CN109306464A - A kind of graded ceramics wear-resistant alloy layer of Ti/CrN composite construction and preparation method thereof - Google Patents
A kind of graded ceramics wear-resistant alloy layer of Ti/CrN composite construction and preparation method thereof Download PDFInfo
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/48—Ion implantation
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/24—After-treatment of workpieces or articles
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F5/00—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product
- B22F5/08—Manufacture of workpieces or articles from metallic powder characterised by the special shape of the product of toothed articles, e.g. gear wheels; of cam discs
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/32—Vacuum evaporation by explosion; by evaporation and subsequent ionisation of the vapours, e.g. ion-plating
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F3/00—Manufacture of workpieces or articles from metallic powder characterised by the manner of compacting or sintering; Apparatus specially adapted therefor ; Presses and furnaces
- B22F3/24—After-treatment of workpieces or articles
- B22F2003/241—Chemical after-treatment on the surface
- B22F2003/242—Coating
Abstract
The invention discloses graded ceramics wear-resistant alloy layer of a kind of Ti/CrN composite construction and preparation method thereof, which successively includes Ti-Cr sedimentary, Ti/CrN graded ceramics layer and N strengthening layer from top to bottom.Preparation method are as follows: (1) inject N strengthening layer in powder metallurgical gear surface ion；(2) strengthen the double brightness plasma alloying methods of layer surface in N and prepare Ti-Cr alloy-layer.Nitrogen-atoms easily interacts with alloying element, and wear-resisting property can be improved in the nitride of formation.During plasma alloying, the N of Ti, Cr ion sputtered and ion implanting reacts, and forms the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction.Compared to the method that other improve powder metallurgical gear wear-resisting property, the present invention realizes two kinds of technical advantages and maximizes, greatly improves the wear-resisting property of powder metallurgical gear, extend the service life of gear.
Description
Technical field
The invention belongs to material science and technology field, in particular to a kind of powder metallurgy toothed wheel surface Ti/CrN composite construction
Graded ceramics wear-resistant alloy layer and its preparation process.
Background technique
For gear, powder metallurgy can reduce cast component segregation and heat-treatment processing process time length, energy consumption
Big problem makes gear have superior overall performance and economic performance, can effectively lower the manufacturing cost of gear.But tooth
Wheel stress condition in transmission is more complicated, and forms of motion is also varied, therefore the form of gear destruction also has multiplicity
Change.All in all, gear destruction mainly has broken teeth, destructive glued and destructive pitting these three forms.In order to extend gear
Service life makes gear be able to bear the damage of diversified forms, this just needs to improve the wear-resisting property of powder metallurgy toothed wheel surface.
According to current research, there are mainly two types of the modes for improving powder metallurgical gear wear-resisting property, first is that Integral alloy.
Conventional machining process generallys use this mode, but Integral alloy chemical industry skill is at high cost, pollutes larger；Second is that passing through advanced table
Face modification technology forms modified layer on driven gears surface, improves the wear-resisting property of gear.Abrasion is usually to open from material surface
Begin, therefore is a kind of more common method by the modified wear-resisting property to improve gear in surface.These process for modifying surface
It mainly include carburizing, nitriding, carbo-nitriding, thermal spraying, ion implanting, vacuum ion plating etc..It is prepared using hot-spraying technique
Coating and gear are in mechanical bond, and bond strength is low, is easy to appear hole, micro-crack, disbonding etc. in use and asks
Topic, reduces the bond strength of coating and gear；Ion implantation technology can will improve the ion of the element of wear-resisting property in vacuum
It is injected in gear in system, to form the implanted layer that wear-resisting property is improved.But ion implanted layer thickness is not high, and can only
Straight line injection is carried out, the wear-resisting property of gear cannot be improved comprehensively；The surface alloying layer of double brightness plasma alloying technology preparations
Including alloy-layer and diffusion layer, ingredient, performance are distributed with concentration gradient, are firmly combined with matrix, and alloy-layer dense structure, nothing
The defects of gap, crackle, work efficiency is high.
