CN109269742A - A kind of vacuum sealing valve leak rate test macro and method - Google Patents
A kind of vacuum sealing valve leak rate test macro and method Download PDFInfo
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- CN109269742A CN109269742A CN201811438437.8A CN201811438437A CN109269742A CN 109269742 A CN109269742 A CN 109269742A CN 201811438437 A CN201811438437 A CN 201811438437A CN 109269742 A CN109269742 A CN 109269742A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/26—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors
- G01M3/28—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds
- G01M3/2876—Investigating fluid-tightness of structures by using fluid or vacuum by measuring rate of loss or gain of fluid, e.g. by pressure-responsive devices, by flow detectors for pipes, cables or tubes; for pipe joints or seals; for valves ; for welds for valves
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Abstract
A kind of vacuum sealing valve leak rate test macro of the present invention and method, including the first and second vacuum pump groups, leak detector, vacuum chamber, vacuum valve test cover, pressure gauge, referance leak, vacuum gauge, gas source and the first to the 7th vacuum valve, wherein the first vacuum pump group is separately connected vacuum chamber by the second vacuum valve by the first vacuum valve, leak detector；Vacuum chamber is connect with one end of vacuum gauge, the 3rd the 5th vacuum valve respectively；The other end of 5th vacuum valve connects referance leak；Tested vacuum valve is mounted in vacuum valve test cover, and one end of tested vacuum valve is connect with the third vacuum valve other end and its other end is connect with the 4th vacuum valve, pressure gauge respectively；Gas source leads to the 7th vacuum valve by the 6th vacuum valve, the second vacuum pump group and connect respectively with vacuum valve test cover.The present invention realizes the quantitative test of vacuum valve part leak rate and full-leakage rate, greatly improves vacuum sealing valve leakage rate measurement uncertainty.
Description
Technical field
The invention belongs to vacuum test technical field, it is related to a kind of vacuum sealing valve leak rate test macro and method.
Background technique
Vacuum valve is the vacuum for being used to be isolated (cutting) air-flow in vacuum system, adjusting air flow rate, distributing air-flow
Element, no matter all occupying an important position in simple or complicated vacuum system, the size of leak rate often becomes one very
Empty set, which is united, reaches the short slab of certain vacuum degree.
However currently for the test of vacuum valve leak rate, although Chinese development and the reform committee have issued Chinese machinery
Industry vacuum valve standard JB/T6446-2004, but blowing process and helium cover method are only gived, specific test macro is not done
It illustrates out, so there is the exfactory inspection system of oneself in each producer, also there is the evaluation of oneself at each provinces and cities' quality surveillance center
System and method, and it is most be all easy configuration one leak detector carries out leak rate test, there are uncertainty of measurement compared with
Greatly, the feelings inconsistent there are the different obtained test result of same kind vacuum valve test macro of different manufacturers production
Condition.
Summary of the invention
Problems to be solved by the invention are that structure is complicated and vacuum sealing for the test of solution current vacuum sealed valve leak rate
The larger problem for leading to test result inaccuracy of valve leakage rate measurement uncertainty.
Technological means for solving project is, the present invention proposes a kind of vacuum sealing valve leak rate test macro and side
Method, the comparison for increasing corresponding referance leak progress leak rate according to demand obtain tested vacuum sealing valve leak rate value, mention significantly
The high uncertainty of measurement of vacuum sealing valve leak rate test.
A kind of vacuum sealing valve leak rate test macro proposed by the present invention, including the first and second vacuum pump groups, leak detection
Instrument, vacuum chamber, vacuum valve test cover, pressure gauge, referance leak, vacuum gauge, gas source and the first to the 7th vacuum valve,
In the first vacuum pump group connect with vacuum chamber by the first vacuum valve, and leak detector passes through the second vacuum valve and vacuum chamber
Room connection；The vacuum chamber is connect with one end of vacuum gauge, one end of third vacuum valve, the 5th vacuum valve respectively；Institute
State the other end connection referance leak of the 5th vacuum valve；Tested vacuum valve is mounted in vacuum valve test cover, and by
Survey vacuum valve one end connect with the third vacuum valve other end and the other end of tested vacuum valve respectively with the 4th vacuum
Valve, pressure gauge connection；And the gas source passes through the 7th vacuum valve point by the 6th vacuum valve, the second vacuum pump group
It is not connect with vacuum valve test cover.
