CN109234728B - Molybdenum alloy surface laser cladding preparation MoSi2Method for coating - Google Patents

Molybdenum alloy surface laser cladding preparation MoSi2Method for coating Download PDF

Info

Publication number
CN109234728B
CN109234728B CN201811212909.8A CN201811212909A CN109234728B CN 109234728 B CN109234728 B CN 109234728B CN 201811212909 A CN201811212909 A CN 201811212909A CN 109234728 B CN109234728 B CN 109234728B
Authority
CN
China
Prior art keywords
molybdenum alloy
coating
mosi
laser cladding
thin layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201811212909.8A
Other languages
Chinese (zh)
Other versions
CN109234728A (en
Inventor
孙顺平
顾顺
胡益丰
王洪金
张扬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangsu University of Technology
Original Assignee
Jiangsu University of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangsu University of Technology filed Critical Jiangsu University of Technology
Priority to CN201811212909.8A priority Critical patent/CN109234728B/en
Publication of CN109234728A publication Critical patent/CN109234728A/en
Application granted granted Critical
Publication of CN109234728B publication Critical patent/CN109234728B/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/08—Coating starting from inorganic powder by application of heat or pressure and heat
    • C23C24/10—Coating starting from inorganic powder by application of heat or pressure and heat with intermediate formation of a liquid phase in the layer
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/14—Metallic material, boron or silicon
    • C23C14/16—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon
    • C23C14/165—Metallic material, boron or silicon on metallic substrates or on substrates of boron or silicon by cathodic sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C28/00—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042—Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)

Abstract

The invention belongs to the technical field of laser cladding of surfaces of refractory metals, and particularly relates to a method for preparing MoSi by laser cladding of a molybdenum alloy surface2A method of coating. Firstly sputtering a Si thin layer with the thickness of 20-30 mu m on the surface of the molybdenum alloy, then presetting silicide alloy powder, and combining the molybdenum alloy, the sputtered Si thin layer and the preset silicide alloy powder through laser scanning to obtain MoSi with excellent mechanical property and good combination with the molybdenum alloy2And (4) coating. The molybdenum alloy prepared by the invention has MoSi on the surface2The coating adopts a magnetron sputtering Si thin layer, and then a Mo-Si element transition layer can be formed by a laser cladding process, so that molybdenum alloy and MoSi can be improved2Bond strength between coatings. On the other hand, the silicide coating is prepared on the surface of the molybdenum alloy sputtered with the Si thin layer by adopting a laser cladding process, the coating is uniform and compact in structure and good in combination, and the service performance of the coating can be improved due to the effect of multi-element alloying.

