CN109407197A - A kind of vacuum ultraviolet devating prism - Google Patents
A kind of vacuum ultraviolet devating prism Download PDFInfo
- Publication number
- CN109407197A CN109407197A CN201811546276.4A CN201811546276A CN109407197A CN 109407197 A CN109407197 A CN 109407197A CN 201811546276 A CN201811546276 A CN 201811546276A CN 109407197 A CN109407197 A CN 109407197A
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- China
- Prior art keywords
- prism
- clbo crystal
- light
- vacuum ultraviolet
- air
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Classifications
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B5/00—Optical elements other than lenses
- G02B5/30—Polarising elements
- G02B5/3083—Birefringent or phase retarding elements
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
- G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
- G02B1/11—Anti-reflection coatings
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/28—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising
- G02B27/283—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00 for polarising used for beam splitting or combining
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Optical Elements Other Than Lenses (AREA)
Abstract
The invention patent relates to a kind of vacuum ultraviolet devating prisms, including two panels clbo crystal prism, it is characterized in that the vacuum ultraviolet is 180-200nm, the two panels clbo crystal prism structure of devating prism is the same, apex angle is 38.9 ° ± 1 °, shape is two right-angled trapeziums, and the inclined-plane coupling of clbo crystal prism is symmetrically formed rectangular parallelepiped structure, and centre is connected using air-gap；The optical axis of two panels clbo crystal prism is vertical with o light spilling plane, natural light from clbo crystal prism incidence to air-gap in when, o light is totally reflected on inclined-plane, from vacuum ultraviolet devating prism side burnishing surface overflow；At this time e light from clbo crystal refraction by prism to air-gap in, into another piece of clbo crystal after exiting parallel, thus ensure that emergent light be complete polarised light, using wavelength in vacuum ultraviolet 180-200nm, extinction ratio < 5 × 10-6.
Description
Technical field
The invention patent belongs to structure design and the material selection field field of optical component, and especially a kind of vacuum is purple
Outer devating prism.
Background technique
As the application of optical technology is from visible ultraviolet, deep ultraviolet, then arrive the development of vacuum ultraviolet, ultraviolet optics skill
Art, especially deep ultraviolet and vacuum ultraviolet technology are even more important, and deep ultraviolet polarizer is always object concerned by people, it is
Constitute one of the core component of some deep ultraviolet test processing instruments, such as one visible light light-splitting luminosity of deep ultraviolet, ellipsometer, light
Quarter, chip etc., the polarizer of vacuum ultraviolet wait to develop.
Vacuum ultraviolet (vacuum ultraviolet, VUV) gain the name be due to the wave band ultraviolet light in air by
Oxygen absorbs strongly and can be only applied to vacuum, and long wavelength threshold is roughly in 150 ~ 200nm.Currently used devating prism has ice continent
Stone and Yttrium Orthovanadate Glan series laser are applied to visible near-infrared field；α-BBO Glan series of prisms be applied to it is ultraviolet, can
See near-infrared field；There is not polarizer application in deep ultraviolet 180-200nm.
Clbo crystal has good transmitance in 180-2200nm, and the transmitance of vacuum ultraviolet wave band 180-200nm is high, adopts
It can be by ultraviolet devating prism application extension to vacuum ultraviolet 180-200nm with clbo crystal production vacuum ultraviolet devating prism.
Summary of the invention
It is an object of the invention to overcome the shortcomings of present devating prism, existing devating prism be typically employed in it is ultraviolet, can
See and near-infrared field, but there is no the polarizer application of fine performance in 180-200nm vacuum ultraviolet.
The present invention using the high clbo crystal of 180-200nm vacuum ultraviolet transmitance, and the crystal it is birefringent between
Between quartz crystal and calcite crystal, the birefringence difference of o light and e light is about 0.08, in 180-200nm wave-length coverage, root
According to the Sellmeier Equation of clbo crystal, using air-gap structure, the apex angle for designing clbo crystal prism is 38.9 °
±1°；Therefore, the present invention clbo crystal prism the same using two chip architectures, apex angle is 38.9 ° ± 1 °, and shape is two straight
Angle is trapezoidal, and the inclined-plane coupling of clbo crystal prism is symmetrically formed rectangular parallelepiped structure, and centre is connected using air-gap；Two panels CLBO is brilliant
The optical axis of body prism is vertical with o light spilling plane, natural light from clbo crystal prism incidence to air-gap in when, o light is on inclined-plane
It is totally reflected, is overflowed from two panels clbo crystal prism side burnishing surface；E light is from clbo crystal refraction by prism to air-gap at this time
In, into another piece of clbo crystal after exiting parallel, thus ensure that emergent light be complete polarised light, using wavelength in vacuum
Ultraviolet 180-200nm, extinction ratio < 5 × 10-6.
Since clbo crystal is easy to deliquesce cracking, it is coated with anti-reflection film in the light pass surface of vacuum ultraviolet devating prism, on the one hand
Enhance transmitance, on the other hand prevents from absorbing the moisture cracking in air；In addition, the frosting in vacuum ultraviolet devating prism plates
Waterproof membrane processed.
Detailed description of the invention
Fig. 1 is a kind of vacuum ultraviolet devating prism schematic diagram of the invention patent；
Fig. 2 is a kind of vacuum ultraviolet devating prism ranges of incidence angles schematic diagram of the invention patent.
Specific embodiment
In order to be preferably illustrated to the invention patent, elaborate below in conjunction with attached drawing.
