CN109342985A - Magnetic resistance chip calibration and correction system and method - Google Patents
Magnetic resistance chip calibration and correction system and method Download PDFInfo
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- CN109342985A CN109342985A CN201811365346.6A CN201811365346A CN109342985A CN 109342985 A CN109342985 A CN 109342985A CN 201811365346 A CN201811365346 A CN 201811365346A CN 109342985 A CN109342985 A CN 109342985A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R35/00—Testing or calibrating of apparatus covered by the other groups of this subclass
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R33/00—Arrangements or instruments for measuring magnetic variables
- G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
- G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
- G01R33/09—Magnetoresistive devices
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Abstract
The invention discloses a magnetic resistance chip calibration and correction system, which comprises a magnetic resistance chip test board, a signal acquisition unit, a one-dimensional Helmholtz coil, a high-precision program-controlled current source, a magnetic field test unit and a calibration unit, wherein the signal acquisition unit is connected with the magnetic resistance chip test board; the chip to be tested is connected with the calibration unit through the magnetic resistance chip test board and the signal acquisition unit; the high-precision program-controlled current source controls the one-dimensional Helmholtz coil to provide a one-dimensional uniform magnetic field for the magnetic resistance chip test board under the control of the calibration unit; the magnetic field testing unit is used for detecting and sending the magnetic field intensity of a uniform area in the one-dimensional Helmholtz coil to the calibration unit; and the calibration unit sends a current control signal to control the high-precision program-controlled current source, and receives and stores magnetic field intensity information and chip response data. According to the invention, a uniform magnetic field is provided for the chip to be tested through the one-dimensional Helmholtz coil, the response conditions of the magnetoresistive chip in different magnetic field environments are detected and recorded, the actual response data of the chip is obtained, and the calibration of the chip is completed.
Description
Technical field
The present invention relates to magnetic induction detection technology field more particularly to a kind of magnetoresistive chip calibration correction system and methods.
Background technique
Magnetoresistive sensor is a kind of sensing element for perceiving external magnetic field variation and changing resistance value, is based on magnetoresistance work
Make principle, core uses a piece of particulate metal material, and resistance value changes with the variation of external magnetic field, passes through extraneous magnetic
Field changes to measure the variation or situation of object.Magnetoresistive sensor have high-precision, high sensitivity, high-resolution, low cost,
The characteristics of good stability and reliability, noncontacting measurement and wide temperature range, can be used for a wide range of, high-precision magnetic field and survey
Amount, for realizing all kinds of detection applications based on changes of magnetic field.
However since magnetoresistive sensor production technology, material purity, uniformity etc. influence, each magnetoresistive sensor is to magnetic field
Response curve will not be completely the same, the chip differences of different batches can become apparent from, this wants the consistency of some pairs of chips
Asking higher application is exactly a kind of disaster, such as the application of the high precision electro flow measurement based on multiple magnetoresistive chips.For this purpose, this motion
The scaling method and system for proposing a kind of magnetoresistive chip, for dispatching from the factory in chip or being marked using preceding to the response curve of chip
It is fixed, the output-consistence of magnetoresistive chip is greatly improved, the final accuracy of measurement etc. for promoting practical application.
Summary of the invention
The present invention provides a kind of magnetoresistive chips to demarcate correction system and method, it is intended to solve current magnetoresistive chip to magnetic field
Response curve it is not quite identical, influence actually use accuracy of measurement the problem of.
To achieve the above object, the present invention provides a kind of magnetoresistive chips to demarcate correction system, including magnetoresistive chip test
Platform, signal acquisition unit, one-dimensional Helmholtz coil, high-precision program control current source, measurement of magnetic field unit and calibration unit；
The magnetoresistive chip testboard, connects chip to be tested and signal acquisition unit；
The signal acquisition unit receives chip signal output, and according to signal is received, to obtain chip response data concurrent
It send to calibration unit；
The one-dimensional Helmholtz coil receives the power supply of high-precision program control current source, provides for magnetoresistive chip testboard
One-dimensional uniform magnetic field；
The high-precision program control current source receives the control of calibration unit, provides work electricity for one-dimensional Helmholtz coil
Energy；
The measurement of magnetic field unit, detects the magnetic field strength of homogeneity range in one-dimensional Helmholtz coil, will test
Magnetic field strength information is sent to calibration unit；
The calibration unit sends current controling signal and controls high-precision program control current source, receives and stores magnetic field strength
Information and chip response data.
