CN109366459B - Micro-clamp for measuring clamping force and clamping jaw displacement by using fiber Bragg grating - Google Patents
Micro-clamp for measuring clamping force and clamping jaw displacement by using fiber Bragg grating Download PDFInfo
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- CN109366459B CN109366459B CN201811157091.4A CN201811157091A CN109366459B CN 109366459 B CN109366459 B CN 109366459B CN 201811157091 A CN201811157091 A CN 201811157091A CN 109366459 B CN109366459 B CN 109366459B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
- B25J7/00—Micromanipulators
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/24—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet
- G01L1/242—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre
- G01L1/246—Measuring force or stress, in general by measuring variations of optical properties of material when it is stressed, e.g. by photoelastic stress analysis using infrared, visible light, ultraviolet the material being an optical fibre using integrated gratings, e.g. Bragg gratings
Abstract
The invention relates to a micro clamp for measuring clamping force and clamping jaw displacement by using a fiber Bragg grating, which aims to solve the problem that the micro clamp in the prior art cannot accurately measure the clamping force and the clamping jaw displacement at the same time. The technical scheme comprises the following steps: base, be fixed in monolithic flexible mechanism on the base, install executor, controller in the cavity of seting up on monolithic flexible mechanism, the FBG demodulation appearance of being connected with the controller, and with the multiplexing sensor of optic fibre Bragg grating that the FBG demodulation appearance is connected, monolithic flexible mechanism includes: the displacement amplification mechanism comprises a displacement amplification mechanism, two clamping force sensing mechanisms which are symmetrically arranged and two clamping jaws which are symmetrically arranged, wherein the input stage of the displacement amplification mechanism is abutted to the actuator, the two output stages of the displacement amplification mechanism, the two clamping force sensing mechanisms and the two clamping jaws are in one-to-one correspondence, and the output stages of the displacement amplification mechanism, the clamping force sensing mechanisms and the clamping jaws are sequentially connected.
Description
Technical Field
The invention relates to the field of micro-operation and micro-assembly, in particular to a micro-clamp for measuring clamping force and clamping jaw displacement by using a fiber Bragg grating.
Background
With the rapid development of Micro-Electro-Mechanical systems (MEMS), and the inability of conventional MEMS fabrication processes to fabricate tiny parts with complex three-dimensional geometries and composed of different materials, Micro-assembly and Micro-manipulation techniques have shown significant weight. The micro clamp is an end effector of a micro assembly system and a micro operation system, is directly contacted with an operated object, plays a decisive role in the completion of micro assembly and micro operation tasks, and is widely applied to the fields of biomedicine, electronic manufacturing, aerospace, military and the like.
Common driving modes of the micro clamp comprise electrostatic driving, electrothermal driving, shape memory driving, electromagnetic driving, piezoelectric driving and the like, and compared with other driving modes, the piezoelectric driving has the advantages of high displacement resolution, large driving force, wide frequency response range, high response speed, good dynamic performance and the like, so that the micro clamp is particularly suitable for being used as the driving of the micro clamp.
However, because the output displacement of the piezoelectric actuator is small, in order to complete the clamping task, a displacement amplification mechanism is often adopted to amplify the micro displacement output by the actuator and then transmit the amplified micro displacement to the clamping jaw; meanwhile, the piezoelectric stack actuator has large driving force, a clamped object is small, the wall is thin and fragile, and the displacement amplification mechanism has the function of reducing force, so that the driving force output by the micro actuator is reduced by the displacement amplification mechanism and then is transmitted to the clamping jaw. The most basic requirements of the displacement amplification mechanism of the micro-clamp are small volume, simple structure, no clearance, no mechanical friction, high motion sensitivity, high resolution and stable displacement amplification ratio and force reduction ratio.
Further, since the size of the object to be clamped is generally smaller than 100 μm and is liable to be deformed or broken, it is generally necessary to perform the operation by using a controllable micro-gripper with force feedback, and therefore, it is necessary to integrate a clamping force sensor into the micro-gripper. The clamping process is carried out in a micro-assembly space, and in order to accurately realize an automatic assembly task, clamping jaw displacement information must be acquired, so that a clamping jaw displacement sensor needs to be integrated on a micro clamp. Therefore, the design of the micro-gripper should ensure that the clamping force and the jaw displacement can be measured simultaneously. The inventor (Wang D H, Yang Q, and Dong H M, A monomer compatible Piezoelectric-Driven Microgripper: Design, Modeling, and Testing, IEEE/ASME Transactions on mechanics, Vol 18, No 1, 138-147, Feb 2013, Wangdahua, Populus, a piezo-actuated micro-gripper and its open-loop displacement characteristics, nanotechnology and precision engineering, Vol 8, No 1, 47-53, January 2010) reported a micro-gripper structure, which realizes the sensing of clamping force and gripper displacement by sticking a semiconductor strain gauge on the micro-gripper, but because the clamping force and the clamping jaw displacement of the micro clamp are very small, the output signal of the strain gauge is very weak, and electromagnetic interference cannot be avoided, so that higher-precision measurement of the micro clamping force and the displacement of the clamping jaw is limited.
In conclusion, the micro clamp which has high precision, good stability and small resolution and can avoid electromagnetic interference and realize simultaneous sensing of clamping force and clamping jaw displacement is an urgent need.
Disclosure of Invention
The invention aims to provide a micro clamp for measuring clamping force and clamping jaw displacement by using fiber Bragg gratings, which solves the problem that the micro clamp in the prior art cannot simultaneously measure the clamping force and the clamping jaw displacement.
