CN109265168A - A kind of preparation method of lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics - Google Patents

A kind of preparation method of lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics Download PDF

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CN109265168A
CN109265168A CN201811415970.2A CN201811415970A CN109265168A CN 109265168 A CN109265168 A CN 109265168A CN 201811415970 A CN201811415970 A CN 201811415970A CN 109265168 A CN109265168 A CN 109265168A
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piezoelectric ceramics
zirconate titanate
ball
mangaic acid
lead zirconate
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张飞洋
郇正利
闫锋
唐发俊
娄岳
徐轩宇
马立智
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CETC 46 Research Institute
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Abstract

The invention discloses a kind of lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics preparation methods.This method is based on lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics, using traditional solid reaction process, sintering temperature is reduced by adjusting powder particles, improves electric property by changing sintering temperature reduction high field loss, prepares the 0.98Pb0.02Sr (Zr with preferable comprehensive performance49Ti46(Mn1/3Sb2/3)5)O3+0.2wt%CeO2Piezoceramic material.Piezoelectric ceramics prepared by the present invention is applied to the fields such as piezoelectric transformer, PZT (piezoelectric transducer), signal generator, micro positioner, piezoelectric actuator, it is particularly applicable to the preparation of ultrasound electric machine, high-power underwater sound transmitting transducer etc., piezoelectric ceramic process made from solid reaction process is simple, can be effectively reduced cost.

Description

A kind of preparation method of lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics
Technical field
The present invention relates to the ceramic compositions more particularly to a kind of zirconium titanium for high-power energy converter characterized by ingredient Lead plumbate-antimony mangaic acid lead piezoelectric ceramics preparation method.
Background technique
Piezoelectric ceramics is a kind of informational function ceramic material that can be converted mechanical energy and electric energy each other, is removed at present It is widely used in except high-tech area, in the daily routines of people piezoelectric ceramics similarly plays more and more important Role.After the polarization process of extra electric field, the direction of internal electricdomain can change and tend to external electric field piezoelectric ceramics Direction, after electric field cancellation, changing nyctitropic electricdomain will not all reset, and can retain certain macroscopical remanent polarization, To make ceramics be provided with certain piezoelectric properties.Main application has: piezoelectric transformer, PZT (piezoelectric transducer), signal generator, Micro positioner, piezoelectric actuator etc..
Nowadays, because more and more devices and equipment are just strided forward towards micromation, integrated direction, to device The power requirement of part is gradually got higher, and has highly important scientific meaning and practical valence to the further investigation of high-power piezoelectric ceramic Value.High-power piezoelectric ceramic refers mainly to the ceramic material being applied under strong driving or strong electric field condition, the piezoelectricity of actual production Ceramics, having more than half is high-power piezoelectric ceramic.These high-power piezoelectric ceramics not only need high mechanical quality because Several, low dielectric loss, higher electromechanical coupling factor and higher piezoelectric constant etc., but also require have preferable high field steady It is qualitative.
The ternary system piezoelectric ceramics to be grown up based on lead zirconate titanate (PZT) sintering temperature compared with binary system is low, PbO volatilization is few, is more energy-saving and environmentally friendly, technique is easy to control compared with quaternary system, reproducible, the analysis of the various aspects such as phasor Relatively easy convenience.Lead zirconate titanate-antimony mangaic acid lead (PMS-PZT) series piezoelectric ceramic has the advantages that ternary system, while being also machine Electric coupling coefficient is higher, the lower piezoelectric ceramics system of dielectric loss.PMS-PZT system piezoelectric ceramics can be realized under big field strength High vibration speed, good compactness.Therefore, because PMS-PZT piezoelectric ceramics has high electromechanical coupling factor and low dielectric Loss, and resonance frequency time stability it is preferable the advantages that have become at present domestic and international researcher research heat Point.However, under normal circumstances, the sintering of PMS-PZT needs higher temperature, and reducing powder particles is effectively to solve this to ask One of method of topic.Powder granularity is thinner, and specific surface area is bigger, and in the preparation process of powder, can cause powder particle surface And its internal various lattice defects of appearance, activate lattice.For these reasons, powder granularity is thinner, and the surface having is certainly By can be higher, and this surface of powder can be internal motivation of its sintering.Therefore, the particle of powder is thinner, and activation degree is got over Height, the easier sintering of powder, sintering temperature reduce.Present invention selection lead zirconate titanate-antimony mangaic acid lead piezoelectric material as a result, leads to Some researchs in terms of preparation process are crossed, there is excellent compactness, higher machine to be sintered to obtain at a lower temperature Electric coupling coefficient and strong electrical field driving under the more low performance of dielectric loss piezoelectric material, with realize its ultrasound electric machine, The application of piezoelectric transformer and underwater acoustic transducer etc..
