CN109188455A - A kind of cylindrical body plane motion track laser measurement method - Google Patents
A kind of cylindrical body plane motion track laser measurement method Download PDFInfo
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Abstract
The invention discloses a kind of cylindrical body plane motion track laser measurement methods, the present invention is based on cylindrical body geometrical characteristic and the relative positional relationships of laser displacement sensor and cylindrical body, it is analyzed using plane geometry, introducing trigonometric function realizes coordinate variable decoupling of the cylindrical body center of circle displacement in rectangular coordinate system, compared with prior art, have the advantages that scheme is applied widely, system is simple, installation is easy to operate, scheme is versatile and flexible, equipment cost is low etc., is with a wide range of applications and higher promotional value.
Description
Technical field
The invention belongs to motion profile field of optical measurements, and in particular to a kind of cylindrical body plane motion track laser measurement
Method.
Background technique
The advantages that laser measurement has measurement accuracy high, and range is big, and detection time is short, non-cpntact measurement, aerospace,
The fields such as military affairs, medical treatment, industry, agricultural are using more and more extensive.Laser measurement includes two kinds of weights of laser ranging and vibration measurement with laser
Function is wanted, this patent is based on laser ranging technique.Principle is divided into laser triangulation and return laser beam analytic approach.Wherein
Laser triangulation is suitable for the high-accuracy measurement of short distance, and return laser beam analytic approach is suitable for telemeasurement.
Motion profile measurement is the important application of laser measurement, and motion profile measurement can provide important information for research.
Motion trace data can provide important in terms of condition monitoring, error compensation, data fusion, parameter adjustment and algorithm
Analysis foundation and evaluation criterion.Therefore, the measurement of motion profile has important in mobile robot, machining research
Application value.
It is wherein that numerically-controlled machine tool composition error is measured and commented in the typical usage of Circular test measurement amplification based on laser ranging
The circular test method of valence, circular test measurement method and technology are the bases of error measure and evaluation, and measurement accuracy limits number
Control lathe Error Tracing &, compensation, thus influence machine tool accuracy improvement, be modern high end equipment manufacture critical issue it
One.But its principle is to realize that the geometry of circle shape decouples using in the additional plane mirror of circular surfaces, and the method is only able to achieve to circle
The measurement of heart motion profile particular orientation, and measuring system is complicated.
Cylindrical body planar carries out arbitrary motion, and the prior art is for translation in cylindrical body plane using in cylinder body surface
Bright installation additional structure realizes the decoupling of geometry of the circle feature, and then realizes the measurement of center of circle motion profile.But it is adjoint for being translatable
There is irregular this technical solution of the case where rotating around the center of circle infeasible.
Summary of the invention
The purpose of the present invention is to provide a kind of cylindrical body plane motion track laser measurement methods, utilize laser ranging skill
Art is based on geometrical characteristic decoupling algorithm, solves cylindrical geometry feature and cylindrical body spinning campaign and measures center of circle motion profile
Influence problem, realize the continuous real-time measurement of center of circle motion profile in cylindrical body plane.
A kind of cylindrical body plane motion track laser measurement method, includes the following steps:
(1) installation laser displacement sensor is chosen, installation requirement is round in the geometrical characteristic of plane motion according to cylindrical body
When cylinder theory initial position, cylindrical body at a distance from laser displacement sensor for laser displacement sensor displacement measurement center away from
From;
(2) center of circle motion profile laser displacement data Δ x and Δ y is calculated, wherein Δ x is X to displacement component, Δ y
For Y-direction displacement component;
(3) it draws and schemes by the X-Y of reference axis of Δ x and Δ y, is i.e. motion profile of the cylindrical body center of circle in plane.
When the laser displacement sensor is 2, the orthogonal installation of 2 laser displacement sensors;
It is calculated
Wherein, x is x-axis laser displacement sensor laser point in the opposite cylindrical body theory initial position in cylindrical body current location
X to displacement variable;Y is that y-axis laser displacement sensor laser point is theoretical with respect to cylindrical body initial in cylindrical body current location
The Y-direction displacement variable of position;R is cylinder radius.
When the laser displacement sensor is 3, wherein 2 laser displacements in 3 laser displacement sensors are passed
The orthogonal installation of sensor, in addition 1 laser displacement sensor is mounted on passes by preceding 2 laser displacements at midpoint of plane bottom plate center
Sensor wherein 1 opposite;
It is calculated
Wherein, x is x-axis laser displacement sensor laser point in the opposite cylindrical body theory initial position in cylindrical body current location
X to displacement variable, y1 is that the 1st laser displacement sensor laser point of y-axis is managed in cylindrical body current location with respect to cylindrical body
By the Y-direction displacement variable of initial position, y2 is the 2nd laser displacement sensor laser point of y-axis in cylindrical body current location phase
To the Y-direction displacement variable of cylindrical body theory initial position, r is cylinder radius.
