CN109405979B - Michelson interferometer image fringe width detection method and system - Google Patents
Michelson interferometer image fringe width detection method and system Download PDFInfo
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- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
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- G01J9/00—Measuring optical phase difference; Determining degree of coherence; Measuring optical wavelength
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Abstract
The invention relates to a method and a system for detecting the width of a Michelson interferometer image fringe. The core technology of the invention is to automatically detect the interference ring through the interference image and calculate the width of the bright and dark ring. The method comprises the steps of self-adaptive binary segmentation of interference images, calculation and screening of connected regions, extraction of ellipse connected regions, determination of ellipse centers and major and minor axis proportions, concentric ellipse fitting and bright and dark state determination, elliptical ring interference fringe state calculation and the like. According to the invention, by detecting the width of the concentric rings, the optical path difference condition of the Michelson interferometer can be calculated, the spectrum information is inverted, and whether the state of the interferometer is stable or not is determined.
Description
Technical field
The detection of Michelson's interferometer annular shape striation is carried out by image processing algorithm the present invention relates to a kind of
Method.
Background technique
Michelson's interferometer (English: Michelson interferometer) is most common one in optical interdferometer
Kind, principle is that a branch of incident light is respectively reflected by corresponding plane mirror after spectroscope is divided into two bundles because this two
Beam light frequency is identical, direction of vibration is identical and constant phase difference (meeting interference condition), so can interfere.In interference
The different light paths of two-beam can be realized by adjusting interference arm lengths and changing the refractive index of medium, so as to be formed
Different interference patterns.Interference fringe is the track of aplanatism difference, must be the corresponding light of site if interference fringe moves
The reason of path difference is changed, and optical path difference is caused to change.
Fig. 1 a and Fig. 1 b is the schematic diagram and generated concentric ring pattern of Michelson's interferometer respectively.Pass through inspection
The width for surveying concentric loop, can calculate the optical path difference situation of Michelson's interferometer, and inverting spectral information.In addition, logical
The variation for crossing the real-time monitoring annular width under static scene can be confirmed whether interferometer state is stable.
The counting equipment that traditional interferometer annulus monitoring usually requires auxiliary carries out, these instruments can monitor interferometer
The minor change of concentric circles striped, but this quasi-instrument is most accurate complicated, higher cost, in the not high occasion of required precision
Under, it is very inconvenient using this quasi-instrument.
Summary of the invention
The object of the present invention is to provide a kind of to detect the method for interfering oval ring width by interference image automatically, solves to make
With existing precision instrument detection width of fringe problem at high cost and complicated for operation, this method is succinctly efficient, can be used for reality
When monitor Michelson's interferometer annulus striation.
The technical solution of the invention is as follows provides a kind of Michelson's interferometer image width of fringe detection method, including
Following steps:
Step 1: adaptive binary segmentation method is used, bright interference elliptical ring is separated from the original image of interference pattern
Pixel obtains prospect bianry image;
Step 2: empty filling and contour optimization are carried out to the prospect bianry image that step 1 obtains;
Step 3: the connected region after detection and the optimization of markers step two in prospect bianry image;
Step 4: progress cavity inside the connected region that step 3 detects and marks is filled out using morphology operations method
It fills;
Step 5: center and the semi-major axis and half of step 4 treated each labeled connected region are calculated
Short axle ratio calculates dry according to the center of each obtained labeled connected region and semi-major axis and semi-minor axis ratio
Relate to elliptical ring center and semi-major axis and semi-minor axis ratio;
Step 6: elliptical bright dark after being fitted according to the calculated result fitted ellipse of step 5 and judgement, each ellipse is right
Answer a number;
Step 7: all ellipses that successively search step six is fitted, it is ellipse according to each interference of the oval luminance acquisition of search
The starting ellipse of annulus and termination are oval;It obtains each interference elliptical ring starting ellipse and terminates elliptical position;According to every
A oval width that interference elliptical ring is calculated with the elliptical position of termination of interference elliptical ring starting.