Summary of the invention
The object of the present invention is to provide a kind of lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics preparation methods, to reduce zirconium titanium Lead plumbate-antimony mangaic acid lead piezoelectric ceramics sintering temperature, while the loss of its high field is reduced, sintering temperature is reduced by adjusting powder particles Degree reduces high field loss by changing sintering temperature, provides a kind of lead zirconate titanate that can have preferable electric property-antimony mangaic acid Lead system piezoelectric ceramics.
The technical solution adopted by the present invention is that: a kind of preparation method of lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics, feature It is, which has following steps:
(1), ingredient
By raw material Pb3O4、SrCO3、TiO2、ZrO2、MnO2、Sb2O3And CeO2, by following metering-type: 0.98Pb0.02Sr (Zr49Ti46(Mn1/3Sb2/3)5)O3+0.2wt%CeO2It is mixed, is put into after mixing in ball grinder and carries out ball milling, Ball-milling Time For 8~12h;Ball-milling medium is deionized water and agate ball, and agate ball: material: the weight ratio of deionized water is 7:(4~8): 3, then Mixture is respectively put into drying in oven, grinding in mortar is then placed in, is sieved respectively.
(2), it synthesizes
Be respectively put into the powder after sieving in step (1) in crucible, be compacted, cover, sealing, in synthetic furnace in 850~ 950 DEG C of synthesis, keep the temperature 2~4h, naturally cool to room temperature, come out of the stove.
(3), secondary ball milling
The synthesis material of step (2) is put into ball mill grinding in ball grinder, Ball-milling Time is 8~for 24 hours, then the material after ball milling is distinguished It is put into drying in oven, is then placed in mortar and is ground up, sieved.
(4), tabletting
By the powder after step (3) sieving, into powder, addition deionized water, which is fully ground, is granulated, with electric tablet machine pressure It at column, then is smashed to pieces, is ground up, sieved, then use electric tablet machine and isostatic pressing machine compression moulding for blank.
(5), dumping
The blank of step (4) is put into Muffle furnace, after being warming up to 500~600 DEG C with the rate of 2~5 DEG C/min, with furnace nature It is cooled to room temperature.
(6), it is sintered
Blank after step (5) dumping is put into crucible and is sintered, is warming up to 1020 with the heating rate of 3~8 DEG C/min ~1250 DEG C of sintering, keep the temperature 3~5h, and with furnace cooled to room temperature, lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics are made.
(7), electrode and surface treatment are applied
Lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics upper and lower surfaces that step (6) obtains are polished to a thickness of 1~ Then 1.2mm coats silver electrode in upper and lower surface in the way of silk-screen printing, be warming up to the heating rate of 4~8 DEG C/min 700~900 DEG C of silver ink firings keep the temperature 10~15min;It is put into silicone oil after cooling taking-up, under the conditions of 150~180 DEG C, uses high pressure Polarization platform polarizes under DC electric field, obtains final lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics.
Raw material Pb of the present invention3O4、SrCO3、TiO2、ZrO2、MnO2、Sb2O3And CeO2, it is commercially available quality purity >=99% chemical pure raw material.
In the step (1) of the present invention, preferred agate ball: material: the weight ratio of deionized water is 7:4:3.
