CN109186954A - Diode laser dynamic wavelength measuring device and method under a kind of wavelength modulation case - Google Patents
Diode laser dynamic wavelength measuring device and method under a kind of wavelength modulation case Download PDFInfo
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Abstract
The present invention relates to the diode laser dynamic wavelength measuring device and method under a kind of wavelength modulation case, device includes etalon, photodetector, signal generator and data acquisition process equipment；The connection of the external modulation port of signal generator and diode laser, generates Sine Modulated voltage signal, is modulated for the output wavelength to diode laser；The input terminal of etalon is connected with the exit end of diode laser, for generating interference light intensity signal；The received optical signal of institute is converted voltage signal by the connection of the output end of photodetector and etalon；Method of the invention is the inverting optical maser wavelength dynamic change parameter a by the way of interference peaks identification and Sine-Fitting1,a2,Wavelength measurement precision can be better than 0.001cm‑1, the speed of response can be better than 25MHz, solve the problems, such as diode laser dynamic wavelength high-precision under wavelength modulation case, high speed of response wavelength measurement.
Description
Technical field
The present invention relates to a kind of optical precision measurement technologies, measure and fill more particularly to tunable continuous laser dynamic wavelength
It sets and method.
Background technique
Diode laser is small with size, low in energy consumption with it, the service life is long, narrow linewidth, tunable wave length, cheap etc.
Advantage, and it is widely used in optic communication, light sensing, tunable diode laser absorption spectroscopy (Tunable diode laser
Absorption spectroscopy, TDLAS) etc. in technologies.In TDLAS measuring technique, in order to improve detectivity and
Anti-interference ability, people generally use wavelength modulation absorption process, i.e. the output wavelength of diode laser is made just with specific frequency
String wave variation, so that corresponding absorption signal has the modulation intelligence of specific frequency, to be conducive to the examination and spy of absorption signal
It surveys.Therefore, the output wavelength of diode laser is extremely crucial parameter to the response characteristic of modulation voltage, and which determine tools
The modulation voltage amplitude of body and the selection of frequency, and wavelength modulation absorption process is surveyed in the nonlinear response for being conducive to analyze laser
The influence of amount.
Since the size of wavelength modulation amplitude is presented as wavelength modulation voltage in actual wavelength absorption measuring system
Size；Laser wavelength is not linear to the dynamic response of modulation voltage, and under different modulating frequency, modulation voltage,
Dynamic response characteristic is different.So accurately measurement diode laser wavelength can be accurate with the response characteristic of modulation voltage
TDLAS wavelength modulates absorption process data inversion and provides necessary diode laser parameter.
Narrow linewidth, the typical feature of tunable diode laser be output wavelength with the Injection Current variation of diode and
Variation (specific implementation is the driving voltage for changing laser).In TDLAS wavelength modulation absorption process, if diode laser
The modulation voltage (unit V) of device are as follows:
U (t)=usin (2 π ft) (1)
Wherein, u is the amplitude (unit V) of modulation voltage, and f is the frequency (unit Hz) of modulation voltage.In the modulation voltage
Under driving, the output wavelength of diode laser changes with modulation voltage and is changed.Due to laser output wavelength and non-fully with
Modulation voltage linear change, but there are certain nonlinear responses.Therefore, laser output wavelength change frequency is in addition to fundamental frequency f
Outside, there is also certain harmonic wave 2f ingredients.Then output wavelength (the unit cm of laser-1) may be expressed as:
Wherein, a0Indicate laser Static output wavelength, a1And a2The respectively linear modulation depth and non-linear modulation of wavelength
Depth (unit cm-1),WithRespectively accordingly relative to the phase offset (unit rad) of modulation voltage.Therefore, for
Specific modulation voltage, the parameter for needing to measure have a1,a2,
In TDLAS wavelength modulation absorption process, the linear wavelength modulation depth a of diode laser1Depending on specific
Absorption line line width, usually 0.1cm-1Left and right；And wavelength modulating frequency f then depends on specifically measuring repetition rate, usually
For tens of kHz to hundreds of kHz.Therefore, to the precise measurement of realization diode laser dynamic wavelength, then wavelength measurement is required
The precision of equipment is at least up to 0.01cm-1, measure the speed of response and be at least up to MHz.Currently, the wavelength measuring equipment master of commercialization
There are spectrometer and wavemeter, wherein the measurement for being mainly used for static wavelength of spectrometer, it is difficult to meet laser dynamic wavelength
Real-time measurement；Although wavemeter has certain speed of response, but currently on the market almost without meeting above-mentioned two simultaneously
The commercial prod of measurement index.
