CN109186864B - Vacuum standard leak with minimum leak rate - Google Patents
Vacuum standard leak with minimum leak rate Download PDFInfo
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- CN109186864B CN109186864B CN201810927607.2A CN201810927607A CN109186864B CN 109186864 B CN109186864 B CN 109186864B CN 201810927607 A CN201810927607 A CN 201810927607A CN 109186864 B CN109186864 B CN 109186864B
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- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/007—Leak detector calibration, standard leaks
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Abstract
The invention discloses a vacuum standard leak with extremely small leak rate, which comprises a gas pumping device, a pressure side support flange, a vacuum side support, a leak test end interface and a redundant gas pumping interface, wherein leaking gas is pressurized to a permeable material through a pressure side through hole in the middle of the pressure side support flange; and a third sealing ring mounting groove is processed on one side, facing the vacuum side support, of the pressure side support flange so as to fix a third sealing ring for sealing to prevent leakage gas from leaking from the edge of the permeable material. The invention can effectively reduce the influence of gas leaked from the edge of the permeable material on the leakage rate of the standard leak hole, reduce the uncertainty of leakage rate measurement and improve the reliability of hypersensitive leak detection.
Description
Technical Field
The invention belongs to the technical field of vacuum leak detection tools, and particularly relates to a standard leak with an extremely low leak rate, which can solve the standard problem of calibration in hypersensitive leak detection.
Background
With the continuous development of microelectronic technology, the size of components is smaller and smaller, the storage time of the components is long, the service life of the components is long, and the reliability of the components is high. The standard of the army in America (latest standard) MIL-STD-883J is a criterion for tightening a hybrid circuit with a higher grade, and V is less than 0.05cm3The rejection rate of the microelectronic component reaches 1.32 multiplied by 10-12Pa·m3And s. The US army standard MIL-STD-750F released in 9 months in 2010 re-specifies the qualified sealing criteria of electronic elements with different volumes and different service lives, wherein the qualified criteria of small-volume and long-service-life devices reach 6.0 multiplied by 10-13Pa·m3And s. The national military standard GJB548 in China is equivalent to the American military standard MIL-STD-883, and Chinese experts refer to the modification of the American military standardThe military standard is revised to be 0.002cm in volume3～0.006cm3Within the range, the component qualification criterion of 2000 days of service life is 6 multiplied by 10-13Pa·m3And s. For example, a long-life microelectronic device for use in an infrared focal plane detector package is required to have a leakage rate of better than 3 x 10 due to its long life and small size-14Pa·m3S; vacuum electrostatic gyro with leakage rate superior to 1 x 10-14Pa·m3And s. In the existing leak detection technology, the leak detection method based on helium mass spectrometry is the highest in detection sensitivity.
The helium mass spectrometer leak detection method is mainly used for detecting the work with higher requirements on the tightness of a detected piece, so that the detection precision requirement is higher, and the detection result is reliable. Because the helium mass spectrometer leak detector can only give the current of the tracer gas, a standard leak hole is needed to calibrate the actual leak rate of the detected piece, so the standard leak hole is an essential measuring instrument in the fields of vacuum science and technology and application thereof, and the standard leak hole is similar to a weight of a balance. The mass spectrometer leak detector is equivalent to a balance in a leak detection system, and in order to avoid errors caused by the linearity of the leak detector, the deviation between the leak rate of a standard leak hole and the leak rate of a detected product is required to be not more than one order of magnitude in the leak detection process. At present, in an ultra-sensitivity sealing test, the leakage rate of a standard leak hole is more than three orders of magnitude greater than that of a tested product, and the uncertainty of a leak detection result is obviously improved. The lower limit of the standard leak hole used at present can only reach 10-10Pa.m3And/s, along with the continuous improvement of the sealing performance index of the microelectronic component, the influence of uncertainty caused by standard leak holes becomes more and more serious day by day.
To achieve extremely low known leak rates, the current method is to apply 1% He-99% N upstream of the orifice of the glass platinum wire2Mixed gases, i.e. in providing 10-15Pa·m3The 10 is introduced into the system at the same time of the flow rate of/s standard He-13Pa·m3N per s flow2Additional gas load is brought to the ultra-high vacuum obtaining system. Therefore, the scheme is generally only suitable for the small leakage rate leakage detection in the laboratory.
Accordingly, there is a need for a vacuum standard leak that provides a stable minimum leak rate.
Disclosure of Invention
The invention aims to provide a vacuum standard leak with a minimum leak rate, and provides a standard calibration device for realizing hypersensitive leak detection.
