CN109280880A - A kind of rotatable removable target holder transmission device - Google Patents
A kind of rotatable removable target holder transmission device Download PDFInfo
- Publication number
- CN109280880A CN109280880A CN201710603757.3A CN201710603757A CN109280880A CN 109280880 A CN109280880 A CN 109280880A CN 201710603757 A CN201710603757 A CN 201710603757A CN 109280880 A CN109280880 A CN 109280880A
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- CN
- China
- Prior art keywords
- target holder
- transmission device
- bracket
- rotatable removable
- target
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000005540 biological transmission Effects 0.000 title claims abstract description 26
- 230000008878 coupling Effects 0.000 claims description 10
- 238000010168 coupling process Methods 0.000 claims description 10
- 238000005859 coupling reaction Methods 0.000 claims description 10
- 241000237858 Gastropoda Species 0.000 claims 1
- 238000012544 monitoring process Methods 0.000 abstract description 4
- 230000003287 optical effect Effects 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
Abstract
The present invention relates to transmission technical fields, more particularly to a kind of rotatable removable target holder transmission device.The rotatable removable target holder transmission device, including target holder mobile motor, bracket, guide rail, target holder rotating electric machine and vacuum tank.The present invention devises target holder mobile motor in the rotatable removable target holder transmission device of one kind and can be moved left and right by supporting band moving-target frame, and target holder rotating electric machine is able to drive target holder rotation.The device may be implemented under ultra-high vacuum state, and target holder is rotated and acted while mobile.The adjust automatically of distance between target holder and ion source is not only realized, but also this device cooperation optical monitoring system realizes the control of target holder position and movement speed-programmable, ensure that the uniformity of plated film film thickness.In short, the rotatable removable target holder transmission structures design is rationally, it is accurate that target holder positioning facilitates, and is suitble to promote the use of.
Description
Technical field
The present invention relates to transmission technical fields, more particularly to a kind of rotatable removable target holder transmission device.
Background technique
There is an optimum distance requirement in coating process between target and ion source, this position dimension is usually according to technique
Test directly is fixed after determining, needs by multiple repetition test, by repeatedly manually adjusting target holder and vacuum chamber
Connecting flange position, process is very cumbersome, time-consuming and laborious and inefficiency.
In order to solve the above-mentioned technical problem, the present invention devises a kind of rotatable removable target holder transmission device, this can be revolved
Turning target holder mobile motor in removable target holder transmission device can be moved left and right by supporting band moving-target frame, target holder rotating electric machine energy
Enough drive target holder rotation.The device may be implemented under ultra-high vacuum state, and target holder is rotated and acted while mobile.It is not only real
Showed the adjust automatically of distance between target holder and ion source, and this device cooperation optical monitoring system realize target holder position and
Movement speed PLC technology ensure that the uniformity of plated film film thickness.In short, the rotatable removable target holder transmission structures
Rationally, it is accurate that target holder positioning facilitates for design, is suitble to promote the use of.
Summary of the invention
In order to overcome defect present in background technique, the technical solution adopted by the present invention to solve the technical problems is:
A kind of rotatable removable target holder transmission device, including target holder mobile motor, bracket, guide rail, target holder rotating electric machine and vacuum tank,
The bracket is equipped with target holder, and the target holder is equipped with worm gear mechanism, and the bottom of the bracket is equipped with runner, the guide rail
It is fixed on the bottom of vacuum tank, the inside of vacuum tank, the target holder mobile motor and target holder rotating electric machine is arranged in the bracket
The outside of vacuum tank is set, lead-screw drive mechanism, the mobile electricity of the target holder are equipped between the target holder mobile motor and bracket
Machine can drive the runner of frame bottom to rotate along guide rail by lead-screw drive mechanism, the worm gear mechanism and target holder rotation
Universal coupling is equipped between rotating motor, the target holder rotating electric machine can be driven by worm gear mechanism and universal coupling
Target holder rotation.