When laser displacement sensor is 4, orthogonal be mounted on of 4 laser displacement sensors is with plane bottom plate center
Four orientation at midpoint;
It is calculated
Wherein, x1 is that the 1st laser displacement sensor laser point of x-axis is theoretical with respect to cylindrical body just in cylindrical body current location
For the X of beginning position to displacement variable, x2 is that the 2nd laser displacement sensor laser point of x-axis is relatively round in cylindrical body current location
For the X of cylinder theory initial position to displacement variable, y1 is that the 1st laser displacement sensor laser point of y-axis is current in cylindrical body
With respect to the Y-direction displacement variable of cylindrical body theory initial position, y2 is that the 2nd laser displacement sensor laser point of y-axis exists for position
Y-direction displacement variable of the cylindrical body current location with respect to cylindrical body theory initial position.
The laser displacement sensor cable connects data collection and analysis equipment, and the data collection and analysis equipment is to laser
Displacement sensor electric signal carries out processing analysis.
Further, it when the laser displacement sensor reflection angle is more than maximum reflection angle, calculates perpendicular to laser
Then the measurable range in displacement sensor direction arranges that multiple laser displacement sensors are obtained using this data as spacing
The laser rays of whole region measures network, measures the position monitoring in network in laser rays by the center of circle and carries out cylindrical body center of circle position
Set measurement.
The data collection and analysis equipment is high-speed data acquisition instrument.
Beneficial effects of the present invention are as follows:
The present invention is based on cylindrical body geometrical characteristic and the relative positional relationship of laser displacement sensor and cylindrical body, using flat
Face geometrical analysis, introducing trigonometric function realizes coordinate variable decoupling of the cylindrical body center of circle displacement in rectangular coordinate system, existing
Technology is applied widely compared to had scheme, system is simple, installation is easy to operate, scheme is versatile and flexible, equipment cost is low etc.
Advantage is with a wide range of applications and higher promotional value.
Detailed description of the invention
Fig. 1 is the contactless Circular test of bidifly optical interferometer (periphery) measuring principle figure;
Fig. 2 is cylindrical body plane motion schematic diagram;
Fig. 3 is laser displacement sensor displacement measurement range schematic diagram;
Fig. 4 is center of circle motion profile double excitation displacement data handling principle figure of the invention;
Fig. 5 is that center of circle motion measurement range expands schematic diagram;
Fig. 6 is motion profile three laser displacement data processing principle figure in the center of circle of the invention;
Fig. 7 is motion profile four laser displacement data processing principle figure in the center of circle of the invention;
Wherein,
1- cylindrical body theory initial position;2-cylindrical body current locations;The 3- cylindrical body theory initial position center of circle and right angle
The origin of coordinate system;4- cylindrical body center of circle X is to displacement component Δ x;5-cylindrical body center of circle Y-direction displacement component Δ y;6- cylindrical body
The current location center of circle;7-plane bottom plates;The X-axis of 8- rectangular coordinate system;The Y-axis of 9-rectangular coordinate systems;10- laser displacement sensing
Device;11- displacement measurement centre distance;The 12- displacement measurement upper limit;13- displacement measurement lower limit;14- cylindrical body theory initial position Y
To laser displacement sensor periphery laser point;15- cylindrical body current location Y-direction laser displacement sensor is in cylinder
The laser point in body surface face;Y-direction displacement variable y of the 16-15 with respect to 14;17- cylindrical body theory initial position X is passed to laser displacement
Laser point of the sensor in periphery;18- cylindrical body current location X to laser displacement sensor periphery laser
Point;X of the 19-18 with respect to 17 is to displacement variable x;20- cylinder radius;21-15 and 18 lines and 9 angle a;22-6 and 18
Angle b of the line with 15 and 18 lines;The line of 23-15 and 18 and 8 angle c;24-6 and 15 lines are the same as 15 and 18 lines
Angle d;The signal wire of 25- laser displacement sensor;26- data collecting instrument;Nearby Y-axis swashs 27- cylindrical body theory initial position
Optical displacement sensor laser rays;X-axis laser displacement sensor laser rays near 28- cylindrical body theory initial position;29- cylindrical body
Y-axis laser displacement sensor laser rays near current location;Nearby X-axis laser displacement sensor swashs for 30- cylindrical body current location
Light;31- laser displacement sensor device laser rays measures network;32- third laser displacement sensor is theoretical just in cylindrical body
The laser point of beginning location status periphery;33- third laser displacement sensor is in cylindrical body current position state cylinder
The laser point in body surface face;Displacement variable of the 34-33 with respect to 32;The 4th laser displacement sensor of 35- is theoretical just in cylindrical body
The laser point of beginning location status periphery;The 4th laser displacement sensor of 36- is in cylindrical body current position state cylinder
The laser point in body surface face;Displacement variable of the 37-36 with respect to 35.
