CN109298405B - Scanning device - Google Patents

Scanning device Download PDF

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Publication number
CN109298405B
CN109298405B CN201811366207.5A CN201811366207A CN109298405B CN 109298405 B CN109298405 B CN 109298405B CN 201811366207 A CN201811366207 A CN 201811366207A CN 109298405 B CN109298405 B CN 109298405B
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Prior art keywords
scanning
module
light source
scanning device
receiving assembly
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CN201811366207.5A
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CN109298405A (en
Inventor
申士林
向少卿
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Hesai Technology Co Ltd
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Hesai Technology Co Ltd
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Priority to CN201811366207.5A priority Critical patent/CN109298405B/en
Publication of CN109298405A publication Critical patent/CN109298405A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/26Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Measurement Of Optical Distance (AREA)
  • Optical Radar Systems And Details Thereof (AREA)

Abstract

The invention provides a scanning device which comprises a scanning module and an angle measuring module, wherein the scanning module and the angle measuring module are separated by a first preset distance, the scanning module comprises a scanning substrate, the scanning substrate comprises a movable part, the movable part is provided with a first surface used for reflecting an angle measuring light beam, the angle measuring module comprises a light source and a receiving assembly, the light source and the receiving assembly are separated by a second preset distance, the light source is used for emitting the angle measuring light beam towards the first surface, the receiving side of the receiving assembly faces the first surface, and the first surface reflects the angle measuring light beam emitted by the light source to the receiving assembly. The invention measures the rotation angle of the movable part of the scanning module through the angle measuring module, and particularly obtains the space coordinate of the movable part by measuring displacement through the psd position sensor, thereby improving the position resolution and the measuring response speed.

Description

Scanning device
Technical Field
The invention relates to the technical field of laser detection, in particular to a scanning device.
Background
In the automatic driving technology, an environment sensing system is a basic and crucial ring and is a guarantee for the safety and intelligence of an automatic driving automobile, and a laser radar in an environment sensing sensor has incomparable advantages in the aspects of reliability, detection range, distance measurement precision and the like. The laser radar analyzes the turn-back time of the laser after encountering the target object by transmitting and receiving the laser beam, and calculates the relative distance between the target object and the vehicle.
Mechanical rotation formula laser radar drives the speculum by the motor or drives whole light machine structure rotation, can obtain great field of view scope, and 360 no blind areas of horizontal direction measurement can directly be realized to especially whole rotatory laser radar. However, the reliability of the mechanical rotary lidar needs to be further enhanced due to the relatively complicated system structure and the presence of moving parts. With the continuous advance of the automatic driving technology, the scanning mirror type laser radar is regarded as an important technical route in the solid-state laser radar scheme, and the light of the laser is reflected by the rotatable vibrating mirror, so that the scanning is realized. The scanning mirror type laser radar needs relatively fewer laser transmitters and receivers, the system structure is relatively simple, and in the working process, only the vibrating mirror swings in a certain range, so that the laser radar does not need to rotate greatly, and the reliability of the system is improved.
In operation, the scanning mirror lidar needs to measure the rotation or swing angle of the galvanometer to determine the spatial angular position of each beam of measuring laser when encountering an obstacle, and the spatial angular positions are combined with the obstacle distance calculated based on the time difference to determine the position and shape of the obstacle. In the prior art, an angle measuring coil is usually adopted to measure the rotation or swing angle of a vibrating mirror, the angle measuring coil measurement is an indirect measurement mode, the speed of the vibrating mirror is firstly measured, then the space coordinate of the vibrating mirror can be obtained through analytic calculation, and the system operation amount can be increased in practical use.
Disclosure of Invention
In order to solve at least one of the above technical problems, a first aspect of the present invention discloses a scanning apparatus, comprising a scanning module and an angle measuring module, wherein the scanning module and the angle measuring module are separated by a first preset distance,
the scanning module includes a scanning substrate including a movable portion having a first surface for reflecting an angle measuring beam,
the angle measuring module comprises a light source and a receiving assembly, the light source and the receiving assembly are spaced by a second preset distance, the light source is used for facing the first surface to emit an angle measuring light beam, the receiving side of the receiving assembly faces the first surface, and the first surface reflects the angle measuring light beam emitted by the light source to the receiving assembly.