Further, as a preferred technical solution of the present invention: the vacuum gauge include diaphragm vacuum gauge and
One ionization vacuum ga(u)ge.
A kind of test method based on vacuum sealing valve leak rate test macro proposed by the present invention, comprising the following steps:
Step 1: the tested vacuum valve of closing being installed in vacuum valve test cover, and tested vacuum valve is connected
The third vacuum valve other end is connected to the 4th vacuum valve；
Step 2: opening third vacuum valve, and closing second and the 5th vacuum valve；
Step 3: the first vacuum valve is opened, setting vacuum degree is evacuated down to vacuum chamber by the first vacuum pump group,
And vacuum valve leak rate is obtained by vacuum gauge and tests vacuum degree；
Step 4: opening the 7th vacuum valve, vacuum valve test cover is evacuated down to setting very by the second vacuum pump group
Reciprocal of duty cycle, to be cleaned to vacuum valve test cover；
Step 5: third vacuum valve being closed, the second vacuum valve is opened and records the background indicating value on leak detector at this time
I0；
Step 6: opening the 5th vacuum valve, record standard leak hole indicating value Qs, and record the indicating value I on leak detectors；
Step 7: closing the 5th vacuum valve；
Step 8: opening the 6th vacuum valve, quantitative gas is filled with into vacuum valve test cover by gas source, passes through pressure
Power meter obtains gas pressure in vacuum valve test cover and records the numerical value of pressure gauge；
Step 9: opening third vacuum valve, record the indicating value I of leak detectorL；
Step 10: according to the background indicating value I of gained leak detector0With indicating value Is, indicating value ILAnd referance leak indicating value QsIt calculates
Tested vacuum valve full-leakage rate QL。
Further, as a preferred technical solution of the present invention: calculating tested vacuum valve leakage in the step 10
Rate QLUsing formula:
Invention effect are as follows:
Vacuum sealing valve leak rate test macro of the invention and method, the basic principle is that being accessed in tested vacuum valve
Whole system leak detector is tested to certain leak rate value before vacuum main chamber body portion, opens referance leak part later,
Whole system leak rate is tested with leak detector to obtain certain leak rate value, turns off referance leak for tested vacuum valve part of detecting
Access system as requested tests whole system leak rate by leak detector to obtain certain leak rate value, finally according to certain formula
Tested vacuum valve access part leak rate value is calculated.
The comparison that the present invention can increase corresponding referance leak progress leak rate according to demand obtains tested vacuum sealing valve
Leak rate value, and a set of vacuum sealing valve leak rate test macro is realized according to the method, while realizing vacuum valve part
The quantitative test of leak rate and full-leakage rate greatly improves the uncertainty of measurement of vacuum sealing valve leak rate test.
Detailed description of the invention
Fig. 1 is the schematic diagram of vacuum sealing valve leak rate test macro of the present invention.
Fig. 2 is the structural schematic diagram of vacuum sealing valve leak rate test macro of the present invention.
Wherein Symbol explanation: the first vacuum pump group of 1-；2,3,5,9,10,15,18- first to the 7th vacuum valve；4- inspection
Leak instrument；6- vacuum valve test cover；7- is tested vacuum valve；8- pressure gauge；11- referance leak；12,13- vacuum gauges；14- is true
Plenum chamber；16- gas source, the second vacuum pump group of 17-.
Specific embodiment
Hereinafter, being described in detail based on attached drawing for the present invention.
As shown in Figure 1, the present invention devises a kind of vacuum sealing valve leak rate test macro, which mainly includes being tested
Vacuum valve accesses part, vacuum main chamber body portion, vacuum measurement part, referance leak part, leak detector part.