Specific embodiment
Further details of the technical solution of the present invention with reference to the accompanying drawings and detailed description.Obviously, institute
The embodiment of description is only a part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiment of the present invention,
Those skilled in the art's every other embodiment obtained without making creative work, belongs to the present invention and wants
Seek the range of protection.
A kind of cylindrical body plane motion track laser measurement method, includes the following steps:
(1) installation laser displacement sensor is chosen, installation requirement is round in the geometrical characteristic of plane motion according to cylindrical body
When cylinder theory initial position, cylindrical body at a distance from laser displacement sensor for laser displacement sensor displacement measurement center away from
From;
(2) center of circle motion profile laser displacement data Δ x and Δ y is calculated, wherein Δ x is X to displacement component, Δ y
For Y-direction displacement component;
(3) it draws and schemes by the X-Y of reference axis of Δ x and Δ y, is i.e. motion profile of the cylindrical body center of circle in plane.
It is specific as follows:
1) laser displacement sensor at a distance from measurement point as far as possible with laser displacement sensor displacement measurement center one
It causes, the orthogonal installation of two laser displacement sensors.The intersection point of two laser displacement sensor laser extended lines is as cylinder theory
The center of circle of initial position is also the center of circle of this local rectangular coordinate system.See Fig. 3 and Fig. 4.
2) cable of laser displacement sensor is connect with data collection and analysis equipment, and data collection and analysis equipment is to laser position
The electric signal of displacement sensor carries out processing analysis and obtains corresponding physical quantity, sees Fig. 4.
3) geometrical characteristic of the displacement variable and cylindrical body obtained based on laser displacement sensor measurement utilizes geometry point
Analysis method obtains center of circle motion profile laser displacement data processing method, sees Fig. 4.
Formula 1 and formula 2 are updated to formula 3 and formula 4 obtains:
4) it is drawn using the data processing software of data collecting instrument and is schemed by the x-y of reference axis of Δ x and Δ y, instant playback
The cylindrical body center of circle can be grasped in real time in the motion profile of plane.
5) measurement range expansion project
It is more than to require due to the requirement to the reflection angle of reflected light of geometrical characteristic and laser displacement sensor of cylindrical body
Reflection angle, the output signal of displacement of laser displacement sensor is unstable, this causes to cylindrical body center of circle plane motion track
Measurement range is limited.The technical solution for solving the problems, such as this is the reflection angle requirement based on laser displacement sensor, is calculated
Obtain the measurable range perpendicular to laser displacement sensor measurement direction.Then multiple laser are arranged using this data as spacing
Displacement sensor obtains the laser rays measurement network of whole region, measures the position monitoring in network in laser rays by the center of circle,
Judgement enables effective laser displacement sensor and carries out the measurement of cylindrical body center location, and then realizes and cover entire motion range area
Domain.See Fig. 5.
6) more laser displacement sensor measurement schemes
The cylindrical body center of circle motion profile measurement scheme of two laser displacement sensors is for the real-time of data acquisition equipment
Computing capability is more demanding.Based on this propose three laser displacement sensors center of circle motion profile measurement scheme and four swash
The center of circle motion profile measurement scheme of Optical displacement sensor.
The center of circle moving track calculation method of three laser displacement sensors, is shown in Fig. 6.
The center of circle moving track calculation method of four laser displacement sensors, is shown in Fig. 7.
Laser displacement sensor is the sensor measured using laser technology, being capable of accurate non-cpntact measurement measured object
The physical quantitys such as length, distance, vibration, the speed of body.The range ability of laser displacement sensor based on laser triangulation
Expression includes measuring center distance and measurement range two indices, sees Fig. 2.
Data collection and analysis equipment is to can be analog quantity and be also possible to count the various physical quantitys to be converted to electric signal
Word amount converts discrete digital amount by A/D, reads A/D conversion value and is stored in memory.The function of data collection and analysis is mainly led to
Software is crossed to realize.
Cylindrical body is the mobile a certain distance of bottom surface up or down with a circle, and the space passed through is called cylindrical body.
Mathematical function expresses formula: sin SIN function;π pi;Atan arctan function;Acos inverse cosine function;abs
ABS function.