Further, the movable part is also provided with a second surface for reflecting the scanning light beam, and the second surface is positioned on one side of the movable part far away from the angle measuring module.
As an implementation mode, the angle measurement module further comprises a light source fixing frame, the light source is a laser, the laser is fixed on the light source fixing frame, and a first preset included angle is formed between the emergent surface of the laser and the plane where the scanning substrate is located;
the angle measuring module further comprises a receiving fixing frame, the receiving fixing frame is provided with a first mounting surface, the receiving assembly is mounted on the first mounting surface, and the first mounting surface and the plane where the scanning substrate is located form a second preset included angle.
In one embodiment, the goniometric module further includes a bracket having a first mounting portion and a second mounting portion,
the light source is a laser, the laser is fixed on the first mounting part, and the emergent surface of the laser and the plane where the scanning substrate is located form a first preset included angle;
the second installation part is provided with a first installation surface, the receiving assembly is installed on the first installation surface, and the first installation surface and the plane where the scanning substrate is located form a second preset included angle.
Further, the receiving assembly comprises an optical filter and a position sensor, and the position sensor and the optical filter are sequentially arranged along a direction far away from the first mounting surface.
Furthermore, the receiving assembly further comprises an adapter plate, the adapter plate is connected with the first mounting surface, and the position sensor and the optical filter are sequentially arranged on the adapter plate along the direction far away from the first mounting surface.
Preferably, the receiving assembly further comprises a matting barrel located on a side of the position sensor facing the scanning substrate.
Furthermore, the extinction cylinder is of a tapered structure, and the cross sectional area of one end, close to the scanning substrate, of the extinction cylinder is smaller than that of one end, far away from the scanning substrate, of the extinction cylinder.
Furthermore, the scanning device further comprises a shell, the shell is of a box-shaped structure with an opening at one end, the shell is provided with an accommodating space, the scanning module is arranged in the accommodating space, and the angle measuring module is partially or completely positioned in the accommodating space.
Furthermore, the scanning device further comprises a sealing plate, the sealing plate is mounted at one end of the opening of the shell, and the scanning module is mounted on one side, facing the accommodating cavity, of the sealing plate through a connecting piece.
Further, the scanning substrate further includes a first torsion shaft and a third support portion, the movable portion is connected to the third support portion through the first torsion shaft, and the movable portion is capable of rotating around the first torsion shaft.
In a second aspect of the present invention, a laser radar is disclosed, which comprises the above-mentioned scanning device.
By adopting the technical scheme, the scanning device has the following beneficial effects:
1) the rotation angle of the movable part of the scanning module is measured through the angle measuring module, and the psd position sensor is adopted to obtain the space coordinate of the movable part through measuring displacement, so that the position resolution is high, the response speed is high, and the processing circuit is simple;
2) according to the invention, through the matching of the shell and the sealing plate, the angle measuring module and the scanning module can be packaged into an independent scanning device with high integration level, small volume and compact structure, and can be pre-assembled and adjusted, so that the installation and the use are convenient.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the description of the embodiments will be briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a perspective view of a scanning device in accordance with one embodiment of the present invention;
FIG. 2 is a front view of FIG. 1;
FIG. 3 is a cross-sectional view taken along line A-A of FIG. 2;
FIG. 4 is a schematic layout view of a light source holder, a receiving holder and a movable portion according to an embodiment of the present invention;
FIG. 5 is a perspective view of a scanning device in accordance with another embodiment of the present invention;
FIG. 6 is a front view of FIG. 5;
FIG. 7 is a cross-sectional view taken along line B-B of FIG. 6;
FIG. 8 is a perspective view of the scanning device of FIG. 5 from another perspective;
FIG. 9 is a schematic view of the assembly of the light source, the receiving assembly and the bracket according to one embodiment of the present invention;
FIG. 10 is a schematic view of a scanned substrate in accordance with one embodiment of the present invention.
