CN109332913A - A kind of laser scribing means and a kind of method for adjusting height applied to scribing machine - Google Patents
A kind of laser scribing means and a kind of method for adjusting height applied to scribing machine Download PDFInfo
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- CN109332913A CN109332913A CN201811149360.2A CN201811149360A CN109332913A CN 109332913 A CN109332913 A CN 109332913A CN 201811149360 A CN201811149360 A CN 201811149360A CN 109332913 A CN109332913 A CN 109332913A
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- laser
- reflecting mirror
- sliver
- motor
- plate
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
- B23K26/0853—Devices involving movement of the workpiece in at least in two axial directions, e.g. in a plane
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
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- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Laser Beam Processing (AREA)
Abstract
The present invention relates to scribings and sliver technical field, disclose a kind of laser scribing means and a kind of method for adjusting height applied to scribing machine, including cabinet (1), workbench (2) are equipped in cabinet (1), workbench (2) includes lower platform (203), supporting block (202) and upper mounting plate (201), upper mounting plate (201) is equipped with Z axis movement mould group (12) and refracting telescope fixed plate (11), Z axis moves mould group (12) and is equipped with multiple-point focusing head (18), laser sliver focus head (20) and servo-actuated sensor (22), refracting telescope fixed plate (11) is equipped with the first reflecting mirror (16) and the second reflecting mirror (19), scribing laser (9) are additionally provided on upper mounting plate (201), first reflection microscope group (6), sliver laser (10) and second is instead Penetrate microscope group (15).The present invention has the advantages that scribing and sliver operation can be completed on a machine, effectively promotes processing efficiency, is consistent multiple-point focusing head at a distance from objective table.
Description
Technical field
The present invention relates to scribing and sliver technical field, more particularly to a kind of laser scribing means and a kind of is applied to scribing
The method for adjusting height of machine.
Background technique
Laser scribing means is to be radiated at workpiece surface using high energy laser beam, makes irradiated area local melting, gasification, from
And achieve the purpose that scribing.Because laser is to become a very small luminous point after dedicated optics into focus, energy density is high,
Because its processing be it is contactless, to workpiece itself without mechanical stamping press, workpiece is unlikely to deform, and heat affecting is minimum, draw precision
Height is widely used in the cutting and scribing of glass.Laser breaking machine is that the glass plate for having pulled cutting line is placed on breaking machine
On objective table, glass-cutting line to be split is moved to the underface of laser sliver focus head by objective table, passes through laser sliver
The laser that focus head is launched is come the glass that splits.After usual converted products is cut on laser scribing means, needs to be transferred to and split
Piece machine carries out sliver operation, it is therefore desirable to which the distributed operation on two machines, there are converted products transfer trouble, operating performance are numerous
Trivial, the shortcomings that processing efficiency is low, and there is also take up a large area two machines.
Also, laser scribing means is in processing, due to being responsible between the multiple-point focusing head and objective table of laser cutting
Distance changes so as to cause the laser cutting amplitude being subject in workpieces processing it occur frequently that variation, will lead to workpieces processing
Quality go wrong, therefore keep the distance between multiple-point focusing head and objective table be very important, be conducive to be promoted
The quality of converted products.
Summary of the invention
The shortcomings that present invention is directed in the prior art, provide a kind of laser scribing means and a kind of height applied to scribing machine
Spend method of adjustment.