Compared with prior art, a kind of magnetoresistive chip disclosed by the invention demarcates correction system, one-dimensional Helmholtz coil
The magnetic field strength of offer changes according to the size of current that high-precision program control current source provides, and measurement of magnetic field unit detects the one-dimensional last of the twelve Earthly Branches
The magnetic field strength that Mu Huozi coil provides, the output electric current of calibration unit control high-precision program control current source, to control one-dimensional
The magnetic field strength that Helmholtz coil provides, calibration unit receives the magnetic field strength of measurement of magnetic field unit detection, according to receiving
Magnetic field strength adjustment high-precision program control current source output electric current, formed closed loop feedback control, realize accurate magnetic field strength
It adjusts；Chip to be measured is placed in magnetoresistive chip testboard, provides uniform magnetic by one-dimensional Helmholtz coil for chip to be measured
, the output signal of chip to be measured is sent to calibration unit after handling by signal acquisition unit, calibration unit storage tape is strong
Spend the calibration of information and the realization of chip response data to chip.The present invention is provided by one-dimensional Helmholtz coil for chip to be measured
Uniform magnetic field, response condition of the detection record magnetoresistive chip under different magnetic field environment, obtains the real response data of chip, complete
At the calibration to chip.
Further, the present invention provides a kind of magnetoresistive chips to demarcate correction system, and the calibration unit further includes master control
Module, the main control module obtain magnetic field value and corresponding chip response data, determine calibration curve of output and fit approach, meter
Mapping function parameter is calculated, the corresponding mapping function of each magnetoresistive chip and parameter are saved.
Compared with prior art, a kind of magnetoresistive chip disclosed by the invention demarcates correction system, to data obtained by calibrating
It is handled, the mapping of chip is calculated using chip intended response as output using chip real response data as input
Function and parameter can adjust the undesirable chip of response curve to obtain ideal by the adjustment of mapping function and parameter
Response curve realizes the correction to chip response curve.The meaning of this correction is, to chips different from requiring in same batten
It is realized under part under the applicable cases unanimously exported, such as the application of the high precision electro flow measurement based on multiple magnetoresistive chips, because often
A magnetoresistive chip will not be completely the same to the response curve in magnetic field, and the chip differences of different batches can become apparent from, this is for this kind
It is exactly a kind of disaster to the higher application of the coherence request of chip.In face of this problem, the present invention passes through nominal data and core
Piece intended response technology obtains the mapping function and parameter of chip, by the adjustment of mapping function and parameter, so that different chips
Response under the conditions of same magnetic field is identical, realizes the Concordance output to different chips, can be promoted based on such
The sensor of chip or the accuracy as measurement, solve incomplete to the response curve in magnetic field one existing for current chip
It causes, influences the problem of actually using accuracy of measurement.
Detailed description of the invention
Fig. 1 is a kind of system block diagram of one embodiment of magnetoresistive chip calibration correction system of the present invention；
Fig. 2 is a kind of magnetoresistive chip testing bench structure of another embodiment of magnetoresistive chip calibration correction system of the present invention
Schematic diagram 1；
Fig. 3 is a kind of magnetoresistive chip testing bench structure of another embodiment of magnetoresistive chip calibration correction system of the present invention
Schematic diagram 1；
Fig. 4 is a kind of system block diagram of another embodiment of magnetoresistive chip calibration correction system of the present invention；
Fig. 5 is a kind of flow chart of one embodiment of magnetoresistive chip calibration bearing calibration of the present invention.
