CN109173384A - A method of reducing line cutting processing breakage ratio - Google Patents
A method of reducing line cutting processing breakage ratio Download PDFInfo
- Publication number
- CN109173384A CN109173384A CN201811104227.5A CN201811104227A CN109173384A CN 109173384 A CN109173384 A CN 109173384A CN 201811104227 A CN201811104227 A CN 201811104227A CN 109173384 A CN109173384 A CN 109173384A
- Authority
- CN
- China
- Prior art keywords
- mortar
- filter
- support plate
- cutting processing
- line cutting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 36
- 238000000034 method Methods 0.000 title claims abstract description 19
- 238000012545 processing Methods 0.000 title claims abstract description 19
- 239000004570 mortar (masonry) Substances 0.000 claims abstract description 82
- 230000008676 import Effects 0.000 claims abstract description 13
- 238000003860 storage Methods 0.000 claims abstract description 9
- 230000007246 mechanism Effects 0.000 claims description 40
- 230000006835 compression Effects 0.000 claims description 27
- 238000007906 compression Methods 0.000 claims description 27
- 239000002184 metal Substances 0.000 claims description 23
- 239000004677 Nylon Substances 0.000 claims description 22
- 238000002386 leaching Methods 0.000 claims description 22
- 229920001778 nylon Polymers 0.000 claims description 22
- 238000007789 sealing Methods 0.000 claims description 16
- 230000002093 peripheral effect Effects 0.000 claims description 5
- 239000004576 sand Substances 0.000 claims description 3
- 238000012360 testing method Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 2
- 238000009955 starching Methods 0.000 claims 1
- 238000005516 engineering process Methods 0.000 abstract description 3
- 239000004065 semiconductor Substances 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000001914 filtration Methods 0.000 description 3
- 238000009434 installation Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 3
- 239000010703 silicon Substances 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 101100041681 Takifugu rubripes sand gene Proteins 0.000 description 2
- 238000013459 approach Methods 0.000 description 2
- 238000001574 biopsy Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000005457 optimization Methods 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000013078 crystal Substances 0.000 description 1
- 239000002173 cutting fluid Substances 0.000 description 1
- 235000013399 edible fruits Nutrition 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/11—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with bag, cage, hose, tube, sleeve or like filtering elements
- B01D29/31—Self-supporting filtering elements
- B01D29/35—Self-supporting filtering elements arranged for outward flow filtration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/11—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with bag, cage, hose, tube, sleeve or like filtering elements
- B01D29/13—Supported filter elements
- B01D29/23—Supported filter elements arranged for outward flow filtration
- B01D29/27—Filter bags
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D29/00—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor
- B01D29/50—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition
- B01D29/56—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition in series connection
- B01D29/58—Filters with filtering elements stationary during filtration, e.g. pressure or suction filters, not covered by groups B01D24/00 - B01D27/00; Filtering elements therefor with multiple filtering elements, characterised by their mutual disposition in series connection arranged concentrically or coaxially
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D35/00—Filtering devices having features not specifically covered by groups B01D24/00 - B01D33/00, or for applications not specifically covered by groups B01D24/00 - B01D33/00; Auxiliary devices for filtration; Filter housing constructions
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Sampling And Sample Adjustment (AREA)
Abstract
The present invention relates to semiconductor processing technology fields.A method of reducing line cutting processing breakage ratio, the mortar import of cutter room is connected with the discharge port of a mortar filter, the mortar outlet of cutter room is connected with a mortar storage tank, the discharge port of mortar storage tank is connected with a centrifugal pump inlet, and outlet of centrifugal pump is connected with the feed inlet of mortar filter.This patent is the filtered mortar of mortar filter by the mortar for introducing cutter room, avoids the disconnection problem in cutting process caused by bulky grain, cutting quality is effectively guaranteed.Mortar filter is installed by the mortar import in cutter room, the yield of product has been increased to 99.4% from 99.3%.Breakage ratio is reduced to 1% from original 2%.
Description
Technical field
The present invention relates to semiconductor processing technology fields, and in particular to cutting method.
Background technique
The free cutting technique of Multi-wire wafer is silicon wafer cutting technique relatively common at present, its basic principle is to pass through height
The steel wire of speed movement drives the mortar being attached on steel wire to rub silicon rod, to achieve the effect that cutting.