Further, it in order to avoid image overall brightness is uneven, is counted in step 1 using 16 pieces of subregion (4 rows 4 column)
The method for calculating threshold value is split.
Further, the method that morphologic filtering is used in step 2, obtains step 1 using rounded form filter
The prospect bianry image obtained carries out empty filling and contour optimization;This process passes through multiple image "ON", " closing " morphology
Operation is realized.The step for passing through, most of desultory point are eliminated, and the interference ellipse ring region divided is more continuous, and one
A little defects and cavity are filled.
Further, step 3 is by classical FloodFill algorithm to the connection in bianry image after step 2 optimization
Region carries out 4 neighborhood detections and label.
Further, step 4 specifically:
A1: the connected region that step 3 is detected and marked corresponds to bianry image reversion, i.e., preceding background is exchanged, after inverting
Image be background binary figure;
A2: 8 neighbourhood signatures are carried out to background binary figure connected region by FloodFill algorithm;
A3: the dilation operation of 1 pixel is carried out to the background binary figure after label, operation result and prospect binary map are done
Difference obtains expansion area;
A4: on prospect binary map connected region image, the connection label of expansion area respective pixel is checked, if certain is expanded
All labels in region are consistent, then it is assumed that the background connected region is the interior void of prospect connected region;
A5: assign prospect connected region identical label interior void pixel.
Further, step 6 the following steps are included:
A: a secondary and an equal amount of blank image of original image is generated, in conjunction with interference elliptical ring center and axial ratio
Example assigns the value of a semi-major axis or semi-minor axis to each point in blank image according to ellipse formula and compiles to each ellipse
Number;
B: the average brightness of the corresponding original image pixels of point on each number ellipse is sought, which is judged according to threshold value t
Elliptical ring it is bright dark.
Further, elliptical according to the starting ellipse of each interference elliptical ring of oval luminance acquisition and termination in step 7
Method are as follows:
If the average brightness of ellipse a is less than threshold value t and the average brightness of ellipse a-1 is more than or equal to threshold value t, ellipse a is
The starting of one annulus is oval;If the average brightness of ellipse a is less than threshold value t and the average brightness of ellipse a+1 is more than or equal to threshold value
T, then ellipse a is that the termination an of annulus is oval.
The present invention also provides a kind of Michelson's interferometer image width of fringe detection systems, are characterized in that packet
Storage medium and processor are included, storage medium stores computer program, when which is executed by processor, realizes above-mentioned
Method and step.
The beneficial effects of the present invention are:
1, the present invention can be detected the annulus state of Michelson's interferometer without other instruments;
Using the annulus state of image processing method detection Michelson's interferometer, which can be used as dry the present invention
A part of interferometer image preprocessing, without other instruments such as photoelectric counters.The stability of hardware system is improved, is dropped
Low cost and volume weight.
2, measurement accuracy is high
The present invention is based on the images of interferometer to carry out annulus detection, can directly judge whether annulus state changes.
Since light and shade annulus is the output information of Michelson's interferometer, measured indirectly compared to using other instruments, directly from
It is higher that detection accuracy is carried out on annulus image.In addition, this algorithm takes full advantage of the statistical property in image information, maximum journey
Degree avoids the interference of random noise, further improves the accuracy of detection.
3, the algorithm speed of service is fast, portable strong
The algorithm that the present invention designs takes full advantage of the feature of the light and dark annulus pattern of Michelson's interferometer, directly
Find the center of circle and fit radius.Complicated sliding window search finding it is not related in calculating process, therefore the algorithm speed of service is fast.
In addition, the step of algorithm includes is basic image processing operations, realize that simply concurrency is strong, is also very easy to carry out
FPGA or GPU accelerates.
