CN109345927A - A kind of device for realizing gas discharge homogenization using extra electric field - Google Patents
A kind of device for realizing gas discharge homogenization using extra electric field Download PDFInfo
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- CN109345927A CN109345927A CN201811406692.4A CN201811406692A CN109345927A CN 109345927 A CN109345927 A CN 109345927A CN 201811406692 A CN201811406692 A CN 201811406692A CN 109345927 A CN109345927 A CN 109345927A
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- 230000005684 electric field Effects 0.000 title claims abstract description 48
- 238000000265 homogenisation Methods 0.000 title claims abstract description 25
- 239000002184 metal Substances 0.000 claims abstract description 93
- 229910052751 metal Inorganic materials 0.000 claims abstract description 93
- 239000011888 foil Substances 0.000 claims abstract description 56
- 238000009413 insulation Methods 0.000 claims abstract description 47
- 239000007789 gas Substances 0.000 claims description 66
- 230000004888 barrier function Effects 0.000 claims description 14
- 238000005070 sampling Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 claims description 8
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 6
- 230000005611 electricity Effects 0.000 claims description 6
- 239000000523 sample Substances 0.000 claims description 6
- 238000002955 isolation Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000012780 transparent material Substances 0.000 claims description 5
- 229910052754 neon Inorganic materials 0.000 claims description 4
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 claims description 4
- 229910052786 argon Inorganic materials 0.000 claims description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 3
- 239000001307 helium Substances 0.000 claims description 3
- 229910052734 helium Inorganic materials 0.000 claims description 3
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 3
- 239000011810 insulating material Substances 0.000 claims description 3
- 229910052757 nitrogen Inorganic materials 0.000 claims description 3
- 239000001301 oxygen Substances 0.000 claims description 3
- 229910052760 oxygen Inorganic materials 0.000 claims description 3
- 239000002737 fuel gas Substances 0.000 claims 1
- 239000011521 glass Substances 0.000 description 53
- 238000000034 method Methods 0.000 description 5
- 230000015556 catabolic process Effects 0.000 description 4
- 238000007599 discharging Methods 0.000 description 4
- 239000002245 particle Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 239000003574 free electron Substances 0.000 description 1
- 239000008246 gaseous mixture Substances 0.000 description 1
- 230000005283 ground state Effects 0.000 description 1
- 230000003760 hair shine Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000000752 ionisation method Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000007935 neutral effect Effects 0.000 description 1
- 238000009828 non-uniform distribution Methods 0.000 description 1
- 238000005295 random walk Methods 0.000 description 1
- 238000012827 research and development Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 239000000741 silica gel Substances 0.000 description 1
- 229910002027 silica gel Inorganic materials 0.000 description 1
- 238000004381 surface treatment Methods 0.000 description 1
- 230000001052 transient effect Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G09—EDUCATION; CRYPTOGRAPHY; DISPLAY; ADVERTISING; SEALS
- G09B—EDUCATIONAL OR DEMONSTRATION APPLIANCES; APPLIANCES FOR TEACHING, OR COMMUNICATING WITH, THE BLIND, DEAF OR MUTE; MODELS; PLANETARIA; GLOBES; MAPS; DIAGRAMS
- G09B23/00—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes
- G09B23/06—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics
- G09B23/18—Models for scientific, medical, or mathematical purposes, e.g. full-sized devices for demonstration purposes for physics for electricity or magnetism
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/2406—Generating plasma using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
Abstract
The invention discloses a kind of devices that gas discharge homogenization is realized using extra electric field, belong to gas discharge research applied technical field, comprising: parallel plate electrode, the electrode for providing extra electric field, the first high voltage power supply and the second high voltage power supply；Parallel plate electrode includes: conductive plate, insulation board and metal foil；Metal foil is fixed on a surface of insulation board；Conductive plate and insulation board are fixed by limited block, and conductive plate is coated with the surface of conductive film and insulation board is fixed with the surface opposite of metal foil；The electrode for providing extra electric field is mounted between conductive plate and insulation board；One end of first high voltage power supply and the conductive film of conductive plate are electrically connected, and the metal foil on the other end and insulation board is electrically connected；The both ends of second high voltage power supply are electrically connected with the electrode both ends for providing extra electric field respectively；The device can more simply and easily " wipe " non-uniform part in gas discharge space, to realize the homogenization of gas discharge.
