CN109285801A - A method of solving two-sided aluminium oxide structure PERC battery graphite boat pollution - Google Patents
A method of solving two-sided aluminium oxide structure PERC battery graphite boat pollution Download PDFInfo
- Publication number
- CN109285801A CN109285801A CN201810724522.4A CN201810724522A CN109285801A CN 109285801 A CN109285801 A CN 109285801A CN 201810724522 A CN201810724522 A CN 201810724522A CN 109285801 A CN109285801 A CN 109285801A
- Authority
- CN
- China
- Prior art keywords
- graphite boat
- layer
- aluminium oxide
- solving
- pollution
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/673—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere using specially adapted carriers or holders; Fixing the workpieces on such carriers or holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Formation Of Insulating Films (AREA)
Abstract
The present invention relates to PERC manufacture of solar cells technical fields, a kind of more particularly to method for solving two-sided aluminium oxide structure PERC battery graphite boat pollution, the following steps are included: first one layer of silicon nitride film layer is deposited on graphite boat surface, then in the redeposited one layer of membranous layer of silicon oxide in silicon nitride film surface.The present invention metal impurities inactivating performance and barrier properties excellent using silica, as the separation layer contacted between cell piece and graphite boat, passivation and isolation effect of the graphite boat superficial film to graphite boat surface metal ion can effectively be enhanced, it is therefore prevented that pollution of the graphite boat surface impurity to front side of silicon wafer aluminium oxide when back side coating film under hot conditions.
Description
Technical field
The present invention relates to PERC manufacture of solar cells technical field more particularly to a kind of two-sided aluminium oxide structures of solution
The method of PERC battery graphite boat pollution.
Background technique
PERC battery as the efficient mainstream technology of industry volume production, technological core be silicon wafer backside deposition aluminium oxide and
Silicon nitride, to play the role of passivated surface, improve long-wave response, to promote the transfer efficiency of battery.
There are two types of existing alumina deposit modes: PECVD and ALD method, the present invention is directed South Korea's equipment is supplied
The ALD equipment of quotient NCD company, the NCD equipment of the said firm have many advantages, such as that high production capacity, more preferable at film uniformity, maintenance period is long.
Process route is: making herbs into wool-diffusion-etching/back throwing-front side silicon nitride film deposition-two-sided pellumina of back side ALD mode is heavy
Product-back side silicon nitride deposits (PECVD)-laser slotting-silk-screen printing-sintering, and when ALD equipment deposition of aluminium oxide is
Double-sided deposition is deposited with aluminum oxide film layer simultaneously in silicon chip back side and front, in later process back side coating film, front oxidation
Aluminium can directly contact with graphite boat, this layer of aluminium oxide is since without annealing, structural stability is poor, overleaf when plated film
It is easy to be polluted by metal ion on graphite boat and carbon powder particle under hot conditions, causes cell piece EL pollution bad.
Summary of the invention
Dirt of the graphite boat surface impurity to front side of silicon wafer aluminium oxide when the present invention is in order to overcome back side coating film under hot conditions
The problem of dye, provides a kind of method for solving two-sided aluminium oxide structure PERC battery graphite boat pollution.
To achieve the goals above, the invention adopts the following technical scheme:
A method of solving two-sided aluminium oxide structure PERC battery graphite boat pollution, comprising the following steps: first in graphite boat table
Face deposits one layer of silicon nitride film layer, then in the redeposited one layer of membranous layer of silicon oxide in silicon nitride film surface.
The method that the present invention solves two-sided aluminium oxide structure PERC battery graphite boat pollution, i.e., a kind of novel graphite boat are full
And technique, which is: using the metal impurities inactivating performance and barrier properties that silica is excellent, as cell piece
The separation layer contacted between graphite boat, effectively enhance graphite boat superficial film to the passivation of graphite boat surface metal ion and
Isolation effect, it is therefore prevented that pollution of the graphite boat surface impurity to front side of silicon wafer aluminium oxide when back side coating film under hot conditions.
(1) it by the graphite boat after cleaning, drying, is sent into PECVD boiler tube, vacuumizes and be warming up to technique initialization temperature；
(2) it is passed through ammonia, silane under low pressure, opens radio-frequency power supply, completes graphite boat surface layer silicon nitride film layer in setting time
Deposition；
(3) it is passed through laughing gas, silane under low pressure, opens radio-frequency power supply, completes graphite boat superficial oxidation silicon film in setting time
Deposition；
(4) it vacuumizes, inflated with nitrogen back pressure, go out boat, complete entire technique.