Detailed description of the invention
Fig. 1 a is the schematic diagram of Michelson's interferometer;
Fig. 1 b is concentric loop image;
Fig. 2 is algorithm flow block diagram of the invention;
Fig. 3 a is the binary segmentation figure of Mathematical morphology filter wavefront;
Fig. 3 b is the binary segmentation figure after morphologic filtering;
Fig. 4 a is the image after connected component labeling, and different colours represent different connected region labels;
Fig. 4 b is the image carried out Fig. 4 a after Morphological scale-space;
Fig. 5 is oval (corresponding different sizes) according to the calculated different numbers of elliptical center and major and minor axis ratio;
Fig. 6 a and Fig. 6 b are respectively the corresponding oval and testing result information of dark fringe Intermediate Gray.
Specific embodiment
Below in conjunction with drawings and the specific embodiments, the present invention will be further described.
The present invention can in the Michelson's interferometer image of low signal-to-noise ratio automatically detection interference elliptical ring position and
Radius, to calculate interferometer width of fringe.Its algorithm is as shown in Fig. 2, specifically include image preprocessing, interference elliptical ring ginseng
The processes such as number estimation, the fitting of interference elliptical ring, width of fringe calculating.Above-mentioned several processes correspond to the not same order that algorithm is implemented
Section, specifically follows the steps below implementation.
Image preprocessing:
Step 1: adaptive binary segmentation method is used, by bright annulus from low signal-to-noise ratio original image as shown in Figure 1 b
Pixel separation comes out.
Threshold value appropriate is found, and adaptive threshold fuzziness is done to image.Threshold value is determined using classical " Da-Jin algorithm "
(OTSU ' s Method) is carried out.Its principle is that two classification positions of maximum between-cluster variance are found on the statistic histogram of image.
The method is ripe algorithm, is not described here in detail.
Due to the interference ring of image different zones there is a situation where it is bright dark inconsistent, in order to avoid image overall brightness is uneven
It is even, therefore whole image is uniformly divided into 16 pieces (4 rows 4 column), it carries out adaptive binary segmentation respectively in each piece, obtains more
Good segmentation effect.
Step 2: empty filling and contour optimization are carried out to the result of binary segmentation.
Since interference elliptical ring picture noise is usually larger, there are more cavity and hairs in binary segmentation result
Pierce phenomenon.Before carrying out next step operation, bianry image quality is optimized using the method for morphologic filtering.By this
One step can be seen that most of desultory point from the comparison of Fig. 3 a and Fig. 3 b and be eliminated, and the interference ellipse ring region divided
More continuous, some defects and cavity are filled.This process passes through image "ON", " closing " operation realization, Morphologic filters
Using circle.The closed operation that radius is r1 is first carried out, eliminates cavity.Radius is executed again for the opening operation of r2, between elimination annulus
The random noise in part and burr.Filter parameter is according to picture size and interferes oval ring width and adjusts.For example, for dividing
Resolution is 1000 × 1000 pixel or so and interferes oval ring width for the Michelson interference image of 100 pixels or so,
Desirable r1=3, r2=2.
Interfere elliptical ring parameter Estimation:
Step 3: connected region detection and label.
For the binary map after previous step optimization, operation connected region detection.The step can pass through classics
FloodFill algorithm carries out 4 neighborhood Fast Labelings.Intermediate 2-3 more can be completely detected using connected component labeling
It is spaced biggish interference elliptical ring.Elliptical center coordinate and major and minor axis ratio are estimated using these interference elliptical rings.
Step 4: being filled using the connected region interior void that morphology operations method marks step 3.
Although having carried out the operation of empty filling in step 2, due to individual regional areas brightness irregularities or
Noise is abnormal, may cause inside the detected interference elliptical ring of connected region that there are biggish cavities.Therefore, it is being connected to
After zone marker, the cavity inside interference elliptical ring is filled to avoid the precision of subsequent calculating is influenced.Fig. 4 a and Fig. 4 b
It illustrates connected component labeling and treated as a result, different colours represent different connected region labels.