The following is a supplementary description of the drawings:
1-a scanning module; 10-scanning the substrate; 101-a movable part; 1011-first side; 1012-second side; 102-a first torsion axis; 103-a third support; 104-a mirror; 105-a second torsion axis; 106-outer frame;
2-angle measurement module; 21-a light source; 22-a receiving component; 23-a light source holder; 24-receiving a mount; 241-a first support part; 242 — a second support portion; 25-a scaffold; 251-a first mounting portion; 252-a second mounting portion; 26-an optical filter; 27-an interposer; 28-position sensor; 29-a matting drum;
3-a housing; and 4, closing the plate.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic may be included in at least one implementation of the invention. In the description of the present invention, it is to be understood that the terms "upper", "lower", "top", "bottom", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the referred device or element must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. Moreover, the terms "first," "second," and the like are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the invention described herein are capable of operation in sequences other than those illustrated or described herein.
Referring to fig. 1 to 10, an embodiment of the present invention provides a scanning apparatus, including a scanning module 1 and an angle measurement module 2, where the scanning module 1 and the angle measurement module 2 are separated by a first preset distance, the scanning module 1 includes a scanning substrate 10, the angle measurement module 2 is located on one side of the scanning substrate 10, the scanning substrate 10 includes a movable portion 101, the movable portion 101 has a first surface 1011 for reflecting an angle measurement beam,
the angle measuring module 2 is used for measuring the rotation angle of the movable portion 101, the angle measuring module 2 includes a light source 21 and a receiving component 22, the light source 21 and the receiving component 22 are separated by a second preset distance, the light emitting direction of the light source 21 faces the first surface 1011, the receiving side of the receiving component 22 faces the first surface 1011, and the first surface 1011 is used for reflecting the light beam emitted by the light source 21 to the receiving component 22.
In some embodiments, the movable part 101 further has a second face 1012 for reflecting a scanning beam, the second face 1012 being located on a side of the movable part 101 remote from the goniometric module 2.
In some embodiments, as shown in fig. 3 and 4, the angle measuring module 2 further includes a light source fixing frame 23, the light source 21 is a laser, the laser is fixed on the light source fixing frame 23, and an exit surface of the laser and a plane where the scanning substrate 10 is located form a first preset included angle;
the angle measuring module 2 further comprises a receiving fixing frame 24, the receiving fixing frame 24 is provided with a first mounting surface, the receiving component 22 is mounted on the first mounting surface, and a second preset included angle is formed between the first mounting surface and the plane where the scanning substrate 10 is located. Specifically, the receiving fixing frame 24 includes a first supporting portion 241 and a second supporting portion 242, the first supporting portion 241 is connected to the second supporting portion 242, the second supporting portion 242 is a wedge-shaped structure, and the first mounting surface is an inclined surface of the wedge-shaped structure.
In some embodiments, as shown in fig. 5 to 7, the goniometric module 2 may not include the light source holder 23 and the receiving holder 24, the goniometric module 2 only includes a bracket 25, corresponding to the functional integration of the light source holder 23 and the receiving holder 24 on the bracket 25, the bracket 25 has a first mounting portion 251 and a second mounting portion 252,
the light source 21 is a laser, the laser is fixed to the first mounting portion 251, and an emergent surface of the laser and a plane where the scanning substrate 10 is located form a first preset included angle;
the second mounting portion 252 has a first mounting surface, the receiving assembly 22 is mounted on the first mounting surface, and the first mounting surface and the plane where the scanning substrate 10 is located form a second preset included angle. For example, the first preset included angle is 60 degrees, and the second preset included angle is 60 degrees. It should be noted that, in other embodiments, the first preset included angle and the second preset included angle are not limited to 60 degrees, but may also be 45 degrees or the like, or the degrees of the first preset included angle and the second preset angle are not equal, and the specific degrees may be adjusted as needed.
In some embodiments, the laser may be a solid state laser, a gas laser, a semiconductor diode laser, a fiber laser, and the like.
