CN109187727A - The femtosecond laser for being divided pupil differential confocal Raman-LIBS- mass spectrometry detection processes monitoring method - Google Patents
The femtosecond laser for being divided pupil differential confocal Raman-LIBS- mass spectrometry detection processes monitoring method Download PDFInfo
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Abstract
The present invention relates to the femtosecond lasers of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection to process monitoring method, belongs to laser accurate detection technique, femtosecond laser processing monitoring technical field, can be used for femtosecond laser processing and form physical property comprehensive parameters in situ detection.The present invention will be divided pupil laser differential confocal axial direction monitoring modular and organically blend with femtosecond laser system of processing, carries out high accuracy in-situ on-line monitoring to sample axial position using light splitting pupil differential confocal system and sample axial direction processing dimension measures；Analysis is monitored to information such as molecular structure, element and the ions of specimen material after femtosecond laser processing using Raman spectroscopic detection module, LIBS spectrographic detection module and mass spectrograph, and above- mentioned information are merged by computer, it realizes that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, improves controllability and processing quality of sample of fine structure femtosecond laser machining accuracy etc..
Description
Technical field
The present invention relates to the femtosecond lasers of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection to process monitoring method, special
It is not related to being divided the femtosecond laser processing monitoring method of pupil differential confocal Raman-LIBS- mass spectrometry detection and device, belongs to laser
Precise detection technology, femtosecond laser process monitoring technical field, can be used for the femtosecond laser processing and form of complicated fine structure
Performance synthesis parameter original position on-line checking.
Background technique
Femtosecond laser is processed since wide with adaptability for materials, processing fineness is high, processing is not necessarily to the remarkable advantages such as mask,
And the century property technology for being considered as " may cause the new industrial revolution " is concerned, and by as macro-micro- across scale minute manufacturing
Preferred means obtain the worlds such as China, the U.S. and respectively manufacture first developing for big country.
Femtosecond laser processing is exactly the nonlinear effect using laser and material, in the nanometer ruler for surmounting optical diffraction limit
Make material that forming occur and become second nature on degree, change and regulation while essence is material shape and performance parameter, thus, we
The transient change state for only monitoring material shape in process, performance parameter simultaneously, it is non-could really to disclose femtosecond laser
The mechanism of action and its Evolution linearly processed.
There is also non-linear processing to make object lens axial feeding can not accurate counter sample axial direction for femtosecond laser processing at present
This significant bottleneck problem of removal amount, but it is existing based on the axially monitoring, backscattering coherent tomographic of triangle Optical displacement sensor
The methods of monitoring and optical coherence tomography monitoring, resolution capability are micron or sub-micrometer scale, such as Canadian Queens University
On-line monitoring technique research, but its direction x-y-z are carried out using interference imaging method (OCT) with German brother's Dettingen Laser Experiments room
Monitoring resolution capability only up to micron dimension.As it can be seen that femtosecond process unit due to being restricted by existing monitoring technology, still lacks high
The in-situ monitoring means of performance, this just makes generally existing based on processing, long time-consuming femtosecond laser process equipment: non-linear to go
It removes, axial remove is not allowed；Long time-consuming drift, keeps system of processing unstable；It is unstable point processing, make process scale less etc. general character
Problem.It is inaccurate that it has its source in system of processing axial direction fixed-focus, and then constrains femtosecond laser in across scale key element micro-nano system
Make the application of aspect.
In addition, Material Processing is different in femtosecond laser process, the mechanism of action of femtosecond pulse and substance is not
Together, the form that sample generates in process and performance change difference；Under the action of pulse laser, the molecular structure of sample,
Element ratio and charged ion etc. can change, and how carry out to the physical parameter and morphological parameters of sample after processing is completed
Accurate detection is not only to guarantee the key of machining accuracy and research femtosecond laser processing mechanism, promotes processing technology level
Important prerequisite.
It can be seen that there is an urgent need to study shape in femtosecond laser processing with the rapid development of femtosecond laser processing technology
The in-situ monitoring means of state performance parameter.
