CN109270636A - The method and fixed device of a kind of fiber coupling into light balancing device - Google Patents

The method and fixed device of a kind of fiber coupling into light balancing device Download PDF

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Publication number
CN109270636A
CN109270636A CN201811256956.2A CN201811256956A CN109270636A CN 109270636 A CN109270636 A CN 109270636A CN 201811256956 A CN201811256956 A CN 201811256956A CN 109270636 A CN109270636 A CN 109270636A
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CN
China
Prior art keywords
optical fiber
light
balancing device
light balancing
fixing piece
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Pending
Application number
CN201811256956.2A
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Chinese (zh)
Inventor
洪小苗
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Individual
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Individual
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Priority to CN201811256956.2A priority Critical patent/CN109270636A/en
Publication of CN109270636A publication Critical patent/CN109270636A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0927Systems for changing the beam intensity distribution, e.g. Gaussian to top-hat
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/09Beam shaping, e.g. changing the cross-sectional area, not otherwise provided for
    • G02B27/0938Using specific optical elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The method and fixed device of a kind of fiber coupling into light balancing device, it is that more thin optic fibres are first coupled into the single coarse optical fiber of multichannel, then it is then connected to light balancing device, feature is the single coarse optical fiber array arrangement of these multichannels, can be a column, it is also possible to multiple row, the light power of every road optical fiber is close, is uniformly coupled to light balancing device surface, both ensure that the optical uniformity of light balancing device rear end, fiber end face and light balancing device surface will not be burnt again, substantially increase practicability and safety.The present invention also provides the fixation device that multichannel simple optical fiber is coupled into light balancing device, solves the light leakage that light-emitting window occurs with light balancing device misalignment in the prior art, improve coupling efficiency.