Illustrate the specific implementation method of patent by taking certain case history as an example below:
1) geometrical characteristic for grasping cylindrical body first is shown in Fig. 2 such as cylinder height 160mm and radius 200mm;
2) geometrical characteristic for grasping plane bottom plate analyzes cylindrical body in the motion range of plane bottom plate, such as plane bottom plate
Radius is 300mm, then motion range of the cylindrical body in plane bottom plate is ± 100mm, sees Fig. 2;
3) according to cylindrical body in plane bottom plate motion range, determine whether the maximum reflection angle of laser displacement sensor is full
The use condition of sufficient sensor, and then determine the measurement scheme of laser displacement sensor.As this case history is calculated most
Large reflective mirror is 30 °, meets the use condition of laser displacement sensor, then the measurement scheme of laser displacement sensor is tentatively true
It is set to the orthogonal installation of two laser displacement sensors, the intersection points of two laser displacement sensor laser extended lines and plane bottom plate
The center of circle is consistent;
4) according to information above, the range ability of the laser displacement sensor of selection should meet not less than ± 100mm, laser
Displacement sensor displacement measurement centre distance is not less than 300mm, and data collecting instrument should have trigonometric function and calculate and draw x-y figure
Ability, this example choose range ability ± 150mm, and certain model laser displacement sensor of displacement measurement centre distance 500mm is chosen
High-speed data acquisition instrument with more Measurement channels has trigonometric function and calculates and draw ability for drawing, and can real-time online point
Analysis and display, are shown in Fig. 2 and Fig. 3;
5) according to the measurement scheme of early period, the installation of laser displacement sensor is carried out, installation requirement is that cylindrical body is theoretical just
When beginning position, cylindrical body at a distance from laser displacement sensor be laser displacement sensor displacement measurement centre distance, see Fig. 3 and
Fig. 4;
6) laser displacement sensor cable is connected to data collecting instrument, sees Fig. 4;
7) according to the measurement scheme of the laser displacement sensor of selection in the matched software of data collecting instrument, input is corresponding
Cylindrical body center location decoupling algorithm, this case history determine cylindrical body center location decoupling algorithm it is as follows:
8) in the matched software of data collecting instrument, using cylindrical body center of circle X to displacement component as X-axis and Y-direction displacement component
X-y figure is drawn for Y-axis;
9) the cylindrical body center of circle motion profile for moving horizontally cylindrical body comparison x-y figure, checks relative coordinate relationship;
10) practical implementation.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments are it will be apparent that as defined herein one for the patented technology personnel of this field
As principle can realize in other embodiments without departing from the present invention.Therefore, the present invention will not be limited
It is formed on the embodiments shown herein, and is to fit to most wide model consistent with the principles and novel features disclosed in this article
It encloses.
Claims (7)
1. a kind of cylindrical body plane motion track laser measurement method, which comprises the steps of:
(1) installation laser displacement sensor is chosen, installation requirement is cylindrical body in the geometrical characteristic of plane motion according to cylindrical body
When theoretical initial position, cylindrical body is laser displacement sensor displacement measurement centre distance at a distance from laser displacement sensor;
(2) center of circle motion profile laser displacement data Δ x and Δ y is calculated, wherein Δ x is X to displacement component, and Δ y is Y-direction
Displacement component;
(3) it draws and schemes by the X-Y of reference axis of Δ x and Δ y, is i.e. motion profile of the cylindrical body center of circle in plane.
2. laser measurement method according to claim 1, which is characterized in that when the laser displacement sensor is 2, institute
State the orthogonal installation of 2 laser displacement sensors;
It is calculated
Wherein, x is x-axis laser displacement sensor laser point in X of the cylindrical body current location with respect to cylindrical body theory initial position
To displacement variable;Y is y-axis laser displacement sensor laser point in the opposite cylindrical body theory initial position in cylindrical body current location
Y-direction displacement variable;R is cylinder radius.
3. laser measurement method according to claim 1, which is characterized in that when the laser displacement sensor is 3, institute
The wherein orthogonal installation of 2 laser displacement sensors in 3 laser displacement sensors is stated, in addition 1 laser displacement sensor peace
Mounted in using plane bottom plate center as preceding 2 laser displacement sensors at midpoint wherein 1 opposite;
It is calculated
Wherein, x is x-axis laser displacement sensor laser point in X of the cylindrical body current location with respect to cylindrical body theory initial position
To displacement variable, y1 is that the 1st laser displacement sensor laser point of y-axis is theoretical with respect to cylindrical body just in cylindrical body current location
The Y-direction displacement variable of beginning position, y2 are that the 2nd laser displacement sensor laser point of y-axis is relatively round in cylindrical body current location
The Y-direction displacement variable of cylinder theory initial position, r are cylinder radius.