In the detection of form performance parameter, it is based on the confocal laser Raman spectroscopic detection skill of Raman (Raman) scattering effect
Art, since the information such as intensity, position, displacement, ratio, halfwidth of detection sample raman microspectroscopy spectrum spectral peak can be passed through, to survey
The parameters such as material domain component, stress, temperature are obtained, and by the important means as form performance parameter test in femtosecond laser
It is obtained into the off-line monitorings such as photoinduced strain, crystal crystalline state, variations in refractive index, carrier density, state of temperature, the ingredient of processing
Function application, but the processing of existing femtosecond laser still lacks the integrated in-situ monitoring hand of femtosecond laser processing form performance parameter
Section, while Raman spectrum form performance detection method cannot also reflect the form performance parameter of processed sample completely, it is necessary to it borrows
Other means are helped, as LIBS (Laser-induced breakdown spectroscopy) spectrum and mass spectrum are micro- to detect sample
The complete information of area's material composition.
In conclusion in existing femtosecond laser processing accurately fixed-focus and alignment can not be carried out to sample, it can not be to processing
In sample morphology performance parameter carry out high-precision in-situ monitoring, result limit femtosecond laser processing effect stability and
Across scale working ability also constrains the raising of femtosecond laser processing mechanism research and processing technology level.
For this purpose, present invention proposition creatively incorporates laser light splitting pupil differential confocal in femtosecond laser system of processing
Raman-LIBS- mass spectrometry detection technology, to realize femtosecond laser processing in form performance parameter integrated in-situ monitoring, be
Femtosecond laser process form performance parameter integration in-situ monitoring provide new tool, promoted femtosecond laser processing precision property and
Macro-micro- across scale working ability etc..
Summary of the invention
The purpose of the present invention is to solve samples in femtosecond laser processing to be also easy to produce axial drift and after processing is completed sample
The problems such as product complex shape state performance parameter in situ detection, the present invention propose light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection
Femtosecond laser processing monitoring method and device, realize axial drift in sample processing procedure, inclined on-line monitoring and
The nanoscale of sample structure axial dimension monitors, it is ensured that the accurate real-time fixed-focus of sample in process, and realize processing
The comprehensive detection of sample micro-raman spectra structure and complicated physical parameter after the completion, feedback modifiers, mechanism for femtosecond laser processing
Research and process modification provide technical foundation, improve the controllability of laser processing precision and the processing quality of sample.
The purpose of the present invention is what is be achieved through the following technical solutions.
The femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection of the invention processes monitoring method, utilizes
Femtosecond laser system of processing carries out fine structure processing to sample, using light splitting pupil laser differential confocal axial direction monitoring modular to sample
Sample surfaces axial position is monitored in real time in product surface topography profile, processing, and to the geometric parameters of sample surfaces after processing
Number is detected, and is detected using molecule structure change of the Raman spectroscopic detection module to specimen material after femtosecond laser processing
Analysis, tests and analyzes the atom of material, small molecule and element information using LIBS spectrographic detection module, utilizes mass spectrograph
The ion information of material is tested and analyzed, fusion is carried out to above- mentioned information and obtains sample microcell form and the comprehensive ginseng of physical property
Number, and then realize that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, it improves micro-
The controllability of fine texture femtosecond laser machining accuracy and the processing quality of sample；
Be divided pupil differential confocal Raman-LIBS- mass spectrometry detection femtosecond laser processing monitoring method the following steps are included:
Step 1: sample is placed on precision stage, sample is driven to be scanned movement by precision stage, using dividing
Pupil differential confocal axial direction monitoring modular is scanned measurement to the surface profile of sample, and by its measurement feedback to calculating
Machine, the adjustment for femtosecond laser system of processing to processing control parameter；
Wherein, light splitting pupil differential confocal axial direction monitoring modular is by laser, beam expander, reflecting mirror, detection object lens, light splitting pupil
Differential detection module composition, light splitting pupil differential detection module are made of hot spot enlarging objective and dual-quadrant detector；Axial monitoring
Collimated light beam is reflected through dichroscope A, after dichroscope B transmission, into object lens and is focused on sample, through sample reflection
The axial monitoring light beam of reflection converges on dual-quadrant detector after reflecting mirror, detection object lens, hot spot enlarging objective, to two quadrant
The signal of the first detection quadrant and the second detection quadrant detection in detector image planes carries out that differential to subtract each other to obtain light splitting pupil differential
Confocal curves；
Zero crossing position according to light splitting pupil differential confocal curve carries out nanoscale monitoring to the axial defocusing position of sample；
