CN109298004A - A kind of Xray fluorescence spectrometer - Google Patents
A kind of Xray fluorescence spectrometer Download PDFInfo
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- CN109298004A CN109298004A CN201811495375.4A CN201811495375A CN109298004A CN 109298004 A CN109298004 A CN 109298004A CN 201811495375 A CN201811495375 A CN 201811495375A CN 109298004 A CN109298004 A CN 109298004A
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- 239000000523 sample Substances 0.000 claims abstract description 74
- 239000000463 material Substances 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000004876 x-ray fluorescence Methods 0.000 description 3
- 238000001514 detection method Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000005855 radiation Effects 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 1
- 230000008901 benefit Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000012857 repacking Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
- G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
- G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2223/00—Investigating materials by wave or particle radiation
- G01N2223/07—Investigating materials by wave or particle radiation secondary emission
- G01N2223/076—X-ray fluorescence
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- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
The invention discloses a kind of Xray fluorescence spectrometers, comprising: board, sample stage, X-ray tube generating device, detector, camera, transfer switching device and control device；Sample stage is horizontally placed on board；X-ray tube generating device is set to the surface on board and being located at sample stage, X-ray is vertical with the upper surface of sample stage, X-ray tube generating device includes the tube envelope being arranged on board, and tube envelope is equipped with the ray exit portal for passing through for X-ray；Camera is connected to the lower part of tube envelope；Transfer switching device is set between tube envelope and camera, for driving camera with respect to the horizontal movement of X-ray tube generating device, and then is kept camera and ray exit portal coaxial or is staggered；The fluorescence for the sample generation that control device is acquired for pick-up probe is simultaneously analyzed；Both the case where being avoided that the image information distortion of micro-lens acquisition, while the working efficiency of ray tube is not influenced.
Description
[technical field]
The present invention relates to precision detecting instrument, specifically a kind of Xray fluorescence spectrometer.
[background technique]
XRF, i.e. X-ray fluorescence spectra analyze (X Ray Fluorescence).One typical Xray fluorescence spectrometer
(being abbreviated as XRF or XRFS, X Ray Fluorescence Spectrometer) is by excitaton source (X-ray tube) and detection system
It constitutes.X-ray tube generates incident X-rays (primary X-ray), excites sample.The element in sample being stimulated can emit
Secondary x rays, that is, characteristic fluorescence out, and the secondary x rays that different elements is launched have specific energy response and wave
Long characteristic.Detection system measures these energy and intensity for radiating the secondary x rays come.XRF instrument be often fitted with CCD camera or
Camera, for observing sample and record image.XRF instrument, which is also often fitted with, to be moved up in tri- directions XYZ of rectangular coordinate system
The sample stage of dynamic sample, sample stage can be driven by a motor.Camera observes sample, the distance that sample stage need to be moved and pixel number
It is corresponding, then by pixel number and motor need to move at a distance from convert, drive sample stage to move with driving motor.
In the common configuration of XRF instrument, ray is with certain incidence angle irradiating sample or vertical irradiation sample.It is small when analyzing
Sample, out-of-flatness sample or when analyzing sample surfaces tiny area, are imitated to make X-ray reach optimal irradiation to sample
Fruit, the radiation exit face sample of usual X-ray tube, i.e. the center line of X-ray beam is vertical with sample stage, while X-ray tube
Radiation exit and the distance between sample stage usually in 10mm~100mm, the camera lens of CCD camera is needed using Macro Lens thus
Head.
At present there are two types of the mounting means of the camera lens of CCD camera:
One is the inclination of, camera lens relative sample (i.e. camera lens be not vertical sample surface), using the mounting means, use
The image information of micro-lens acquisition has biggish distortion；
Second is that setting and horizontal plane are about in reflective mirror (the i.e. camera lens and sample of 45° angle between sample and camera lens
Vertically), by reflective mirror avoid micro-lens acquisition image information be distorted the case where, but reflective mirror setting sample with
Between ray tube, a part of ray can be blocked, reduces the efficiency of ray tube.
The present invention is to research and propose in view of the deficiencies of the prior art.
[summary of the invention]
The technical problem to be solved in the present invention is to provide a kind of Xray fluorescence spectrometers, have both been avoided that micro-lens acquires
Image information distortion the case where, while not influencing the working efficiency of ray tube.