Description

Molybdenum alloy surface laser cladding preparation MoSi2Method for coating
Technical Field
The invention relates to the technical field of laser cladding of surfaces of refractory metals, in particular to a method for preparing MoSi by laser cladding of a molybdenum alloy surface2A method of coating.
Background
The molybdenum-based alloy has the advantages of high melting point, small thermal expansion coefficient, high strength, high elastic modulus, good electric and thermal conductivity, strong corrosion resistance and good high-temperature mechanical property, and has wide application in the fields of military industry, aerospace technology and energy equipment. However, the molybdenum-based alloy has poor high-temperature oxidation resistance, which affects the long-term effective use under high-temperature conditions.
The current method for improving the high-temperature oxidation performance of the molybdenum alloy is to add a molybdenum silicide coating. MoSi2Is a typical high-temperature alloy thermal barrier coating material, has excellent high-temperature oxidation resistance, and can form compact amorphous SiO when oxidized at high temperature2Protecting the internal metal from oxidation.
However, MoSi2The coating has high brittleness, and stress and cracks are easy to occur in use. Due to the molybdenum alloy and the MoSi2The thermal expansion coefficients of the coating are different, so that the binding force of the coating is not strong, and the coating is usually peeled off in engineering use. Thus, molybdenum alloys and MoSi are improved2The bonding between the coatings is of very important practical significance.
Disclosure of Invention
For improving the prior art molybdenum alloy MoSi2Defects of the coating in the aspects of production process, product performance and the like, and reinforced molybdenum alloy and MoSi2Interfacial bonding between coatings, the invention between molybdenum alloys and MoSi2Sputtering a Si element thin layer between the coatings, and dissolving the Si element thin layer in the molybdenum alloy and the MoSi through a subsequent laser scanning process2The interface between the coatings can effectively improve the molybdenum alloy and the MoSi2The binding force of the coating, thereby reducing the shedding phenomenon of the molybdenum silicide coating.
The technical scheme provided by the invention is that MoSi on the surface of a molybdenum alloy2The preparation method of the coating specifically comprises the following steps:
(1) polishing the surface of the molybdenum alloy sheet, cleaning and drying;
(2) sputtering a Si thin layer on the molybdenum alloy sheet obtained in the step (1) through magnetron sputtering;
(3) ball milling silicon-containing alloy powder;
(4) presetting the silicon-containing alloy powder obtained in the step (3) on the molybdenum alloy sputtered with the Si thin layer obtained in the step (2);
(5) laser scanning is carried out on the molybdenum alloy of the preset alloy powder obtained in the step (4) by adopting a laser to prepare MoSi on the surface2And (4) coating.
Preferably, the silicon-containing alloy powder in the step (3) comprises, by mass, 50-60% of Mo, 3.5-7.5% of Nb, 3.0-6.0% of W, 2.5-4.5% of Cr, 2.0-3.5% of Ti, 2.0-5.5% of Al, and the balance of Si.
Preferably, the Mo, the Nb, the W, the Cr, the Ti, the Al and the Si are all added in the form of alloy powder, the purity of each element powder is more than 99.5 percent, and the particle diameter is less than 4.5 mu m.
Preferably, in the magnetron sputtering in the step (2), high-purity argon is used as a sputtering gas, the flow rate of the argon is 25 to 35sccm, and the pressure of the argon sputtering is 0.15 to 0.35 Pa.
Preferably, the thickness of the Si thin layer in the step (2) is 20-30 μm.
Preferably, the ball milling time in the step (3) is 18-24 h, and the ball milling rotation speed is 300-450 r/min.
Preferably, in the step (4), the presetting is to adhere silicon-containing alloy powder to the surface of the molybdenum alloy sputtered with the Si thin layer by adopting alcohol or acetone, the thickness of the preset silicon-containing alloy powder is 0.5-1.0 mm, and the preset silicon-containing alloy powder is placed in a heating furnace at 140-160 ℃ and dried for 30-40 min.
Preferably, in the step (5), the lapping rate of the laser scanning is 40-60%, the laser power is 2.0-2.4 kW, and the scanning speed is 4-8 mm/s.
Has the advantages that:
(1) the invention sputters the Si thin layer on the molybdenum alloy substrate by the magnetron sputtering method, can effectively control the thickness of the Si thin layer, is beneficial to improving the high-temperature oxidation resistance of the coating and reducing the molybdenum alloy and MoSi2And cracks in the middle.
(2) The preparation of silicide multi-element alloy coating on Si thin layer by laser cladding process can improve MoSi2The service performance of the coating is improved, and the molybdenum alloy and MoSi are improved2The bonding strength between the coatings is improved, so that the sputtering of the Si thin layer is to prepare MoSi on the surface of the molybdenum alloy2A very suitable process for coating.
(3) The multi-element addition of the alloy elements in the invention can be carried out on MoSi2The coating has alloying effect on improving MoSi2The mechanical property of the coating has obvious effect, and the coating can be reducedStress concentration and cracking tendency during use and can improve MoSi of the coating2Oxidation resistance of the coating.
Preparing a Si element thin layer on the molybdenum alloy, and forming a Mo-Si element transition layer by a subsequent laser cladding process. The basic physical properties of the transition layer are between those of molybdenum alloy and MoSi2Thus, the molybdenum alloy and MoSi can be coordinated2Can improve the difference of the thermal expansion coefficients of the molybdenum alloy and the MoSi2Bond strength between coatings. However, the thickness of Si element is not preferably too large, and it is only required to be 20-30 μm, because when the thickness of Si element is larger, more Mo will appear in the transition layer5Si3And the high-temperature oxidation resistance of the coating is reduced, the linear expansion coefficient of the coating has obvious directionality, and microcracks are easy to appear between the coating and the molybdenum alloy matrix. Therefore, in the patent, a magnetron sputtering method is adopted to sputter a Si element thin layer with the thickness of 20-30 μm on the molybdenum alloy.