In some embodiments, as shown in fig. 4 and 7, the receiving assembly 22 includes an optical filter 26, an adapter plate 27, and a position sensor 28, where the adapter plate 27, the position sensor 28, and the optical filter 26 are sequentially disposed along a direction away from the first mounting surface, the adapter plate 27 is connected to the first mounting surface, and the optical filter 26 is configured to filter out optical signals outside a preset wavelength range. In other embodiments, the receiving assembly 22 may not include an adapter plate, and the position sensor 28 and the optical filter 26 are disposed directly on the first mounting surface in a direction away from the first mounting surface. The position sensor 28 is a psd position sensor for measuring the position coordinates of the movable unit 101. The spatial coordinates of the movable part 101 can be obtained by measuring the displacement using the psd position sensor, and the psd position sensor has high position resolution, high response speed, and a simple processing circuit.
In some embodiments, as shown in fig. 7 and fig. 9, the receiving assembly 22 further includes a extinction cylinder 29, the extinction cylinder 29 is located on a side of the position sensor 28 facing the scanning substrate 10, the extinction cylinder 29 may be a straight cylinder with parallel cylinder walls, and furthermore, preferably, the extinction cylinder 29 may also be a tapered structure, that is, a cylinder with a cylinder wall gradually converging from bottom to top, that is, a cross-sectional area of an end of the extinction cylinder 29 close to the scanning substrate 10 is smaller than a cross-sectional area of an end of the extinction cylinder 29 far from the scanning substrate 10. Specifically, the tapered structure may be a square funnel-shaped structure, a conical structure, a funnel-shaped structure, or the like. The top of the extinction cylinder 29 is provided close to the first surface 1011 of the movable portion 101, but does not interfere with the rotation of the movable portion 101. The extinction tube 29 is used to eliminate the adverse effect of stray light in the scanning device on the psd position sensor, so that only the angle measurement beam emitted from the light source 21 is reflected onto the psd position sensor via the first surface 1011 of the movable portion 101. Furthermore, it is preferable that a matting material is uniformly coated on the inner wall of the matting barrel 29 for absorbing stray light to prevent the stray light from being reflected onto the psd position sensor via the inner wall of the matting barrel 29. In a possible embodiment, the cross section of the extinction cylinder 29 can also be polygonal.
In some embodiments, as shown in fig. 1 and 5, the scanning device further includes a housing 3, the housing 3 is a box-shaped structure with an open end, the housing 3 has an accommodating space, the scanning module 1 is disposed in the accommodating space, and the angle measuring module 2 may be partially or completely located in the accommodating space.
In some embodiments, as shown in fig. 3, the housing 3 has a first side wall opposite to the opening, a through hole is formed in the first side wall, when the light source fixing frame 23 and the receiving fixing frame 24 are separately disposed, the light source fixing frame 23 and the receiving fixing frame 24 are respectively fixed to the periphery of the through hole through a connecting piece, one end of the laser facing the opening extends into the accommodating space, and the receiving assembly 22 is partially or completely located in the accommodating space. In a possible embodiment, the light source fixing frame 23 and the receiving fixing frame 24 may be fixed to the inner wall of the first side wall by a connecting member, and the first side wall does not need to be provided with the through hole.
In some embodiments, as shown in fig. 7, the housing 3 has a first side wall opposite to the opening, a through hole is formed on the first side wall, when the light source fixing frame 23 and the receiving fixing frame 24 are integrally integrated on the bracket 25, the bracket 25 is fixed on a side of the first side wall away from the opening through a connecting member, an end of the laser facing the opening extends into the through hole, the receiving assembly 22 passes through the through hole, and the receiving assembly 22 is partially or completely located in the accommodating space. In a possible embodiment, the bracket 25 may be fixed to the inner wall of the first side wall by a connector, in which case the first side wall does not need to be provided with the through hole.
In some embodiments, as shown in fig. 1 and 5, the scanning device further includes a closing plate 4, the closing plate 4 is mounted at one open end of the housing 3, and the scanning module 1 is mounted on a side of the closing plate 4 facing the receiving cavity through a connector. Through the shell 3 with the cooperation of shrouding 4, angle measurement module 2 with scanning module 1 can encapsulate to the high scanning device of an integrated level, and can install and transfer in advance, is convenient for install and use.