Mortar is reconciled by a certain percentage by cutting fluid and GC powder, because considering cost problem, so at present in the industry
Particle loaded fluid all recycles, by useful recycling of encouraging after mortar recovery system, recycling, during this because
Cutting crystal bar, which has different size of Si powder, impurity, bulky grain etc., can enter in mortar recovery system, affect cutting for mortar
Ability is cut, will cause the influence and risk of following several respects: 1) bulky grain be easy to cause broken string, influences silicon wafer surface state, causes
Yield；2) cutting power for reducing mortar be easy to cause warpage, stria.
Summary of the invention
In view of the problems of the existing technology, the present invention provides a kind of method for reducing line cutting processing breakage ratio,
To solve at least one above-mentioned technical problem.
The technical scheme is that a kind of method for reducing line cutting processing breakage ratio, which is characterized in that cutter
The mortar import of room is connected with the discharge port of a mortar filter, the mortar outlet of the cutter room and a mortar storage tank phase
Even, the discharge port of the mortar storage tank is connected with a centrifugal pump inlet, the outlet of centrifugal pump and the mortar filter
Feed inlet is connected.
This patent is the filtered mortar of mortar filter by the mortar for introducing cutter room, avoids bulky grain and makes
At cutting process in disconnection problem, cutting quality is effectively guaranteed.
Mortar filter is installed by the mortar import in cutter room, the yield of product is increased to from 99.3%
99.4%.Breakage ratio is reduced to 1% from original 2%.
The mortar filter includes the tank body of upper opening and the filter chamber that top cover surrounds, and is opened above the tank body
Equipped with a feed inlet, the bottom of the tank body offers a discharge port；
One filter mechanism is installed in the tank body, the filter mechanism setting the feed inlet and the discharge port it
Between,
The filter mechanism includes circular support plate, nylon leaching net and is arranged in nylon leaching net peripheral metal strainer；
Using the central opening of the support plate as the import of filter mechanism, the peripheral of the support plate is set between the inner wall of the tank body
There is a sealing structure, the nylon leaching net is connected with support plate with the upper end of the metal screen；
The mortar filter further includes an installing mechanism, and the installing mechanism includes spring, a compression bar and strip
Connection sheet, the lower section of the support plate are connected with the filter mechanism；
The both ends of the connection sheet are fixedly connected with the radial both ends of the support plate respectively；
The lower end of the spring is connected with the center of the connection sheet, and the upper end of the spring is connected with the compression bar, institute
The opposite side for stating the inner wall of tank body is equipped with one for being inserted into the plug connector at compression bar both ends, offers and the pressure on the plug connector
The socket that boom end matches.
This patent is easy to implement the detachable of filter mechanism by the structure of optimization mortar filter, convenient for guaranteeing filtering
Effect, successively approach nylon leaching net is exported with after metal screen from discharge port mortar after feed inlet.It is directed to different filterings
Demand replaces different filter mechanisms.And then line cutting processing breakage ratio is reduced, guarantee cutting effect.
The installation steps of filter mechanism are that filter mechanism is put into tank body first, then by pressing spring under compression bar, and
By on the both ends insertion plug connector of compression bar, the fixation of compression bar is realized, and then realize the fixation of filter mechanism.
Rotation compression bar is first passed through headed by the removal step of filter mechanism, and then realizes that compression bar is detached from from plug connector, then
Filter mechanism is pulled out from tank body.
The sealing structure includes the restriction protrusion that a limitation filter mechanism moves down, and the restriction protrusion is arranged in the tank
The inner wall of body, the upper end of the restriction protrusion and the lower surface of the support plate offset；
The sealing structure further includes a sealing ring, and the top of the restriction protrusion is arranged in the sealing ring.
By sealing structure, prevent mortar from flowing out between support plate and the inner tank wall.
The nylon leaching net is the bag shaped structure of upper end opening, and the open end of the nylon leaching net is fixed with an elastic ring
Body, the inside of the support plate are equipped with the flange for being inserted in elastic circle body；
The metal screen is the metal cover body of upper end opening, offers mesh, the metal cap in the metal cover body
The upper end of body is weldingly connected with the support plate.
It is easy to implement the replacement of nylon leaching net, in addition, being easy to implement the support to nylon leaching net by metal cover body and protecting
Shield.
One is equipped on the top cover for detecting the pressure test device of the air pressure in filter.Convenient for knowing whether have
The excessively high problem of internal pressure caused by nylon leaching net blocks occurs, convenient for the detection of the working condition to device entirety.
An air inlet is also provided on the top cover, the air inlet is equipped with a valve.Convenient for being imported by air inlet
Gas, and then realize internal increase, improve the water conservancy diversion speed of mortar.
Support leg is fixed on the outer wall of the tank body.It is easy to implement the support to tank body, is conducive to discharge port export sand
Slurry.
