CN109174819B - Microelectronic device dust collector - Google Patents
Microelectronic device dust collector Download PDFInfo
- Publication number
- CN109174819B CN109174819B CN201810979483.2A CN201810979483A CN109174819B CN 109174819 B CN109174819 B CN 109174819B CN 201810979483 A CN201810979483 A CN 201810979483A CN 109174819 B CN109174819 B CN 109174819B
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- Prior art keywords
- box
- dust
- microelectronic device
- sides
- ion
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- 239000000428 dust Substances 0.000 title claims abstract description 125
- 238000004377 microelectronic Methods 0.000 title claims abstract description 50
- 238000010521 absorption reaction Methods 0.000 claims description 15
- 238000007789 sealing Methods 0.000 claims description 11
- 239000007779 soft material Substances 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 4
- 230000005611 electricity Effects 0.000 abstract description 4
- 230000003068 static effect Effects 0.000 abstract description 4
- RSMUVYRMZCOLBH-UHFFFAOYSA-N metsulfuron methyl Chemical compound COC(=O)C1=CC=CC=C1S(=O)(=O)NC(=O)NC1=NC(C)=NC(OC)=N1 RSMUVYRMZCOLBH-UHFFFAOYSA-N 0.000 abstract description 3
- 239000012141 concentrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/02—Cleaning by the force of jets, e.g. blowing-out cavities
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/10—Cleaning by methods involving the use of tools characterised by the type of cleaning tool
- B08B1/12—Brushes
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B1/00—Cleaning by methods involving the use of tools
- B08B1/30—Cleaning by methods involving the use of tools by movement of cleaning members over a surface
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B15/00—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area
- B08B15/04—Preventing escape of dirt or fumes from the area where they are produced; Collecting or removing dirt or fumes from that area from a small area, e.g. a tool
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05F—STATIC ELECTRICITY; NATURALLY-OCCURRING ELECTRICITY
- H05F3/00—Carrying-off electrostatic charges
- H05F3/06—Carrying-off electrostatic charges by means of ionising radiation
Landscapes
- Health & Medical Sciences (AREA)
- General Health & Medical Sciences (AREA)
- Toxicology (AREA)
- Elimination Of Static Electricity (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a microelectronic device dust removal device which comprises a rectangular box, wherein the tops of the inner walls of two sides of the rectangular box are welded with the same conical box, the inner wall of the conical box is welded with a hollow cylinder, two sides of the hollow cylinder are respectively and fixedly provided with an ion generator and a dust collector, the inner wall of the conical box is welded with a circular plate, and the inner walls of two sides of the rectangular box are welded with the same transverse plate. The invention has simple structure, the ion generator can generate ion wind and blow the ion wind to the surface of the microelectronic device through the ion wind gun, the brush can brush off dust which cannot be blown off by the ion wind, and meanwhile, the dust collector sucks the dust through the dust collection head and the dust collection box, so that the ion wind gun can intensively blow the ion wind to the surface of the microelectronic device in a short distance, the static electricity removing effect is good, the dust collection head can suck off the dust which is removed from the microelectronic device by the brush and the ion wind gun in a short distance, the dust can be sucked off in time, secondary pollution is avoided, and the use is convenient.
Description
Technical Field
The invention relates to the technical field of microelectronic dust removal, in particular to a microelectronic device dust removal device.
Background
The invention with the publication number of CN206443651U discloses a dust removal device for microelectronic devices, which comprises a supporting circular plate, wherein an annular sleeve is arranged on the periphery of the supporting circular plate, a sleeve body of the annular sleeve is of a hollow structure, a plurality of vent holes are formed in the inner side of the sleeve body of the annular sleeve, the annular sleeve is connected with one end of a guide pipe, and the other end of the guide pipe is connected with a dust collector; an ion air gun is arranged in the middle of the supporting circular plate and is connected with an ion generator. According to the invention, the annular sleeve is buckled on the chip to form a relatively closed space, dust is sucked away by the vent holes on the periphery, the dust is prevented from falling, and the dust removal efficiency is improved. However, the ion wind of the microelectronic device dust collector is blown to the microelectronic device from the top by the fan, the distance is far, the ion wind blown to the surface of the microelectronic device is dispersed, the static electricity removing effect is poor, and the dust suction port is far away from the middle area of the microelectronic device, so that dust cannot be sucked away in time, and secondary pollution is caused.