Step 2: processing system using the femtosecond laser that femto-second laser, laser space-time Shaping Module, two-dimensional scanner are constituted
System carries out micro-nano structure processing to sample, utilizes light splitting pupil differential confocal axial direction monitoring modular in process in process
The axial position of sample surfaces is monitored；According to axial position of the zero crossing position to sample for being divided pupil differential confocal curve
Carry out nanoscale monitoring；
Step 3: axial position of the computer according to measurement result adjustment sample, adjusts the position of precision stage in real time,
Realize the accurate fixed-focus of sample in process；
Step 4: after processing is completed, using light splitting pupil differential confocal axial direction monitoring modular to sample knot after processing is completed
Structure is scanned measurement, realizes the nano high-precision in situ detection of sample morphology parameter after processing；
Step 5: axial monitoring collimated light beam focuses on sample through object lens, raman scattering spectrum is inspired, spectrum warp
It is detected through dichroscope C by Raman spectroscopic detection module after dichroscope B reflection, to the molecular structural parameter of sample after processing
Carry out in situ detection analysis, wherein Raman detection module is made of Raman-Coupled mirror and Raman spectroscopy detector；
Step 6: pulsed light beam focuses on sample through object lens, inspire plasma plume, part plasma by from
Sub- suction pipe is detected by mass spectrograph, carries out in situ detection analysis to the charged ion of sample after processing；Plasma plume buries in oblivion sending
LIBS spectrum, which is reflected again by dichroscope C after dichroscope B reflection, is detected by LIBS spectrographic detection module, right
The atom of sample, small molecule and element information carry out in situ detection analysis after processing；
Step 7: detecting quadrant and the second detection quadrant, Raman spectroscopy detector, LIBS by the first of dual-quadrant detector
Spectral detector and mass spectrograph, which detect to obtain signal and be transmitted to computer, carries out information fusion, the microcell of the sample after being processed
Form and performance synthesis parameter, and according to the sample physical property in the microcell form of sample and performance synthesis Parameter analysis process
Effect after changing rule and processing is modulated processing laser beam to by laser space-time Shaping Module, improves micro-nano
Controllability and the processing quality of sample of structure femtosecond laser machining accuracy etc..
Femtosecond laser processing light splitting pupil differential confocal Raman, LIBS spectrum and mass spectrum on-line monitoring side of the present invention
Method further includes before processing, carrying out coarse alignment to sample using micro-imaging module；The light that white light source issues is through illumination system
After system, illumination spectroscope, dichroscope B, object lens on uniform irradiation to sample, the light returned through sample is through illumination spectroscope reflection
It is imaged on CCD by imaging len, can determine whether inclination and the position of sample.
The femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring method,
The processing laser beam and axial monitoring collimated light beam that femtosecond laser system of processing issues coaxially are coupled to sample surfaces through object lens,
The processing and detection of micro-nano structure are realized respectively.
The femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection of the invention processes monitoring device, including
Femto-second laser, laser space-time Shaping Module and two-dimensional scanner positioned at femto-second laser exit direction are located at femtosecond laser
Dichroscope A, dichroscope B, object lens and the precision stage of device outgoing beam vertical direction are located at dichroscope A reflection side
To light splitting pupil differential confocal axial direction monitoring modular and positioned at dichroscope C, the Raman spectroscopic detection of dichroscope B reflection direction
Module, positioned at the LIBS spectrographic detection module of dichroscope C reflection direction, ion suction pipe and mass spectrograph positioned at sample side,
Object lens are driven by axial scan device；Light splitting pupil differential confocal axial direction monitoring modular includes laser, is located at laser emitting direction
Beam expander, reflecting mirror and positioned at reflection specular reflection direction detection object lens, light splitting pupil differential detection module；Wherein axial monitoring
Collimated light beam and processing laser beam are coaxially incident on sample surfaces through dichroscope A, object lens.
The femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection of the invention processes monitoring device, including
Light splitting pupil differential detection module can be made of hot spot enlarging objective and dual-quadrant detector, wherein on dual-quadrant detector test surface
First detection quadrant and second detection quadrant it is symmetrical about optical axis；
The femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring device,
Light splitting pupil differential detection module can be also made of hot spot enlarging objective and detection CCD, the first search coverage and the second search coverage
It constitutes, wherein the first search coverage and the second search coverage are located in the image planes of detection CCD, and symmetrical about optical axis；
The femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring device,
Laser space-time Shaping Module can be made of spacing shaping device, temporal shaping device, when carrying out to the laser beam that femto-second laser issues
The combined regulating in domain and airspace parameter improves femtosecond laser working ability.
The femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection of the present invention processes monitoring device,
Sample can also be observed using micro-imaging module, wherein micro-imaging module is by white light source, lighting system, photograph
Bright spectroscope, image-forming objective lens, CCD composition.
Beneficial effect
The method of the present invention, which compares prior art, has following innovative point:
1) using light splitting pupil differential confocal axial direction monitoring technology, improve axial position monitoring capability in process and
Axial dimension detectability solves the problems, such as fixed-focus when the drifting problem and high-precision real in femtosecond laser process, this is
One of innovative point of the invention；
2) using light splitting pupil differential confocal axial direction nanoscale monitoring technology, the high-precision of femtosecond laser processed sample is realized
Axial dimension detectability solves the problem on line detection of femtosecond laser processed sample, this is the two of innovative point of the invention；
3) light beam for being divided pupil differential confocal system, femtosecond laser system of processing is coupled to sample through same object lens, it is real
Show the online position monitoring of sample and axial dimension detection in micro-nano structure process, improves the controllability of process
And processing quality, this is the three of innovative point of the invention；
The method of the present invention has following distinguishing feature:
1. using the light splitting pupil differential confocal technology and femtosecond laser processing technology phase with long working distance and high resolution
In conjunction with, realize the on-line monitoring of the sample axial defocusing position in process, solve in process sample drift
Problem improves the controllability of process；
2. using light splitting pupil differential confocal curve zero crossing carry out sample axial position monitoring, make femtosecond laser beam with
Minimum focal beam spot focus on sample surfaces, it can be achieved that sample high-precision micro-nano technology；
3. inhibiting sample surfaces stray light in monitoring process to monitor axial position using light splitting pupil differential confocal technology
With the interference of axial dimension detection, improves and monitor ability in process on-line.
4. being combined using confocal laser Raman spectrum, LIBS spectrum and mass spectrometry detection technology, realize to the sample after processing
The in-situ monitoring and analysis of product microcell form and the variation of physical property comprehensive parameters, improve processing technology level and processing quality can
Control property.
5. the group of specimen material after being processed using confocal Raman spectra, LIBS spectrum and mass spectrometry detection technology to femtosecond laser
Molecular structure, element information and ionic structure variation carry out in-situ monitoring, can improve existing femtosecond laser process.
6. sample is imaged the slant correction, it can be achieved that sample position using micro-imaging technique, improve processed
Position regulated efficiency in journey.
Detailed description of the invention
Fig. 1 is that the femtosecond laser processing monitoring method of present invention light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection is shown
It is intended to；
Fig. 2 be the present invention light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection femtosecond laser process monitoring method with
Schematic device；
Fig. 3 be the present invention light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection femtosecond laser process monitoring method with
Schematic device；
Fig. 4 is the femtosecond laser processing monitoring method that the present invention flies light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection
Schematic diagram；
Fig. 5 be the present invention light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection femtosecond laser process monitoring method with
Schematic device；
Fig. 6 be the present invention light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection femtosecond laser process monitoring method with
Schematic device.
