CN109289711A - Hydrogenation reactor - Google Patents
Hydrogenation reactor Download PDFInfo
- Publication number
- CN109289711A CN109289711A CN201811208017.0A CN201811208017A CN109289711A CN 109289711 A CN109289711 A CN 109289711A CN 201811208017 A CN201811208017 A CN 201811208017A CN 109289711 A CN109289711 A CN 109289711A
- Authority
- CN
- China
- Prior art keywords
- cylinder
- silicon powder
- hydrogenation reactor
- cavity
- epicoele
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005984 hydrogenation reaction Methods 0.000 title claims abstract description 42
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 59
- 239000011863 silicon-based powder Substances 0.000 claims abstract description 55
- 230000008901 benefit Effects 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 40
- 239000007789 gas Substances 0.000 description 21
- 239000000843 powder Substances 0.000 description 21
- 239000000377 silicon dioxide Substances 0.000 description 20
- ZDHXKXAHOVTTAH-UHFFFAOYSA-N trichlorosilane Chemical compound Cl[SiH](Cl)Cl ZDHXKXAHOVTTAH-UHFFFAOYSA-N 0.000 description 10
- 239000005052 trichlorosilane Substances 0.000 description 10
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 9
- 239000005049 silicon tetrachloride Substances 0.000 description 9
- 239000002245 particle Substances 0.000 description 8
- 229910052739 hydrogen Inorganic materials 0.000 description 6
- 239000001257 hydrogen Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
- 238000001914 filtration Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000004064 recycling Methods 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 238000009825 accumulation Methods 0.000 description 3
- 239000003054 catalyst Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 239000011343 solid material Substances 0.000 description 3
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 239000008358 core component Substances 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002360 explosive Substances 0.000 description 2
- 150000002431 hydrogen Chemical class 0.000 description 2
- 238000012423 maintenance Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 230000000630 rising effect Effects 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- 241001391944 Commicarpus scandens Species 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000008439 repair process Effects 0.000 description 1
- 239000011856 silicon-based particle Substances 0.000 description 1
- 230000007704 transition Effects 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/02—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes with stationary particles, e.g. in fixed beds
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J8/00—Chemical or physical processes in general, conducted in the presence of fluids and solid particles; Apparatus for such processes
- B01J8/005—Separating solid material from the gas/liquid stream
- B01J8/006—Separating solid material from the gas/liquid stream by filtration
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Silicon Compounds (AREA)
Abstract
The invention discloses a kind of hydrogenation reactors, including cylinder, silicon powder feeder pipe and element kit.Wherein, cylinder is vertically arranged, and the lower part and top of cylinder are respectively equipped with air inlet pipe and exhaust outlet, and the cavity of resorption and epicoele to communicate with each other is defined in cylinder, and cavity of resorption is connected to air inlet pipe, and epicoele is connected to exhaust outlet；Silicon powder feeder pipe penetrates down intracavitary outside cylinder, and one end of silicon powder feeder pipe is exported with silicon powder, and silicon powder outlet is intracavitary under and is located at the top of air inlet pipe；Element kit is embedded in epicoele.Hydrogenation reactor according to an embodiment of the present invention can be effectively avoided silicon powder and escape with gas, has many advantages, such as long operational time.
Description
Technical field
The present invention relates to the technical fields of hydrogenation, more particularly, to a kind of hydrogenation reactor.
Background technique
Hydrogenation is gas-solid reaction, and with the progress of reaction, the silicon powder particle in hydrogenation reactor can be tapered, when
It when particle is less than certain incipient fluidizing velocity, can be taken out of by gas, into follow-up equipment, block pipeline and equipment, influence to give birth to
It produces and operates normally.