Specific embodiment
As shown in Figure 1, a kind of magnetoresistive chip of the present invention demarcates correction system, including magnetoresistive chip testboard, signal
Acquisition unit, one-dimensional Helmholtz coil, high-precision program control current source, measurement of magnetic field unit and calibration unit, the magnetic resistance core
Built-in testing platform connects chip to be tested and signal acquisition unit；The signal acquisition unit receives chip signal output, according to
Signal is received to obtain chip response data and be sent to calibration unit；The one-dimensional Helmholtz coil receives high-precision journey
The power supply for controlling current source, provides one-dimensional uniform magnetic field for magnetoresistive chip testboard；The high-precision program control current source receives calibration
The control of unit provides work energy for one-dimensional Helmholtz coil；The measurement of magnetic field unit detects one-dimensional Helmholtz's line
The magnetic field strength of homogeneity range in circle, the magnetic field strength information that will test are sent to calibration unit；The calibration unit is sent
Current controling signal controls high-precision program control current source, receives and stores magnetic field strength information and chip response data.
Compared with prior art, a kind of magnetoresistive chip disclosed by the invention demarcates correction system, one-dimensional Helmholtz coil
The magnetic field strength of offer changes according to the size of current that high-precision program control current source provides, and measurement of magnetic field unit detects the one-dimensional last of the twelve Earthly Branches
The magnetic field strength that Mu Huozi coil provides, the output electric current of calibration unit control high-precision program control current source, to control one-dimensional
The magnetic field strength that Helmholtz coil provides, calibration unit receives the magnetic field strength of measurement of magnetic field unit detection, according to receiving
Magnetic field strength adjustment high-precision program control current source output electric current, formed closed loop feedback control, realize accurate magnetic field strength
It adjusts；Chip to be measured is placed in magnetoresistive chip testboard, provides uniform magnetic by one-dimensional Helmholtz coil for chip to be measured
, the output signal of chip to be measured is sent to calibration unit after handling by signal acquisition unit, calibration unit storage tape is strong
Spend the calibration of information and the realization of chip response data to chip.The present invention is provided by one-dimensional Helmholtz coil for chip to be measured
Uniform magnetic field, response condition of the detection record magnetoresistive chip under different magnetic field environment, obtains the real response data of chip, complete
At the calibration to chip.
As shown in Figures 2 and 3, the magnetoresistive chip testboard, including multiple chip holes 1, the chip hole 1 are provided with bottom
The output interface of pin, bottom pin is connect by data line 2 with signal acquisition unit.In one embodiment of the present of invention, magnetic
Resistance chip testboard selects corresponding testboard for placing magnetoresistive chip, according to different chip packages, and testboard is equipped with multiple cores
Film perforation 1, the chip hole 1 are used in fixed bit placement location chip, it is ensured that are connected with corresponding pin, chip passes through upper layer after being put into
Fixed device 3 can ensure that chip and the pins contact of 1 bottom of chip hole on testboard are good；The output interface and number of bottom pin
It is connected according to line 2, power supply and ground pin are connected with testboard power supply and ground wire.Testboard can be put into multiple magnetic resistance simultaneously
Chip is demarcated, and (number of chips that testboard can at most be placed is designed by testboard and is determined, the magnetic of the quantity and coil generation
Field homogeneity range size, testboard spare interface number, chip size etc. are related, can customize coil, testboard etc. as needed).Magnetic
It is that need to be put into that (pin is corresponding with the aerial contact point of chip according to the consistent direction in magnetic susceptibility direction that resistance chip, which is put into testboard,.It surveys
Chip magnetic-field-sensitive direction needs or phase identical as magnetic direction in Helmholtz coil when test stand is put into Helmholtz coil
Instead (depend on current direction).It is equipped with groove in test bottom, height column is adjusted among the groove and Helmholtz coil
The convex body of link position is corresponding, guarantees magnetic direction one in chip magnetic-field-sensitive direction and coil according to fixed by sliding
It causes.