Wherein: 1- is divided pupil differential confocal axial direction monitoring modular, 2- laser, 3- beam expander, 4- axially monitoring directional light
Beam, 5- dichroscope A, 6- dichroscope B, 7- object lens, 8- axial scan device, 9- sample, 10- precision stage, 11- axis of reflection
Pupil differential detection module, 15- femto-second laser, 16- laser are divided to monitoring light beam, 12- reflecting mirror, 13- detection object lens, 14-
Space-time Shaping Module, 17- processing laser beam, 18- two-dimensional scanner, 19- hot spot enlarging objective, 20- dual-quadrant detector,
21- first detects quadrant, 22- second detects quadrant, 23- is divided pupil differential confocal curve, 24- Raman-Coupled lens, 25- Raman
Spectral detector, 26- Raman spectroscopic detection module, 27-LIBS coupled lens, 28-LIBS spectral detector, 29-LIBS spectrum
Detecting module, 30- plasma plume, 31- ion suction pipe, 32- mass spectrograph, 33- computer, 34- dichroscope C, 35- detection
CCD, 36- detect hot spot, the first search coverage of 37-, the second search coverage of 38-, 39- spacing shaping device, 40- temporal shaping device,
41- white light source, 42- lighting system, 43- micro-imaging module, 44- illumination spectroscope, 45- spectroscope, 46- imaging len,
47-CCD。
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The basic idea of the invention is that: long working distance, the high light splitting pupil laser differential confocal axially differentiated axially are monitored
Module organically blends with femtosecond laser system of processing, using light splitting pupil differential confocal curve zero point to sample axial defocusing position into
The monitoring of row nanoscale, the axial fixed-focus in real time of sample and axial position monitoring, solve the axial drift in femtosecond laser process
The problems such as shifting and on-line checking, and the detection of sample molecule structure is carried out using the Raman spectrum of continuous laser excitation, utilize pulse
The plasma plume that laser excitation sample generates carries out mass spectrometry detection and obtains sample charged particle and molecular weight information, and collects spy
Small molecule and element information that plasma buries in oblivion the LIBS spectrum acquisition sample of generation are surveyed, the fusion for passing through information obtains sample
Microcell form and performance synthesis parameter, realize comprehensive monitoring and the analysis of the effect processed to femtosecond laser, improve micro-nano
Controllability and the processing quality of sample of structure femtosecond laser machining accuracy etc..Micro-imaging can also be merged in above system
Module carries out coarse alignment to sample using micro-imaging module.
Embodiment 1
Such as Fig. 1, the surface location of sample 9 and processed before being processed using 1 Dui of pupil differential confocal axial direction monitoring modular of light splitting
The axial position of sample 9 is monitored in journey, computer 33 to two-dimensional scanner 18, precision stage 10, axial scan device 8 into
Row feedback control is realized and is processed and the 3-D scanning monitored and position adjustment to sample 9；Femtosecond laser system of processing is swashed by femtosecond
Light device 15, laser space-time Shaping Module 16, two-dimensional scanner 18 are constituted.
Light splitting pupil differential detection device 14 is made of hot spot enlarging objective 19 and dual-quadrant detector 20.It is divided pupil differential confocal
The femtosecond laser processing monitoring method implementation steps of Raman-LIBS- mass spectrometry detection are as follows:
1) sample 9 is placed on precision stage 10, drives sample 9 to be scanned movement by precision stage 10；
2) before processing, measurement is scanned to the surface of sample 9 using light splitting pupil differential confocal axial direction monitoring modular 1；Axis
To monitoring collimated light beam 4 after dichroscope A5 reflection, dichroscope B6 transmission, focused on sample 9 by object lens 7, through sample 9
Axially monitoring light beam 11 is split the reception of pupil differential confocal axial direction monitoring modular 1 for the reflection of reflection；Wherein, it is divided pupil differential confocal
Axial monitoring modular 1 is made of laser 2, beam expander 3, reflecting mirror 12, detection object lens 13, light splitting pupil differential detection device 14；Axis
To monitoring collimated light beam 4 after dichroscope A5 reflection, dichroscope B6 transmission, focused on sample 9 by object lens 7, through sample 9
Axially monitoring light beam 11 is visited by converging to two quadrant after reflecting mirror 12, detection object lens 13, hot spot enlarging objective 19 for the reflection of reflection
Survey on device 20, on 20 test surface of dual-quadrant detector the first detection quadrant 21 and the second obtained signal of detection quadrant 22 into