In some embodiments, as shown in fig. 10, the scanning substrate 10 further includes a first torsion shaft 102 and a third support 103, the movable part 101 is connected to the third support 103 through the first torsion shaft 102, and the movable part 101 is capable of rotating around the first torsion shaft 102; when the movable portion 101 is located at the initial position, the movable portion 101 and the third support portion 103 are located in the same plane. It should be noted that in other embodiments, the scanning substrate 10 may only have the first torsion axis 102, and the scanning device may be a single-axis scanning structure and may be used for optical scanning in one dimension.
In some embodiments, as shown in fig. 10, the movable part 101 includes a mirror 104, a second torsion shaft 105, and an outer frame 106, the outer frame 106 is connected to the third support part 103 through the first torsion shaft 102, and the mirror 104 is connected to the outer frame 106 through the second torsion shaft 105, that is, the mirror 104 may have two torsion shafts, the first torsion shaft 102 is a slow scanning shaft, the second torsion shaft 105 is a fast scanning shaft, the fast scanning shaft and the slow scanning shaft have a frequency difference, and the mirror 104 can implement raster scanning. Specifically, the first torsion axis 102 and the second torsion axis 105 may be perpendicular to each other, and are respectively used to form resonant modes in different directions, such as a horizontal resonant mode and a vertical resonant mode. In particular, the mirror 104 has the first face 1011 facing the goniometric module 2 and the second face 1012 facing away from the goniometric module 2.
In some embodiments, the scanning module 1 further comprises a magnet assembly for generating a magnetic field having a magnetic field component in the plane of the drive coil, and a drive coil; the driving coil is provided on the movable portion 101, and is configured to be rotated by a force in the magnetic field and to drive the movable portion 101 to rotate when a driving current is input.
In some embodiments, the scanning device may also include various circuit boards, wires, and the like.
The embodiment of the invention also provides a laser radar which comprises the scanning device.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents, improvements and the like that fall within the spirit and principle of the present invention are intended to be included therein.

Claims (21)

1. A scanning device is characterized by comprising a scanning module (1), an angle measuring module (2) and a shell (3), wherein the scanning module (1) and the angle measuring module (2) are separated by a first preset distance,
the scanning module (1) comprises a scanning substrate (10), the scanning substrate (10) comprising a movable part (101), the movable part (101) having a first face for reflecting an goniometric light beam,
the angle measuring module (2) comprises a light source (21), a receiving assembly (22), a light source fixing frame (23) and a receiving fixing frame (24), the light source (21) and the receiving assembly (22) are separated by a second preset distance, the light source (21) is used for emitting angle measuring light beams towards the first surface, the receiving side of the receiving assembly (22) faces the first surface, and the first surface reflects the angle measuring light beams emitted by the light source (21) to the receiving assembly (22);
the shell (3) is of a box-shaped structure with an opening at one end, the shell (3) is provided with a first side wall opposite to the opening, the shell (3) is provided with an accommodating space, one end of the light source (21) facing the opening extends into the accommodating space, and the scanning module (1) is arranged in the accommodating space; the light source fixing frame (23) and the receiving fixing frame (24) are fixed on the first side wall.
2. A scanning device according to claim 1, characterized in that the movable part (101) further has a second face for reflecting a scanning light beam, the second face being located on a side of the movable part (101) remote from the goniometric module (2).
3. The scanning device according to claim 1, wherein the light source (21) is a laser, the laser is fixed on the light source fixing frame (23), and an exit surface of the laser and a plane of the scanning substrate (10) form a first preset included angle;
the receiving fixing frame (24) is provided with a first mounting surface, the receiving assembly (22) is mounted on the first mounting surface, and a second preset included angle is formed between the first mounting surface and the plane where the scanning substrate (10) is located.
4. A scanning device according to claim 3, wherein the receiving assembly (22) comprises a filter (26) and a position sensor (28), the position sensor (28) and the filter (26) being arranged in series in a direction away from the first mounting surface.