In order to solve the above-mentioned technical problem, the present invention is addressed by following technical proposals:
A kind of laser scribing means, including cabinet, are equipped with workbench in cabinet, workbench include lower platform, supporting block and on
Platform, lower platform are equipped with supporting block, and supporting block is equipped with upper mounting plate, and upper mounting plate is equipped with Z axis movement mould group and refracting telescope is solid
Fixed board, Z axis moves mould group and is equipped with multiple-point focusing head, laser sliver focus head and servo-actuated sensor, in refracting telescope fixed plate
Equipped with the first reflecting mirror and the second reflecting mirror, be additionally provided on upper mounting plate scribing laser, first reflection microscope group, sliver laser and
Second reflection microscope group, the first reflection microscope group are used to receive the laser of scribing laser transmitting, and the first reflecting mirror is for receiving first
The reflected light of microscope group is reflected, the second reflection microscope group is used to receive the laser of sliver laser transmitting, and the second reflecting mirror is for receiving
The reflected light of second reflection microscope group；Z axis movement mould group includes support plate, motor cabinet, motor, threaded rod, sliding block and guide rod, support
Plate is equipped with motor and motor cabinet, and motor is connected with threaded rod, and threaded rod is threadedly coupled after passing through motor cabinet with sliding block, guide rod one
End is connect with motor cabinet, and the guide rod other end is connect with support plate, and guide rod passes through sliding block, and sliding block is equipped with sliding slot, is equipped in sliding slot
Draw runner, draw runner one end are connect with motor cabinet, and the draw runner other end is connect with support plate, and sliding block is equipped with limited block, are set on limited block
There is connecting plate, multiple-point focusing head, laser sliver focus head and servo-actuated sensor are arranged on connecting plate.On same machine
Equipped with scribing laser and sliver laser, dicing operation is carried out to workpieces processing by multiple-point focusing head, is split by laser
Piece focus head carries out sliver operation to workpieces processing, and scribing can be completed in same machine and sliver operates, without
Converted products is transferred to an other machine, reduces the operating procedure of workpieces processing transfer, and on same machine
It completes scribing and sliver operates, the processing efficiency of machine is effectively promoted, and can be reduced the occupied area of machine, reduces soil
The usable floor area on ground, to save the manufacturing cost of product.
Preferably, being additionally provided with positioning plate in Z axis movement mould group, positioning plate is connect with connecting plate, and multiple-point focusing head swashs
Light sliver focus head and servo-actuated sensor are arranged is additionally provided with first through hole and the second through-hole on positioning plate, on positioning plate, and first
The reflected light of reflecting mirror is received after passing through first through hole by multiple-point focusing head, and the reflected light of the second reflecting mirror passes through the second through-hole
It is received afterwards by laser sliver focus head.
Preferably, the first reflection microscope group includes third reflecting mirror and the 4th reflecting mirror, third reflecting mirror is drawn for receiving
The laser of chip laser transmitting, the 4th reflecting mirror are used to receive the reflected light of third reflecting mirror, and the first reflecting mirror is for receiving the
The reflected light of four reflecting mirrors.
Preferably, the second reflection microscope group includes the 5th reflecting mirror and the 6th reflecting mirror, the 5th reflecting mirror is split for receiving
The laser of chip laser transmitting, the 6th reflecting mirror are used to receive the reflected light of the 5th reflecting mirror, and the second reflecting mirror is for reception the
The reflected light of six reflecting mirrors.
Preferably, lower platform, which is equipped with X/Y axis, moves mould group, X/Y axis moves mould group and is equipped with objective table, objective table position
In the lower section of multiple-point focusing head and laser sliver focus head.Mould group moving stage is moved by X/Y axis, to make objective table
Positioned at the lower section of multiple-point focusing head and laser sliver focus head.
Preferably, workbench is equipped with steel structure rack, Steel Structure structure includes feet, lower frame, bottom plate, column and upper ledge
Frame, feet are equipped with lower frame, and lower frame is connect by column with upper frame, and upper frame is connect with workbench, is set on lower frame
There is bottom plate；Workbench is workbench made of marble, and the quantity of feet is 4, and the quantity of column is 4.
Preferably, cabinet includes case lid, upper box and lower box, case lid is hinged with upper box, and upper box is equipped with and opens
Mouthful, workbench is arranged in upper box, and upper box is connect with lower box.