Row processing, obtains any light splitting pupil differential confocal signal of 9 surface of sample；
3) axial scanner 8 is controlled by computer 33 and axial scan is carried out to sample 9, obtain the difference with actual zero point
Dynamic confocal curves 23；
4) nanoscale prison is carried out to the axial position of sample 9 according to the zero crossing position of light splitting pupil differential confocal curve 23
It surveys, computer 33 is adjusted the processing control parameter of femtosecond laser system of processing according to measurement result；
5) the processing laser beam 17 modulated through laser space-time Shaping Module 16 is through dichroscope A5, dichroscope B6 and object
The surface that mirror 7 focuses on sample 9 laser machines sample 9, and the scanning machining of film micro area controls two dimension by computer 33 and sweeps
Retouch the completion of device 18；
6) in process, light splitting pupil differential confocal axial direction monitoring modular 1 to the axial position of sample 9 in process into
Row monitoring；
7) monitoring that computer 33 controls precision stage 10, feeds back according to light splitting pupil differential confocal axial direction monitoring modular 1
As a result 9 position of sample is adjusted, realizes the accurate fixed-focus of sample in process, eliminate the influence of sample drift；
8) axial scanner 18 is controlled by computer 33 and precision stage 10 is scanned sample 9, processed
Sample micro-nano structure axial dimension afterwards realizes the nanoscale detection of 9 axial dimension of sample；By Raman spectroscopic detection module 26,
The performances ginseng such as molecular structure, atom, small molecule and element of sample after LIBS spectral detector 28 and the acquisition processing of mass spectrograph 32
Number, and then realize the high accuracy in-situ detection of 9 form performance parameter of sample after processing；
9) according in the microcell form of sample and performance synthesis Parameter analysis process sample physical property changing rule and
Effect after detection processing, is modulated to by 16 pairs of processing laser beams 17 of laser space-time Shaping Module, improves micro-nano knot
The controllability of structure femtosecond laser machining accuracy and the processing quality of sample.
Embodiment 2
As shown in Fig. 2, light splitting pupil differential detection device 14 is by hot spot enlarging objective 19 and detection CCD35, the first search coverage
37 and second search coverage 38 constitute, wherein the first search coverage 37 and the second search coverage 38 are located at the image planes of detection CCD35
It is upper and symmetrical about optical axis；Using light splitting pupil differential confocal axial direction monitoring modular 1 to the axial position of sample 9 in process
When being monitored with axial dimension, the axial collimated light beam 4 that monitors is after dichroscope A5 reflection, dichroscope B6 transmission, by object
Mirror 7 focuses on sample 9, and axially monitoring light beam 11 is put by reflecting mirror 12, detection object lens 13, hot spot for the reflection reflected through sample 9
It is converged to after big object lens 19 on detection CCD35, to the first search coverage 37 and the second search coverage 38 in detection CCD35 image planes
Obtained signal is handled, any light splitting pupil differential confocal signal of 9 surface of sample is obtained.
Remaining step is same as Example 1.
Embodiment 3
As shown in figure 3, laser space-time Shaping Module 16 is made of spacing shaping device 39 and temporal shaping device 40, femtosecond is swashed
The light beam that light device 15 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.
Remaining is same as Example 1.
Embodiment 4
As shown in figure 4, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 43 to sample
9 carry out coarse alignment, and the light that white light source 41 issues is raw after lighting system 42, illumination spectroscope 44, dichroscope B6, object lens 7
At the illumination light that on collimated light beam uniform irradiation to sample 9, sample 9 is scattered through imaging len 46 after illumination spectroscope 44 reflects
It is imaged on CCD47, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 1.
Embodiment 5
As shown in figure 5, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 43 to sample
9 carry out coarse alignment, and the light that white light source 41 issues is raw after lighting system 42, illumination spectroscope 44, dichroscope B6, object lens 7
At the illumination light that on collimated light beam uniform irradiation to sample 9, sample 9 is scattered through imaging len 46 after illumination spectroscope 44 reflects
It is imaged on CCD47, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 2.
Embodiment 6
As shown in fig. 6, laser space-time Shaping Module 16 is made of spacing shaping device 39 and temporal shaping device 40, femtosecond is swashed
The light beam that light device 15 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.