In order to solve the above technical problems, a kind of Xray fluorescence spectrometer of the invention, comprising: board, sample stage, X-ray
Pipe generating device, detector, camera, transfer switching device and control device；The sample stage is horizontally placed on board
On, for holding sample；The X-ray tube generating device is set to the surface on board and being located at sample stage, for sending out
X-ray bombardment is penetrated to the sample, the X-ray is vertical with the upper surface of sample stage, and the X-ray tube generating device includes
Tube envelope on board is set, and the tube envelope is equipped with the ray exit portal for passing through for X-ray；Institute
The detector stated is set on board and is located at sample stage side, the fluorescence for being irradiated by X-rays generation for detecting the sample；Institute
The camera stated is connected to the lower part of tube envelope, for acquiring the image information of sample；The transfer switching device is set
It is placed between tube envelope and camera, for driving camera with respect to the horizontal movement of X-ray tube generating device, and then makes to take the photograph
As head and ray exit portal are coaxial or are staggered；The fluorescence that the control device is generated for the sample of pick-up probe acquisition
And it is analyzed.
A kind of Xray fluorescence spectrometer as described above, the transfer switching device include to be connected to tube envelope
Lower part fixing seat, slidably connect sliding seat in the horizontal direction in the fixing seat, the camera is connected to cunning
On dynamic seat, the driving assembly for driving the relatively fixed seat movement of sliding seat is additionally provided in the fixing seat.
A kind of Xray fluorescence spectrometer as described above, the driving assembly include to be rotatably connected in fixing seat
Screw rod, the sliding seat are equipped with the threaded hole cooperated with wire rod thread, are additionally provided in the fixing seat for driving silk
Bar rotates and then drives the motor of the relatively fixed seat movement of sliding seat.
A kind of Xray fluorescence spectrometer as described above, the sliding seat and is located to be equipped with right above camera and is used for
Shield the barricade of X-ray.
A kind of Xray fluorescence spectrometer as described above, the sliding seat and the side for being located at camera, which are equipped with, to be used for
The light bar for being irradiated to X-ray on sample is reduced, the light bar can be made of the material of maskable X-ray, and the light bar
It is equipped with for being passed through for X-ray and can be with the light bar hole of ray exit portal face.
Compared with prior art, the present invention has the advantage that
1, the present invention between tube envelope and camera by being arranged transfer switching device, when needing to make roentgenogram
When penetrating sample, transfer switching device drives camera to deviate ray exit portal；When needing to acquire the image information of sample, transfer
Switching device drives camera and ray exit portal coaxial, makes camera face sample；Using the solution of the present invention, both it was avoided that
The case where image information distortion of micro-lens acquisition, while the working efficiency of ray tube is not influenced.
2, the present invention will be installed to tube envelope by transfer switching device with camera, have repacking convenient excellent
Point, and occupy little space, it does not influence normally to detect.
3, it is equipped with barricade in sliding seat and right above camera, interference of the X-ray to camera can be shielded.
4, by light bar setting same set of driving device is shared with camera on sliding seat, can reduce cost, simplify structure,
It reduces the fault point, reduce failure rate.
[Detailed description of the invention]
Specific embodiments of the present invention will be described in further detail with reference to the accompanying drawing, in which:
Fig. 1 is the structural schematic diagram of embodiment 1 (hiding board)；
Fig. 2 is the structural schematic diagram of embodiment 1 (hiding board and detector)；
Fig. 3 is the enlarged drawing of the part A marked in Fig. 2；
Fig. 4 is the complete section schematic diagram of embodiment 1 (hiding board and detector)；
Fig. 5 is the enlarged drawing of the part B marked in Fig. 4；
Fig. 6 is the structural schematic diagram of embodiment 2 (hiding board and detector)；
Fig. 7 is the enlarged drawing of the C portion marked in Fig. 6；
Fig. 8 is the complete section schematic diagram of embodiment 2 (hiding board and detector)；
Fig. 9 is the enlarged drawing of the part D marked in Fig. 8.
[specific embodiment]
It elaborates with reference to the accompanying drawing to embodiments of the present invention.