Description

The method and fixed device of a kind of fiber coupling into light balancing device
Technical field
The invention belongs to laser direct-writing exposure machine technical field, it is related to a kind of fiber coupling into the method for light balancing device and solid Determine device.
Background technique
In laser direct-writing exposure machine field, especially in the application such as printed wiring board plate-making and plate-making of screen process, to exposure The whole optical efficiency of light working face optical uniformity and exposure system requires very tight.The lines that optical uniformity influences the entire space of a whole page are thick The uniformities such as thin and site size, and the whole optical efficiency of exposure system directly determines the power production capacity of equipment.
In the prior art, directly more derived from semiconductor laser (generally at 10 or more) thin optic fibres are bundled to one Beam is coupled into light balancing device again.In production, light output end thin optic fibre is unevenly distributed a branch of optical fiber, after leading to light balancing device The light uniformity at end reduces;And in order to when end surface grinding optical fiber do not shake, between every optical fiber can potting resin glue consolidated Fixed, in order to guarantee coupling efficiency, light-emitting window diametric requirements very little (generally within 1mm), and whole beam optical fiber light power will reach To 10W or more, some occasions need to reach the fiber power of 20W.In this way, the energy density of optical fiber light-emitting window is excessive, at work, It is excessively high to will cause light-emitting window position local temperature, as long as there is speck of dust attachment, it will the resin glue kindling for inducing filling is burnt Device is damaged on fiber end face and light balancing device surface.
In addition, the peripheral fixture of whole beam optical fiber is circle symmetrical structure, this is because being distributed not when multifiber bundlees Uniformly, it is rotated or is translated etc. and adjusted, so that the light that goes out of light balancing device rear end is evenly distributed as far as possible, will cause in this way Light-emitting window and light balancing device misalignment and have light leak situation appearance, reduce coupling efficiency between the two.
Therefore, how to solve the above problems, be those skilled in the art the content of important research.
Summary of the invention
To overcome the deficiencies in the prior art described above, the present invention provides a kind of fiber coupling into light balancing device method and Fixed device, improves safety, coupling efficiency and the service life of device.
In order to achieve the above objects and other related objects, the present invention provide a kind of fiber coupling into light balancing device method, Complex root thin optic fibre is first coupled into the single coarse optical fiber of at least two-way;The single coarse optical fiber of this at least two-way is arranged in array; The light power of every single coarse optical fiber in road is same or similar;The single coarse optical fiber of this at least two-way is uniformly coupled to even light again The surface of device.
In above scheme, related content is explained as follows:
1, in above scheme, the single coarse optical fiber of at least two-way is arranged in a column arrangement or in multiple row.Every road optical fiber goes out Optical power is close, is uniformly coupled to light balancing device surface, not only ensure that the optical uniformity of light balancing device rear end, but also will not burn Fiber end face and light balancing device surface, substantially increase practicability and safety.
2, in above scheme, the light balancing device is the even smooth square rod that a section is rectangle, is coated with optics on the section Anti-reflection film.It, which is acted on, is managed using the total reflection of light, and light passes through multiple reflections inside square rod, and every secondary reflection can all be formed virtually Light source picture, multiple reflections form two-dimensional virtual light source matrix, so that light is more uniform, make the light by itself, Achieve the effect that homogenization in exit.
3, in above scheme, the optical fiber edge of the single coarse optical fiber is filled with fixing resin glue.Fixed resin Glue is filled only at optical fiber edge, and out without resin glue in optical range, therefore resin glue is not easy to burn at work, will not also damage light Fine and light balancing device surface.
4, in above scheme, the light out of uneven distribution is preliminary when the single coarse optical fiber bundlees more thin optic fibres It homogenizes, the light balancing device of rear end is further homogenized and plays help.
5, in above scheme, the single coarse optical fiber of at least two-way has been averaged the gross output of laser, the road Shi Mei The light power of single coarse optical fiber substantially reduces, and light-emitting window energy density reduces, and is a protection to light output end, while to even light The anti-reflection film system of device surface requires also to reduce.
A kind of fixation device of fiber coupling into light balancing device, including thin optic fibre, single coarse optical fiber, light balancing device, optical fiber Fixing piece, light balancing device fixing piece and gland cap;The thin optic fibre is complex root, is coupled into the single coarse optical fiber of at least two-way Interior, the optical fiber fixing piece is the T-shaped stepped ramp type cylinder in section, is corresponded on the center of the optical fiber fixing piece a plurality of single Coarse optical fiber is equipped with the through-hole being arranged in array;The light balancing device fixing piece through the clinching of gland cap on the optical fiber fixing piece simultaneously The fixed light balancing device;The optical fiber fixing piece is equipped with dowel hole, and the light balancing device fixing piece and the optical fiber are solid Determine located pin between part to fix.
In above scheme, related content is explained as follows:
1, in above scheme, the through-hole being arranged in array is a column arrangement or multiple row arrangement.
2, in above scheme, the edge that the single coarse optical fiber is contacted with the through-hole end is filled with fixing resin Glue.
3, in above scheme, the through-hole has guide-localization function, does not need to rotate or translate online etc. to adjust, guarantee The road Liao Mei optical fiber goes out light and is coupled into light balancing device completely by design requirement and occurs without light leak situation, improves whole optics effect Rate.
Since above-mentioned technical proposal is used, compared with the prior art, the invention has the beneficial effects that:
Fiber coupling provided by the invention is that more thin optic fibres are first coupled into the single thick light of multichannel into the method for light balancing device Then fibre is then connected to light balancing device, feature is the single coarse optical fiber array arrangement of these multichannels, can be a column, is also possible to The light power of multiple row, every road optical fiber is close, is uniformly coupled to light balancing device surface, both ensure that the light of light balancing device rear end Uniformity, and fiber end face and light balancing device surface will not be burnt, substantially increase practicability and safety.The present invention also provides Multichannel simple optical fiber is coupled into the fixation device of light balancing device, solves light-emitting window in the prior art and light balancing device misalignment And the light leakage occurred, improve coupling efficiency.Based on this, the present invention has substantive distinguishing features outstanding and significant progress.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that multi-channel optical fibre of the invention is coupled into light balancing device;