Double-deck glow plasma surface metallurgical technology (hereinafter referred to as " two-lime piles "), is Chinese scholar in ionic nitriding
On the basis of independent invention the new Alloying on Metal Planes technology of one kind.Working principle is in a vacuum tank, and furnace body is made
For plus earth, two cathodes are respectively set, a placement workpiece is placed for one and provides the source electrode of alloying element, is passed through certain
The argon gas of air pressure.Two sets of independent power supplys are set in furnace, and anode and source electrode and anode and workpiece interpolar are distinguished after on-load voltage
Aura is generated, i.e., " double-deck glow ".Argon ion bombardment target, it is extremely first to sputter target caused by glow discharge on source electrode
Element；And the sputtering of workpiece pole can then heat workpiece.Source voltage is set to be lower than workpiece current potential, while making source power density
Higher than workpiece power density.In this way, source electrode sputtering amount will be much larger than the reverse sputtering amount of cathode.At high temperature, the alloy in target
Element is deposited and is diffused in workpiece surface formation alloy-layer.Alloy-layer is by alloying element to spreading simultaneously inside basis material
It is formed with matrix element interaction.
" the heat processing technique " " shadow of density to Multlelement Co-Penetrated Layer of Iron Base P/M published in 1997
Sound " one is disclosed herein a kind of wear-resisting to improve powdered metallurgical material for the multi element copermeation technology of main penetration enhancer with methanol and urea
The method of performance；" optical-mechanical " the 3rd published for 1988 is interim, and " laser treatment improves grinding for powdered metallurgical material wear-resisting property
Study carefully " one be disclosed herein using laser treatment improve powdered metallurgical material wearability method；" the Jiangsu science and technology published for 2009
College journal: natural science edition " interim " the gear surface Current Status of Modification " one of volume 23 the 2nd be disclosed herein using true
The method of coating Ni-W and Ni-CO alloy coat can compared with non-coating on the HT250 cast iron gear flank of tooth for empty ion plating
To improve the abrasion resistance properties of cast iron gear up to 4~6 times." vacuum science and the Technology " published volume 30 the 3rd in 2010
Use is disclosed herein in interim " ion implanting space gear driving pair 30CrMnSi material vacuum tribological Properties " one
Ion implanting injects Ti, C, N element on gear, the method for improving gear wear-resisting property.But the shortcomings that ion implantation technique, is
It is insufficient to inject layer depth, thickness is small, and which also limits its applications on gear surface reinforcement technique." the Shen published in 2013
Positive engineering college's journal: natural science edition " interim " the power station coal pulverizer gear wear Research on application of protection technique " one of volume 9 the 1st
The method for improving gear surface wear-resisting property using plasma spray technology is disclosed herein.But the coating of technique preparation is in gear
The problems such as mechanical bond, bond strength is low, is easy to appear hole, micro-crack, disbonding in use, reduces coating
With the bond strength of gear." rare metal and hard alloy " interim " double brightness plasma Cr- of volume 39 the 3rd published in 2011
Si permeation improvement γ-TiAl-base alloy wear-resisting property research " one is disclosed herein using double brightness plasma alloying technology systems
The method that standby Cr-Si infiltration layer improves matrix wear-resisting property.
Since powder metallurgical gear wear-resisting property is difficult to meet requirement, it is wear-resisting to improve its to need process for modifying surface
Performance.But presently disclosed research is using a kind of wear-resisting property of surface modifying method raising matrix, and existing modification mostly
There are respective problems for technology, such as: single ion implantation, implanted layer is thin, and wearability promotion is limited, thus leads to implanted layer
Service life under operating condition is shorter；Simple double brightness plasma alloying technology temperature are higher, gear shifting quadrant texturing are likely to result in, to it
Institutional framework has an impact, and declines the overall performance of gear.
In order to meet the requirement of gear high-wear resistance, need to be used in combination using two or more modification modes.But it is single
There are limitation, advantage is difficult to realize maximize one technology.Injection depth such as ion implanting is insufficient, and implanted layer is thin, to tooth
The wearability promotion of wheel is limited, causes implanted layer service life under working condition shorter；Double brightness plasma alloying technologies can be
Gear surface prepares certain thickness alloy-layer, though the metallurgical bonding with matrix may be implemented, simple double brightness plasmas
Alloying process temperature is higher, is likely to result in gear shifting quadrant texturing, has an impact, makes under the overall performance of gear to its institutional framework
Drop.