Description
Technical field
The invention belongs to gas discharges to study applied technical field, and in particular to a kind of to realize that gas is put using extra electric field
The device of electricity homogenization.
Background technique
Gas discharge is a kind of typical system for generating nonequilibrium state low temperature plasma.It is usually used and is separated by one section
Two parallel plate electrodes of distance, are subject to high voltage, the free electron in air gap accelerate under the action of electric field and with neutrality
Particle collides, and makes its ionization, to form the breakdown of gas.In gas breakdown discharge process, in addition to electronics and neutrality
The impact ionization process of particle is also accompanied by the collision excitation process of the two.When electron energy is not high enough, with neutral particle
After collision, it is insufficient to allow its ionization, but it can be made to transit to excitation state, excited state particle is unstable, understands to emit the shape of photon
Ground state is returned in formula transition, thus process gas discharge is with luminous, to be conducive to the observation to electric discharge phenomena.
Gas discharge can be divided into Townsend, aura, three kinds of streamer according to pd value (product of air pressure p and discharging gap d) size
Mode.Townsend avalanche works under very low pd value, shows as the extremely weak Uniform Discharge of light emission luminance.When pd is slightly higher, meeting of discharging
By Townsend mode transition to glow mode.Glow discharge shines more obviously, but the weaker also more disperse of brightness.Glow discharge can
To be homogeneous state, but under a number of conditions, disperse electric discharge heterogeneous or the electric discharge of spot figure state are shown as.Streamer-discahrge works in more
Under high pd value, strength of discharge is most strong with brightness, homogeneous state is not present, after gas is punctured with streamer mode, in region of discharge meeting
Form many tiny and bright discharge channels, commonly referred to as streamer-discahrge silk.These discharge wires can be random arrangement simultaneously
It, can also regularly arranged formation spot figure state structure with random walk campaign.
In fact, the electric discharge of heterogeneous state is more general, more common discharge condition.This is because, actual
In discharge space, microcosmic parameter can not keep uniform at all position moment.For example, some position in discharge space
Place, there are the disturbance of the local of a transient state, this charge for disturbing the charge buildup, electrode surface that are probably derived from space is heavy
Product, the small irregularities of electrode surface or the minute impurities of attachment.Voltage and gas breakdown threshold is promoted to when applying to electrode
When value, the strong electric discharge heterogeneous of a local will be generated in the position, and under a number of conditions, such as compared with hyperbar, larger
Under air-gap separation, the local heterogeneity of electric discharge is easily enhanced and is gradually come to two sides development, is ultimately formed and is entirely put
The heterogeneous state or spot figure state in electric region.
Although the gas discharge form of heterogeneous state or spot figure state also has it in the special-purpose of some professional domains,
Even gas discharge has the application value closer to our real lifes, such as manufacture light source, ozone generation, environmental improvement, material
Material surface treatment etc..Also, the working efficiency of uniform gas electric discharge in such applications will be much higher than non-homogeneous electric discharge.As one
The application technology of kind closing to reality life, we are it is of course desirable that the technology is able to achieve under atmospheric environment to operate and slap
Control, i.e. realization Atomospheric pressure glow discharge or atmospheric pressure Townsend avalanche.However, as previously mentioned, the gas of Townsend and glow mode is put
Electricity works under lower pd value, if air pressure conditions are atmospheric pressure, needs discharging gap very small, this is very difficult to realize
's.And the Uniform Discharge of large area is also difficult to realize by way of reducing discharging gap merely, this greatly hinders this
The research and development and application of technology.
Summary of the invention
In view of this, the present invention provides a kind of device for realizing gas discharge homogenization using extra electric field, the device
It is effective for aura and the homogenization of non-homogeneous electric discharge under streamer both of which, it " can more simply and easily wipe " gas and put
Non-uniform part in electric space, to realize the homogenization of gas discharge.