Vacuum valve access part is connect with vacuum main chamber body portion, for extracting to the tested vacuum valve other side
Vacuum obtains certain vacuum degree；The vacuum measurement part is connect with vacuum main chamber body portion, for vacuum main cavity portion
Point vacuum degree measures；The referance leak part is connect with vacuum main chamber body portion, for being tested vacuum valve leak rate
Test provides reference；The leak detector part is connect with vacuum main chamber body portion；For to referance leak and tested vacuum valve
Leak rate is tested.The tested vacuum valve access section point include tested vacuum valve, vacuum valve test cover, pressure gauge,
Vent valve, gas source, air source control valve, vacuum pump pumping group, for being connect to tested vacuum valve test cover and tested vacuum valve
Oral area point is filled with the higher gas of purity；The tested vacuum valve is packed into vacuum valve test cover, for leaking entirely to vacuum valve
Rate is tested, and connection pressure gauge is filled with gas pressure value for measuring on test cover in test cover；The tested vacuum valve is direct
It is installed on gas source pipe, for testing vacuum valve part leak rate, connection pressure gauge is for measuring in test cover on pipeline
It is filled with gas pressure value；The vent valve is connect with vacuum valve test cover or gas source pipe, for taking out tested vacuum valve
Effect；The gas source is connect with air source control valve with vacuum valve test cover, for whole to vacuum valve or part to be filled with one
Constant-pressure gas.The vacuum main chamber body portion includes a vacuum cavity and a set of vacuum pump group system；The leak detector with
The vacuum pump system part of vacuum main chamber body portion connects, and obtains for system certain vacuum degree and leak rate is tested；The vacuum
Spending measurement portion point includes a diaphragm vacuum gauge and an ionization vacuum ga(u)ge, for the chamber vacuum degree for wide-range range into
Row measurement.
Specifically, the present invention provides one embodiment, as shown in Fig. 2, system mainly includes the first vacuum pump group 1 and second
Vacuum pump group 17, leak detector 4, vacuum chamber 14, vacuum valve test cover 6, pressure gauge 8, referance leak 11, vacuum gauge 12,13,
Gas source 16 and the first to the 7th vacuum valve 2,3,5,9,10,15,18, wherein the first vacuum pump group 1 passes through the first vacuum valve 2
It is connect with vacuum chamber 14, and leak detector 4 is connect by the second vacuum valve 3 with vacuum chamber 14；The vacuum chamber 14 divides
It is not connected with one end of vacuum gauge 12,13, one end of third vacuum valve 5, the 5th vacuum valve 10；5th vacuum valve 10
The other end connect referance leak 11；Tested vacuum valve 7 is installed, i.e., by tested vacuum valve in the vacuum valve test cover 6
Door 7 is mounted in vacuum valve test cover 6, and one end of tested vacuum valve 7 is connect with 5 other end of third vacuum valve, and
The other end of tested vacuum valve 7 is connect with the 4th vacuum valve 9, pressure gauge 8 respectively.And the gas source 16 passes through the 6th
Vacuum valve 15, the second vacuum pump group 17 are connect with vacuum valve test cover 6 respectively by the 7th vacuum valve 18.
Preferably, wherein vacuum gauge includes a diaphragm vacuum gauge 12 and an ionization vacuum ga(u)ge 13.
Based on above system structure, the present invention proposes a kind of vacuum sealing valve leak rate test method, can carry out vacuum
The test of sealed valve full-leakage rate and the test of vacuum sealing valve part leak rate, specific implementation principle are as follows:
(1) vacuum sealing valve full-leakage rate is tested.