Summary of the invention
In view of the above problems, the object of the present invention is to provide a kind of graded ceramics wear-resistant alloy layers of Ti/CrN composite construction
And preparation method thereof, which can greatly improve the wear-resisting property of powder metallurgy toothed wheel surface, prolong its service life.
To achieve the above object, the technical solution adopted by the present invention are as follows:
A kind of preparation method of the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction comprising the steps of:
(1) N strengthening layer is injected in powder metallurgical gear surface ion；
(2) strengthen the double brightness plasma alloying methods of layer surface in N and prepare Ti-Cr alloy-layer.
The step (1) comprises the steps of:
(1.1) powder metallurgical gear is ultrasonically treated, gear is immersed in alcohol or acetone, carry out 1~2 ultrasound
Then cleaning, 20~30min per treatment are dried；
(1.2) powder metallurgical gear is put into ion implantation device chamber, is passed through argon gas, to through alcohol or acetone cleaning
Powder metallurgical gear afterwards carries out 20~30min of pre-sputter cleaning；
(1.3) in vacuum degree less than 10-3The processing of N ion implanting is carried out under the conditions of Pa, injection length is 0.5~1.5 hour；
(1.4) gear is taken out after furnace is cold, and is saved at room temperature.
In the step (1.2), pre-sputtering parameter is as follows: voltage is 500~700V, beam current density is 0.2~0.4 μ A/
cm2, argon plasma volume density be 1 × 109~3 × 109cm-3。
In the step (1.3), the technological parameter of N ion implanting processing is as follows: nitrogen gas purity 99.99%, Nitrogen ion
Injecting voltage is 30~50kV, and beam current density is 2~2.5 μ A/cm2, nitrogen plasma density is 1 × 109~3 × 109cm-3, note
Entering dosage is 3 × 1017~6 × 1017ions/cm2。
The step (2) comprises the steps of:
(2.1) after the Ti-Cr target sand paper prepared by powder metallurgic method being polished step by step, immerse in alcohol or acetone into
Row 20~30min of ultrasonic cleaning, air-dries and is placed in double brightness device furnaces；
(2.2) interpolar is adjusted away from that is, furnace is closed to 18~20mm at a distance from gear upper surface in Ti-Cr target lower surface
Cover, vent valve, breather valve；
(2.3) mechanical pump is opened, evacuating valve is then opened, is evacuated to 10-3Pa is hereinafter, close extraction valve；
(2.4) argon bottle is opened, argon gas valve is opened, flowmeter is then opened and is passed through argon gas, carry out gas washing processing, work as dress
When setting air pressure and reaching 145~160Pa, opens vacuum valve and close argon flow valve, air pressure is made to be down to 35~40Pa, repeat
The above scrubbing procedure 3~5 times；
(2.5) air pressure is adjusted to 30~40Pa of operating air pressure；
(2.6) 40~50 DEG C of recirculated waters are opened；
(2.7) workpiece pole power supply is opened, using hollow cathode effect build-up of luminance, after aura is stablized, gradually by source voltage tune
For 500~600V, workpiece pole tension is adjusted to 300~450V, carries out 0.5h or more to gear and bombards；
(2.8) workpiece pole tension and source voltage are gradually adjusted, until source voltage is 900~940V, workpiece pole tension
For 520~550V.
(2.9) 2.5~3.5 hours are kept the temperature；
(2.10) it gradually slowly reduces source electrode and workpiece pole tension is 0, to avoid stress from concentrating, the time is in 0.5h or more；
(2.11) argon gas valve, vacuum valve, mechanical pump, power switch, circulation taps are closed；
(2.12) 2 hours cooling or more rear taking-up gear.
The mass fraction of Ti is 60~70wt% in the Ti-Cr target, and the mass fraction of Cr is 30~40wt%.