As shown in figure 4, the signal acquisition unit includes AD conversion module, data processing module and transmission module, it is described
AD conversion module receives chip signal output, and the analog signal received is converted to digital signal and is sent at data
Manage module；The data processing module receives digital signal generation chip response data and is sent to transmission module；The transmission mould
Block receives chip response data and is forwarded to calibration unit.In one embodiment of the present of invention, testboard data line connection signal
Acquisition unit.Signal acquisition unit realizes the quantization acquisition of each road chip signal output, contains AD conversion module, data processing
Module and transmission module.Signal acquisition unit is transferred to after being digitized the output (chip response) of each chip by high speed USB
Unit is demarcated, calibration unit completes coding and the file storage of corresponding chip response.
As shown in figure 4, the measurement of magnetic field unit is gaussmeter or fluxgate.It is described in one embodiment of the present of invention
Fluxgate or gaussmeter the key technical indexes should include: range, resolution ratio, operating temperature range, operating humidity range etc..
As shown in figure 4, the calibration unit includes magnetic field set module and data processing module；The magnetic field set mould
Block obtains related test parameters, issues current controling signal to high-precision programmable current source according to parameter, receives measurement of magnetic field list
The magnetic field strength information that member is sent adjusts the output of current controling signal according to magnetic field strength information, according to magnetic field strength information
It sends magnetic field set and completes signal to data processing module, current magnetic field value is sent to data processing mould according to magnetic field strength information
Block；The data processing module receives magnetic field set and completes signal, receives current magnetic field value, receives signal acquisition unit and sends
Chip response data, store current magnetic field value and corresponding chip response data.In one embodiment of the present of invention, magnetic field is set
For cover half root tuber according to parameters such as the magnetic field value or magnetic field range of input and steppings, it is big that automatic remote controls current source regulation output electric current
It is small, according to the magnetic field size of magnetic-field measurement (gaussmeter or fluxgate) feedback, feedback control is formed, meets setting when magnetic field exports
Value and required precision are to export control signal to data processing module.Data processing module receives the letter of magnetic field set completion
Number when, the output data of each magnetoresistive chip is obtained by information acquisition module, by the magnetic field value (measured value) and core at current time
Piece output is stored in advance.
As shown in figure 4, the calibration unit further includes main control module, the main control module obtains magnetic field value and corresponding core
Piece response data determines calibration curve of output and fit approach, calculates mapping function parameter, it is corresponding to save each magnetoresistive chip
Mapping function and parameter.It is (generally upward by magnetic field after the data acquisition of all calibration to be done in one embodiment of the present of invention
Increase and downwards reduce respectively acquire one time, can also multi collect, times of collection is more, chip characteristics reaction it is more accurate), according to
Selection calibration curve of output (such as straight line and slope) and fit approach (straight line least square or fitting of a polynomial), it is automatic to calculate
Mapping function parameter writes the function formula and parameter value then according to the magnetoresistive chip number of setting and file designation rule
Enter file, completes chip calibration.
Compared with prior art, a kind of magnetoresistive chip disclosed by the invention demarcates correction system, to data obtained by calibrating
It is handled, the mapping of chip is calculated using chip intended response as output using chip real response data as input
Function and parameter can adjust the undesirable chip of response curve to obtain ideal by the adjustment of mapping function and parameter
Response curve realizes the correction to chip response curve.The meaning of this correction is, to chips different from requiring in same batten
It is realized under part under the applicable cases unanimously exported, such as the application of the high precision electro flow measurement based on multiple magnetoresistive chips, because often
A magnetoresistive chip will not be completely the same to the response curve in magnetic field, and the chip differences of different batches can become apparent from, this is for this kind
It is exactly a kind of disaster to the higher application of the coherence request of chip.In face of this problem, the present invention passes through nominal data and core
Piece intended response technology obtains the mapping function and parameter of chip, by the adjustment of mapping function and parameter, so that different chips
Response under the conditions of same magnetic field is identical, realizes the Concordance output to different chips, can be promoted based on such
The sensor of chip or the accuracy as measurement, solve incomplete to the response curve in magnetic field one existing for current chip
It causes, influences the problem of actually using accuracy of measurement.
