CN109341973B - Three-way valve and internal and external leakage detection conversion device - Google Patents
Three-way valve and internal and external leakage detection conversion device Download PDFInfo
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- CN109341973B CN109341973B CN201811453569.8A CN201811453569A CN109341973B CN 109341973 B CN109341973 B CN 109341973B CN 201811453569 A CN201811453569 A CN 201811453569A CN 109341973 B CN109341973 B CN 109341973B
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- 238000001514 detection method Methods 0.000 title claims abstract description 104
- 238000006243 chemical reaction Methods 0.000 title claims description 9
- 238000004891 communication Methods 0.000 claims abstract description 33
- 239000001307 helium Substances 0.000 claims description 104
- 229910052734 helium Inorganic materials 0.000 claims description 104
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 104
- 239000007789 gas Substances 0.000 claims description 50
- 238000007789 sealing Methods 0.000 claims description 17
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 description 9
- 238000012360 testing method Methods 0.000 description 7
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000013459 approach Methods 0.000 description 1
- 230000005465 channeling Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/224—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for valves
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
- F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
- F16K11/06—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements
- F16K11/065—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members
- F16K11/07—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only sliding valves, i.e. sliding closure elements with linearly sliding closure members with cylindrical slides
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K27/00—Construction of housing; Use of materials therefor
- F16K27/04—Construction of housing; Use of materials therefor of sliding valves
- F16K27/041—Construction of housing; Use of materials therefor of sliding valves cylindrical slide valves
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Examining Or Testing Airtightness (AREA)
Abstract
The invention relates to a three-way valve and an internal and external leakage detection switching device. The three-way valve of the present invention includes: the valve comprises a valve body, a columnar valve core and an elastic piece, wherein a columnar limiting cavity is formed in the valve body, one end of the limiting cavity is provided with the elastic piece, and the other end of the limiting cavity penetrates through the valve body and is provided with an air inlet through hole; the valve core is sleeved in the limiting cavity, one end of the elastic piece is abutted against the valve core, and the other end of the elastic piece is abutted against the limiting cavity; the side wall of the valve core is provided with a communication groove, the valve body is respectively provided with a first air passage through hole, a second air passage through hole and a third air passage through hole, and the three air passage through holes and the connecting ports of the limiting cavity are sequentially distributed along the central axis of the limiting cavity. The three-way valve has the advantage of smaller cavity in the valve body.
Description
Technical Field
The invention relates to a valve and a detection device, in particular to a three-way valve and an internal and external leakage detection conversion device.
Background
Three-way valves, as the name implies, valves having three channels, including one inlet and two outlets, are used in channel selection and switching by switching the valve element of the three-way valve to effect switching of the channels. The existing three-way valve is mainly used for flow passage switching during liquid conveying, so that in order to enable circulating materials to be enough, the flow passages are arranged to be larger, and the valve body is also larger, so that on one hand, the circulation of the materials can be ensured, and on the other hand, the materials can be prevented from being blocked and accumulated due to the fact that the flow speed at the valve body is slow. However, the valve core of a general three-way valve is plate-shaped, and the flow channel is closed or opened by rotating the valve core, so that the flow channel is switched, and therefore, a large cavity exists in the rotating radius of the valve core and the valve body, and the cavity affects the detection precision for high-precision helium detection.
This is because, in the leak detection, if the leak amount is calibrated with helium, the leak amount detection, i.e., leak detection or leak detection, is performed by detecting the content of helium in the gas. In the existing three-way valves, due to the cavity, part of leaked helium remains in the cavity, so that the helium detected by the detector is less than the real leakage, and the residual quantity can have great influence on the detection precision especially in a high-precision detection device. Therefore, in the case of high-precision gas leakage detection, the conventional three-way valve has a problem that the detection precision is affected due to a large cavity in the valve.
Disclosure of Invention
Accordingly, an object of the present invention is to provide a three-way valve and an internal/external leakage detection switching device, which have the advantage of a smaller cavity in the valve body.