Vacuum valve full-leakage rate is tested, is to enter tested 7 integral installation of vacuum valve in one test cover 6, vacuum valve
Gate test cover 6 is connect through third vacuum valve 5 with vacuum cavity 14 by the external tapping of confined space, and tested vacuum valve 7
One end and one end of third vacuum valve 5 connect in vacuum valve test cover, and the other end difference of tested vacuum valve 7
It is connect by the external interface of vacuum valve test cover 6 with the 4th vacuum valve 9, pressure gauge 8；Place the sky of tested vacuum valve
Valve test cover 6 is connect through the 6th vacuum valve 15 with gas source 16 by external interface, is tested 7 full-leakage rate of vacuum valve when testing
When, it is filled with the gas of the certain pressure of requirement in test cover 6, opens third vacuum valve 5, it will by the first vacuum pump group 1
Specified vacuum degree in vacuum cavity, high-pressure air source can be entered by being tested the leak hole of vacuum valve 7 in vacuum valve test cover 6
In vacuum cavity 14, entered in leak detector 4 by the first vacuum pump group 1, thus realize the measurement of tested vacuum valve full-leakage rate,
It is as follows that its full-leakage rate tests expression formula:
Wherein: I0--- vacuum system background leak detector indicating value；Is--- leak detector indicating value after referance leak access system；
IL--- leak detector indicating value after tested vacuum valve access；Qs--- the standard leak rate of referance leak；QL--- tested vacuum valve
Full-leakage rate.
Specific step is as follows for its test process:
Step 1: the tested vacuum valve 7 of closing is installed on vacuum valve test cover 6；
Step 2: opening third vacuum valve 5, and close the second vacuum valve 3 and the 5th vacuum valve 10；
Step 3: leak detector 4 being ready to, the first vacuum valve 2 is opened, by the first vacuum pump group 1 to vacuum chamber 14
It is evacuated down to the certain vacuum degree of setting, and vacuum valve leak rate is obtained by vacuum gauge 12 or 13 and tests vacuum degree；
Step 4: opening the 7th vacuum valve 18, vacuum valve test cover 6 is evacuated down to by the second vacuum pump group 17
Certain vacuum degree is set, is mainly used for cleaning vacuum valve test cover 6；
Step 5: third vacuum valve 5 being closed, the second vacuum valve 3 is opened and records the background on leak detector 4 at this time
Indicating value I0；
Step 6: opening the 5th vacuum valve 10, record standard leak hole indicating value Qs, and record the indicating value I on leak detector 4s；
Step 7: closing the 5th vacuum valve 10；
Step 8: the 6th vacuum valve 15 is opened, quantitative gas is filled with into vacuum valve test cover 6 by gas source 16,
Gas pressure in vacuum valve test cover 6 is obtained by pressure gauge 8, step 4 is repeated, then repeats step 8, until will test
Cover cleans up；The gas of certain pressure is finally filled with into vacuum valve test cover 6 again, and records the numerical value of pressure gauge 8, table
Vacuum valve leak rate test condition is illustrated；
Step 9: opening third vacuum valve 5, record the indicating value I of leak detector 4L；
Step 10: according to the background indicating value I of gained leak detector 40With indicating value Is, indicating value ILAnd referance leak indicating value Qs, root
According to formulaTested vacuum valve full-leakage rate Q is calculatedL。
(2) vacuum sealing valve part leak rate is tested.
Vacuum valve full-leakage rate is tested, is that tested 7 one end interface of vacuum valve is directly passed through into the 6th vacuum valve 15
It is connect with gas source 16, the another port for being tested vacuum valve 7 passes through the external tapping of confined space through third vacuum valve 3 and vacuum
Cavity 14 connects, and when testing tested 7 local leak rate of vacuum valve, connect in tested vacuum valve 7 with the 6th vacuum valve 15
Pipeline in be filled with the gas of certain pressure, open third vacuum valve 5, will be advised in vacuum cavity by the first vacuum pump group 1
Determine vacuum degree, high-pressure air source can enter in vacuum cavity 14 by being tested the leak hole of vacuum valve 7 in pipeline, true by first
Empty pump group 1 enters in leak detector 4, to realize the measurement of tested vacuum valve part leak rate, local leak rate tests expression formula
It is as follows:
Wherein, I0--- vacuum system background leak detector indicating value；Is--- leak detector indicating value after referance leak access system；
IL--- leak detector indicating value after tested vacuum valve access；Qs--- the standard leak rate of referance leak；QL--- tested vacuum valve
Local leak rate.