Embodiment 1:
As shown in Figures 1 to 5, a kind of Xray fluorescence spectrometer of the present embodiment, comprising: board (attached to be not shown in the figure),
Sample stage 1, X-ray tube generating device 2, detector 7, camera 3, transfer switching device 4 and control device；The sample
Platform 1 is horizontally placed on board, for holding sample；The X-ray tube generating device 2 is set on board and is located at sample
The surface of platform 1, for emitting x-ray bombardment to the sample, the X-ray is vertical with the upper surface of sample stage 1, described
X-ray tube generating device 2 includes the tube envelope 21 being arranged on board, and the tube envelope 21 is equipped with for supplying
The ray exit portal 22 that X-ray passes through；The detector 7 is set on board and is located at 1 side of sample stage, described for detecting
Sample is irradiated by X-rays the fluorescence of generation；The camera 3 is connected to the lower part of tube envelope 21, for acquiring sample
Image information；The transfer switching device 4 is set between tube envelope 21 and camera 3, for driving camera 3
Opposite 2 horizontal movement of X-ray tube generating device, and then keep camera 3 and ray exit portal 22 coaxial or be staggered；The control
The fluorescence for the sample generation that device processed is acquired for pick-up probe 7 is simultaneously analyzed.The present invention by tube envelope with
Transfer switching device is set between camera, and when needing to make x-ray bombardment sample, transfer switching device drives camera to deviate
Ray exit portal；When needing to acquire the image information of sample, transfer switching device drives camera and ray exit portal coaxial,
Make camera face sample；Using the solution of the present invention, it was both avoided that the case where image information of micro-lens acquisition is distorted, together
When do not influence the working efficiency of ray tube.
Transfer switching device 4 includes to be connected to the fixing seat 41 of the lower part of tube envelope 21, in the fixing seat 41
Sliding seat 42 is slidably connected in the horizontal direction, and the camera 3 is connected on sliding seat 42, in the fixing seat 41 also
Equipped with the driving assembly 43 for driving the relatively fixed seat 41 of sliding seat 42 to move, driving assembly 43 includes to be rotatably connected on fixation
Screw rod 431 on seat 41, the sliding seat 42 are equipped with the threaded hole being threadedly engaged with screw rod 431, the fixing seat 41
On be additionally provided with motor 432 for driving screw rod 431 to rotate and then the relatively fixed seat 41 of sliding seat 42 being driven to move.Using above-mentioned
Transfer switching device can be made to smaller by mechanism, avoid occupied space.
Implement 2:
In embodiment 1, in order to avoid camera acquire sample image during, X-ray to camera generate interference and
Picture quality is reduced, the process for acquiring sample image needs to close X-ray tube generating device.
As shown in Figures 6 to 9, the present embodiment on the basis of embodiment 1, sliding seat 42 and be located at camera 3 just on
Side is equipped with the barricade 5 for shielding X-ray, can avoid X-ray by barricade 5 and generates interference to camera, there is no need to
Close X-ray tube generating device.
In addition to this, in order to which the light quantity to the X-ray being irradiated on sample controls, in sliding seat 42 and it is located at camera shooting
First 3 side is equipped with for reducing the light bar 6 for being irradiated to X-ray on sample, and light bar 6 can be made of the material of maskable X-ray,
And the light bar 6 is equipped with for passing through for X-ray and can be with the light bar hole 61 of 22 face of ray exit portal.Light bar is arranged
Same set of driving device is shared with camera on sliding seat 42, cost can be reduced, simplify structure, reduce the fault point, reducing event
Barrier rate.
Claims (5)
1. a kind of Xray fluorescence spectrometer, characterized by comprising:
Board；
Sample stage (1), the sample stage (1) is horizontally placed on board, for holding sample；
X-ray tube generating device (2), the X-ray tube generating device (2) are set on board and are located at sample stage (1)
Surface, for emitting x-ray bombardment to the sample, the X-ray is vertical with the upper surface of sample stage (1), and the X is penetrated
Spool generating device (2) includes the tube envelope (21) being arranged on board, and the tube envelope (21), which is equipped with, to be used
In the ray exit portal (22) passed through for X-ray；
Detector (7), the detector (7) is set on board and is located at sample stage (1) side, for detecting the sample quilt
The fluorescence that x-ray bombardment generates；
Camera (3), the camera (3) are connected to the lower part of tube envelope (21), and the image for acquiring sample is believed
Breath；
Transfer switching device (4), the transfer switching device (4) are set between tube envelope (21) and camera (3),
For driving camera (3) with respect to X-ray tube generating device (2) horizontal movement, and then make camera (3) and ray exit portal
(22) coaxial or be staggered；
Control device, the control device are used for the fluorescence of the sample generation of pick-up probe (7) acquisition and are analyzed.