A three-way valve comprises a valve body, a columnar valve core and an elastic piece, wherein a columnar limiting cavity is formed in the valve body, one end of the limiting cavity is provided with the elastic piece, and the other end of the limiting cavity penetrates through the valve body and is provided with an air inlet through hole; the valve core is sleeved in the limiting cavity, and the elastic piece arranged at one end of the limiting cavity is abutted against the valve core;
The side wall of the valve core is provided with a communication groove, the valve body is respectively provided with a first air passage through hole, a second air passage through hole and a third air passage through hole, and the three air passage through holes and the connecting ports of the limiting cavity are sequentially distributed along the central axis of the limiting cavity; the communication groove is communicated with the first air passage through hole and the second air passage through hole, or the communication groove is communicated with the third air passage through hole and the second air passage through hole.
According to the three-way valve, the valve core can move in the limiting cavity of the valve body, and in a normal state, the valve core is pressurized into the limiting cavity through the air inlet through hole and pushed to extrude the elastic piece, so that the valve core is far away from the air inlet through hole, and at the moment, the communication groove is communicated with the second air passage through hole and the third air passage through hole; when the pressure is stopped to be charged and released in the limiting cavity, the valve core is driven by the elastic force of the elastic piece to be close to the air inlet through hole, and at the moment, the communication groove is communicated with the first air passage through hole and the second air passage through hole, so that the tee joint is realized.
Therefore, the runner of the three-way valve comprises the first air passage through hole, the second air passage through hole, the third air passage through hole and the communicating groove, and the material does not flow in the limiting cavity, so that the size of the limiting cavity does not influence the flow area of the material. And three gas circuit through-hole and intercommunication groove can be done as far as possible to guaranteed that the residual quantity of material in this three-way valve is enough little, compared with the three-way valve of prior art, the residual quantity of material in this three-way valve is already a lot less, to the leak hunting device of high accuracy in use, can improve the detection precision, effectively reduce the residual quantity of material in the valve body. In addition, the three-way valve reduces the volumes of the valve core and the valve body, thereby reducing the volume of the whole valve body, being capable of being directly connected to the joint of the workpiece and greatly saving the occupied space.
Further, the central axis of the limiting cavity is a reference axis, and the projection length of the distance between the end point of the first air passage through hole and the end point of the third air passage through hole on the reference axis is not smaller than the projection length of the communication groove on the reference axis; and the projection length of the distance from the second air passage through hole to any other air passage through hole on the reference shaft is smaller than the projection length of the communication groove on the reference shaft. The connecting ports of the second air passage through hole and the limiting cavity are positioned between the connecting ports of the first air passage through hole, the third air passage through hole and the limiting cavity; the communicating groove has certain volume space, because the case is closely connected with spacing cavity, the material can only circulate through the communicating groove. In order to ensure that three-way switching is realized instead of simultaneous circulation of three air passage through holes, the first air passage through hole is far away from the third air passage through hole as far as possible, but the first air passage through hole and the third air passage through hole are required to be communicated with the second air passage through hole through the communication groove.
Further, the communication groove is an annular groove formed in the surface of the valve core, and when the valve core is close to the air inlet through hole, the first air passage through hole is communicated with the second air passage through hole through the annular groove; when the valve core is far away from the air inlet through hole, the third air passage through hole is communicated with the second air passage through hole through the annular groove. The annular groove is arranged on the surface of the valve core, the annular groove provides a channel for gas circulation, and the width of the annular groove is the maximum distance between the connecting ports of two adjacent gas passage through holes.
Further, the communication groove is a slotted hole penetrating through the valve core. The slotted hole penetrates through the valve core, and different from the previous technical scheme, the air flow passes through the valve core and circulates.
Further, an annular limiting groove is formed in the side wall of the valve core, and a sealing ring is sleeved on the limiting groove. The sealing ring is arranged at the position to strengthen the sealing and isolating effects between the limiting cavity and the communicating groove, and further prevent gas channeling between the communicating groove and the limiting cavity.
Further, an air inlet connector and a quick connector are arranged on the valve body, the air inlet connector is communicated with the first air passage through hole, and the quick connector is communicated with the second air passage through hole. And the air inlet connector is arranged, so that the air inlet connector is conveniently connected with an air inlet pipeline, and the quick connector is arranged, so that the quick connection and disconnection of an exhaust pipeline are convenient.