The calculating process of cavity filling are as follows:
A1: the connected region that step 3 is detected and marked corresponds to the reversion of prospect bianry image, i.e., preceding background is exchanged, through anti-
Image after turning is background binary figure;
A2: 8 neighborhood connected component labeling of FloodFill algorithm is carried out to background binary figure;
A3: the dilation operation of 1 pixel is carried out to the background binary figure after label, operation result and prospect bianry image are done
Difference obtains expansion area;
A4: on prospect binary map connected region image, checking the label of expansion area, if all labels of certain expansion area
Unanimously, then it is assumed that the background connected region is the interior void of certain prospect connected region;
A5: assign prospect connected region identical label interior void pixel.
Step 5: interference elliptical ring center and major and minor axis ratio estimate.
In each connected region of label, the center of each connected region, the calculating of center are calculated
Method is the average value of all label pixel positions.Center is screened, if the transverse and longitudinal coordinate of center is inclined
It is more than 10% from picture centre, then it is assumed that the connected component labeling is wrong, deletes its calculated result.To in remaining connected region
Heart position (xi, yi), i=1 ... n asks median as interference elliptical ring center, obtains the center of interference elliptical ring
(xc, yc)
(xc, yc)=Median ((x1, y1), (x2, y2) ..., (xn, yn))
Long axis and minor axis length are calculated to these connected regions.The major and minor axis of connected region is defined as with it with identical two
The elliptical long axis and minor axis length of rank central moment.According to major and minor axis calculating as a result, semi-major axis a can be found outiWith semi-minor axis bi
Ratio, ratio is denoted as ri,
The calculated ratio of all connected regions is sought into median as elliptical ring semi-major axis and semi-minor axis ratio,
R=Median (r1, r2..., rn)
Interfere elliptical ring fitting
Step 6: ellipse fitting and bright dark judgement.
It will be denoted as (x, y) with the coordinate of a point in an equal amount of blank image of original image, according to ellipse formula, in x-axis
In the case where corresponding transverse, it can be deduced that (x, y) puts the elliptical semimajor axis length a (x, y) in place and be
The corresponding relationship of reference axis and ellipse long and short shaft just has determined that after instrument installs.In addition it is also possible to according to upper
The mode that face solves connected region second moment estimates elliptical direction.
It (for ease of calculation can be with four houses according to the value that formula above can assign a semi-major axis for point each in image
Five enter round numbers).The integer value of semi-major axis is used to number as ellipse, and to pixel assignment where the elliptic contour, i.e. semi-major axis
Oval number for a is that (according to the actual situation, pixel of the semi-major axis less than 10 is normally at bright spot of view-field center, in blackening to a, can
Not consider).Fig. 5 illustrates different size of ellipse, is respectively provided with different labels, corresponding different semimajor axis length.Pass through
Seek the average brightness of the corresponding original image pixel of point on each ellipse, so that it may which the bright dark (in image of the annulus is judged according to threshold value t
In the case where gray scale normalization to [0,1], 0.2) threshold value t can take.
Width of fringe calculates
7, interference elliptical ring width of fringe calculates.
All ellipses are successively searched for, the starting ellipse of each interference elliptical ring is obtained and terminate oval serial number.Specific method
For if the average brightness of ellipse a is less than threshold value t and the average brightness of ellipse a-1 is more than or equal to threshold value t, ellipse a is a circle
The starting of ring is oval;If the average brightness of ellipse a is less than threshold value t and the average brightness of ellipse a+1 is more than or equal to threshold value t, ellipse
Circle a is that the termination an of annulus is oval.In this way, obtaining the starting final position of all Crape rings, so that it may Crape ring be calculated
Width and interval (since ellipse is with one heart, in proportion, calculating width and interval by semi-major axis or semi-minor axis can obtain
To the same result).Fig. 6 a and Fig. 6 b illustrate the corresponding ellipse of dark fringe Intermediate Gray, and detect oval width of fringe according to this
Equal result informations.