Fig. 2 is the structural schematic diagram of multi-channel optical fibre and optic fibre fixing device of the invention;
Fig. 3 is the structural schematic diagram that multi-channel optical fibre of the invention is in column array arrangement;
Fig. 4 is the structural schematic diagram one that multi-channel optical fibre of the invention is in multiple row array arrangement;
Fig. 5 is the structural schematic diagram two that multi-channel optical fibre of the invention is in multiple row array arrangement.
In the figures above: 1, thin optic fibre beam;2, single coarse optical fiber;3, optic fibre fixing device;4, light balancing device;5, light uniforming device Part fixes device;6, gland cap;21, first via coarse optical fiber;22, the second road coarse optical fiber;23, third road coarse optical fiber;24, the 4th tunnel Coarse optical fiber;25, the 5th road coarse optical fiber;26, the 6th road coarse optical fiber;31, dowel hole.
Specific embodiment
Embodiments of the present invention are described with reference to the drawings by particular specific embodiment below, those skilled in the art can It is understood other advantages and efficacy of the present invention easily by content disclosed by this specification.
Embodiment:
As Figure 1-Figure 5, complex root thin optic fibre 1 is first coupled at least two into the method for light balancing device by a kind of fiber coupling The single coarse optical fiber 2 on road;The single coarse optical fiber 2 of this at least two-way is arranged in array;The light power phase of every single coarse optical fiber 2 in road It is same or close;The single coarse optical fiber 2 of this at least two-way is uniformly coupled to the surface of light balancing device 4 again.
As shown in figure 3, first via coarse optical fiber 21, the second road coarse optical fiber 22, third road coarse optical fiber 23, the 4th road coarse optical fiber 24 In a column arrangement;As shown in figure 4, first via coarse optical fiber 21, the second road coarse optical fiber 22, third road coarse optical fiber 23, the 4th thick light in road Fibre 24 is arranged side by side in two column;As shown in figure 5, first via coarse optical fiber 21, the second road coarse optical fiber 22, third road coarse optical fiber 23, Four road coarse optical fibers 24, the 5th road coarse optical fiber 25, the 6th road coarse optical fiber 26 are arranged side by side in two column;The light power phase of every road optical fiber Closely, it is uniformly coupled to light balancing device surface, not only ensure that the optical uniformity of light balancing device rear end, but also fiber end face will not be burnt With light balancing device surface, practicability and safety are substantially increased.
The light balancing device 4 is the even smooth square rod that a section is rectangle, is coated with optical anti-reflective film (in figure not on the section It shows).It, which is acted on, is managed using the total reflection of light, and light passes through multiple reflections inside square rod, and every secondary reflection can all be formed virtually Light source picture, multiple reflections form two-dimensional virtual light source matrix, so that light is more uniform, make the light by itself, Achieve the effect that homogenization in exit.
The optical fiber edge of the single coarse optical fiber 2 is filled with fixing resin glue (not shown).Fixed resin Glue is filled only at optical fiber edge, and out without resin glue in optical range, therefore resin glue is not easy to burn at work, will not also damage light Fine and light balancing device surface.
The single coarse optical fiber 2 homogenizes the light that goes out of uneven distribution when more thin 1 bindings tentatively, to the even of rear end Optical device 4, which further homogenizes, plays help.
The single coarse optical fiber 2 of at least two-way has been averaged the gross output of laser, the single coarse optical fiber 2 in the road Shi Mei Light power substantially reduces, and light-emitting window energy density reduces, and is protection to light output end, while the increasing to light balancing device surface Permeable membrane system requires also to reduce.
A kind of fixation device of fiber coupling into light balancing device, including thin optic fibre 1, single coarse optical fiber 2, light balancing device 4, light Fine fixing piece 3, light balancing device fixing piece 5 and gland cap 6;The thin optic fibre 1 is complex root, is coupled into the single thick of at least two-way In optical fiber 2, the optical fiber fixing piece 3 is the T-shaped stepped ramp type cylinder in section, is corresponded on the center of the optical fiber fixing piece 3 multiple Several single coarse optical fibers 2 are equipped with the through-hole (not shown) being arranged in array;The light balancing device fixing piece 5 is through gland cap 6 Clinching is on the optical fiber fixing piece 3 and fixes the light balancing device 4;The optical fiber fixing piece 4 is equipped with dowel hole 31, institute Located pin (not shown) between light balancing device fixing piece 5 and the optical fiber fixing piece 3 is stated to fix.
The through-hole being arranged in array is a column arrangement or multiple row arrangement.
The edge that the single coarse optical fiber 2 is contacted with through-hole (not shown) end is filled with fixing resin Glue.
The through-hole has guide-localization function, does not need to rotate or translate online etc. to adjust, ensure that every road optical fiber goes out Light is coupled into light balancing device completely by design requirement and occurred without light leak situation, improves whole optical efficiency.
Fiber coupling provided by the invention is that more thin optic fibres are first coupled into multichannel is single thick into the method for light balancing device Then optical fiber is then connected to light balancing device, feature is the single coarse optical fiber array arrangement of these multichannels, can be a column, can also be with It is multiple row, the light power of every road optical fiber is close, is uniformly coupled to light balancing device surface, both ensure that light balancing device rear end Optical uniformity, and fiber end face and light balancing device surface will not be burnt, substantially increase practicability and safety.The present invention also mentions It has supplied multichannel simple optical fiber to be coupled into the fixation device of light balancing device, has solved light-emitting window in the prior art and light balancing device is not right Quasi- and appearance light leakage, improves coupling efficiency.Based on this, the present invention has substantive distinguishing features outstanding and significant progress.
The above-described embodiments merely illustrate the principles and effects of the present invention, and is not intended to limit the present invention.It is any ripe The personage for knowing this technology all without departing from the spirit and scope of the present invention, carries out modifications and changes to above-described embodiment.Cause This, institute is complete without departing from the spirit and technical ideas disclosed in the present invention by those of ordinary skill in the art such as At all equivalent modifications or change, should be covered by the claims of the present invention.