The invention discloses an internal and external leakage detection conversion device, which comprises a vacuum box and the three-way valve, wherein an air passage pipeline is arranged on the vacuum box, the three-way valve is arranged in the vacuum box, and the air passage pipeline is connected with the three-way valve;
The gas circuit pipeline comprises an evacuating and helium filling pipeline and a driving gas source pipeline, wherein the evacuating and helium filling pipeline is communicated with the first gas circuit through hole, and the driving gas source pipeline is communicated with the gas inlet through hole.
According to the internal and external leakage detection conversion device, the evacuating helium filling pipeline is connected to the first gas path through hole and serves as the gas inlet pipeline, the driving gas source pipeline is connected to the gas inlet through hole and serves as the driving pipeline, the third gas path through hole is communicated with the outside of the vacuum box through the pipeline, and the workpiece to be detected is communicated with the second gas path through hole. During detection, the air supply pipeline is not ventilated, the valve core is in an original state under the action of the elastic piece, at the moment, the communication groove is used for communicating the first air passage through hole and the second air passage through hole, the detection gas can be inflated in the workpiece, in theory, the three-way valve and the workpiece to be detected are of a structure with good sealing, and no leakage exists. If there is a leak in the workpiece, a detection gas is present in the vacuum box, and helium is typically used as the detection gas. Then the helium detector can detect the existence of helium, and the content of the helium is the leakage amount of the workpiece. After the detection is finished, the air inlet of the driving air source pipeline can be opened, at the moment, under the air pressure driving, the valve core is far away from the first air passage through hole, and the communication groove is communicated with the second air passage through hole and the third air passage through hole; the gas in the workpiece flows out into the vacuum box through the three-way valve, and the pressure of the gas in the workpiece is relieved. Even after the detection is completed, helium in the vacuum box is recovered for full utilization of resources.
Further, the vacuum box is provided with at least three groups of gas circuit pipelines, and at least two groups of gas circuit pipelines are connected with the two three-way valves in a one-to-one correspondence mode. Two three-way valves or three-way valves are arranged, so that the three-cavity workpiece can be detected simultaneously, namely the three-cavity workpiece is a workpiece with three independent cavities, and the workpiece cannot be disassembled and cannot be detected by using a common valve, and the common valve detection cannot be carried out on the three cavities independently, so that at least two three-way valves are required to be connected simultaneously and respectively detected, and in the high-precision detection, the three-way valve can be better completed.
Further, the device also comprises a controller and a plurality of air source control valves, wherein the air source control valves are respectively arranged on the corresponding driving air source pipelines and are electrically connected with the controller. The automatic switching and automatic on-off of the three-way valves and the air source control valve are realized through the automatic control of the controller.
Further, a detection device is also included, which is in communication with the space inside the vacuum box.
For a better understanding and implementation, the present invention is described in detail below with reference to the drawings.
Drawings
FIG. 1 is a schematic view of a three-way valve of the present invention in a partially cut-away configuration in one use state;
FIG. 2 is a schematic view of a three-way valve of the present invention in a partially cut-away configuration in another use configuration;
FIG. 3 is a schematic diagram of the operation of the internal and external leakage detection switching device of the present invention;
Fig. 4 is a schematic diagram illustrating the operation of a modified embodiment of the internal and external leakage detection switching device according to the present invention.
Detailed Description
In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. In the description of the present invention, unless otherwise indicated, the meaning of "a plurality" is two or more.
A three-way valve as shown in fig. 1 and 2, comprising a valve body 10, a columnar valve core 20 and an elastic member 21, wherein a columnar limiting cavity (not identified) is formed in the valve body 10, one end of the limiting cavity is provided with the elastic member 21, and the other end of the limiting cavity penetrates through the valve body 10 and is provided with an air inlet through hole 40; the valve core 20 is sleeved in the limiting cavity, and the elastic piece 21 arranged at one end of the limiting cavity is abutted against the valve core 20;
A communication groove 50 is formed on the side wall of the valve core 20, a first air passage through hole 31, a second air passage through hole 32 and a third air passage through hole 33 are respectively formed on the valve body 10, and connection ports formed by the three air passage through holes and the limiting cavity are sequentially arranged along the central axis of the limiting cavity; the communication groove 50 communicates the first air passage through hole 31 with the second air passage through hole 32, or the communication groove 50 communicates the third air passage through hole 33 with the second air passage through hole 32.