Mortar filter is mounted on a cart.It is easy to implement the carrying of mortar filter.
The discharge port of the mortar filter is connected with the mortar import of biopsy chamber.Convenient for big in the mortar of import slices room
Granule foreign filters out.
The periphery of the tank body is equipped with a jacketed type exchanger.Convenient for guaranteeing the thermostatic control of mortar, guarantee mortar
Viscosity advantageously ensures that cutting effect.The temperature of mortar is controlled at 24 DEG C ± 0.5 DEG C by jacketed type exchanger.It is verified
At such a temperature, the viscosity of mortar is best suited for cutting.Viscosity at this time is 2.0dPa.s or so.
The section of the spring is rectangle.Compression convenient for compression bar to spring.
Detailed description of the invention
Fig. 1 is the cross-sectional view of mortar filter of the invention；
Fig. 2 is that mortar filter of the invention is mounted on a kind of structural schematic diagram on cart；
Fig. 3 is mortar filter-portion top view of the invention；
Fig. 4 is the breakage ratio variation diagram before and after use of the present invention.
In figure: 1 is mortar filter, and 11 be feed inlet, and 12 be discharge port, and 13 be metal screen, and 14 be nylon leaching net, 15
It is spring for position-limit mechanism, 16,17 plug connectors, 18 be compression bar, and 19 be support plate, and 20 be connection sheet.
Specific embodiment
Following further describes the present invention with reference to the drawings.
A method of line cutting processing breakage ratio being reduced, the mortar import of cutter room goes out with a mortar filter
Material mouth is connected, and the mortar outlet of cutter room is connected with a mortar storage tank, the discharge port of mortar storage tank and a centrifugal pump inlet
It is connected, outlet of centrifugal pump is connected with the feed inlet of mortar filter.This patent is mortar by the mortar for introducing cutter room
The filtered mortar of filter, avoids the disconnection problem in cutting process caused by bulky grain, and cutting matter is effectively guaranteed
Amount.Mortar filter is installed by the mortar import in cutter room, the yield of product has been increased to 99.4% from 99.3%.It is disconnected
Line rate is reduced to 1% from original 2%.Referring to fig. 4, it is shown that board breakage ratio trend chart before and after installation filter.
Start 2 months in 2018 that filter is installed.
A rabbling mechanism is equipped in mortar storage tank.Guarantee the mixed effect of mortar.
Referring to Fig. 1, Fig. 2 and Fig. 3, the filter chamber that tank body and top cover of the mortar filter 1 including upper opening surround,
A feed inlet 11 is offered above tank body, the bottom of tank body offers a discharge port 12, is equipped with a filter mechanism in tank body,
Filter mechanism is arranged between feed inlet 11 and discharge port 12, which is characterized in that filter mechanism includes circular support plate 19, Buddhist nun
Imperial strainer 14 and setting are in 14 peripheral metal strainer 13 of nylon leaching net；Using the central opening of support plate 19 as filter mechanism into
Mouthful, a sealing structure, the upper end of nylon leaching net 14 and metal screen 13 are equipped between the periphery of support plate 19 and the inner wall of tank body
It is connected with support plate 19；Mortar filter 1 further includes an installing mechanism, installing mechanism include spring 16, a compression bar 18 and
The connection sheet 20 of strip, the lower section of support plate 19 are connected with filter mechanism；The both ends of connection sheet 20 diameter with support plate 19 respectively
It is fixedly connected to both ends；The lower end of spring 16 is connected with the center of connection sheet, and the upper end of spring 16 is connected with compression bar 18, tank body
The opposite side of inner wall be equipped with one for being inserted into the plug connector 17 at 18 both ends of compression bar, offered and 18 end of compression bar on plug connector 17
The socket to match.This patent is easy to implement the detachable of filter mechanism by the structure of optimization mortar filter 1, convenient for protecting
Filter effect is demonstrate,proved, successively approach nylon leaching net 14 is exported with after metal screen 13 from discharge port 12 mortar after feed inlet 11.Needle
For different filtration needs, different filter mechanisms is replaced.And then line cutting processing breakage ratio is reduced, guarantee cutting effect
Fruit.Feed inlet is higher than support plate.The lower ending opening of socket, and the adjacent side of two plug connectors is also open.Convenient for compression bar from down toward
On be plugged in socket.
The installation steps of filter mechanism are that filter mechanism is put into tank body first, then by pressing spring under compression bar, and
By on the both ends insertion plug connector of compression bar, the fixation of compression bar is realized, and then realize the fixation of filter mechanism.