Specific step is as follows for its test process:
Step 1: the tested vacuum valve 7 of closing being mounted directly to the vacuum pipe connecting with vacuum valve 15 first
On；
Step 2: opening third vacuum valve 5, close the second vacuum valve 3 and the 5th vacuum valve 10；
Step 3: leak detector being ready to, vacuum degree is extracted into certain vacuum by the first vacuum pump group 1 by vacuum chamber 14
Degree obtains vacuum valve leak rate by vacuum gauge 12 or 13 and tests vacuum degree；
Step 4: connecting pipe vacuum degree will be extracted into certain value by the second vacuum pump group 17, and be mainly used for and be tested very
The pipeline of empty 7 gas source part of valve connection carries out purge of gas；
Step 5: third vacuum valve 5 being closed, the second vacuum valve 3 is opened, the background recorded on leak detector 4 at this time shows
Value I0；
Step 6: opening the 5th vacuum valve 10, record standard leak hole indicating value Qs, record the indicating value I on leak detector 4s；
Step 7: closing the 5th vacuum valve 10；
Step 8: by gas source 16 into the vacuum pipe being connect with tested vacuum valve 7 in be filled with a certain amount of gas,
By pressure gauge 8 it can be seen that in test cover then gas pressure, repetition step 4 repeat step 8, until by pipeline cleaning
Completely, the gas of certain pressure is finally filled with into pipeline again, and records the numerical value of pressure gauge 8, shows vacuum valve leakage
Rate test condition；
Step 9: opening third vacuum valve 5, record 4 indicating value I of leak detectorL。
Step 10: formula calculates tested vacuum valve leak rateObtain tested vacuum valve office
Portion leak rate QL。
To sum up, the present invention solves current vacuum sealed valve leak rate test macro and method is insufficient, increases according to demand
The comparison that corresponding referance leak carries out leak rate obtains tested vacuum sealing valve leak rate value, realizes vacuum valve part leak rate
With the quantitative test of full-leakage rate, while vacuum sealing valve leakage rate measurement uncertainty is greatly improved.
It should be noted that described above is only the preferred embodiment of the present invention, it should be understood that for art technology
For personnel, several changes and improvements can also be made under the premise of not departing from the technology of the present invention design, these are included in
In protection scope of the present invention.
Claims (4)
1. a kind of vacuum sealing valve leak rate test macro, which is characterized in that including the first and second vacuum pump groups, leak detector,
Vacuum chamber, vacuum valve test cover, pressure gauge, referance leak, vacuum gauge, gas source and the first to the 7th vacuum valve, wherein
First vacuum pump group is connect by the first vacuum valve with vacuum chamber, and leak detector passes through the second vacuum valve and vacuum chamber
Connection；The vacuum chamber is connect with one end of vacuum gauge, one end of third vacuum valve, the 5th vacuum valve respectively；It is described
The other end of 5th vacuum valve connects referance leak；Tested vacuum valve is mounted in vacuum valve test cover, and tested
One end of vacuum valve connect with the third vacuum valve other end and the other end of tested vacuum valve respectively with the 4th vacuum valve
Door, pressure gauge connection；And the gas source is distinguished by the 6th vacuum valve, the second vacuum pump group by the 7th vacuum valve
It is connect with vacuum valve test cover.
2. the test method according to claim 1 based on the vacuum sealing valve leak rate test macro, which is characterized in that
The vacuum gauge includes a diaphragm vacuum gauge and an ionization vacuum ga(u)ge.