To solve the problems, such as high-precision, high speed of response wavelength measurement, domestic and international related researcher is using some from grinding
Wavelength measurement method analyzes the dynamic wavelength characteristic of diode laser.For example, Liu Jingwang et al. utilizes all -fiber Mach-
Zehnder interferometer measurement distributed feedback diode laser length scanning characteristic.A.Lytkine et al. uses Fabry-
Perot etalon realizes dynamic wavelength of the Vertical Cavity Surface emitting diode laser in 100Hz sawtooch sweep
Measurement, wavelength measurement precision 0.056cm-1.Above-noted persons are only the dynamics realized in the case of diode laser wavelength tuning
Wavelength measurement, in order to analyze the laser wavelength dynamic response characteristic under wavelength modulation case, J.Chen et al. utilizes wavelength tune
Absorption signal processed counter releases wavelength linear modulation depth a with the variation characteristic of wavelength modulating frequency1It is bent with the variation of modulating frequency
Line, but this method not yet realizes phaseWith wavelength non-linear modulation depth a2Measurement.
Summary of the invention
To solve the diode laser dynamic wavelength high-precision under wavelength modulation case, high speed of response wavelength measurement is asked
Topic, the present invention provides the diode laser dynamic wavelength measuring devices and method under a kind of wavelength modulation case.
Technical solution of the invention is as follows:
A kind of diode laser dynamic wavelength measuring device under wavelength modulation case, be characterized in that including
Etalon, photodetector, signal generator, data acquisition process equipment；
The connection of the external modulation port of the signal generator and diode laser, generates Sine Modulated voltage signal, uses
It is modulated in the output wavelength to diode laser；
The input terminal of the etalon is connected with the exit end of diode laser, for generating interference light intensity signal；
The received optical signal of institute is converted voltage signal by the connection of the output end of the photodetector and etalon；
The data acquisition process equipment is connect with photodetector and signal generator, and synchronous recording photodetector is visited
The Sine Modulated voltage signal that the interference light intensity signal and signal generator of survey generate, and according to interference light intensity signal and sinusoidal tune
Voltage signal processed calculates diode laser dynamic wavelength.
Further, the etalon is optical fibre ring etalon, and the optical fibre ring etalon is by 2 × 2 fiber couplings
Device constitute, 2 × 2 fiber couplers include two input ports and two output ports, one of input port and one it is defeated
Exit port connection, input terminal of another input port as optical fibre ring etalon, another output is as optical fibre ring
The output end of etalon.
Etalon of the invention can also have other alternative structures, such as Fabry-Perot etalon, Michelson interference
Instrument, Mach-Zehnder interferometer etc..The present invention is light as the advantages of optical fibre ring etalon using 2 × 2 fiber couplers
Road is simple, without adjusting, furthermore optical fibre ring etalon be easy increase chamber it is long by way of (chamber long > 100cm) reduce mark
The Free Spectral Range of quasi- tool, to improve wavelength measurement precision.
Further, the photodetector is the DET 10D/M type detector of Throlabs company production；The data
Acquiring and processing device uses the M4i-2212 type data collecting card of Spectrum company production.