Before processing, after sample 9 being placed in precision stage 10, it is thick right to be carried out using micro-imaging module 43 to sample 9
Standard, the light that white light source 41 issues generate collimated light beam after lighting system 42, illumination spectroscope 44, dichroscope B6, object lens 7
On uniform irradiation to sample 9, the illumination light that sample 9 scatters is imaged onto after illumination spectroscope 44 reflects through imaging len 46
On CCD47, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 2.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (8)
1. the femtosecond laser for being divided pupil differential confocal Raman-LIBS- mass spectrometry detection processes monitoring method, it is characterised in that: utilize
Femtosecond laser system of processing carries out fine structure processing to sample, using light splitting pupil laser differential confocal axial direction monitoring modular to sample
Sample surfaces axial position is monitored in real time in product surface topography profile, processing, and to the geometric parameters of sample surfaces after processing
Number is detected, and is detected using molecule structure change of the Raman spectroscopic detection module to specimen material after femtosecond laser processing
Analysis, tests and analyzes the atom of material, small molecule and element information using LIBS spectrographic detection module, utilizes mass spectrograph
The ion information of material is tested and analyzed, fusion is carried out to above- mentioned information and obtains sample microcell form and the comprehensive ginseng of physical property
Number, and then realize that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, it improves micro-
The controllability of fine texture femtosecond laser machining accuracy and the processing quality of sample；
The following steps are included:
Step 1: sample (9) is placed on precision stage (10), sample (9) are driven to be scanned by precision stage (10)
Movement is scanned measurement to the surface profile of sample (9) using light splitting pupil differential confocal axial direction monitoring modular (1), and by its
Measurement feedback gives computer (33), the adjustment for femtosecond laser system of processing to processing control parameter；
Wherein, light splitting pupil differential confocal axial direction monitoring modular (1) is by laser (2), beam expander (3), reflecting mirror (12), detection object
Mirror (13) and light splitting pupil differential detection module (14) composition；Be divided pupil differential detection module (14) by hot spot enlarging objective (19) and
Dual-quadrant detector (20) composition；Axial monitoring collimated light beam (4) transmits through dichroscope A (5) reflection, dichroscope B (6)
Afterwards, into object lens (7) and be focused on sample (9), the reflection through sample (9) reflection axially monitoring light beam (11) through reflecting mirror
(12), it is converged on dual-quadrant detector (20) after detecting object lens (13) and hot spot enlarging objective (19), to dual-quadrant detector
(20) differential subtract each other of signal progress of the first detection quadrant (21) in image planes and the second detection quadrant (22) detection is divided
Pupil differential confocal curve (23)；
Zero crossing position according to light splitting pupil differential confocal curve (23) carries out nanoscale prison to the axial defocusing position of sample (9)
It surveys；
Step 2: being swashed using the femtosecond that femto-second laser (15), laser space-time Shaping Module (16), two-dimensional scanner (18) are constituted
Light system of processing carries out micro-nano structure processing to sample (9), utilizes light splitting pupil differential confocal axial direction monitoring modular in process
(1) axial position on sample in process (9) surface is monitored；Zero passage according to light splitting pupil differential confocal curve (23)
Point position carries out nanoscale monitoring to the axial position of sample (9)；
Step 3: axial position of the computer (33) according to measurement result adjustment sample (9), adjusts precision stage (10) in real time
Position, realize process in sample the accurate fixed-focus of axial direction；
Step 4: after processing is completed, using light splitting pupil differential confocal axial direction monitoring modular (1) to sample structure after processing is completed
It is scanned measurement, realizes the nano high-precision in situ detection of sample (9) morphological parameters after processing；
Step 5: axial monitoring collimated light beam (4) focuses on sample (9) through object lens (7), raman scattering spectrum is inspired, it should
Spectrum is detected through dichroscope C (34) by Raman spectroscopic detection module (26) after dichroscope B (6) are reflected, after processing
The molecular structural parameter of sample carries out in situ detection analysis, wherein Raman detection module (26) is by Raman-Coupled mirror (24) and draws
Graceful spectral detector (25) composition；
Step 6: pulsed light beam focuses on sample (9) through object lens (7), plasma plume (30), part plasma are inspired
It is detected by ion suction pipe (31) by mass spectrograph (32), in situ detection analysis is carried out to the charged ion of sample after processing；Deng from
Daughter plumage (30), which is buried in oblivion, issues LIBS spectrum, which is reflected by dichroscope C (34) again after dichroscope B (6) are reflected,
It is detected by LIBS spectrographic detection module (29), in situ detection point is carried out to the atom of sample, small molecule and element information after processing
Analysis；
Step 7: detecting quadrant (21) and the second detection quadrant (22), Raman spectrum spy by the first of dual-quadrant detector (20)
Survey device (25), LIBS spectral detector (28) and mass spectrograph (32) detection obtain signal be transmitted to computer (33) progress information melt
It closes, the microcell form and performance synthesis parameter of the sample after being processed, and is joined according to the microcell form and performance synthesis of sample
Sample physical property changing rule in number analysis process and the effect after processing, to right by laser space-time Shaping Module (16)
Processing laser beam (17) is modulated, and improves the controllability of micro-nano structure femtosecond laser machining accuracy and the processing quality of sample
Deng.