Preferably, cabinet is equipped with smoke exhaust mechanism, smoke exhaust mechanism includes installation shell, smoke exhaust pipe, connecting tube and stretches
Pipe, installation shell both ends are equipped with the first mounting plate and the second mounting plate, and screw passes through the first mounting plate, cabinet, the second peace according to this
It is threadedly coupled after loading board with nut, installation inner walls are equipped with the first support column and the second support column, the first support column and smoke evacuation
Pipe connection, the second support column are connect with telescoping tube, and connecting tube both ends are communicated with smoke exhaust pipe, telescoping tube respectively, and flexible inside pipe wall is set
There are particulate matter sensors, smoke evacuation inside pipe wall is equipped with exhaust fan and motor, and motor is equipped with filter screen, and motor drives filter screen to turn
It is dynamic.Telescoping tube is placed near multiple-point focusing head, when multiple-point focusing head utilizes laser cut workpieces, passes through exhausting
The smog generated when processing is discharged outside cabinet machine, so that effectively the intracorporal smog of case be discharged；Particulate matter sensors pass through
Signal wire is connect with motor, and particulate matter sensors are used to detect the grain value in telescoping tube, when judging that grain value is exceeded, particle
Object sensor sends a signal to motor, and motor drives filter screen rotation, so that filter screen is located at the nozzle position of connecting tube, thus right
Particulate burning purifying in smog reduces the dust in air；When disconnected grain value is not exceeded, motor is inoperative, to reduce motor
Energy consumption, and filter screen is not at the nozzle position of connecting tube, and the speed that smog is discharged is promoted.
A kind of method for adjusting height applied to scribing machine, including a kind of laser scribing means further include data collecting card, work
Control machine and motion control card, the control software on industrial personal computer acquires being servo-actuated for servo-actuated sensor detection by data collecting card in real time
The distance between workpiece surface data, are compared with setting value on sensor and objective table, when range data and setting value
When absolute value is less than or equal to designated value, industrial personal computer does not pass through motion control card driving motor and operates；When range data and setting
When the absolute value of value is greater than designated value, industrial personal computer is operated by motion control card driving motor, motor driven threaded rod rotation, spiral shell
Rasp bar drives servo-actuated sensor to move up and down by sliding block, refers to so that the absolute value of range data and setting value be made to be less than or equal to
Definite value.By the cooperation of servo-actuated sensor, it is consistent servo-actuated the distance between sensor and workpiece surface on objective table, from
And the distance between multiple-point focusing head and workpiece surface on objective table are consistent, to help to promote multiple-point focusing head
Machining accuracy, promote the quality of converted products.
The present invention has significant technical effect: being equipped with and draw on same machine due to using above technical scheme
Chip laser and sliver laser carry out dicing operation to workpieces processing by multiple-point focusing head, are focused by laser sliver
Head carries out sliver operation to workpieces processing, and scribing can be completed in same machine and sliver operates, without that will process
Transferred product reduces the operating procedure of workpieces processing transfer to an other machine, and completes to draw on same machine
Piece and sliver operate, and the processing efficiency of machine are effectively promoted, and can be reduced the occupied area of machine, reduce making for soil
With area, to save the manufacturing cost of product.The present invention has can complete scribing on a machine and sliver operates, has
Effect promotes the advantages of processing efficiency.By being servo-actuated the cooperation of sensor, make on servo-actuated sensor and objective table between workpiece surface
Distance be consistent, so that the distance between multiple-point focusing head and workpiece surface on objective table are consistent, to help
In the machining accuracy for promoting multiple-point focusing head, the quality of converted products is promoted.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is the structural schematic diagram of box inner structure.
Fig. 3 is the partial enlarged view of A in Fig. 2.
Fig. 4 is the structural schematic diagram of positioning plate in Fig. 3.
Fig. 5 is the structural schematic diagram of Z axis movement mould group in Fig. 2.
Fig. 6 is the schematic diagram of internal structure of Z axis movement mould group removal connecting plate in Fig. 5.
Fig. 7 is the partial enlarged view of B in Fig. 6.
Fig. 8 is the structural schematic diagram of cabinet and smoke exhaust mechanism in Fig. 1.