A kind of graded ceramics wear-resistant alloy layer of the Ti/CrN composite construction using above method preparation, from top to bottom successively
Including Ti-Cr sedimentary, Ti/CrN graded ceramics layer and N strengthening layer.
The Ti-Cr sedimentary with a thickness of 15~20 μm, Ti/CrN graded ceramics layer, N strengthening layer overall thickness be 3~
6μm。
From outward appearance to inner essence gradient declines Ti, Cr content of the Ti/CrN gradient layer, and from outward appearance to inner essence gradient rises N content.
The utility model has the advantages that the present invention injects ions into conjunction with double brightness plasma alloying technologies, have for preparing one kind
The ceramic wear-resisting alloy-layer of Ti/CrN composite construction.First in gear surface ion implanting N, double brightness plasma alloys are secondly utilized
Change technology prepares graded ceramics wear-resistant alloy layer.The method can greatly improve the wear-resisting property of powder metallurgy toothed wheel surface, extend
Its service life.It has the advantage that
1. after ion implanting N, forming implanted layer in gear surface, having refined surface microstructure, wear-resisting property is centainly mentioned
It rises.
2.Ti-Cr layers are ion bombardment sputtering depositing layer, and the layer tissue is fine and close, no hole and crackle.The N of ion implanting with
It reacts after Ti, Cr diffusion of sputtering, forms Ti/CrN ceramic layer, ingredient, performance are distributed with concentration gradient, are with gear
Metallurgical bonding, bond strength is high, not easily to fall off.
3. the effect in each region of graded ceramics wear-resistant alloy layer of the Ti/CrN composite construction is respectively as follows: (1) Ti-Cr deposition
Layer has played the lubricating action of flexible film in friction, reduces coefficient of friction, improves wear-resisting property；(2) Ti/CrN makes pottery
Enamel coating hardness is higher, further improves the wear-resisting property of composite construction alloy-layer；(3) ion implanting N strengthening layer makes ceramics
It realizes between layer and matrix and is connected without interfaces transition, meanwhile, hardness is higher than matrix, is also conducive to the wear-resisting property for promoting matrix.
To sum up, it the wear-resisting property of the gradient wear-resistant alloy layer significant increase of Ti/CrN composite construction powder metallurgical gear and is on active service the longevity
Life.
4. due to improve wear-resisting property monotechnics there are respective problems: single ion implantation, implanted layer is thin,
Wearability promotion is limited, thus causes service life of the implanted layer under operating condition shorter；Simple double brightness plasma alloying technology temperature
Degree is higher, is likely to result in gear shifting quadrant texturing, has an impact to its institutional framework, declines the overall performance of gear.The present invention will
It is resistance to be used to prepare a kind of graded ceramics with Ti/CrN composite construction in conjunction with double brightness plasma alloying technologies for ion implanting
Merge layer gold.The invention overcomes problem above existing for monotechnics, realizes two kinds of technical advantages and maximizes, is greatly improved
The wear-resisting property of powder metallurgical gear substantially extends the service life of gear.
Detailed description of the invention
Fig. 1 is the gradient wear-resistant alloy layer schematic diagram of Ti/CrN composite construction.
Fig. 2 is the SEM figure for the composite construction gradient wear-resistant alloy layer that embodiment 1 is prepared.
Specific embodiment
Below with reference to embodiment, invention is further described in detail.But to those skilled in the art, completely
Reasonable generalization and derivation can be carried out on the basis of numerical value listed by specific embodiment.
The purity of argon gas used below is that the purity of 99.99%, Ti is that the purity of 99.99%, Cr is
99.99%.Ion implantation device used in following embodiment is the LZX-700 high energy gold of Beijing Tai Kenuo Co., Ltd production
Belong to ion implantation device (MEVVA ion source), double brightness plasma alloying experiments entrust Chinese Academy of Sciences Shenyang section using voluntarily developing
Learn double brightness plasma surface metallurgic equipment of instrument development centered finite company manufacture.