Currently, 90% or more polysilicon enterprise is all made of silicon tetrachloride cold hydrogenation technology in polysilicon production process
By-product is handled, the raw material trichlorosilane of production polysilicon is translated into.Silicon tetrachloride cold hydrogenation technology is by metallurgical grade silicon
Powder, hydrogen, silicon tetrachloride are added in cold hydrogenation reactor, under certain temperature, pressure condition, under the action of catalyst instead
It answers, generates trichlorosilane.With the progress of reaction, the silicon powder particle in reactor can be tapered, when particle is less than centainly just
It when beginning fluidizing velocity, can be brought into follow-up equipment by gas, influence production and operate normally.
Currently, the outlet of silicon tetrachloride cold hydrogenation fixed bed reactors is typically provided high-temperature gas filter.This mode is deposited
Main problem be with the extension of time, fine silica powder is more and more in filter, first is that silicon powder layer is accumulated to filtration cartridge volume,
It is easy to cause filter core to be broken, thus filtration inefficiencies, silicon powder brings follow-up equipment into, second is that silicon powder accumulation is excessively high, leads to system pressure difference
Greatly, system needs periodically parking to release the fine silica powder in filter, third is that the part fine silica powder can not utilize again, leads to silicon
The waste of powder.Since the silicon particle size in filter is small, after silicon tetrachloride cold hydrogenation fixed bed reactors are added again, Wu Faji
Shi Fanying will be taken out of by gas.
Summary of the invention
The present invention is directed at least solve one of the technical problems existing in the prior art.For this purpose, one object of the present invention
Be to propose a kind of hydrogenation reactor, itself has filtration system inside the hydrogenation reactor, can be effectively avoided silicon powder with
Gas evolution.
Hydrogenation reactor according to an embodiment of the present invention, comprising:
Cylinder, the cylinder is vertically arranged, and the lower part and top of the cylinder are respectively equipped with air inlet pipe and exhaust outlet, described
Cylinder defines the cavity of resorption and epicoele of connection, and the cavity of resorption is connected to the air inlet pipe, and the epicoele is connected to the exhaust outlet；
Silicon powder feeder pipe, the silicon powder feeder pipe penetrated outside the cylinder it is described under it is intracavitary, the silicon powder feeder pipe
One end is exported with silicon powder, and the silicon powder outlet is intracavitary under described and is located at the top of the air inlet pipe；
Element kit, the element kit are embedded in the epicoele.
The mixed gas of hydrogenation reactor according to an embodiment of the present invention, silicon tetrachloride and hydrogen is under air inlet pipe entrance
Chamber reacts with the silicon powder for entering cavity of resorption by silicon powder feeder pipe, trichlorosilane gas is generated, with the progress of reaction, silicon
Powder particles are tapered, and trichlorosilane gas entrainment fine silica powder constantly rises, into epicoele；Since epicoele is embedded with filter core group
Part can intercept fine silica powder, and when fine silica powder is attached on the surface of element kit with reaction progress, fine silica powder is with gas by band
Enter filter assemblies, fine silica powder is blocked, and is attached to cartridge surface；Since element kit is in hydrogenation reactor, still in
Comfort zone, and the part silicon powder is thin, reactivity is strong, can react in the short time and generate trichlorosilane gas, thus thorough
Bottom solves the problems, such as that fine silica powder is escaped with trichlorosilane gas from exhaust outlet, realizes effective recycling of fine silica powder.
Hydrogenation reactor according to an embodiment of the present invention has the advantages that first, and element kit is placed in hydrogenation reactor
It is interior, it is a part of hydrogenation reactor, eliminates the filter of process rear end, process is more simple, while decreasing leakage
Point is particularly suitable for high temperature and pressure, inflammable and explosive processing medium；Second, flow sheet equipment is reduced, such as eliminates the filtering of rear end
Device reduces overall cost investment；Third, flow sheet equipment are reduced, so that system radiating is few, low energy consumption；4th, on element kit
It is not in fine silica powder accumulation, therefore element kit easy fracture, service life are long；Element kit does not need individually to overhaul simultaneously, overhauls
Time is short, and maintenance expense is few；5th, silicon powder energy effective recycling, silicon consumes low；6th, the system stable operation time is long, is not required to
It is periodically out of service.