3. a kind of test method based on vacuum sealing valve leak rate test macro described in claim 1, which is characterized in that including
Following steps:
Step 1: the tested vacuum valve of closing being installed in vacuum valve test cover, and tested vacuum valve is connected into third
The vacuum valve other end is connected to the 4th vacuum valve；
Step 2: opening third vacuum valve, and closing second and the 5th vacuum valve；
Step 3: opening the first vacuum valve, setting vacuum degree is evacuated down to vacuum chamber by the first vacuum pump group, and lead to
It crosses vacuum gauge and obtains vacuum valve leak rate test vacuum degree；
Step 4: opening the 7th vacuum valve, vacuum valve test cover is evacuated down to setting vacuum by the second vacuum pump group
Degree, to be cleaned to vacuum valve test cover；
Step 5: third vacuum valve being closed, the second vacuum valve is opened and records the background indicating value I on leak detector at this time0；
Step 6: opening the 5th vacuum valve, record standard leak hole indicating value Qs, and record the indicating value I on leak detectors；
Step 7: closing the 5th vacuum valve；
Step 8: opening the 6th vacuum valve, quantitative gas is filled with into vacuum valve test cover by gas source, passes through pressure gauge
It obtains gas pressure in vacuum valve test cover and records the numerical value of pressure gauge；
Step 9: opening third vacuum valve, record the indicating value I of leak detectorL；
Step 10: according to the background indicating value I of gained leak detector0With indicating value Is, indicating value ILAnd referance leak indicating value QsIt calculates tested true
Empty valve full-leakage rate QL。
4. the test method according to claim 3 based on the vacuum sealing valve leak rate test macro, which is characterized in that
Tested vacuum valve leak rate Q is calculated in the step 10LUsing formula:
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811438437.8A CN109269742A (en) | 2018-11-28 | 2018-11-28 | A kind of vacuum sealing valve leak rate test macro and method |
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| CN201811438437.8A CN109269742A (en) | 2018-11-28 | 2018-11-28 | A kind of vacuum sealing valve leak rate test macro and method |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111707423A (en) * | 2020-06-18 | 2020-09-25 | 苏州镓港半导体有限公司 | Vacuum system leak detection method and leak detection device for vacuum system |
| CN113432802A (en) * | 2021-06-28 | 2021-09-24 | 南通理工学院 | Multipurpose low temperature container part leak rate detection simulator |
| CN113776743A (en) * | 2021-09-16 | 2021-12-10 | 浙江杰奈尔新材料有限公司 | Air tightness detector and air tightness measuring method thereof |
| CN113820069A (en) * | 2021-11-25 | 2021-12-21 | 北京晨晶电子有限公司 | Auxiliary device and method for testing stability of capacitive vacuum gauge |
| CN114636516A (en) * | 2021-04-06 | 2022-06-17 | 上海东贝真空设备有限公司 | Positive sample calibration device and method for checking sealing integrity of medicine packaging container |
-
2018
- 2018-11-28 CN CN201811438437.8A patent/CN109269742A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111707423A (en) * | 2020-06-18 | 2020-09-25 | 苏州镓港半导体有限公司 | Vacuum system leak detection method and leak detection device for vacuum system |
| CN111707423B (en) * | 2020-06-18 | 2022-04-15 | 苏州镓港半导体有限公司 | Vacuum system leak detection method and leak detection device for vacuum system |
| CN114636516A (en) * | 2021-04-06 | 2022-06-17 | 上海东贝真空设备有限公司 | Positive sample calibration device and method for checking sealing integrity of medicine packaging container |
| CN113432802A (en) * | 2021-06-28 | 2021-09-24 | 南通理工学院 | Multipurpose low temperature container part leak rate detection simulator |
| CN113432802B (en) * | 2021-06-28 | 2023-10-13 | 南通理工学院 | Multipurpose low-temperature container part leak rate detection simulator |
| CN113776743A (en) * | 2021-09-16 | 2021-12-10 | 浙江杰奈尔新材料有限公司 | Air tightness detector and air tightness measuring method thereof |
| CN113820069A (en) * | 2021-11-25 | 2021-12-21 | 北京晨晶电子有限公司 | Auxiliary device and method for testing stability of capacitive vacuum gauge |
| CN113820069B (en) * | 2021-11-25 | 2022-03-11 | 北京晨晶电子有限公司 | Auxiliary device and method for testing stability of capacitive vacuum gauge |
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Application publication date: 20190125 |