Preferably, set temperature is controlled at 400 ~ 500 DEG C in step (1).
Preferably, pressure is controlled in 1300 ~ 1800mT in step (2)；The flow control of ammonia 4000 ~
8000sccm；The flow control of silane is in 400 ~ 1000sccm；Radio-frequency power is controlled in 4000 ~ 10000W；Setting time control
In 4000 ~ 7000s.
Preferably, pressure is controlled in 1300 ~ 1800mT in step (3)；The flow control of laughing gas 4000 ~
8000sccm；The flow control of silane is in 400 ~ 1000sccm；Radio-frequency power is controlled in 3000 ~ 6000W；Setting time control exists
100~600s。
Graphite boat is after the technique saturated process, according to normal process flow investment back side coating film production, tracking PERC electricity
Graphite boat pollutes bad sheet data under the piece EL of pond.
Therefore, the invention has the following beneficial effects: the metal impurities inactivating performances and block excellent using silica
Can, as the separation layer contacted between cell piece and graphite boat, graphite boat superficial film is effectively enhanced to graphite boat surface gold
Belong to passivation and the isolation effect of ion, it is therefore prevented that graphite boat surface impurity aoxidizes front side of silicon wafer when back side coating film under hot conditions
The pollution of aluminium.
Detailed description of the invention
Fig. 1 is graphite boat superficial film structural schematic diagram of the present invention.
Specific embodiment
Below by specific embodiment, and in conjunction with attached drawing, the technical solutions of the present invention will be further described.
In the present invention, if not refering in particular to, all devices and raw material is commercially available or the industry is common are following
Method in embodiment is unless otherwise instructed conventional method in that art.
Embodiment 1
(1) it by the graphite boat after cleaning, drying, is sent into PECVD boiler tube, vacuumizes and be warming up to 450 DEG C；
(2) it is passed through ammonia, the 1000sccm silane that flow is 8000sccm under 1700mT overpressure, opens radio-frequency power supply,
Radio frequency rate is 10000W, time 4000s, completes the deposition of graphite boat surface layer silicon nitride film layer；
(3) it is passed through laughing gas, the 1000sccm silane that flow is 8000sccm under 1700mT overpressure, opens radio-frequency power supply,
Radio frequency rate is 6000W, time 100s, completes the deposition of graphite boat superficial oxidation silicon film；
(4) it vacuumizes, inflated with nitrogen back pressure, go out boat, complete entire technique.
Graphite boat superficial film structure as shown in Figure 1, graphite boat after the technique saturated process, according to normal process flow
Back side coating film production is put into, the EL performance of cell piece is tracked, does not occur graphite boat pollution in 308, whole boat.
Embodiment 2
(1) it by the graphite boat after cleaning, drying, is sent into PECVD boiler tube, vacuumizes and be warming up to 500 DEG C；
(2) it is passed through ammonia, the 600sccm silane that flow is 6000sccm under 1700mT overpressure, opens radio-frequency power supply, penetrates
Frequency is 8000W, time 5500s, completes the deposition of graphite boat surface layer silicon nitride film layer；
(3) it is passed through laughing gas, the 600sccm silane that flow is 6000sccm under 1700mT overpressure, opens radio-frequency power supply, penetrates
Frequency is 5000W, time 300s, completes the deposition of graphite boat superficial oxidation silicon film；
(4) it vacuumizes, inflated with nitrogen back pressure, go out boat, complete entire technique.
Graphite boat superficial film structure as shown in Figure 1, graphite boat after the technique saturated process, according to normal process flow
Back side coating film production is put into, the EL performance of cell piece is tracked, does not occur graphite boat pollution in 308, whole boat.
Embodiment 3
(1) it by the graphite boat after cleaning, drying, is sent into PECVD boiler tube, vacuumizes and be warming up to 400 DEG C；
(2) it is passed through ammonia, the 600sccm silane that flow is 4000sccm under 1700mT overpressure, opens radio-frequency power supply, penetrates
Frequency is 6000W, time 5500s, completes the deposition of graphite boat surface layer silicon nitride film layer；
(3) it is passed through laughing gas, the 600sccm silane that flow is 4000sccm under 1700mT overpressure, opens radio-frequency power supply, penetrates
Frequency is 4000W, time 500s, completes the deposition of graphite boat superficial oxidation silicon film；
(4) it vacuumizes, inflated with nitrogen back pressure, go out boat, complete entire technique.