Embodiment 1
(1) ion implanting N:
(1.1) powder metallurgical gear is ultrasonically treated, gear is immersed in alcohol, be cleaned by ultrasonic twice, often
Secondary processing 30min, removes the impurity on surface, is then dried；
(1.2) gear is put into ion implantation device chamber, is passed through argon gas, to powder metallurgy toothed after alcohol washes
Wheel carries out pre-sputter cleaning 30min, and setting parameter is as follows: voltage 500V, beam current density are 0.2 μ A/cm2, argon plasma
Density is 1 × 109cm-3；
(1.3) start the processing of N ion implanting, setting technological parameter is as follows: vacuum degree is lower than 10-3Pa, nitrogen gas purity are
99.99%, N~+ implantation voltage is 35kV, and beam current density is 2 μ A/cm2, nitrogen plasma density is 1 × 109cm-3, injection
Dosage is 3 × 1017ions/cm2, injection length is 1 hour；
(1.4) gear is taken out after furnace is cold, and is saved at room temperature.
(2) Ti-Cr alloy-layer is prepared using double brightness plasma alloying technologies:
(2.1) it after the Ti-Cr target sand paper prepared by powder metallurgy being polished step by step, immerses in alcohol and carries out ultrasonic wave
30min is cleaned, guarantees that surface is pure, air-dries and is placed in double brightness device furnaces；
(2.2) interpolar is adjusted away from that is, Ti-Cr target lower surface is closed bonnet, put to 18mm at a distance from gear upper surface
Air valve, breather valve；
(2.3) mechanical pump is opened, evacuating valve is then opened, is evacuated to 10-3Pa hereinafter, guarantee furnace in vacuum degree, close
Close extraction valve；
(2.4) argon bottle is opened, argon gas valve is opened, flowmeter is then opened and is passed through argon gas, carry out gas washing processing.Work as dress
When setting air pressure and reaching 150Pa, opens vacuum valve and close argon flow valve, air pressure is made to be down to 40Pa, repeat the above gas washing
Step is three times；
(2.5) air pressure is adjusted to operating air pressure 40Pa；
(2.6) 45 DEG C of recirculated waters are opened；
(2.7) workpiece pole power supply is opened, using hollow cathode effect build-up of luminance, after aura is stablized, gradually by source voltage tune
For 500V, workpiece pole tension is adjusted to 300V, and the bombardment of 0.5h is carried out to gear, ion implanting backgear is prevented to be contaminated or send out
Raw oxidation；
(2.8) workpiece pole tension and source voltage are gradually adjusted, until source voltage is 900V, workpiece pole tension is
520V；(2.9) 2.5 hours are kept the temperature；
(2.10) it after terminating heat preservation, gradually slowly reduces source electrode and workpiece pole tension is 0, to avoid stress from concentrating, time
In 0.5h or more；
(2.11) argon gas valve, vacuum valve, mechanical pump, power switch, circulation taps are closed；
(2.12) cooling took out gear after 2 hours.
The mass fraction of Ti is 60wt% in Ti-Cr target, and the mass fraction of Cr is 40wt%.Obtained powder metallurgy
Gear surface composite construction wear-resistant alloy layer is respectively Ti-Cr sedimentary from top to bottom, and Ti/CrN graded ceramics layer and N strengthen
Layer.Wherein from outward appearance to inner essence gradient declines Ti, Cr content in Ti/CrN graded ceramics layer, and from outward appearance to inner essence gradient rises N content.By line
Scanning can obtain, and the thickness of Ti-Cr sedimentary is about 15 μm, and the overall thickness of Ti/CrN graded ceramics layer and N strengthening layer is 4 μm.
It can be obtained by friction-wear test, the treated more untreated gear of powder metallurgical gear specific wear rate reduces
68.4%.Fig. 2 is the SEM figure of composite construction gradient wear-resistant alloy layer obtained by embodiment 1, wherein I region is Ti-Cr deposition
Layer, Ti-Cr layers are ion bombardment sputtering depositing layer, dense structure, no hole and crackle；IIth area is that graded ceramics floor and N strengthen
Layer, ingredient distribution gradient, and pass through the combination of metallurgical bonding realization and gear, bond strength is high, not easily to fall off.