2. a kind of Xray fluorescence spectrometer according to claim 1, it is characterised in that the transfer switching device (4)
Fixing seat (41) comprising being connected to the lower part of tube envelope (21), sliding connects in the horizontal direction in the fixing seat (41)
It is connected to sliding seat (42), the camera (3) is connected on sliding seat (42), is additionally provided with and is used in the fixing seat (41)
Drive the driving assembly (43) of sliding seat (42) relatively fixed seat (41) movement.
3. a kind of Xray fluorescence spectrometer according to claim 2, it is characterised in that the driving assembly (43) includes
The screw rod (431) being rotatably connected on fixing seat (41), the sliding seat (42) are equipped with and are threadedly engaged with screw rod (431)
Threaded hole is additionally provided in the fixing seat (41) for driving screw rod (431) to rotate and then driving sliding seat (42) relatively solid
The motor (432) of reservation (41) movement.
4. a kind of Xray fluorescence spectrometer according to claim 2, it is characterised in that the sliding seat (42) and be located at
The barricade (5) for shielding X-ray is equipped with right above camera (3).
5. according to a kind of described in any item Xray fluorescence spectrometers of claim 2 to 4, it is characterised in that the sliding seat
(42) and it is located at the side of camera (3) equipped with for reducing the light bar (6) for being irradiated to X-ray on sample, the light bar (6)
It can be made of the material of maskable X-ray, and the light bar (6) is equipped with for passing through and can be emitted with ray for X-ray
The light bar hole (61) of mouth (22) face.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811495375.4A CN109298004A (en) | 2018-12-07 | 2018-12-07 | A kind of Xray fluorescence spectrometer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811495375.4A CN109298004A (en) | 2018-12-07 | 2018-12-07 | A kind of Xray fluorescence spectrometer |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109298004A true CN109298004A (en) | 2019-02-01 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811495375.4A Pending CN109298004A (en) | 2018-12-07 | 2018-12-07 | A kind of Xray fluorescence spectrometer |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040223586A1 (en) * | 2003-05-05 | 2004-11-11 | Bruker Axs, Inc. | Vertical small angle x-ray scattering system |
| CN102707309A (en) * | 2012-05-07 | 2012-10-03 | 上海高晶影像科技有限公司 | Telescopic portable imaging detector and portable x-ray detection instrument |
| CN206132668U (en) * | 2016-10-25 | 2017-04-26 | 无锡日联科技股份有限公司 | X -ray inspection device |
| CN107228875A (en) * | 2017-06-29 | 2017-10-03 | 苏州浪声科学仪器有限公司 | A kind of X-ray fluorescence spectrometer |
| CN107957430A (en) * | 2016-10-14 | 2018-04-24 | 株式会社岛津制作所 | X-ray analysis equipment |
| CN209446498U (en) * | 2018-12-07 | 2019-09-27 | 深圳市禾苗分析仪器有限公司 | A kind of Xray fluorescence spectrometer |
-
2018
- 2018-12-07 CN CN201811495375.4A patent/CN109298004A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20040223586A1 (en) * | 2003-05-05 | 2004-11-11 | Bruker Axs, Inc. | Vertical small angle x-ray scattering system |
| CN102707309A (en) * | 2012-05-07 | 2012-10-03 | 上海高晶影像科技有限公司 | Telescopic portable imaging detector and portable x-ray detection instrument |
| CN107957430A (en) * | 2016-10-14 | 2018-04-24 | 株式会社岛津制作所 | X-ray analysis equipment |
| CN206132668U (en) * | 2016-10-25 | 2017-04-26 | 无锡日联科技股份有限公司 | X -ray inspection device |
| CN107228875A (en) * | 2017-06-29 | 2017-10-03 | 苏州浪声科学仪器有限公司 | A kind of X-ray fluorescence spectrometer |
| CN209446498U (en) * | 2018-12-07 | 2019-09-27 | 深圳市禾苗分析仪器有限公司 | A kind of Xray fluorescence spectrometer |
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Address after: A422, Building 1, Hongpai Industrial Park, Qiaotou Community, Fuhai Street, Bao'an District, Shenzhen, Guangdong, China (Building A, Huafeng Zhigu Fuhai Science and Technology Industrial Park) Applicant after: SHENZHEN HELEEX ANALYTICAL INSTRUMENT Co.,Ltd. Address before: 518000 308 apartment building, Funing hi tech Industrial Park, Fuyong street, Bao'an District, Shenzhen, Guangdong Applicant before: SHENZHEN HELEEX ANALYTICAL INSTRUMENT Co.,Ltd. |