The toponym that each number designation is referred in the figures above is as follows: where 1-cabinet, 101-case lids, 102-
Upper box, 1021-openings, 103-lower boxes, 2-workbench, 201-upper mounting plates, 202-supporting blocks, 203-lower platforms,
3-steel structure racks, 301-upper frames, 302-columns, 303-bottom plates, 304-lower frames, 305-feets, the reflection of 4-thirds
Mirror, the 5-the four reflecting mirror, 6-the first reflection microscope group, 7-objective tables, 8-X/Y axis movement mould group, 9-scribing lasers,
10-sliver lasers, 11-refracting telescope fixed plates, 12-Z axis movement mould group, 1201-motors, 1202-motor cabinets,
1203-draw runners, 1204-limited blocks, 1205-support plates, 1206-threaded rods, 1207-guide rods, 1208-sliding blocks,
12081-sliding slots, 1209-connecting plates, the 13-the five reflecting mirror, the 14-the six reflecting mirror, the 15-the second reflection microscope group, 16-
First reflecting mirror, 17-positioning plates, 1701-first through hole, the 1702-the second through-hole, 18-multiple-point focusing heads, 19-the second
Reflecting mirror, 20-laser sliver focus heads, 21-smoke exhaust mechanisms, 2101-installation shells, the 2102-the first support column, 2103-
Filter screen, 2104-smoke exhaust pipes, 2105-exhaust fans, 2106-motors, 2107-connecting tubes, 2108-telescoping tubes, 2109-
Particulate matter sensors, the 21010-the second support column, 21011-nuts, the 21012-the second mounting plate, the 21013-the first installation
Plate, 21014-screws.
Specific embodiment
Present invention is further described in detail with embodiment with reference to the accompanying drawing.
Embodiment 1
A kind of laser scribing means is equipped with workbench 2 as shown, including cabinet 1 in cabinet 1, workbench 2 includes lower flat
Platform 203, supporting block 202 and upper mounting plate 201, lower platform 203 are equipped with supporting block 202, and supporting block 202 is equipped with upper mounting plate 201,
Upper mounting plate 201 is equipped with Z axis movement mould group 12 and refracting telescope fixed plate 11, and Z axis moves mould group 12 and is equipped with multiple-point focusing head
18, laser sliver focus head 20 and servo-actuated sensor 22, refracting telescope fixed plate 11 are equipped with the first reflecting mirror 16 and the second reflection
Mirror 19 is additionally provided with scribing laser 9, first on upper mounting plate 201 and reflects microscope group 6, sliver laser 10 and the second reflection microscope group 15,
First reflection microscope group 6 is used to receive the laser of the transmitting of scribing laser 9, and the first reflecting mirror 16 is for receiving the first reflection microscope group 6
Reflected light, the second reflection microscope group 15 is used to receive the laser of the transmitting of sliver laser 10, and the second reflecting mirror 19 is for receiving the
The reflected light of two-mirror group 15；It includes support plate 1205, motor cabinet 1202, motor 1201, threaded rod that Z axis, which moves mould group,
1206, sliding block 1208 and guide rod 1207, support plate 1205 are equipped with motor 1201 and motor cabinet 1202, and motor 1201 is connected with spiral shell
Rasp bar 1206, threaded rod 1206 are threadedly coupled after passing through motor cabinet 1202 with sliding block 1208,1207 one end of guide rod and motor cabinet
1202 connections, 1207 other end of guide rod are connect with support plate 1205, and guide rod 1207 passes through sliding block 1208, and sliding block 1208, which is equipped with, to be slided
Slot 12081 is equipped with draw runner 1203 in sliding slot 12081, and 1203 one end of draw runner is connect with motor cabinet 1202,1203 other end of draw runner and
Support plate 1205 connects, and sliding block 1208 is equipped with limited block 1204, and limited block 1204 is equipped with connecting plate 1209, multiple-point focusing
First 18, laser sliver focus head 20 and servo-actuated sensor 22 are arranged on connecting plate 1209.
It is additionally provided with positioning plate 17 in Z axis movement mould group 12, positioning plate 17 is connect with connecting plate 1209, multiple-point focusing head
18, laser sliver focus head 20 and servo-actuated sensor 22 are arranged on positioning plate 17, are additionally provided with first through hole on positioning plate 17
1701 and second through-hole 1702, the reflected light of the first reflecting mirror 16 connect after passing through first through hole 1701 by multiple-point focusing head 18
It receives, the reflected light of the second reflecting mirror 19 is received after passing through the second through-hole 1702 by laser sliver focus head 20.