In order to realize the purpose of the invention, the vacuum standard leak hole with the minimum leak rate provided by the invention adopts the following technical scheme:
a vacuum standard leak with very small leak rate comprises a gas pumping device, a pressure side support flange, a vacuum side support, a leak test port and an excess gas pumping port, wherein the axis of the gas pumping device is of a through hole structure, the through hole structure of the gas pumping device is provided with a hollow space, the opposite sides of the gas pumping device are respectively provided with the pressure side support flange and the leak test port, the third side wall of the gas pumping device is provided with the excess gas pumping port communicated with the hollow space to pump excess gas, the leak test port is communicated with the through hole structure, one side of the gas pumping device opposite to the leak test port is provided with the vacuum side support, the leakage gas is pressurized to a permeable material through a pressure side through hole in the middle of the pressure side support flange, the circumference of the gas pumping device close to the vacuum side support is provided with a plurality of pumping small holes, one side of each pumping small hole is communicated with the internal hollow space structure, the other side of the small air exhaust hole is supported with a permeable material, and the flow conductance of the small air exhaust hole is far larger than that of the permeable material; the inner side sealing ring of the double-sealing ring is used for sealing the permeable material, and the outer side sealing ring is used for sealing the space between the outside and the small air exhaust hole so as to ensure that the hollow space is in a vacuum state; and a third sealing ring mounting groove is processed on one side, facing the vacuum side support, of the pressure side support flange so as to fix a third sealing ring for sealing to prevent leakage gas from leaking from the edge of the permeable material.
The third sealing ring and the double sealing ring have certain compression amount;
wherein, the small air-extracting holes are uniformly distributed on the circumference and used for extracting leakage-indicating gas leaked from the edge of the permeable material;
the small air exhaust holes are connected with the hollow space and can vacuumize the space between the two sealing rings;
wherein, the permeable material can be a microporous material;
the pressure side supporting flange is made of a compact material and has no permeability to gas;
wherein, the permeable material is a material indicating that the leakage gas can only pass through at a tiny flow rate, and the micropores can be artificially processed micropores.
Compared with the prior art, the standard leak with the minimum leak rate provided by the invention can effectively reduce the influence of gas leaked from the edges of the micropores or the permeable materials on the leak rate of the standard leak, reduce the uncertainty of leak rate measurement and improve the reliability of hypersensitive leak detection.
The invention has the advantages that:
1. the invention can obtain the leakage rate of less than 10-15The standard leak hole with the minimum leak rate of Pa.m 3/s has the advantage of very small leak rate;
2. the vacuum standard leak hole can effectively reduce gas leaked from the edges of micropores or permeable materials by the leakage-indicating gas, and can develop the standard leak hole with stable leak rate, extremely small leak rate value and low uncertainty.
Drawings
FIG. 1 is a schematic view of a standard leak having a minimum leak rate in an embodiment of the present invention;
FIG. 2 is a left side view of the gas evacuation device 5 in an embodiment of the present invention;
wherein, 1, a pressure side supporting flange; 2. a third seal ring; 3. a microporous or permeable material; 4. a vacuum side support; 5. a gas pumping device; 6. a leak testing end interface; 7. a gas leakage path; 8. a hollow space; 9. a surplus gas pumping interface; 10. a small air exhaust hole; 11. a double-sealing ring; 12. a pressure side through hole.
Detailed Description
The following is a description of the present invention, which is further illustrated by the following embodiments. The following detailed description, of course, is merely illustrative of various aspects of the invention and is not to be construed as limiting the scope of the invention.
Referring to fig. 1 and 2, the vacuum standard leak orifice with minimum leak rate of the present invention is formed by a pressure side support flange 1; a third seal ring 2; a microporous or permeable material 3; a vacuum side support 4; a gas pumping device 5; a leak test end interface 6; a gas leakage passage 7; a hollow space 8; an excess gas extraction port 9; an air exhaust small hole 10; the double-seal ring 11, wherein the gas leakage passage 7 and the leak hole test end interface 6 in the gas extraction device 5 are connected by a through hole, the through hole and the outer side surface of the gas extraction device 5 are in a hollow state, a circle of small air extraction holes 10 are processed on the circumference of one side of the gas extraction device 5 opposite to the leak hole test end interface, the small air extraction holes 10 are communicated with the hollow space 8 between the outer side surface of the gas extraction device 5 and the through hole, and the hollow space 8 is connected with the redundant gas extraction end interface 9. The leakage-indicating gas is pressurized to the micropores or the permeable materials 3 through the pressure side through holes 12 in the middle of the vacuum leak hole pressure side support 1, and because the conductance of the micropores is very small or the permeability of the permeable materials is very small, only very small flow passes through the effective permeation area of the micropores or the permeable materials 3, so that the leakage-indicating gas enters the leak hole test end interface 6 and is measured by a leak detector to form a standard leak hole with very small leak rate. The leakage-indicating gas is applied to the micropore or permeable material 3, the leakage-indicating gas cannot leak from the edge of the micropore or permeable material 3 due to the existence of the third sealing ring 2, if the gas leaks from the edge of the micropore or permeable material 3, the gas can enter the space between the double sealing rings 11, and the gas between the double sealing rings 11 can be pumped out by the small air pumping hole 10 on the gas pumping device 5, so that the vacuum state between the double sealing rings 11 is kept, and the leakage-indicating gas is ensured to only pass through the effective permeation area of the micropore or permeable material 3. The inboard sealing washer of two sealing washer 11 can guarantee that the leakage-indicating gas passes through the back through micropore or the effective area of infiltration material 3, and is all measured by small opening test end interface 6, and the leakage-indicating gas that leaks from micropore or 3 edges of infiltration material is all taken out by unnecessary gas pump-out end interface 9, and the outer sealing washer has ensured the vacuum state between two sealing washer 11 to and the outside environment gas of small opening can not get into inside the small opening.