Graphite boat superficial film structure as shown in Figure 1, graphite boat after the technique saturated process, according to normal process flow
Back side coating film production is put into, the EL performance of cell piece is tracked, does not occur graphite boat pollution in 308, whole boat.
Comparative example
(1) it by the graphite boat after cleaning, drying, is sent into PECVD boiler tube, vacuumizes and be warming up to 450 DEG C；
(2) it is passed through ammonia, the 1000sccm silane that flow is 8000sccm under 1700mT overpressure, opens radio-frequency power supply,
Radio frequency rate is 10000W, time 5500s, completes graphite boat surface layer silicon nitride film deposition；
(3) it vacuumizes, inflated with nitrogen back pressure, go out boat, complete entire technique.
Comparative example does not deposit on graphite boat surface and makes silicon oxide film step, after the completion of technique, according to normal process stream
Journey puts into back side coating film production, tracks the EL performance of cell piece, occurs 200 graphite boats print pollution piece in 308, whole boat.
By the comparison of embodiment 1-3 and comparative example, the present invention metal impurities excellent using silica are further proved
Inactivating performance and barrier properties can effectively enhance graphite boat surface as the separation layer contacted between cell piece and graphite boat
Passivation and isolation effect of the film layer to graphite boat surface metal ion, it is therefore prevented that graphite boat surface when back side coating film under hot conditions
Pollution of the impurity to front side of silicon wafer aluminium oxide.
The foregoing is merely presently preferred embodiments of the present invention, is not intended to limit the present invention in any form, and is not surpassing
There are also other variations and modifications under the premise of technical solution documented by claim out.
Claims (5)
1. a kind of method for solving two-sided aluminium oxide structure PERC battery graphite boat pollution, which comprises the following steps:
One layer of silicon nitride film layer first is deposited on graphite boat surface, then in the redeposited one layer of membranous layer of silicon oxide in silicon nitride film surface.
2. a kind of method for solving two-sided aluminium oxide structure PERC battery graphite boat pollution according to claim 1, special
Sign is, comprising the following steps:
(1) it by the graphite boat after cleaning, drying, is sent into PECVD boiler tube, vacuumizes and be warming up to technique initialization temperature；
(2) it is passed through ammonia, silane under low pressure, opens radio-frequency power supply, completes graphite boat surface layer silicon nitride film layer in setting time
Deposition；
(3) it is passed through laughing gas, silane under low pressure, opens radio-frequency power supply, completes graphite boat superficial oxidation silicon film in setting time
Deposition；
(4) it vacuumizes, inflated with nitrogen back pressure, go out boat, complete entire technique.
3. a kind of method for solving two-sided aluminium oxide structure PERC battery graphite boat pollution according to claim 2, special
Sign is, in step (1), set temperature is controlled at 400 ~ 500 DEG C.
4. a kind of method for solving two-sided aluminium oxide structure PERC battery graphite boat pollution according to claim 2, special
Sign is, in step (2), pressure is controlled in 1300 ~ 1800mT；The flow control of ammonia is in 4000 ~ 8000sccm；The stream of silane
Amount control is in 400 ~ 1000sccm；Radio-frequency power is controlled in 4000 ~ 10000W；Setting time is controlled in 4000 ~ 7000s.