In this embodiment, the elastic member 21 is preferably a spring, and the valve core 20 is provided with a guide groove (not identified), and the guide groove is sleeved outside the spring and is used for guiding and limiting the spring; when the spring is extruded by the valve core 20, one end of the spring is abutted against the inner wall of the guide groove, and the other end is abutted against the inner wall of the limiting cavity; when the valve core 20 is far away from the spring, one end of the spring is abutted against the inner wall of the limiting cavity, and the other end of the spring naturally stretches.
Further, the central axis of the limiting cavity is a reference axis, and the length of the projection of the distance between the end point of the first air passage through hole 31 and the end point of the third air passage through hole 33 on the reference axis is not smaller than the length of the projection of the communication groove 50 on the reference axis; and the projection length of the distance from the second air passage through hole 32 to any other air passage through hole on the reference shaft is smaller than the projection length of the communication groove 50 on the reference shaft.
In a preferred embodiment of the communication groove 50, the communication groove 50 is an annular groove formed on the surface of the valve core 20, and when the valve core 20 approaches the air inlet through hole, the first air passage through hole 31 is communicated with the second air passage through hole 32 through the annular groove; when the valve core 20 is away from the air inlet through hole, the third air passage through hole 33 communicates with the second air passage through hole 32 through the annular groove.
In another preferable embodiment of the communication groove 50, the communication groove 50 is a slot penetrating the valve core 20.
Further, the side wall of the valve core 20 is provided with an annular limit groove, and the limit groove is sleeved with a sealing ring 61.
Further, the valve body 10 is provided with an air inlet joint 71 and a quick connector 72, the air inlet joint 71 is communicated with the first air passage through hole 31, and the quick connector 72 is communicated with the second air passage through hole 32.
Further, a plurality of sealing sleeves 62 are further arranged in the limiting cavity, the sealing sleeves 62 are sleeved on the valve core 20, a flow channel is reserved between any two adjacent sealing sleeves 62, and the flow channel can provide airflow circulation. In order to ensure the optimal circulation of the gas, the space between the sealing sleeves 62 is equal to the space between the gas passage through holes at the corresponding positions; for example, the gap between the connection ports of the first air passage hole 31 and the second air passage hole 32 is equal to the interval between the corresponding sealing sleeves 62. Furthermore, the sealing sleeve 62 is mainly used for enhancing the sealing between the limiting cavity and the valve core 20, and the three-way valve is provided with three air passage through holes, and also has three connecting ports, and the three connecting ports are arranged in a staggered manner, so that four sealing sleeves 62 are required to be arranged. The four sealing sleeves 62 are respectively arranged between the three connecting ports and at two sides of the connecting ports, so that the sealing performance between the valve core 20 and the limiting cavity is ensured. Thus, the gas to be measured can only flow from the three gas passage through holes and the communication groove 50, and cannot enter the limiting cavity.
The working principle of the three-way valve is as follows:
The air inlet joint 71 is connected to an air inlet pipe line, the quick joint 72 is connected to a workpiece to be measured, and the air inlet through hole 40 is connected to a driving air source. As shown in fig. 1, in a normal state, the air intake of the driving air source is closed, the valve core 20 is positioned on the right side under the tension of the spring, at this time, the communication groove 50 communicates the first air passage through hole 31 with the second air passage through hole 32, the third air passage through hole 33 is disconnected, and the air to be measured in the air intake line is filled into the workpiece. When the air intake needs to be disconnected, the air intake of the driving air source is opened, the driving air source pushes the valve core 20 to move away from the air intake through hole, as shown in fig. 2, the thrust force is larger than the tension force of the spring, the valve core 20 is extruded to the left side, at this time, the communication groove 50 communicates the second air passage through hole 32 with the third air passage through hole 33, and the air in the workpiece flows out of the three-way valve through the third air passage through hole 33. When the workpiece is filled with the gas to be detected, the environment outside the workpiece is required to be detected by the detector, the content of the gas to be detected is detected, and if the content of the gas to be detected is zero, the workpiece has good sealing performance and no leakage. If the signal is not zero, the signal indicates that a leakage point exists. Thereby, the side leakage of the work is completed.