In the step (1) of the present invention, preferred Ball-milling Time is 12h, and ball milling unit frequency is 33.5Hz;The step (3) in, preferred Ball-milling Time is that for 24 hours, ball milling unit frequency is 33.5Hz.
In step (2) of the present invention, preferred synthesis temperature is 900 DEG C, soaking time 3h.
In step (4) of the present invention, the pressure using isostatic pressing machine compression moulding is 300MPa;The blank of compression moulding For the cylindric blank of diameter 20mm, thickness (1~1.5) mm.
In step (5) of the present invention, preferred heating rate is 2 DEG C/min, and temperature rises to 500 DEG C.
In step (6) of the present invention, preferred heating rate is 5 DEG C/min, and sintering temperature is 1040 °C, soaking time For 4h.
In step (7) of the present invention, the potsherd after polishing is with a thickness of 1mm;Preferred heating rate is 4 when silver ink firing DEG C/min, temperature is 800 DEG C, soaking time 15min;It is polarized using high voltage polarization platform, DC electric field Polarization field strength is 4000V/mm, polarization time 30min, poling temperature are 160 DEG C.
The invention has the advantages that: with 0.98Pb0.02Sr (Zr49Ti46(Mn1/3Sb2/3)5)O3+0.2wt% CeO2Based on piezoelectric ceramics, using Ball-milling Time and sintering temperature is changed come the method for reducing high field loss, pass through technique It adjustment and improves, effectively reduces the sintering temperature and high field loss of piezoelectric ceramics, obtained a kind of comprehensive performance and preferably pressed Electroceramics, wherein sintering temperature is reduced to 1040 °C, volume density ρ=7.79g/cm3, Conventional dielectric loss tan δ=0.34%, plane Electromechanical coupling factor kpDielectric loss under=0.56,200V/mm field strength is that the dielectric loss under 1.1%, 400V/mm field strength is 2.7%。
Detailed description of the invention
Fig. 1 is the scanning electron microscope map of 2-2 of the embodiment of the present invention;
Fig. 2 is the map that volume density of the invention changes with sintering temperature;
Fig. 3 is that the map changed with sintering temperature is lost in high field of the invention.
Specific embodiment
Below in conjunction with drawings and examples, the invention will be further described:
The raw material Pb that the present invention uses3O4、SrCO3、TiO2、ZrO2、MnO2、Sb2O3And CeO2, it is commercially available chemical pure raw material (purity >=99%).
It is of the invention the preparation method is as follows:
(1), ingredient
By raw material Pb3O4、SrCO3、TiO2、ZrO2、MnO2、Sb2O3And CeO2, by following metering-type: 0.98Pb0.02Sr (Zr49Ti46(Mn1/3Sb2/3)5)O3+0.2wt%CeO2It is mixed.In formula, from left to right 0.98,0.02,49,46,1/3, 2/3,5 and 3 be raw material mole percent level, 0.2wt% CeO2Additive amount account for the matter of other raw material weighing gross masses Measure percentage.By taking gross mass 400.000g as an example, Pb is weighed3O4、SrCO3、TiO2、ZrO2、MnO2、Sb2O3And CeO2Quality point It Wei not 271.906g, 3.587g, 45.569g, 71.506g, 2.009g, 4.638g and 0.784g.(metering-type illustrated above is being pressed It is general in electroceramics industry).It is put into ball grinder after raw material mixing and carries out ball milling, Ball-milling Time 12h, ball-milling medium is to go Ionized water and agate ball, agate ball: material: the weight ratio of deionized water is 7:4:3, and ball milling unit frequency is 33.5Hz;It again will mixing Material is respectively put into baking oven and dries in 110 DEG C, is then placed in grinding in mortar, crosses 40 meshes respectively.
(2), it synthesizes
It is respectively put into the powder after sieving in step (1) in crucible, is compacted, cover, sealing is closed in synthetic furnace in 900 DEG C At heat preservation 3h naturally cools to room temperature, comes out of the stove.