The technical scheme of the invention is as follows:
the invention provides a micro clamp for measuring clamping force and clamping jaw displacement by using fiber Bragg grating, which comprises: the utility model provides a multi-functional FBG sensor, including base, be fixed in monolithic flexible mechanism on the base, install executor, controller in the cavity that sets up on the monolithic flexible mechanism, with the FBG demodulation appearance that the controller is connected, and with the multiplexing sensor of fiber Bragg grating that the FBG demodulation appearance is connected, monolithic flexible mechanism includes:
the displacement amplification mechanism comprises a displacement amplification mechanism, two clamping force sensing mechanisms which are symmetrically arranged and two clamping jaws which are symmetrically arranged, wherein the input stage of the displacement amplification mechanism is abutted to the actuator, two output stages of the displacement amplification mechanism, the two clamping force sensing mechanisms and the two clamping jaws are in one-to-one correspondence, and the output stages of the displacement amplification mechanism, the clamping force sensing mechanisms and the clamping jaws are sequentially connected;
the fiber bragg grating multiplexing sensor includes: the FBG demodulation instrument comprises a first fiber Bragg grating and a second fiber Bragg grating which are formed on an optical fiber, wherein the first fiber Bragg grating and the second fiber Bragg grating are both connected with the FBG demodulation instrument, and the first fiber Bragg grating is arranged on the clamping force sensing mechanism at a position where the deformation of the clamping force sensing mechanism can be sensed; the second fiber Bragg grating is arranged on the displacement amplification mechanism at a position where the deformation of the displacement amplification mechanism can be induced;
when the controller controls the actuator to push the input stage of the displacement amplification mechanism in a first direction, the input stage of the displacement amplification mechanism converts the motion displacement generated by the pushing of the actuator in the first direction into the motion displacement in a second direction, and the motion displacement is sequentially transmitted to the positions of the clamping jaws through the output stage of the displacement amplification mechanism and the clamping force sensing mechanism, so that the two clamping jaws are closed, and a component to be clamped is clamped; the first direction is perpendicular to the second direction in a horizontal direction.
Preferably, the clamping force sensing mechanism is a mechanism capable of parallelly transmitting power transmitted by the output stage of the displacement amplification mechanism in the second direction, so that the clamping jaws are parallelly closed in the second direction.
Preferably, the output stage of the displacement amplification mechanism is a first parallelogram mechanism formed by processing on the single flexible mechanism, two adjacent connecting rods of the first parallelogram mechanism are connected through a first flexible hinge, and one of the connecting rods of the first parallelogram mechanism is connected with the input stage of the displacement amplification mechanism.
Preferably, the clamping force sensing mechanism is a second parallelogram mechanism formed by processing on the single-piece flexible mechanism, two adjacent connecting rods of the second parallelogram mechanism are connected through a second flexible hinge, and the first parallelogram mechanism, the second parallelogram mechanism and the clamping jaw are sequentially connected in series; or
The clamping force sensing mechanism is a double-flexible-beam mechanism formed by processing the single-chip flexible mechanism, and the first parallelogram mechanism, the double-flexible-beam mechanism and the clamping jaw are sequentially connected in series; or
The clamping force sensing mechanism is a cantilever beam mechanism formed by processing the single flexible mechanism, and the first parallelogram mechanism, the cantilever beam mechanism and the clamping jaw are sequentially connected in series.
Preferably, the input stage of the displacement amplification mechanism is two four-bar linkages machined and formed on the single flexible mechanism, the two four-bar linkages are symmetrically arranged, the two four-bar linkages correspond to the two first parallelogram mechanisms one by one, two adjacent connecting bars of the four-bar linkages are connected through a third flexible hinge, two fixed ends of the four-bar linkages are fixedly connected with the base, the input end of the four-bar linkage is abutted to the actuator, and the output end of the four-bar linkage is connected with one of the connecting bars of the first parallelogram mechanism.
Preferably, the input stage of the displacement amplification mechanism is a bridge type displacement amplification mechanism formed on the single flexible mechanism, the cavity is located in the bridge type displacement amplification mechanism, one output end of the bridge type displacement amplification mechanism is connected with one connecting rod of one first parallelogram mechanism of the two first parallelogram mechanisms, and the other output end of the bridge type displacement amplification mechanism is connected with one connecting rod of the other first parallelogram mechanism.
Preferably, when the second fiber bragg grating is mounted on the output stage of the displacement amplification mechanism, the second fiber bragg grating is mounted on one of the first flexible hinges, any two of the first flexible hinges, or four of the first flexible hinges of the first parallelogram mechanism.
Preferably, when the clamping force sensing mechanism is a second parallelogram mechanism, the first fiber bragg grating is mounted on one of the second flexible hinges, any two of the second flexible hinges or four of the second flexible hinges of the second parallelogram mechanism;
when the clamping force sensing mechanism is a double-flexible-beam mechanism, the first fiber Bragg grating is arranged on the surface of one side of one flexible beam, the inner surfaces of the two flexible beams, the outer surfaces of the two flexible beams or the inner surfaces and the outer surfaces of the two flexible beams of the double-flexible-beam mechanism;
when the clamping force sensing mechanism is a cantilever beam mechanism, the first fiber Bragg grating is arranged on the inner surface and/or the outer surface of a cantilever beam on the cantilever beam mechanism.
Preferably, the first flexible hinge, the second flexible hinge and the third flexible hinge are all elliptical flexible hinges, straight circular flexible hinges or straight beam flexible hinges.
Preferably, the bending rigidity of the clamping jaw is greater than that of the clamping force sensing mechanism, and the clamping surface of the clamping jaw is a plane or a curved surface attached to the surface of the component to be clamped.
Preferably, two cushion blocks which are oppositely arranged are installed in the cavity, the actuator is arranged between the two cushion blocks, one cushion block is abutted with the input stage of the displacement amplification mechanism, and the other cushion block is abutted with the groove wall of one side, facing the input stage of the displacement amplification mechanism, in the cavity;
a groove is formed in the end face, facing the single-piece flexible mechanism, of one side of the cushion block, and the single-piece flexible mechanism is clamped in the groove.