In addition, the controller can also automatically control the air inlet of the driving air source, so that the automatic control of the whole side leakage process is realized.
Referring to fig. 3, the internal and external leakage detection switching device of the present invention includes a vacuum box 80 and the three-way valve, wherein an air path pipeline is disposed on the vacuum box 80, the three-way valve is disposed in the vacuum box 80, and the air path pipeline is connected with the three-way valve;
The gas circuit lines include an evacuating and helium-filling line (not shown) that communicates with the first gas circuit through hole 31 and a driving gas source line (not shown) that communicates with the gas inlet through hole 40.
Preferably, the vacuum box 80 further comprises at least two three-way valves, and at least three groups of air passage pipelines are arranged on the vacuum box 80, wherein two groups of air passage pipelines are connected with the two three-way valves in a one-to-one correspondence manner.
Further, the device also comprises a controller (not shown) and a plurality of air source control valves (not shown), wherein the air source control valves are respectively arranged on the corresponding driving air source pipelines and are electrically connected with the controller. In this embodiment, the controller is preferably a PLC.
Further, a detection device 84 is also included, which detection device 84 communicates with the in-tank space of the vacuum tank 80. The detection device is used for detecting the content of the gas to be detected, and in this embodiment, the gas to be detected is preferably helium, and the detection device is a helium detector.
The invention relates to an operating principle of an internal and external leakage detection conversion device, which comprises the following steps:
Referring to fig. 3, the working principle of the internal and external leakage detection switching device of the present invention will be described by taking a three-cavity workpiece as an example. In combination with the working principle of the three-way valve, the workpiece to be tested is a three-cavity workpiece, and three-way valves are selected to correspond to the workpiece to be tested. The three-way valve 11 is connected with the cavity A of the workpiece to be detected, the three-way valve 12 is connected with the cavity B of the workpiece to be detected, and the three-way valve 13 is connected with the cavity C of the workpiece to be detected; the three-way valve 11 is connected to the evacuation helium-filling line 81, the three-way valve 12 is connected to the evacuation helium-filling line 82, and the three-way valve 13 is connected to the evacuation helium-filling line 83. The vacuum box 80 is connected to the detecting device 84, and a vacuum pumping device is arranged in the detecting device 84. The helium control valve is arranged on the evacuating and helium filling pipeline and is used for controlling the on-off of helium of the evacuating and helium filling pipeline.
Under the control of the PLC, the following detection needs to be accomplished:
1) Cavity a test: detection including between cavity a and cavity B, between cavity a and cavity C, between cavity a and vacuum box 80;
2) Cavity B test: including detection between cavity B and cavity C, between cavity B and vacuum box 80;
3) And (3) testing a cavity C: including detection between chamber C and vacuum box 80.
1. Cavity a was tested. Under the control of the PLC, the gas source control valves of the three-way valves 11, 12, 13 are all closed, at this time, the evacuation helium-filled line 81 of the three-way valve 11 is turned on, the evacuation helium-filled line 82 of the three-way valve 12 is turned on, and the evacuation helium-filled line 83 of the three-way valve 13 is turned on, but the helium control valves of the evacuation helium-filled lines 82, 83 are closed, and only the helium control valve of the evacuation helium-filled line 81 is opened. The workpiece to be measured is isolated from the vacuum box. Helium is filled into the cavity A through the evacuating helium filling pipeline 81, and the helium in the cavity A can leak into the vacuum box 80 through a wall surface leakage point of the cavity, can enter other cavities through leakage points between the cavity A and other cavities, and then flows into the vacuum box 80 from the cavity B or the cavity C. The detection device 84 is turned on to detect the helium content in the vacuum box 80, thereby completing the detection of the cavity a.
Specifically, the detection of the cavity a includes an inner leak detection and an outer leak detection.
During the leak detection of the cavity A, the air source control valves of the three-way valves 11, 12 and 13 are closed, helium is filled into the cavity A through the evacuating helium filling pipeline 81, and simultaneously the helium control valve corresponding to the cavity B, C is closed, so that the three cavities of the workpiece are isolated from the vacuum box. If the detection device 84 in the vacuum box detects the presence of helium, it indicates that the cavity a is leaking; if the detection device 84 does not detect the presence of helium, it is indicated that chamber A is not leaking.