The laser cladding technology has the characteristics of small dilution, compact structure, good combination of the coating and the matrix and the like, so that the laser cladding technology is adopted to prepare MoSi on the molybdenum alloy of the sputtering Si element layer2The coating can improve the performances of wear resistance, corrosion resistance, heat resistance, oxidation resistance and the like of the surface of the molybdenum alloy. Preparation of MoSi by laser cladding2When the coating is coated, further alloying elements are required to be added for multi-element alloying so as to improve the service performance of the coating. Al and Cr element to MoSi2The oxidation resistance of the coating is beneficial, the high-temperature performance of the coating can be improved by Nb and W elements, and the MoSi can be improved by Cr and Ti elements2Room temperature mechanical properties, Al and Nb elements can also improve MoSi2The toughness of (3). Multiple addition of alloying elements can be added to MoSi2The coating has alloying effect on improving MoSi2The mechanical property of the coating has obvious effect, the stress concentration and cracking tendency of the coating in the using process can be reduced, and the MoSi of the coating can be improved2Oxidation resistance of the coating.
Drawings
FIG. 1 shows the MoSi on the surface of the molybdenum alloy prepared in example 1 of the present invention2Metallographic structure of the coating cross section.
Detailed Description
Comparative example 1
Firstly, the surface of the molybdenum alloy is polished, and ultrasonic cleaning and drying are carried out by alcohol. The alloy powder which comprises Mo 60%, Nb 3.5%, W3.0%, Cr 2.5%, Ti 2.0%, Al 2.0% and the balance of Si in percentage by mass is ball-milled for 18h at the rotating speed of 300 r/min. Then adhering the alloy powder on the surface of the molybdenum alloy by adopting acetone, presetting the thickness of the alloy powder to be 0.5mm, then placing the molybdenum alloy powder in a heating furnace at 140 ℃ and drying for 30 min. Laser scanning is carried out on the molybdenum alloy by adopting a laser, the lapping rate of the laser scanning is 40%, the laser power is 2.0kW, the scanning speed is 8mm/s, and the MoSi on the surface is prepared2And (4) coating. The bonding strength of the substrate and the coating is detected to be 7.4 MPa.
Example 1
Firstly, the surface of the molybdenum alloy is polished, ultrasonic cleaning is carried out by alcohol, drying is carried out, and then a thin Si layer with the thickness of 25 mu m is sputtered on the molybdenum alloy through magnetron sputtering, high-purity argon is used as sputtering gas, the flow of the argon is 25sccm, and the sputtering pressure of the argon is 0.25 Pa. The alloy powder which comprises 60 mass percent of Mo, 3.5 mass percent of Nb, 3.0 mass percent of W, 2.5 mass percent of Cr, 2.0 mass percent of Ti, 2.0 mass percent of Al and the balance of Si is ball-milled for a long time, wherein the ball-milling time is 18h, and the rotating speed is 300 r/min. Then, the alloy powder is adhered to the surface of the molybdenum alloy sputtered with the Si thin layer by acetone, the thickness of the preset alloy powder is 0.5mm, and then the alloy powder is placed in a heating furnace at the temperature of 140 ℃ and dried for 30 min. Laser scanning is carried out on the molybdenum alloy sputtered with the Si thin layer by adopting a laser, the lapping rate of the laser scanning is 40 percent, the laser power is 2.0kW, the scanning speed is 8mm/s, and the MoSi on the surface is prepared2And (4) coating. The bonding strength of the substrate and the coating is 9.3MPa through detection, and compared with the comparative example 1, the bonding strength of the substrate and the coating is obviously improved under the same laser process parameters. FIG. 1 shows the MoSi on the surface of the molybdenum alloy prepared by the invention2The metallographic structure of the cross section of the coating can be seen from the figure, and the MoSi prepared by laser cladding can be seen2The coating has uniform and compact structure and good combination with the molybdenum alloy.
Example 2
Firstly, the molybdenum alloy is subjected to surface treatmentSurface polishing, ultrasonic cleaning with alcohol, baking, and then sputtering a thin layer of Si with a thickness of 20 μm on the molybdenum alloy by magnetron sputtering, using high-purity argon as a sputtering gas, the flow of argon was 25sccm, and the argon sputtering pressure was 0.25 Pa. The alloy powder which comprises 55 mass percent of Mo, 5.5 mass percent of Nb, 4.5 mass percent of W, 3.5 mass percent of Cr, 2.5 mass percent of Ti, 3.0 mass percent of Al and the balance of Si is ball-milled for a long time, the ball-milling time is 21h, and the rotating speed is 350 r/min. Then, adhering the alloy powder to the surface of the molybdenum alloy sputtered with the Si thin layer by using acetone, presetting the thickness of the alloy powder to be 0.8mm, then placing the alloy powder in a heating furnace at 150 ℃, and drying for 30 min. Laser scanning is carried out on the molybdenum alloy sputtered with the Si thin layer by adopting a laser, the lapping rate of the laser scanning is 40 percent, the laser power is 2.2kW, the scanning speed is 6mm/s, and the MoSi on the surface is prepared2And (4) coating. The bonding strength of the substrate and the coating is detected to be 9.1 MPa.
Example 3
Firstly, the surface of the molybdenum alloy is polished, ultrasonic cleaning is carried out by alcohol, drying is carried out, and then a thin Si layer with the thickness of 30 mu m is sputtered on the molybdenum alloy through magnetron sputtering, high-purity argon is used as sputtering gas, the flow of the argon is 25sccm, and the sputtering pressure of the argon is 0.25 Pa. The alloy powder which comprises 50% of Mo, 7.5% of Nb, 6.0% of W, 4.5% of Cr, 3.5% of Ti, 5.5% of Al and the balance of Si in percentage by mass is ball-milled for a long time, the ball-milling time is 24 hours, and the rotating speed is 400 r/min. Then, adhering the alloy powder to the surface of the molybdenum alloy sputtered with the Si thin layer by using acetone, presetting the thickness of the alloy powder to be 1.0mm, then placing the alloy powder in a heating furnace at 160 ℃, and drying for 40 min. Laser scanning is carried out on the molybdenum alloy sputtered with the Si thin layer by adopting a laser, the lapping rate of the laser scanning is 40 percent, the laser power is 2.4kW, the scanning speed is 8mm/s, and the MoSi on the surface is prepared2And (4) coating. The bonding strength of the substrate and the coating is detected to be 9.6 MPa.