The invention has the beneficial effects that:
1) the fiber Bragg grating multiplexing technology is utilized to realize the simultaneous sensing of the clamping force and the clamping jaw position, the structure is simple, the electromagnetic interference is prevented, the corrosion resistance is realized, the sensitivity is high, the accurate measurement and the high-precision feedback control of the clamping force and the clamping jaw displacement can be realized, and the measured resolution ratio of the method is smaller than that of a common strain sensor.
2) The clamping jaws can be opened and closed in parallel when no load exists, and the clamping jaws can still move in parallel when clamping an object and sensing the clamping force and the displacement of the clamping jaws simultaneously so as to ensure that a clamping task is reliably finished and parts are not easy to slide or fall off.
Drawings
FIG. 1 is a schematic view of the present invention;
FIG. 2 is a second schematic structural diagram of the present invention;
FIG. 3 is a block diagram of a fiber Bragg grating multiplexing sensor of the present invention;
FIG. 4 is a structural diagram of the first fiber Bragg grating mounted on the second parallelogram mechanism according to the present invention;
FIG. 5 is a structural diagram of the installation of a second fiber Bragg grating on a first parallelogram mechanism according to the present invention;
FIG. 6 is one of the structural schematic diagrams of the single piece compliant mechanism of the present invention;
FIG. 7 is a second schematic structural view of a single-piece compliant mechanism of the present invention;
FIG. 8 is a third schematic structural view of a single-piece compliant mechanism of the present invention;
FIG. 9 is a fourth schematic structural view of the single piece compliant mechanism of the present invention;
FIG. 10 is a fifth structural schematic of the one-piece compliant mechanism of the present invention;
FIG. 11 is a sixth schematic structural view of the one-piece compliant mechanism of the present invention;
FIG. 12 is a seventh schematic structural view of the one-piece compliant mechanism of the present invention;
FIG. 13 is an eighth schematic structural view of the single piece compliant mechanism of the present invention;
FIG. 14 is a block diagram of the four bar linkage of the present invention;
description of reference numerals:
1-a base; 2-a single piece compliant mechanism; 3-an actuator; 4-fiber bragg grating multiplexing sensor; 41-a first fiber bragg grating; 42-a second fiber bragg grating; 5-FBG demodulation instrument; 6, cushion blocks; 7-a driving power supply; 8-cable interface; 21-displacement amplification mechanism; 22-clamping force sensing means; 23-a clamping jaw; 211 — an input stage; 212 — an output stage; 212a — first hinge point; 212b — second hinge point; 212c — a third hinge point; 212d — fourth hinge point; 213-four-bar mechanism; 214-a lever mechanism; 22 a-fifth hinge point; 22b — sixth hinge point; 22d — seventh hinge point; 22c — eighth hinge point; 221. 222-a flexible beam; 223-cantilever beam; 24-a first screw hole; 25-a second screw hole; 26-a third screw hole; 27-a fourth screw hole; 28-fifth screw hole.
Detailed Description
Referring to fig. 1 to 14, the present invention provides a micro-gripper for measuring a clamping force and a jaw displacement using a fiber bragg grating, including: base 1, be fixed in monolithic flexible mechanism 2 on base 1, install executor 3, the controller in the cavity of seting up on monolithic flexible mechanism 2, the FBG demodulation appearance 5 be connected with the controller, and with the multiplexing sensor 4 of fiber Bragg grating that 5 connections of FBG demodulation appearance, monolithic flexible mechanism 2 includes: the displacement amplification mechanism 21, the two clamping force sensing mechanisms 22 which are symmetrically arranged and the two clamping jaws 23 which are symmetrically arranged, the input stage 211 of the displacement amplification mechanism 21 is abutted to the actuator 3, the two output stages 212, the two clamping force sensing mechanisms 22 and the two clamping jaws 23 of the displacement amplification mechanism 21 correspond to each other one by one, and the output stage 212, the clamping force sensing mechanism 22 and the clamping jaws 23 of the displacement amplification mechanism 21 are sequentially connected; the fiber bragg grating multiplexing sensor 4 includes: a first fiber bragg grating 41 and a second fiber bragg grating 42 formed on the optical fiber, wherein both the first fiber bragg grating 41 and the second fiber bragg grating 42 are connected with the FBG demodulator 5, and the first fiber bragg grating 41 is installed at a position on the clamping force sensing mechanism 22 where the deformation of the clamping force sensing mechanism 22 can be induced; the second fiber bragg grating 42 is installed at a position on the displacement amplification mechanism 21 where the deformation of the displacement amplification mechanism 21 can be sensed; when the controller controls the actuator 3 to push the input stage 211 of the displacement amplification mechanism 21 in the first direction, the input stage 211 of the displacement amplification mechanism 21 converts the movement displacement generated by the pushing of the actuator 3 in the first direction into the movement displacement in the second direction, and the movement displacement is sequentially transmitted to the positions of the clamping jaws 23 through the output stage 212 of the displacement amplification mechanism 21 and the clamping force sensing mechanism 22, so that the two clamping jaws 23 are closed, and a component to be clamped is clamped; the first direction is perpendicular to the second direction in the horizontal direction.
Specifically, in the present invention, the number of the fiber bragg grating multiplexing sensors 4 may be 1 or 2. When the number of the optical fiber bragg grating sensors is 1, as shown in fig. 1, the optical fiber bragg grating multiplexing sensor 4 is only mounted on the clamping force sensing mechanism 22 and the displacement amplifying mechanism 21 which are connected with one clamping jaw 23, and only the deformation caused by one clamping jaw 23 is detected by the 1 optical fiber bragg grating multiplexing sensor 4; as shown in fig. 2, when there are 2 fiber bragg grating multiplexing sensors 4, the two fiber bragg grating multiplexing sensors 4 are respectively and correspondingly mounted on the clamping force sensing mechanism 22 and the displacement amplification mechanism 21, which are respectively connected to the two clamping jaws 23, and the two fiber bragg grating multiplexing sensors 4 respectively detect the deformation caused by the two clamping jaws 23.