5. a kind of method for solving two-sided aluminium oxide structure PERC battery graphite boat pollution according to claim 2, special
Sign is, in step (3), pressure is controlled in 1300 ~ 1800mT；The flow control of laughing gas is in 4000 ~ 8000sccm；The stream of silane
Amount control is in 400 ~ 1000sccm；Radio-frequency power is controlled in 3000 ~ 6000W；Setting time is controlled in 100 ~ 600s.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810724522.4A CN109285801B (en) | 2018-07-04 | 2018-07-04 | Method for solving graphite boat pollution of PERC battery with double-sided alumina structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810724522.4A CN109285801B (en) | 2018-07-04 | 2018-07-04 | Method for solving graphite boat pollution of PERC battery with double-sided alumina structure |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109285801A true CN109285801A (en) | 2019-01-29 |
| CN109285801B CN109285801B (en) | 2021-05-14 |
Family
ID=65185554
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810724522.4A Active CN109285801B (en) | 2018-07-04 | 2018-07-04 | Method for solving graphite boat pollution of PERC battery with double-sided alumina structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109285801B (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113481487A (en) * | 2021-07-06 | 2021-10-08 | 横店集团东磁股份有限公司 | Solar cell and back surface PECVD method and application thereof |
| CN114038937A (en) * | 2021-10-09 | 2022-02-11 | 天合光能(宿迁)光电有限公司 | Graphite boat saturation process for improving click printing of perc single crystal battery |
| CN114107955A (en) * | 2021-11-18 | 2022-03-01 | 横店集团东磁股份有限公司 | Graphite boat pretreatment process for improving back passivation uniformity of two-in-one equipment |
Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2475212A1 (en) * | 2004-07-09 | 2006-01-09 | Mihai V. Scarlete | Silicon-based ceramic coatings for quartz crucibles for czochralski growth of silicon single crystals, similar unidirectional growth methods and similar semiconductor materials, and other applications requiring reduced chemical reactivity of fused silica |
| CN101990699A (en) * | 2008-04-17 | 2011-03-23 | 信越半导体股份有限公司 | Vertical boat for heat treatment and method for heat treatment of silicon wafer using the same |
| KR20120117240A (en) * | 2011-04-14 | 2012-10-24 | 주식회사 글로실 | Polycrystalline ingot growth equipment |
| CN103122479A (en) * | 2011-11-21 | 2013-05-29 | 常州市万阳光伏有限公司 | Combined crucible for preparing polycrystalline silicon ingot |
| CN103160803A (en) * | 2011-12-09 | 2013-06-19 | 浚鑫科技股份有限公司 | Graphite boat pretreatment method |
| CN104269351A (en) * | 2014-09-30 | 2015-01-07 | 上海华力微电子有限公司 | Method for overcoming stress defect of HCD silicon nitride sedimentation technology |
| CN105133007A (en) * | 2015-09-12 | 2015-12-09 | 无锡舜阳新能源科技股份有限公司 | High-purity coating type polycrystalline silicon crucible |
| CN105568372A (en) * | 2015-12-30 | 2016-05-11 | 佛山市业丰赛尔陶瓷科技有限公司 | Coating composition for graphite equipment of polycrystalline silicon ingot furnace |
| CN106024681A (en) * | 2016-07-27 | 2016-10-12 | 苏州阿特斯阳光电力科技有限公司 | Laminated membrane, graphite boat containing laminated membrane and preparation method thereof and graphite boat cleaning method |
| CN107287579A (en) * | 2017-06-07 | 2017-10-24 | 浙江爱旭太阳能科技有限公司 | The filming equipment and film plating process of tubular type PERC solar cells |
| CN107564844A (en) * | 2017-07-28 | 2018-01-09 | 韩华新能源（启东）有限公司 | A kind of graphite boat saturation double membrane structure and coating process and graphite boat |
-
2018
- 2018-07-04 CN CN201810724522.4A patent/CN109285801B/en active Active
Patent Citations (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CA2475212A1 (en) * | 2004-07-09 | 2006-01-09 | Mihai V. Scarlete | Silicon-based ceramic coatings for quartz crucibles for czochralski growth of silicon single crystals, similar unidirectional growth methods and similar semiconductor materials, and other applications requiring reduced chemical reactivity of fused silica |
| CN101990699A (en) * | 2008-04-17 | 2011-03-23 | 信越半导体股份有限公司 | Vertical boat for heat treatment and method for heat treatment of silicon wafer using the same |
| KR20120117240A (en) * | 2011-04-14 | 2012-10-24 | 주식회사 글로실 | Polycrystalline ingot growth equipment |
| CN103122479A (en) * | 2011-11-21 | 2013-05-29 | 常州市万阳光伏有限公司 | Combined crucible for preparing polycrystalline silicon ingot |
| CN103160803A (en) * | 2011-12-09 | 2013-06-19 | 浚鑫科技股份有限公司 | Graphite boat pretreatment method |
| CN104269351A (en) * | 2014-09-30 | 2015-01-07 | 上海华力微电子有限公司 | Method for overcoming stress defect of HCD silicon nitride sedimentation technology |