The present invention is achieved through the following technical solutions:
A kind of device for realizing gas discharge homogenization using extra electric field, comprising: parallel plate electrode, outer for providing
The electrode of added electric field, the first high voltage power supply and the second high voltage power supply；
The parallel plate electrode is for generating dielectric barrier discharge, comprising: conductive plate, insulation board, metal foil and limit
Block；
The conductive plate is to plate one layer of conductive film on a surface of the substrate of insulation and formed, and the is machined on conductive plate
One through-hole；
It is machined with the second through-hole identical with the first through hole internal diameter on the insulation board, is machined in the metal foil
The internal diameter of third through-hole, third through-hole is greater than or equal to first through hole internal diameter；Metal foil is fixed on a surface of insulation board, and
The third through-hole of metal foil and the second through-hole of insulation board are coaxial；
The conductive plate is fixed as parallel opposite one by the limited block to insulate with insulation board, and conductive plate is coated with and leads
The surface of electrolemma and insulation board are fixed with the surface opposite of metal foil, and first through hole and the second through-hole are coaxial, conductive plate and insulation
The distance between plate is setting value；
The electrode for providing extra electric field is line-ring electrode, including becket and wire；
The becket is fixed between conductive plate and insulation board, and becket and the first through hole are coaxial, and metal
Foil is located within the scope of the envelope of becket internal diameter；
The wire sequentially passes through the third through-hole of metal foil, the second through-hole of insulation board and the first through hole of conductive plate
Afterwards, it is fixed in first through hole and the second through-hole by insulating materials；
First high voltage power supply is used to provide the described voltage needed for dielectric barrier discharge, and one end passes through conducting wire and conduction
The conductive film of plate is electrically connected, and the other end is electrically connected by the metal foil on conducting wire and insulation board；
Voltage needed for second high voltage power supply is used to provide the described direct current radiated electric field, one end pass through conducting wire and metal
Ring is electrically connected, and the other end is electrically connected by conducting wire and wire.
Another kind realizes the device of gas discharge homogenization using extra electric field, comprising: parallel plate electrode, for providing
The electrode of extra electric field, the first high voltage power supply and the second high voltage power supply；
The parallel plate electrode is for generating dielectric barrier discharge, comprising: conductive plate, insulation board, metal foil and limit
Block；
The conductive plate is to plate one layer of conductive film on a surface of insulation board to be formed；
The metal foil is fixed on a surface of insulation board；
The conductive plate is fixed as parallel opposite one by the limited block to insulate with insulation board, and conductive plate is coated with and leads
The surface of electrolemma and insulation board are fixed with the surface opposite of metal foil, and the distance between conductive plate and insulation board are setting value；
The electrode for providing extra electric field is parallel pole, comprising: two parallel metal bars or two metals
Plate；
Two parallel metal bars or metal plate are mounted between conductive plate and insulation board, and are located at a left side for the metal foil
Right two sides make metal foil between two parallel metal bars or two metal plates；
First high voltage power supply is used to provide the described voltage needed for dielectric barrier discharge, and one end passes through conducting wire and conduction
The conductive film of plate is electrically connected, and the other end is electrically connected by the metal foil on conducting wire and insulation board；
Voltage needed for second high voltage power supply is used to provide the described direct current radiated electric field, one end pass through conducting wire and one
Metal bar or metal plate are electrically connected, and the other end is electrically connected by conducting wire and another metal bar or metal plate.
Further, sampling resistor is installed on the conducting wire between first high voltage power supply and parallel plate electrode.
It further, further include oscillograph, the high-voltage probe of the oscillograph is in parallel with the first high voltage power supply, for measuring
First high voltage power supply is to voltage provided by parallel plate electrode；The low pressure probe of the oscillograph is in parallel with sampling resistor, uses
It is detected and is recorded in the voltage and current waveform signal to sampling resistor both ends.
It further, further include voltmeter, the voltmeter is in parallel with the second high voltage power supply, described for mentioning for measuring
Voltage provided by electrode for extra electric field.
It further, further include vacuum chamber, the parallel plate electrode and the electrode for providing extra electric field are placed in
In vacuum chamber, non-combustible gas is equipped in vacuum chamber, and the indoor air pressure of vacuum is setting value, is machined on vacuum chamber for seeing
Examine the transparent window of electric discharge pattern.
Further, the non-combustible gas is the single gas or two or more of argon gas, helium, neon, nitrogen, oxygen
Mixed gas.