Specifically, as shown in fig. 6, the single-piece flexible mechanism 2 is fixed on the base 1 by means of screw connection, 5 screw holes (a first screw hole 24, a second screw hole 25, a third screw hole 26, a fourth screw hole 27, and a fifth screw hole 28, respectively) are provided on the base 1, and 5 screws correspond to the 5 screw holes one by one, so that the connection between the single-piece flexible mechanism 2 and the base 1 at the positions of the 5 screw holes is rigid. The base 1 is made of aluminum alloy material, and other suitable materials can be adopted. The base 1 has a groove therein to ensure that it does not contact the flexible hinge and the flexible beam in the displacement amplification mechanism 21 and the clamping force sensing mechanism 22, which will be described later, and does not affect the movement of the actuator 3. The base 1 is secured to the attachment means so that the micro-gripper can access the micro-assembly/micro-manipulation system through the attachment means. The single-piece flexible mechanism 2 is an integrated structure and is formed by machining a titanium alloy plate through an electric spark wire machining process, such as a wire cutting process, a laser cutting process, an etching process and the like.
The bending rigidity of the clamping jaw 23 is larger than that of the clamping force sensing mechanism 22, and the clamping surface of the clamping jaw 23 is a plane or a curved surface attached to the surface of a component to be clamped. The gripping surface of the jaws 23 may be a bevel or a conical surface, for example when the part to be gripped is a vertebral body.
As shown in fig. 1 and 2, in the embodiment of the present invention, the first direction is a direction parallel to the center line of the one-piece flexure mechanism 2 (the longitudinal direction indicated in fig. 1 and 2), and the second direction is a direction perpendicular to the center line of the one-piece flexure mechanism 2 (the lateral direction indicated in fig. 1 and 2).
The actuator 3 is a piezo-ceramic stack actuator, and other types of actuators can be used as long as the required displacement resolution, driving force, frequency response range, response speed and dynamic performance can be satisfied, such as a voice coil motor.
When the actuator 3 is a piezoelectric ceramic stack actuator, a driving power supply 7 for supplying power to two poles of the piezoelectric ceramic stack actuator is arranged between a controller and the piezoelectric ceramic stack actuator, the voltage output by the driving power supply 7 is controllable (such as a power amplifier), the driving power supply 7 communicates with the controller through a cable interface 8 (such as a BNC connector, an SMA connector, etc.), when the controller controls the driving power supply 7 to apply voltage to two poles of the piezoelectric ceramic stack actuator, the piezoelectric ceramic stack actuator can elongate in a first direction, so as to push an input stage 211 of a displacement amplification mechanism 21 abutted against the piezoelectric ceramic stack actuator to generate motion displacement in the first direction, the input stage 211 of the displacement amplification mechanism 21 is converted to convert the motion displacement generated in the first direction into motion displacement in a second direction (primary displacement amplification), the output stage 212 of the displacement amplifying mechanism 21 amplifies the displacement in the second direction for the second time, and the clamping force sensing mechanism 22 senses the displacement in the second direction, so that the two clamping jaws 23 are closed, and the clamping of the part to be clamped is realized; when the controller controls the driving power supply 7 to stop applying voltage to the two poles of the piezoceramic stack actuator, the length of the piezoceramic stack actuator is restored, the input stage 211 of the displacement amplification mechanism 21 is not pushed any more, and then the two clamping jaws 23 are opened, so that the clamped part is released.
Specifically, the controller is connected to an output end of an FBG demodulator (fiber bragg grating demodulator) 5 through a cable interface 8 (such as a BNC connector, an SMA connector, etc.), and an input end of the FBG demodulator 5 is connected to the second fiber bragg grating 42 and the second fiber bragg grating 42, respectively. A first fiber bragg grating 41 and a second fiber bragg grating 42 may be formed at a first end of one optical fiber (single mode fiber or multimode fiber), or two first fiber bragg gratings 41 and two second fiber bragg gratings 42 may be formed at the first end of one optical fiber, or one or two first fiber bragg gratings 41 and one or two second fiber bragg gratings 42 may be formed at the second end of two optical fibers, respectively.
In the embodiment of the present invention, the first fiber bragg grating 41 is adhered to the clamping force sensing mechanism 22, and is used for detecting the deformation of the clamping force sensing mechanism 22; the second fiber bragg grating 42 is attached to the displacement amplification mechanism 21 and detects the strain in the displacement amplification mechanism 21. When the flexible hinges of the first parallelogram mechanism and the second parallelogram mechanism deform, the grid region of the Bragg grating adhered on the flexible hinges deforms to cause the central wavelength to translate; the FBG demodulator 5 can demodulate the deformation of the grid region of the Bragg grating according to the translation of the central wavelength, and then the size of the clamping force and the position of the clamping jaw are calculated.
The specific principle of the controller obtaining the clamping force and the clamping jaw displacement according to the respective sensed deformations of the first fiber bragg grating 41 and the second fiber bragg grating 42 is as follows:
according to the prior art, when the controller controls the driving power supply 7 to apply voltage to the two poles of the piezoelectric ceramic stack actuator to close the two clamping jaws 23, if the two clamping jaws 23 do not clamp the component to be clamped or the two clamping jaws 23 do not contact the component to be clamped, no deformation is generated at the clamping force sensing mechanism 22, at this time, the first fiber bragg grating 41 does not sense the deformation, and the FBG demodulator 5 performs conversion calculation according to the central wavelength translation amount of the change caused by the second fiber bragg grating 42 after detecting the deformation to obtain the clamping jaw displacement of the micro-clamp; when the two clamping jaws 23 clamp the component to be clamped, a clamping force is generated, so that the clamping force sensing mechanism 22 deforms, at this time, the first fiber bragg grating 41 can generate a central wavelength translation change after detecting the deformation, and the clamping force of the micro clamp is obtained by converting and calculating the central wavelength translation amount of the first fiber bragg grating 41.