Claims (7)

1. Molybdenum alloy surface laser cladding preparation MoSi2A method of coating, comprising the steps of:
(1) polishing the surface of the molybdenum alloy plate, cleaning and drying;
(2) sputtering a Si thin layer on the molybdenum alloy plate obtained in the step (1) through magnetron sputtering;
(3) ball milling silicon-containing alloy powder;
(4) presetting the silicon-containing alloy powder obtained in the step (3) on the molybdenum alloy sputtered with the Si thin layer obtained in the step (2);
(5) laser scanning is carried out on the molybdenum alloy of the preset alloy powder obtained in the step (4) by adopting a laser to prepare MoSi on the surface2Coating;
the thickness of the Si thin layer in the step (2) is 20-30 mu m.
2. The molybdenum alloy surface laser cladding MoSi preparation method according to claim 12The coating method is characterized in that the silicon-containing alloy powder in the step (3) comprises, by mass, 50-60% of Mo, 3.5-7.5% of Nb, 3.0-6.0% of W, 2.5-4.5% of Cr, 2.0-3.5% of Ti, 2.0-5.5% of Al, and the balance of Si.
3. The molybdenum alloy surface laser cladding MoSi preparation method according to claim 22The coating method is characterized in that Mo, Nb, W, Cr, Ti, Al and Si are all added in the form of alloy powder, the purity of each element powder is more than 99.5%, and the particle diameter is less than 4.5 μm.
4. The molybdenum alloy surface laser cladding MoSi preparation method according to claim 12The coating method is characterized in that in the magnetron sputtering in the step (2), high-purity argon is used as a sputtering gas, the flow of the argon is 25-35 sccm, and the argon sputtering pressure is 0.15-0.35 Pa.
5. The molybdenum alloy surface laser cladding MoSi preparation method according to claim 12The coating method is characterized in that the ball milling time in the step (3) is 18-24 hours, and the ball milling rotating speed is 300-450 r/min.
6. The molybdenum alloy surface laser cladding of claim 1Preparation of MoSi2The coating method is characterized in that in the step (4), the presetting is to adhere silicon-containing alloy powder to the surface of the molybdenum alloy sputtered with the Si thin layer by adopting alcohol or acetone, the thickness of the preset silicon-containing alloy powder is 0.5-1.0 mm, the preset silicon-containing alloy powder is placed in a heating furnace at the temperature of 140-160 ℃, and the drying is carried out for 30-40 min.
7. The molybdenum alloy surface laser cladding MoSi preparation method according to claim 12The coating method is characterized in that in the step (5), the lapping rate of laser scanning is 40-60%, the laser power is 2.0-2.4 kW, and the scanning speed is 4-8 mm/s.
CN201811212909.8A 2018-10-18 2018-10-18 Molybdenum alloy surface laser cladding preparation MoSi2Method for coating Active CN109234728B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811212909.8A CN109234728B (en) 2018-10-18 2018-10-18 Molybdenum alloy surface laser cladding preparation MoSi2Method for coating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811212909.8A CN109234728B (en) 2018-10-18 2018-10-18 Molybdenum alloy surface laser cladding preparation MoSi2Method for coating