First reflection microscope group 6 includes third reflecting mirror 4 and the 4th reflecting mirror 5, and third reflecting mirror 4 is for receiving scribing laser
The laser that device 9 emits, the 4th reflecting mirror 5 are used to receive the reflected light of third reflecting mirror 4, and the first reflecting mirror 16 is for receiving the 4th
The reflected light of reflecting mirror 5.
Second reflection microscope group 15 includes the 5th reflecting mirror 13 and the 6th reflecting mirror 14, and the 5th reflecting mirror 13 is for receiving sliver
The laser that laser 10 emits, the 6th reflecting mirror 14 are used to receive the reflected light of the 5th reflecting mirror 13, and the second reflecting mirror 19 is used for
Receive the reflected light of the 6th reflecting mirror 14.
Lower platform 203 is equipped with X/Y axis and moves mould group 8, and X/Y axis moves mould group 8 and is equipped with objective table 7, and objective table 7 is located at
The lower section of multiple-point focusing head 18 and laser sliver focus head 20.
Workbench 2 is equipped with steel structure rack 3, and Steel Structure structure includes feet 305, lower frame 304, bottom plate 303, column 302
With upper frame 301, feet 305 is equipped with lower frame 304, and lower frame 304 is connect by column 302 with upper frame 301, upper frame
301 connect with workbench 2, and lower frame 304 is equipped with bottom plate 303；Workbench 2 is workbench 2 made of marble, feet 305
Quantity be 4, the quantity of column 302 is 4.
Cabinet 1 includes case lid 101, upper box 102 and lower box 103, and case lid 101 and upper box 102 are hinged, upper box
102 are equipped with opening 1021, and workbench 2 is arranged in upper box 102, and upper box 102 is connect with lower box 103.
Cabinet 1 is equipped with smoke exhaust mechanism 21, and smoke exhaust mechanism 21 includes installation shell 2101, smoke exhaust pipe 2104, connecting tube
2107 and telescoping tube 2108, installation 2101 both ends of shell are equipped with the first mounting plate 21013 and the second mounting plate 21012, screw
21014 are threadedly coupled after the first mounting plate 21013, cabinet 1, the second mounting plate 21012 with nut 21011 according to this, install
2101 inner wall of shell is equipped with the first support column 2102 and the second support column 21010, and the first support column 2102 connects with smoke exhaust pipe 2104
Connect, the second support column 21010 is connect with telescoping tube 2108,2107 both ends of connecting tube respectively with smoke exhaust pipe 2104, telescoping tube 2108
It communicates, 2108 inner wall of telescoping tube is equipped with particulate matter sensors 2109, and 2104 inner wall of smoke exhaust pipe is equipped with exhaust fan 2105 and motor
2106, motor 2106 is equipped with filter screen 2103, and motor 2106 drives filter screen 2103 to rotate.
A kind of method for adjusting height applied to scribing machine, including a kind of laser scribing means further include data collecting card, work
Control machine and motion control card, control software on industrial personal computer by data collecting card acquire in real time the servo-actuated detection of sensor 22 with
The distance between dynamic sensor 22 and workpiece surface on objective table 7 data, are compared, when range data and setting with setting value
When the absolute value of value is less than or equal to designated value, industrial personal computer does not pass through the operating of motion control card driving motor 1201；When apart from number
When according to being greater than designated value with the absolute value of setting value, industrial personal computer is operated by motion control card driving motor 1201, motor 1201
Threaded rod 1206 is driven to rotate, threaded rod 1206 drives servo-actuated sensor 22 to move up and down by sliding block 1208, to make distance
The absolute value of data and setting value is less than or equal to designated value.The absolute value of range data and setting value is range data and setting
The absolute value for the numerical value that value obtains after subtracting each other, when the absolute value of range data and setting value is less than or equal to designated value, distance
Data and designated value are close.
In short, the foregoing is merely presently preferred embodiments of the present invention, it is all according to equalization made by scope of the present invention patent
Variation and modification, shall all be covered by the patent of the invention.