Further, the insulation board is plate body made of transparent or opaque isolation material.
Further, the substrate of the conductive plate uses transparent material.
Further, first high voltage power supply uses high-voltage ac power or high-voltage pulse power source；Second high pressure
Power supply uses high-voltage DC power supply, high-voltage ac power or high-voltage pulse power source.
The utility model has the advantages that (1) present invention is to destroy the essential physical machine that gas discharge heterogeneity generates using extra electric field
System, the i.e. non-uniform Distribution of space charge, and the gas discharge homogenization realized, thus the uniform gas realized using the device
Electric discharge has good stability.
(2) electrode that extra electric field is provided in the present invention is not limited to line-ring electrode structure, is also possible to parallel pole knot
Structure or other structures form, the parameter for the first high voltage power supply and the second high voltage power supply that provide electric field are also limited without stringent,
And then in practical applications, the electrode group structure can be designed as the case may be and choose power supply, have both flexibility with it is convenient
Property.
(3) present invention is placed in vacuum chamber when carrying out electric discharge homogenization, and the air pressure in adjustable vacuum chamber is matched with gas
Than, realize different atmospheric pressure values, gas with various under gas discharge；When can also be placed in atmospheric environment, realize in atmosphere
Gas discharge under environment, therefore, the present invention are suitable for the different atmospheric pressure values including atmospheric pressure, under different air gap spacing
Gas discharge has the characteristics that applied widely.
Detailed description of the invention
Fig. 1 is the parallel plate electrode and line-ring electrode structure composition figure of embodiment 1；
Fig. 2 is the top view of Fig. 1；
Fig. 3 is the structure composition figure of embodiment 1；
Fig. 4 is the parallel plate electrode and parallel electrode structure composition figure of embodiment 2；
Fig. 5 is the top view of Fig. 4；
Wherein, 1- conductive glass plate, 2- glass plate, 3- metal foil, 4- becket, 5- wire, 6- metal bar.
Specific embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
Embodiment 1:
A kind of device that gas discharge homogenization is realized using extra electric field is present embodiments provided, referring to attached drawing 3, packet
Include: parallel plate electrode, line-ring electrode, the first high voltage power supply, the second high voltage power supply, sampling resistor, oscillograph, voltmeter and
Vacuum chamber；
Referring to attached drawing 1-2, the parallel plate electrode is for generating dielectric barrier discharge, comprising: conductive glass plate 1, glass
Glass plate 2, metal foil 3 and limited block；
The conductive glass plate 1 is to plate one layer of conductive film (i.e. ito film) on a surface of glass plate 2 to be formed, conductive
First through hole is machined on glass plate 1；
It is machined with the second through-hole identical with the first through hole internal diameter on the glass plate 2, is processed in the metal foil 3
There is third through-hole, the internal diameter of third through-hole is greater than or equal to the internal diameter of first through hole；Metal foil 3 is pasted and fixed on glass plate 2
One surface, and the third through-hole of metal foil 3 and the second through-hole of glass plate 2 are coaxial；
The conductive glass plate 1 and glass plate 2 are adhesively fixed by limited block as parallel opposite one, and electro-conductive glass
The surface that plate 1 is coated with conductive film is fixed with the surface opposite of metal foil 3 with glass plate 2, and first through hole and the second through-hole are coaxial, lead
The distance between electric glass plate 1 and glass plate 2 are setting value, which is determined by the thickness of limited block, generally millimeter or
Centimetres, and limited block uses insulating materials；Metal foil 3 is used to limit the area of gas discharge, the area of gas discharge with
The area of metal foil 3 is identical；
The line-ring electrode provides direct current radiated electric field, including becket 4 and wire 5；
The becket 4 is fixed between conductive glass plate 1 and glass plate 2, and becket 4 and the first through hole are same
Axis, and 4 internal diameter of becket is greater than the outer profile of metal foil 3, i.e. metal foil 3 is located within the scope of the envelope of 4 internal diameter of becket；
The wire 5 sequentially passes through the third through-hole of metal foil 3, the second through-hole of glass plate 2 and conductive glass plate 1
After first through hole, wire 5 is fixed in first through hole and the second through-hole by silica gel, prevents wire 5 mobile and conduction
Metal foil 3 on the conductive film and glass plate 2 of glass plate 1 is in contact；