Publications (2)

Publication Number Publication Date
CN109234728A CN109234728A (en) 2019-01-18
CN109234728B true CN109234728B (en) 2020-07-28

Family

ID=65053807

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201811212909.8A Active CN109234728B (en) 2018-10-18 2018-10-18 Molybdenum alloy surface laser cladding preparation MoSi2Method for coating

Country Status (1)

Country Link
CN (1) CN109234728B (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110079775B (en) * 2019-04-30 2021-06-15 江苏理工学院 Molybdenum alloy surface MoSi2Method for producing a coating
CN109913870A (en) * 2019-04-30 2019-06-21 江苏理工学院 A kind of niobium alloy surface MoSi2The preparation method of coating
CN111118367B (en) * 2020-01-17 2022-02-11 江苏理工学院 Method for repairing silicide coating on surface of refractory metal molybdenum alloy
CN111172530A (en) * 2020-01-17 2020-05-19 江苏理工学院 Method for repairing silicide coating on surface of Mo alloy sheet
CN112760636B (en) * 2020-12-23 2022-08-02 长安大学 Method for in-situ synthesis of molybdenum-silicon-boron alloy coating by laser cladding
CN112919475A (en) * 2021-03-10 2021-06-08 南京理工大学 Method for synthesizing molybdenum disilicide powder
CN113430491B (en) * 2021-06-29 2022-06-17 西南大学 Surface oxidation-resistant coating, preparation method thereof and surface modified titanium alloy
CN115180930B (en) * 2022-07-05 2023-07-04 洛阳科威钨钼有限公司 Powder for transition layer, preparation method and refractory metal matrix protection layer

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113913A (en) * 1982-01-22 1983-08-10 Tokyo Shibaura Electric Co Semiconductor device and method for manufacturing the same
KR100486676B1 (en) * 2002-10-04 2005-05-03 엘지.필립스 엘시디 주식회사 Phase Shift Laser Mask and sequential lateral solidification Crystallization Method using by the same
CN104498941A (en) * 2014-12-05 2015-04-08 宁夏东方钽业股份有限公司 High-temperature oxidation-resistant coating for molybdenum and molybdenum alloy and preparation method of high-temperature oxidation-resistant coating
CN108588706A (en) * 2018-04-25 2018-09-28 江苏理工学院 A kind of mold steel surface preparation MoSi2The method of composite alloy coat

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5673450A (en) * 1979-11-21 1981-06-18 Toshiba Corp Manufacture of semiconductor device
JPS6245044A (en) * 1985-08-22 1987-02-27 Toshiba Corp Semiconductor device and manufacture thereof
JP4044446B2 (en) * 2002-02-19 2008-02-06 セイコーインスツル株式会社 Semiconductor device and manufacturing method thereof
CN101704310B (en) * 2009-11-17 2012-07-18 河北理工大学 Mo-Mo+Si+Al functionally graded material and preparation method thereof
CN102851635B (en) * 2012-09-20 2014-06-04 河北联合大学 Mo-C-N-Si-Nb gradient coating material and preparation method thereof
CN205404861U (en) * 2016-01-11 2016-07-27 渭南像王光电显示技术开发有限公司 Optical coating with high permeability
JP2017179554A (en) * 2016-03-31 2017-10-05 Ｊｘ金属株式会社 Low particle metal silicide sputtering target, and production method thereof