Therefore, the relation between the deformation of the clamping force sensing mechanism 22 and the clamping force and the relation between the deformation of the displacement amplifying mechanism 21 and the displacement of the clamping jaw can be calculated, and the controller can accurately control the clamping force and the displacement of the clamping jaw according to the measured relation between the deformation of the clamping force sensing mechanism 22 and the output signal of the first fiber Bragg grating 41 and the relation between the deformation of the displacement amplifying mechanism 21 and the output signal of the second fiber Bragg grating 42 by calculating or calibrating the relation between the deformation of the clamping force sensing mechanism 22 and the output signal of the first fiber Bragg grating, so that the clamping of the part to be clamped is ensured to be stable, and the phenomenon that the part to be clamped deforms and is broken due to large stress can be prevented.
Specifically, in the present embodiment, a through groove (cavity) is formed from the upper side of the one-piece flexible mechanism 2 to the lower side of the one-piece flexible mechanism 2. Two opposite cushion blocks 6 are arranged in the cavity, the actuator 3 is arranged between the two cushion blocks 6, one cushion block 6 is abutted with the input stage 211 of the displacement amplification mechanism 21, and the other cushion block 6 is abutted with the side wall of one side, facing the input stage 211 of the displacement amplification mechanism 21, in the cavity; a groove is formed in the end face, facing the single-piece flexible mechanism 2, of one side of the cushion block 6, and the single-piece flexible mechanism 2 is clamped in the groove.
A sink is formed on the upper surface of the base 1 at a position facing the cavity, and the sink is provided to prevent the pad 6 and the actuator 3 from coming into contact with the base 1. The purpose of the provision of the further block 6 is to pre-tension the actuator 3, since the cavity is not a through slot in the first direction, so that the further block 6 abuts against a side wall of the cavity facing the input stage 211 of the displacement amplification mechanism 21, this arrangement having a guiding effect, so that the actuator 3 mounted in the cavity can be linearly moved in the first direction, either by extension or by return in the first direction. The single-chip flexible mechanism 2 is clamped in the groove of the cushion block 6, and the central axis of the actuator 3 can be ensured to be positioned on the upper surface of the single-chip flexible mechanism 2. And, the one side that cushion 6 and executor 3 contacted is the plane to guarantee that executor 3 and cushion 6 are rigid face contact.
Referring to fig. 6 to 13, in the embodiment of the present invention, the output stage 212 of the displacement amplification mechanism 21 is a first parallelogram mechanism formed on the single-piece flexible mechanism 2, two adjacent links of the first parallelogram mechanism are connected by a first flexible hinge, and one of the links of the first parallelogram mechanism is connected to the input stage 211 of the displacement amplification mechanism 21.
In the embodiment of the present invention, the first parallelogram mechanism not only plays a role of amplifying the output displacement of the actuator 3 for the second time, but also plays a role of sensing the displacement of the actuator 3.
Based on the motion characteristics of the parallelogram mechanism, when one link is fixed, a force in a direction parallel to the fixed link is input to any one link adjacent to the fixed link, and the link opposite to the fixed link is moved in that direction. Therefore, in the embodiment of the present invention, when a force in the second direction is input to one of the links of the first parallelogram mechanism connected to the input stage 211 of the displacement amplification mechanism 21, the link of the first parallelogram mechanism connected to the clamping force sensing mechanism 22 is moved in parallel in the second direction. The parallel movement of the first parallelogram mechanism in the second direction is transmitted by the clamping force sensing mechanism 22 to the position of the clamping jaw 23, so that the clamping jaw 23 is synchronously moved in the second direction.
The second fiber bragg grating 42 may be installed on the input stage 211 or the output stage 212 of the displacement amplification mechanism 21, and when the second fiber bragg grating 42 is installed on the input stage 211 of the displacement amplification mechanism 21, it may be installed at least one third flexible hinge position of the four-bar linkage or at least one hinge point position of the bridge type displacement amplification mechanism; when the second fiber bragg grating 42 is mounted on the output stage 212 of the displacement amplification mechanism 21, the arrangement of the second fiber bragg grating 42 may be varied, and the second fiber bragg grating 42 is mounted on one of the first flexible hinges, any two of the first flexible hinges, or four of the first flexible hinges of the first parallelogram mechanism.
Furthermore, in the embodiment of the present invention, the first flexible hinge in the first parallelogram mechanism may be in various forms, such as an elliptical flexible hinge, a straight circular flexible hinge or a straight beam flexible hinge, as long as the required motion effect can be achieved and accurate calculation is facilitated, for example, fig. 6, 7, 8, 9, 10 and 12 are straight circular flexible hinges, fig. 11 is a straight beam flexible hinge, and the like.
In the embodiment of the present invention, the clamping force sensing mechanism 22 is a mechanism that can transmit the power transmitted in the second direction to the output stage 212 of the displacement amplification mechanism 21 in parallel, and closes the clamping jaws 23 in parallel in the second direction.