Disclosure of Invention
The invention aims to solve the defects in the prior art and provides a dust removal device for a microelectronic device.
In order to achieve the purpose, the invention adopts the following technical scheme:
a microelectronic device dust removal device comprises a rectangular box, wherein the tops of the inner walls of two sides of the rectangular box are welded with the same conical box, the inner wall of the conical box is welded with a hollow cylinder, two sides of the hollow cylinder are respectively and fixedly provided with an ion generator and a dust collector, the inner wall of the conical box is welded with a circular plate, the inner walls of two sides of the rectangular box are welded with the same transverse plate, one side of the transverse plate is connected with a movable plate in a sliding manner, the inner walls of two sides of the rectangular box are respectively provided with a through hole, the through hole is positioned at one side of the transverse plate, the inner wall of the through hole is connected with an elastic rope in a sliding manner, one end of the elastic rope penetrates through the through hole and extends into the rectangular box, one ends of the two elastic ropes, which are close to each other, are respectively connected with two sides of the movable plate, the tops of the, fixed mounting has the fan in the reposition of redundant personnel box, the bottom of reposition of redundant personnel box and dust absorption box is fixed mounting respectively has ion air gun and the dust absorption head that a plurality of symmetries set up, ion air gun and dust absorption head are linked together with reposition of redundant personnel box and dust absorption box respectively, the top of reposition of redundant personnel box and dust absorption box is the first spring pipe of fixedly connected with and second spring pipe respectively, first spring pipe and second spring pipe are linked together with reposition of redundant personnel box and dust absorption box respectively, the top of first spring pipe and second spring pipe all runs through the circular slab and extends to the top of circular slab, the top of first spring pipe and second spring pipe is fixedly connected with ion tuber pipe and dust absorption pipe respectively, the top of ion tuber pipe and dust absorption pipe runs through hollow cylinder's both sides inner wall respectively and respectively with the air intake threaded connection of ion generator's air outlet and dust catcher.
Preferably, the bottom of the rectangular box is fixedly provided with a sealing strip, and the sealing strip is made of soft materials.
Preferably, a guide rail is welded on one side of the transverse plate, a sliding block is welded on one side of the moving plate, and the sliding block is connected with the guide rail in a sliding mode.
Preferably, the two elastic ropes are respectively and fixedly connected with a pull ring at one end far away from each other, and the pull rings are in contact with the rectangular box.
Preferably, the bottom of the moving plate is fixedly provided with a brush disc, and the bottom of the brush disc is fixedly provided with a brush.
Preferably, one side of the rectangular box is provided with a rectangular hole, and the inner wall of the rectangular hole is fixedly provided with a transparent window.
Compared with the prior art, the invention has the beneficial effects that: place microelectronic device in the rectangle box, the sealing strip can separate the rectangle box from the external world, start ion generator and dust catcher, ion generator can produce ion wind and blow into the reposition of redundant personnel box through ion tuber pipe and first spring pipe, the fan can blow ion wind to microelectronic device's surface through ion wind rifle, the pull ring can drive ion wind rifle and dust absorption head and carry out lateral shifting, and the movable plate can drive the brush and clear up microelectronic device's surface, the dust that can not blow off with ion wind brushes off, the dust catcher is siphoned away the dust through dust absorption head and dust absorption box simultaneously. The invention has simple structure, the ion generator can generate ion wind and blow the ion wind to the surface of the microelectronic device through the ion wind gun, the brush can brush off dust which cannot be blown off by the ion wind, and meanwhile, the dust collector sucks the dust through the dust collection head and the dust collection box, so that the ion wind gun can intensively blow the ion wind to the surface of the microelectronic device in a short distance, the static electricity removing effect is good, the dust collection head can suck off the dust which is removed from the microelectronic device by the brush and the ion wind gun in a short distance, the dust can be sucked off in time, secondary pollution is avoided, and the use is convenient.
Drawings
FIG. 1 is a schematic structural diagram of a dust removing apparatus for microelectronic devices according to the present invention;
FIG. 2 is a schematic structural view of a transverse plate of a microelectronic device dust removing apparatus according to the present invention;
FIG. 3 is a front view of a microelectronic device dust removal apparatus in accordance with the present invention;
FIG. 4 is a side view of a movable plate of a microelectronic device dust removal apparatus in accordance with the present invention;
fig. 5 is a side view of a diverter box of a microelectronic device dust removal apparatus in accordance with the present invention;
fig. 6 is a side view of a dust box of a microelectronic device dust removing apparatus according to the present invention.
In the figure: 1 sealing strip, 2 rectangular boxes, 3 elastic ropes, 4 guide rails, 5 transverse plates, 6 moving plates, 7 first spring tubes, 8 circular plates,
9 conical plates, 10 ion generators, 11 dust collectors, 12 dust collection pipes, 13 second spring pipes, 14 tension springs, 15 flow distribution boxes, 16 ion air guns, 17 brush discs, 18 dust collection heads, 19 dust collection boxes, 20 transparent windows, 21 hollow cylinders, 22 sliding blocks, 23 brushes and 24 ion air pipes.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Referring to fig. 1-6, a dust removing device for microelectronic devices comprises a rectangular box 2, wherein the top of the inner walls of two sides of the rectangular box 2 are welded with a same conical box 9, the inner wall of the conical box 9 is welded with a hollow cylinder 21, two sides of the hollow cylinder 21 are respectively fixedly provided with an ion generator 10 and a dust collector 11, the inner wall of the conical box 9 is welded with a circular plate 8, the inner walls of two sides of the rectangular box 2 are welded with a same transverse plate 5, one side of the transverse plate 5 is slidably connected with a moving plate 6, the inner walls of two sides of the rectangular box 2 are respectively provided with through holes, the through holes are positioned at two sides of the transverse plate 5, the inner walls of the through holes are slidably connected with elastic ropes 3, one ends of the elastic ropes 3 penetrate through the through holes and extend into the rectangular box 2, the mutually close ends of the two elastic ropes 3 are respectively connected, a flow distribution box 15 and a dust suction box 19 are respectively and fixedly installed on two sides of the moving plate 6, a fan is fixedly installed in the flow distribution box 15, a plurality of ion air guns 16 and dust suction heads 18 which are symmetrically arranged are respectively and fixedly installed at the bottoms of the flow distribution box 15 and the dust suction box 19, the ion air guns 16 and the dust suction heads 18 are respectively communicated with the flow distribution box 15 and the dust suction box 19, a first spring tube 7 and a second spring tube 13 are respectively and fixedly connected with the tops of the flow distribution box 15 and the dust suction box 19, the top ends of the first spring tube 7 and the second spring tube 13 penetrate through the circular plate 8 and extend to the upper part of the circular plate 8, an ion air pipe 24 and a dust suction pipe 12 are respectively and fixedly connected with the top ends of the first spring tube 7 and the second spring tube 13, the top ends of the ion air pipe 24 and the dust suction pipe 12 respectively penetrate through two sides of the hollow cylinder 21 and are respectively in threaded connection with an air outlet of the ion generator 10 and an air inlet of the dust collector 11, the microelectronic device is placed in the rectangular box 2, the rectangular box 2 can be separated from the outside by the sealing strip 1, the ion generator 10 and the dust collector 11 are started, the ion generator 10 can generate ion wind and blow the ion wind into the shunt box 15 through the ion wind pipe 24 and the first spring pipe 7, the fan can blow the ion wind to the surface of the microelectronic device through the ion wind gun 16, the pull ring can drive the ion wind gun 16 and the dust collection head 18 to move transversely, the moving plate 6 can drive the brush 23 to clean the surface of the microelectronic device, dust which cannot be blown off by the ion wind can be brushed off, meanwhile, the dust collector 11 sucks the dust through the dust collection head 18 and the dust collection box 19, the structure of the invention is simple, the ion generator 10 can generate the ion wind and blow the ion wind gun 16 to the surface of the microelectronic device, the brush 23 can brush off the dust which cannot be blown off by the ion wind, meanwhile, the dust collector 11 sucks the dust through the dust collection head 18 and the dust collection box 19, make ion wind rifle 16 can concentrate and closely blow the ion wind to the surface of microelectronic device on, the effectual that destatics, and dust collection head 18 can closely absorb away brush 23 and the dust that ion wind rifle 16 cleared away from microelectronic device, can in time absorb away the dust, avoid secondary pollution, convenient to use.
In the invention, a sealing strip 1 is fixedly arranged at the bottom of a rectangular box 2, the sealing strip 1 is made of soft material, a guide rail 4 is welded at one side of a transverse plate 5, a slide block 22 is welded at one side of a movable plate 6, the slide block 22 is in sliding connection with the guide rail 4, one ends of two elastic ropes 3, which are far away from each other, are fixedly connected with pull rings, the pull rings are in contact with the rectangular box 2, a brush disc 17 is fixedly arranged at the bottom of the movable plate 6, a brush 23 is fixedly arranged at the bottom of the brush disc 17, a rectangular hole is formed at one side of the rectangular box 2, a transparent window 20 is fixedly arranged on the inner wall of the rectangular hole, a microelectronic device is placed in the rectangular box 2, the rectangular box 2 can be separated from the outside by the sealing strip 1, an ion generator 10 and a dust collector 11 are started, the ion generator 10 can generate ion wind and blow the ion wind into a, the pull ring can drive the ion wind gun 16 and the dust collection head 18 to move transversely, the moving plate 6 can drive the hairbrush 23 to clean the surface of the microelectronic device, dust which cannot be blown off by ion wind can be brushed off, and meanwhile, the dust collector 11 sucks the dust through the dust collection head 18 and the dust collection box 19. the invention has simple structure, the ion generator 10 can generate ion wind and blow the ion wind to the surface of the microelectronic device through the ion wind gun 16, the hairbrush 23 can brush the dust which cannot be blown off by the ion wind, and simultaneously, the dust collector 11 sucks the dust through the dust collection head 18 and the dust collection box 19, so that the ion wind gun 16 can intensively blow the ion wind to the surface of the microelectronic device in a short distance, the static electricity removing effect is good, and the dust collected by the dust collection head 18 can suck the dust which is cleaned from the microelectronic device by the hairbrush 23 and the ion wind gun 16 in a short distance, the dust can be sucked away in time, is convenient to use.
The working principle is as follows: when the dust collector is used, a microelectronic device is placed in a rectangular box 2, the rectangular box 2 is separated from the outside by a sealing strip 1, outside air is prevented from entering the rectangular box 2, an ion generator 10 and a dust collector 11 are started, the ion generator 10 can generate ion wind and blow the ion wind into a shunting box 15 through an ion wind pipe 24 and a first spring pipe 7, a fan blows the ion wind to the surface of the microelectronic device through an ion wind gun 16, a pull ring is pulled to drive an elastic rope 3 to move transversely, the elastic rope 3 drives a movable plate 6 to move transversely, the movable plate 6 drives the ion wind gun 16 and a dust collection head 18 to move transversely, the movable plate 6 drives a brush 23 to move transversely, the brush 23 can clean the surface of the microelectronic device, dust which cannot be blown off by the ion wind can be brushed off, and meanwhile, the dust collector 11 sucks the dust away through the dust collection head 18 and a dust collection box 19, make ion wind rifle 16 can concentrate and closely blow the ion wind to the surface of microelectronic device on, the effectual that destatics, and dust collection head 18 can closely absorb away brush 23 and the dust that ion wind rifle 16 cleared away from microelectronic device, can in time absorb away the dust, avoid secondary pollution, convenient to use.
The above description is only for the preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any person skilled in the art should be considered to be within the technical scope of the present invention, and the technical solutions and the inventive concepts thereof according to the present invention should be equivalent or changed within the scope of the present invention.