In addition, hydrogenation reactor according to an embodiment of the present invention, can also have following additional technical feature:
According to one embodiment of present invention, the radial dimension of the epicoele is big relative to the radial dimension of the cavity of resorption.
Further, the cylinder is further defined with adapter cavity,
Adapter cavity is further defined in the cylinder, the cavity of resorption is connected to by the adapter cavity with the epicoele, the mistake
Chamber radial dimension on bottom-up direction is crossed to be gradually increased.
According to some embodiments of the present invention, the silicon powder feeder pipe penetrates straight down from the top outer of the cylinder
To intracavitary under described, and silicon powder outlet is close in the epicoele.
Further, outside upright of the silicon powder feeder pipe from the cylinder center of top is down through the cavity of resorption
It is interior.
It according to one embodiment of present invention, further include being arranged in the barrel chamber to be used for the equally distributed flower of air-flow
Disk, the floral disc are located at the top of the air inlet pipe.
It further, further include access hole, the access hole is arranged on the side wall of the cylinder, the access hole and institute
It states cavity of resorption connection and is close in the floral disc.
Further, the access hole is located at the top of the floral disc.
It according to one embodiment of present invention, further include discharge outlet, the discharge outlet is located at the bottom of the cylinder, and with
The cavity of resorption connection.
Additional aspect and advantage of the invention will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the description of the embodiment in conjunction with the following figures
Obviously and it is readily appreciated that, in which:
Fig. 1 is the structural schematic diagram of the hydrogenation reactor of one embodiment of the invention.
Appended drawing reference:
Hydrogenation reactor 100
12 epicoele of cylinder 1 cavity of resorption, 11 adapter cavity, 13 exhaust outlet 14
15 discharge outlet 16 of access hole
4 silicon powder feeder pipe of air inlet pipe 2 floral disc, 3 element kit, 5 silicon powder outlet 51
Specific embodiment
The embodiment of the present invention is described below in detail, examples of the embodiments are shown in the accompanying drawings, wherein from beginning to end
Same or similar label indicates same or similar element or element with the same or similar functions.Below with reference to attached
The embodiment of figure description is exemplary, and for explaining only the invention, and is not considered as limiting the invention.
Hydrogenation reactor according to an embodiment of the present invention is described below with reference to Fig. 1.
As shown in Figure 1, hydrogenation reactor 100 according to an embodiment of the present invention, including cylinder 1, silicon powder feeder pipe 5 and filter core
Component 4.Wherein, cylinder 1 is vertically arranged, and the lower part and top of cylinder 1 are respectively equipped with air inlet pipe 2 and exhaust outlet 14, limit in cylinder 1
Surely there is the cavity of resorption 11 and epicoele 13 to communicate with each other, cavity of resorption 11 is connected to air inlet pipe 2, and epicoele 13 is connected to exhaust outlet 14；Under silicon powder
Expects pipe 5 is penetrated outside cylinder 1 in cavity of resorption 11, and one end of silicon powder feeder pipe 5 has silicon powder outlet 51, and silicon powder outlet 51 is intracavitary under
And it is located at the top of air inlet pipe 2；Element kit 4 is embedded in epicoele 13.
The mixed gas of hydrogenation reactor 100 according to an embodiment of the present invention, silicon tetrachloride and hydrogen enters from air inlet pipe 2
Cavity of resorption 11 reacts with the silicon powder for entering cavity of resorption 11 by silicon powder feeder pipe 5, trichlorosilane gas is generated, with reaction
It carries out, silicon powder particle is tapered, and trichlorosilane gas entrainment fine silica powder constantly rises, into epicoele 13；Since epicoele 13 is embedding
Equipped with element kit 4, fine silica powder can be intercepted, when fine silica powder is attached on the surface of element kit 4 with reaction progress, thin silicon
Powder is brought into filter assemblies with gas, and fine silica powder is blocked, and is attached to cartridge surface；Since element kit 4 is anti-in hydrogenation
It answers in device 100, still in comfort zone, and the part silicon powder is thin, and reactivity is strong, can react in the short time and generate trichlorine
Hydrogen silicon gas, to thoroughly solve the problems, such as that fine silica powder is escaped with trichlorosilane gas from exhaust outlet 14, realize fine silica powder has
Effect recycling.