In the case of leak detection in the cavity a, it is necessary to perform detection between the cavities A, B and A, C, respectively. 1) When detecting internal leakage between the cavities A and B, the air source control valve of the three-way valve 12 is opened, the air source control valves of the three-way valves 11 and 13 are closed, so that the cavity B is communicated with the vacuum box, the cavity A, C is isolated from the vacuum box, and helium is filled into the cavity A through the evacuating helium filling pipeline 81. If internal leakage exists between the cavities A, B, helium can be detected by the detection equipment of the vacuum box; if the detection device does not detect helium, it indicates that there is no internal leak between the chambers A, B. 2) When detecting internal leakage between the cavities A and C, the air source control valve of the three-way valve 13 is opened, the air source control valves of the three-way valves 11 and 12 are closed, so that the cavity C is communicated with the vacuum box, the cavity A, B is isolated from the vacuum box, and helium is filled into the cavity A through the evacuating helium filling pipeline 81. If internal leakage exists between the cavities A, C, helium can be detected by the detection equipment of the vacuum box; if the detection device does not detect helium, it indicates that there is no internal leak between the chambers A, C.
2. Cavity B test. Under the control of the PLC, the gas source control valves of the three-way valves 11, 12, 13 are closed, at this time, the evacuation helium filling line 81 of the three-way valve 11 is turned on, the evacuation helium filling line 82 of the three-way valve 12 is turned on, and the evacuation helium filling line 83 of the three-way valve 13 is turned on, but only the helium control valve on the evacuation helium filling line 82 is opened, the helium control valves of the evacuation helium filling lines 81, 83 are closed, and only the chamber B has helium gas entering. At this time, the three cavities of the workpiece are isolated from the vacuum box. The helium is filled into the cavity B by evacuating the helium filling line 82, and the detecting device 84 is opened to detect the helium content in the vacuum box 80, thereby completing the test of the cavity B.
Specifically, the detection of the cavity B includes an inner leak detection and an outer leak detection.
During the leak detection of the cavity B, the gas source control valves of the three-way valves 11, 12, 13 are closed, and only the helium control valve on the evacuation helium filling line 82 is opened to fill the cavity B with helium. If the detection equipment in the vacuum box detects that helium exists, the cavity B is indicated to have leakage; if helium is not detected in the vacuum box, the cavity B is free from leakage.
During the detection of the internal leakage of the cavity B, only the detection between the cavities B, C is needed. The air supply control valve of the three-way valve 13 is opened so that the cavity C communicates with the vacuum box, the air supply control valves of the three-way valves 11, 12 are closed, the cavity A, B is isolated from the vacuum box, and the cavity B is filled with helium through the evacuation helium filling line 82. If the detecting device detects helium, the inner leakage exists between the cavities B, C; if the detection device does not detect helium, it indicates that there is no internal leak between the chambers B, C.
3. Cavity C test. Under the control of the PLC, the air source control valves of the three-way valves 11, 12, 13 are closed, at this time, the evacuation helium-filling line 81 of the three-way valve 11 is turned on, the evacuation helium-filling line 82 of the three-way valve 12 is turned on, and the evacuation helium-filling line 83 of the three-way valve 13 is turned on, and helium is filled into the chamber C through the evacuation helium-filling line 83. At this time, the three cavities of the workpiece are isolated from the vacuum box. The helium is filled into the cavity C by evacuating the helium filling pipeline 83, the detecting device 84 is opened, and the content of the helium in the vacuum box 80 is detected, so that the testing of the cavity C can be completed.
The detection of the cavity C only requires the detection of leakage.
Specifically, the gas source control valves of the three-way valves 11, 12, 13 are closed, and only the helium control valve on the evacuation helium-filling line 83 is opened to fill the chamber C with helium. If the detection equipment in the vacuum box detects that helium exists, the cavity C is indicated to have leakage; if helium is not detected in the vacuum box, the cavity C is free from leakage.
As a preferred embodiment, the leakage of the cavity is detected firstly, then the internal leakage of the cavity is detected, and when the leakage is found, the workpiece is disassembled and repaired, and then the internal leakage is detected, so that the completeness and the comprehensiveness of detection are ensured.