For the specific shape of the clamping force sensing mechanism 22, various structural forms are provided in the embodiment of the present invention, specifically: as shown in fig. 6 to 11, the clamping force sensing mechanism 22 is a second parallelogram mechanism formed on the single flexible mechanism 2, two adjacent connecting rods of the second parallelogram mechanism are connected through a second flexible hinge, and the first parallelogram mechanism, the second parallelogram mechanism and the clamping jaw 23 are connected in series in sequence; or
As shown in fig. 12, the clamping force sensing mechanism 22 is a double-flexible beam mechanism formed by processing on the single-piece flexible mechanism 2, and the first parallelogram mechanism, the double-flexible beam mechanism and the clamping jaw 23 are sequentially connected in series; or
As shown in fig. 13, the clamping force sensing mechanism 22 is a cantilever beam mechanism formed on the single-piece flexible mechanism 2, and the first parallelogram mechanism, the cantilever beam mechanism and the clamping jaw 23 are connected in series in sequence.
As shown in fig. 6 to 11, when the clamping force sensing mechanism 22 is a second parallelogram mechanism, the form of the second flexible hinge may be varied, such as an elliptical flexible hinge, a straight circular flexible hinge or a straight beam flexible hinge, as long as the required motion effect can be achieved and accurate calculation is facilitated, for example, fig. 6, 7, 8, 9 and 10 are straight circular flexible hinges, fig. 11 is a straight beam flexible hinge, etc.
Correspondingly, in the embodiment of the present invention, the arrangement of the second fiber bragg grating 42 may be multiple, as shown in fig. 6 to 11, when the clamping force sensing mechanism 22 is a second parallelogram mechanism, the second fiber bragg grating 42 is installed on one of the second flexible hinges, any two of the second flexible hinges, or four of the second flexible hinges of the second parallelogram mechanism.
In the embodiment of the present invention, in order to reduce the manufacturing difficulty of the fiber bragg grating multiplexing sensor 4, when the fiber bragg grating multiplexing sensor 4 only includes one optical fiber, the first fiber bragg grating 41 and the second fiber bragg grating 42 are attached to the side walls of the first parallelogram mechanism and the second parallelogram mechanism in the same direction. As shown in fig. 1, the number of the first fiber bragg gratings 41 and the number of the second fiber bragg gratings 42 are 1, the first fiber bragg gratings 41 are attached to the outer side wall of the second parallelogram mechanism, and the second fiber bragg gratings 42 are attached to the outer side wall of the first parallelogram mechanism. That is, in fig. 1 and 3, when the first fiber bragg grating 41 is attached to the fifth hinge point 22a and/or the sixth hinge point 22b, the second fiber bragg grating 42 is optimally attached to the first hinge point 212a and/or the third hinge point 212 c.
When the fiber bragg grating multiplexing sensor 4 includes two optical fibers and both the first fiber bragg grating 41 and the second fiber bragg grating 42 are two, one first fiber bragg grating 4 and one second fiber bragg grating 42 are respectively disposed on the two optical fibers. The first fiber bragg gratings 41 formed on the two optical fibers may be arranged diagonally to measure the deformation at the positions of two hinge points (the fifth hinge point 22a and the seventh hinge point 22d, or the sixth hinge point 22b and the eighth hinge point 22 c) located at diagonal positions on the second parallelogram mechanism, or the first fiber bragg gratings 41 formed on the two optical fibers may be symmetrically arranged to measure the deformation at the positions of two opposite hinge points (the fifth hinge point 22a and the seventh hinge point 22d, or the sixth hinge point 22b and the eighth hinge point 22 c) located at two opposite sidewalls on the second parallelogram mechanism; likewise, the second fiber bragg gratings 42 formed on the two optical fibers may be diagonally or symmetrically arranged to achieve deformation measurement of two hinge points located at diagonal positions on the first parallelogram mechanism or two opposite hinge points located on two opposite sidewalls.
When the fiber bragg grating multiplexing sensor 4 includes two optical fibers and the first fiber bragg grating 41 and the second fiber bragg grating 42 are both four, the deformation at the four hinge point positions of the first hinge point 212a to the fourth hinge point 212d can be sensed, and the deformation at the four hinge point positions of the fifth hinge point 22a to the eighth hinge point 22c can be sensed.
As shown in fig. 12, when the clamping force sensing mechanism 22 is a double flexible beam mechanism, the double flexible mechanism includes a flexible beam 221 and a flexible beam 222, and the first fiber bragg grating 41 is mounted on one side surface of one of the flexible beams, on inner surfaces of the two flexible beams, on outer surfaces of the two flexible beams, or on inner and outer surfaces of the two flexible beams of the double flexible beam mechanism.
The first fiber bragg grating 41 may be arranged on the double flexible beam mechanism when the clamping force sensing mechanism 22 is the double flexible beam mechanism, by virtue of the arrangement described above when the clamping force sensing mechanism 22 is the second parallelogram mechanism.
When the clamping force sensing mechanism 22 is a cantilever beam mechanism, the first fiber Bragg grating 41 is mounted on the inner and/or outer surface of a cantilever beam 223 on the cantilever beam mechanism.
When the clamping force sensing mechanism 22 is a second parallelogram mechanism or a double-flexible beam mechanism, the two structural forms of the clamping force sensing mechanism 22 and the arrangement form of the first fiber bragg grating 41 both realize the measurement of the clamping force and can ensure that the clamping jaw does not rotate and still moves in parallel when clamping an object.
In the embodiment of the present invention, the form of the clamping force sensing mechanism 22 may be varied as long as the clamping jaw 23 can achieve the desired parallelism during clamping and can generate the small deformation required for measuring the clamping force.
In addition, in the embodiment of the present invention, the input stage 211 of the displacement amplification mechanism 21 may also be in various forms, for example, as shown in fig. 6, 11 and 12, the input stage 211 of the displacement amplification mechanism 21 is two four-bar linkages formed on a single flexible mechanism 2, the two four-bar linkages are symmetrically arranged, the two four-bar linkages correspond to the two first parallelogram mechanisms one by one, two adjacent links of the four-bar linkages are connected through a third flexible hinge, two fixed ends of the four-bar linkages are fixedly connected with the base 1, an input end of the four-bar linkage is abutted against the actuator 3, and an output end of the four-bar linkage is connected with one of the links of the first parallelogram mechanisms.
As shown in fig. 6, 11 and 12, two four-bar linkages are arranged at the front end of the cavity, and one moving end (input end) of the four-bar linkage is closely attached (abutted) to the actuator 3 through a cushion block 6, so that the moving direction of the input end of the four-bar linkage is consistent with the force and displacement output direction of the actuator 3; two fixed ends of the four-bar linkage are respectively fixed with the base 1 through screws, and the other moving end (output end) is connected with a side connecting rod of the first parallelogram linkage close to the four-bar linkage.
The third flexible hinge can be in various forms, such as an elliptical flexible hinge, a straight circular flexible hinge or a straight beam flexible hinge, as long as the required motion effect can be achieved and accurate calculation is convenient.
As shown in fig. 14, each four-bar linkage specifically includes a four-bar linkage 213 and a lever linkage 214, an input end of the lever linkage 214 abuts against the pad 6, an input end of the four-bar linkage 213 is an output end of the lever linkage 214, and the lever linkage 214 uses a fixed third flexible hinge as a fulcrum.
In the embodiment of the present invention, when the input stage of the displacement amplification mechanism 21 is two four-bar linkages, the displacement conversion may be implemented in another manner, the input ends of the two four-bar linkages are connected by a connecting rod, and at this time, the cushion block 6 abuts against the connecting rod, and drives the input ends of the two four-bar linkages to move in the first direction by pushing the connecting rod.
Still alternatively, as shown in fig. 7 to 10, the input stage 211 of the displacement amplification mechanism 21 is a bridge displacement amplification mechanism formed on the single flexible mechanism 2, the cavity is located in the bridge displacement amplification mechanism, one output end of the bridge displacement amplification mechanism is connected to one of the links of one of the two first parallelogram mechanisms, and the other output end of the bridge displacement amplification mechanism is connected to one of the links of the other first parallelogram mechanism.
In the embodiment of the present invention, as shown in fig. 10, a guide mechanism may be provided in connection with the bridge type displacement amplification mechanism; or one side of the bridge type displacement amplification mechanism is fixed with the base 1, so that the output shaft of the bridge type displacement amplification mechanism is always vertical to the force and displacement output direction of the actuator 3.
As shown in fig. 7 to 10, the actuator 3 is disposed in the bridge-type displacement amplification mechanism, and when the actuator 3 moves in the first direction, the two output ends of the bridge-type displacement amplification mechanism are driven to move inwards in the second direction, so as to drive the two first parallelogram mechanisms to move inwards in the second direction, and finally, the clamping jaw 23 is closed.
The form of the bridge-type displacement amplification mechanism may be various, for example, fig. 7 is a rhombus form, fig. 8 is an oval form, fig. 9 and 10 are flexible hinges, etc.
In the embodiment of the present invention, the input stage 211 of the displacement amplification mechanism 21 includes, but is not limited to, the above form, and it is only necessary to ensure that it can convert the output displacement of the actuator 3 into the parallel output of the clamping jaw 23, has stable displacement amplification and force reduction, and satisfies the desired motion sensitivity and resolution.
The micro clamp for measuring the clamping force and the clamping jaw displacement by using the fiber Bragg grating provided by the embodiment of the invention has the following advantages:
1) the fiber Bragg grating multiplexing technology is utilized to realize the simultaneous sensing of the clamping force and the clamping jaw position, the structure is simple, the electromagnetic interference is prevented, the corrosion resistance is realized, the sensitivity is high, the accurate measurement and the high-precision feedback control of the clamping force and the clamping jaw displacement can be realized, and the measured resolution ratio of the method is smaller than that of a common strain sensor.
2) The clamping jaws 23 can be opened and closed in parallel when no load exists, and the clamping jaws 23 can still move in parallel when an object is clamped and the clamping force and the displacement of the clamping jaws are sensed simultaneously, so that the clamping task is reliably finished, and the sliding or falling of parts is not easy to cause.
Claims (8)
1. Utilize fiber bragg grating to measure the micro gripper of clamping-force and clamping jaw displacement, include: base (1), be fixed in monolithic flexible mechanism (2) on base (1), install in executor (3) in the cavity of seting up on monolithic flexible mechanism (2), controller, with FBG demodulation appearance (5) that the controller is connected, and with fiber Bragg grating multiplexing sensor (4) that FBG demodulation appearance (5) are connected, its characterized in that, monolithic flexible mechanism (2) include:
the displacement amplification mechanism comprises a displacement amplification mechanism (21), two symmetrically arranged clamping force sensing mechanisms (22) and two symmetrically arranged clamping jaws (23), wherein an input stage (211) of the displacement amplification mechanism (21) is abutted to the actuator (3), two output stages (212) of the displacement amplification mechanism (21), the two clamping force sensing mechanisms (22) and the two clamping jaws (23) are in one-to-one correspondence, and the output stages (212) of the displacement amplification mechanism (21), the clamping force sensing mechanisms (22) and the clamping jaws (23) are sequentially connected;
the fiber bragg grating multiplexing sensor (4) comprises: a first fiber Bragg grating (41) and a second fiber Bragg grating (42) formed on an optical fiber, wherein the first fiber Bragg grating (41) and the second fiber Bragg grating (42) are both connected with the FBG demodulator (5), and the first fiber Bragg grating (41) is arranged on the clamping force sensing mechanism (22) at a position where the deformation of the clamping force sensing mechanism (22) can be sensed; the second fiber Bragg grating (42) is arranged on the displacement amplification mechanism (21) at a position where the deformation of the displacement amplification mechanism (21) can be induced;