Claims (8)
1. a kind of Michelson's interferometer image width of fringe detection method, which comprises the following steps:
Step 1: using adaptive binary segmentation method, bright interference elliptical ring pixel separated from the original image of interference pattern,
Obtain prospect bianry image;
Step 2: empty filling and contour optimization are carried out to the prospect bianry image that step 1 obtains;
Step 3: the connected region after detection and the optimization of markers step two in prospect bianry image;
Step 4: using morphology operations method to the empty filling of progress inside the connected region that step 3 detects and marks;
Step 5: calculate step 4 treated each labeled connected region center and connected region it is half long
Axis and semi-minor axis ratio, according to the center of each obtained labeled connected region and semi-major axis and semi-minor axis ratio
Calculate interference elliptical ring center and semi-major axis and semi-minor axis ratio;
Step 6: according to elliptical bright dark, each ellipse corresponding one after the calculated result fitted ellipse of step 5 and judgement fitting
A number;
Step 7: all ellipses that successively search step six is fitted, according to each interference elliptical ring of the oval luminance acquisition of search
Starting ellipse and terminate oval;It obtains each interference elliptical ring starting ellipse and terminates elliptical position;According to each dry
Relate to the oval width that interference elliptical ring is calculated with the elliptical position of termination of elliptical ring starting.
2. a kind of Michelson's interferometer image width of fringe detection method according to claim 1, it is characterised in that: step
It is split in rapid one using the method for the 16 pieces of calculating threshold values in subregion.
3. a kind of Michelson's interferometer image width of fringe detection method according to claim 1, it is characterised in that:
The method that morphologic filtering is used in step 2, the prospect binary map that step 1 is obtained using rounded form filter
As carrying out empty filling and contour optimization.
4. a kind of Michelson's interferometer image width of fringe detection method according to claim 1, it is characterised in that:
Step 3 carries out 4 neighborhoods to the connected region in bianry image after step 2 optimization by classical FloodFill algorithm
Detection and label.
5. a kind of Michelson's interferometer image width of fringe detection method according to claim 1, which is characterized in that step
Rapid four specifically:
A1: the connected region that step 3 is detected and marked corresponds to the reversion of prospect bianry image, i.e., preceding background is exchanged, after inverting
Image be background binary figure;
A2: 8 neighbourhood signatures are carried out to background binary figure connected region by FloodFill algorithm;
A3: the dilation operation of 1 pixel is carried out to the background binary figure after label, operation result and prospect binary map are made the difference, obtained
To expansion area;
A4: on prospect binary map connected region image, the connection label of expansion area respective pixel is checked, if certain expansion area
All labels are consistent, then it is assumed that its corresponding background connected region is the interior void of prospect connected region;
A5: assign prospect connected region identical label interior void pixel.
6. a kind of Michelson's interferometer image width of fringe detection method according to claim 1, which is characterized in that step
Rapid six the following steps are included:
A: generate it is one secondary with an equal amount of blank image of original image, in conjunction with interference elliptical ring center and major and minor axis ratio,
The value of a semi-major axis or semi-minor axis is assigned to each point in blank image according to ellipse formula and each ellipse is numbered;
B: the average brightness of the corresponding original image pixels of point on each number ellipse is sought, interference ellipse is judged according to threshold value t
Ring it is bright dark.
7. a kind of Michelson's interferometer image width of fringe detection method according to claim 1, which is characterized in that step
According to the starting ellipse and the elliptical method of termination of each interference elliptical ring of oval luminance acquisition in rapid seven are as follows:
If the average brightness of ellipse a is less than threshold value t and the average brightness of ellipse a-1 is more than or equal to threshold value t, ellipse a is one
The starting of annulus is oval;If the average brightness of ellipse a is less than threshold value t and the average brightness of ellipse a+1 is more than or equal to threshold value t,
Oval a is that the termination an of annulus is oval.
8. a kind of Michelson's interferometer image width of fringe detection system, it is characterised in that: including storage medium and processor,
Storage medium stores computer program, when which is executed by processor, realizes side as claimed in claim 1 to 7
Method step.
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