Rotation compression bar is first passed through headed by the removal step of filter mechanism, and then realizes that compression bar is detached from from plug connector, then
Filter mechanism is pulled out from tank body.
Sealing structure includes the restriction protrusion 15 that a limitation filter mechanism moves down, and restriction protrusion 15 is arranged in tank body
Wall, the upper end of restriction protrusion and the lower surface of support plate 19 offset；Sealing structure further includes a sealing ring, and sealing ring setting is limiting
The top of position protrusion.By sealing structure, prevent mortar from flowing out between support plate 19 and inner tank wall.
Nylon leaching net 14 is the bag shaped structure of upper end opening, and the open end of nylon leaching net 14 is fixed with an elastic circle body, branch
The inside of fagging 19 is equipped with the flange for being inserted in elastic circle body；Metal screen 13 is the metal cover body of upper end opening, metal cap
Mesh is offered on body, upper end and the support plate 19 of metal cover body are weldingly connected.It is easy to implement the replacement of nylon leaching net 14, this
Outside, by metal cover body, it is easy to implement the protection of the support to nylon leaching net 14.
One is equipped on top cover for detecting the pressure test device of the air pressure in filter.Convenient for knowing whether there is generation
The excessively high problem of internal pressure caused by nylon leaching net 14 blocks, convenient for the detection of the working condition to device entirety.
An air inlet is also provided on top cover, air inlet is equipped with a valve.Convenient for importing gas by air inlet, in turn
It realizes internal increase, improves the water conservancy diversion speed of mortar.
Support leg is fixed on the outer wall of tank body.It is easy to implement the support to tank body, is conducive to discharge port export mortar.Sand
Slurry filter is mounted on a cart.It is easy to implement the carrying of mortar filter.
The discharge port of mortar filter is connected with the mortar import of biopsy chamber.Convenient for bulky grain in the mortar of import slices room
Impurity filters out.
The periphery of tank body is equipped with a jacketed type exchanger.Convenient for the thermostatic control of guarantee mortar, guarantee the viscosity of mortar,
Advantageously ensure that cutting effect.The temperature of mortar is controlled at 24 DEG C ± 0.5 DEG C by jacketed type exchanger.It is verified in the temperature
Under degree, the viscosity of mortar is best suited for cutting.Viscosity at this time is 2.0dPa.s or so.
The section of spring is rectangle.Compression convenient for compression bar to spring.
The above is only the preferred embodiment of the present invention, it is noted that those skilled in the art are come
It says, various improvements and modifications may be made without departing from the principle of the present invention, these improvements and modifications also should be regarded as
Protection scope of the present invention.
Claims (9)
1. a kind of method for reducing line cutting processing breakage ratio, which is characterized in that the mortar import of cutter room and a mortar
The discharge port of filter is connected, and the mortar outlet of the cutter room is connected with a mortar storage tank, and the mortar storage tank goes out
Material mouth is connected with a centrifugal pump inlet, and the outlet of centrifugal pump is connected with the feed inlet of the mortar filter.
2. a kind of method for reducing line cutting processing breakage ratio according to claim 1, it is characterised in that: the sand
Starching filter includes the tank body of upper opening and the filter chamber that top cover surrounds, and offers a feed inlet above the tank body,
The bottom of the tank body offers a discharge port；
One filter mechanism is installed in the tank body, the filter mechanism is arranged between the feed inlet and the discharge port,
The filter mechanism includes circular support plate, nylon leaching net and is arranged in nylon leaching net peripheral metal strainer；With institute
The central opening for stating support plate is the import of filter mechanism, and the peripheral of the support plate is equipped with one between the inner wall of the tank body
Sealing structure, the nylon leaching net are connected with support plate with the upper end of the metal screen；
The mortar filter further includes an installing mechanism, and the installing mechanism includes the connection of spring, a compression bar and strip
Piece, the lower section of the support plate are connected with the filter mechanism；
The both ends of the connection sheet are fixedly connected with the radial both ends of the support plate respectively；
The lower end of the spring is connected with the center of the connection sheet, and the upper end of the spring is connected with the compression bar, the tank
The opposite side of the inner wall of body is equipped with one for being inserted into the plug connector at compression bar both ends, offers and the compression bar end on the plug connector
The socket that portion matches.
3. a kind of method for reducing line cutting processing breakage ratio according to claim 2, it is characterised in that: described close
Seal structure includes the restriction protrusion that a limitation filter mechanism moves down, and the inner wall of the tank body is arranged in the restriction protrusion, described
The upper end of restriction protrusion and the lower surface of the support plate offset；
The sealing structure further includes a sealing ring, and the top of the restriction protrusion is arranged in the sealing ring.