5. The scanning device according to claim 4, characterized in that the receiving assembly (22) further comprises an adapter plate (27), the adapter plate (27) being connected to the first mounting surface, the position sensor (28) and the optical filter (26) being arranged in succession on the adapter plate (27) in a direction away from the first mounting surface.
6. The scanning device according to claim 5, characterized in that the receiving assembly (22) further comprises a matting cylinder (29), the matting cylinder (29) being located on the side of the position sensor (28) facing the scanned substrate (10).
7. The scanning device according to claim 6, characterized in that the extinction cylinder (29) is of a tapered structure, and the cross-sectional area of the extinction cylinder (29) at the end close to the scanning substrate (10) is smaller than the cross-sectional area of the extinction cylinder (29) at the end far away from the scanning substrate (10).
8. The scanning device according to claim 1, characterized in that the goniometric module (2) is partially or completely located within the housing space.
9. The scanning device according to claim 1, characterized in that the scanning device further comprises a closing plate (4), the closing plate (4) is mounted at the open end of the housing (3), and the scanning module (1) is mounted at the side of the closing plate (4) facing into the receiving cavity by a connector.
10. The scanning device according to claim 1, characterized in that the scanning substrate (10) further comprises a first torsion axis and a third support, the movable part (101) being connected to the third support by means of the first torsion axis, the movable part (101) being rotatably movable about the first torsion axis.
11. A scanning device is characterized by comprising a scanning module (1), an angle measuring module (2) and a shell (3), wherein the scanning module (1) and the angle measuring module (2) are separated by a first preset distance,
the scanning module (1) comprises a scanning substrate (10), the scanning substrate (10) comprising a movable part (101), the movable part (101) having a first face for reflecting an goniometric light beam,
the angle measuring module (2) comprises a light source (21), a receiving assembly (22) and a bracket (25), the light source (21) and the receiving assembly (22) are separated by a second preset distance, the light source (21) is used for emitting an angle measuring light beam towards the first surface, the receiving side of the receiving assembly (22) faces the first surface, and the first surface reflects the angle measuring light beam emitted by the light source (21) to the receiving assembly (22);
the shell (3) is of a box-shaped structure with an opening at one end, the shell (3) is provided with a first side wall opposite to the opening, the shell (3) is provided with an accommodating space, one end of the light source (21) facing the opening extends into the accommodating space, and the scanning module (1) is arranged in the accommodating space; the bracket (25) is fixed on the first side wall, and the bracket (25) is provided with a first mounting part (251) for mounting the light source (21) and a second mounting part (252) for mounting the receiving component (22).
12. A scanning device according to claim 11, characterized in that the movable part (101) further has a second face for reflecting a scanning light beam, the second face being located on a side of the movable part (101) remote from the goniometric module (2).
13. The scanning device according to claim 11,
the light source (21) is a laser, the laser is fixed on the first mounting part (251), and the emergent surface of the laser and the plane where the scanning substrate (10) is located form a first preset included angle;
the second mounting part (252) is provided with a first mounting surface, the receiving assembly (22) is mounted on the first mounting surface, and a second preset included angle is formed between the first mounting surface and the plane where the scanning substrate (10) is located.
14. The scanning device according to claim 13, characterized in that the receiving assembly (22) comprises a filter (26) and a position sensor (28), the position sensor (28) and the filter (26) being arranged in succession in a direction away from the first mounting surface.
15. The scanning device according to claim 14, characterized in that the receiving assembly (22) further comprises an adapter plate (27), the adapter plate (27) being connected to the first mounting surface, the position sensor (28) and the optical filter (26) being arranged in succession on the adapter plate (27) in a direction away from the first mounting surface.
16. The scanning device according to claim 15, characterized in that the receiving assembly (22) further comprises a matting cylinder (29), the matting cylinder (29) being located on the side of the position sensor (28) facing the scanned substrate (10).
17. The scanning device according to claim 16, characterized in that the extinction cylinder (29) is of a tapered structure, and the cross-sectional area of the extinction cylinder (29) at the end close to the scanning substrate (10) is smaller than the cross-sectional area of the extinction cylinder (29) at the end far away from the scanning substrate (10).