First high voltage power supply is used to provide the described voltage needed for dielectric barrier discharge, and one end passes through conducting wire and conduction
The conductive film of glass plate 1 is electrically connected, and the other end is electrically connected by the metal foil 3 on conducting wire and glass plate 2, and the first high pressure
Sampling resistor is installed, sampling resistor is used for the dielectric barrier discharge mistake on the conducting wire between power supply and parallel plate electrode
Voltage and current waveform signal in journey is sampled；
Voltage needed for second high voltage power supply is used to provide the described direct current radiated electric field, one end pass through conducting wire and metal
Ring 4 is electrically connected, and the other end is electrically connected by conducting wire and wire 5；
The high-voltage probe of the oscillograph is in parallel with the first high voltage power supply, for measuring the first high voltage power supply to parallel flat
Voltage provided by electrode；The low pressure probe of the oscillograph is in parallel with sampling resistor, for the voltage to sampling resistor both ends
It is detected and is recorded with current waveform signal；
The voltmeter is in parallel with the second high voltage power supply, is mentioned for measuring second high voltage power supply to line-ring electrode
The voltage of confession；
The parallel plate electrode and line-ring electrode can be placed in atmosphere, can also be placed in vacuum chamber, the vacuum
Room is used to provide hypobaric for the dielectric barrier discharge, and is evacuated by air pump so that the indoor air pressure of the vacuum
Reach setting value (setting value is less than atmospheric pressure), by the air gauge of vacuum indoor location to monitor vacuum room pressure；
Filled with non-combustible gas in vacuum chamber, the non-combustible gas is as the gas for electric discharge；Vacuum chamber must have hyalomere
Point, in order to observe electric discharge pattern.
Wherein, the glass plate 2 can be replaced plate body made of other transparent or opaque isolation materials；The conduction
The substrate (being glass plate 2 in the present embodiment) of glass plate 1 can be replaced plate body made of other transparent isolation materials, transparent material
Matter is in order to observing discharge process；And used isolation material surface must be not easy to be discharged damage or will not with put
Electricity generates chemical reaction and discharges certain gas to influence to discharge；
The metal foil 3, becket 4 and wire 5 are made of copper；
The vacuum chamber is made of transparent material (such as simple glass, quartz glass or organic glass), or using not
When transparent material, it is provided with transparent window, in order to observe electric discharge pattern；
The non-combustible gas is the single gas or two or more gaseous mixtures of argon gas, helium, neon, nitrogen, oxygen
Body；
First high voltage power supply uses high-voltage ac power or high-voltage pulse power source；
Second high voltage power supply uses high-voltage DC power supply, high-voltage ac power or high-voltage pulse power source；
The glass plate 2 and the metal foil 3 adhered thereto can integrally replace with semiconductor board, the semiconductor board existing one
Fixed electric conductivity, and have certain insulation barrier characteristic；
The parallel plate electrode and line-ring electrode, which can be placed in atmospheric environment, carries out electric discharge homogenization；
In the present embodiment, conductive glass plate 1 and glass plate 2 are 4cm × 4cm, logical with a thickness of the plate of 1mm, first
The diameter in hole, the second through-hole and third through-hole is 3mm；Metal foil 3 is circle, a diameter of 2cm；The internal diameter of becket 4 is
2.4cm；Limited block with a thickness of 1mm, i.e., the gap between conductive glass plate 1 and glass plate 2 is 1mm；The diameter of wire 5 is
150μm；25torr neon is equipped in vacuum chamber；
Working principle:
Situation 1: parallel plate electrode and line-ring electrode are placed in atmosphere, slowly promote the electricity of the first high voltage power supply
Pressure makes the gas breakdown between conductive glass plate 1 and glass plate 2 when voltage is 250V, generates non-homogeneous (or spot figure)
Gas discharge, pass through the corresponding voltage and current waveform signal of oscillograph recording；When voltage or electric current reach setting value, no
It promotes the voltage of the first high voltage power supply again, keeps the voltage of the first high voltage power supply constant, voltage is 300V at this time, steps up the
The voltage of two high voltage power supplies introduces radiated electric field, until the gas discharge between conductive glass plate 1 and glass plate 2 is uniform, record
The voltage of the second corresponding high voltage power supply when gas discharge is by substantially uniformity；Wherein, the area of gas discharge is bigger, makes gas
Radiated electric field needed for body electric discharge homogenizes is also bigger.