Embodiment 2
(1) ion implanting N:
(1.1) powder metallurgical gear is ultrasonically treated, gear is immersed in alcohol, be cleaned by ultrasonic twice, often
Secondary processing 20min, removes the impurity on surface, is then dried；
(1.2) gear is put into ion implantation device chamber, is passed through argon gas, to powder metallurgy toothed after alcohol washes
Wheel carries out pre-sputter cleaning 20min, and setting parameter is as follows: voltage 600V, beam current density are 0.3 μ A/cm2, argon plasma
Density is 2 × 109cm-3；
(1.3) start the processing of N ion implanting, setting technological parameter is as follows: vacuum degree is lower than 10-3Pa, nitrogen gas purity are
99.99%, N~+ implantation voltage is 45kV, and beam current density is 2.2 μ A/cm2, nitrogen plasma density is 2 × 109cm-3, note
Entering dosage is 5 × 1017ions/cm2, injection length is 1.5 hours.
(1.4) gear is taken out after furnace is cold, and is saved at room temperature.
(2) Ti-Cr alloy-layer is prepared using double brightness plasma alloying technologies:
(2.1) it after the Ti-Cr target sand paper prepared by powder metallurgy being polished step by step, immerses in alcohol and carries out ultrasonic wave
30min is cleaned, guarantees that surface is pure, air-dries and is placed in double brightness device furnaces；
(2.2) interpolar is adjusted away from that is, Ti-Cr target lower surface is closed bonnet, put to 19mm at a distance from gear upper surface
Air valve, breather valve；
(2.3) mechanical pump is opened, evacuating valve is then opened, is evacuated to 10-3Pa hereinafter, guarantee furnace in vacuum degree, close
Close extraction valve；
(2.4) argon bottle is opened, argon gas valve is opened, flowmeter is then opened and is passed through argon gas, carry out gas washing processing, work as dress
When setting air pressure and reaching 150Pa, opens vacuum valve and close argon flow valve, air pressure is made to be down to 40Pa, repeat the above gas washing
Step is three times；
(2.5) air pressure is adjusted to operating air pressure 40Pa；
(2.6) 45 DEG C of recirculated waters are opened；
(2.7) workpiece pole power supply is opened, using hollow cathode effect build-up of luminance, after aura is stablized, gradually by source voltage tune
For 550V, workpiece pole tension is adjusted to 400V, and the low temperature for carrying out 0.5h to gear bombards, and ion implanting backgear is prevented to be contaminated
Or it aoxidizes；
(2.8) workpiece pole tension and source voltage are gradually adjusted, until source voltage is 920V, workpiece pole tension is
540V；
(2.9) 3 hours are kept the temperature；
(2.10) it after terminating heat preservation, gradually slowly reduces source electrode and workpiece pole tension is 0, to avoid stress from concentrating, time
In 0.5h or more；
(2.11) argon gas valve, vacuum valve, mechanical pump, power switch, circulation taps are closed；
(2.12) cooling took out gear after 4 hours.
The mass fraction of Ti is 60wt% in Ti-Cr target, and the mass fraction of Cr is 40wt%.Obtained powder metallurgy
Gear surface composite construction wear-resistant alloy layer is respectively Ti-Cr sedimentary from top to bottom, and Ti/CrN graded ceramics layer and N strengthen
Layer.Wherein from outward appearance to inner essence gradient declines Ti, Cr content in Ti/CrN graded ceramics layer, and from outward appearance to inner essence gradient rises N content.By line
Scanning can obtain, and the thickness of Ti-Cr sedimentary is about 17 μm, and the overall thickness of Ti/CrN graded ceramics layer and N strengthening layer is 5 μm.
It can be obtained by friction-wear test, the treated more untreated gear of powder metallurgical gear specific wear rate reduces
72.4%.