Claims (9)
1. a kind of laser scribing means, it is characterised in that: including cabinet (1), be equipped with workbench (2) in cabinet (1), workbench (2)
Including lower platform (203), supporting block (202) and upper mounting plate (201), lower platform (203) is equipped with supporting block (202), supporting block
(202) upper mounting plate (201) are equipped with, upper mounting plate (201) is equipped with Z axis movement mould group (12) and refracting telescope fixed plate (11), Z axis
It moves mould group (12) and is equipped with multiple-point focusing head (18), laser sliver focus head (20) and servo-actuated sensor (22), refracting telescope
Fixed plate (11) is equipped with the first reflecting mirror (16) and the second reflecting mirror (19), and upper mounting plate is additionally provided with scribing laser on (201)
(9), the first reflection microscope group (6), sliver laser (10) and the second reflection microscope group (15), the first reflection microscope group (6) is for receiving
The laser of scribing laser (9) transmitting, the first reflecting mirror (16) are used to receive the reflected light of the first reflection microscope group (6), and second is anti-
Microscope group (15) are penetrated for receiving the laser of sliver laser (10) transmitting, the second reflecting mirror (19) is for receiving the second reflection microscope group
(15) reflected light；It includes support plate (1205), motor cabinet (1202), motor (1201), threaded rod that Z axis, which moves mould group,
(1206), sliding block (1208) and guide rod (1207), support plate (1205) are equipped with motor (1201) and motor cabinet (1202), motor
(1201) it being connected with threaded rod (1206), threaded rod (1206) passes through motor cabinet (1202) and is threadedly coupled afterwards with sliding block (1208),
Guide rod (1207) one end is connect with motor cabinet (1202), and guide rod (1207) other end is connect with support plate (1205), guide rod
(1207) sliding block (1208) being passed through, sliding block (1208) is equipped with sliding slot (12081), draw runner (1203) are equipped in sliding slot (12081),
Draw runner (1203) one end is connect with motor cabinet (1202), and draw runner (1203) other end is connect with support plate (1205), sliding block
(1208) limited block (1204) are equipped with, limited block (1204) is equipped with connecting plate (1209), multiple-point focusing head (18), laser
Sliver focus head (20) and servo-actuated sensor (22) are arranged on connecting plate (1209).
2. a kind of laser scribing means according to claim 1, it is characterised in that: it is fixed to be additionally provided in Z axis movement mould group (12)
Position plate (17), positioning plate (17) connect with connecting plate (1209), multiple-point focusing head (18), laser sliver focus head (20) and with
Dynamic sensor (22) are arranged on positioning plate (17), and first through hole (1701) and the second through-hole are additionally provided on positioning plate (17)
(1702), the reflected light of the first reflecting mirror (16) is received after passing through first through hole (1701) by multiple-point focusing head (18), and second
The reflected light of reflecting mirror (19) is received after passing through the second through-hole (1702) by laser sliver focus head (20).
3. a kind of laser scribing means according to claim 1, it is characterised in that: the first reflection microscope group (6) includes that third is anti-
Mirror (4) and the 4th reflecting mirror (5) are penetrated, third reflecting mirror (4) is used to receive the laser of scribing laser (9) transmitting, the 4th reflection
Mirror (5) is used to receive the reflected light of third reflecting mirror (4), and the first reflecting mirror (16) is used to receive the reflection of the 4th reflecting mirror (5)
Light.
4. a kind of laser scribing means according to claim 1, it is characterised in that: the second reflection microscope group (15) includes the 5th anti-
Penetrate mirror (13) and the 6th reflecting mirror (14), the 5th reflecting mirror (13) is used to receive the laser of sliver laser (10) transmitting, and the 6th
Reflecting mirror (14) is used to receive the reflected light of the 5th reflecting mirror (13), and the second reflecting mirror (19) is for receiving the 6th reflecting mirror (14)
Reflected light.
5. a kind of laser scribing means according to claim 1, it is characterised in that: lower platform (203) is moved equipped with X/Y axis
Mould group (8), X/Y axis move mould group (8) and are equipped with objective table (7), and objective table (7) is located at multiple-point focusing head (18) and laser is split
The lower section of piece focus head (20).