Hydrogenation reactor 100 according to an embodiment of the present invention has the advantages that first, and it is anti-that element kit 4 is placed in hydrogenation
It answers in device 100, is a part of hydrogenation reactor 100, eliminates the filter of process rear end, process is more simple, while
Reduce leakage point, is particularly suitable for high temperature and pressure, inflammable and explosive processing medium；Second, flow sheet equipment is reduced, such as is eliminated
The filter of rear end reduces overall cost investment；Third, flow sheet equipment are reduced, so that system radiating is few, low energy consumption；4th,
It is not in fine silica powder accumulation on element kit 4, therefore element kit 4 is not easy to break, the service life is long；Element kit 4 is not required to simultaneously
It individually to overhaul, the repair time is short, and maintenance expense is few；5th, silicon powder energy effective recycling, silicon consumes low；6th, system is stablized
Long operational time does not need periodically out of service.
According to one embodiment of present invention, the radial dimension of epicoele 13 is big relative to the radial dimension of cavity of resorption 11, filter core
Component 4 is embedded in epicoele 13.By expanding the radial dimension of epicoele, it is mainly used for slowing down air velocity, makes with air-flow
The silicon powder of rising falls again；Meanwhile also helping and increasing the contact area that element kit 4 intercepts fine silica powder, fine silica powder is not
It can accumulate, can react generate trichlorosilane gas in a short time.
Further, adapter cavity 12 is further defined in cylinder 1, cavity of resorption 11 is connected to by adapter cavity 12 with epicoele 13, transition
The radial dimension on bottom-up direction of chamber 12 is gradually increased, and is conducive to the air-flow speed that balanced dispersion rises upwards and is gradually dropped
It is low.
According to some embodiments of the present invention, silicon powder feeder pipe 5 is penetrated straight down from the top outer of cylinder 1 to cavity of resorption
In 11, and silicon powder outlet 51 is close in epicoele 13.Specifically, outside upright of the silicon powder feeder pipe 5 from 1 center of top of cylinder
Down through in cavity of resorption 11, and it is close in epicoele 13, so that the mixed gas for being conducive to silicon powder and silicon tetrachloride and hydrogen is abundant
Haptoreaction, to improve reaction efficiency.
It according to one embodiment of present invention, further include being arranged in barrel chamber to be used for the equally distributed floral disc 3 of air-flow, flower
Disk 3 is equipped with the multiple small spray orifices being evenly distributed, and floral disc 3 is located at the top of air inlet pipe 2.In this way, being conducive to come out from air inlet pipe 2
Silicon tetrachloride and hydrogen mixed gas pass through floral disc 3 small spray orifice after rising is uniformly distributed in cavity of resorption 11, with sufficiently with
Silicon powder haptoreaction；Meanwhile floral disc 3 is also used to bear the weight of the solid material inside the hydrogenation reactor, such as silicon powder, catalyst
Deng.
It further, further include access hole 15, access hole 15 is arranged on the side wall of cylinder, and access hole 15 and cavity of resorption 11 connect
Lead to and is close in floral disc 3.Specifically, access hole 15 is located at the top of floral disc 3 and is close in floral disc 3.It is convenient to floral disc 3 in this way
It is overhauled, removes the solid material on floral disc 3, such as silicon powder, catalyst.
It further, further include discharge outlet 16, discharge outlet 16 is located at the bottom of cylinder 1, and is connected to cavity of resorption 11.Pass through
Discharge outlet 16 is set in the bottom of cylinder 1, when being overhauled to floral disc 3, can will be emitted in the solid material of 1 bottom of cylinder.