Meanwhile the present invention also provides utilize the diode laser dynamic wavelength measurement under above-mentioned wavelength modulation case
The method that device carries out dynamic wavelength measurement, is characterized in that, comprising the following steps:
1) static working current and operating temperature for adjusting diode laser, so that laser Static output wavelength and reality
Application demand is consistent (in TDLAS technical application, the Static output wavelength of laser is consistent with absorption line central wavelength)；
2) frequency is generated using signal generator and be the Sine Modulated voltage signal of f, and the signal is connected to diode
The external modulation port of laser is modulated laser passive wave length；
3) it is input to etalon through the modulated laser signal of wavelength, then will appear the period across the laser intensity of etalon
Property variation, be denoted as interference light intensity signal；
4) voltage signal is converted by interference light intensity signal using photodetector, and synchronous with data acquisition process equipment
The voltage signal that record interference light intensity signal is converted and the Sine Modulated voltage signal generated by signal generator；
5) data processing
5.1) interception sampling length is greater than the interference light intensity signal and modulation voltage of a Sine Modulated voltage signal cycles
Signal；
5.2) burr above the interference light intensity signal of interception is first filtered out using low-pass filter and retains interference peak position
Information, filtered signal are I1；
The low-pass filter for using high-order again, obtains the interference peaks signal base line of the interference light intensity signal of interception, after filtering
Signal be denoted as I2；
5.3) ln (I is made to filtering signal twice2/I1) operation, the interference peak-to-peak signal of high s/n ratio is obtained, is known using peak value
Other function searches out the position of each interference peaks；
5.4) become according to the wavelength change between the Free Spectral Range of etalon, interference peak position and adjacent interference peaks
Gesture, Inversion Calculation wavelength change over time curve；
5.5) it is fitted
5.5.1) the Sine Modulated voltage signal of interception is fitted using the SIN function that frequency is f, fitting result
It is denoted as:F is the frequency of sinusoidal modulated voltage signal；
5.5.2 it) changes over time curve to wavelength using the SIN function that frequency is f to be fitted, and digital simulation is residual
Difference, fitting result are denoted as:
5.5.3) using the SIN function that frequency is 2f to 5.5.2) regression criterion in step is fitted, fitting result
It is denoted as:
6) calculation formulaIn a1,a2,
Specific algorithm are as follows: a1=a1fitting；a2=a2fitting；
Further, in step 5.1) interference light intensity signal and modulated voltage signal intercept method are as follows:
According to data acquisition process equipment sample rate DAQRateSignal period tune is calculated with Sine Modulated voltage signal frequency f
The data of voltage signal processed are counted, calculation formula are as follows:
Intercept interference light intensity signal and modulated voltage signal that sampling length is greater than N.
Compared with prior art, the present invention advantage is:
1, the diode laser dynamic wavelength measuring device and method under a kind of wavelength modulation case of the present invention, utilizes mark
Quasi- tool and photodetector realize the interference peaks monitoring in diode laser wavelength modulation process, are then identified using interference peaks
With the mode inverting optical maser wavelength dynamic change parameter a of Sine-Fitting1,a2,Wavelength measurement precision can be better than 0.001cm-1, the speed of response can be better than 25MHz.
Such as: the present invention uses high speed of response detector (10ns) and high-speed data collecting and processing equipment (sample rate
1.25GS/s), even if complete interference peaks need 50 data points to be recorded, then the wavelength of annular chamber optical fiber etalon
Measurement rate also can reach 25MHz.
Apparatus of the present invention etalon can use optical fibre ring etalon, and optical fibre ring etalon is easy long by increasing chamber
Mode (chamber long > 100cm) come the Free Spectral Range for the tool that debases the standard, Free Spectral Range can be made better than 0.005cm-1, this
Outer a1And a2It is to be obtained on the basis of Sine-Fitting, it can be seen that final wavelength measurement precision is better than from attached drawing 5 (c)
0.001cm-1。
2, a whole set of measuring device price relative moderate of the present invention, measurement method use sequencing, easily operated.
Detailed description of the invention
Fig. 1 is the diode laser modulation wavelength measuring device of the embodiment of the present invention；
Fig. 2 is interference light intensity signal and the modulated voltage signal interception signal of measurement of the embodiment of the present invention；
Fig. 3-1 is that interference light intensity of embodiment of the present invention signal twice illustrate by filtering；
Fig. 3-2 is the enlarged drawing of A segment signal in Fig. 3-1；
Fig. 4 is that the interference peaks of interference light intensity of embodiment of the present invention signal identify signal；
Fig. 5 is the Sine-Fitting signal of modulation voltage of the embodiment of the present invention, linear wavelength, non-linear wavelength；
Fig. 6-1 is the wavelength linear modulation depth a under the different modulating voltage of measurement1With modulating frequency change curve；
Fig. 6-2 is the wavelength linear phase modulation under the different modulating voltage of measurementWith modulating frequency change curve；
Fig. 7-1 is the wavelength non-linear modulation depth a under the different modulating voltage of measurement2With modulating frequency change curve；
Fig. 7-2 is the wavelength non-linear modulation phase under the different modulating voltage of measurementWith modulating frequency change curve；
Wherein appended drawing reference are as follows: 1- signal generator, 2- Sine Modulated voltage signal, 3- diode laser, 4- optical fiber
Flange head, 5- etalon, 6- photodetector, 7- data acquisition process equipment.