The working principle of the deformation implementation mode of the internal and external leakage detection conversion device is as follows:
As a variant of the above embodiment, the number of three-way valves is one less than the number of cavities. Taking the detection of a three-cavity workpiece as an example, the working principle of the deformation implementation mode is specifically described.
As shown in fig. 4, the three-way valve 11 is arranged on the evacuating and helium-filling pipeline 81 of the cavity a, the three-way valve 12 is arranged on the evacuating and helium-filling pipeline 82 of the cavity B, the three-way valve is not arranged on the evacuating and helium-filling pipeline 83 of the cavity C, and the on-off of the evacuating and helium-filling pipeline 83 is directly controlled by the helium control valve of the evacuating and helium-filling pipeline 83.
1. The detection of the cavity A comprises inner leakage detection and outer leakage detection.
Specifically, during the leak detection of the cavity a, the gas source control valves of the three-way valves 11 and 12 are closed, helium is filled into the cavity a by opening the helium control valve of the evacuating and helium filling pipeline 81, and simultaneously the helium control valve corresponding to the cavity B, C is closed, so that the three cavities of the workpiece are isolated from the vacuum box. If the cavity A leaks, the detection device 84 in the vacuum box can detect the existence of helium, which indicates that the cavity A leaks; if the detection device 84 does not detect the presence of helium, it is indicated that chamber A is not leaking.
In the case of leak detection in the cavity a, it is necessary to perform detection between the cavities A, B and A, C, respectively. 1) When detecting internal leakage between the cavities A and B, the air source control valve of the three-way valve 12 is opened, the air source control valve of the three-way valve 11 is closed, so that the cavity B is communicated with the vacuum box, the cavity A, C is isolated from the vacuum box, and helium is filled into the cavity A through the evacuating helium filling pipeline 81. If internal leakage exists between the cavities A, B, helium can be detected by the detection equipment of the vacuum box; if the detection device does not detect helium, it indicates that there is no internal leak between the chambers A, B. 2) At the time of detecting the internal leakage between the chambers a and C, the connection of the evacuation helium filling line 83 and the chamber C is disconnected, the air source control valves of the three-way valves 11, 12 are closed so that the chamber C is communicated with the vacuum box, the chamber A, B is isolated from the vacuum box, and the chamber a is filled with helium through the evacuation helium filling line 81. If internal leakage exists between the cavities A, C, helium can be detected by the detection equipment of the vacuum box; if the detection device does not detect helium, it indicates that there is no internal leak between the chambers A, C.
2. The detection of the cavity B comprises inner leakage detection and outer leakage detection.
Specifically, upon leak detection of chamber B, the gas source control valves of three-way valves 11, 12 are closed and only the helium control valve on the evacuation helium fill line 82 is opened to fill chamber B with helium. If the detection equipment in the vacuum box detects that helium exists, the cavity B is indicated to have leakage; if helium is not detected in the vacuum box, the cavity B is free from leakage.
During the detection of the internal leakage of the cavity B, only the detection between the cavities B, C is needed. The connection of the evacuation helium fill line 83 to the chamber C is broken so that the chamber C communicates with the vacuum box, the air supply control valves of the three-way valves 11, 12 are closed, the chamber A, B is isolated from the vacuum box, and the chamber B is filled with helium through the evacuation helium fill line 82. If the detecting device detects helium, the inner leakage exists between the cavities B, C; if the detection device does not detect helium, it indicates that there is no internal leak between the chambers B, C.
3. The detection of the cavity C only requires the detection of leakage.
Specifically, the gas source control valves of the three-way valves 11, 12 are closed, and only the helium control valve on the evacuation helium-filling line 83 is opened to fill the chamber C with helium. If the detection equipment in the vacuum box detects that helium exists, the cavity C is indicated to have leakage; if helium is not detected in the vacuum box, the cavity C is free from leakage.
Because the structure of the multi-cavity workpiece can not finish detection once, and the conditions of internal leakage and external leakage exist, the condition is complex, and therefore, the three-way valve is needed to be used and the detection is performed in multiple steps. In the high-precision detection, the three-way valve is also required to be completed, so that the residual quantity of helium in the three-way valve is ensured to be as small as possible, and the leakage quantity is detected more accurately, so that the detection precision can be ensured.