6. a kind of laser scribing means according to claim 1, it is characterised in that: workbench (2) is equipped with steel structure rack
(3), Steel Structure structure includes feet (305), lower frame (304), bottom plate (303), column (302) and upper frame (301), feet
(305) lower frame (304) are equipped with, lower frame (304) is connect by column (302) with upper frame (301), upper frame (301)
It is connect with workbench (2), lower frame (304) is equipped with bottom plate (303)；Workbench (2) is workbench (2) made of marble,
The quantity of feet (305) is 4, and the quantity of column (302) is 4.
7. a kind of laser scribing means according to claim 1, it is characterised in that: cabinet (1) includes case lid (101), top box
Body (102) and lower box (103), hingedly, upper box (102) is equipped with opening (1021) for case lid (101) and upper box (102),
In upper box (102), upper box (102) is connect with lower box (103) for workbench (2) setting.
8. a kind of laser scribing means according to claim 1, it is characterised in that: cabinet (1) is equipped with smoke exhaust mechanism (21),
Smoke exhaust mechanism (21) includes installation shell (2101), smoke exhaust pipe (2104), connecting tube (2107) and telescoping tube (2108), mounting shell
Body (2101) both ends are equipped with the first mounting plate (21013) and the second mounting plate (21012), and screw (21014) passes through first according to this
Mounting plate (21013), cabinet (1), the second mounting plate (21012) are threadedly coupled with nut (21011) afterwards, are installed shell (2101)
Inner wall is equipped with the first support column (2102) and the second support column (21010), and the first support column (2102) and smoke exhaust pipe (2104) are even
Connect, the second support column (21010) is connect with telescoping tube (2108), connecting tube (2107) both ends respectively with smoke exhaust pipe (2104), stretch
The draw (2108) communicates, and telescoping tube (2108) inner wall is equipped with particulate matter sensors (2109), and smoke exhaust pipe (2104) inner wall is equipped with
Exhaust fan (2105) and motor (2106), motor (2106) are equipped with filter screen (2103), and motor (2106) drives filter screen
(2103) it rotates.
9. a kind of method for adjusting height applied to scribing machine, it is characterised in that: including one described in claims requirement 5
Kind laser scribing means, further includes data collecting card, industrial personal computer and motion control card, the control software on industrial personal computer is adopted by data
Truck acquires the distance between workpiece surface on the servo-actuated sensor (22) and objective table (7) of servo-actuated sensor (22) detection in real time
Data are compared with setting value, and when the absolute value of range data and setting value is less than or equal to designated value, industrial personal computer is obstructed
Cross motion control card driving motor (1201) operating；When the absolute value of range data and setting value is greater than designated value, industrial personal computer
It is operated by motion control card driving motor (1201), motor (1201) drives threaded rod (1206) rotation, threaded rod (1206)
Drive servo-actuated sensor (22) to move up and down by sliding block (1208), thus make the absolute value of range data and setting value be less than or
Equal to designated value.
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| CN201811149360.2A CN109332913A (en) | 2018-09-29 | 2018-09-29 | A kind of laser scribing means and a kind of method for adjusting height applied to scribing machine |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811149360.2A CN109332913A (en) | 2018-09-29 | 2018-09-29 | A kind of laser scribing means and a kind of method for adjusting height applied to scribing machine |
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| CN109332913A true CN109332913A (en) | 2019-02-15 |
Family
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| CN201811149360.2A Pending CN109332913A (en) | 2018-09-29 | 2018-09-29 | A kind of laser scribing means and a kind of method for adjusting height applied to scribing machine |
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| CN (1) | CN109332913A (en) |
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| CN110091441A (en) * | 2019-04-29 | 2019-08-06 | 上海理工大学 | Lift semiconductor crystal wafer cleavage device |
| CN114326597A (en) * | 2021-12-30 | 2022-04-12 | 沈阳和研科技有限公司 | Automatic tool capable of realizing movement of each shaft of dicing saw and using method thereof |
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