It should be noted that the element kit 4 of the embodiment of the present invention can packet layout, can also be with integral arrangement.The present invention
The hydrogenation reactor 100 of embodiment can be applicable in all similar gas-solid reaction equipment, and solid particle can directly be reacted with gas,
And the reactor that solid particle is easily carried over.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " illustrative examples ",
The description of " example ", " specific example " or " some examples " etc. means specific features described in conjunction with this embodiment or example, knot
Structure, material or feature are included at least one embodiment or example of the invention.In the present specification, to above-mentioned term
Schematic representation may not refer to the same embodiment or example.Moreover, specific features, structure, material or the spy of description
Point can be combined in any suitable manner in any one or more of the embodiments or examples.
Although an embodiment of the present invention has been shown and described, it will be understood by those skilled in the art that: not
A variety of change, modification, replacement and modification can be carried out to these embodiments in the case where being detached from the principle of the present invention and objective, this
The range of invention is defined by the claims and their equivalents.
Claims (9)
1. a kind of hydrogenation reactor characterized by comprising
Cylinder, the cylinder is vertically arranged, and the lower part and top of the cylinder are respectively equipped with air inlet pipe and exhaust outlet, the cylinder
The cavity of resorption and epicoele to communicate with each other is inside defined, the cavity of resorption is connected to the air inlet pipe, and the epicoele and the exhaust outlet connect
It is logical；
Silicon powder feeder pipe, the silicon powder feeder pipe penetrated outside the cylinder it is described under intracavitary, one end of the silicon powder feeder pipe
It is exported with silicon powder, the silicon powder outlet is intracavitary under described and is located at the top of the air inlet pipe；
Element kit, the element kit are embedded in the epicoele.
2. hydrogenation reactor according to claim 1, which is characterized in that the radial dimension of the epicoele is relative under described
The radial dimension of chamber is big.
3. hydrogenation reactor according to claim 2, which is characterized in that adapter cavity is further defined in the cylinder, it is described
Cavity of resorption is connected to by the adapter cavity with the epicoele, and adapter cavity radial dimension on bottom-up direction gradually increases
Greatly.
4. hydrogenation reactor described in any one of -3 according to claim 1, which is characterized in that the silicon powder feeder pipe is from institute
The top outer for stating cylinder is penetrated straight down to intracavitary under described, and silicon powder outlet is close in the epicoele.
5. hydrogenation reactor according to claim 4, which is characterized in that the silicon powder feeder pipe is from the top of the cylinder
Outside upright at centre is down through intracavitary under described.
6. hydrogenation reactor according to claim 1, which is characterized in that further include being arranged in the barrel chamber to be used for gas
Equally distributed floral disc is flowed, the floral disc is located at the top of the air inlet pipe.
7. hydrogenation reactor according to claim 6, which is characterized in that further include access hole, the access hole setting exists
On the side wall of the cylinder, the access hole is connected to the cavity of resorption and is close in the floral disc.
8. hydrogenation reactor according to claim 7, which is characterized in that the access hole is located at the top of the floral disc.