As shown in figure 5, a kind of magnetoresistive chip scaling method using magnetoresistive chip calibration correction system, which is characterized in that
The following steps are included: S1, obtains experiment parameter, starts to test, whether judgment experiment data collect completion, if it is terminate reality
It tests, if not then entering step S2；S2 issues current controling signal and carries out electric current setting, acquires and save magnetic field value and right
The chip response data answered judges whether to reversely demarcate, if yes then enter step S3, if not then entering step
S4；S3 reads in electric current again and sets file, and setting sequence is changed to from back to front, to repeat step S2；S4, judgment experiment number
According to whether completion is collected, if not S2 is then entered step, if it is terminate to test.
Further, a kind of magnetoresistive chip scaling method using magnetoresistive chip calibration correction system, which is characterized in that packet
Including following steps: S1 obtains experiment parameter, starts to test, whether judgment experiment data collect completion, if it is terminate reality
It tests, if not then entering step S2；S2 issues current controling signal and carries out electric current setting, acquires and save magnetic field value and right
The chip response data answered judges whether to reversely demarcate, if yes then enter step S3, if not then entering step
S4；S3 reads in electric current again and sets file, and setting sequence is changed to from back to front, to repeat step S2；S4, judgment experiment number
According to whether collecting completion, if not then entering step S2, if it is entering step S5；S5 obtains magnetic field value and corresponding core
Piece response data determines calibration curve of output and fit approach, calculates mapping function parameter, it is corresponding to save each magnetoresistive chip
Mapping function and parameter.
After calibration system completes nominal data acquisition and storage, with FE(b, e) as input, chip intended response is (such as
The theoretical output valve or standard curve respective value of chip) as output.In one embodiment of the present of invention, using fitting of a polynomial
(also other optional approximating methods) are fitted nominal data, obtain magnetoresistive chip or the corresponding magnetic field of device under calibration scene
The fitting parameter vector P of response curve FE (b, e).It has demarcated in application and has been used when chip is fitted according to chip reality output
Matched curve directly calculates, that is, can guarantee chip output-consistence, further promote the precision etc. of practical application.Of the invention is another
In one embodiment, mapped by magnetic responsiveness curve FE (b, e) and anticipated output, that is, response curve F=C FE after demarcating (b,
E), C is map vector or matrix, and map vector or Matrix C are determined by calibration, application demarcated when chip is fitted according to
F=C FE (b, e) mapping and the final response of interpolation method calculating, that is, can guarantee chip output-consistence, further be promoted real
The precision etc. of border application.
The above is a preferred embodiment of the present invention, it is noted that for those skilled in the art
For, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also considered as
Protection scope of the present invention.
Claims (8)
1. a kind of magnetoresistive chip demarcates correction system, which is characterized in that including magnetoresistive chip testboard, signal acquisition unit, one
Tie up Helmholtz coil, high-precision program control current source, measurement of magnetic field unit and calibration unit；
The magnetoresistive chip testboard, connects chip to be tested and signal acquisition unit；
The signal acquisition unit receives chip signal output, obtains chip response data according to signal is received and is sent to
Demarcate unit；
The one-dimensional Helmholtz coil receives the power supply of high-precision program control current source, provides for magnetoresistive chip testboard one-dimensional
Uniform magnetic field；
The high-precision program control current source receives the control of calibration unit, provides work energy for one-dimensional Helmholtz coil；
The measurement of magnetic field unit, detects the magnetic field strength of homogeneity range in one-dimensional Helmholtz coil, the magnetic field that will test
Strength information is sent to calibration unit；
The calibration unit sends current controling signal and controls high-precision program control current source, receives and stores magnetic field strength information
With chip response data.