(3), secondary ball milling
The synthesis material of step (2) is put into ball mill grinding in ball grinder, Ball-milling Time is that for 24 hours, ball milling unit frequency is 33.5Hz, then Material after ball milling is respectively put into baking oven and is dried in 110 DEG C, grinding in mortar is then placed in, crosses 40 meshes.
(4), tabletting
By the powder after step (3) sieving, into powder, addition deionized water, which is fully ground, is granulated, with electric tablet machine pressure It at column, then is smashed to pieces, uses electric tablet machine and isostatic pressing machine compression moulding for blank after being ground up, sieved;The static pressure such as use The pressure of machine compression moulding is 300MPa, and the blank of compression moulding is the cylindric blank of diameter 20mm, thickness 1.5mm.
(5), dumping
The blank of step (4) is put into Muffle furnace, heating rate is 2 DEG C/min, naturally cold with furnace after temperature rises to 500 DEG C But to room temperature;
(6), it is sintered
Blank after step (5) dumping is put into crucible and is sintered, 1040 DEG C of burnings are warming up to the heating rate of 5 DEG C/min Knot keeps the temperature 4h, and with furnace cooled to room temperature, lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics are made;
(7), electrode and surface treatment are applied
Lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics upper and lower surfaces that step (6) obtains are polished to a thickness of 1mm, so Silver electrode is coated in the way of silk-screen printing in upper and lower surface afterwards, and 800 DEG C of silver ink firings are warming up to the heating rate of 5 DEG C/min, Keep the temperature 15min;It is put into silicone oil after cooling taking-up, under the conditions of 160 DEG C, is polarized with DC electric field, obtain final zirconium metatitanic acid Lead-antimony mangaic acid lead piezoelectric ceramics.
(8), piezoelectric property is tested
The piezoelectric ceramics that step (6) is obtained measures its volume density using Archimedes method.By the piezoelectricity after step (7) polarization Ceramics are tested its high field using QS37 type high-tension bridge and are lost, surveyed using 4210 type LCR auto testing instruments in being stored at room temperature for 24 hours The dielectric loss under its low-voltage is tried, tests its electromechanical coupling factor using PV90A type impedance analyzer.
Specific embodiment is as follows:
Ball-milling Time is 8h, the secondary ball milling time is 8h, and sintering temperature is 1170 °C, 1190 °C, 1210 °C, and 1230 °C, 1250 °C, it is denoted as embodiment 1-1,1-2,1-3,1-4,1-5 respectively.
Ball-milling Time is 12h, the secondary ball milling time is that for 24 hours, sintering temperature is 1020 °C, 1040 °C, 1060 °C, 1080 °C, 1100 °C, it is denoted as embodiment 2-1,2-2,2-3,2-4,2-5 respectively.
The all-round property testing result of above-described embodiment is listed in table 1, and embodiment 2-1,2-2,2-3,2-4,2-5 are in different fields Dielectric loss result under by force is listed in table 2.
Table 1
Embodiment Volume density ρ (g/cm3) Tan δ (%) is lost in Conventional dielectric Planar electromechanical coupling factor kp
1-1 7.65 0.41 0.52
1-2 7.65 0.42 0.51
1-3 7.61 0.52 0.48
1-4 7.60 0.55 0.48
1-5 7.56 0.57 0.47
2-1 7.78 0.35 0.51
2-2 7.79 0.34 0.56
2-3 7.76 0.41 0.53
2-4 7.75 0.45 0.53
2-5 7.71 0.54 0.51
Table 2
Embodiment The loss of 200V/mm high field The loss of 400V/mm high field
2-1 1.2% 2.9%
2-2 1.1% 2.7%
2-3 1.4% 3.3%
2-4 1.5% 3.6%
2-5 1.6% 4.0%
Shown by test result: embodiment 2-2 is most preferred embodiment, when a Ball-milling Time is 12h, the secondary ball milling time is When for 24 hours, sintering temperature is reduced to 1040 °C, volume density ρ=7.79g/cm3, Conventional dielectric loss tan δ=0.34%, planar electromechanical Coefficient of coup kpDielectric loss under=0.56,200V/mm field strength is that the dielectric loss under 1.1%, 400V/mm field strength is 2.7%.