The inside of vacuum tank is arranged in the preferred lead-screw drive mechanism and universal coupling.
The both ends of the preferred guide rail are equipped with baffle.
The present invention devises a kind of rotatable removable target holder transmission device, in the rotatable removable target holder transmission device
Target holder mobile motor can be moved left and right by supporting band moving-target frame, and target holder rotating electric machine is able to drive target holder rotation.The device
It may be implemented under ultra-high vacuum state, target holder is rotated and acted while mobile.Not only realize between target holder and ion source
The adjust automatically of distance, and this device cooperation optical monitoring system realizes the control of target holder position and movement speed-programmable,
It ensure that the uniformity of plated film film thickness.In short, the rotatable removable target holder transmission structures design is rationally, target holder positioning side
Just accurate, it is suitble to promote the use of.
Detailed description of the invention
Present invention will be further explained below with reference to the attached drawings and examples.
Fig. 1 is a kind of structural schematic diagram of rotatable removable target holder transmission device of the invention；
Wherein: 1, target holder mobile motor；2, lead-screw drive mechanism；3, target holder；4, worm gear mechanism；5, universal coupling；6,
Bracket；7, guide rail；8, target holder rotating electric machine；9, runner；10, baffle；11, vacuum tank.
Specific embodiment
In conjunction with the accompanying drawings, the present invention is further explained in detail.Attached drawing is simplified schematic diagram, only with signal side
Formula illustrates basic structure of the invention, therefore it only shows the composition relevant to the invention.
Specific embodiment, referring to Fig. 1, a kind of rotatable removable target holder transmission device, including target holder mobile motor 1,
Bracket 6, guide rail 7, target holder rotating electric machine 8 and vacuum tank 11, the bracket 6 are equipped with target holder 3, and the target holder 3 is equipped with worm gear
The bottom of worm mechanism 4, the bracket 6 is equipped with runner 9, and the guide rail 7 is fixed on the bottom of vacuum tank 11, and the bracket 6 is set
It sets in the inside of vacuum tank 11, the outside of vacuum tank 11 is arranged in the target holder mobile motor 1 and target holder rotating electric machine 8, described
Lead-screw drive mechanism 2 is equipped between target holder mobile motor 1 and bracket 6, the target holder mobile motor 1 can pass through lead screw transmission machine
Structure 2 drives the runner 9 of 6 bottom of bracket to rotate along guide rail 7, is equipped between the worm gear mechanism 4 and target holder rotating electric machine 8
Universal coupling 5, the target holder rotating electric machine 8 can drive target holder 3 to rotate by worm gear mechanism 4 and universal coupling 5,
The inside of vacuum tank 11 is arranged in the lead-screw drive mechanism 2 and universal coupling 5, and the both ends of the guide rail 7 are equipped with baffle 10.
The present invention devises a kind of rotatable removable target holder transmission device, in the rotatable removable target holder transmission device
Target holder mobile motor can be moved left and right by supporting band moving-target frame, and target holder rotating electric machine is able to drive target holder rotation.The device
It may be implemented under ultra-high vacuum state, target holder is rotated and acted while mobile.Not only realize between target holder and ion source
The adjust automatically of distance, and this device cooperation optical monitoring system realizes the control of target holder position and movement speed-programmable,
It ensure that the uniformity of plated film film thickness.In short, the rotatable removable target holder transmission structures design is rationally, target holder positioning side
Just accurate, it is suitble to promote the use of.
Obviously, the above embodiments are merely examples for clarifying the description, and does not limit the embodiments.It is right
For those of ordinary skill in the art, can also make on the basis of the above description it is other it is various forms of variation or
It changes.There is no necessity and possibility to exhaust all the enbodiments.And it is extended from this it is obvious variation or
It changes still within the protection scope of the invention.