Claims (7)

1. a kind of fiber coupling is into the method for light balancing device, it is characterised in that: complex root thin optic fibre is first coupled at least two-way Single coarse optical fiber;The single coarse optical fiber of this at least two-way is arranged in array;The light power of every single coarse optical fiber in road it is identical or It is close;The single coarse optical fiber of this at least two-way is uniformly coupled to the surface of light balancing device again.
2. fiber coupling according to claim 1 is into the method for light balancing device, it is characterised in that: the list of at least two-way Root thickness optical fiber is arranged in a column arrangement or in multiple row.
3. fiber coupling according to claim 1 is into the method for light balancing device, it is characterised in that: the light balancing device is one Section is the even smooth square rod of rectangle, is coated with optical anti-reflective film on the section.
4. fiber coupling according to claim 1 is into the method for light balancing device, it is characterised in that: the single coarse optical fiber Optical fiber edge is filled with fixing resin glue.
5. a kind of fiber coupling is into the fixation device of light balancing device, it is characterised in that: including thin optic fibre, single coarse optical fiber, even light Device, optical fiber fixing piece, light balancing device fixing piece and gland cap;The thin optic fibre is complex root, is coupled into the list of at least two-way In root thickness optical fiber, the optical fiber fixing piece is the T-shaped stepped ramp type cylinder in section, is corresponded on the center of the optical fiber fixing piece multiple Several single coarse optical fibers are equipped with the through-hole being arranged in array;The end center of the optical fiber fixing piece is arranged in the light balancing device Position;The light balancing device fixing piece on the optical fiber fixing piece and fixes the light balancing device through the clinching of gland cap;It is described Optical fiber fixing piece is equipped with dowel hole, and located pin is fixed between the light balancing device fixing piece and the optical fiber fixing piece.
6. fiber coupling according to claim 5 is into the fixation device of light balancing device, it is characterised in that: described to be arranged in array The through-hole of cloth is a column arrangement or multiple row arrangement.
7. fiber coupling according to claim 5 is into the fixation device of light balancing device, it is characterised in that: the single thick light The fine edge contacted with the through-hole end is filled with fixing resin glue.
CN201811256956.2A 2018-10-26 2018-10-26 The method and fixed device of a kind of fiber coupling into light balancing device Pending CN109270636A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811256956.2A CN109270636A (en) 2018-10-26 2018-10-26 The method and fixed device of a kind of fiber coupling into light balancing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811256956.2A CN109270636A (en) 2018-10-26 2018-10-26 The method and fixed device of a kind of fiber coupling into light balancing device