Embodiment 3
(1) ion implanting N:
(1.1) powder metallurgical gear is ultrasonically treated, in acetone by gear leaching, carries out 1 ultrasonic cleaning, processing
25min removes the impurity on surface, is then dried；
(1.2) gear is put into ion implantation device chamber, is passed through argon gas, to powder metallurgy toothed after acetone cleans
Wheel carries out pre-sputter cleaning 25min, and setting parameter is as follows: voltage 700V, beam current density are 0.4 μ A/cm2, argon plasma
Density is 3 × 109cm-3；
(1.3) start the processing of N ion implanting, setting technological parameter is as follows: vacuum degree is lower than 10-3Pa, nitrogen gas purity are
99.99%, N~+ implantation voltage is 50kV, and beam current density is 2.5 μ A/cm2, nitrogen plasma density is 3 × 109cm-3, note
Entering dosage is 6 × 1017ions/cm2, injection length is 1.5 hours；
(1.4) gear is taken out after furnace is cold, and is saved at room temperature.
(2) Ti-Cr alloy-layer is prepared using double brightness plasma alloying technologies:
(2.1) it after the Ti-Cr target sand paper prepared by powder metallurgy being polished step by step, immerses in alcohol and carries out ultrasonic wave
25min is cleaned, guarantees that surface is pure, air-dries and is placed in double brightness device furnaces；
(2.2) interpolar is adjusted away from that is, Ti-Cr target lower surface is closed bonnet, put to 20mm at a distance from gear upper surface
Air valve, breather valve；
(2.3) mechanical pump is opened, evacuating valve is then opened, is evacuated to 10-3Pa hereinafter, guarantee furnace in vacuum degree, close
Close extraction valve；
(2.4) argon bottle is opened, argon gas valve is opened, flowmeter is then opened and is passed through argon gas, carry out gas washing processing, work as dress
When setting air pressure and reaching 150Pa, opens vacuum valve and close argon flow valve, air pressure is made to be down to 35Pa, repeat the above gas washing
Step 5 time；
(2.5) air pressure is adjusted to operating air pressure 35Pa；
(2.6) 40 DEG C of recirculated waters are opened；
(2.7) workpiece pole power supply is opened, using hollow cathode effect build-up of luminance, after aura is stablized, gradually by source voltage tune
For 600V, workpiece pole tension is adjusted to 450V, to gear carry out 1h low temperature bombard, prevent ion implanting backgear be contaminated or
It aoxidizes；
(2.8) workpiece pole tension and source voltage are gradually adjusted, until source voltage is 940V, workpiece pole tension is
550V；
(2.9) 3.5 hours are kept the temperature；
(2.10) it after terminating heat preservation, gradually slowly reduces source electrode and workpiece pole tension is 0, to avoid stress from concentrating, time
In 0.5h or more；
(2.11) argon gas valve, vacuum valve, mechanical pump, power switch, circulation taps are closed；
(2.12) cooling took out gear after 5 hours.
The mass fraction of Ti is 70wt% in Ti-Cr target, and the mass fraction of Cr is 30wt%.Obtained powder metallurgy
Gear surface composite construction wear-resistant alloy layer is respectively Ti-Cr sedimentary from top to bottom, and Ti/CrN graded ceramics layer and N strengthen
Layer.Wherein from outward appearance to inner essence gradient declines Ti, Cr content in Ti/CrN graded ceramics layer, and from outward appearance to inner essence gradient rises N content.By line
Scanning can obtain, and the thickness of Ti-Cr sedimentary is about 19 μm, and the overall thickness of Ti/CrN graded ceramics layer and N strengthening layer is 6 μm.
It can be obtained by friction-wear test, the treated more untreated gear of powder metallurgical gear specific wear rate reduces
73.2%.
The above is only a preferred embodiment of the present invention, it is noted that for the ordinary skill people of the art
For member, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications are also answered
It is considered as protection scope of the present invention.
Claims (9)
1. a kind of preparation method of the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction, it is characterised in that: include following step
It is rapid:
(1) N strengthening layer is injected in powder metallurgical gear surface ion；
(2) strengthen the double brightness plasma alloying methods of layer surface in N and prepare Ti-Cr alloy-layer.