2. the femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 1 processes monitoring
Method, it is characterised in that: further include before processing, coarse alignment being carried out to sample (9) using micro-imaging module (43)；It is described aobvious
Micro- image-forming module (43) includes: white light source (41), lighting system (42), illumination spectroscope (44), spectroscope (45), is imaged thoroughly
Mirror (46) and CCD (47)；The light that white light source (41) issues is through lighting system (42), illumination spectroscope (44), dichroscope B
(6), object lens (7) are afterwards on uniform irradiation to sample (9), the light returned through sample (9) after illumination spectroscope (44) reflection through point
Light microscopic (45) and imaging len (46) are imaged on CCD (47), are capable of inclination and the position of judgement sample (9).
3. the femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 1 processes monitoring
Method, it is characterised in that: the processing laser beam (17) and axial monitoring collimated light beam (4) warp that femtosecond laser system of processing issues
Object lens (7) are coaxially coupled to sample (9) surface, realize the processing and detection of micro-nano structure respectively.
4. being divided the confocal Raman-LIBS- mass spectrometry detection femtosecond laser of pupil processes monitoring integration device, it is characterised in that: including
Femto-second laser (15), the laser space-time Shaping Module (16) and two-dimensional scanner for being located at femto-second laser (15) exit direction
(18), positioned at the dichroscope A (5) of femto-second laser (15) outgoing beam vertical direction, dichroscope B (6), object lens (7) and
Precision stage (10) is located at the light splitting pupil differential confocal axial direction monitoring modular (1) of dichroscope A (5) reflection direction and is located at
It is anti-to be located at dichroscope C (34) by the dichroscope C (34) of dichroscope B (6) reflection direction, Raman spectroscopic detection module (26)
The LIBS spectrographic detection module (29) in direction is penetrated, the ion suction pipe (31) and mass spectrograph (32) of sample (9) side, object lens are located at
(7) it is driven by axial scan device (8)；Light splitting pupil differential confocal axial direction monitoring modular (1) includes laser (2), is located at laser
(2) beam expander (3), reflecting mirror (12) of exit direction and the detection object lens (13) positioned at reflecting mirror (12) reflection direction, light splitting
Pupil differential detection module (14), wherein axial monitoring collimated light beam (4) and processing laser beam (17) are through dichroscope A (5), object
Mirror (7) is coaxially incident on sample (9) surface.
5. the femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 4 processes monitoring
Device, it is characterised in that: light splitting pupil differential detection module (14) is by hot spot enlarging objective (19) and dual-quadrant detector (20) structure
At wherein the first detection quadrant (21) on dual-quadrant detector (20) test surface and the second detection quadrant (22) are about optical axis pair
Claim.
6. the femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 4 processes monitoring
Device, it is characterised in that: light splitting pupil differential detection module (14) can also be by hot spot enlarging objective (19), detection CCD (35), first
Search coverage (37) and the second search coverage (38) are constituted, wherein the first search coverage (37) and the second search coverage (38) are located at
In the image planes for detecting CCD (35), and it is symmetrical about optical axis.
7. the femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 4 processes monitoring
Device, it is characterised in that: laser space-time Shaping Module (16) can be made of spacing shaping device (39), temporal shaping device (40), right
The laser beam that femto-second laser (15) issues carries out the combined regulating of time domain and airspace parameter, improves femtosecond laser micro-nano technology energy
Power.
8. the femtosecond laser of light splitting pupil differential confocal Raman-LIBS- mass spectrometry detection according to claim 4 processes monitoring
Device, it is characterised in that: sample (9) can also be observed using micro-imaging module (43), wherein micro-imaging module
(43) it is made of white light source (41), lighting system (42), illumination spectroscope (44), image-forming objective lens (46), CCD (47)；White light
The light that light source (41) issues uniform irradiation after lighting system (42), illumination spectroscope (44), dichroscope B (6), object lens (7)
To on sample (9), the light returned through sample (9) is imaged onto CCD through imaging len (46) after illumination spectroscope (44) reflection
(47) on.
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