Fig. 1 shows a Ball-milling Time 12h of embodiment 2-2, secondary ball milling time for 24 hours, and sintering temperature is 1040 °C The crystal grain of sample is completely clear, and crystal boundary is clearly demarcated, and grain development is abundant, and granularity is relatively uniform, and crystal property is preferable, consistency compared with It is high.
Fig. 2 shows to increase Ball-milling Time, and after powder particles refine, the body for the ceramics sample that reduction temperature is sintered is close Degree is all larger than the volume density of the ceramics sample of high temperature sintering before powder refines, and illustrates that powder refinement can effectively reduce sintering temperature. Meanwhile for the sample after powder refinement, with the increase of sintering temperature, the volume density of ceramics sample first increases to be reduced afterwards, when When sintering temperature is 1040 °C, volume density is up to 7.79g/cm3
After Fig. 3 shows powder refinement, either under 200V/mm field strength or under 400V/mm field strength, with sintering The increase of temperature, the dielectric loss of ceramics sample are first to reduce to increase afterwards, when sintering temperature is 1040 °C, 200V/mm The dielectric loss minimum 2.7% under minimum 1.1%, the 400V/mm field strength of dielectric loss under by force.
Piezoceramic material prepared by the present invention is mainly used in piezoelectric transformer, PZT (piezoelectric transducer), signal generator, micro- The fields such as shifter, piezoelectric actuator are particularly applicable to the preparation of ultrasound electric machine, high-power underwater sound transmitting transducer etc..

Claims (9)

1. a kind of lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that the preparation method has following step It is rapid:
(1), ingredient
By raw material Pb3O4、SrCO3、TiO2、ZrO2、MnO2、Sb2O3And CeO2, by following metering-type: 0.98Pb0.02Sr (Zr49Ti46(Mn1/3Sb2/3)5)O3+0.2wt%CeO2It is mixed, is put into after mixing in ball grinder and carries out ball milling, Ball-milling Time For 8~12h;Ball-milling medium is deionized water and agate ball, and agate ball: material: the weight ratio of deionized water is 7:(4~8): 3, then Mixture is respectively put into drying in oven, grinding in mortar is then placed in, is sieved respectively;
(2), it synthesizes
Be respectively put into the powder after sieving in step (1) in crucible, be compacted, cover, sealing, in synthetic furnace in 850~ 950 DEG C of synthesis, keep the temperature 2~4h, naturally cool to room temperature, come out of the stove;
(3), secondary ball milling
The synthesis material of step (2) is put into ball mill grinding in ball grinder, Ball-milling Time is 8~for 24 hours, then the material after ball milling is distinguished It is put into drying in oven, is then placed in mortar and is ground up, sieved;
(4), tabletting
By the powder after step (3) sieving, into powder, addition deionized water, which is fully ground, is granulated, with electric tablet machine pressure It at column, then is smashed to pieces, is ground up, sieved, then use electric tablet machine and isostatic pressing machine compression moulding for blank;
(5), dumping
The blank of step (4) is put into Muffle furnace, after being warming up to 500~600 DEG C with the rate of 2~5 DEG C/min, with furnace nature It is cooled to room temperature;
(6), it is sintered
Blank after step (5) dumping is put into crucible and is sintered, is warming up to 1020 with the heating rate of 3~8 DEG C/min ~1250 DEG C of sintering, keep the temperature 3~5h, and with furnace cooled to room temperature, lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics are made;
(7), electrode and surface treatment are applied
Lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics upper and lower surfaces that step (6) obtains are polished to a thickness of 1~ Then 1.2mm coats silver electrode in upper and lower surface in the way of silk-screen printing, be warming up to the heating rate of 4~8 DEG C/min 700~900 DEG C of silver ink firings keep the temperature 10~15min;It is put into silicone oil after cooling taking-up, under the conditions of 150~180 DEG C, uses high pressure Polarization platform polarizes under DC electric field, obtains final lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics.