Specific embodiment
The present invention is realized in diode laser wavelength modulation process using annular chamber optical fiber etalon and photodetector
Interference peaks monitoring, then using interference peaks identify and Sine-Fitting by the way of inverting optical maser wavelength dynamic change parameter a1,
a2,
Parameter fitting of the invention is the principle according to Fourier expansion:
Wavelength under the sinusoidal voltage modulation that modulating frequency is f, which changes over time curve, to be expressed as:
In formula, a0For DC terms, a1For single order item, a2For second order term.It can be obtained according to the corresponding relationship of (2) formula He (3) formula
Out, it is fitted if changing over time curve to wavelength using the sine wave that frequency is f, a can be obtained1WithRegression criterion
It may be expressed as:
If being fitted using the sine wave that frequency is 2f to regression criterion, a can be obtained2With
One embodiment of the present of invention is described in detail below in conjunction with attached drawing.
In the present embodiment, diode laser is DFB type diode laser, and DFB type diode laser is TDLAS
Wavelength modulates the most commonly used laser source in absorption process, using the method for the present invention to DFB type diode laser modulation wavelength into
The device of row measurement is as shown in Fig. 1, and diode laser produces NLK1B5EAAA using NTT electronics, inc. of Japan
Type diode laser, central wavelength 1342.11nm, corresponding water is in 7450.932cm-1The absorption line at place；Laser controller
The LDC-3724C type controller produced using ILX Light wave company；Signal generator is using Imtech's production
AFG310；Optical fibre ring etalon is to be made of 2 × 2 fiber couplers of 1315nm, a length of 119cm of the chamber of annular chamber, from
It is 0.0057cm by spectral region-1；Photodetector is the DET 10D/M type detector of Throlabs company production；Data are adopted
Collect the M4i-2212 type data collecting card that processing equipment uses the production of Spectrum company, sample rate is set as 1.25GHz.Using
The device carries out dynamic wavelength measurement method, comprising the following steps:
1) static working current and operating temperature of diode laser 3 are respectively set to T=13.52 DEG C, I=75mA,
So that laser Static output wavelength is 1342.11nm, corresponding water is in 7450.932cm-1The absorption line at place.
2) it is 50kHz using the generation frequency of signal generator 1, the sinusoidal signal that amplitude is 0.5V, and the signal is connected
To the external modulation port of diode laser.
3) laser of diode laser output is input to etalon 5 by optical fiber, can be by optical fiber flange head 4 by two
The optical fiber of light and etalon input terminal of pole pipe laser output connects, and etalon is optical fibre ring etalon, then when
When laser wavelength changes, the laser intensity across optical fibre ring etalon will appear cyclically-varying, be denoted as interference light
Strong signal.
4) it is converted into voltage signal using the interference light intensity signal that photodetector 6 passes through optical fibre ring etalon, and
It is sent out with the interference light intensity signal of 7 synchronous recording photodetector 6 of data acquisition process equipment detection and by signal generator signal
The Sine Modulated voltage signal 2 that raw device 1 generates.
5) computer digital animation
5.1) according to 7 sample rate (DAQ of data acquisition process equipmentRate) and 2 signal frequency f of Sine Modulated voltage signal meter
Calculate the data points of signal period modulated voltage signal, calculation formula are as follows:
Interference light intensity signal and modulated voltage signal that sampling length is 100000 are intercepted, attached drawing 2 is intercept signal signal.