Claims (6)
1. The microelectronic device dust removal device comprises a rectangular box (2) and is characterized in that the top of the inner walls of two sides of the rectangular box (2) is welded with the same conical box (9), the inner wall of the conical box (9) is welded with a hollow cylinder (21), two sides of the hollow cylinder (21) are respectively fixedly provided with an ion generator (10) and a dust collector (11), the inner wall of the conical box (9) is welded with a circular plate (8), the inner walls of two sides of the rectangular box (2) are welded with the same transverse plate (5), one side of the transverse plate (5) is slidably connected with a movable plate (6), the inner walls of two sides of the rectangular box (2) are respectively provided with a through hole, the through holes are positioned at two sides of the transverse plate (5), the inner wall of the through hole is slidably connected with an elastic rope (3), one end of the elastic rope (3) penetrates through the through hole and extends into the rectangular box (, the one end that two elasticity ropes (3) are close to each other is connected with the both sides of movable plate (6) respectively, the top of movable plate (6) and the bottom welding of circular slab (8) have same extension spring (14), the both sides of movable plate (6) fixed mounting respectively have branch flow box (15) and suction box (19), branch flow box (15) internal fixation has the fan, the bottom of branch flow box (15) and suction box (19) fixed mounting respectively has ion air gun (16) and dust absorption head (18) that a plurality of symmetries set up, ion air gun (16) and dust absorption head (18) are linked together with branch flow box (15) and suction box (19) respectively, the top of branch flow box (15) and suction box (19) is fixedly connected with first spring pipe (7) and second spring pipe (13) respectively, first spring pipe (7) and second spring pipe (13) are linked together with branch flow box (15) and suction box (19) respectively, the top of first spring pipe (7) and second spring pipe (13) all runs through circular slab (8) and extends to the top of circular slab (8), the top of first spring pipe (7) and second spring pipe (13) is fixedly connected with ion tuber pipe (24) and dust absorption pipe (12) respectively, the top of ion tuber pipe (24) and dust absorption pipe (12) run through the both sides inner wall of hollow cylinder (21) respectively and respectively with the air outlet of ion generator (10) and the air intake threaded connection of dust catcher (11).
2. The microelectronic device dust removal apparatus according to claim 1, wherein a sealing strip (1) is fixedly mounted at the bottom of the rectangular box (2), and the sealing strip (1) is made of a soft material.
3. The microelectronic device dust removal device according to claim 1, characterized in that a guide rail (4) is welded to one side of the transverse plate (5), a slider (22) is welded to one side of the moving plate (6), and the slider (22) is slidably connected with the guide rail (4).
4. The microelectronic device dust removal apparatus according to claim 1, characterized in that the ends of the two elastic strings (3) that are away from each other are fixedly connected with pull rings, and the pull rings are in contact with the rectangular box (2).
5. The microelectronic device dust removing apparatus according to claim 1, characterized in that a brush disc (17) is fixedly mounted at the bottom of the moving plate (6), and a brush (23) is fixedly mounted at the bottom of the brush disc (17).
6. The microelectronic device dust removal apparatus according to claim 1, wherein a rectangular hole is opened at one side of the rectangular box (2), and a transparent window (20) is fixedly installed on an inner wall of the rectangular hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810979483.2A CN109174819B (en) | 2018-08-23 | 2018-08-23 | Microelectronic device dust collector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201810979483.2A CN109174819B (en) | 2018-08-23 | 2018-08-23 | Microelectronic device dust collector |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109174819A CN109174819A (en) | 2019-01-11 |
| CN109174819B true CN109174819B (en) | 2020-04-17 |
Family
ID=64916115
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201810979483.2A Active CN109174819B (en) | 2018-08-23 | 2018-08-23 | Microelectronic device dust collector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109174819B (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111822442B (en) * | 2020-06-10 | 2023-04-14 | 珠海恒格微电子装备有限公司 | Electrostatic dust collector with ion air nozzle |
| CN111822404A (en) * | 2020-06-18 | 2020-10-27 | 蔡海勇 | Coiled material class substrate drenches membrane production facility |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1587983A (en) * | 1977-03-16 | 1981-04-15 | Matsushita Electric Ind Co Ltd | Electronic air cleaner |
| CN102599848A (en) * | 2012-02-27 | 2012-07-25 | 吴华 | Dust collector for microelectronic device |
| CN205128517U (en) * | 2015-11-02 | 2016-04-06 | 群光电子(苏州)有限公司 | Online ion electrostatic precipitator machine |
| CN206443651U (en) * | 2016-10-10 | 2017-08-29 | 邱风 | Dust collector for microelectronic device |
| CN107598417B (en) * | 2017-08-23 | 2019-04-23 | 日照福瑞德科技有限公司 | A kind of microelectronic component precision spot welder |
| CN107757101A (en) * | 2017-10-29 | 2018-03-06 | 陈雪峰 | A kind of printing equipment Destaticizing device |
-
2018
- 2018-08-23 CN CN201810979483.2A patent/CN109174819B/en active Active
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| Publication number | Publication date |
|---|---|
| CN109174819A (en) | 2019-01-11 |
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