Claims (3)
1. a kind of rotatable removable target holder transmission device, including the rotation of target holder mobile motor (1), bracket (6), guide rail (7), target holder
Rotating motor (8) and vacuum tank (11), it is characterised in that: the bracket (6) is equipped with target holder (3), and the target holder (3) is equipped with snail
The bottom of worm and gear mechanism (4), the bracket (6) is equipped with runner (9), and the guide rail (7) is fixed on the bottom of vacuum tank (11),
Bracket (6) setting exists in the inside of vacuum tank (11), the target holder mobile motor (1) and target holder rotating electric machine (8) setting
The outside of vacuum tank (11) is equipped with lead-screw drive mechanism (2) between the target holder mobile motor (1) and bracket (6), the target holder
Mobile motor (1) can drive the runner (9) of bracket (6) bottom to rotate along guide rail (7) by lead-screw drive mechanism (2), institute
It states and is equipped with universal coupling (5) between worm gear mechanism (4) and target holder rotating electric machine (8), target holder rotating electric machine (8) energy
Target holder (3) rotation is enough driven by worm gear mechanism (4) and universal coupling (5).
2. the rotatable removable target holder transmission device of one kind according to claim 1, it is characterised in that: the lead screw transmission
Mechanism (2) and universal coupling (5) are arranged in the inside of vacuum tank (11).
3. the rotatable removable target holder transmission device of one kind according to claim 2, it is characterised in that: the guide rail (7)
Both ends be equipped with baffle (10).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710603757.3A CN109280880A (en) | 2017-07-23 | 2017-07-23 | A kind of rotatable removable target holder transmission device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710603757.3A CN109280880A (en) | 2017-07-23 | 2017-07-23 | A kind of rotatable removable target holder transmission device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109280880A true CN109280880A (en) | 2019-01-29 |
Family
ID=65185972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201710603757.3A Pending CN109280880A (en) | 2017-07-23 | 2017-07-23 | A kind of rotatable removable target holder transmission device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109280880A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114166122A (en) * | 2021-12-02 | 2022-03-11 | 中国工程物理研究院流体物理研究所 | Automatic target adjusting device |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990075436A (en) * | 1998-03-20 | 1999-10-15 | 차동해 | Ion beam sputtering multilayer thin film manufacturing apparatus |
| CN104294232A (en) * | 2014-10-24 | 2015-01-21 | 杰莱特（苏州）精密仪器有限公司 | Ion sputtering film-plating machine |
| CN205329152U (en) * | 2016-01-29 | 2016-06-22 | 郑州启航精密科技有限公司 | Swivelling movement strutting arrangement of target |
| CN207062366U (en) * | 2017-07-23 | 2018-03-02 | 杰莱特（苏州）精密仪器有限公司 | A kind of rotatable removable target holder transmission device |
-
2017
- 2017-07-23 CN CN201710603757.3A patent/CN109280880A/en active Pending
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR19990075436A (en) * | 1998-03-20 | 1999-10-15 | 차동해 | Ion beam sputtering multilayer thin film manufacturing apparatus |
| CN104294232A (en) * | 2014-10-24 | 2015-01-21 | 杰莱特（苏州）精密仪器有限公司 | Ion sputtering film-plating machine |
| CN205329152U (en) * | 2016-01-29 | 2016-06-22 | 郑州启航精密科技有限公司 | Swivelling movement strutting arrangement of target |
| CN207062366U (en) * | 2017-07-23 | 2018-03-02 | 杰莱特（苏州）精密仪器有限公司 | A kind of rotatable removable target holder transmission device |
Non-Patent Citations (1)
| Title |
|---|
| 张百方, 戴光曦, 周知明: "遥控三维调变的核反应靶架装置", 核技术, no. 03 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114166122A (en) * | 2021-12-02 | 2022-03-11 | 中国工程物理研究院流体物理研究所 | Automatic target adjusting device |
| CN114166122B (en) * | 2021-12-02 | 2023-08-01 | 中国工程物理研究院流体物理研究所 | Automatic target adjusting device |
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