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB2113913A (en) * 1982-01-22 1983-08-10 Tokyo Shibaura Electric Co Semiconductor device and method for manufacturing the same
KR100486676B1 (en) * 2002-10-04 2005-05-03 엘지.필립스 엘시디 주식회사 Phase Shift Laser Mask and sequential lateral solidification Crystallization Method using by the same
CN104498941A (en) * 2014-12-05 2015-04-08 宁夏东方钽业股份有限公司 High-temperature oxidation-resistant coating for molybdenum and molybdenum alloy and preparation method of high-temperature oxidation-resistant coating
CN108588706A (en) * 2018-04-25 2018-09-28 江苏理工学院 A kind of mold steel surface preparation MoSi2The method of composite alloy coat

Non-Patent Citations (2)

* Cited by examiner, † Cited by third party
Title
"Investigation on laser cladding of MoSi2 powder on steel";Laiqi Zhang 等;《Materials》;20051031;第12卷(第5期);第436-439页 *
"钼及钼合金表面MoSi2抗氧化涂层的研究进展";安耿;《中国钼业》;20130430;第37卷(第2期);第55-60页 *

Also Published As

Publication number Publication date
CN109234728A (en) 2019-01-18

Similar Documents

Publication Publication Date Title
CN109234728B (en) Molybdenum alloy surface laser cladding preparation MoSi2Method for coating
CN109763125B (en) High-entropy alloy coating resistant to high-temperature abrasion and preparation process and application thereof
WO2015035542A1 (en) Surface alloy coating composite material used for high temperature resistant material, coating and preparation method thereof
CN109267062B (en) Niobium alloy surface MoSi2Method for producing a coating
CN110079775B (en) Molybdenum alloy surface MoSi2Method for producing a coating
CN112921317A (en) Method for preparing ternary layered MAX phase ceramic coating through laser cladding
CN111020557B (en) Ceramic-based buffer thermal insulation layer assisted magnesium alloy surface laser cladding composite coating and preparation method thereof
CN105886870A (en) Preparation method of tungsten alloy with CrAlSiN composite coating
CN112458416A (en) Method for preparing quinary high-entropy alloy spinel coating by magnetron sputtering method
CN109047331A (en) A kind of steel/aluminium thick composite plate hot rolling compounding method
CN108044079A (en) A kind of high-strength alloy and heat-stable ceramic laminated coating die casting and preparation method thereof
CN111172530A (en) Method for repairing silicide coating on surface of Mo alloy sheet
CN108330429B (en) Molybdenum disilicide composite coating and preparation method thereof
CN108267812B (en) High-temperature-resistant optical fiber with gradient structure coating layer
CN109267061B (en) Preparation method of silicide coating on surface of TZM alloy sheet
CN109554660B (en) Preparation method of high-entropy alloy surface boronizing layer
CN114561565B (en) Preparation method of diamond particle reinforced high-entropy alloy composite material
CN115928018A (en) Preparation method of liquid lead/lead bismuth corrosion resistant metal-ceramic composite coating
CN114086179A (en) Preparation method of diamond wear-resistant coating on surface of copper substrate
CN113151820A (en) Preparation method for in-situ synthesis of carbide-reinforced toughened metal-based composite coating by taking expanded graphite as carbon source
CN106119786A (en) A kind of preparation method possessing wear-and corrosion-resistant coating molybdenum alloy sheet material
CN114457272A (en) High-entropy alloy and method for repairing tungsten-based powder alloy die-casting die by laser cladding
CN108115109B (en) Die-casting die for plastic metal ceramic laminated coating and preparation method thereof
CN208016039U (en) Anti-corrosion electric heating tube with DLC film layer
CN110964967B (en) Back plate with low thermal expansion coefficient and manufacturing method thereof

Legal Events

Date Code Title Description
PB01 Publication
PB01 Publication
SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
GR01 Patent grant
GR01 Patent grant