2. a kind of magnetoresistive chip according to claim 1 demarcates correction system, which is characterized in that the magnetoresistive chip test
Platform, including multiple chip holes, the chip hole are provided with bottom pin, and the output interface of bottom pin passes through data line and signal
Acquisition unit connection.
3. a kind of magnetoresistive chip according to claim 1 demarcates correction system, which is characterized in that the signal acquisition unit
Including AD conversion module, data processing module and transmission module；
The AD conversion module receives chip signal output, and the analog signal received is converted to digital signal and is sent
To data processing module；
The data processing module receives digital signal generation chip response data and is sent to transmission module；
The transmission module receives chip response data and is forwarded to calibration unit.
4. a kind of magnetoresistive chip according to claim 1 demarcates correction system, which is characterized in that the measurement of magnetic field unit
For gaussmeter or fluxgate.
5. a kind of magnetoresistive chip according to claim 1 demarcates correction system, which is characterized in that the calibration unit includes
Magnetic field set module and data processing module；
The magnetic field set module obtains related test parameters, issues current controling signal to high-precision program-controlled electric according to parameter
Stream source, receives the magnetic field strength information that measurement of magnetic field unit is sent, and adjusts the defeated of current controling signal according to magnetic field strength information
Out, magnetic field set is sent according to magnetic field strength information and completes signal to data processing module, worked as according to the transmission of magnetic field strength information
Preceding magnetic field value is to data processing module；
The data processing module receives magnetic field set and completes signal, receives current magnetic field value, receives signal acquisition unit and sends
Chip response data, store current magnetic field value and corresponding chip response data.
6. a kind of magnetoresistive chip according to claim 1-5 demarcates correction system, which is characterized in that the calibration
Unit further includes main control module, and the main control module obtains magnetic field value and corresponding chip response data, determines that calibration output is bent
Line and fit approach calculate mapping function parameter, save the corresponding mapping function of each magnetoresistive chip and parameter.
7. a kind of using a kind of described in any item magnetoresistive chip calibration sides of magnetoresistive chip calibration correction system claim 1-5
Method, which comprises the following steps:
S1 obtains experiment parameter, starts to test, whether judgment experiment data collect completion, if it is terminate to test, if not
It is to enter step S2；
S2 issues current controling signal and carries out electric current setting, acquire and save magnetic field value and corresponding chip response data, judges
Whether reversely demarcated, if yes then enter step S3, if not then entering step S4；
S3 reads in electric current again and sets file, and setting sequence is changed to from back to front, to repeat step S2；
Whether S4, judgment experiment data collect completion, if not S2 is then entered step, if it is terminate to test.
8. it is a kind of using a kind of magnetoresistive chip scaling method of magnetoresistive chip calibration correction system as claimed in claim 6, it is special
Sign is, comprising the following steps:
S1 obtains experiment parameter, starts to test, whether judgment experiment data collect completion, if it is terminate to test, if not
It is to enter step S2；
S2 issues current controling signal and carries out electric current setting, acquire and save magnetic field value and corresponding chip response data, judges
Whether reversely demarcated, if yes then enter step S3, if not then entering step S4；
S3 reads in electric current again and sets file, and setting sequence is changed to from back to front, to repeat step S2；
Whether S4, judgment experiment data collect completion, if not then entering step S2, if it is entering step S5；
S5 obtains magnetic field value and corresponding chip response data, determines calibration curve of output and fit approach, calculates mapping function
Parameter saves the corresponding mapping function of each magnetoresistive chip and parameter.
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| CN111123187A (en) * | 2020-01-21 | 2020-05-08 | 中北大学 | Magneto-resistive chip calibration test system and method based on double ridge waveguides |
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| CN111722168A (en) * | 2019-03-22 | 2020-09-29 | 宇能电科技股份有限公司 | Correction magnetic field generating device, magnetic field sensor and correction method thereof |
| CN112363099A (en) * | 2020-10-30 | 2021-02-12 | 天津大学 | TMR current sensor temperature drift and geomagnetic field correction device and method |
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