4. a kind of method for reducing line cutting processing breakage ratio according to claim 2, it is characterised in that: the Buddhist nun
Imperial strainer is the bag shaped structure of upper end opening, and the open end of the nylon leaching net is fixed with an elastic circle body, the support plate
Inside is equipped with the flange for being inserted in elastic circle body；
The metal screen is the metal cover body of upper end opening, offers mesh in the metal cover body, the metal cover body
Upper end is weldingly connected with the support plate.
5. a kind of method for reducing line cutting processing breakage ratio according to claim 2, it is characterised in that: the top
It covers and is equipped with one for detecting the pressure test device of the air pressure in filter.
6. a kind of method for reducing line cutting processing breakage ratio according to claim 2, it is characterised in that: the top
It covers and is also provided with an air inlet, the air inlet is equipped with a valve.
7. a kind of method for reducing line cutting processing breakage ratio according to claim 2, it is characterised in that: the tank
Support leg is fixed on the outer wall of body.
8. a kind of method for reducing line cutting processing breakage ratio according to claim 2, it is characterised in that: the tank
The periphery of body is equipped with a jacketed type exchanger.
9. a kind of method for reducing line cutting processing breakage ratio according to claim 2, it is characterised in that: the bullet
The section of spring is rectangle.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811104227.5A CN109173384A (en) | 2018-09-21 | 2018-09-21 | A method of reducing line cutting processing breakage ratio |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811104227.5A CN109173384A (en) | 2018-09-21 | 2018-09-21 | A method of reducing line cutting processing breakage ratio |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109173384A true CN109173384A (en) | 2019-01-11 |
Family
ID=64908955
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811104227.5A Pending CN109173384A (en) | 2018-09-21 | 2018-09-21 | A method of reducing line cutting processing breakage ratio |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109173384A (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006121319A1 (en) * | 2005-05-13 | 2006-11-16 | Julian Benavides Terrazas | Washable, non-disposable ecological filter |
| CN204076543U (en) * | 2014-09-05 | 2015-01-07 | 中卫市银阳新能源有限公司 | A kind of mortar generated in silicon chip cutting circulatory system |
| CN206493460U (en) * | 2017-02-21 | 2017-09-15 | 嘉兴融茂精密机械有限公司 | A kind of mortar filtering apparatus of silicon chip cutter |
| CN206499933U (en) * | 2017-02-12 | 2017-09-19 | 东莞市跨越电子有限公司 | A kind of filter Fast Installation structure |
| CN207349206U (en) * | 2017-10-09 | 2018-05-11 | 泰州市沿江电子机械制造有限公司 | A kind of convenient for anpicking and washing hydraulic oil filter |
-
2018
- 2018-09-21 CN CN201811104227.5A patent/CN109173384A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006121319A1 (en) * | 2005-05-13 | 2006-11-16 | Julian Benavides Terrazas | Washable, non-disposable ecological filter |
| CN204076543U (en) * | 2014-09-05 | 2015-01-07 | 中卫市银阳新能源有限公司 | A kind of mortar generated in silicon chip cutting circulatory system |
| CN206499933U (en) * | 2017-02-12 | 2017-09-19 | 东莞市跨越电子有限公司 | A kind of filter Fast Installation structure |
| CN206493460U (en) * | 2017-02-21 | 2017-09-15 | 嘉兴融茂精密机械有限公司 | A kind of mortar filtering apparatus of silicon chip cutter |
| CN207349206U (en) * | 2017-10-09 | 2018-05-11 | 泰州市沿江电子机械制造有限公司 | A kind of convenient for anpicking and washing hydraulic oil filter |
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| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| TA01 | Transfer of patent application right |
Effective date of registration: 20191223 Address after: 200444 Building 1, No. 181, Shanlian Road, Baoshan District, Shanghai Applicant after: Shanghai xinxinjingyuan Semiconductor Technology Co., Ltd Applicant after: Hangzhou Zhongxin Wafer Semiconductor Co., Ltd. Address before: 200444 Baoshan District, Baoshan City Industrial Park Road, No., Hill Road, No. 181 Applicant before: Shanghai Shenhe Thermo-magenetic Electronic Co., Ltd. Applicant before: Hangzhou Zhongxin Wafer Semiconductor Co., Ltd. |
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| TA01 | Transfer of patent application right | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20190111 |
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| WD01 | Invention patent application deemed withdrawn after publication |