The internal and external leakage detection conversion device is not only suitable for three-cavity workpieces, but also suitable for detecting multi-cavity workpieces, and only needs to arrange the workpieces corresponding to the cavities, and each cavity is sequentially detected in multiple steps.
The three-way valve provided by the invention has the advantages of simple structure, low manufacturing cost, high detection precision and simple detection flow.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the invention. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention.
Claims (7)
1. A three-way valve, characterized in that: the valve comprises a valve body, a columnar valve core and an elastic piece, wherein a columnar limiting cavity is formed in the valve body, one end of the limiting cavity is provided with the elastic piece, and the other end of the limiting cavity penetrates through the valve body and is provided with an air inlet through hole; the valve core is sleeved in the limiting cavity, and the elastic piece arranged at one end of the limiting cavity is abutted against the valve core;
The side wall of the valve core is provided with a communication groove, the valve body is respectively provided with a first air passage through hole, a second air passage through hole and a third air passage through hole, and the three air passage through holes and the connecting ports of the limiting cavity are sequentially distributed along the central axis of the limiting cavity; taking the central axis of the limiting cavity as a reference axis, wherein the projection length of the distance between the end point of the first air passage through hole and the end point of the third air passage through hole on the reference axis is not smaller than the projection length of the communication groove on the reference axis; the projection length of the distance from the second air passage through hole to any other air passage through hole on the reference shaft is smaller than the projection length of the communication groove on the reference shaft; the communication groove is communicated with the first air passage through hole and the second air passage through hole, or the communication groove is communicated with the third air passage through hole and the second air passage through hole; an annular limiting groove is formed in the side wall of the valve core, and a sealing ring is sleeved on the limiting groove; the valve body is provided with an air inlet connector and a quick connector, the air inlet connector is communicated with the first air passage through hole, and the quick connector is communicated with the second air passage through hole.
2. The three-way valve according to claim 1, wherein: the communication groove is an annular groove formed in the surface of the valve core, and when the valve core is close to the air inlet through hole, the first air passage through hole is communicated with the second air passage through hole through the annular groove; when the valve core is far away from the air inlet through hole, the third air passage through hole is communicated with the second air passage through hole through the annular groove.
3. The three-way valve according to claim 1, wherein: the communication groove is a slotted hole penetrating through the valve core.
4. An inside and outside leak detection conversion equipment, its characterized in that: the three-way valve comprises a vacuum box and the three-way valve according to any one of claims 1-3, wherein an air passage pipeline is arranged on the vacuum box, the three-way valve is arranged in the vacuum box, and the air passage pipeline is connected with the three-way valve;
The gas circuit pipeline comprises an evacuating and helium filling pipeline and a driving gas source pipeline, wherein the evacuating and helium filling pipeline is communicated with the first gas circuit through hole, and the driving gas source pipeline is communicated with the gas inlet through hole.
5. The inside and outside leakage detection switching device according to claim 4, wherein: the vacuum box comprises at least two three-way valves, at least three groups of air passage pipelines are arranged on the vacuum box, and the at least two groups of air passage pipelines are connected with the two three-way valves in a one-to-one correspondence manner.
6. The inside and outside leakage detection switching device according to claim 5, wherein: the device also comprises a controller and a plurality of air source control valves, wherein the air source control valves are respectively arranged on the corresponding driving air source pipelines and are electrically connected with the controller.
7. The inside and outside leakage detection switching device according to any one of claims 4 to 6, wherein: the device also comprises detection equipment which is communicated with the space in the vacuum box.
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| CN110082046B (en) * | 2019-04-26 | 2024-04-19 | 中国科学院理化技术研究所 | Valve low-temperature leakage detection system and leakage detection method |
| CN110360965A (en) * | 2019-07-22 | 2019-10-22 | 太原鹏跃电子科技有限公司 | A kind of device and detection method based on air-gauge detection flatness air-tightness |
| CN114483716B (en) * | 2022-02-22 | 2024-01-30 | 爱发科东方检测技术(成都)有限公司 | Three-way reversing isolation valve |
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