4. laser measurement method according to claim 1, which is characterized in that when the laser displacement sensor is 4, institute
State orthogonal four orientation being mounted on using plane bottom plate center as midpoint of 4 laser displacement sensors;
It is calculated
Wherein, x1 is the 1st laser displacement sensor laser point of x-axis in the opposite cylindrical body theory initial bit in cylindrical body current location
For the X set to displacement variable, x2 is the 2nd laser displacement sensor laser point of x-axis in the opposite cylindrical body in cylindrical body current location
For the X of theoretical initial position to displacement variable, y1 is the 1st laser displacement sensor laser point of y-axis in cylindrical body current location
The Y-direction displacement variable of opposite cylindrical body theory initial position, y2 are the 2nd laser displacement sensor laser point of y-axis in cylinder
Y-direction displacement variable of the body current location with respect to cylindrical body theory initial position.
5. laser measurement method according to claim 1, which is characterized in that the laser displacement sensor cable connection number
According to collection analysis equipment, the data collection and analysis equipment carries out processing analysis to laser displacement sensor electric signal.
6. laser measurement method described in -5 any claims according to claim 1, which is characterized in that the laser displacement passes
When sensor reflection angle is more than maximum reflection angle, the measurable range perpendicular to laser displacement sensor measurement direction is calculated,
Then it arranges that multiple laser displacement sensors obtain the laser rays measurement network of whole region using this data as spacing, passes through circle
Position monitoring of the heart in laser rays measurement network carries out the measurement of cylindrical body center location.
7. laser measurement method according to claim 5, which is characterized in that the data collection and analysis equipment is high speed number
According to Acquisition Instrument.
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111982266A (en) * | 2020-06-24 | 2020-11-24 | 北京航空航天大学 | Laser measurement method for vibration displacement of filament and gun tip of scanning electron microscope electron gun |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11304456A (en) * | 1998-04-27 | 1999-11-05 | Kinugawa Rubber Ind Co Ltd | Measuring device for roundness of cylindrical work |
US20070100554A1 (en) * | 2004-09-01 | 2007-05-03 | Canon Kabushiki Kaisha | Measuring method of cylindrical body |
JP2011242286A (en) * | 2010-05-19 | 2011-12-01 | Seiko Epson Corp | Eccentricity measurement method, eccentricity measurement instrument, control program of the eccentricity measurement instrument, rotating device, and method for manufacturing the rotating device |
CN103808256A (en) * | 2012-11-15 | 2014-05-21 | 中国科学院沈阳自动化研究所 | Non-contact type object planar motion measuring device and implementation method thereof |
CN103968768A (en) * | 2014-04-08 | 2014-08-06 | 沈阳理工大学 | Device and method for precisely measuring inner diameters of workpieces in non-contact manner |
CN104315981A (en) * | 2014-10-10 | 2015-01-28 | 中国科学院光电研究院 | Laser tracker position sensitive detector (PSD) zero tracking calibrating method |
-
2018
- 2018-08-01 CN CN201810866380.5A patent/CN109188455A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH11304456A (en) * | 1998-04-27 | 1999-11-05 | Kinugawa Rubber Ind Co Ltd | Measuring device for roundness of cylindrical work |
US20070100554A1 (en) * | 2004-09-01 | 2007-05-03 | Canon Kabushiki Kaisha | Measuring method of cylindrical body |
JP2011242286A (en) * | 2010-05-19 | 2011-12-01 | Seiko Epson Corp | Eccentricity measurement method, eccentricity measurement instrument, control program of the eccentricity measurement instrument, rotating device, and method for manufacturing the rotating device |
CN103808256A (en) * | 2012-11-15 | 2014-05-21 | 中国科学院沈阳自动化研究所 | Non-contact type object planar motion measuring device and implementation method thereof |
CN103968768A (en) * | 2014-04-08 | 2014-08-06 | 沈阳理工大学 | Device and method for precisely measuring inner diameters of workpieces in non-contact manner |
CN104315981A (en) * | 2014-10-10 | 2015-01-28 | 中国科学院光电研究院 | Laser tracker position sensitive detector (PSD) zero tracking calibrating method |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111982266A (en) * | 2020-06-24 | 2020-11-24 | 北京航空航天大学 | Laser measurement method for vibration displacement of filament and gun tip of scanning electron microscope electron gun |
CN111982266B (en) * | 2020-06-24 | 2022-06-28 | 北京航空航天大学 | Laser measurement method for vibration displacement of filament and gun tip of scanning electron microscope electron gun |
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