Situation 2: parallel plate electrode and line-ring electrode are placed in vacuum chamber, to the indoor air pressure of vacuum and gas
It is adjusted with after proportion, is worked using mode identical with situation 1.
Embodiment 2:
Another device that gas discharge homogenization is realized using extra electric field is present embodiments provided, in addition to parallel flat
Electrode and line-ring electrode are different from 1 structure of embodiment, and remaining part and connection relationship are all the same；
Referring to attached Figure 4 and 5, the parallel plate electrode is for generating dielectric barrier discharge, comprising: conductive glass plate 1, glass
Glass plate 2, metal foil 3 and limited block；
The conductive glass plate 1 is to plate one layer of conductive film (i.e. ito film) on a surface of glass plate 2 to be formed；
The metal foil 3 is pasted and fixed on a surface of glass plate 2；
The conductive glass plate 1 and glass plate 2 are adhesively fixed by limited block as parallel opposite one, and electro-conductive glass
The surface that plate 1 is coated with conductive film is fixed with the surface opposite of metal foil 3 with glass plate 2, between conductive glass plate 1 and glass plate 2
Distance be setting value, which is determined by the thickness of limited block, generally millimeter or centimetres, and limited block is using absolutely
Edge material；Metal foil 3 is used to limit the area of gas discharge, and the area of gas discharge is identical as the area of metal foil 3；
The centrosymmetric radiated electric field that line-ring electrode in embodiment 1 provides is replaced with into parallel electricity in the present embodiment
The parallel electric field that pole provides；
The parallel pole includes: two parallel metal bars 6 or two metal plates；
Two parallel metal bars 6 or metal plate are mounted between conductive glass plate 1 and glass plate 2, and two parallel
Metal bar 6 or the distance between two metal plates be greater than the outer profile of metal foil 3, i.e. two parallel metal bars 6 or two
A metal plate is located at the left and right sides of the metal foil, make metal foil be located at two parallel metal bars 6 or two metal plates it
Between；
One of metal bar 6 or metal plate are connect with one end of the second high voltage power supply, another metal bar 6 or metal plate
It is connect with the other end of the second high voltage power supply.
In conclusion the above is merely preferred embodiments of the present invention, being not intended to limit the scope of the present invention.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (10)
1. a kind of device for realizing gas discharge homogenization using extra electric field characterized by comprising parallel plate electrode,
For providing electrode, the first high voltage power supply and the second high voltage power supply of extra electric field；
The parallel plate electrode is for generating dielectric barrier discharge, comprising: conductive plate, insulation board, metal foil and limited block；
The conductive plate is to plate one layer of conductive film on a surface of the substrate of insulation to be formed, and it is logical that first is machined on conductive plate
Hole；
It is machined with the second through-hole identical with the first through hole internal diameter on the insulation board, is machined with third in the metal foil
The internal diameter of through-hole, third through-hole is greater than or equal to first through hole internal diameter；Metal foil is fixed on a surface of insulation board, and metal
The third through-hole of foil and the second through-hole of insulation board are coaxial；
The conductive plate is fixed as parallel opposite one by the limited block to insulate with insulation board, and conductive plate is coated with conductive film
Surface and insulation board be fixed with the surface opposite of metal foil, first through hole and the second through-hole are coaxial, conductive plate and insulation board it
Between distance be setting value；
The electrode for providing extra electric field is line-ring electrode, including becket and wire；
The becket is fixed between conductive plate and insulation board, and becket and the first through hole are coaxial, and metal foil position
In within the scope of the envelope of becket internal diameter；
After the wire sequentially passes through the first through hole of the third through-hole of metal foil, the second through-hole of insulation board and conductive plate,
It is fixed in first through hole and the second through-hole by insulating materials；
First high voltage power supply is used to provide the described voltage needed for dielectric barrier discharge, and one end passes through conducting wire and conductive plate
Conductive film is electrically connected, and the other end is electrically connected by the metal foil on conducting wire and insulation board；
Voltage needed for second high voltage power supply is used to provide the described direct current radiated electric field, one end pass through conducting wire and becket electricity
Property connection, the other end is electrically connected by conducting wire and wire.