18. The scanning device according to claim 12, characterized in that the goniometric module (2) is partially or completely located within the housing space.
19. The scanning device according to claim 12, characterized in that it further comprises a closing plate (4), said closing plate (4) being mounted at an open end of said housing (3), said scanning module (1) being mounted on a side of said closing plate (4) facing into said receiving cavity by means of a connector.
20. The scanning device according to claim 11, characterized in that the scanning substrate (10) further comprises a first torsion axis and a third support, the movable part (101) being connected to the third support by means of the first torsion axis, the movable part (101) being rotatably movable about the first torsion axis.
21. Lidar according to any of claims 1 to 20, characterized in that it comprises a scanning device according to any of claims 1 to 20.
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CN111766585B (en) * 2019-03-13 2023-07-21 探维科技(北京)有限公司 Laser radar
CN110456326B (en) * 2019-08-31 2021-07-06 上海禾赛科技股份有限公司 Scanning device, laser radar comprising same and operation method
CN110780279A (en) * 2019-10-30 2020-02-11 上海禾赛光电科技有限公司 Scanning mirror assembly and lidar comprising same

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102004896A (en) * 2009-08-31 2011-04-06 巨豪实业股份有限公司 Laser bar code scanning device and scanning mechanism thereof
CN102662236A (en) * 2012-05-29 2012-09-12 东南大学 Scanning device realizing unidirectional laser scanning through double-faced vibrating mirror
CN105115474A (en) * 2015-08-10 2015-12-02 金华市蓝海光电技术有限公司 Rotating scanning distance measuring instrument

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10253907A (en) * 1997-03-13 1998-09-25 Fujitsu Ltd Scanner
CN101592477B (en) * 2009-06-30 2011-07-20 长春理工大学 Right-angled reflection type three-dimensional laser scanner and method for realizing three-dimensional imaging by using same
CN202677417U (en) * 2012-04-11 2013-01-16 广州市钛码电子科技有限公司 Micro laser scanning device and portable terminal thereof
US9116350B2 (en) * 2013-03-11 2015-08-25 Intel Corporation MEMS scanning mirror field of view provision methods and apparatus
CN206193242U (en) * 2016-10-13 2017-05-24 北京飞思迈尔光电科技有限公司 Optical scan sensor
CN106772407A (en) * 2016-12-02 2017-05-31 深圳市镭神智能***有限公司 Laser radar system based on MEMS micromirror scanning
CN106814366B (en) * 2017-03-23 2024-04-30 上海思岚科技有限公司 Laser scanning range unit
CN107121091A (en) * 2017-05-19 2017-09-01 西安五湖智联半导体有限公司 A kind of profile scan measurement apparatus based on PSD
CN207457499U (en) * 2017-11-14 2018-06-05 北京万集科技股份有限公司 A kind of MEMS galvanometers synchronizing signal feedback device and laser radar
CN207675932U (en) * 2017-11-14 2018-07-31 北京万集科技股份有限公司 MEMS galvanometers synchronizing device based on laser radar and laser radar
CN107907993A (en) * 2017-12-08 2018-04-13 上海禾赛光电科技有限公司 Resonant mode scanning mirror, scan method, the measuring method of angle and processing method
CN108196243A (en) * 2018-03-14 2018-06-22 北京因泰立科技有限公司 A kind of 3-D scanning laser radar based on MEMS micromirror
CN108761775A (en) * 2018-06-20 2018-11-06 广州市钛码电子科技有限公司 A kind of double pendulum index glass laser scanning device
CN108802763B (en) * 2018-06-27 2024-05-03 上海禾赛科技有限公司 Large-view-field short-range laser radar and vehicle

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102004896A (en) * 2009-08-31 2011-04-06 巨豪实业股份有限公司 Laser bar code scanning device and scanning mechanism thereof
CN102662236A (en) * 2012-05-29 2012-09-12 东南大学 Scanning device realizing unidirectional laser scanning through double-faced vibrating mirror
CN105115474A (en) * 2015-08-10 2015-12-02 金华市蓝海光电技术有限公司 Rotating scanning distance measuring instrument

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