when the controller controls the actuator (3) to push the input stage (211) of the displacement amplification mechanism (21) in a first direction, the input stage (211) of the displacement amplification mechanism (21) converts the motion displacement generated by pushing the actuator (3) in the first direction into the motion displacement in a second direction, and the motion displacement is transmitted to the positions of the clamping jaws (23) in sequence through the output stage (212) of the displacement amplification mechanism (21) and the clamping force sensing mechanism (22), so that the two clamping jaws (23) are closed, and a component to be clamped is clamped; the first direction is vertical to the second direction in the horizontal direction; the clamping force sensing mechanism (22) is a mechanism capable of parallelly transmitting the power transmitted by the output stage (212) of the displacement amplification mechanism (21) in the second direction, and enables the clamping jaws (23) to be parallelly closed in the second direction; the output stage (212) of the displacement amplification mechanism (21) is a first parallelogram mechanism formed on the single-chip flexible mechanism (2) in a processing mode, two adjacent connecting rods of the first parallelogram mechanism are connected through a first flexible hinge, and one connecting rod of the first parallelogram mechanism is connected with the input stage (211) of the displacement amplification mechanism (21);
the clamping force sensing mechanism (22) is a second parallelogram mechanism formed on the single-piece flexible mechanism (2) in a processing mode, two adjacent connecting rods of the second parallelogram mechanism are connected through a second flexible hinge, and the first parallelogram mechanism, the second parallelogram mechanism and the clamping jaw (23) are sequentially connected in series; or
The clamping force sensing mechanism (22) is a double-flexible-beam mechanism formed by processing on the single-sheet flexible mechanism (2), and the first parallelogram mechanism, the double-flexible-beam mechanism and the clamping jaw (23) are sequentially connected in series; or
The clamping force sensing mechanism (22) is a cantilever beam mechanism formed by processing the single-chip flexible mechanism (2), and the first parallelogram mechanism, the cantilever beam mechanism and the clamping jaw (23) are sequentially connected in series.
2. The micro-gripper for measuring clamping force and clamping jaw displacement by using fiber bragg gratings according to claim 1, wherein the input stage (211) of the displacement amplification mechanism (21) is two four-bar linkages machined on the single flexible mechanism (2), the two four-bar linkages are symmetrically arranged, the two four-bar linkages correspond to the two first parallelogram mechanisms one by one, two adjacent connecting rods of the four-bar linkages are connected by a third flexible hinge, two fixed ends of the four-bar linkages are fixedly connected with the base (1), the input end of the four-bar linkage is abutted against the actuator (3), and the output end of the four-bar linkage is connected with one connecting rod of the first parallelogram mechanisms.
3. The micro-gripper for measuring clamping force and gripper displacement by fiber bragg grating according to claim 1, wherein the input stage (211) of the displacement amplification mechanism (21) is a bridge displacement amplification mechanism formed on the single flexible mechanism (2), the cavity is located in the bridge displacement amplification mechanism, one output end of the bridge displacement amplification mechanism is connected with one of the connecting rods of one of the two first parallelogram mechanisms, and the other output end of the bridge displacement amplification mechanism is connected with one of the connecting rods of the other first parallelogram mechanism.
4. The micro-gripper for measuring clamping force and gripper displacement using fiber bragg gratings according to any one of claims 2 to 3, characterized in that when the second fiber bragg grating (42) is mounted on the output stage (212) of the displacement amplification mechanism (21), the second fiber bragg grating (42) is mounted on one of the first flexible hinges, any two of the first flexible hinges, or four of the first flexible hinges of the first parallelogram mechanism.
5. The micro-gripper according to claim 1, 2 or 3, for measuring clamping force and gripper displacement using fiber Bragg gratings,
when the clamping force sensing mechanism (22) is a second parallelogram mechanism, the first fiber Bragg grating (41) is arranged on one of the second flexible hinges, any two of the second flexible hinges or four of the second flexible hinges of the second parallelogram mechanism;
when the clamping force sensing mechanism (22) is a double-flexible-beam mechanism, the first fiber Bragg grating (41) is arranged on the surface of one side of one flexible beam, the inner surfaces of the two flexible beams, the outer surfaces of the two flexible beams or the inner surfaces and the outer surfaces of the two flexible beams of the double-flexible-beam mechanism;
when the clamping force sensing mechanism (22) is a cantilever beam mechanism, the first fiber Bragg grating (41) is arranged on the inner surface and/or the outer surface of a cantilever beam (223) on the cantilever beam mechanism.
6. The micro-gripper according to claim 2, wherein the first flexible hinge, the second flexible hinge and the third flexible hinge are all elliptical flexible hinges, straight circular flexible hinges or straight beam flexible hinges.
7. The micro-gripper for measuring clamping force and gripper displacement by using fiber bragg gratings according to claim 1, wherein the bending stiffness of the gripper (23) is greater than that of the clamping force sensing mechanism (22), and the clamping surface of the gripper (23) is a plane or a curved surface which is attached to the surface of the component to be clamped.
8. The micro-clamp for measuring clamping force and clamping jaw displacement by using the fiber Bragg grating as claimed in claim 1, wherein two opposite cushion blocks (6) are installed in the cavity, and the actuator (3) is arranged between the two cushion blocks (6), wherein one cushion block (6) abuts against the input stage (211) of the displacement amplification mechanism (21), and the other cushion block (6) abuts against one side wall of the cavity, which faces the input stage (211) of the displacement amplification mechanism (21);
a groove is formed in the end face, facing the single-piece flexible mechanism (2), of one side of the cushion block (6), and the single-piece flexible mechanism (2) is clamped in the groove.
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| CN111203852B (en) * | 2020-01-16 | 2021-07-13 | 南京理工大学 | Positive stress electromagnetic drive micro-gripper |
| CN111299996B (en) * | 2020-03-10 | 2021-12-21 | 重庆大学 | Micro-clamping robot |
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