5.2) the interference light intensity signal of interception is filtered twice, filter is using zero phase in Labview software
Filter.Be filtered into low-pass filter using low price for the first time, the forward coefficients of filter be length be 50, numerical value 0.02
Array, to filter out the burr above original signal and retain interference peaks location information, such as the imaginary point in attached drawing 3-1 and Fig. 3-2
Shown in line, it is denoted as I1.It is filtered into the low-pass filter using high-order for the second time, the forward coefficients of filter are that length is 500, counts
The array that value is 0.002 is calculated as I as shown in the dotted line in attached drawing 3-1 and Fig. 3-2 to obtain the baseline of interference peak-to-peak signal2。
5.3) ln (I is made to filtering signal twice2/I1) then operation utilizes with obtaining the interference peak-to-peak signal of high s/n ratio
Wave crest detection function in Labview software searches out the position of each interference peaks, as shown in Fig. 4.
5.4) modulated voltage signal of interception is fitted using the SIN function that frequency is 50kHz, fitting result are as follows:
U=0.4846sin (100000 π t+0.767684), in attached drawing 5 shown in (a) figure.
5.5) it changes over time curve to wavelength using the SIN function that frequency is 50kHz to be fitted, and digital simulation
Residual error.Fitting result are as follows: ν1=0.074302sin (100000 π t+3.134378), in attached drawing 5 shown in (b) figure.
5.6) regression criterion in step 5.5) is fitted using the SIN function that frequency is 100kHz, fitting result
It is denoted as: ν2=0.000751sin (200000 π t+3.839871), in attached drawing 5 shown in (c) figure.
5.7) a in calculation formula (2)1,a2,Specific algorithm and numerical value are as follows: a1=a1fitting=
0.074302cm-1；a2=a2fitting=0.000751cm-1；
Change modulation voltage amplitude or frequency, repeat the above steps, then the frequency that can measure laser modulation wavelength is rung
It answers and voltage responsive characteristic, as shown in Fig. 6-1, Fig. 6-2, Fig. 7-1 and Fig. 7-2.
Diode laser of the invention refers to the laser of wavelength continuously-tuning, as distributed feed-back (DFB) diode swashs
Light device, Vertical Cavity Surface transmitting (VCSEL) diode laser, exocoel tune (ECDL) diode laser, Bragg reflection
Diode laser and quanta cascade (QCL) laser etc..
The external modulation port of diode laser of the invention refers to the external modulation port on laser drive power.
Optical fibre ring etalon of the invention can be made by oneself by 2 × 2 fiber couplers, i.e., by an output of coupler
End connect to form annular chamber with an input terminal.
Low-pass filter of the invention refers to common some filter functions, such as zero-phase filtering in Digital Signal Processing
Device, iir filter, FIR filter, Savitzky Golay filter, Chebyshev filter, Butterworth filtering
Device, Bessel filter, median filter, smoothing filter etc..
Peak value recognition function of the invention refers to one of Digital Signal Processing algorithm, for identification in signal waveform
Peak value.Common algorithm has threshold method, window technique, height analysis method, wave f orm analysis method etc..Programming language can also be used
Wave crest detection function in power function, such as Labview software.
Free Spectral Range (Free Spectral Range, FSR) of the invention refers to the adjacent dry of interference light intensity signal
Relate to the wavelength difference between peak.For annular chamber, light is in intracavitary one way propagation, Free Spectral Range (unit cm-1) calculation formula
It is the refractive index of medium in optics cavity for FSR=1/nL, n, L is that the chamber of optics cavity is long.Regression criterion of the invention refers to measurement
Difference between numerical value and fitted data.
Claims (7)
1. the diode laser dynamic wavelength measuring device under a kind of wavelength modulation case, it is characterised in that: including etalon
(5), photodetector (6), signal generator (1) and data acquisition process equipment (7)；
The signal generator (1) connect with the external modulation port of diode laser (3), generates Sine Modulated voltage signal,
It is modulated for the output wavelength to diode laser (3)；
The input terminal of the etalon (5) is connected with the exit end of diode laser (3), for generating interference light intensity letter
Number；
The photodetector (6) connect with the output end of etalon (5), converts voltage signal for the received optical signal of institute；
The data acquisition process equipment (7) connect with photodetector (6) and signal generator (1), and synchronous recording photoelectricity is visited
The Sine Modulated voltage signal that the interference light intensity signal and signal generator for surveying device detection generate, and according to interference light intensity signal and
Sine Modulated voltage signal calculates diode laser dynamic wavelength.