2. a kind of device for realizing gas discharge homogenization using extra electric field characterized by comprising parallel plate electrode,
For providing electrode, the first high voltage power supply and the second high voltage power supply of extra electric field；
The parallel plate electrode is for generating dielectric barrier discharge, comprising: conductive plate, insulation board, metal foil and limited block；
The conductive plate is to plate one layer of conductive film on a surface of insulation board to be formed；
The metal foil is fixed on a surface of insulation board；
The conductive plate is fixed as parallel opposite one by the limited block to insulate with insulation board, and conductive plate is coated with conductive film
Surface and insulation board be fixed with the surface opposite of metal foil, the distance between conductive plate and insulation board are setting value；
The electrode for providing extra electric field is parallel pole, comprising: two parallel metal bars or two metal plates；
Two parallel metal bars or metal plate are mounted between conductive plate and insulation board, and are located at the left and right two of the metal foil
Side makes metal foil between two parallel metal bars or two metal plates；
First high voltage power supply is used to provide the described voltage needed for dielectric barrier discharge, and one end passes through conducting wire and conductive plate
Conductive film is electrically connected, and the other end is electrically connected by the metal foil on conducting wire and insulation board；
Voltage needed for second high voltage power supply is used to provide the described direct current radiated electric field, one end pass through conducting wire and a metal
Stick or metal plate are electrically connected, and the other end is electrically connected by conducting wire and another metal bar or metal plate.
3. the device of gas discharge homogenization is realized using extra electric field as claimed in claim 1 or 2, which is characterized in that institute
It states and sampling resistor is installed on the conducting wire between the first high voltage power supply and parallel plate electrode.
4. the device of gas discharge homogenization is realized using extra electric field as claimed in claim 3, which is characterized in that further include
Oscillograph, the high-voltage probe of the oscillograph is in parallel with the first high voltage power supply, for measuring the first high voltage power supply to parallel flat
Voltage provided by electrode；The low pressure probe of the oscillograph is in parallel with sampling resistor, for the voltage to sampling resistor both ends
It is detected and is recorded with current waveform signal.
5. the device of gas discharge homogenization is realized using extra electric field as claimed in claim 1 or 2, which is characterized in that also
Including voltmeter, the voltmeter is in parallel with the second high voltage power supply, described for providing the electrode institute of extra electric field for measuring
The voltage of offer.
6. the device of gas discharge homogenization is realized using extra electric field as claimed in claim 1 or 2, which is characterized in that also
Including vacuum chamber, the parallel plate electrode and the electrode for providing extra electric field are placed in vacuum chamber, are set in vacuum chamber
There is non-combustible gas, and the indoor air pressure of vacuum is setting value, and the transparency window for observing electric discharge pattern is machined on vacuum chamber
Mouthful.
7. as claimed in claim 6 using extra electric field realize gas discharge homogenization device, which is characterized in that it is described not
Fuel gas is argon gas, helium, neon, nitrogen, the single gas of oxygen or two or more mixed gas.
8. the device of gas discharge homogenization is realized using extra electric field as claimed in claim 1 or 2, which is characterized in that institute
Stating insulation board is plate body made of transparent or opaque isolation material.
9. the device of gas discharge homogenization is realized using extra electric field as claimed in claim 1 or 2, which is characterized in that institute
The substrate of conductive plate is stated using transparent material.
10. the device of gas discharge homogenization is realized using extra electric field as claimed in claim 1 or 2, which is characterized in that institute
The first high voltage power supply is stated using high-voltage ac power or high-voltage pulse power source；Second high voltage power supply uses high voltage direct current
Source, high-voltage ac power or high-voltage pulse power source.
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| CN110792531A (en) * | 2019-11-22 | 2020-02-14 | 中国人民解放军战略支援部队航天工程大学 | Intelligent atomizing nozzle based on high-voltage discharge and spraying control system |
| CN111720282A (en) * | 2020-06-28 | 2020-09-29 | 哈尔滨工业大学 | Ionic wind thrust device based on needle-ring-net structure |
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