| CN105133007A (en) * | 2015-09-12 | 2015-12-09 | 无锡舜阳新能源科技股份有限公司 | High-purity coating type polycrystalline silicon crucible |
| CN105568372A (en) * | 2015-12-30 | 2016-05-11 | 佛山市业丰赛尔陶瓷科技有限公司 | Coating composition for graphite equipment of polycrystalline silicon ingot furnace |
| CN106024681A (en) * | 2016-07-27 | 2016-10-12 | 苏州阿特斯阳光电力科技有限公司 | Laminated membrane, graphite boat containing laminated membrane and preparation method thereof and graphite boat cleaning method |
| CN107287579A (en) * | 2017-06-07 | 2017-10-24 | 浙江爱旭太阳能科技有限公司 | The filming equipment and film plating process of tubular type PERC solar cells |
| CN107564844A (en) * | 2017-07-28 | 2018-01-09 | 韩华新能源（启东）有限公司 | A kind of graphite boat saturation double membrane structure and coating process and graphite boat |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113481487A (en) * | 2021-07-06 | 2021-10-08 | 横店集团东磁股份有限公司 | Solar cell and back surface PECVD method and application thereof |
| CN114038937A (en) * | 2021-10-09 | 2022-02-11 | 天合光能(宿迁)光电有限公司 | Graphite boat saturation process for improving click printing of perc single crystal battery |
| CN114107955A (en) * | 2021-11-18 | 2022-03-01 | 横店集团东磁股份有限公司 | Graphite boat pretreatment process for improving back passivation uniformity of two-in-one equipment |
| CN114107955B (en) * | 2021-11-18 | 2022-12-20 | 横店集团东磁股份有限公司 | Graphite boat pretreatment process for improving back passivation uniformity of two-in-one equipment |
Also Published As
| Publication number | Publication date |
|---|---|
| CN109285801B (en) | 2021-05-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109285801A (en) | A method of solving two-sided aluminium oxide structure PERC battery graphite boat pollution | |
| CN105810779B (en) | A kind of preparation method of PERC solar cells | |
| CN104201252B (en) | A kind of preparation method of PERC solaode | |
| CN103160803A (en) | Graphite boat pretreatment method | |
| CN104294206B (en) | The preparation method of high temperature creep-resisting ground connection substrate for a kind of semiconductor equipment | |
| CN109148643A (en) | A method of the PERC battery solving ALD mode is reduced in electrical pumping or light injection behind efficiency | |
| CN101962770A (en) | Intermediate and high temperature solar energy selective absorbing coating and preparation method thereof | |
| CN104465879B (en) | A kind of passivation on double surfaces method of solar cell | |
| CN102154708A (en) | Method for growing solar cell film | |
| CN109244019A (en) | A kind of graphite boat and its saturation process of crystal silicon solar PERC battery | |
| CN103400890A (en) | Reworking technology for striping re-plating of crystal silicon solar cell PECVD (plasma enhanced chemical vapor deposition) chromatic aberration slice | |
| CN104821345B (en) | Method for preparing anti-potential induced degradation solar cell | |
| CN105140306A (en) | Solar cell structure with anti-potential induced degradation (PID) effect and production method of solar cell structure | |
| CN108183149A (en) | A kind of production method of solar battery sheet | |
| CN106283052A (en) | A kind of two-dimensional material regulation and control silicon-carbon composite construction hydrogen resistance coating and preparation method thereof | |
| CN110106493A (en) | Utilize the method for Tubular PECVD device preparation backside passivation film | |
| CN102569531A (en) | Passivating method for polycrystalline silicon chips | |
| CN105970177B (en) | A kind of titanium carbide base high temperature solar energy selective absorption coating and preparation method thereof | |
| CN110429020A (en) | A kind of method that Tubular PECVD device prepares amorphous silicon membrane | |
| CN106784915A (en) | A kind of preparation method of stainless steel surfaces Graphene corrosion-inhibiting coating | |
| CN102181940B (en) | Preparation method of multicrystalline silicon texture | |
| CN104393061B (en) | A kind of crystal silicon solar energy battery antireflective coating and preparation technology thereof | |
| CN103213976A (en) | Method for directly preparing graphene on surface of substrate | |
| CN105603393A (en) | Magnesium alloy provided with graphene protection film and preparation method thereof | |
| CN103426976A (en) | Method for preparing polycrystalline silicon film by utilizing reusable substrate |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of invention: A Method for Solving the Pollution of Graphite Boats in Double sided Alumina Structure PERC Batteries Effective date of registration: 20230522 Granted publication date: 20210514 Pledgee: Dongyang Branch of China Construction Bank Co.,Ltd. Pledgor: HENGDIAN GROUP DMEGC MAGNETICS Co.,Ltd. Registration number: Y2023330000949 |