As shown in Figure 1, a kind of vacuum ultraviolet devating prism schematic diagram of the invention patent, 101 and 104 be clbo crystal rib
Mirror, 102 be air-gap, and 103 be sealing glue or gasket.
According to the law of refraction, the Sellmeier Equation of total reflection law and clbo crystal, in 180-200nm vacuum
Ultraviolet band, using air-gap structure, the apex angle for designing clbo crystal prism is 38.9 ° ± 1 °；It is processed into two chip architectures one
The clbo crystal prism 101 and 104 of sample, apex angle are 38.9 ° ± 1 °, and shape is two right-angled trapeziums, clbo crystal prism
Inclined-plane coupling is symmetrically formed rectangular parallelepiped structure, and centre is connected using air-gap 102；The light of two panels clbo crystal prism 101 and 104
Axis is vertical with o light spilling plane, natural light from clbo crystal prism incidence to air-gap in when, o light is totally reflected on inclined-plane,
It is overflowed from clbo crystal devating prism side burnishing surface；At this time e light from clbo crystal refraction by prism to air-gap in, entrance is another
Exiting parallel after block clbo crystal, to ensure that emergent light is complete polarised light, using wavelength in vacuum ultraviolet 180-
200nm, extinction ratio < 5 × 10-6.
Further, it since clbo crystal is easy to deliquesce cracking, is coated in the light pass surface of vacuum ultraviolet devating prism anti-reflection
On the one hand film enhances transmitance, on the other hand prevent from absorbing the moisture cracking in air；In addition, in vacuum ultraviolet devating prism
Frosting be coated with waterproof membrane.
Above-mentioned specific embodiment is not construed as further limiting the invention patent, those skilled in the art according to
The unsubstantiality change that the invention patent content is made should all be fallen into the invention patent protection scope.
Claims (2)
1. the present invention relates to a kind of vacuum ultraviolet devating prism, including two panels clbo crystal prism, it is characterised in that described is true
Ultraviolet sky is 180-200nm, and the two panels clbo crystal prism structure of devating prism is the same, and apex angle is 38.9 ° ± 1 °, shape two
The inclined-plane coupling of a right-angled trapezium, clbo crystal prism is symmetrically formed rectangular parallelepiped structure, and centre is connected using air-gap；Two panels
The optical axis of clbo crystal prism is vertical with o light spilling plane, natural light from clbo crystal prism incidence to air-gap in when, o light
It is totally reflected on inclined-plane, is overflowed from vacuum ultraviolet devating prism side burnishing surface；At this time e light from clbo crystal refraction by prism to
In air-gap, into another piece of clbo crystal after exiting parallel, thus ensure that emergent light be complete polarised light, use wavelength
In vacuum ultraviolet 180-200nm, extinction ratio < 5 × 10-6.
2. a kind of vacuum ultraviolet devating prism as described in claim 1, it is characterised in that clbo crystal surface is coated with anti-reflection film,
Increase transmitance and moisture-proof；Side frosting can be coated with damp-proof membrane, prevent clbo crystal from absorbing the moisture in air and cracking.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811546276.4A CN109407197A (en) | 2018-12-18 | 2018-12-18 | A kind of vacuum ultraviolet devating prism |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811546276.4A CN109407197A (en) | 2018-12-18 | 2018-12-18 | A kind of vacuum ultraviolet devating prism |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109407197A true CN109407197A (en) | 2019-03-01 |
Family
ID=65459779
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811546276.4A Pending CN109407197A (en) | 2018-12-18 | 2018-12-18 | A kind of vacuum ultraviolet devating prism |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109407197A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006153913A (en) * | 2004-11-25 | 2006-06-15 | Kogaku Giken:Kk | Polarizer |
| JP2007047374A (en) * | 2005-08-09 | 2007-02-22 | Kogaku Giken:Kk | Polarization separating element |
| CN102096141A (en) * | 2010-12-23 | 2011-06-15 | 福建福晶科技股份有限公司 | Alpha-BBO polarizing prism |
| JP2011120030A (en) * | 2009-12-04 | 2011-06-16 | National Institute Of Information & Communication Technology | 90° optical hybrid |
| CN202102135U (en) * | 2011-07-08 | 2012-01-04 | 福州高意光学有限公司 | Deep-ultraviolet, visual and near-infrared polarizing prism |
| JP2014026148A (en) * | 2012-07-27 | 2014-02-06 | Kogaku Giken:Kk | Total reflection type polarizer |
-
2018
- 2018-12-18 CN CN201811546276.4A patent/CN109407197A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006153913A (en) * | 2004-11-25 | 2006-06-15 | Kogaku Giken:Kk | Polarizer |
| JP2007047374A (en) * | 2005-08-09 | 2007-02-22 | Kogaku Giken:Kk | Polarization separating element |
| JP2011120030A (en) * | 2009-12-04 | 2011-06-16 | National Institute Of Information & Communication Technology | 90° optical hybrid |
| CN102096141A (en) * | 2010-12-23 | 2011-06-15 | 福建福晶科技股份有限公司 | Alpha-BBO polarizing prism |
| CN202102135U (en) * | 2011-07-08 | 2012-01-04 | 福州高意光学有限公司 | Deep-ultraviolet, visual and near-infrared polarizing prism |
| JP2014026148A (en) * | 2012-07-27 | 2014-02-06 | Kogaku Giken:Kk | Total reflection type polarizer |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190301 |
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| WD01 | Invention patent application deemed withdrawn after publication |