2. the preparation method of the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction according to claim 1, feature
Be: the step (1) comprises the steps of:
(1.1) powder metallurgical gear is ultrasonically treated, gear is immersed in alcohol or acetone, it is clear to carry out 1~2 ultrasound
It washes, then 20~30min per treatment is dried；
(1.2) powder metallurgical gear is put into ion implantation device chamber, is passed through argon gas, to after alcohol or acetone cleaning
Powder metallurgical gear carries out 20~30min of pre-sputter cleaning；
(1.3) in vacuum degree less than 10-3The processing of N ion implanting is carried out under the conditions of Pa, injection length is 0.5~1.5 hour；
(1.4) gear is taken out after furnace is cold, and is saved at room temperature.
3. the preparation method of the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction according to claim 2, feature
Be: in the step (1.2), pre-sputtering parameter is as follows: voltage is 500~700V, beam current density is 0.2~0.4 μ A/cm2、
Argon plasma volume density is 1 × 109~3 × 109cm-3。
4. the preparation method of the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction according to claim 2, feature
Be: in the step (1.3), the technological parameter of N ion implanting processing is as follows: nitrogen gas purity 99.99%, N~+ implantation
Voltage is 30~50kV, and beam current density is 2~2.5 μ A/cm2, nitrogen plasma density is 1 × 109~3 × 109cm-3, injectant
Amount is 3 × 1017~6 × 1017ions/cm2。
5. the preparation method of the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction according to claim 1, feature
Be: the step (2) comprises the steps of:
(2.1) it after the Ti-Cr target sand paper prepared by powder metallurgic method being polished step by step, immerses in alcohol or acetone and is surpassed
Sound cleans 20~30min, air-dries and is placed in double brightness device furnaces；
(2.2) interpolar is adjusted away from that is, Ti-Cr target lower surface is closed bonnet, put to 18~20mm at a distance from gear upper surface
Air valve, breather valve；
(2.3) mechanical pump is opened, evacuating valve is then opened, is evacuated to 10-3Pa is hereinafter, close extraction valve；
(2.4) argon bottle is opened, argon gas valve is opened, flowmeter is then opened and is passed through argon gas, gas washing processing is carried out, when device gas
Pressure opens vacuum valve and closes argon flow valve, air pressure is made to be down to 35~40Pa when reaching 145~160Pa, repeat more than
Scrubbing procedure 3~5 times；
(2.5) air pressure is adjusted to 30~40Pa of operating air pressure；
(2.6) 40~50 DEG C of recirculated waters are opened；
(2.7) workpiece pole power supply is opened, source voltage is gradually adjusted to 500 after aura is stablized using hollow cathode effect build-up of luminance
~600V, workpiece pole tension are adjusted to 300~450V, carry out 0.5h or more to gear and bombard；
(2.8) workpiece pole tension and source voltage are gradually adjusted, until source voltage is 900~940V, workpiece pole tension is 520
~550V.
(2.9) 2.5~3.5 hours are kept the temperature；
(2.10) it gradually slowly reduces source electrode and workpiece pole tension is 0, to avoid stress from concentrating, the time is in 0.5h or more；
(2.11) argon gas valve, vacuum valve, mechanical pump, power switch, circulation taps are closed；
(2.12) 2 hours cooling or more rear taking-up gear.
6. the preparation method of the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction according to claim 5, feature
Be: the mass fraction of Ti is 60~70wt% in the Ti-Cr target, and the mass fraction of Cr is 30~40wt%.
7. a kind of resistance to adjustment of graded ceramics of the Ti/CrN composite construction using any method preparation of claim 1~6
Layer gold, it is characterised in that: from top to bottom successively include Ti-Cr sedimentary, Ti/CrN graded ceramics layer and N strengthening layer.
8. the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction according to claim 7, it is characterised in that: described
Ti-Cr sedimentary with a thickness of 15~20 μm, Ti/CrN graded ceramics layer, N strengthening layer overall thickness be 3~6 μm.
9. the graded ceramics wear-resistant alloy layer of Ti/CrN composite construction according to claim 7, it is characterised in that: described
From outward appearance to inner essence gradient declines Ti, Cr content of Ti/CrN gradient layer, and from outward appearance to inner essence gradient rises N content.
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