9. hydrogenation reactor according to claim 1, which is characterized in that further include discharge outlet, the discharge outlet is located at institute
The bottom of cylinder is stated, and is connected to the cavity of resorption.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811208017.0A CN109289711A (en) | 2018-10-17 | 2018-10-17 | Hydrogenation reactor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811208017.0A CN109289711A (en) | 2018-10-17 | 2018-10-17 | Hydrogenation reactor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109289711A true CN109289711A (en) | 2019-02-01 |
Family
ID=65162957
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811208017.0A Pending CN109289711A (en) | 2018-10-17 | 2018-10-17 | Hydrogenation reactor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109289711A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201372206Y (en) * | 2009-02-27 | 2009-12-30 | 比亚迪股份有限公司 | Facility for preparing trichlorosilane by silicon tetrachloride |
| US20100112744A1 (en) * | 2008-11-05 | 2010-05-06 | Hemlock Semiconductor Corporation | Silicon Production with a Fluidized Bed Reactor Utilizing Tetrachlorosilane to Reduce Wall Deposition |
| CN102001668A (en) * | 2010-11-24 | 2011-04-06 | 天津大学 | Silicon tetrachloride hydrogenation reactor introducing microcirculation distribution structure |
| CN102815705A (en) * | 2012-08-10 | 2012-12-12 | 中国恩菲工程技术有限公司 | System and method for preparing trichlorosilane through silicon tetrachloride cold hydrogenation |
| CN204672053U (en) * | 2015-06-08 | 2015-09-30 | 新特能源股份有限公司 | A kind of silica flour filter |
| CN209188721U (en) * | 2018-10-17 | 2019-08-02 | 中国恩菲工程技术有限公司 | Hydrogenation reactor |
-
2018
- 2018-10-17 CN CN201811208017.0A patent/CN109289711A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US20100112744A1 (en) * | 2008-11-05 | 2010-05-06 | Hemlock Semiconductor Corporation | Silicon Production with a Fluidized Bed Reactor Utilizing Tetrachlorosilane to Reduce Wall Deposition |
| CN201372206Y (en) * | 2009-02-27 | 2009-12-30 | 比亚迪股份有限公司 | Facility for preparing trichlorosilane by silicon tetrachloride |
| CN102001668A (en) * | 2010-11-24 | 2011-04-06 | 天津大学 | Silicon tetrachloride hydrogenation reactor introducing microcirculation distribution structure |
| CN102815705A (en) * | 2012-08-10 | 2012-12-12 | 中国恩菲工程技术有限公司 | System and method for preparing trichlorosilane through silicon tetrachloride cold hydrogenation |
| CN204672053U (en) * | 2015-06-08 | 2015-09-30 | 新特能源股份有限公司 | A kind of silica flour filter |
| CN209188721U (en) * | 2018-10-17 | 2019-08-02 | 中国恩菲工程技术有限公司 | Hydrogenation reactor |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN105694959B (en) | A kind of ejection-type common loop reactor for hydrocracking heavy oil | |
| CN209188721U (en) | Hydrogenation reactor | |
| CN108339548A (en) | A kind of nickel/aluminium oxide catalyst microballoon and preparation method thereof | |
| CN109289711A (en) | Hydrogenation reactor | |
| CN103203135B (en) | The exhaust particulate filtration system of MOCVD device and method | |
| CN103318963A (en) | Method for preparing fullerene-structured nano-WS2 and special fluidized bed reactor thereof | |
| CN201105991Y (en) | Polycrystalline silicon hydrogen reducing furnace | |
| CN107694225A (en) | Processing method of customized type inhibitory anti-virus photocatalyst filter core and products thereof | |
| CN211189606U (en) | Novel gas-water separator | |
| CN210796249U (en) | Air supply device for lime shaft kiln | |
| CN212167378U (en) | Liquid-liquid heterogeneous high-pressure micro-flow coil reactor for chemical industry | |
| CN110779339B (en) | Blast furnace slag crushing and waste heat recovery system | |
| CN203112963U (en) | Air-permeable polycrystalline ingot furnace crucible cover plate | |
| CN205927116U (en) | Flowing pressure pelletization device | |
| CN219424358U (en) | Fine powder supplementing system for organic silicon monomer synthesis | |
| CN206463927U (en) | A kind of piece-rate system for being hydrogenated with absorbing desulfurization catalyst and oil gas | |
| CN220424860U (en) | System for improve polycrystalline silicon reduction tail gas silica flour and retrieve | |
| CN210656184U (en) | Deacidifying device of fumed silica production usefulness | |
| CN211025466U (en) | Gravity type cyclone dust collector | |
| CN112742303B (en) | Integrated form alumina powder granulation system | |
| CN103349945A (en) | Movable type catalyst charging device and charging method thereof | |
| CN219488917U (en) | Silica flour lock is fought suitable for polycrystalline silicon device | |
| CN207614811U (en) | A kind of unpowered distribution device in gas-fluid | |
| CN215161067U (en) | Deacidifying device and nano particle preparation system | |
| CN219010345U (en) | Crude gas dust remover |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |