quantity and automated guided vehicle 10 can be made logical
The floor area size crossed determines, does not add to repeat herein.
It using the guiding part 20 of two-dimensional bar 21, can be deployed easily in the ground of wafer processing space, and have
The advantages of level identification accuracy rate (such as up to 99.92%).Meanwhile Automatic dispatching component 30 can further comprise such as path
Calculating/planning procedure, it is possible to provide reasonable arrangement path planning, and automated guided vehicle 10 can be for example by installing infrared ray
The devices such as sensor, ultrasound sensors, bump bar effectively prevent multiple automated guided vehicles 10 while touching when advancing
It hits, reaches excellent moving-wire management.
It therefore, still can be even if there are multiple machine tables in wafer fab and carry out (such as etching) processing simultaneously
It does not use or on a small quantity using under conditions of manpower, provides the reasonable path planning of more automated guided vehicles 10 without will cause
Transport moving-wire in is chaotic, while also can effectively prevent the problem of chemicals raw material supply mistake.
Referring to Fig. 3, automated guided vehicle 10 can divide into empty barrel storage area 11 and bucketful storage area 13, and homing guidance
Transport vehicle 10 may include the first transfer member 15.Referring to Fig.1, Fig. 2, automatic processing machine platform group 40 may include the second transfer member
45, the first transfer member 15 and the second transfer member 45 can be abutted each other to form wafer chemical drug automatic transmission system 100
Automatic transporting component.In the present embodiment, the first transfer member 15 and the second transfer member 45 have roller bearing.
For example, referring concurrently to Fig. 1 and Fig. 3, automated guided vehicle 10 can carry filling in bucketful storage area 13
Learn the chemicals Raw material pail 90 of pharmaceutical raw material；Then, Automatic dispatching component 30 can control guiding part 20, transport homing guidance
Defeated vehicle 10 by induction two-dimensional bar 21 determine its via transportation route 191,192,193 as shown in Figure 3 wherein it
One, the chemicals Raw material pail 90 for filling chemicals raw material is transported to 40 (machine table of automatic processing machine platform group
400)；Then, first positioned at the first transfer member 15 and 40 (machine table of automatic processing machine platform group of empty barrel storage area 11
400) the second transfer member 45 (roller bearing) docking, the chemicals Raw material pail 90 in 40 overhead of automatic processing machine platform group is transported
To empty barrel storage area 11, then change to be located at the of the first transfer member 15 of bucketful storage area 13 and automatic processing machine platform group 40
The docking of two transfer members 45 (roller bearing) transports the chemicals Raw material pail 90 for filling chemicals raw material to automatic processing machine
In platform group 40 (machine table 400)；Finally, automated guided vehicle 10 carries off empty chemicals Raw material pail 90, that is, complete
By empty (using finish) chemicals Raw material pail 90 and the chemicals Raw material pail 90 of filling chemicals raw material
Replacement.
In another embodiment, automated guided vehicle 10 can for example multiply simultaneously carries four barrels of chemicals that can accommodate 200L
Raw material pail 90, alternatively, automated guided vehicle 10, which can for example multiply, carries one barrel of chemicals Raw material pail 90 that can accommodate one ton of weight, but
The present invention limits not to this.The visual actual demand such as bearing capacity, loading capacity or bearing mode of automated guided vehicle 10 is determined
It is fixed.
Although above-described embodiment with the first transfer member 15 and the second transfer member 45 there is roller bearing can abut each other with shape
It is illustrated at the automatic transporting component of wafer chemical drug automatic transmission system 100, but the present invention is not limited to this.At certain
In a little embodiments, the automatic transporting component of wafer chemical drug automatic transmission system 100 can for example be directly arranged at homing guidance
On transport vehicle 10 (, alternatively, being directly arranged in automatic processing machine platform group 40).For example, automatic transporting component is, for example,
Mechanical arm adds when the chemicals Raw material pail 90 for filling chemicals raw material is transported to automation by automated guided vehicle 10
After work board group 40, can also be completed by automatic transporting component it is above-mentioned will be using the chemicals Raw material pail 90 that finishes and dress
The movement that the chemicals Raw material pail 90 of full chemicals raw material is replaced.
In one embodiment, wafer chemical drug automatic transmission system 100 also includes automatic charge device (not being painted), is used
To provide automated guided vehicle 10 electric power.When the electricity of automated guided vehicle 10 be lower than default electricity (such as: complete electricity
10% or 20%) when, Automatic dispatching component 30 can control guiding part 20 to be moved to automated guided vehicle 10 to fill automatically
Electric installation charges.Therefore, there is no need to monitor by manpower, still can ensure that automated guided vehicle 10 will not because of out of power and
Stop in transportational process.
Above description is held, automatic processing machine platform group 40 of the invention and the wafer chemical drug using it transmit automatically and be
System 100 can not need will make by manpower by the automatic operation of each component in automatic processing machine platform group 40
It is replaced, thus can had with the chemicals Raw material pail 90 for filling chemicals raw material with the chemicals Raw material pail 90 finished
Effect saves manpower.In addition, guiding part 20 can be controlled by Automatic dispatching component 30, automated guided vehicle 10 is made to pass through induction
Two-dimensional bar 21 determines that its transportation route is one of transportation route, and not needing can transporting chemical drug by manpower
Raw material pail 90.Simultaneously as the automatic dispatching of Automatic dispatching component 30, can effectively solve personnel training in prior art and be not easy
And personnel change the problems such as wrong chemicals causes chemicals raw material supply mistake.
The present invention is hereinbefore disclosed with preferred embodiment, so it will be understood by those skilled in the art that embodiment only
For describing the present invention, and it is not construed as limiting the scope of the invention.It should be noted that the variation equivalent with embodiment such as
With displacement, should all be set as being encompassed within the scope of the present invention.Therefore, protection scope of the present invention is worked as and is defined with claims
Range subject to.
Claims (10)
1. an automatic processing machine platform group, characterized by comprising:
Multiple machine tables；
Execution unit, including bracket and dispenser, the adjacent machine table of the bracket, and the dispenser is movably set
It is placed on the bracket；
Vision positioning sensor, to sense and position the position of at least opening of a chemicals Raw material pail；
An at least connection cover, an at least connection cover are removably attachable to an at least chemical drugs by the dispenser
The opening of product Raw material pail；And
An at least connection pipe body connects the supply tank in an at least connection cover and each machine table.
2. the automatic processing machine platform group as described in claims 1, which is characterized in that the execution unit further includes a rotary torsion
Control member is perceived, the rotary torsion perception control member is set to the end of the dispenser, and described at least one connects
Lid has a magnetic rings, and the magnetic rings are located at the inner circumference of an at least connection cover.
3. the automatic processing machine platform group as described in claims 1, which is characterized in that the automatic processing machine platform group further include:
Component is cleaned, to clean an at least connection cover and an at least connection pipe body.
4. the automatic processing machine platform group as described in claims 3, which is characterized in that the cleaning component includes:
First fluid delivery member, to provide an at least connection cover described in ultrapure water and an at least connection pipe body；And
Second fluid delivery member is dried with nitrogen an at least connection cover and an at least connection pipe body to provide.
5. a kind of wafer chemical drug automatic transmission system, characterized by comprising:
Automatic processing machine platform group as described in any one of claims 1~4；
Automated guided vehicle, to transport an at least chemicals Raw material pail；
Guiding part, has multiple two-dimensional bars, and the two-dimensional bar is laid to form the automated guided vehicle
Multiple transportation routes；
Automatic dispatching component makes the automated guided vehicle by incuding the two-dimensional strip to control the guiding part
Shape code determines that its transportation route is one of described transportation route；And
Automatic transporting component, to will an at least chemicals Raw material pail in the automated guided vehicle and described automatic
It is moved between change machine table group.
6. the wafer chemical drug automatic transmission system as described in claims 5, which is characterized in that the automated guided vehicle quilt
Divide into empty barrel storage area and bucketful storage area.
7. the wafer chemical drug automatic transmission system as described in claims 5, which is characterized in that the automated guided vehicle packet
Include the first transfer member, and the automatic processing machine platform group includes the second transfer member, first transfer member with it is described
Second transfer member can be abutted each other to form the automatic transporting component.
8. the wafer chemical drug automatic transmission system as described in claims 7, which is characterized in that first transfer member and institute
The second transfer member is stated with roller bearing.
9. the wafer chemical drug automatic transmission system as described in claims 5, which is characterized in that the automatic transporting component setting
In on the automated guided vehicle or the automatic transporting component is set in the automatic processing machine platform group.
10. the wafer chemical drug automatic transmission system as described in claims 5, which is characterized in that also include:
Automatic charge device, to provide the automated guided vehicle electric power；
Wherein when the electricity of the automated guided vehicle is lower than default electricity, guided described in the Automatic dispatching component controls
Component makes the automated guided vehicle be moved to the automatic charge device to charge.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710749449.1A CN109427611A (en) | 2017-08-28 | 2017-08-28 | Automatic processing machine platform group and the wafer chemical drug automatic transmission system for applying it |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710749449.1A CN109427611A (en) | 2017-08-28 | 2017-08-28 | Automatic processing machine platform group and the wafer chemical drug automatic transmission system for applying it |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109427611A true CN109427611A (en) | 2019-03-05 |
Family
ID=65502474
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710749449.1A Withdrawn CN109427611A (en) | 2017-08-28 | 2017-08-28 | Automatic processing machine platform group and the wafer chemical drug automatic transmission system for applying it |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109427611A (en) |
-
2017
- 2017-08-28 CN CN201710749449.1A patent/CN109427611A/en not_active Withdrawn
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Application publication date: 20190305 |
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