Although particular embodiments of the present invention have been described and illustrated in detail, it should be understood that various equivalent changes and modifications can be made by those skilled in the art based on the concept of the present invention, and the resulting functional effects should be within the scope of the present invention without departing from the spirit covered by the specification and the accompanying drawings.
Claims (6)
1. A vacuum standard leak with very small leak rate comprises a gas pumping device, a pressure side support flange, a vacuum side support, a leak test port and an excess gas pumping port, wherein the axis of the gas pumping device is of a through hole structure, the through hole structure of the gas pumping device is provided with a hollow space, the opposite sides of the gas pumping device are respectively provided with the pressure side support flange and the leak test port, the third side wall of the gas pumping device is provided with the excess gas pumping port communicated with the hollow space to pump excess gas, the leak test port is communicated with the through hole structure, one side of the gas pumping device opposite to the leak test port is provided with the vacuum side support, the leakage gas is pressurized to a permeable material through a pressure side through hole in the middle of the pressure side support flange, the circumference of the gas pumping device close to the vacuum side support is provided with a plurality of pumping small holes, one side of each pumping small hole is communicated with the internal hollow space structure, the other side of the small air exhaust hole is supported with a permeable material, the inner side sealing ring of the double-sealing ring is used for sealing the permeable material, and the outer side sealing ring is used for sealing the space between the outside and the small air exhaust hole to ensure that the hollow space is in a vacuum state; and a third sealing ring mounting groove is processed on one side, facing the vacuum side support, of the pressure side support flange so as to fix a third sealing ring for sealing to prevent leakage indicating gas from leaking from the edge of a permeable material, wherein the permeable material is a material indicating that the leakage indicating gas can only pass through at a tiny flow rate.
2. A vacuum standard leak having a very small leak rate as defined in claim 1, wherein the third seal ring and the dual seal ring have a compression amount.
3. A vacuum standard leak having very small leak rate as defined in claim 1, wherein said pumping apertures are uniformly distributed around the circumference for pumping the leak-indicating gas leaking from the edge of the permeable material.
4. A vacuum standard leak having very small leak rate as defined in claim 1, wherein said pumping orifice is connected to a hollow space capable of pumping a vacuum to the space between the dual seal rings.
5. The vacuum standard leak of very small leak rate as claimed in claim 1, wherein the penetrating material is a microporous material, and the micropores are artificially processed micropores.
6. A vacuum standard leak having a very small leak rate as defined in any of claims 1 to 5, wherein the pressure side support flange is made of a dense material and is impermeable to gases.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201810927607.2A CN109186864B (en) | 2018-08-15 | 2018-08-15 | Vacuum standard leak with minimum leak rate |
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| CN201810927607.2A CN109186864B (en) | 2018-08-15 | 2018-08-15 | Vacuum standard leak with minimum leak rate |
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| CN109186864B true CN109186864B (en) | 2020-05-26 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112284634B (en) * | 2020-10-27 | 2022-11-01 | 北京卫星环境工程研究所 | Standard leak based on graphene and preparation method |
| CN113532770B (en) * | 2021-07-26 | 2023-05-12 | 重庆工商大学 | Device and method for measuring micropore leakage of injection glass container |
| CN114018494B (en) * | 2021-10-27 | 2024-02-13 | 中广核检测技术有限公司 | Nuclear condenser tracing leakage detection equipment test simulation system and method |
| DE102022109454A1 (en) * | 2022-04-19 | 2023-10-19 | Inficon Gmbh | Test leak device |
| CN115931243B (en) * | 2022-11-29 | 2023-09-15 | 北京中科科仪股份有限公司 | Leak detection method, device, equipment and medium based on helium mass spectrometer leak detector |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JPH04194719A (en) * | 1990-11-28 | 1992-07-14 | Hitachi Ltd | Gas standard leak device |
| CN2171861Y (en) * | 1993-09-24 | 1994-07-13 | 清华大学 | Cutting ferrule joint type standard hole |
| CN105738038B (en) * | 2016-01-29 | 2018-05-18 | 合肥工业大学 | A kind of molecular flow referance leak and preparation method thereof |
| CN107543655B (en) * | 2016-07-29 | 2019-11-26 | 北京卫星环境工程研究所 | Graphene oxide referance leak and graphene oxide seep helium component |
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