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CN109270636A true CN109270636A (en) 2019-01-25

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Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1419657A (en) * 2000-04-03 2003-05-21 高准光源科技有限公司 Optical system including coupler for transmitting light between a single fiber light guide and multiple single fiber light guides
CN1896787A (en) * 2005-12-16 2007-01-17 中国科学院长春光学精密机械与物理研究所 Multi-lightbeam laser synthetic homogenizer
CN105334588A (en) * 2015-12-01 2016-02-17 南京春辉科技实业有限公司 Optical fiber with coupler and preparation method of optical fiber
CN205539934U (en) * 2016-03-18 2016-08-31 江苏影速光电技术有限公司 Hinder exposure system fiber optic coupling formula of welding light source module
CN106094222A (en) * 2016-08-23 2016-11-09 江苏北方湖光光电有限公司 A kind of high quality beam homogenizing method in semiconductor laser illumination
CN106308731A (en) * 2016-08-31 2017-01-11 北京数字精准医疗科技有限公司 Endoscopic multi-spectrum excited imaging system
CN206479726U (en) * 2016-12-23 2017-09-08 苏州亿拓光电科技有限公司 Even photosystem
CN207216169U (en) * 2017-09-26 2018-04-10 云南先勘科技开发有限公司 A kind of even smooth optical system of lenticule
CN207831254U (en) * 2018-01-16 2018-09-07 深圳市中科创激光技术有限公司 A kind of three color laser headlights

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1419657A (en) * 2000-04-03 2003-05-21 高准光源科技有限公司 Optical system including coupler for transmitting light between a single fiber light guide and multiple single fiber light guides
CN1896787A (en) * 2005-12-16 2007-01-17 中国科学院长春光学精密机械与物理研究所 Multi-lightbeam laser synthetic homogenizer
CN105334588A (en) * 2015-12-01 2016-02-17 南京春辉科技实业有限公司 Optical fiber with coupler and preparation method of optical fiber
CN205539934U (en) * 2016-03-18 2016-08-31 江苏影速光电技术有限公司 Hinder exposure system fiber optic coupling formula of welding light source module
CN106094222A (en) * 2016-08-23 2016-11-09 江苏北方湖光光电有限公司 A kind of high quality beam homogenizing method in semiconductor laser illumination
CN106308731A (en) * 2016-08-31 2017-01-11 北京数字精准医疗科技有限公司 Endoscopic multi-spectrum excited imaging system
CN206479726U (en) * 2016-12-23 2017-09-08 苏州亿拓光电科技有限公司 Even photosystem
CN207216169U (en) * 2017-09-26 2018-04-10 云南先勘科技开发有限公司 A kind of even smooth optical system of lenticule
CN207831254U (en) * 2018-01-16 2018-09-07 深圳市中科创激光技术有限公司 A kind of three color laser headlights

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