2. according to the diode laser dynamic wavelength measuring device under wavelength modulation case described in right 1, it is characterised in that:
The etalon (5) is optical fibre ring etalon, and the optical fibre ring etalon is made of 2 × 2 fiber couplers, 2 × 2
Fiber coupler includes two input ports and two output ports, and one of input port and an output port connect,
Input terminal of another input port as optical fibre ring etalon, output of the another output as optical fibre ring etalon
End.
3. the diode laser dynamic wavelength measuring device under wavelength modulation case according to claim 1 or 2, special
Sign is:
The photodetector (6) is the DET 10D/M type detector of Throlabs company production；The data acquisition process is set
Standby (7) use the M4i-2212 type data collecting card of Spectrum company production.
4. using the diode laser dynamic wavelength measuring device under any wavelength modulation case of claim 1-3 into
The method of Mobile state wavelength measurement, which comprises the following steps:
1) static working current and operating temperature for adjusting diode laser (3), so that laser Static output wavelength and reality
Application demand is consistent；
2) frequency is generated using signal generator (1) and be the Sine Modulated voltage signal of f, and the signal is connected to diode and is swashed
The external modulation port of light device (3) is modulated laser passive wave length；
3) etalon (5) are input to through the modulated laser signal of wavelength, then the laser intensity across etalon (5) will appear week
The variation of phase property, is denoted as interference light intensity signal；
4) voltage signal is converted by interference light intensity signal using photodetector (6), and same with data acquisition process equipment (7)
The step record interference light intensity signal voltage signal converted and the Sine Modulated voltage signal generated by signal generator；
5) data processing
5.1) interception sampling length is greater than the interference light intensity signal and modulated voltage signal of a Sine Modulated voltage signal cycles；
5.2) it first filters out the burr above the interference light intensity signal of interception using low-pass filter and retains interference peaks location information,
Filtered signal is I1；
The low-pass filter for using high-order again, obtains the interference peaks signal base line of the interference light intensity signal of interception, filtered letter
Number it is denoted as I2；
5.3) ln (I is made to filtering signal twice2/I1) operation, the interference peak-to-peak signal of high s/n ratio is obtained, identifies letter using peak value
Number searches out the position of each interference peaks；
5.4) according to the wavelength change trend between the Free Spectral Range of etalon, interference peak position and adjacent interference peaks, instead
It drills calculating wavelength and changes over time curve；
5.5) it is fitted
5.5.1) the Sine Modulated voltage signal of interception is fitted using the SIN function that frequency is f, fitting result is denoted as:F is the frequency of sinusoidal modulated voltage signal；
5.5.2 curve) is changed over time to wavelength using the SIN function that frequency is f to be fitted, and digital simulation residual error, intend
Result is closed to be denoted as:
5.5.3) using the SIN function that frequency is 2f to 5.5.2) regression criterion is fitted in step, and fitting result is denoted as:
6) calculation formulaIn a1,a2,
Specific algorithm are as follows: a1=a1fitting；a2=a2fitting；
5. the method for dynamic wavelength measurement according to claim 4, it is characterised in that:
The intercept method of interference light intensity signal and modulated voltage signal in step 5.1) are as follows:
According to data acquisition process equipment sample rate DAQRateSignal period modulation electricity is calculated with Sine Modulated voltage signal frequency f
Press the data points of signal, calculation formula are as follows:
Intercept interference light intensity signal and modulated voltage signal that sampling length is greater than N.
6. the method for dynamic wavelength measurement according to claim 5, it is characterised in that:
Low-pass filter in step 5.2) uses zero-phase filters, iir filter, FIR filter, Savitzky Golay
Filter, Chebyshev filter, Butterworth filter, Bessel filter, median filter or smoothing filter.
7. the method for dynamic wavelength measurement according to claim 6, it is characterised in that:
Peak value recognition function in step 5.3) uses threshold method, window technique, height analysis method or wave f orm analysis method.
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| CN201810907767.0A CN109186954B (en) | 2018-08-10 | 2018-08-10 | Diode laser dynamic wavelength measuring device and method under wavelength modulation condition |
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