2. a kind of lead zirconate titanate according to claim 1-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that The raw material Pb3O4、SrCO3、TiO2、ZrO2、MnO2、Sb2O3And CeO2, it is the pure original of chemistry of commercially available quality purity >=99% Material.
3. a kind of lead zirconate titanate according to claim 1-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that In the step (1), preferred agate ball: material: the weight ratio of deionized water is 7:4:3.
4. a kind of lead zirconate titanate according to claim 1-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that In the step (1), preferred Ball-milling Time is 12h, and ball milling unit frequency is 33.5Hz;In the step (3), preferred ball milling Time is that for 24 hours, ball milling unit frequency is 33.5Hz.
5. a kind of lead zirconate titanate according to claim 1-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that In the step (2), preferred synthesis temperature is 900 DEG C, soaking time 3h.
6. a kind of lead zirconate titanate according to claim 1-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that In the step (4), the pressure using isostatic pressing machine compression moulding is 300MPa;The blank of compression moulding is diameter 20mm, thickness Spend the cylindric blank of (1~1.5) mm.
7. a kind of lead zirconate titanate according to claim 1-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that In the step (5), preferred heating rate is 2 DEG C/min, and temperature rises to 500 DEG C.
8. a kind of lead zirconate titanate according to claim 1-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that In the step (6), preferred heating rate is 5 DEG C/min, and sintering temperature is 1040 °C, soaking time 4h.
9. a kind of lead zirconate titanate according to claim 1-antimony mangaic acid lead piezoelectric ceramics preparation method, which is characterized in that In the step (7), the potsherd after polishing is with a thickness of 1mm;Preferred heating rate is 4 DEG C/min, temperature 800 when silver ink firing DEG C, soaking time 15min;It is polarized using high voltage polarization platform, DC electric field Polarization field strength is 4000V/mm, polarization time For 30min, poling temperature is 160 DEG C.
CN201811415970.2A 2018-11-26 2018-11-26 A kind of preparation method of lead zirconate titanate-antimony mangaic acid lead piezoelectric ceramics Pending CN109265168A (en)

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110803922A (en) * 2019-12-10 2020-02-18 中国电子科技集团公司第四十六研究所 Preparation method of bismuth-layered lead-free piezoelectric ceramic
CN111362696A (en) * 2020-03-31 2020-07-03 贵州振华红云电子有限公司 Piezoelectric ceramic for miniature piezoelectric air pump and preparation method thereof
CN113651615A (en) * 2021-09-23 2021-11-16 无锡邦能超声科技有限公司 Piezoceramic material and high-stability ultrasonic transducer
CN115417671A (en) * 2022-07-07 2022-12-02 南京航空航天大学 Lead zirconate titanate based piezoelectric ceramic for high-power scene and preparation method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
重庆百科全书编纂委员会编: "《重庆百科全书》", 31 December 1999, 重庆出版社 *

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110803922A (en) * 2019-12-10 2020-02-18 中国电子科技集团公司第四十六研究所 Preparation method of bismuth-layered lead-free piezoelectric ceramic
CN111362696A (en) * 2020-03-31 2020-07-03 贵州振华红云电子有限公司 Piezoelectric ceramic for miniature piezoelectric air pump and preparation method thereof
CN113651615A (en) * 2021-09-23 2021-11-16 无锡邦能超声科技有限公司 Piezoceramic material and high-stability ultrasonic transducer
CN113651615B (en) * 2021-09-23 2022-10-14 大连世达科技有限公司 Piezoceramic material and high-stability ultrasonic transducer
CN115417671A (en) * 2022-07-07 2022-12-02 南京航空航天大学 Lead zirconate titanate based piezoelectric ceramic for high-power scene and preparation method thereof

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Application publication date: 20190125